Internal saturation detection method, device and equipment of porous suction cup and storage medium

Abstract

The invention discloses an internal saturation detection method, device and equipment of a porous suction cup and a storage medium, and belongs to the technical field of semiconductors, the method comprises the following steps: obtaining a porous suction cup in a brand new state, and collecting the vacuum degree K1 of the porous suction cup in the brand new state through a vacuum degree detection device; placing a glass slide on the porous suction cup in the brand new state, and collecting the vacuum degree K2 of the porous suction cup in the full-damage state after the glass slide is placed through a vacuum degree detection device; acquiring a to-be-detected porous sucker, and acquiring a vacuum degree K3 of the to-be-detected porous sucker in a detection state through a vacuum degree detection device; calculating an internal saturation state value F of the porous sucker to be detected; and according to the internal saturation state value F of the to-be-detected porous suction cup, the to-be-detected porous suction cup is pretreated. According to the internal saturation detection method of the porous suction cup, the calculation process is simple, data are visual, consumable loss is avoided, and the use state of the porous suction cup can be obtained in real time.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and in particular relates to an internal saturation detection method, device, equipment and storage medium of a porous suction cup. Background Art

[0002] In the semiconductor thinning process, in order to provide mechanical support for the wafer, temporary bonding technology is used to bond the glass carrier to the front of the wafer. After the semiconductor thinning process is completed, the glass carrier is separated from the wafer through debonding technology. This process requires the use of a porous suction cup to adsorb the back of the wafer to achieve the purpose of separating the glass carrier from the wafer.

[0003] However, the internal structure of the porous suction cup is uniform pores, and the diameter of the pores is between 100nm and 100um. The naked eye cannot directly observe the state of the pores. If the porous suction cup is used to adsorb the wafer for a long time, the internal pores of the porous suction cup will be filled with bonding glue or other impurities, resulting in a decrease in the adsorption capacity of the porous suction cup, which needs to be cleaned or replaced.

[0004] Therefore, how to detect the internal saturation state of the porous suction cup is a problem that needs to be solved urgently. Summary of the invention

[0005] In order to solve the above-mentioned technical problem of how to detect the internal saturation state of a porous suction cup, the present invention provides a method for detecting the internal saturation of a porous suction cup, comprising:

[0006] Obtain a porous suction cup in a brand new state, and collect the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum degree detection device;

[0007] A glass slide is placed on the porous suction cup in a brand new state, and the vacuum degree of the porous suction cup after the glass slide is placed is collected by the vacuum degree detection device to obtain the vacuum degree K2 of the porous suction cup in a total damage state;

[0008] Obtaining the porous suction cup to be tested, and collecting the vacuum degree of the porous suction cup to be tested by the vacuum degree testing device to obtain the vacuum degree K3 of the porous suction cup to be tested in the testing state;

[0009] Calculate the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state;

[0010] According to the internal saturation state value F of the porous suction cup to be detected, the porous suction cup to be detected is preprocessed.

[0011] Preferably, the calculating of the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a brand new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state comprises:

[0012] The calculation formula of the internal saturation state value F of the porous suction cup to be detected is:

[0013]

[0014] Preferably, the preprocessing of the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected comprises:

[0015] If the internal saturation state value F of the porous suction cup to be tested is within the first preset range, continue to use the porous suction cup to be tested;

[0016] If the internal saturation state value F of the porous suction cup to be detected is within a second preset range, cleaning the porous suction cup to be detected;

[0017] If the internal saturation state value F of the porous suction cup to be tested is within a third preset range, the porous suction cup to be tested is replaced.

[0018] Preferably, if the internal saturation state value F of the porous suction cup to be detected is within a second preset range, cleaning the porous suction cup to be detected comprises:

[0019] If the internal saturation state value F of the porous suction cup to be detected is within a second preset range, the porous suction cup is immersed in a cleaning solution to clean the surface impurities of the porous suction cup.

[0020] Preferably, the first preset range of the internal saturation state value F of the porous suction cup to be detected is 0%-50%.

