Substrate transport module and die bonder

Abstract

The application relates to the technical field of die bonding equipment, and provides a substrate conveying module and a die bonder. The substrate conveying module comprises a rack, a substrate supply mechanism, a feeding clamping and conveying mechanism, a carrying mechanism, a discharging clamping and conveying mechanism, a recycling connection mechanism and a substrate storage mechanism. The feeding clamping and conveying mechanism is used for clamping and fixing a substrate, and moving the substrate from one side of the feeding clamping and conveying mechanism to the other side of the feeding clamping and conveying mechanism. The carrying mechanism is used for moving the substrate to a die bonding station. The discharging clamping and conveying mechanism is used for clamping and fixing the substrate and moving the substrate. The recycling connection mechanism is used for moving the substrate from one side of the recycling connection mechanism to the other side of the recycling connection mechanism. The die bonder comprises the substrate conveying module. The substrate conveying module and the die bonder provided by the application are not prone to shaking and shaking, have high conveying stability, greatly shorten the conveying path length of the substrate, shorten the time for moving the substrate, have high running speed, and improve the die bonding efficiency and precision.

Description

Technical Field

[0001] This application belongs to the field of die bonding equipment technology, and more specifically, relates to a substrate transport module and a die bonding machine. Background Technology

[0002] Die bonding typically involves using a die bonding arm to pick up a wafer from its feed position and move it to a die bonding position on the substrate, precisely mounting the wafer onto the substrate. The wafer is usually mounted in a die ring, which supports it. After the wafer is removed from the wafer, an empty die ring is formed. For ease of description, the die ring containing the wafer is called a full die ring. The wafer has a front and a back side. The back side of the wafer typically has electrodes for connection to the substrate, while the front side of the wafer is attached to a blue film. The substrate is typically a PCB (Printed Circuit Board).

[0003] A Chinese invention patent application with application number 202110522689.4 discloses a die bonding device, including a frame, a die feeding assembly, and a die transfer assembly. The die feeding assembly can transfer die holders to the die transfer assembly, and the die transfer assembly can transfer die holders to the die bonding position. The device also includes a unloading assembly for receiving die holders transferred from the die transfer assembly and transferring them to the next station. The unloading assembly is mounted on the frame and connected to the die transfer assembly. In the die feeding assembly, a feeding motor drives a corresponding drive wheel to rotate, which in turn drives two conveyor belts to rotate synchronously, thereby transferring the die holders to the die transfer assembly. In the unloading assembly, the die holders transferred from the die transfer assembly are placed on two belts. A feeding motor drives multiple rotating wheels to rotate, which in turn drives the two belts to rotate synchronously, thereby transferring the die holders to the next station. The die holder is the substrate.

[0004] The aforementioned technologies have the following drawbacks:

[0005] During the process of transferring the substrate to the support transfer assembly and during the process of transferring the substrate out of the support transfer assembly, the substrate is transferred over a relatively long distance. Moreover, the substrate is mainly transported by belt through friction. Given that the belt is long and is a flexible structure, the substrate inevitably shakes or wobbles during long-distance transfer, resulting in low stability, which needs to be improved. Summary of the Invention

[0006] The purpose of this application is to provide a substrate transport module and a die bonder to solve the following technical problem: In the operation of common die bonders, the substrate inevitably shakes or wobbles when it is transported over a long distance, resulting in low stability.

[0007] To achieve the above objectives, firstly, the technical solution adopted in this application is:

[0008] A substrate transport module is provided, comprising:

[0009] A substrate supply mechanism, wherein the substrate supply mechanism is provided with a substrate output port;

[0010] The loading clamping and conveying mechanism is located on the side of the substrate supply mechanism near the substrate output port, and is used to clamp, fix and convey the substrate.

[0011] The transfer mechanism is located on the side of the loading clamping and conveying mechanism away from the substrate supply mechanism, and is used to transfer the substrate to the die bonding station.

