Real-time image enhancement method and system based on CD-SEM raster scanning partitioning

The real-time image enhancement method based on CD-SEM raster scanning blocks solves the problems of low contrast and latency in high-resolution images, achieving efficient and low-memory image enhancement that meets the real-time and accuracy requirements of semiconductor detection.

CN121998835APending Publication Date: 2026-05-0848TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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Patent Information

Application Number
CN202610112058.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-27
Publication Date
2026-05-08

AI Technical Summary

Technical Problem

In semiconductor manufacturing, existing technologies such as CD-SEM for high-resolution images suffer from low overall contrast and blurred details, resulting in low accuracy in automatic measurement and defect identification. Furthermore, traditional image enhancement algorithms require huge amounts of memory and processing latency, which cannot meet the needs of real-time detection.

Method used

A real-time image enhancement method based on CD-SEM raster scanning blocks is adopted. By presetting the image processing block size and overlapping region parameters, the electron beam scanning is controlled and local histogram statistics, cropping and equalization are performed in real time. Combined with a weighted average algorithm, image fusion is performed to generate an efficient and low-memory enhanced image.

Benefits of technology

The image enhancement and acquisition processes are parallelized, significantly reducing memory usage and processing latency, generating continuous, natural, and detailed images to meet real-time detection requirements and improve detection efficiency and accuracy.

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Abstract

The invention discloses a real-time image enhancement method and system based on CD-SEM raster scanning partitioning, and the method comprises the steps: S1, controlling an electron beam of a CD-SEM to scan a to-be-detected region according to a raster scanning path based on a preset image processing block size and overlapping region parameters, and obtaining an image collection block; s2, acquiring an image acquisition block, performing local histogram statistics, cutting and equalization processing on the current image acquisition block in sequence, generating a corresponding enhanced image processing block, and outputting the enhanced image processing block; s3, splicing the current image processing block with the spliced image; non-overlapped pixels between the current image processing block and the adjacent spliced image processing block are directly spliced; and for the pixels in the overlapped region, gray fusion is carried out by adopting a weighted average algorithm, so that a final overall enhanced image is generated. The method has the advantages of high efficiency, low delay, low memory occupancy, seamless integration, excellent enhancement effect and the like.
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