Foreign matter measurement method, foreign matter measurement device and calibration substrate

The foreign substance measuring method and device utilize a dual-light imaging approach with a dome-shaped illumination unit to accurately count reflective and non-reflective foreign substances on automotive parts, addressing the limitations of existing systems with high precision and cost-effectiveness.

JP2025077471AActive Publication Date: 2025-05-19AQUA CHEM CO LTD
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Patent Information

Application Number
JP2023189667
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-11-06
Publication Date
2025-05-19
Estimated Expiration
2043-11-06

AI Technical Summary

Technical Problem

Existing foreign matter measurement systems struggle to accurately differentiate and count reflective and non-reflective foreign substances on automotive parts, while also being cost-effective and requiring high precision.

Method used

A foreign substance measuring method and device that uses a combination of transmitted and reflected light imaging, with a dome-shaped reflection illumination unit, to capture and count foreign substances, including reflective and non-reflective types, using a relatively inexpensive imaging unit and calibration substrate.

Benefits of technology

The method achieves high-precision measurement of foreign substances by accurately differentiating and counting reflective and non-reflective particles, while the device is cost-effective due to the use of a single imaging unit for both light types, and the calibration substrate ensures accurate calibration.

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Abstract

To provide a foreign matter measurement method that can highly accurately measure reflective a foreign matter and / or non-reflective foreign matter that may be contained in an object to be inspected.SOLUTION: A foreign matter measurement method according to the present invention is used to evaluate the cleanliness of an object to be inspected, and comprises: a foreign matter collection step in which foreign matter is captured from the object to be inspected onto a filter; an imaging preparation step in which the filter is placed on a stage within a dome-shaped reflective illumination part; a transmitted light imaging step in which light is emitted from a first light source arranged on the rear side of the filter, and transmitted light that has passed through the filter is imaged; a reflected light imaging step in which, on the front side of the filter, light is emitted from a second light source via the dome-shaped reflective illumination part to the filter, and reflected light from the filter is imaged; and a processing step in which the total number of foreign matters is counted on the basis of image information obtained in the transmitted light imaging step, and the number of reflective foreign matters and / or non-reflective foreign matters is counted on the basis of the image information obtained in the reflected light imaging step.SELECTED DRAWING: Figure 1
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