An artificial laryngeal sensor based on magnetic repulsion coupling of a bilayer heterogeneous magnetic thin film and its fabrication method.

Abstract

This invention discloses an artificial laryngeal sensor based on magnetic repulsion coupling of a dual-layer heterogeneous magnetic thin film and its fabrication method. The sensor includes upper and lower sensing units, each having a first flexible magnetic layer that has been directionally magnetized and a flexible hard magnetic thin film layer that has been patterned and magnetized to form a microscopic magnetic domain array. The two layers, with their like poles facing each other, generate a uniform magnetic repulsion force, forming a dynamically adjustable gap between the triboelectric layers. This gap can passively and adaptively change with the intensity of laryngeal vibration: during strong vibration, the repulsion force surges to prevent contact saturation, while during weak vibration, a small local gap is maintained to preserve high sensitivity. This invention solves the problems of uneven magnetic force and discomfort in traditional magnetic repulsion schemes through all-thin film fabrication and patterned magnetization technology, achieving a balance between high signal fidelity, wide dynamic range, and ultimate wearing comfort, making it particularly suitable for wearable artificial laryngeal speech acquisition systems.

Description

Technical Field

[0001] This invention relates to the field of artificial larynx speech recognition sensing technology, specifically to an artificial larynx sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film and its fabrication method. Background Technology

[0002] Laryngeal dysfunction is a major functional impairment faced by patients after laryngeal cancer surgery (total laryngectomy) or nerve damage, leading to the loss of speech and communication abilities. Artificial larynx technology based on skin-contact vibration sensors reconstructs speech by collecting micromechanical signals correlated with vibrations on the neck surface and in the larynx, providing patients with an important means of assisting communication. Among these technologies, flexible sensors based on the principle of triboelectric nanogenerators (TENGs) have become a research hotspot due to their high sensitivity, self-powered characteristics, and good biocompatibility.

[0003] The core performance of this type of contact sensor lies in the interaction state between its sensing interface (i.e., the upper and lower triboelectric layers). A fixed contact pressure or gap cannot simultaneously meet the contradictory requirements of high sensitivity to weak sounds (such as whispers) and resistance to saturation from strong vibrations (such as coughing or throat clearing). Existing technologies employ microfluidic air pumps to actively adjust the airbag pressure to change the spacing, but these solutions suffer from system complexity, high power consumption, the risk of air leakage during long-term use, and response lag, severely limiting their wearable practicality.

[0004] In the field of triboelectric nanogenerators, existing technologies (such as CN108123642A) disclose schemes that utilize the repulsive force of like pole magnetic layers to achieve separation after contact, aiming to improve the efficiency and reliability of energy harvesting. However, such schemes often employ the method of pasting discrete magnetic blocks or embedding rigid magnets, resulting in a non-uniform "point-like" magnetic field distribution, which easily leads to non-uniform sensing response. Furthermore, the presence of rigid magnets disrupts the overall flexibility of the sensor, causing localized pressure and a foreign body sensation when in contact with human skin, failing to meet the stringent requirements of long-term wearability comfort in biomedical sensing. More importantly, the design goals of general energy harvesting devices (maximizing output power) are fundamentally different from the extreme pursuit of signal fidelity, linearity, and dynamic range by artificial laryngeal sensors; directly applying the former's structure to the latter leads to a performance trade-off.

[0005] Therefore, there is an urgent need to develop a spacing adjustment mechanism specifically designed for physiological vibration sensing scenarios such as artificial larynxes. This mechanism needs to be fully passively adaptive, have a fast response, high reliability, good overall flexibility, and be able to provide a uniform mechanical environment in order to achieve high-fidelity and high-comfort voice signal acquisition. Summary of the Invention

[0006] This invention aims to overcome some shortcomings of existing technologies and provide an artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film and its fabrication method. The purpose of this invention is to construct a uniform, stable, and passively adaptively adjustable magnetic repulsion field within a triboelectric nanogenerator through innovative material selection and structural design, thereby achieving high-fidelity sensing of laryngeal vibrations over a wide dynamic range. Simultaneously, it ensures that the sensor possesses excellent flexibility, thinness, and wearability, and is suitable for large-scale precision manufacturing.