[0012] The unloading clamping and conveying mechanism is located on the side of the transfer mechanism away from the loading clamping and conveying mechanism, and is used to clamp and fix the substrate and transfer the substrate.

[0013] A recycling connection mechanism, located on one side of the unloading clamping and conveying mechanism, is used to transfer the substrate from one side of the recycling connection mechanism to the other side of the recycling connection mechanism; and,

[0014] A substrate storage mechanism is provided with a substrate input port on the side of the substrate storage mechanism near the recycling connection mechanism.

[0015] In one achievable technical solution of this application, the substrate supply mechanism includes:

[0016] Supply support base;

[0017] The supply platform is vertically slidably mounted on the supply support base;

[0018] The first supply drive unit is installed on the supply support base and connected to the supply platform, and is used to drive the supply platform to rise and fall intermittently.

[0019] A supply storage box is provided, which is provided with multiple sets of slots arranged vertically and spaced apart for insertion into both sides of the substrate. The slots are arranged along a first direction. The supply storage box is slidably mounted on the supply platform along a second direction, which is perpendicular to the first direction.

[0020] A second supply drive unit, mounted on the supply platform and connected to the supply storage box, is used to drive the supply storage box to slide back and forth along a second direction; and...

[0021] A feeding unit is installed on the side of the feeding platform away from the substrate output port, and is used to push the substrates out one by one from the feeding storage box along a first direction.

[0022] In one feasible technical solution of this application, the feeding and clamping conveying mechanism includes:

[0023] A feeding conveyor base, wherein a connection inlet and a connection outlet are respectively provided at both ends of the feeding conveyor base;

[0024] The feeding clamping device is slidably mounted on the feeding conveying base along the first direction for clamping and fixing the substrate;

[0025] A feeding drive device is installed on the feeding conveying base and connected to the feeding clamping device, used to drive the feeding clamping device to slide back and forth along a first direction;

[0026] Two sets of partition devices are installed on the feeding conveyor base along a first direction. The partition devices are arranged along the first direction, and the two sets of partition devices are located on both sides of the feeding clamping device; and...

[0027] An auxiliary conveying device is installed on the partition device and is used to contact the side of the substrate held by the feeding clamping device and to assist in conveying the substrate along the first direction.

[0028] In one feasible technical solution of this application, the feeding clamping device includes:

[0029] A feeding sliding base is slidably assembled on the feeding conveyor base;

[0030] A loading clamping unit is slidably mounted on a loading sliding base in a vertical direction for clamping and fixing the substrate; and,

[0031] A feeding lifting drive unit is installed on the feeding sliding base and connected to the feeding clamping unit, and is used to drive the feeding clamping unit to lift.

[0032] In one achievable technical solution of this application, the transfer mechanism includes:

[0033] Transfer support;

[0034] The transfer platform is slidably mounted on the transfer support base along a first direction;

[0035] The first transfer drive unit is mounted on the transfer support and connected to the transfer platform, and is used to drive the transfer platform to slide back and forth along the first direction;

[0036] A transfer clamp, slidably mounted on the transfer platform along a second direction, is used to clamp and fix the substrate; and,

[0037] The second transfer drive unit is mounted on the transfer platform and connected to the transfer clamp, and is used to drive the transfer clamp to slide back and forth along the second direction.

[0038] In one feasible technical solution of this application, the transfer clamp includes:

[0039] Clamping base plate;

[0040] A fixed baffle is fixedly installed on one side of the clamping base plate;

[0041] A movable baffle is slidably mounted on the other side of the clamping base plate. The movable baffle and the fixed baffle are arranged in parallel. A flexible plate is provided on the side of the movable baffle close to the fixed baffle.

[0042] A transfer clamping drive unit is mounted on the clamping base plate and connected to the movable baffle, used to drive the movable baffle to move closer to or away from the fixed baffle;

[0043] A transfer plate is mounted on the clamping base plate to support the substrate.

