Detector panel and method of manufacturing, driving and flat panel detector

Abstract

The embodiment of the application provides a kind of detector panel and its preparation method, driving method, flat panel detector, detector panel includes: first control terminal receives first control signal;Second control terminal receives second control signal;Reading signal terminal receives reading signal;Detection module is electrically connected with first control terminal, converts optical signal into electrical signal and exports reading signal according to first control signal;Multiplexing unit is electrically connected with second control terminal, and according to second control signal, detection module and reading signal terminal are turned on;Wherein at least one reading signal terminal is electrically connected with multiple multiplexing units.The embodiment of the application is electrically connected with multiple multiplexing units on at least one reading signal terminal, reduces the number of reading signal terminal, leaves out space for laying other signal lines, prevents from affecting the bending performance of flat panel detector;Since reading signal terminal reduces, chip quantity reduces, circuit board structure is simple, production procedure reduces, and production cost reduces.

Description

Technical Field

[0001] This application relates to the field of display technology, and more specifically, to a detector panel and its fabrication method, driving method, and flat panel detector. Background Technology

[0002] With the progress of the times and the development of science, people's living standards are constantly improving, and people are paying more and more attention to health, which is also driving the rapid development of medical technology. Direct Digital Radiography (DR) has been increasingly widely used in medical imaging, industrial flaw detection and other fields due to its excellent image quality and post-processing capabilities, low X-ray dose, efficient storage and transmission, resource saving and improved work efficiency.

[0003] The flat panel detector (FPD) is the most critical component of a DR system. Composed of a photosensitive pixel array (sensor) and peripheral circuitry, it converts X-ray signals passing through an object into electrical signals, which are then processed by a computer to create an image. When X-ray flat panel detectors are used in industrial pipelines, they must be flexible and able to bend and adhere to the pipe. Existing X-ray flat panel detectors cannot be bent, thus limiting their application in pipeline inspection.

[0004] In summary, existing flat panel detectors suffer from insufficient bending performance, making them unsuitable for applications such as pipeline inspection.

[0005] Application content

[0006] This application addresses the shortcomings of existing methods by proposing a detector panel, its fabrication method, driving method, and flat panel detector, thereby solving the technical problem that existing flat panel detectors have insufficient bending performance and cannot be bent, thus preventing their application in scenarios such as pipeline inspection.

[0007] In a first aspect, embodiments of this application provide a detector panel, including:

[0008] The first control terminal is used to receive the first control signal;

[0009] The second control terminal is used to receive the second control signal;

[0010] The read signal terminal is used to receive read signals;

[0011] The detection module is electrically connected to the first control terminal and is used to convert optical signals into electrical signals and output read signals according to the first control signal.

[0012] The multiplexing unit is electrically connected to the second control terminal and is used to connect the detection module to the reading signal terminal according to the second control signal.

[0013] At least one of the read signal terminals is electrically connected to a plurality of the multiplexing units.

[0014] In some embodiments of this application, the multiplexing unit includes: a multiplexing first electrode, a multiplexing second electrode, and a multiplexing control electrode;

[0015] The multiplexed first electrode is electrically connected to the detection module;

[0016] The multiplexed second pole is electrically connected to the read signal terminal;

[0017] The multiplexing control electrode is electrically connected to the second control terminal and is used to connect the multiplexing first electrode and the multiplexing second electrode under the control of the second control signal.

[0018] In some embodiments of this application, at least one of the second control terminals is electrically connected to at least two of the multiplexing units.

[0019] In some embodiments of this application, the number of multiplexing units electrically connected to each of the second control terminals is equal.

[0020] In some embodiments of this application, the detection module includes a photoelectric conversion unit and a detection unit, wherein the detection unit includes: a first detection electrode, a second detection electrode, and a detection control electrode;

[0021] The first detection electrode is electrically connected to the photoelectric conversion unit, the second detection electrode is electrically connected to the multiplexing first electrode, and the detection control electrode is electrically connected to the first control terminal.

[0022] In some embodiments of this application, the detector panel further includes a bias signal terminal, and the photoelectric conversion unit includes a first conversion electrode and a second conversion electrode;

[0023] The first conversion electrode is electrically connected to the bias signal terminal, and the second conversion electrode is electrically connected to the first detection electrode.

[0024] In some embodiments of this application, the multiplexing control electrode and the detection control electrode are disposed on the same layer;

[0025] And / or, the multiplexing first electrode, the multiplexing second electrode, and the detection first electrode and the detection second electrode are arranged in the same layer.

[0026] In some embodiments of this application, the detector panel includes a first metal layer, a semiconductor layer, and a second metal layer, wherein the semiconductor layer is disposed on one side of the first metal layer, and the second metal layer is disposed on the side of the semiconductor layer away from the first metal layer;

[0027] The first metal layer forms the multiplexing control electrode and the detection control electrode; and / or, the second metal layer forms the multiplexing first electrode, the multiplexing second electrode, the detection first electrode, and the detection second electrode.

