Furnace cover door and annealing furnace

By designing a furnace cover door that includes a door panel, a handle assembly, and a positioning assembly, and utilizing the coordination of the lock hook and the lock bearing as well as the deformation of the nitrogen spring, the problems of the existing furnace cover door being inconvenient to operate and loose are solved, and convenient and stable furnace body closure is achieved.

CN114877694BActive Publication Date: 2025-09-23ADVANCED MATERIALS TECH & ENG INC
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Patent Information

Application Number
CN202210569098.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-05-24
Publication Date
2025-09-23
Estimated Expiration
2042-05-24

AI Technical Summary

Technical Problem

The existing annealing furnace cover door needs to be fastened with a clamp after being manually closed, which is inconvenient to operate and easily loosens, affecting equipment safety and process.

Method used

A furnace cover door is designed, including a door panel, a handle assembly and a positioning assembly. The handle assembly drives the door panel to close the furnace body, and the lock hook and lock bearing of the positioning assembly are used to achieve tight positioning of the door panel. Combined with the deformation and recovery of the nitrogen spring, convenient closure and stable fit of the door panel are achieved.

Benefits of technology

The operation convenience and sealing effect of the furnace cover door are improved, the stability and safety of the furnace body are ensured, and the risk of loosening is reduced.

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Abstract

Embodiments of the present invention provide a furnace cover door and annealing furnace, relating to the field of semiconductor technology. The furnace cover door and annealing furnace include a door panel, a handle assembly, and a positioning assembly. The door panel is rotatably mounted on an equipment platform, and the handle assembly is rotatably mounted on the door panel, with the rotational planes of the door panel and the handle assembly coplanar. The positioning assembly is connected between the door panel and the handle assembly and is used to position the door panel when the door panel encloses the annealing furnace body. This improves operational convenience and solves the problem of loose furnace cover door.
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