[0044] In one achievable technical solution of this application, the unloading clamping and conveying mechanism includes:

[0045] Material feeding support base;

[0046] The material feeding sliding seat is slidably assembled onto the material feeding support seat along the first direction;

[0047] A feeding drive device is installed on the feeding support and connected to the feeding sliding seat, and is used to drive the feeding sliding seat to slide back and forth along a first direction;

[0048] A material unloading lifting drive unit is mounted on the material unloading sliding seat; and,

[0049] The unloading clamping unit is slidably mounted on the unloading sliding seat in the vertical direction for clamping and fixing the substrate. The unloading lifting drive unit drives the unloading clamping unit to lift and lower.

[0050] In one achievable technical solution of this application, the recycling docking mechanism includes:

[0051] Connecting support base;

[0052] A fixed mounting bracket is fixedly installed on one side of the connecting support base;

[0053] A movable mounting bracket is slidably assembled to the other side of the connecting support base, and the movable mounting bracket and the fixed mounting bracket are arranged in parallel.

[0054] A docking drive unit is mounted on the docking support and connected to the movable mounting frame, used to drive the movable mounting frame to move closer to or away from the fixed mounting frame;

[0055] Two sets of connecting belt conveyor units are respectively installed on the fixed mounting frame and the movable mounting frame. The two sides of the substrate are supported on the two sets of connecting belt conveyor units for transferring the substrate.

[0056] In one achievable technical solution of this application, the substrate storage mechanism includes:

[0057] Storage support base;

[0058] The storage platform is vertically slidably mounted on the storage support base;

[0059] The first storage drive unit is installed on the storage support base and connected to the storage platform, and is used to drive the storage platform to rise and fall intermittently;

[0060] A storage box is provided with multiple sets of slots arranged vertically at intervals for insertion into both sides of a substrate. The slots are arranged along a first direction. The storage box is slidably mounted on a storage platform along a second direction perpendicular to the first direction.

[0061] The second storage drive unit is installed on the storage platform and connected to the storage box, and is used to drive the storage box to slide back and forth along the second direction.

[0062] To achieve the above objectives, secondly, the technical solution adopted in this application is:

[0063] A die bonder is provided, including a substrate transport module as described above.

[0064] In summary, this application includes at least the following beneficial technical effects:

[0065] After the substrate supply mechanism transfers the substrate out of the substrate output port, the loading clamping and conveying mechanism clamps and fixes the substrate and moves it to the transfer mechanism. The transfer mechanism then moves the substrate to the die bonding station. After the die bonding operation, the substrate becomes a substrate. The transfer mechanism then conveys the substrate to the unloading clamping and conveying mechanism. The unloading clamping and conveying mechanism clamps and fixes the substrate and moves it to the recycling and docking mechanism. The recycling and docking mechanism then moves the substrate into the substrate storage mechanism.

[0066] The substrate transport module designed above adds a loading clamping and conveying mechanism and a unloading clamping and conveying mechanism. It mainly transfers the substrate by clamping it. Compared with belt conveyor, the structure is simple, the substrate is less prone to shaking and wobbling during the transfer process, and the transport stability is improved. At the same time, the entire substrate transport module has a linear structure, which greatly shortens the transport path length of the substrate, shortens the transfer time, and has a faster operating speed, thus improving the die bonding efficiency and accuracy. Attached Figure Description

[0067] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0068] Figure 1 This is a schematic diagram of the structure of the substrate transport module provided in an embodiment of this application.

[0069] Figure 2 A schematic diagram of the substrate supply mechanism is provided for the embodiments of this application.

[0070] Figure 3 A schematic diagram of the structure of the loading clamping and conveying mechanism is provided for the embodiments of this application.

[0071] Figure 4 A schematic diagram of the structure of the feeding clamping device provided in the embodiments of this application.