[0007] To achieve the above objectives, a first aspect of the present invention provides an artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film, comprising, from top to bottom:

[0008] Flexible encapsulation layer;

[0009] The upper sensing unit is disposed below the flexible encapsulation layer and includes a first flexible magnetic layer and an upper triboelectric layer stacked from top to bottom.

[0010] The lower sensing unit is disposed opposite to the upper sensing unit and includes a lower triboelectric layer and a flexible hard magnetic thin film layer as a second magnetic component, wherein the flexible hard magnetic thin film layer is located below the lower triboelectric layer.

[0011] The first flexible magnetic layer has a first magnetization direction perpendicular to its film surface, and the flexible hard magnetic film layer has a second magnetization direction formed by patterned magnetization, which is perpendicular to its film surface and has the same direction. The first magnetization direction and the second magnetization direction are the same, so that magnetic repulsion is generated between the first flexible magnetic layer and the flexible hard magnetic film layer.

[0012] The magnetic repulsion force is used to form and maintain a dynamically adjustable gap between the upper and lower triboelectric layers;

[0013] When the external throat vibration drives the upper sensing unit to move, the change in the dynamic adjustment gap causes the magnetic repulsion force to change nonlinearly, generating a negative feedback adjustment force that resists the gap change, thereby realizing the passive adaptive adjustment of the dynamic adjustment gap with the vibration intensity.

[0014] In one specific embodiment, the patterned magnetization in the flexible hard magnetic thin film layer forms a plurality of microscopic magnetic domains periodically arranged in the plane of the thin film, and the magnetization direction of each microscopic magnetic domain is the same.

[0015] In one specific embodiment, the first flexible magnetic layer is a magnetic powder-polymer composite film, the matrix of which is silica gel or polydimethylsiloxane, and neodymium iron boron or strontium ferrite magnetic particles are uniformly dispersed inside; the flexible hard magnetic film layer is a composite material of hard magnetic powder and polymer, or a cobalt-platinum or neodymium iron boron magnetic alloy film deposited on a flexible substrate.

[0016] In one specific embodiment, the initial value of the dynamically adjustable gap is 50 micrometers to 300 micrometers when there is no vibration input.

[0017] In one specific embodiment, the artificial laryngeal sensor further includes a contact management structure disposed between the upper and lower triboelectric layers. The contact management structure includes a plurality of micro-protrusions or bumps protruding from the upper surface of the lower triboelectric layer or from the lower surface of the upper triboelectric layer, and is made of polytetrafluoroethylene or fluorinated ethylene propylene copolymer. The contact management structure is configured as follows:

[0018] a) Under static or slight vibration, it maintains a safe initial gap together with the opposite layer;

[0019] b) When strong vibration causes the upper sensing unit to press down, the contact management structure takes priority over the large-area contact between the upper triboelectric layer and the lower triboelectric layer to make contact, so as to limit the direct contact between the upper triboelectric layer and the lower triboelectric layer to an instantaneous and local contact, and to reduce contact adhesion by utilizing its low surface energy characteristics.

[0020] In one specific embodiment, the flexible encapsulation layer is provided with a maximum spacing limiting structure connecting the upper sensing unit and the lower sensing unit, and the maximum spacing limiting structure is an elastic support.

[0021] In one specific embodiment, the upper triboelectric layer is made of conductive fabric, metallized film, or conductive polymer; the lower triboelectric layer is made of polydimethylsiloxane, fluorinated ethylene propylene copolymer, or polyimide.

[0022] In one specific embodiment, the sensor is a flexible patch structure that can be attached to the skin of the human neck, with an overall thickness of less than 2 millimeters.

[0023] A second aspect of the invention provides an artificial larynx system, comprising the artificial larynx sensor provided in the first aspect of the invention, and a signal processing circuit electrically connected to the sensor, the signal processing circuit being configured to receive and process electrical signals output by the sensor to reconstruct speech information.

