High-temperature measuring device for crystal growth furnace

Abstract

The invention relates to the technical field of sapphire crystal growth, and discloses a high-temperature measuring device for a crystal growth furnace, which comprises a base, an outer furnace body is arranged on the upper end surface of the base, a bracket is arranged at the upper end part of a connecting arm, a high-precision servo motor is arranged on the bracket, a material pulling channel is connected between the bracket and a sealing plate, and the material pulling channel is communicated with the outer furnace body. An inner furnace body is arranged in the outer furnace body, an inert gas cavity is formed in the inner furnace body, a high-frequency inductance heating frame is arranged in the middle of the bottom of the inert gas cavity, and a quartz crucible is arranged at the upper end of the high-frequency inductance heating frame. The movement attribute of the extension inner pipe is fully utilized, the cooling cavity is filled with the cooling medium, when the extension inner pipe extends into the gap between the inner furnace body and the outer furnace body, the cooling medium is liquefied to release heat, and when the extension inner pipe is located in the inner furnace body, the cooling medium is vaporized to release heat, so that heat in the movable measuring seat is absorbed, and the purpose of cooling is achieved; and circulating cooling is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of sapphire crystal growth, and in particular to a high-temperature measuring device for a crystal growth furnace. Background Art

[0002] At present, large-sized sapphire crystals are usually grown by the kyropoiesis method. The general process of growing large-sized sapphire crystals by the kyropoiesis method is as follows: powdered alumina raw material is added to the crucible at one time. The alumina raw material is used to grow sapphire crystals. Then the sapphire crystal growth furnace is turned on, and the crucible is heated to melt the alumina raw material into a molten melt. Then a small seed crystal is introduced into the melt to start the growth process of the sapphire crystal. Then, the sapphire crystal is seeded by continuously rotating and pulling the sapphire crystal. The entire process is handled in the crystal growth furnace.

[0003] Existing crystal growth furnaces have many technical defects when in use. First, the growth of crystals requires maintaining a stable temperature. The traditional temperature measurement method is to install thermometers at several fixed positions in the crystal growth furnace to monitor the temperatures at different positions of the crucible. However, this results in a small temperature measurement range, which can easily cause insufficient temperature compensation at different positions of the crucible, resulting in temperature differences and reduced product quality. Second, the volume of the crucible is limited, resulting in a limited amount of alumina raw materials added to the crucible at one time, which limits the size of the final sapphire crystal and is not conducive to growing larger sapphire crystals.

[0004] In summary, considering that the existing facilities cannot meet the working requirements, we propose a high-temperature measurement device for crystal growth furnaces. Summary of the Invention

[0005] The main purpose of the present invention is to provide a high-temperature measurement device for a crystal growth furnace, which can effectively solve the problems in the background technology.

[0006] To achieve the above object, the technical solution adopted by the present invention is:

[0007] A high-temperature measuring device for a crystal growth furnace comprises a base, an outer furnace body is mounted on the upper end face of the base, a sealing plate is provided on the upper end face of the outer furnace body, a connecting arm is vertically connected to the side face of the base, a bracket is provided on the upper end face of the connecting arm, a high-precision servo motor is mounted on the bracket, a material pulling channel is connected between the bracket and the sealing plate, an inner furnace body is provided inside the outer furnace body, and an inert gas chamber is opened inside the inner furnace body.

[0008] As a preferred solution of the high-temperature measurement device for a crystal growth furnace described in the present invention, a high-frequency induction heating frame is provided in the middle position of the bottom of the inert gas chamber, a quartz crucible is provided at the upper end of the high-frequency induction heating frame, the pulling rod in the pulling channel extends downward into the inert gas chamber, and the lower end of the lifting rod is connected to a crystal rod.

[0009] As a preferred embodiment of the high-temperature measurement device for a crystal growth furnace described in the present invention, a circular motion track is provided on the lower portion of the inner wall of the inner furnace body, a movable measuring seat is movably provided on the circular motion track, an infrared thermometer is provided in the middle position inside the movable measuring seat, an insulating shell is provided on the outer side of the infrared thermometer, and an infrared measuring head acting on a quartz crucible is installed at the front end of the infrared thermometer.

[0010] As a preferred solution of the high-temperature measurement device for a crystal growth furnace described in the present invention, a slide groove is provided on the back of the movable measuring base, guide wheels are symmetrically installed on the upper and lower groove surfaces of the slide groove, and side sliding steps that interact with the two sets of guide wheels are provided on the annular motion track.

[0011] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the upper end surface of the movable measuring seat is riveted with a winding seat, a winding drum is rotatably arranged inside the winding seat, a traction rope is wound around the winding drum, ribs are symmetrically fixed on both sides of the winding drum, a winding shaft is horizontally penetrated through the interior of the winding drum outward, and both ends of the winding shaft are fixed by a first damping bearing and the inner wall of the winding seat.

[0012] As a preferred solution of the high-temperature measurement device for a crystal growth furnace described in the present invention, a track gear is rotatably provided in the middle of the slide, and gear teeth that interact with the track gear are evenly distributed on the outer wall of the annular motion track. The track gear is sleeved on the lower end of the positioning shaft, and the upper end of the positioning shaft is fixed by a second damping bearing and the inside of a movable measuring seat. A positioning bearing is provided at the position where the positioning shaft contacts the upper groove surface of the slide.