[0028] In some embodiments of this application, the number of multiplexing units electrically connected to each of the read signal terminals is equal.

[0029] Secondly, embodiments of this application provide a flat panel detector, including: a driver circuit board, a reading circuit board, a main control board, and a detector panel as described in the first aspect;

[0030] The reading circuit board and the driving circuit board are located on the same side of the detector panel.

[0031] Thirdly, embodiments of this application provide a method for fabricating a detector panel, used to fabricate the detector panel as described in the first aspect, comprising:

[0032] A first control terminal, a second control terminal, a read signal terminal, a detection module, and a multiplexing unit are fabricated on one side of a substrate, such that the detection module is electrically connected to the first control terminal and the multiplexing unit is electrically connected to the second control terminal.

[0033] At least one of the read signal terminals is electrically connected to a plurality of the multiplexing units.

[0034] In some embodiments of this application, the fabrication of a first control terminal, a second control terminal, a read signal terminal, a detection module, and a multiplexing unit on one side of a substrate includes:

[0035] A first metal layer is prepared on one side of the substrate, and the first metal layer is patterned to form a multiplexed control electrode and a probe control electrode;

[0036] A semiconductor layer is fabricated on the side of the first metal layer away from the substrate;

[0037] A second metal layer is prepared on the side of the semiconductor layer away from the first metal layer, and the second metal layer is patterned to form a multiplexed first electrode, a multiplexed second electrode, a probe first electrode, and a probe second electrode.

[0038] Fourthly, embodiments of this application also provide a method for driving a detector panel, used to drive the detector panel as described in the first aspect, comprising:

[0039] A first control signal is sent to the first control terminal of the detector panel, causing the detection module to convert the optical signal into an electrical signal and output a read signal according to the first control signal;

[0040] A second control signal is sent to the second control terminal of the detector panel, causing multiple multiplexing units to sequentially connect the detection module to the read signal terminal according to the second control signal.

[0041] In some embodiments of this application, sending a second control signal to the second control terminal of the detector panel includes:

[0042] A second control signal is sequentially sent to at least one of the second control terminals at a first specified time interval.

[0043] In some embodiments of this application, sending a first control signal to the first control terminal of the detector panel includes:

[0044] First control signals are sent sequentially to at least one of the first control terminals at a second specified time interval.

[0045] The beneficial technical effects of the technical solution provided in this application include: by electrically connecting multiple multiplexing units to at least one read signal terminal, the number of read signal terminals can be greatly reduced, thereby leaving space for laying other signal lines on the side where the read signal terminals are laid, and preventing other signal lines located on different sides from affecting the bending performance of the flat panel detector; at the same time, due to the reduction in read signal terminals, the number of chips is reduced, the circuit board structure is simplified, the production process is reduced, and the production cost is reduced. Additional aspects and advantages of this application will be set forth in part in the description which follows, and will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0046] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0047] Figure 1 This is a schematic diagram of the structure of a flat panel detector in the prior art;

[0048] Figure 2 This is a circuit diagram of the detector panel in one embodiment of this application;

[0049] Figure 3 This is a cross-sectional schematic diagram of the detector panel in one embodiment of this application;

[0050] Figure 4 This is a schematic diagram of the structure of a flat panel detector in one embodiment of this application;

[0051] Figure 5This is a flowchart illustrating the driving method in one embodiment of this application;

[0052] Figure 6 This is a timing diagram of the detector panel in one embodiment of this application.

[0053] In the picture:

[0054] 11-Backplane; 12-Driver circuit board; 13-Reader circuit board; 14-Main control board;

[0055] 21-First control terminal; 22-Second control terminal; 23-Read signal terminal; 24-Detection unit; 25-Multiplexing unit; 26-Photoelectric conversion unit; 27-Bias voltage terminal;

[0056] 30 - Substrate; 31 - First metal layer; 32 - Semiconductor layer; 33 - Second metal layer; 34 - Gate insulating layer;

[0057] 41-Backplane; 42-Driver circuit board; 43-Reader circuit board; 44-Main control board. Detailed Implementation

[0058] This application is described in detail below. Examples of embodiments of this application are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. Furthermore, detailed descriptions of known technologies that are unnecessary for the features of this application are omitted. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0059] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0060] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this application means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say an element is “electrically connected” or “coupled” to another element, it can be directly electrically connected or coupled to the other element, or there may be intermediate elements. Furthermore, “electrically connected” or “coupled” as used herein can include radio connections or wireless coupling. The term “and / or” as used herein includes all or any unit and all combinations of one or more associated listed items.