[0024] A third aspect of the present invention provides a method for manufacturing an artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film, comprising the steps of:

[0025] S1: Fabrication of the upper sensing unit:

[0026] S1a: Prepare a first flexible magnetic composite thin film preform;

[0027] S1b: The first flexible magnetic composite film preform is oriented to be magnetized perpendicular to the film surface to form the first flexible magnetic layer having a first magnetization direction;

[0028] S1c: A triboelectric layer is attached to the surface of the first flexible magnetic layer;

[0029] S2: Fabrication of the lower sensing unit:

[0030] S2a: Prepare a flexible hard magnetic thin film preform;

[0031] S2b: The flexible hard magnetic film blank is patterned and magnetized to form multiple microscopic magnetic domains perpendicular to the film surface and in the same direction, so as to obtain the flexible hard magnetic film layer with a second magnetization direction.

[0032] S2c: A lower triboelectric layer is formed on the surface of the flexible hard magnetic thin film layer;

[0033] S3: Assembly and packaging: The upper sensing unit and the lower sensing unit are placed opposite each other in the same alignment manner as the first magnetization direction and the second magnetization direction, so that magnetic repulsion is generated between them, and they are packaged through a flexible packaging layer to form a sensor structure with dynamically adjustable gap.

[0034] Compared with existing technologies, this invention has the following advantages: 1) In this invention, due to the passive adaptive adjustment characteristic of magnetic repulsion, the sensor can automatically adapt to different intensities of laryngeal vibrations without external power supply and control. While ensuring sensitivity to weak whisper signals, it effectively avoids output saturation under strong cough signals, and its dynamic range is significantly better than traditional air-cushion or fixed-gap sensors. 2) The uniform surface magnetic field provided by the patterned flexible hard magnetic film ensures a high degree of consistency in mechanical response throughout the sensing area, eliminates signal inhomogeneity and distortion caused by discrete magnets, and significantly improves the reconstruction fidelity and signal-to-noise ratio of the speech signal. 3) The all-thin film and flexible packaging design makes the sensor thin, soft, and flexible, perfectly conforming to the complex curvature of the neck, achieving long-term imperceptible wear, and greatly improving user experience and compliance. 4) Based on the inherent negative feedback mechanism of magnetic nonlinearity, real-time, passive adaptive response to weak to strong laryngeal vibrations is achieved, effectively expanding the dynamic range of the sensor and resolving the contradiction between sensitivity and anti-saturation. 5) It eliminates easily aging elastic components and easily leaking pneumatic parts, adopts all-solid-state magnetic coupling, and the non-contact or controlled contact working mode reduces wear and has high structural reliability. 6) It adopts thin film preparation and advanced magnetization technology to replace the precision assembly of discrete magnets. The process flow is simpler, more controllable, and scalable, which is conducive to achieving low-cost, high-consistency mass production and is compatible with flexible electronics manufacturing technology. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the overall structure of a sensor according to an embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of the overall structure of the sensor according to another embodiment of the present invention;

[0037] Figure 3 This is a schematic diagram of the overall structure of the sensor according to another embodiment of the present invention. Detailed Implementation

[0038] The embodiments of this patent are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this patent, and should not be construed as limiting this patent.

[0039] Example 1

[0040] like Figure 1 As shown, in the first embodiment of the present invention, an artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film is provided, comprising, from top to bottom:

[0041] Flexible encapsulation layer;

[0042] The upper sensing unit is disposed below the flexible encapsulation layer and includes a first flexible magnetic layer 100 and an upper triboelectric layer stacked from top to bottom.

[0043] The lower sensing unit is disposed opposite to the upper sensing unit and includes a lower triboelectric layer and a flexible hard magnetic thin film layer 500 as a second magnetic component, wherein the flexible hard magnetic thin film layer 500 is located below the lower triboelectric layer.

[0044] The first flexible magnetic layer 100 has a first magnetization direction perpendicular to its film surface, and the flexible hard magnetic film layer 500 has a second magnetization direction formed by patterned magnetization, which is perpendicular to its film surface and has the same direction. The first magnetization direction and the second magnetization direction are the same, so that magnetic repulsion is generated between the first flexible magnetic layer 100 and the flexible hard magnetic film layer 500.