[0013] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, a groove wheel is sleeved on the positioning shaft and located between the second damping bearing and the positioning bearing, and a plurality of groups of wheel grooves are evenly distributed on the wheel surface of the groove wheel. The number of the wheel grooves is preferably 4-8 groups, and the wheel grooves are for the driving column to extend into during the movement. The driving column is vertically welded to the lower end of the crank block, and the upper end of the crank block is fixed to the output shaft of the first servo motor. The first servo motor is vertically fixed inside the movable measuring seat.

[0014] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the interior of the movable measuring seat is provided with a material guide chute upwardly, the material guide chute is located below the winding seat, the material guide chute is swingably provided with an injection tube, and curved mounting blocks are symmetrically welded on both sides of the middle part of the injection tube, the number of the curved mounting blocks is 2 groups, each group of the curved mounting blocks is welded with a short shaft, the number of the short shafts is 2 groups, each group of the short shafts is fixed by the first bearing seat and the groove wall of the material guide chute, a connecting ring that acts on the traction rope is provided at the upper middle part of the injection tube, the end of the injection tube away from the material guide chute is connected to a corrugated deceleration tube, the inner tube wall of the corrugated deceleration tube is provided with a deceleration pleated surface, when the injection tube falls, the corrugated deceleration tube bends into the quartz crucible.

[0015] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, a butt joint tube is provided inside the movable measuring seat and is inclined toward the back side, the lower tube mouth of the butt joint tube is located in the material guide chute, an extended inner tube is movably provided in the butt joint tube, sliding rods are symmetrically welded on both sides of the extended inner tube, and the number of the sliding rods is 2 groups, and a rod groove for the movement of the sliding rod is provided on the inner wall of the butt joint tube, a cooling cavity is provided in the inner layer of the extended inner tube, and the cooling cavity is filled with a cooling medium, when the extended inner tube extends out of the inner furnace body, the cooling medium liquefies and releases heat, and when the extended inner tube is located in the inner furnace body, the cooling medium vaporizes and releases heat.

[0016] As a preferred embodiment of the high-temperature measurement device for a crystal growth furnace described in the present invention, an inner groove is provided at the bottom of the elongated inner tube, drive teeth are installed at equal intervals in the inner groove, a drive gear is rotatably provided at the lower end of the butt-jointed tube and meshes with the drive teeth, the drive gear is sleeved on the output shaft of a second servo motor, and the second servo motor is fixed inside the movable measuring base.

[0017] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, a feed box is installed in the middle of the outer side surface of the outer furnace body, a positioning circular shell is fixedly provided at the middle position inside the feed box, a transport wheel is provided on the inner wall of the positioning circular shell, a wheel axle is horizontally passed through the middle of the transport wheel, a connecting bearing is provided at the position where the wheel axle and the positioning circular shell contact, both ends of the wheel axle are fixed by a third damping bearing and the box wall of the feed box, one end of the wheel axle extends outward and is connected to a uniform speed motor through a coupling, the uniform speed motor is arranged through the outer side surface of the feed box, and a quantitative groove is provided on the wheel surface of the transport wheel.

[0018] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, an air flow channel is provided in the middle position inside the wheel axle, a sealed bearing is installed at the end of the air flow channel, an exhaust pipe connected to the air flow channel is installed on the sealed bearing, the lower end of the exhaust pipe is connected to an exhaust fan, the exhaust fan includes a working motor, the bottom of the quantitative groove is provided with an intercepting mesh connected to the air flow channel, the oblique lower end of the positioning circular shell is connected to a discharge pipe, the discharge pipe extends obliquely toward the interior of the outer furnace body, the lower end of the discharge pipe is provided with a mounting sleeve, a sealing ring is sleeved in the mounting sleeve, the sealing ring has thermal expansion and contraction properties, the extended inner tube pushes open the elastic isolation plate and extends into the interior of the outer furnace body, and is sleeved on the outside of the mounting sleeve.

[0019] As a preferred solution of the high-temperature measurement device for a crystal growth furnace described in the present invention, one end of the winding shaft is sleeved with a large gear, the lower end of the large gear is meshed with a small gear, the small gear is sleeved on the output shaft of the winding motor, and the winding motor is fixed inside the movable measuring base.

[0020] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the driving gear is sleeved on the horizontal shaft, both ends of the horizontal shaft are fixed by the second bearing seat and the inner wall of the movable measuring seat, one end of the horizontal shaft extends outward and is connected to a linkage motor through a coupling, a small sprocket is also sleeved on the horizontal shaft, a large sprocket is sleeved on one end of the winding shaft, and the small sprocket and the large sprocket are connected and transmitted by a synchronous chain.

[0021] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the upper end of the material transport wheel is connected to a short feed pipe, and the short feed pipe passes through the feed box and is connected to a feeding hopper.

[0022] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the elastic isolation plate is movably mounted on the inner wall of the inner furnace body, and a reset spring is mounted on the top of the elastic isolation plate.

[0023] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, an opening is provided on the outer side of the winding seat for the traction rope to pass through.

[0024] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, a pad acting on the injection tube is provided at the end of the material guiding chute.

