Capacitance film vacuum gauge for high-temperature gas

By designing a cooling mechanism that utilizes a cooling fan and heat exchange to reduce the temperature of high-temperature gases, the problem of high-temperature gases affecting detection accuracy is solved, enabling rapid vacuum pressure detection of high-temperature gases.

CN223500567UActive Publication Date: 2025-10-31XIAN MIHUI TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202423151529.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-20
Publication Date
2025-10-31
Estimated Expiration
2034-12-20

AI Technical Summary

Technical Problem

Existing capacitive thin-film vacuum gauges suffer from high-temperature gas detection accuracy due to excessively high temperatures, and cannot effectively balance the temperature of high-temperature gases.

Method used

A capacitive thin-film vacuum gauge with a cooling mechanism was designed. It uses a cooling fan, a copper heat sink, and a copper tube to work together to cool the gas. The temperature of the high-temperature gas is reduced by the airflow and heat exchange provided by the cooling fan, and the temperature balance of the high-temperature gas is achieved by using a solenoid valve and a coil to assist in preheating.

Benefits of technology

It effectively prevents high-temperature gas from directly entering the vacuum gauge, ensuring detection accuracy, shortening preheating time, and enabling rapid vacuum pressure detection.

✦ Generated by Eureka AI based on patent content.
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Abstract

The utility model relates to the technical field of capacitance film vacuum gauges, and discloses a capacitance film vacuum gauge for high-temperature gas, which comprises a capacitance film vacuum gauge, the bottom surface of the capacitance film vacuum gauge is fixedly communicated with a gas inlet pipe, and a cooling mechanism is arranged outside the capacitance film vacuum gauge; the cooling mechanism comprises a heat preservation cylinder, the inner wall of the heat preservation cylinder is fixedly connected with the outer surface of the capacitance film vacuum gauge, the outer surface of the heat preservation cylinder is fixedly connected with a fixing cover, the outer surface of the heat preservation cylinder is sleeved with a heat dissipation copper pipe, and the air inlet end of the heat dissipation copper pipe fixedly communicates with an air supply pipe. The end, away from the heat dissipation copper pipe, of the air feeding pipe penetrates through the fixing cover and fixedly communicates with the outer surface of the air inlet pipe, and the air outlet end of the heat dissipation copper pipe fixedly communicates with a backflow pipe. According to the capacitance film vacuum gauge for the high-temperature gas, when the capacitance film vacuum gauge is used for carrying out vacuum pressure detection on the high-temperature gas, the temperature of the high-temperature gas can be well balanced, and the pressure detection precision of the capacitance film vacuum gauge is ensured.
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