[0045] The magnetic repulsion force is used to form and maintain a dynamically adjustable gap 300 between the upper and lower triboelectric layers;

[0046] When the external throat vibration drives the upper sensing unit to move, the change in the dynamic adjustment gap 300 causes the magnetic repulsion force to change nonlinearly, generating a negative feedback adjustment force to resist the gap change, thereby realizing the passive adaptive adjustment of the dynamic adjustment gap 300 with the vibration intensity.

[0047] In this embodiment, the patterned magnetization in the flexible hard magnetic thin film layer 500 forms a plurality of microscopic magnetic domains 501 arranged periodically in the thin film plane, and the magnetization direction of each microscopic magnetic domain 501 is the same.

[0048] like Figure 2 As shown, in this embodiment, the first flexible magnetic layer 100 is a magnetic powder-polymer composite film, the substrate 101 of which is silicone or polydimethylsiloxane, and neodymium iron boron or strontium ferrite magnetic particles 102 are uniformly dispersed inside; the flexible hard magnetic film layer 500 is made of a composite material of hard magnetic powder and polymer, or a cobalt-platinum or neodymium iron boron magnetic alloy film deposited on a flexible substrate.

[0049] Optionally, the initial value of the dynamically adjustable gap 300 when there is no vibration input is 50 micrometers to 300 micrometers.

[0050] To further optimize the signal quality and reliability of the sensor across the entire dynamic range, this invention also incorporates a contact management structure. This structure does not absolutely prohibit contact between the triboelectric layers, but rather manages it intelligently: in weak signal ranges, it works in conjunction with magnetic repulsion to maintain a non-contact, highly sensitive sensing state; when vibrations of moderate to high intensity force the two layers to approach, the structure preferentially initiates contact, transforming what would otherwise be a large-area, strong contact into a controlled, instantaneous, low-adhesion micro-contact. This fully utilizes the high output advantage of the contact mode while effectively avoiding problems such as signal saturation, response hysteresis, and material adhesion, thus achieving a smooth and optimized transition from non-contact sensing to contact triboelectric power generation.

[0051] like Figure 3 As shown, optionally, the artificial laryngeal sensor in this embodiment further includes a contact management structure disposed between the upper triboelectric layer and the lower triboelectric layer. The contact management structure includes a plurality of micro-protrusions 302 or protrusions 302 protruding from the upper surface of the lower triboelectric layer or protruding from the lower surface of the upper triboelectric layer, and the material of the protrusions 302 is polytetrafluoroethylene or fluorinated ethylene propylene copolymer. The contact management structure is configured as follows:

[0052] a) Under static or slight vibration, it maintains a safe initial gap together with the opposite layer;

[0053] b) When strong vibration causes the upper sensing unit to press down, the contact management structure takes priority over the large-area contact between the upper triboelectric layer and the lower triboelectric layer to make contact, so as to limit the direct contact between the upper triboelectric layer and the lower triboelectric layer to an instantaneous and local contact, and to reduce contact adhesion by utilizing its low surface energy characteristics.

[0054] Optionally, the flexible encapsulation layer is provided with a maximum spacing limiting structure connecting the upper sensing unit and the lower sensing unit, and the maximum spacing limiting structure is an elastic support 301.

[0055] Typically, the upper triboelectric layer is made of conductive fabric, metallized film, or conductive polymer; the lower triboelectric layer is made of polydimethylsiloxane, fluorinated ethylene propylene copolymer, or polyimide.

[0056] Optionally, the sensor is a flexible patch structure that can be attached to the skin of the human neck, with an overall thickness of less than 2 mm.

[0057] It is worth mentioning that there is an overall magnetic repulsion between the first flexible magnetic layer 100 and the second magnetic component. However, when the throat produces sound, friction can occur locally between the friction layer 400 and the friction layer 200, depending on the actual situation. That is, for strong vibrations, the overall repulsion is large, and the surge in repulsion prevents contact saturation; for weak vibrations, the overall repulsion is small, and local friction also occurs, maintaining high sensitivity under conditions of low repulsion. At the same time, in practical applications, in the weak signal range, it also works with the magnetic repulsion to maintain a non-contact, high-sensitivity sensing state; relying on electrostatic induction caused by gap changes to generate signals, this mode is more sensitive to weak signals and has lower noise.