[0025] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, a gap is provided on the lower end surface of the butt-joint pipe for the driving gear to extend into.

[0026] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, the exhaust pipe and the wheel shaft move relative to each other around a sealed bearing.

[0027] As a preferred solution of the high-temperature measuring device for a crystal growth furnace described in the present invention, an air pump assembly acting in the inert gas chamber is installed in the middle of the bottom of the base.

[0028] The present invention provides a high-temperature measurement device for a crystal growth furnace through improvement. Compared with the prior art, the present invention has the following significant improvements and advantages:

[0029] (1) Turn on the first servo motor to drive the crank block to make circular motion. After a series of transmissions, the groove wheel rotates a certain angle, thereby driving the coaxial track gear to rotate synchronously. The track gear moves along a path along the gear teeth, thereby changing the position of the mobile measuring seat. The infrared measuring head can be used to measure the temperature of different positions of the quartz crucible, thereby increasing the measurement range and ensuring that the quartz crucible can be heated in time.

[0030] (2) Make full use of the movement properties of the extended inner tube and fill the cooling cavity with a cooling medium. When the extended inner tube extends into the gap between the inner furnace body and the outer furnace body, the cooling medium liquefies and releases heat. When the extended inner tube is located in the inner furnace body, the cooling medium, which becomes liquid, vaporizes and releases heat, thereby absorbing the heat inside the mobile measuring seat, achieving the purpose of cooling, realizing cyclic cooling, and ensuring the normal operation of the equipment inside the mobile measuring seat.

[0031] (3) During the material feeding process, the exhaust fan is turned on to generate suction and use the exhaust pipe to continuously extract the inert gas in the inner furnace body, so that the inert gas fills the entire pipeline system, ensuring that the external air will not enter the inner furnace body along with the alumina material, thereby achieving the effect of feeding sealing.

[0032] (4) Start the winding motor, and after a series of transmissions, drive the coaxial winding drum to rotate counterclockwise, and slowly release the traction rope, so that the injection tube, which was originally in an upward state, flips downward until the injection tube slightly tilts downward. The corrugated deceleration tube bends due to gravity and enters the edge position of the quartz crucible. The alumina material slides down along the injection tube and finally moves to the position of the corrugated deceleration tube. After being intercepted and decelerated by multiple deceleration folds, the alumina material falls into the quartz crucible. On the one hand, it achieves the purpose of automatic feeding, so that the sapphire crystal can continue to grow. On the other hand, it can ensure that the alumina material is slowly introduced into the crucible to avoid the phenomenon of molten soup splashing. The injection tube can move around the periphery of the quartz crucible with the movable measuring seat, and discharge the material from different positions to achieve the effect of uniform discharge.

[0033] (5) Start the linkage motor to drive the horizontal axis to rotate. On the one hand, it causes the driving gear to rotate to achieve the extension and retraction of the elongated inner tube. On the other hand, it drives the small sprocket to rotate. The small sprocket uses the synchronous chain to drive the large sprocket to rotate. The winding drum reels and releases the wire to achieve the flipping of the injection tube. They share a driving source, which has the advantages of streamlined structure, reduced cost, and high working synchronization. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic diagram of the overall structure of a high-temperature measurement device for a crystal growth furnace according to the present invention;

[0035] Figure 2 is a cross-sectional view of the inert gas chamber of the present invention;

[0036] Figure 3 This is a schematic diagram of the external structure of the mobile measuring base of the present invention in one direction;

[0037] Figure 4 This is a schematic diagram of the external structure of the mobile measuring base of the present invention from another direction;

[0038] Figure 5 Schematic diagram of the transmission structure of the track gear of the present invention;

[0039] Figure 6 This is a schematic diagram of the specific structure of the material guide chute of the present invention;

[0040] Figure 7 Schematic diagram of the specific structure of the winding drum of the present invention;

[0041] Figure 8 Schematic diagram of the specific structure of the injection tube of the present invention;

[0042] Figure 9 This is a schematic diagram of the specific structure of the butt joint pipe of the present invention;

[0043] Figure 10 This is a schematic diagram of the specific structure of the elongated inner tube of the present invention;

[0044] Figure 11 This is a schematic diagram of the external structure of the positioning circular shell in one direction of the present invention;

[0045] Figure 12 This is a schematic diagram of the external structure of the positioning circular shell of the present invention in another direction;

[0046] Figure 13 This is a schematic diagram of the internal structure of the positioning circular shell of the present invention;

[0047] Figure 14 This is a schematic diagram of the driving structure in the second embodiment of the present invention.