[0061] The applicant of this application conducted research and found that, Figure 1 As shown, Figure 1 This is a schematic diagram of a detector panel in the prior art. In the prior art, the detector panel includes a backplate 11, a drive circuit board 12, a readout circuit board 13, and a main control board 14. The drive circuit board 12 and the readout circuit board 13 are located on different adjacent sides of the backplate 11. During bending of the detector panel in any direction, at least one of the drive circuit board 12 and the readout circuit board 13 will also bend. This increases the risk of metal fatigue in the drive circuit board 12 and the readout circuit board 13, making them prone to damage and breakage. In summary, the detector panels in the prior art suffer from insufficient bending performance, making them unsuitable for applications such as pipeline inspection.

[0062] This application provides a detector panel, its fabrication method, driving method, and flat panel detector, aiming to solve the above-mentioned technical problems of the prior art. The technical solution of this application and how it solves the aforementioned technical problems are described in detail below with specific embodiments.

[0063] Firstly, embodiments of this application provide a detector panel. For example... Figure 2 As shown, Figure 2 This is a circuit diagram of a detector panel in one embodiment of this application. The detector panel includes a first control terminal 21, a second control terminal 22, a read signal terminal 23, a detection module, and a multiplexing unit 25. Specifically, it includes:

[0064] The first control terminal 21 is used to receive the first control signal;

[0065] The second control terminal 22 is used to receive the second control signal;

[0066] Read signal terminal 23 is used to receive read signals;

[0067] The detection module is electrically connected to the first control terminal 21 and is used to convert optical signals into electrical signals and output reading signals according to the first control signal.

[0068] The multiplexing unit 25 is electrically connected to the second control terminal 22 and is used to connect the detection module to the reading signal terminal 23 according to the second control signal.

[0069] At least one of the read signal terminals 23 is electrically connected to the plurality of multiplexing units 25.

[0070] By electrically connecting multiple multiplexing units 25 to at least one read signal terminal 23, the number of read signal terminals 23 can be greatly reduced, thereby leaving space for other signal lines to be laid on the side where the read signal terminals 23 are laid, and preventing other signal lines located on different sides from affecting the bending performance of the detector panel; at the same time, due to the reduction of read signal terminals 23, the number of chips is reduced, the circuit board structure is simplified, the production process is reduced, and the production cost is reduced.

[0071] In some embodiments of this application, the multiplexing unit 25 includes: a multiplexing first electrode 251, a multiplexing second electrode 252, and a multiplexing control electrode 253;

[0072] The multiplexed first electrode 251 is electrically connected to the detection module;

[0073] The multiplexed second pole 252 is electrically connected to the read signal terminal 23;

[0074] The multiplexing control pole 253 is electrically connected to the second control terminal 22 and is used to connect the multiplexing first pole 251 and the multiplexing second pole 252 under the control of the second control signal.

[0075] In one embodiment, such as Figure 2 As shown. Under the control of the main control board 44, the second control terminal 22 sends a signal to the multiplexing control pole 253, that is, the second control terminal 22 outputs a high level, the multiplexing control pole 253 is turned on, the multiplexing first pole 251 and the multiplexing second pole 252 are connected, so that the signal can flow from the multiplexing first pole 251 to the multiplexing second pole 252 or from the multiplexing second pole 252 to the multiplexing first pole 251.

[0076] It is worth mentioning that, in some embodiments, the first electrode 251 is reused as the source, the second electrode 252 is reused as the drain, and the control electrode is the gate; in other embodiments, the first electrode 251 is reused as the drain, the second electrode 252 is reused as the source, and the control electrode is the gate.

[0077] The detection module includes a photoelectric conversion unit 26 and a detection unit 24. The photoelectric conversion unit 26 converts the optical signal into an electrical signal, and the detection unit 24 outputs a reading signal according to the first control signal.

[0078] In some embodiments of this application, at least one second control terminal 22 is electrically connected to one or more multiplexing units 25 respectively.

[0079] In this embodiment, when at least one second control terminal 22 outputs a high level, a signal is simultaneously or sequentially sent to the multiplexing control pole 253 of at least two different multiplexing units 25 to control the multiplexing first pole 251 and multiplexing second pole 252 of at least two multiplexing units 25 to conduct, thereby reducing the number of second control terminals 22, avoiding affecting the wiring of other signal lines on the same side, and preventing the bending performance of the flat panel detector from being affected; at the same time, due to the reduction of second control terminals 22, the number of chips is reduced, the circuit board structure is simplified, the production process is reduced, and the production cost is reduced.

[0080] When at least two multiplexing units 25 are electrically connected to different read signal terminals 23, the at least two multiplexing units 25 can be turned on simultaneously or sequentially, and the at least two read signal terminals 23 can simultaneously or sequentially read signals fed back by different columns of probe units 24. Simultaneous reading can reduce the overall reading time and improve reading efficiency. When at least two multiplexing units 25 are electrically connected to the same read signal terminal 23, the at least two multiplexing units 25 are turned on sequentially, and the read signal terminal 23 sequentially reads signals fed back by different columns of probe units 24.

