Method for preparing high-purity yttrium oxide ceramic for etching based on segmented oxygen feeding calcination
By employing a segmented oxygen-assisted calcination and three-stage sintering method, the problems of low purity and insufficient flexural strength of yttrium oxide ceramics were solved, enabling the preparation of high-purity yttrium oxide ceramics and ensuring the material's density and flexural strength.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 成都超纯应用材料股份有限公司
- Filing Date
- 2026-04-17
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies for preparing high-purity yttrium oxide ceramics suffer from several drawbacks. Insufficient reaction of organic matter in the yttrium oxide preform leads to low ceramic purity, and incomplete grain growth during sintering results in crystal defects and insufficient flexural strength.
The method employs segmented oxygen calcination and three-stage sintering, including oxygen calcination in the main decomposition stage and the deep decomposition stage, combined with slow heating and long holding time, followed by three-stage sintering, gradually reducing the heating rate to ensure complete decomposition of organic matter and complete grain growth.
This improved the purity and flexural strength of yttrium oxide ceramics, prevented ceramic cracking, and ensured the density and high purity of the material.
Smart Images
Figure CN122403983A_ABST