[0048] Figure: 1. Base; 2. Outer furnace body; 3. Connecting arm; 4. Bracket; 5. High-precision servo motor; 6. Pulling channel; 10. Inert gas chamber; 11. Lifting rod; 12. Crystal rod; 13. Quartz crucible; 14. High-frequency induction heating rack; 15. Inner furnace body; 20. Circular motion track; 21. Gear teeth; 22. Side sliding step; 24. Mobile measuring seat; 25. Slide; 26. Guide wheel; 27. Insulation shell; 28. Infrared measuring head; 30. Second Damping bearing; 31. Positioning shaft; 32. Positioning bearing; 33. Track gear; 34. Sheave; 35. Sheave; 36. Drive column; 37. Crank block; 38. First servo motor; 40. Winding seat; 41. Winding drum; 42. Rib; 43. Winding shaft; 44. First damping bearing; 45. Gear; 46. Pinion; 47. Winding motor; 48. Traction rope; 50. Injection tube; 51. Connecting ring; 52. Curved mounting block; 53. Short shaft; 54 , first bearing seat; 55, corrugated speed reducer; 56, speed reduction wrinkled surface; 60, butt joint; 61, extension inner tube; 62, slide rod; 63, rod groove; 64, cooling chamber; 65, inner groove; 66, drive gear; 67, drive gear; 68, second servo motor; 70, feed box; 71, positioning round shell; 72, transport wheel; 73, wheel shaft; 74, connecting bearing; 75, third damping bearing; 76, uniform speed motor; 77, quantitative slot; 78, feed short pipe; 7 9. Feed hopper; 80. Air flow channel; 81. Sealed bearing; 82. Exhaust pipe; 83. Exhaust fan; 84. Working motor; 85. Intercepting mesh; 86. Discharge pipe; 87. Mounting sleeve; 88. Sealing ring; 90. Horizontal axis; 91. Second bearing seat; 92. Linkage motor; 93. Small sprocket; 94. Large sprocket; 95. Synchronous chain; 101. Sealing plate; 102. Elastic isolation plate; 103. Material guide chute; 104. Pad; 105. Opening. DETAILED DESCRIPTION

[0049] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0050] Example 1

[0051] like Figure 1-13As shown, this embodiment provides a high-temperature measuring device for a crystal growth furnace, including a base 1, an outer furnace body 2 is installed on the upper end face of the base 1, and an air pump combination acting on the inert gas chamber 10 is installed in the middle position of the bottom of the base 1. The air pump combination is used to extract the air in the furnace body and inject inert gas. The upper end face of the outer furnace body 2 is provided with a sealing plate 101, which plays a role of sealing and heat insulation. The side of the base 1 is vertically connected to a connecting arm 3, and the upper end of the connecting arm 3 is provided with a bracket 4. A high-precision servo motor 5 is installed on the bracket 4. The high-precision servo motor 5 is used to accurately control the pulling speed of the crystal rod 12. A pulling channel 6 is connected between the bracket 4 and the sealing plate 101 as a pulling and rising space.

[0052] The inner furnace body 15 is provided inside the outer furnace body 2. Both the outer furnace body 2 and the inner furnace body 15 are made of heat-insulating materials. An inert gas chamber 10 is provided inside the inner furnace body 15. A high-frequency induction heating frame 14 is provided at the middle of the bottom of the inert gas chamber 10 to achieve uniform heating. A quartz crucible 13 is provided at the upper end of the high-frequency induction heating frame 14. Figure 2 shown.

[0053] The pulling rod 11 in the pulling channel 6 extends downward into the inert gas chamber 10, and the lower end of the pulling rod 11 is connected to the crystal rod 12. Figure 2 shown.

[0054] Furthermore, an annular motion track 20 is provided on the lower portion of the inner wall of the inner furnace body 15, and a movable measuring seat 24 is movably provided on the annular motion track 20. The movable measuring seat 24 is made of heat-resistant and heat-insulating materials, such as Figure 2 shown.

[0055] In this embodiment, a slide groove 25 is provided on the back of the mobile measuring base 24, and guide wheels 26 are symmetrically installed on the upper and lower groove surfaces of the slide groove 25. A side sliding step 22 is provided on the annular motion track 20 to interact with the two sets of guide wheels 26, which plays a role in limiting sliding. Figure 3 and 4 shown.

[0056] Among them, the middle part of the slide 25 is rotatably provided with a track gear 33, and the outer wall of the annular motion track 20 is evenly distributed with gear teeth 21 that interact with the track gear 33. The track gear 33 is sleeved on the lower end of the positioning shaft 31, and the upper end of the positioning shaft 31 is fixed by the second damping bearing 30 and the inside of the mobile measuring seat 24. The second damping bearing 30 has a certain damping force to prevent the positioning shaft 31 from rotating. A positioning bearing 32 is provided at the position where the positioning shaft 31 contacts the groove surface of the slide 25. Figure 2-5 shown.

[0057] Furthermore, a sheave 34 is sleeved on the positioning shaft 31 and located between the second damping bearing 30 and the positioning bearing 32. A plurality of sheave grooves 35 are evenly distributed on the surface of the sheave 34. The sheave grooves 35 are for the driving column 36 to extend into during the movement. The widths of the two are adapted. The driving column 36 is vertically welded to the lower end of the crank block 37. The upper end of the crank block 37 is fixed to the output shaft of the first servo motor 38. The first servo motor 38 is vertically fixed inside the movable measuring seat 24, as shown in FIG. Figure 5 shown.

[0058] In this embodiment, an infrared thermometer is provided in the middle of the movable measuring seat 24, and an insulating shell 27 is provided on the outside of the infrared thermometer. The insulating shell 27 plays a role in protecting the internal components and ensuring the normal use of the infrared thermometer. The front end of the infrared thermometer is equipped with an infrared measuring head 28 that acts on the quartz crucible 13. Figure 3 shown.