[0072] Figure 5 A schematic diagram of the transfer mechanism is provided for the embodiments of this application.

[0073] Figure 6 A schematic diagram of the structure of the load transfer clamp is provided for the embodiments of this application.

[0074] Figure 7 A schematic diagram of the structure of the feeding and clamping conveying mechanism is provided for the embodiments of this application.

[0075] Figure 8 A schematic diagram of the recycling and docking mechanism is provided for the embodiments of this application.

[0076] Figure 9 A schematic diagram of the substrate storage mechanism is provided for the embodiments of this application.

[0077] Figure 10 This is a schematic diagram of the structure of the die bonder provided in an embodiment of this application.

[0078] The following are the labeling elements in the figure:

[0079] 101. Rack;

[0080] 102. Substrate supply mechanism; 21. Supply support base; 22. Supply platform; 23. First supply drive unit; 24. Supply storage box; 25. Second supply drive unit; 26. Supply pusher unit;

[0081] 103. Feeding clamping and conveying mechanism; 31. Feeding conveying base; 32. Feeding clamping device; 321. Feeding sliding base; 322. Feeding clamping unit; 3221. Feeding clamping base; 3222. Feeding fixed clamp; 3223. Feeding movable clamp; 3224. Feeding telescopic power component; 323. Feeding lifting drive unit; 3231. Lifting screw; 3232. First power component; 324. First guide rail; 325. 33. Slider; 33. Feeding drive device; 331. First driven pulley; 332. First driving pulley; 333. First synchronous belt; 334. Second power component; 34. Baffle device; 341. Fixed base plate; 342. Adjustable baffle; 35. Auxiliary conveying device; 351. Second driving pulley; 352. Second driven pulley; 353. Second synchronous belt; 354. Third power component; 36. Second guide rail; 37. Second slider;

[0082] 104. Transfer mechanism; 41. Transfer support base; 42. Transfer platform; 43. First transfer drive unit; 44. Transfer clamping base; 441. Clamping base plate; 442. Fixed baffle; 443. Movable baffle; 4431. Flexible plate; 444. Transfer clamping drive unit; 445. Transfer tray; 45. Second transfer drive unit;

[0083] 105. Unloading clamping and conveying mechanism; 51. Unloading support base; 52. Unloading sliding base; 53. Unloading drive device; 54. Unloading lifting drive unit; 55. Unloading clamping unit; 551. Unloading clamping base; 552. Unloading fixed clamp; 553. Unloading movable clamp; 554. Unloading telescopic power component;

[0084] 106. Recycling and docking mechanism; 61. Dock support base; 62. Fixed mounting bracket; 63. Movable mounting bracket; 64. Dock drive unit; 65. Dock belt conveyor unit;

[0085] 107. Substrate storage mechanism; 71. Storage support base; 72. Storage platform; 73. First storage drive unit; 74. Storage box; 75. Second storage drive unit. Detailed Implementation

[0086] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0087] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0088] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0089] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0090] Please refer to the following: Figures 1-10 The substrate transport module and die bonder provided in the embodiments of this application will now be described.

[0091] This application provides a substrate transport module. Please refer to [link / reference]. Figure 1 It includes: a substrate supply mechanism 102, a loading clamping and conveying mechanism 103, a transfer mechanism 104, a unloading clamping and conveying mechanism 105, a recycling and connection mechanism 106, and a substrate storage mechanism 107.

[0092] A substrate output port is provided on one side of the substrate supply mechanism 102.

[0093] The loading clamping and conveying mechanism 103 is located on the side of the substrate supply mechanism 102 near the substrate output port. The loading clamping and conveying mechanism 103 is used to clamp and fix the substrate and move the substrate from one side of the loading clamping and conveying mechanism 103 to the other side of the loading clamping and conveying mechanism 103.

[0094] The transfer mechanism 104 is located on the side of the loading clamping and conveying mechanism 103 away from the substrate supply mechanism 102. The transfer mechanism 104 is used to transfer the substrate to the die bonding station.