[0021] Preferably, the second preset range of the internal saturation state value F of the porous suction cup to be detected is 50%-75%.

[0022] Preferably, the third preset range of the internal saturation state value F of the porous suction cup to be detected is 75%-100%.

[0023] In a second aspect, the present invention further provides an internal saturation detection device for a porous suction cup, comprising:

[0024] The first acquisition module is used to obtain the porous suction cup in a brand new state, and to acquire the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum degree detection device;

[0025] The second acquisition module is used to place a glass slide on the porous suction cup in a brand new state, and collect the vacuum degree of the porous suction cup after the glass slide is placed through the vacuum degree detection device to obtain the vacuum degree K2 of the porous suction cup in a total damage state;

[0026] A third acquisition module is used to obtain the porous suction cup to be tested, and collect the vacuum degree of the porous suction cup to be tested through the vacuum degree detection device to obtain the vacuum degree K3 of the porous suction cup to be tested in the detection state;

[0027] A calculation module, for calculating the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state;

[0028] The preprocessing module is used to preprocess the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected.

[0029] In a third aspect, the present invention further provides a device, comprising a processor and a memory coupled to the processor, the memory storing program instructions executable by the processor; when the processor executes the program instructions stored in the memory, the internal saturation detection method of the porous suction cup as described in any one of the first aspects above is implemented.

[0030] In a fourth aspect, the present invention further provides a storage medium, wherein program instructions are stored in the storage medium, and when the program instructions are executed by a processor, the internal saturation detection method of the porous suction cup as described in any one of the first aspects above can be implemented.

[0031] Compared with the prior art, the internal saturation detection method of the porous suction cup provided by the present invention calculates the internal saturation state value F of the porous suction cup to be detected by collecting the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a completely damaged state, and the vacuum degree K3 of the porous suction cup to be detected in the detection state, and pre-processes the porous suction cup to be detected according to the internal saturation state value F of the porous suction cup to be detected. The internal saturation detection method of the porous suction cup provided by the present invention has a simple calculation process, intuitive data, and no consumable loss, and can obtain the use status of the porous suction cup in real time. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only part of the embodiments of the present invention, rather than all of the embodiments. For ordinary technicians in this field, without paying creative work, other drawings obtained based on these drawings all fall within the scope of protection of the present invention.

[0033] Figure 1 A schematic flow chart of an internal saturation detection method for a porous suction cup provided in an embodiment of the present invention;

[0034] Figure 2 A schematic structural diagram of an internal saturation detection device for a porous suction cup provided in an embodiment of the present invention;

[0035] Figure 3 A schematic diagram of the structure of a device provided by an embodiment of the present invention;

[0036] Figure 4 A schematic diagram of the structure of a storage medium provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0038] In order to make the description of the content of the present invention more detailed and complete, the following is an illustrative description of the implementation method and specific examples of the present invention; however, this is not the only form of implementing or applying the specific embodiments of the present invention. The implementation method covers the features of multiple specific embodiments and the method steps and their sequence for constructing and operating these specific embodiments. However, other specific embodiments can also be used to achieve the same or equal functions and step sequences. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0039] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0040] In the description of the embodiments of the present invention, unless otherwise specified, “ / ” means or, for example, A / B can mean A or B; “and / or” in the text is merely a description of the association relationship of associated objects, indicating that three relationships may exist, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present invention, “multiple” means two or more than two, and other quantifiers are similar. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention, and the embodiments of the present invention and the features in the embodiments may be combined with each other without conflict.

[0041] Please refer to Figure 1 , is a flow chart of a method for detecting internal saturation of a porous suction cup provided by an embodiment of the present invention. The method for detecting internal saturation of a porous suction cup can be executed by software and / or hardware devices. For example, see Figure 1 As shown, the internal saturation detection method of the porous suction cup may include:

[0042] S101. Obtain a porous suction cup in a brand new state, and collect the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum detection device. Specifically, in an embodiment of the present invention, first, a porous suction cup in a brand new state needs to be prepared; secondly, the porous suction cup is placed on a vacuum detection device without placing any wafers and glass slides on the surface; finally, the vacuum mode is turned on, and the ultimate vacuum of the porous suction cup is extracted to record the vacuum degree K1 of the porous suction cup in a brand new state. Assuming that the ultimate vacuum degree of the porous suction cup is -50Kpa, the vacuum degree K1 of the porous suction cup in a brand new state is defined as 0%—-50Kpa.