[0059] In this embodiment, a winding seat 40 is riveted to the upper end surface of the mobile measuring seat 24, and a winding drum 41 is rotatably provided inside the winding seat 40. A traction rope 48 is wound around the winding drum 41 (the winding direction of the traction rope 48 is adjusted according to actual conditions). The traction rope 48 is a metal rope. An opening 105 for the traction rope 48 to pass through is provided on the outer side surface of the winding seat 40. A retaining edge 42 is symmetrically fixed on both sides of the winding drum 41 to play a limiting role. A winding shaft 43 is horizontally penetrated from the inside of the winding drum 41 outward. Both ends of the winding shaft 43 are fixed by a first damping bearing 44 and the inner wall of the winding seat 40. The first damping bearing 44 has a certain damping force to prevent the winding drum 41 from rotating. Figure 3 、 6 and 7.

[0060] Among them, one end of the winding shaft 43 is sleeved with a large gear 45, and the lower end of the large gear 45 is meshed with a small gear 46, which is sleeved on the output shaft of the winding motor 47. The winding motor 47 is fixed inside the mobile measuring seat 24, as shown in FIG. Figure 7 shown.

[0061] Furthermore, a material guide chute 103 is provided upwardly inside the movable measuring seat 24. The material guide chute 103 is located below the winding seat 40 and is in an inclined state with a smooth surface. The material guide chute 103 is swingably provided with an injection tube 50. The raised injection tube 50 is located on the material guide chute 103 to intercept the material. A pad 104 is provided at the end of the material guide chute 103 to act on the injection tube 50. The pad provides a buffer support for the inclined injection tube 50. Figure 3 and 6 shown.

[0062] Specifically, curved mounting blocks 52 are symmetrically welded on both sides of the middle of the injection tube 50. A short shaft 53 is welded on each set of curved mounting blocks 52. Each set of short shafts 53 is fixed by the first bearing seat 54 and the groove wall of the guide chute 103. A connecting ring 51 that interacts with the traction rope 48 is provided at the upper middle position of the injection tube 50. Figure 7 and 8 shown.

[0063] Specifically, the end of the injection tube 50 away from the material guide chute 103 is connected to a corrugated deceleration tube 55 (the corrugated deceleration tube 55 on the raised injection tube 50 is in a closed state), and a deceleration pleated surface 56 is provided on the inner tube wall of the corrugated deceleration tube 55. When the injection tube 50 falls, the corrugated deceleration tube 55 bends and enters the quartz crucible 13, as shown in FIG. Figure 7 and 8 shown.

[0064] Furthermore, a butt joint pipe 60 is provided inside the movable measuring seat 24 and is inclined toward the back. The upper end of the butt joint pipe 60 is fully fitted on the inner wall of the inner furnace body 15. The two move relative to each other. The lower end of the butt joint pipe 60 is located in the guide chute 103. An extended inner pipe 61 is movably provided in the butt joint pipe 60. Figure 4 and 9 shown.

[0065] Among them, the two sides of the extended inner tube 61 are symmetrically welded with sliding rods 62, and the inner wall of the butt-jointed tube 60 is provided with a rod groove 63 for the movement of the sliding rod 62, which plays a role of limiting and guiding. The inner layer of the extended inner tube 61 is provided with a cooling cavity 64, and the cooling cavity 64 is filled with a cooling medium. The cooling medium has an adaptive boiling point. When the extended inner tube 61 is extended into the gap between the inner furnace body 15 and the outer furnace body 2, the cooling medium liquefies and releases heat. When the extended inner tube 61 is located in the inner furnace body 15, the cooling medium vaporizes and releases heat. Figure 9 and 10 shown.

[0066] Among them, the bottom of the extended inner tube 61 is provided with an inner groove 65, and the inner groove 65 is equidistantly installed with a driving tooth 66. The lower end of the butt joint 60 is rotatably provided with a driving gear 67 that meshes with the driving tooth 66. The lower end surface of the butt joint 60 is provided with a gap for the driving gear 67 to extend into. The driving gear 67 is sleeved on the output shaft of the second servo motor 68, and the second servo motor 68 is fixed inside the movable measuring base 24, as shown. Figure 9 and 10 shown.

[0067] Furthermore, a feed box 70 is installed in the middle of the outer side of the outer furnace body 2, a positioning round shell 71 is fixedly provided in the middle position of the feed box 70, and a material transport wheel 72 is provided on the inner wall of the positioning round shell 71, and a sliding seal is formed between the two. Figure 1 、11 , 12 and 13.

[0068] In this embodiment, the upper end of the transport wheel 72 is connected to a feed short pipe 78, which passes through the feed box 70 and is connected to a feeding hopper 79. The feeding hopper 79 is used to store alumina materials. Figure 11-13 shown.

[0069] In this embodiment, a wheel axle 73 is horizontally provided through the middle of the material transport wheel 72, and a connecting bearing 74 is provided at the position where the wheel axle 73 contacts the positioning circular shell 71. Both ends of the wheel axle 73 are fixed to the box wall of the feeding box 70 by means of a third damping bearing 75. The third damping bearing 75 has a certain damping force to prevent the wheel axle 73 from rotating. One end of the wheel axle 73 extends outward and is connected to a uniform speed motor 76 through a coupling. The uniform speed motor 76 is provided through the outer side of the feeding box 70. Figure 11-13 shown.

