Multi-degree-of-freedom staggered active vibration absorption method and system, photoetching equipment and storage medium

By using a multi-degree-of-freedom staggered active vibration absorption method, the problems of resource competition and high energy consumption in traditional control systems are solved, achieving more stable and efficient vibration suppression and improving the system's adaptability and robustness.

CN121680504AActive Publication Date: 2026-03-17BEIJING IC-EAST SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202610205005.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-02-12
Publication Date
2026-03-17
Estimated Expiration
2046-02-12

AI Technical Summary

Technical Problem

Traditional multi-degree-of-freedom vibration control systems suffer from problems such as competition for control resources, high energy consumption, and insufficient robustness, making it difficult to effectively suppress complex time-varying disturbances.

Method used

A multi-degree-of-freedom staggered active vibration absorption method is adopted. Through time-sharing threshold control and priority scheduling mechanism, control resources are intelligently scheduled, a three-level control response mechanism is set up, and control commands are generated based on real-time vibration state parameters to drive the actuator to generate active damping force.

Benefits of technology

It improves system stability and energy efficiency, enhances robustness against time-varying disturbances, optimizes response time, and reduces system losses and mechanical wear.

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Abstract

The invention discloses a multi-degree-of-freedom staggered active vibration absorption method and system, photoetching equipment and a storage medium. The method comprises the following steps: acquiring vibration data; determining vibration state parameters of each degree of freedom at the current moment based on the vibration data; on the basis of the vibration state parameters, according to a preset interleaving control strategy, control instructions for a plurality of actuator units are generated; and driving the actuator unit to generate corresponding active damping force based on the control instruction. The embodiment of the invention aims to overcome the technical defects of potential instability, high energy consumption and poor time-varying disturbance adaptability caused by control resource competition in a traditional multi-degree-of-freedom active vibration control system, so that more stable, more efficient and more adaptive vibration suppression is realized.
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