[0043] It should be noted that the material of the porous suction cup in the embodiment of the present invention may be silicon carbide or other materials, and the embodiment of the present invention does not impose any further limitation.

[0044] S102. Place a glass slide on the porous suction cup in the brand new state, and collect the vacuum degree of the porous suction cup after placing the glass slide through the vacuum detection device to obtain the vacuum degree K2 of the porous suction cup in the total loss state. Specifically, in the embodiment of the present invention, after collecting the vacuum degree K1 of the porous suction cup in the brand new state, place a glass slide with the same size as the wafer on the porous suction cup in the brand new state, turn on the vacuum mode, extract the ultimate vacuum of the porous suction cup, and record the vacuum degree K1 of the porous suction cup in the total loss state. Assuming that the ultimate vacuum degree of the porous suction cup is -95Kpa, the vacuum degree K2 of the porous suction cup in the total loss state is defined as 100% - -95Kpa.

[0045] S103. Obtain the porous suction cup to be tested, and collect the vacuum degree of the porous suction cup to be tested through the vacuum degree detection device to obtain the vacuum degree K3 of the porous suction cup to be tested in the detection state. Specifically, in the embodiment of the present invention, a used porous suction cup is taken as the porous suction cup to be tested, and no wafer is placed on the porous suction cup to be tested. The vacuum mode is turned on, and the limit vacuum of the porous suction cup is extracted to record the vacuum degree K3 of the porous suction cup to be tested. Assuming that the limit vacuum degree of the porous suction cup to be tested is -80Kpa, the vacuum degree K3 of the porous suction cup to be tested in the total loss state is defined as -80Kpa.

[0046] S104, calculating the internal saturation state value F of the porous sucker to be tested according to the vacuum degree K1 of the porous sucker in a new state, the vacuum degree K2 of the porous sucker in a total loss state, and the vacuum degree K3 of the porous sucker to be tested in a tested state. Specifically, in the embodiment of the present invention, the closer the internal saturation state value F of the porous sucker to be tested is to 100%, the more serious the internal saturation of the porous sucker to be tested is, the closer it is to a total loss state, and the more it needs to be replaced.

[0047] S105. Pre-process the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected. Specifically, in the embodiment of the present invention, the porous sucker to be detected can be pre-processed according to the internal saturation state value F of the porous sucker to be detected, and the porous sucker can be cleaned or replaced.

[0048] As an implementation manner, the calculation of the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state includes:

[0049] The calculation formula of the internal saturation state value F of the porous suction cup to be tested is shown in formula (1):

[0050]

[0051] For example, if the vacuum degree K1 of the porous suction cup in a new state is -50 Kpa, the vacuum degree K2 of the porous suction cup in a totally damaged state is -95 Kpa, and the vacuum degree K3 of the porous suction cup to be tested in the tested state is -80 Kpa, then the internal saturation state value F of the porous suction cup to be tested is 66.7%.

[0052] As an implementation mode, the pre-processing of the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected includes: if the internal saturation state value F of the porous sucker to be detected is within a first preset range, continuing to use the porous sucker to be detected; if the internal saturation state value F of the porous sucker to be detected is within a second preset range, cleaning the porous sucker to be detected; if the internal saturation state value F of the porous sucker to be detected is within a third preset range, replacing the porous sucker to be detected. Specifically, in the embodiment of the present invention, the porous sucker to be detected can be continued to be used, cleaned, or replaced according to the internal saturation state value F of the porous sucker to be detected.