[0070] In this embodiment, a quantitative groove 77 is provided on the wheel surface of the material transport wheel 72 to ensure the supply of equal amounts of materials. Figure 13 shown.

[0071] Among them, an air flow channel 80 is opened in the middle position of the wheel shaft 73 (extending from one end of the wheel shaft 73 to the middle of the wheel shaft 73), and a sealed bearing 81 is installed at the end of the air flow channel 80. An exhaust pipe 82 connected to the air flow channel 80 is installed on the sealed bearing 81. The exhaust pipe 82 and the wheel shaft 73 move relative to each other around the sealed bearing 81. The lower end of the exhaust pipe 82 is connected to an exhaust fan 83, and the exhaust fan 83 includes a working motor 84. Figure 11-13 shown.

[0072] The bottom of the quantitative groove 77 is provided with an intercepting mesh 85 connected to the air flow channel 80, which plays the role of blocking the material. Figure 13 shown.

[0073] Furthermore, the oblique lower end of the positioning circular shell 71 is connected to a discharge pipe 86, which extends obliquely toward the interior of the outer furnace body 2. The lower end of the discharge pipe 86 is provided with a mounting sleeve 87, which has the function of limiting installation. A sealing ring 88 is sleeved inside the mounting sleeve 87. The sealing ring 88 has the property of thermal expansion and contraction. The inner tube 61 is extended to push open the elastic isolation plate 102 and extend into the gap between the inner furnace body 15 and the outer furnace body 2, and is sleeved on the outside of the mounting sleeve 87. Figure 11-13 shown.

[0074] Furthermore, the elastic isolation plate 102 is movably mounted on the inner wall of the inner furnace body 15, and a return spring is mounted on the top of the elastic isolation plate 102, which has the function of elastic reset. Figure 2 shown.

[0075] When this embodiment is in use, the first servo motor 38 is turned on, driving the crank block 37 to perform circular motion, thereby causing the drive column 36 to enter one of the sets of wheel grooves 35 during the motion. The relative force generated by the two causes the grooved wheel 34 to rotate a certain angle and then stop, thereby driving the coaxial track gear 33 to rotate synchronously. The track gear 33 moves a certain distance along the gear teeth 21 on the annular motion track 20, thereby changing the position of the movable measuring base 24, and then performing temperature measurement. The infrared measuring head 28 can be used to measure the temperature at different positions of the quartz crucible 13, thereby increasing the measurement range.

[0076] When it is necessary to add alumina material, the movable measuring seat 24 is moved to the vicinity of the elastic isolation plate 102, the docking tube 60 is aligned with the elastic isolation plate 102, the second servo motor 68 is turned on, the driving gear 67 rotates counterclockwise, and engages with the driving tooth 66 at the bottom of the extended inner tube 61, causing the extended inner tube 61 to move linearly (the slide rod 62 moves in a limited position in the corresponding rod groove 63), extending out of the docking tube 60, pushing open the elastic isolation plate 102 and extending into the gap between the inner furnace body 15 and the outer furnace body 2, and finally being sleeved on the outside of the mounting sleeve 87. At this time, the extended inner tube 61 carries the high temperature in the inner furnace body 15, acting on the sealing ring 88 of the mounting sleeve 87, causing the sealing ring 88 to expand due to the heat, increase in volume, and fully fit on the inner wall of the extended inner tube 61, thereby improving the sealing effect.

[0077] At this time, the uniform speed motor 76 is started to drive the wheel shaft 73 to rotate, so that the transport wheel 72 makes a circular motion, and first the metering groove 77 on the transport wheel 72 moves to the top to receive the alumina material dropped from the feed short tube 78, and then the metering groove 77 on the transport wheel 72 moves downward to the position of the discharge pipe 86, and the alumina material in the groove is introduced into the discharge pipe 86. At the same time, the exhaust fan 83 is turned on during the material guiding process to generate suction that acts on the extended inner tube 61, the discharge pipe 86, the metering groove 77, and the air flow channel 80 in turn, and finally the exhaust pipe 82 is used to continuously extract the inert gas in the inner furnace body 15 (relative to the influence of the air pressure in the inner furnace body 15, it can be ignored), so that the inert gas fills the entire pipeline system, ensuring that the external air will not enter the inner furnace body 15 along with the alumina material.

[0078] The alumina material in the discharge pipe 86 slides along the pipeline into the interior of the extended inner pipe 61 and the docking pipe 60 in sequence, and finally falls into the guide chute 103 (the alumina material is blocked by the head of the injection pipe 50 and stops moving). The winding motor 47 is started, the small gear 46 rotates, and the large gear 45 rotates after meshing and deceleration, thereby driving the coaxial winding drum 41 to rotate counterclockwise, and slowly releasing the traction rope 48, so that the injection pipe 50, which was originally in an upward state, flips downward around the two sets of first bearing seats 54 until the injection pipe 50 is slightly tilted downward. The corrugated deceleration tube 55 is bent by gravity and enters the edge position of the quartz crucible 13. At this time, the alumina material in the guide chute 103 slides into the injection tube 50 and slides downward along the injection tube 50 (it is preheated during the sliding process to avoid interference with the melt temperature), and finally moves to the position of the corrugated deceleration tube 55. After being intercepted and decelerated by multiple deceleration folded surfaces 56, the alumina material falls into the quartz crucible 13. The injection tube 50 can move around the periphery of the quartz crucible 13 with the movable measuring seat 24 to unload the material from different positions.

