Substrate transport module and die bonder

By designing a clamping and conveying mechanism for the substrate transport module, the problem of vibration and shaking of the substrate during long-distance transport is solved, achieving higher stability and die bonding efficiency.

CN114975206BActive Publication Date: 2026-04-14SHENZHEN XINYICHANG TECH CO LTD
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Patent Information

Application Number
CN202210742431.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-06-28
Publication Date
2026-04-14
Estimated Expiration
2042-06-28

AI Technical Summary

Technical Problem

In existing die bonding equipment, the substrate is prone to shaking and wobbling when transported over long distances, resulting in low stability.

Method used

A substrate transport module is adopted, including a substrate supply mechanism, a loading clamping and conveying mechanism, a transfer mechanism, a unloading clamping and conveying mechanism, and a recycling and docking mechanism. The substrate is transferred by clamping, reducing belt conveying and increasing stability.

Benefits of technology

It improves the stability of substrate transfer, shortens the transport path length, and enhances die bonding efficiency and accuracy.

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Abstract

The application relates to the technical field of die bonding equipment, and provides a substrate conveying module and a die bonder. The substrate conveying module comprises a rack, a substrate supply mechanism, a feeding clamping and conveying mechanism, a carrying mechanism, a discharging clamping and conveying mechanism, a recycling connection mechanism and a substrate storage mechanism. The feeding clamping and conveying mechanism is used for clamping and fixing a substrate, and moving the substrate from one side of the feeding clamping and conveying mechanism to the other side of the feeding clamping and conveying mechanism. The carrying mechanism is used for moving the substrate to a die bonding station. The discharging clamping and conveying mechanism is used for clamping and fixing the substrate and moving the substrate. The recycling connection mechanism is used for moving the substrate from one side of the recycling connection mechanism to the other side of the recycling connection mechanism. The die bonder comprises the substrate conveying module. The substrate conveying module and the die bonder provided by the application are not prone to shaking and shaking, have high conveying stability, greatly shorten the conveying path length of the substrate, shorten the time for moving the substrate, have high running speed, and improve the die bonding efficiency and precision.
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