[0053] As an embodiment, if the internal saturation state value F of the porous sucker to be detected is within the second preset range, cleaning the porous sucker to be detected includes: if the internal saturation state value F of the porous sucker to be detected is within the second preset range, soaking the porous sucker in a cleaning solution to clean the surface impurities of the porous sucker. The cleaning solution can be set according to actual needs, and the embodiment of the present invention does not impose further restrictions.

[0054] As an implementation manner, the first preset range of the internal saturation state value F of the porous suction cup to be tested is 0%-50%. Specifically, in the embodiment of the present invention, if the internal saturation state value F of the porous suction cup to be tested is within the range of 0%-50%, the porous suction cup to be tested continues to be used.

[0055] As an implementation manner, the second preset range of the internal saturation state value F of the porous suction cup to be tested is 50%-75%. If the internal saturation state value F of the porous suction cup to be tested is within the range of 50%-75%, the porous suction cup to be tested is cleaned.

[0056] As an implementation manner, the third preset range of the internal saturation state value F of the porous suction cup to be tested is 75%-100%. Specifically, in the embodiment of the present invention, if the internal saturation state value F of the porous suction cup to be tested is within the range of 75%-100%, the porous suction cup to be tested is replaced.

[0057] On the other hand, the present invention also provides an internal saturation detection device for a porous suction cup, please refer to Figure 2, is a schematic structural diagram of an internal saturation detection device for a porous suction cup provided in an embodiment of the present invention, the device comprising: a first acquisition module 21, used to obtain a porous suction cup in a brand new state, and to collect the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum degree detection device; a second acquisition module 22, used to place a glass slide on the porous suction cup in a brand new state, and to collect the vacuum degree of the porous suction cup after the glass slide is placed through the vacuum degree detection device, so as to obtain the vacuum degree K2 of the porous suction cup in a total loss state; a third acquisition module 23, used to obtain the vacuum degree K1 of the porous suction cup to be detected and collecting the vacuum degree of the porous suction cup to be detected through the vacuum detection device to obtain the vacuum degree K3 of the porous suction cup to be detected in the detection state; a calculation module 24 is used to calculate the internal saturation state value F of the porous suction cup to be detected according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a total damage state, and the vacuum degree K3 of the porous suction cup to be detected in the detection state; a preprocessing module 25 is used to preprocess the porous suction cup to be detected according to the internal saturation state value F of the porous suction cup to be detected.

[0058] The internal saturation detection device 20 of the porous suction cup provided in the embodiment of the present invention can execute the technical solution of the internal saturation detection method of the porous suction cup in any of the above-mentioned embodiments. Its implementation principle and beneficial effects are similar to the implementation principle and beneficial effects of the internal saturation detection method of the porous suction cup. Please refer to the implementation principle and beneficial effects of the internal saturation detection method of the porous suction cup, which will not be repeated here.

[0059] Please refer to Figure 3 , is a structural schematic diagram of a device provided in an embodiment of the present invention, comprising a memory 31 and a processor 32, wherein: the memory 31 is used to store a computer program; the processor 32 is used to read the computer program in the memory and execute the above-mentioned internal saturation detection method of the porous suction cup.

[0060] The processor 32 may also be referred to as a CPU (Central Processing Unit). The processor 32 may be an integrated circuit chip having signal processing capabilities. The processor 32 may also be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components. The general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0061] Please refer to Figure 4, is a schematic diagram of the structure of a storage medium provided in an embodiment of the present invention. The storage medium 40 of the embodiment of the present invention stores program instructions 41 that can implement the internal saturation detection method of the porous suction cup described above, wherein the program instructions 41 can be stored in the above storage medium in the form of a software product, including a number of instructions for enabling a computer device (which can be a personal computer, server, or network device, etc.) or a processor (processor) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes, or terminal devices such as computers, servers, mobile phones, tablets, etc.

[0062] In the several embodiments provided by the present invention, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0063] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above integrated unit may be implemented in the form of hardware or in the form of software functional units. The above is only an implementation mode of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present invention.