[0079] Example 2

[0080] On the basis of the embodiment 1, multiple motors are designed in the mobile measuring base 24, which has the problems of complex transmission structure and high cost of use, as well as heavy weight, difficulty in heat dissipation and lack of synchronization of the motors during operation. In order to solve the above technical problems, we have the following design, such as Figure 14 shown.

[0081] Specifically, the driving gear 67 is sleeved on the horizontal shaft 90, and both ends of the horizontal shaft 90 are fixed by the second bearing seat 91 and the inner wall of the mobile measuring seat 24. One end of the horizontal shaft 90 extends outward and is connected to the linkage motor 92 through a coupling. The linkage motor 92 is horizontally fixed inside the mobile measuring seat 24. A small sprocket 93 is also sleeved on the horizontal shaft 90, and a large sprocket 94 is sleeved on one end of the winding shaft 43. The small sprocket 93 and the large sprocket 94 are connected and transmitted by a synchronous chain 95.

[0082] When this embodiment is in use, the linkage motor 92 is started to drive the horizontal shaft 90 to rotate, which on the one hand causes the driving gear 67 to rotate to achieve the extension and retraction of the extended inner tube 61, and on the other hand simultaneously drives the small sprocket 93 to rotate. The small sprocket 93 uses the synchronous chain 95 to drive the large sprocket 94 to rotate, and the winding drum 41 reels in and releases the line to achieve the flipping of the injection tube 50, sharing a common driving source.

[0083] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0084] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A high temperature measuring device for a crystal growth furnace, comprising a base (1), characterized in that: The upper end surface of the base (1) is provided with an outer furnace body (2), the upper end surface of the outer furnace body (2) is provided with a sealing plate (101), the side surface of the base (1) is vertically connected to a connecting arm (3), the upper end of the connecting arm (3) is provided with a bracket (4), a high-precision servo motor (5) is installed on the bracket (4), a pulling channel (6) is connected between the bracket (4) and the sealing plate (101), an inner furnace body (15) is provided inside the outer furnace body (2), an inert gas cavity (10) is provided inside the inner furnace body (15), a high-frequency induction heating frame (14) is provided at the middle position of the bottom of the inert gas cavity (10), a quartz crucible (13) is provided at the upper end of the high-frequency induction heating frame (14), a pulling rod (11) in the pulling channel (6) extends downward into the inert gas cavity (10), and a crystal rod (12) is connected to the lower end of the pulling rod (11); An annular motion track (20) is provided at a lower position on the inner wall of the inner furnace body (15), a movable measuring seat (24) is movably provided on the annular motion track (20), an infrared thermometer is provided at a middle position inside the movable measuring seat (24), a heat-insulating shell (27) is provided on the outer side of the infrared thermometer, an infrared measuring head (28) acting on the quartz crucible (13) is installed at the front end of the infrared thermometer, a slide groove (25) is provided on the back side of the movable measuring seat (24), guide wheels (26) are symmetrically installed on the upper and lower groove surfaces of the slide groove (25), and a side sliding step (22) acting on the two groups of guide wheels (26) is provided on the annular motion track (20); The upper end surface of the movable measuring seat (24) is riveted with a winding seat (40), a winding drum (41) is rotatably provided inside the winding seat (40), a traction rope (48) is wound around the winding drum (41), ribs (42) are symmetrically fixed on both sides of the winding drum (41), a winding shaft (43) is horizontally passed through the interior of the winding drum (41) outward, and both ends of the winding shaft (43) are fixed by a first damping bearing (44) and the inner wall of the winding seat (40).

2. A high-temperature measurement device for a crystal growth furnace according to claim 1, characterized in that: A track gear (33) is rotatably provided in the middle of the slide groove (25), and gear teeth (21) that interact with the track gear (33) are evenly distributed on the outer wall of the annular motion track (20). The track gear (33) is sleeved on the lower end of the positioning shaft (31), and the upper end of the positioning shaft (31) is fixed through the second damping bearing (30) and the inside of the movable measuring seat (24). A positioning bearing (32) is provided at the position where the positioning shaft (31) contacts the upper groove surface of the slide groove (25).

3. The high-temperature measurement device for a crystal growth furnace according to claim 2, characterized in that: A sheave (34) is sleeved on the positioning shaft (31) and located between the second damping bearing (30) and the positioning bearing (32). A plurality of groups of wheel grooves (35) are evenly distributed on the wheel surface of the sheave (34). The wheel grooves (35) are for the driving column (36) to extend into during movement. The driving column (36) is vertically welded to the lower end of the crank block (37). The upper end of the crank block (37) is fixed to the output shaft of the first servo motor (38). The first servo motor (38) is vertically fixed inside the movable measuring seat (24).