[0058] Meanwhile, the first embodiment of the present invention also provides an artificial larynx system, including the artificial larynx sensor provided in this embodiment, and a signal processing circuit electrically connected to the sensor. The signal processing circuit is used to receive and process the electrical signal output by the sensor to reconstruct speech information.

[0059] Meanwhile, in the first embodiment of the present invention, a method for manufacturing an artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film is also provided, including the following steps:

[0060] S1: Fabrication of the upper sensing unit:

[0061] S1a: Prepare a first flexible magnetic composite thin film preform;

[0062] S1b: The first flexible magnetic composite film preform is oriented to be magnetized perpendicular to the film surface to form the first flexible magnetic layer having a first magnetization direction;

[0063] S1c: A triboelectric layer is attached to the surface of the first flexible magnetic layer;

[0064] S2: Fabrication of the lower sensing unit:

[0065] S2a: Prepare a flexible hard magnetic thin film preform;

[0066] S2b: The flexible hard magnetic film blank is patterned and magnetized to form multiple microscopic magnetic domains perpendicular to the film surface and in the same direction, so as to obtain the flexible hard magnetic film layer with a second magnetization direction.

[0067] S2c: A lower triboelectric layer is formed on the surface of the flexible hard magnetic thin film layer;

[0068] S3: Assembly and packaging: The upper sensing unit and the lower sensing unit are placed opposite each other in the same alignment manner as the first magnetization direction and the second magnetization direction, so that magnetic repulsion is generated between them, and they are packaged through a flexible packaging layer to form a sensor structure with dynamically adjustable gap.

[0069] In fact, the core of this embodiment lies in using two magnetic thin films with different structures but synergistic functions as the force source for spacing adjustment.

[0070] The sensor includes a flexible encapsulation layer, an upper sensing unit, a dynamically adjustable gap, and a lower sensing unit. The upper sensing unit consists of a first flexible magnetic layer and an upper triboelectric layer attached to its lower surface. The first flexible magnetic layer is a magnetic powder-polymer composite film (e.g., NdFeB / PDMS) that has been directionally magnetized perpendicular to the film surface, and it has a stable macroscopic magnetization direction (first magnetization direction).

[0071] The lower sensing unit comprises a flexible hard magnetic thin film layer and a lower triboelectric layer formed on its upper surface. The flexible hard magnetic thin film layer is characterized by the formation of numerous microscopic magnetic domains within it, with consistent magnetic pole orientations (second magnetization direction) and preferably periodic arrangement in the plane, through patterned magnetization techniques (such as multi-pole magnetization or laser-assisted magnetization). This film can be made of hard magnetic powder / polymer composite materials (such as strontium ferrite / TPU) or deposited magnetic alloy thin films (such as CoPt / PI).

[0072] The first magnetization direction and the second magnetization direction are set to be the same (e.g., both facing each other), thereby generating a uniform in-plane magnetic repulsion between the first flexible magnetic layer and the flexible hard magnetic film layer. This repulsion balances the load of the upper sensing unit, forming an initial dynamic adjustment gap (typically 50-300 μm) between the upper and lower triboelectric layers.

[0073] Its adaptive adjustment principle is as follows: When strong vibration of the throat forces the upper sensing unit to press down, the dynamic adjustment gap decreases, and the magnetic repulsion force increases nonlinearly and sharply, forming a strong mechanical "buffer" that effectively prevents harmful hard contact and signal saturation between the upper and lower triboelectric layers; when the throat vibrates weakly, the gap changes little, and the magnetic repulsion force maintains the upper sensing unit in a sensitive quasi-suspended state. A detectable high-quality electrical signal can be generated through minute changes in the gap (mainly based on electrostatic induction mode). The entire process requires no external energy input or control.

[0074] Example 2

[0075] This embodiment provides a sensor based on a composite magnetic thin film.