[0081] In some embodiments of this application, the number of multiplexing units 25 electrically connected to each second control terminal 22 is equal.

[0082] In this embodiment, each second control terminal 22 is electrically connected to at least two multiplexing units 25, and the number of multiplexing units 25 electrically connected to each second control terminal 22 is equal. When the main control board 44 controls multiple second control terminals 22 to send signals sequentially, the number of multiplexing units 25 that are turned on each time is also equal. This can improve the utilization rate of the second control terminals 22 and further reduce the number of second control terminals 22.

[0083] In some embodiments of this application, the number of multiplexing units 25 electrically connected to each read signal terminal 23 is equal.

[0084] In this embodiment, each read signal terminal 23 is electrically connected to at least two multiplexing units 25, and the number of multiplexing units 25 electrically connected to each read signal terminal 23 is equal. When multiple multiplexing units 25 are turned on sequentially, each read signal terminal 23 sequentially reads signals from different multiplexing units 25. This can improve the utilization rate of the read signal terminals 23 and further reduce the number of read signal terminals 23.

[0085] In another specific embodiment, the number of multiplexing units 25 electrically connected to each second control terminal 22 is equal, and the number of multiplexing units 25 in each read signal terminal 23 is equal. That is, each column of detection units 24 is indirectly electrically connected to the read signal terminal 23 through one multiplexing unit 25, and no detection unit 24 is directly electrically connected to the read signal terminal 23.

[0086] In this embodiment, the detection units 24 on the detector panel are arranged in an array, which includes K rows and H columns. Each row of detection units 24 is electrically connected to a first control terminal 21, that is, the detector panel includes K first control terminals 21; each column of detection units 24 is electrically connected to a multiplexing unit 25, that is, the detector panel includes a total of H multiplexing units 25.

[0087] To avoid having too many multiplexing units 25 electrically connected to some of the read signal terminals 23, in this embodiment, the detector panel includes M read signal terminals 23, and each read signal terminal 23 is electrically connected to N multiplexing units 25, i.e., M·N=H.

[0088] This document only describes an embodiment where the number of multiplexing units 25 electrically connected to each second control terminal 22 is equal, and the number of multiplexing units 25 electrically connected to each read signal terminal 23 is equal. In other embodiments, the number of multiplexing units 25 electrically connected to different read signal terminals 23 may be different; the number of multiplexing units 25 electrically connected to different second control terminals 22 may also be different.

[0089] In some embodiments of this application, the detection unit 24 includes a first detection electrode 241, a second detection electrode 242, and a control detection electrode 243;

[0090] The first detection electrode 241 is electrically connected to the photoelectric conversion unit 26, the second detection electrode 242 is electrically connected to the multiplexing first electrode 251, and the detection control electrode 243 is electrically connected to the first control terminal 21.

[0091] In one embodiment, such as Figure 2As shown. Under the control of the main control board 44, the first control terminal 21 sends a signal to the detection control electrode 243 of the detection unit 24. That is, the first control terminal 21 outputs a high level, the detection control electrode 243 is turned on, and the first detection electrode 241 and the second detection electrode 242 are connected, so that the signal can flow from the first detection electrode 241 to the second detection electrode 242 or from the second detection electrode 242 to the first detection electrode 241.

[0092] It is worth mentioning that, in some embodiments, the first detection electrode 241 is the source electrode, the second detection electrode 242 is the drain electrode, and the detection control electrode 243 is the gate electrode; in other embodiments, the first detection electrode 241 is the drain electrode, the second detection electrode 242 is the source electrode, and the detection control electrode 243 is the gate electrode.

[0093] In some embodiments, the multiplexing unit 25 and the detection unit 24 include thin-film transistors for subsequent circuit control.

[0094] In some embodiments of this application, the detector panel further includes a bias signal terminal 27, and the photoelectric conversion unit 26 includes a first conversion electrode 261 and a second conversion electrode 262;

[0095] The first conversion electrode 261 is electrically connected to the bias signal terminal 27, and the second conversion electrode 262 is electrically connected to the first detection electrode 241.

[0096] In one embodiment, the photoelectric conversion unit 26 includes a metal / semiconductor / metal (MSM) photodiode. An MSM photodiode is a device in which a metal electrode is fabricated on a semiconductor surface to form a metal-semiconductor Schottky contact. It is characterized by easy optoelectronic integration, high bandwidth and high speed, a wide response wavelength range, efficient operation at room temperature, low dark current, high response speed, and high sensitivity. The material of the photoelectric conversion unit 26 includes indium gallium arsenide (InGaAs).