4. The high-temperature measurement device for a crystal growth furnace according to claim 1, characterized in that: A material guide chute (103) is provided upwardly inside the movable measuring seat (24), and the material guide chute (103) is located below the winding seat (40). An injection tube (50) is swingably provided on the material guide chute (103), and curved mounting blocks (52) are symmetrically welded on both sides of the middle of the injection tube (50). A short shaft (53) is welded on each group of the curved mounting blocks (52), and each group of the short shafts (53) utilizes the first bearing seat (54) and the guide seat (54) to rotate. The groove wall of the material chute (103) is fixed, and a connecting ring (51) that interacts with the traction rope (48) is provided at the upper middle position of the injection tube (50). The end of the injection tube (50) away from the material guide chute (103) is connected to a corrugated deceleration tube (55), and a deceleration wrinkled surface (56) is provided on the inner tube wall of the corrugated deceleration tube (55). When the injection tube (50) falls, the corrugated deceleration tube (55) bends and enters the quartz crucible (13).

5. The high-temperature measurement device for a crystal growth furnace according to claim 4, characterized in that: A butt joint tube (60) is provided inside the movable measuring seat (24) and is inclined toward the back side. The lower tube mouth of the butt joint tube (60) is located in the material guide chute (103). An elongated inner tube (61) is movably provided in the butt joint tube (60). Slide rods (62) are symmetrically welded on both sides of the elongated inner tube (61). A rod groove (63) for the slide rod (62) to move is provided on the inner wall of the butt joint tube (60). A cooling cavity (64) is provided in the inner layer of the elongated inner tube (61). The cooling cavity (64) is filled with a cooling medium. When the elongated inner tube (61) extends into the gap between the inner furnace body (15) and the outer furnace body (2), the cooling medium liquefies and releases heat. When the elongated inner tube (61) is located in the inner furnace body (15), the cooling medium vaporizes and releases heat.

6. The high-temperature measurement device for a crystal growth furnace according to claim 5, characterized in that: The bottom of the elongated inner tube (61) is provided with an inner groove (65), and driving teeth (66) are installed in the inner groove (65) at equal intervals. The lower end of the butt-jointed tube (60) is rotatably provided with a driving gear (67) meshing with the driving teeth (66). The driving gear (67) is sleeved on the output shaft of a second servo motor (68), and the second servo motor (68) is fixed inside the movable measuring seat (24).

7. The high-temperature measurement device for a crystal growth furnace according to claim 6, characterized in that: A feeding box (70) is installed in the middle of the outer side surface of the outer furnace body (2), a positioning circular shell (71) is fixedly provided in the middle position of the inner part of the feeding box (70), a material transporting wheel (72) is provided on the inner wall of the positioning circular shell (71), a wheel axle (73) is horizontally passed through the middle part of the material transporting wheel (72), a connecting bearing (74) is provided at the position where the wheel axle (73) and the positioning circular shell (71) contact, both ends of the wheel axle (73) are fixed to the box wall of the feeding box (70) by means of a third damping bearing (75), one end of the wheel axle (73) extends outward and is connected to a uniform speed motor (76) through a coupling, the uniform speed motor (76) is provided through the outer side surface of the feeding box (70), and a quantitative groove (77) is provided on the wheel surface of the material transporting wheel (72).

8. The high-temperature measurement device for a crystal growth furnace according to claim 7, characterized in that: An air flow channel (80) is provided in the middle of the wheel shaft (73), a sealed bearing (81) is installed at the end of the air flow channel (80), an exhaust pipe (82) connected to the air flow channel (80) is installed on the sealed bearing (81), the lower end of the exhaust pipe (82) is connected to an exhaust fan (83), and the exhaust fan (83) includes a working motor (84), and an intercepting mesh (84) connected to the air flow channel (80) is provided at the bottom of the quantitative groove (77). 85), the oblique lower end of the positioning circular shell (71) is connected to a discharge pipe (86), the discharge pipe (86) extends obliquely toward the interior of the outer furnace body (2), the lower end of the discharge pipe (86) is provided with a mounting sleeve (87), a sealing ring (88) is sleeved inside the mounting sleeve (87), and the sealing ring (88) has thermal expansion and contraction properties, the extended inner tube (61) pushes open the elastic isolation plate (102) and extends into the interior of the outer furnace body (2), and is sleeved on the outside of the mounting sleeve (87).

9. The high-temperature measurement device for a crystal growth furnace according to claim 8, characterized in that: One end of the winding shaft (43) is sleeved with a large gear (45), the lower end of the large gear (45) is meshed with a small gear (46), and the small gear (46) is sleeved on the output shaft of the winding motor (47), and the winding motor (47) is fixed inside the movable measuring seat (24).

10. The high-temperature measurement device for a crystal growth furnace according to claim 8, characterized in that: The driving gear (67) is sleeved on the transverse shaft (90), and both ends of the transverse shaft (90) are fixed by a second bearing seat (91) and the inner wall of the movable measuring seat (24). One end of the transverse shaft (90) extends outward and is connected to a linkage motor (92) through a coupling. A small sprocket (93) is also sleeved on the transverse shaft (90), and a large sprocket (94) is sleeved on one end of the winding shaft (43). The small sprocket (93) and the large sprocket (94) are connected and driven by a synchronous chain (95).

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