[0076] Fabrication of the upper induction unit: Neodymium iron boron micropowder (5μm) was mixed with PDMS prepolymer at a volume ratio of 30:70. After degassing, the mixture was cast into a film and cured at 80℃ to obtain a 100μm thick film preform. This preform was then vertically magnetized in a pulse magnetizer (2.5T) so that its lower surface was the N pole, forming the first flexible magnetic layer. Subsequently, a nylon silver fiber conductive fabric was hot-pressed onto the preform as the upper triboelectric layer.

[0077] Fabrication of the lower induction unit: Strontium ferrite magnetic powder was melt-blended with TPU and then cast to form an 80 μm thick thin film preform. Patterned magnetization was performed using a multi-pole magnetization mold to form a square magnetic domain array with the N pole facing upward and a density of 120 domains / cm², resulting in a flexible hard magnetic thin film layer.

[0078] To further enhance reliability, several PTFE micro-bumps, each 80 μm in diameter and 10 μm high, are fabricated on the upper surface of the lower triboelectric layer using micro-transfer printing technology, serving as a contact management structure. The design aims to achieve the following: when the sensor is at rest or detecting a weak whisper, magnetic repulsion suspends the upper sensing unit, maintaining a small gap of approximately 5-10 μm between the bumps and the upper triboelectric layer, allowing the sensor to operate in optimal electrostatic induction mode. When a stronger voice or cough is detected, the displacement of the upper sensing unit increases. Before large-area contact occurs between the upper and lower triboelectric layers, the upper triboelectric layer first contacts these PTFE bumps. Due to the extremely low surface energy and high-frequency design of PTFE, this contact is instantaneous, point-like, and easily separable. This triggers efficient triboelectric charging, and because the contact force is dispersed and buffered by the bumps, excessive compression and adhesion of the triboelectric layer are prevented, ensuring signal clarity and device lifespan.

[0079] Assembly and packaging: The upper and lower units are aligned with their N poles facing each other, and edge encapsulation is performed using liquid silicone. Four 500μm high silicone pillars are integrally molded as maximum spacing limiters. The final result is a flexible sensor patch with an initial gap of 150μm and a total thickness of approximately 1.2mm.

[0080] Example 3

[0081] This embodiment provides a high-performance variant based on a magnetic alloy thin film.

[0082] Upper sensing unit: A 25μm PI thin film with a 2μm CoPt magnetic layer sputtered is used as the first flexible magnetic layer after vertical magnetization, with the lower surface being the N pole. The triboelectric layer on top is PET with sputtered copper electrodes.

[0083] Lower sensing unit: A CoPt layer is sputtered onto another PI thin film, and selectively patterned magnetization is performed by laser-assisted local annealing to form an array of magnetic domains with the N pole facing upwards. The lower triboelectric layer is an FEP thin film.

[0084] With similar encapsulation, the total thickness of the sensor can be reduced to less than 0.8mm, exhibiting higher magnetic uniformity and mechanical flexibility.

[0085] The preferred embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make numerous modifications and variations based on the concept of the present invention without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning, or limited experimentation on the basis of existing technology should be within the scope of protection defined by the claims.

Claims

1. An artificial laryngeal sensor based on magnetic repulsion coupling of a double-layer heterogeneous magnetic thin film, characterized in that, From top to bottom, they include: Flexible encapsulation layer; The upper sensing unit is disposed below the flexible encapsulation layer and includes a first flexible magnetic layer and an upper triboelectric layer stacked from top to bottom. The lower sensing unit is disposed opposite to the upper sensing unit and includes a lower triboelectric layer and a flexible hard magnetic thin film layer as a second magnetic component, wherein the flexible hard magnetic thin film layer is located below the lower triboelectric layer. The first flexible magnetic layer has a first magnetization direction perpendicular to its film surface, and the flexible hard magnetic film layer has a second magnetization direction formed by patterned magnetization, which is perpendicular to its film surface and has the same direction. The first magnetization direction and the second magnetization direction are the same, so that magnetic repulsion is generated between the first flexible magnetic layer and the flexible hard magnetic film layer. The magnetic repulsion force is used to form and maintain a dynamically adjustable gap between the upper and lower triboelectric layers; When the external throat vibration drives the upper sensing unit to move, the change in the dynamic adjustment gap causes the magnetic repulsion force to change nonlinearly, generating a negative feedback adjustment force that resists the gap change, thereby realizing the passive adaptive adjustment of the dynamic adjustment gap with the vibration intensity. The artificial laryngeal sensor further includes a contact management structure disposed between the upper and lower triboelectric layers. The contact management structure includes a plurality of micro-protrusions or bumps protruding from the upper surface of the lower triboelectric layer or from the lower surface of the upper triboelectric layer, and is made of polytetrafluoroethylene or fluorinated ethylene propylene copolymer. The contact management structure is configured as follows: a) Under static or slight vibration, it maintains a safe initial gap together with the opposite layer; When strong vibration causes the upper sensing unit to press down, the contact management structure takes priority over the large-area contact between the upper and lower triboelectric layers to make contact, thereby limiting the direct contact between the upper and lower triboelectric layers to an instantaneous and localized contact, and utilizing its low surface energy characteristics to reduce contact adhesion.

