Computerized system and method for obtaining information about a region of an object

Through multi-parameter imaging and image processing technology, the problem of difficulty in distinguishing between light spots and defects in existing wafer inspection tools has been solved, achieving higher-precision defect detection.

CN113348484BActive Publication Date: 2025-10-10APPL MATERIALS ISRAEL LTD
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Patent Information

Application Number
CN202080009755.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-01-17
Filing Date
2020-01-14
Publication Date
2025-10-10
Estimated Expiration
2040-01-14

AI Technical Summary

Technical Problem

Existing wafer inspection tools have difficulty effectively distinguishing between light spots scattered by printed pattern roughness and actual defects, resulting in inaccurate defect detection.

Method used

The method comprises the steps of: obtaining multiple images of multiple areas of the image parameters by taking an imaging instrument, performing multiple image processors on the imaging instrument to generate multiple difference images, performing multiple comparisons of the multiple parameters of the multiple parameters, performing multiple reference images, calculating multiple attributes of the pixels of the area through the multiple reference images, calculating noise attributes through the multiple difference images, and determining whether the pixels of the area represent defects.

Benefits of technology

The detection accuracy and reliability of small defects are improved, the false detection rate is reduced, and the reliability of defect detection is enhanced.

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Abstract

A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining a plurality of images of the region by an imager; wherein the plurality of images differ from one another by at least one parameter; (ii) receiving or generating a plurality of reference images; (iii) generating a plurality of difference images representing differences between the plurality of images and the plurality of reference images; (iv) calculating a set of regional pixel attributes; (v) calculating a set of noise attributes based on the set of regional pixel attributes of the plurality of regional pixels; and (vi) determining for each regional pixel whether the regional pixel represents a defect based on a relationship between the set of noise attributes and the set of regional pixel attributes of the pixel.
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