Reflection optical unit and microscope comprising an reflection optical unit

WO2026002337A3 Publication Date: 2026-03-12HELMHOLTZ-ZENTRUM BERLIN FÜR MATERIALIEN UND ENERGIE
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Patent Information

Application Number
PCT/DE2025/100581
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-25
Filing Date
2025-06-12
Publication Date
2026-03-12

AI Technical Summary

Technical Problem

Existing X-ray microscopes face challenges in measuring electrons generated on the excitation side of thick samples due to interference from component-generated electrons, especially in the EUV and low X-ray ranges, limiting the ability to perform quantitative measurements and requiring high radiation exposure.

Method used

A reflection optic with a center stop, focusing element, and solid window design that shields component-generated electrons using total internal reflection, allowing for epi-geometry measurements by focusing electromagnetic radiation onto a focal plane while separating sample-generated electrons for detection.

Benefits of technology

Enables quantitative measurements of electrons from thick samples without interference, facilitating epigeometry and reducing radiation exposure, suitable for EUV and low X-ray ranges.

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Abstract

The invention relates to a reflection optical unit (1) for focusing electromagnetic radiation (300) onto a focal plane (100), comprising at least the following components: - a central stop (12) which is arranged on an optical axis (200) of the reflection optical unit (1) and is designed to prevent electromagnetic beams (300) that are radiated into the reflection optical unit (1) along the optical axis (200) from propagating parallel to the optical axis (200), - an X-ray lens (11) having a tube (11-1) which extends at least between the central stop (12) and the focal plane (100) along the optical axis (200) of the reflection optical unit (1) and delimits a first volume (V1) radially around the optical axis (200), such that electrons (e-) generated by electromagnetic radiation in the first volume (V1) are shielded, wherein the tube (11-2) together with the central stop (12) forms a ring-shaped aperture (18), and - a solid window (13) which delimits the first volume (V1) toward the focal plane (100) and which peripherally terminates flush with the tube (11-2), wherein the solid window (13) is configured such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the solid window (13).
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