[0097] The voltage signal output by the photoelectric conversion unit 26 is usually a positive voltage signal. Therefore, in order to amplify the positive voltage signal output by the photoelectric conversion unit 26 into a larger positive voltage, the multiplexing unit 25 and the detection unit 24 include N-type thin film transistors.

[0098] A positive voltage is written to the negative terminal of the photoelectric conversion unit 26 through the bias signal terminal 27. This positive voltage can be 200V, but is not limited to this. The photoelectric conversion unit 26 is in the off state when there is no light. When there is light, the photoelectric conversion unit 26 can convert the light signal into an electrical signal to enable itself to operate. At this time, the initial voltage value of the positive terminal gradually approaches the voltage value of its negative terminal.

[0099] In another embodiment, the photoelectric conversion unit 26 is a PIN-type photoelectric conversion unit. This PIN-type photoelectric conversion unit has advantages such as small junction capacitance, short transit time, high sensitivity, and low noise.

[0100] The voltage signal output by the photoelectric conversion unit 26 is typically a negative voltage signal (including 0V), and the detection unit 24 includes a P-type thin-film transistor. The multiplexing unit 25 includes an N-type thin-film transistor.

[0101] A negative voltage is written to the negative terminal of the photoelectric conversion unit 26 through the bias signal terminal 27. This negative voltage can be -6V, but is not limited to this. The photoelectric conversion unit 26 is in the off state when there is no light. When there is light, the photoelectric conversion unit 26 can convert the light signal into an electrical signal to enable itself to operate. At this time, the initial voltage value of the positive terminal of the photoelectric conversion unit 26 gradually approaches the voltage value at the negative terminal of the photoelectric conversion unit.

[0102] In some embodiments, the first electrode of the photoelectric conversion unit 26 is the positive electrode and the second electrode is the negative electrode; in other embodiments, the first electrode of the photoelectric conversion unit 26 is the negative electrode and the second electrode is the positive electrode.

[0103] In some embodiments, the multiplexing control electrode 253 and the detection control electrode 243 are arranged on the same layer.

[0104] In other embodiments, the reused first electrode 251, the reused second electrode 252, and the detection first electrode 241 and the detection second electrode 242 are arranged on the same layer.

[0105] In some other embodiments, the multiplexed control electrode 253 and the detection control electrode 243 are arranged on the same layer, and the multiplexed first electrode 251, the multiplexed second electrode 252 and the detection first electrode 241 and the detection second electrode 242 are arranged on the same layer.

[0106] During the fabrication of the multiplexing unit 25 and the detection unit 24, at least one layer is set in the same layer. That is, the film layer of the multiplexing unit 25 and the film layer of the detection unit 221 can be obtained simultaneously by patterning the same film layer. By using the same process, there is no need to prepare other film layers, thereby simplifying the manufacturing process and improving production efficiency.

[0107] In some embodiments of this application, the detector panel includes a first metal layer 31, a semiconductor layer 32, and a second metal layer 33. The semiconductor layer 32 is disposed on one side of the first metal layer 31, and the second metal layer 33 is disposed on the side of the semiconductor layer 32 away from the first metal layer 31.

[0108] In some embodiments, the first metal layer 31 forms a multiplexing control electrode 253 and a detection control electrode 243.

[0109] In other embodiments, the second metal layer 33 forms a multiplexed first electrode 251, a multiplexed second electrode 252, and a probe first electrode 241 and a probe second electrode 242.

[0110] In some other embodiments, the first metal layer 31 forms a multiplexed control electrode 253 and a detection control electrode 243, and the second metal layer 33 forms a multiplexed first electrode 251, a multiplexed second electrode 252, a detection first electrode 241, and a detection second electrode 242.

[0111] In this embodiment, as Figure 3 As shown, Figure 3 This is a cross-sectional schematic diagram of a detector panel in one embodiment of this application. The detector panel includes a substrate 30, a first metal layer 31, a gate insulating layer 34, a semiconductor layer 32, and a second metal layer 33 stacked sequentially, and also includes a photoelectric conversion unit 26 and a bias signal terminal 27. The semiconductor layer 32 is an active layer, and the gate insulating layer 34 uses an insulating material to separate the first metal layer 31 from the second metal layer 33 and from the semiconductor layer 32 to prevent short circuit failure. During the fabrication of at least one of the first metal layer 31 and the second metal layer 33, when patterning is performed using a photomask, a multiplexed control electrode 253 and a detection control electrode 243 are simultaneously fabricated, or a multiplexed first electrode 251, a multiplexed second electrode 252, and a detection first electrode 241 and a detection second electrode 242 are fabricated.