2. The artificial laryngeal sensor according to claim 1, characterized in that, The patterned magnetization in the flexible hard magnetic thin film layer forms multiple microscopic magnetic domains that are periodically arranged in the plane of the thin film, and the magnetization direction of each microscopic magnetic domain is the same.

3. The artificial laryngeal sensor according to claim 1, characterized in that, The first flexible magnetic layer is a magnetic powder-polymer composite film, the matrix of which is silica gel or polydimethylsiloxane, and neodymium iron boron or strontium ferrite magnetic particles are uniformly dispersed inside; the flexible hard magnetic film layer is a composite material of hard magnetic powder and polymer, or a cobalt-platinum or neodymium iron boron magnetic alloy film deposited on a flexible substrate.

4. The artificial laryngeal sensor according to claim 1, characterized in that, The initial value of the dynamically adjustable gap is 50 micrometers to 300 micrometers when there is no vibration input.

5. The artificial laryngeal sensor according to claim 1, characterized in that, The flexible encapsulation layer is provided with a maximum spacing limiting structure that connects the upper sensing unit and the lower sensing unit. The maximum spacing limiting structure is an elastic support.

6. The artificial laryngeal sensor according to claim 1, characterized in that, The upper triboelectric layer is made of conductive fabric, metallized film, or conductive polymer; the lower triboelectric layer is made of polydimethylsiloxane, fluorinated ethylene propylene copolymer, or polyimide.

7. The artificial laryngeal sensor according to any one of claims 1-6, characterized in that, The sensor is a flexible patch structure that can be attached to the skin of the human neck, with an overall thickness of less than 2 millimeters.

8. An artificial larynx system, characterized in that, The invention includes an artificial laryngeal sensor as described in any one of claims 1-7, and a signal processing circuit electrically connected to the sensor, the signal processing circuit being used to receive and process the electrical signal output by the sensor to reconstruct speech information.

9. A method for manufacturing an artificial laryngeal sensor, the method being used to manufacture the artificial laryngeal sensor as described in any one of claims 1-7, characterized in that, Including the following steps: S1: Fabrication of the upper sensing unit: S1a: Prepare a first flexible magnetic composite thin film preform; S1b: The first flexible magnetic composite film preform is oriented to be magnetized perpendicular to the film surface to form the first flexible magnetic layer having a first magnetization direction; S1c: A triboelectric layer is attached to the surface of the first flexible magnetic layer; S2: Fabrication of the lower sensing unit: S2a: Prepare a flexible hard magnetic thin film preform; S2b: The flexible hard magnetic film blank is patterned and magnetized to form multiple microscopic magnetic domains perpendicular to the film surface and in the same direction, so as to obtain the flexible hard magnetic film layer with a second magnetization direction. S2c: A lower triboelectric layer is formed on the surface of the flexible hard magnetic thin film layer; S3: Assembly and packaging: The upper sensing unit and the lower sensing unit are placed opposite each other in the same alignment manner as the first magnetization direction and the second magnetization direction, so that magnetic repulsion is generated between them, and they are packaged through a flexible packaging layer to form a sensor structure with dynamically adjustable gap.

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