[0064] The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Although the present invention has been disclosed as above in the form of preferred embodiments, it is not intended to limit the present invention. Any technical personnel in the field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A method for detecting internal saturation of a porous suction cup, characterized in that: include: Obtain a porous suction cup in a brand new state, and collect the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum degree detection device; A glass slide is placed on the porous suction cup in a brand new state, and the vacuum degree of the porous suction cup after the glass slide is placed is collected by the vacuum degree detection device to obtain the vacuum degree K2 of the porous suction cup in a total damage state; Obtaining the porous suction cup to be tested, and collecting the vacuum degree of the porous suction cup to be tested by the vacuum degree testing device to obtain the vacuum degree K3 of the porous suction cup to be tested in the testing state; Calculate the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state; According to the internal saturation state value F of the porous suction cup to be detected, the porous suction cup to be detected is preprocessed.

2. The method for detecting internal saturation of a porous suction cup according to claim 1, characterized in that: The calculating of the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a brand new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state comprises: The calculation formula of the internal saturation state value F of the porous suction cup to be detected is:

3. The method for detecting internal saturation of a porous suction cup according to claim 2, characterized in that: The preprocessing of the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected comprises: If the internal saturation state value F of the porous suction cup to be tested is within the first preset range, continue to use the porous suction cup to be tested; If the internal saturation state value F of the porous suction cup to be detected is within a second preset range, cleaning the porous suction cup to be detected; If the internal saturation state value F of the porous suction cup to be tested is within a third preset range, the porous suction cup to be tested is replaced.

4. The method for detecting internal saturation of a porous suction cup according to claim 3, characterized in that: If the internal saturation state value F of the porous suction cup to be detected is within a second preset range, cleaning the porous suction cup to be detected comprises: If the internal saturation state value F of the porous suction cup to be detected is within a second preset range, the porous suction cup is immersed in a cleaning solution to clean the surface impurities of the porous suction cup.

5. The method for detecting internal saturation of a porous suction cup according to claim 4, characterized in that: The first preset range of the internal saturation state value F of the porous suction cup to be detected is 0%-50%.

6. The method for detecting internal saturation of a porous suction cup according to claim 5, characterized in that: The second preset range of the internal saturation state value F of the porous suction cup to be detected is 50%-75%.

7. The method for detecting internal saturation of a porous suction cup according to claim 6, characterized in that: The third preset range of the internal saturation state value F of the porous suction cup to be detected is 75%-100%.

8. An internal saturation detection device for a porous suction cup, characterized in that: include: The first acquisition module is used to obtain the porous suction cup in a brand new state, and to acquire the vacuum degree K1 of the porous suction cup in a brand new state through a vacuum degree detection device; The second acquisition module is used to place a glass slide on the porous suction cup in a brand new state, and collect the vacuum degree of the porous suction cup after the glass slide is placed through the vacuum degree detection device to obtain the vacuum degree K2 of the porous suction cup in a total damage state; A third acquisition module is used to obtain the porous suction cup to be tested, and collect the vacuum degree of the porous suction cup to be tested through the vacuum degree detection device to obtain the vacuum degree K3 of the porous suction cup to be tested in the detection state; A calculation module, for calculating the internal saturation state value F of the porous suction cup to be tested according to the vacuum degree K1 of the porous suction cup in a new state, the vacuum degree K2 of the porous suction cup in a totally damaged state, and the vacuum degree K3 of the porous suction cup to be tested in a tested state; The preprocessing module is used to preprocess the porous sucker to be detected according to the internal saturation state value F of the porous sucker to be detected.

9. A device, characterized in that: It comprises a processor and a memory coupled to the processor, wherein the memory stores program instructions executable by the processor; when the processor executes the program instructions stored in the memory, the internal saturation detection method of the porous suction cup as described in any one of claims 1 to 7 is implemented.

10. A storage medium, characterized in that: The storage medium stores program instructions, and when the program instructions are executed by the processor, the internal saturation detection method of the porous suction cup according to any one of claims 1 to 7 can be implemented.

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