[0112] Based on the same concept, in a second aspect, embodiments of this application provide a flat panel detector. For example... Figure 4 As shown, Figure 4 This is a schematic diagram of the structure of a flat panel detector in one embodiment of this application. The flat panel detector includes: a driver circuit board 42, a reading circuit board 43, a main control board 44, and a detector panel 41 as described in the first aspect;

[0113] The reading circuit board 43 and the driving circuit board 42 are located on the same side of the detector panel 41.

[0114] In this embodiment, by reducing the number of read signal terminals 23, the area of ​​the read circuit board 43 is also reduced, resulting in a larger remaining space on the same side as the read circuit board 43. This allows the drive circuit board 42 to be positioned on this side, meaning the drive circuit board 42 and the read circuit board 43 can be located on the same side of the detector panel 41, i.e., the side shown in the lower part of the figure. The multiplexing unit 25 and the read signal terminals 23 are also located on the same side. When the detector panel 41 is bent in at least one direction, the drive circuit board 42 and the read circuit board 43 do not need to be bent, thereby improving the overall bending performance of the detector panel and expanding its application scenarios.

[0115] In this embodiment, the flat panel detector is suitable for scenarios such as medical imaging or industrial flaw detection. The optical signal received by the photoelectric conversion unit 26 is X-ray.

[0116] Based on the same concept, in a third aspect, embodiments of this application provide a method for fabricating a detector panel, comprising the following steps:

[0117] A first control terminal 21, a second control terminal 22, a read signal terminal 23, a detection module, and a multiplexing unit 25 are fabricated on one side of the substrate 30, such that the detection module is electrically connected to the first control terminal 21 and the multiplexing unit 25 is electrically connected to the second control terminal 22.

[0118] At least one read signal terminal 23 is electrically connected to multiple multiplexing units 25.

[0119] In this embodiment, the step of fabricating the first control terminal 21, the second control terminal 22, the read signal terminal 23, the detection module, and the multiplexing unit 25 on one side of the substrate 30 further includes:

[0120] A first metal layer 31 is prepared on one side of the substrate 30, and the first metal layer 31 is patterned to form a multiplexed control electrode 253 and a probe control electrode 243.

[0121] A semiconductor layer 32 is formed on the side of the first metal layer 31 away from the substrate 30;

[0122] A second metal layer 33 is prepared on the side of the semiconductor layer 32 away from the first metal layer 31, and the second metal layer 33 is patterned to form a multiplexed first electrode 251, a multiplexed second electrode 252, a probe first electrode 241, and a probe second electrode 242.

[0123] Based on the same concept, in a fourth aspect, this application provides a driving method based on the detector panel in the first aspect. For example... Figure 5 As shown, Figure 5 This is a flowchart illustrating a driving method in one embodiment of this application. The driving method includes:

[0124] S1. Send a first control signal to the first control terminal 21 of the detector panel, so that the detection module converts the optical signal into an electrical signal and outputs a read signal according to the first control signal;

[0125] S2. Send a second control signal to the second control terminal 22 of the detector panel, so that multiple multiplexing units connect the detection module to the read signal terminal 23 according to the second control signal.

[0126] like Figure 6 As shown, Figure 6 This is a timing diagram of the detector panel in one embodiment of this application.

[0127] In some embodiments of this application, sending a first control signal to the first control terminal 21 of the detector panel includes: sending a scan signal to the first control terminal 21, the first control terminal 21 outputting a high level to the detection control electrode 253, so that the first detection electrode 241 and the second detection electrode 242 are connected, receiving photoelectric signals and then outputting a read signal to the multiplexing unit 25.

[0128] Specifically, each row's first control terminal 21 is loaded with a low level, at which time the detection control electrode 243 is turned off. The photoelectric conversion unit 26 is photosensitive when light is incident on it, and as the incident light continues to irradiate, the photoconductivity of the photosensitive material gradually increases. The first control terminal 211 is loaded with a high level to transmit a scan signal. The detection unit 24 receives the scan signal and opens its gate. A voltage difference is generated between the photoelectric conversion unit 26 and the bias signal terminal 27. The photoelectric conversion unit 26 converts the optical signal into an electrical signal and transmits it to the first detection electrode 241. The first detection electrode 241 and the second detection electrode 242 are turned on, and the electrical signal is transmitted through the detection unit 24 to the multiplexing unit 25 to send a read signal.

[0129] In some embodiments of this application, sending a second control signal to the second control terminal 22 of the detector panel includes: sequentially outputting selection signals to multiple second control terminals 22, and the second control terminals sequentially outputting high levels to the multiplexing control poles 253 of multiple multiplexing units 25, so that the multiplexing first poles 251 and multiplexing second poles 252 of multiple multiplexing units 25 are sequentially turned on, the detector unit 24 is turned on to the read signal terminal 23, and the read signal terminal 23 reads the read signal.

