Infrared absorption structure and uncooled infrared detector based on infrared absorption structure

An infrared absorption and non-cooling technology, applied in the field of thermal radiation infrared detection, can solve the problems of poor uniformity of infrared response, and achieve the effects of eliminating poor uniformity of infrared response, high infrared absorption, and high utilization rate of radiation energy

CN102226719BInactive Publication Date: 2012-12-19HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2012-12-19
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an infrared absorption structure and an uncooled infrared detector based on the infrared absorption structure. The structure is composed of a bottom infrared reflecting layer with high conductivity, a first insulating layer, an infrared sensitive layer, a second insulating layer and a surface structure layer, wherein the above-mentioned layers are overlaid successively. The surface structure layer is manufactured by nonmetal conductive materials and has an island-like array structure in a circle or square shape, wherein the array structure is distributed according to two-dimension period. On the basis of the structure of the surface structure layer, it is easy to design a high-infrared absorption structure with a certain spectral width by selecting an appropriate surface conductive property; meanwhile, an infrared response of wide angle can be obtained. An infrared detector based on the infrared absorption structure has advantages of low thermal mass and no limitation of a cavity height of thermal insulation. Moreover, the infrared absorption structure is not sensitive to an incident angle of infrared radiation. Therefore, the infrared absorption structurecan be widely applied to fields including an infrared biochemical sensor, an infrared spectrometer, and an uncooled infrared thermal imaging system and the like.
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Description

technical field

[0001] The invention belongs to thermal radiation infrared detection technology, in particular to a multi-layer infrared absorption structure with low thermal mass, wide angle and high infrared absorption rate and a non-cooling infrared detector based on the structure. Background technique

[0002] Uncooled infrared detectors use the thermal infrared radiation of target objects for target detection. The principle is that the photosensitive area of ​​the infrared detector absorbs the thermal infrared radiation incident from the outside to increase the temperature of the photosensitive element itself. The temperature-increased photosensitive element converts its own temperature change into a certain physical, chemical or electrical characteristic change of its properties and forms a detection through an external detection system. Compared with cooled infrared detectors, uncooled infrared detectors have the advantages of low price, small size, light weight, and...

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Embodiment Construction

[0024] A detailed description of the infrared absorbing structure and detector of the present invention is given below.

[0025] Such as figure 1 As shown, a typical infrared absorbing structure provided by the present invention includes a bottom infrared reflective layer 11 , a first insulating layer 12 , an infrared sensitive layer 13 and a surface structure layer 14 stacked in sequence against the incident direction of infrared radiation. A beam of infrared radiation 10 is incident from the surface structure layer 14 into the infrared absorbing structure.

[0026] The bottom infrared reflective layer 11 can be a metal material with high electrical conductivity σ or low resistivity ρ (ρ=1 / σ), or a metal compound with high electrical conductivity, or a highly doped semiconductor material, and the high electrical conductivity is Refers to resistivity ≤ 10mΩ cm, high doping refers to free carrier concentration ≥ 1 × 10 19 cm -3 . Metal materials such as gold, silver or alum...