High-temperature measuring device for crystal growth furnace

By introducing a movable measuring base and infrared thermometer into the crystal growth furnace, combined with an inert gas chamber and cooling system, the problems of small temperature measurement range and limited crucible volume in the crystal growth furnace were solved, and the stable growth of large-size sapphire crystals was achieved.

CN120668266AInactive Publication Date: 2025-09-19YONGCHUN SEMICON (WUXI) CO LTD
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Patent Information

Application Number
CN202510629404.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-15
Publication Date
2025-09-19
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing temperature measurement method of crystal growth furnace has a small range, resulting in large temperature differences, which limits the growth size of sapphire crystals. In addition, the crucible volume is limited, making it impossible to grow large-sized crystals.

Method used

A high-precision servo motor-driven mobile measuring base is used, combined with an infrared thermometer and an inert gas chamber to achieve all-round temperature measurement and temperature compensation of the quartz crucible. The cooling of the extended inner tube and the inert gas extraction system ensure the measuring range and sealing, and realize automatic feeding and uniform unloading.

Benefits of technology

It improves the range and accuracy of temperature measurement, reduces temperature differences, ensures uniform heating and sealing of the alumina material in the crucible, and supports the growth of large-size sapphire crystals.

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Abstract

The invention relates to the technical field of sapphire crystal growth, and discloses a high-temperature measuring device for a crystal growth furnace, which comprises a base, an outer furnace body is arranged on the upper end surface of the base, a bracket is arranged at the upper end part of a connecting arm, a high-precision servo motor is arranged on the bracket, a material pulling channel is connected between the bracket and a sealing plate, and the material pulling channel is communicated with the outer furnace body. An inner furnace body is arranged in the outer furnace body, an inert gas cavity is formed in the inner furnace body, a high-frequency inductance heating frame is arranged in the middle of the bottom of the inert gas cavity, and a quartz crucible is arranged at the upper end of the high-frequency inductance heating frame. The movement attribute of the extension inner pipe is fully utilized, the cooling cavity is filled with the cooling medium, when the extension inner pipe extends into the gap between the inner furnace body and the outer furnace body, the cooling medium is liquefied to release heat, and when the extension inner pipe is located in the inner furnace body, the cooling medium is vaporized to release heat, so that heat in the movable measuring seat is absorbed, and the purpose of cooling is achieved; and circulating cooling is realized.
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