[0130] In step S2, each multiplexing unit 25 is loaded with a low level, at which time the multiplexing control electrode 253 is turned off. After the first control terminal 21 transmits a scan signal, the first second control terminal 221 is loaded with a high level to transmit a selection signal. Multiple multiplexing units 25 electrically connected to the first second control terminal 221 receive the selection signal and open their gates, and the first multiplexing electrode 251 and the second multiplexing electrode 252 are connected. The first multiplexing electrode 251 receives the electrical signal emitted from the second detection electrode 242, and sends it to the read signal terminal 23 through the second multiplexing electrode 252. Each read signal terminal 23 receives the electrical signal and records the photoelectric information of its respective first multiplexing unit 25. After reading is completed, the first second control terminal 22 is loaded with a low level, the second second control terminal 222 is loaded with a high level, and the electrical connection relationship is the same. Each read signal terminal 23 records the photoelectric information of its respective second multiplexing unit 25. After reading is completed, the third, fourth...Nth second control terminal 22N is sequentially loaded with a high level, and each reading signal terminal 23 sequentially records the photoelectric information of its respective multiplexing unit 25, thereby finally recording the photoelectric information of each column of the first row of detection units 24.

[0131] In some embodiments of this application, sending a second control signal to the second control terminal 22 of the detector panel includes:

[0132] A second control signal is sent to at least one second control terminal 22 sequentially at a first specified time interval T1.

[0133] In this embodiment, the detection units 24 are arranged in an array, and any one of the first control terminals 21 controls a row of detection units 24. During the period when any one of the first control terminals 21 outputs a high level, multiple second control terminals 22 sequentially output a high level. For example, in the figure, the first second control terminal 221 outputs a high level for a duration of T1 and then goes low, the second second control terminal 222 outputs a high level, and so on, until the high level output by the Nth second control terminal 22N goes low. The duration of the high level of each second control terminal 22 is T1, and the multiplexing unit 25 connected to the same read signal terminal 23 is sequentially turned on, with the turn-on time of each multiplexing unit 25 also being T1.

[0134] In some embodiments of this application, sending a first control signal to the first control terminal 21 of the detector panel includes:

[0135] A first control signal is sent to at least one first control terminal 21 sequentially at a second specified time interval T2.

[0136] In this embodiment, the detection units 24 are arranged in an array, and any one of the first control terminals 21 controls one row of detection units 24. During the period when any one of the first control terminals 21 outputs a high level, multiple second control terminals 22 sequentially output a high level, and the read signal terminal 23 can record the read signal of the next row of detection units 24. From the first first control terminal 211 controlling the first row of detection units 24 outputting a high level for a duration of T2 and then turning to a low level, the second first control terminal 212 controlling the second row of detection units 24 outputs a high level, and so on, until the Kth first control terminal 21K controlling the Kth row of detection units 24 turns to a low level. The high level duration of each first control terminal 21 is T2, and the read signals of multiple rows of detection units 24 on the entire detector panel are sequentially read by the read signal terminal 23.

[0137] In a specific embodiment, T2 = T1·N. The time for the first control terminal 21 to output a high level is equal to the time for N first control terminals 21 to output a high level sequentially. The N first control terminals 21 control N multiplexing units to be turned on sequentially, so that the read signal terminal 23 reads the read signal of a row of detection units 24.

[0138] By applying the embodiments of this application, at least the following beneficial effects can be achieved: Using the multiplexing unit 241 on the read signal terminal 23 can significantly reduce the number of read signal terminals 23. Even if the detector panel has a high resolution and the multiplexing unit 25 is used to transmit the drive signal, the read signal terminal 23 and the second control terminal 22 can still be placed on one side simultaneously, making it suitable for high-resolution flexible applications. Furthermore, due to the reduction in read signal terminals, the number of chips is reduced, the circuit board structure is simplified, the manufacturing process is reduced, and the production cost is lowered.

[0139] Those skilled in the art will understand that the steps, measures, and solutions in the various operations, methods, and processes discussed in this application can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and solutions in the various operations, methods, and processes discussed in this application can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and solutions in the prior art that are similar to those disclosed in this application can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0140] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0141] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0142] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "electrical connection" should be interpreted broadly. For example, they can refer to fixed electrical connections, detachable electrical connections, or integral electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0143] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0144] It should be understood that although the steps in the flowcharts of the accompanying figures are shown sequentially as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the accompanying figures may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

[0145] The above description is only a partial embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A detector panel, characterized in that, include: The first control terminal is used to receive the first control signal; The second control terminal is used to receive the second control signal; The read signal terminal is used to receive read signals; The detection module is electrically connected to the first control terminal and is used to convert optical signals into electrical signals and output read signals according to the first control signal. The multiplexing unit is electrically connected to the second control terminal and is used to connect the detection module to the reading signal terminal according to the second control signal. Wherein, at least one of the read signal terminals is electrically connected to a plurality of the multiplexing units; The multiplexing unit includes: a first multiplexing electrode, a second multiplexing electrode, and a multiplexing control electrode; The first multiplexing electrode is electrically connected to the detection module; the second multiplexing electrode is electrically connected to the read signal terminal; the control multiplexing electrode is electrically connected to the second control terminal, and is used to connect the first multiplexing electrode and the second multiplexing electrode under the control of the second control signal. The detection module includes a photoelectric conversion unit and a detection unit, and the detection unit includes: a first detection electrode, a second detection electrode, and a detection control electrode; The first detection electrode is electrically connected to the photoelectric conversion unit, the second detection electrode is electrically connected to the multiplexing first electrode, and the detection control electrode is electrically connected to the first control terminal; The multiplexing control electrode and the detection control electrode are arranged in the same layer; and / or, the multiplexing first electrode, the multiplexing second electrode, and the detection first electrode and the detection second electrode are arranged in the same layer; The detector panel includes a first metal layer, a semiconductor layer, and a second metal layer. The semiconductor layer is disposed on one side of the first metal layer, and the second metal layer is disposed on the side of the semiconductor layer away from the first metal layer. The first metal layer forms the multiplexing control electrode and the detection control electrode; and / or, the second metal layer forms the multiplexing first electrode, the multiplexing second electrode, the detection first electrode, and the detection second electrode; The detection units are arranged in an array, with any one first control terminal controlling one row of detection units; during the period when any one first control terminal outputs a high level, multiple second control terminals sequentially output a high level; multiplexing units connected to the same read signal terminal are sequentially activated; any one first control terminal controls one row of detection units; during the period when any one first control terminal outputs a high level, multiple second control terminals sequentially output a high level, and the read signal terminal can record the read signal of the next row of detection units; from the first first control terminal controlling the first row of detection units outputting a high level continuously to a low level, the second first control terminal controlling the second row of detection units outputs a high level, until the Kth first control terminal controlling the Kth row of detection units turns low, the read signals of the multiple rows of detection units on the entire detector panel are sequentially read by the read signal terminal; K is a positive integer.

2. The detector panel according to claim 1, characterized in that, At least one of the second control terminals is electrically connected to the plurality of the multiplexing units.

3. The detector panel according to claim 2, characterized in that, The number of multiplexing units electrically connected to each of the second control terminals is equal.

4. The detector panel according to claim 1, characterized in that, The detector panel also includes a bias signal terminal, and the photoelectric conversion unit includes a first conversion electrode and a second conversion electrode; The first conversion electrode is electrically connected to the bias signal terminal, and the second conversion electrode is electrically connected to the first detection electrode.

5. The detector panel according to claim 1, characterized in that, The number of multiplexing units electrically connected to each of the read signal terminals is equal.

6. A flat panel detector, characterized in that, include: A driver circuit board, a readout circuit board, a main control board, and a detector panel as described in any one of claims 1-5; The reading circuit board and the driving circuit board are located on the same side of the detector panel.

7. A method for fabricating a detector panel, used to fabricate the detector panel as described in any one of claims 1-5, characterized in that, include: A first control terminal, a second control terminal, a read signal terminal, a detection module, and a multiplexing unit are fabricated on one side of a substrate, such that the detection module is electrically connected to the first control terminal and the multiplexing unit is electrically connected to the second control terminal. Wherein, at least one of the read signal terminals is electrically connected to a plurality of the multiplexing units; The fabrication of a first control terminal, a second control terminal, a read signal terminal, a detection module, and a multiplexing unit on one side of the substrate includes: A first metal layer is prepared on one side of the substrate, and the first metal layer is patterned to form a multiplexed control electrode and a probe control electrode; A semiconductor layer is formed on the side of the first metal layer away from the substrate; A second metal layer is prepared on the side of the semiconductor layer away from the first metal layer, and the second metal layer is patterned to form a multiplexed first electrode, a multiplexed second electrode, a probe first electrode, and a probe second electrode.

8. A driving method based on the detector panel according to any one of claims 1-5, characterized in that, include: A first control signal is sent to the first control terminal of the detector panel, causing the detection module to convert the optical signal into an electrical signal and output a read signal according to the first control signal; A second control signal is sent to the second control terminal of the detector panel, causing multiple multiplexing units to sequentially connect the detection module to the read signal terminal according to the second control signal.

9. The driving method according to claim 8, characterized in that, The sending of the second control signal to the second control terminal of the detector panel includes: A second control signal is sequentially sent to at least one of the second control terminals at a first specified time interval.

10. The driving method according to claim 8 or 9, characterized in that, The step of sending the first control signal to the first control terminal of the detector panel includes: First control signals are sent sequentially to at least one of the first control terminals at a second specified time interval.

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