[0095] The unloading clamping and conveying mechanism 105 is located on the side of the transfer mechanism 104 away from the loading clamping and conveying mechanism 103. The unloading clamping and conveying mechanism 105 is used to clamp and fix the substrate and transfer the substrate.

[0096] The recycling connection mechanism 106 is located on one side of the unloading clamping and conveying mechanism 105. The recycling connection mechanism 106 is used to transfer the substrate from one side of the recycling connection mechanism 106 to the other side of the recycling connection mechanism 106.

[0097] The substrate storage mechanism 107 has a substrate input port on the side near the recycling connection mechanism 106.

[0098] Please see Figure 1 and Figure 2 The substrate supply mechanism 102 includes: a supply support 21, a supply platform 22, a first supply drive unit 23, a supply storage box 24, a second supply drive unit 25, and a supply pusher unit 26.

[0099] The supply support base 21 is a cuboid structure and is arranged vertically; the supply platform 22 is vertically slidably mounted on the supply support base 21 via a vertical slider; the first supply drive unit 23 is installed on the supply support base 21 and connected to the supply platform 22, and the first supply drive unit 23 is used to drive the supply platform 22 to rise and fall intermittently.

[0100] The supply storage box 24 is provided with multiple sets of slots arranged vertically and spaced apart for insertion into both sides of the substrate. The slots are arranged along a first direction. The supply storage box 24 is slidably mounted on the supply platform 22 along a second direction, which is perpendicular to the first direction.

[0101] The second supply drive unit 25 is mounted on the supply platform 22 and connected to the supply storage box 24. The second supply drive unit 25 is used to drive the supply storage box 24 to slide back and forth along the second direction. The supply push unit 26 is mounted on the side of the supply platform 22 away from the substrate output port. The supply push unit 26 is used to push the substrate out piece by piece from the supply storage box 24 along the first direction.

[0102] In this embodiment, the first supply drive unit 23 and the second supply drive unit 25 are both servo motor driven linear screw slide modules, and the supply push unit 26 is a cylinder. In other embodiments, the first supply drive unit 23 and the second supply drive unit 25 can also be other structural forms, such as: servo motor driven pulley transmission structure, gear and rack transmission structure, or cylinder transmission structure, etc. The supply push unit 26 can also be other structural forms, such as: servo motor driven linear screw slide module, pulley transmission structure, gear and rack transmission structure, etc.

[0103] Please see Figure 1 and Figure 3 The feeding clamping and conveying mechanism 103 includes: a feeding conveying base 31, a feeding clamping device 32, a feeding drive device 33, two sets of partition devices 34, and an auxiliary conveying device 35.

[0104] The two ends of the feeding conveying base 31 are respectively provided with a docking inlet and a docking outlet; the feeding clamping device 32 is slidably mounted on the feeding conveying base 31 along the first direction for clamping and fixing the substrate; the feeding drive device 33 is mounted on the feeding conveying base 31 and connected to the feeding clamping device 32, and the feeding drive device 33 is used to drive the feeding clamping device 32 to slide back and forth along the first direction; two sets of partition devices 34 are mounted on the feeding conveying base 31 along the first direction, and the partition devices 34 are arranged along the first direction and located on both sides of the feeding clamping device 32; the auxiliary conveying device 35 is mounted on the partition devices 34, and the auxiliary conveying device 35 is used to contact the side of the feeding clamping device 32 that clamps the substrate and to assist in conveying the substrate along the first direction.

[0105] After the substrate is transported to the docking inlet of the loading and conveying base 31, the loading clamping device 32 can clamp and fix one end of the substrate, the partition device 34 has a certain blocking and limiting effect on the side of the substrate, and the auxiliary conveying device 35 can also contact the side of the substrate. Under the joint drive of the loading drive device 33 and the auxiliary conveying device 35, the substrate can be stably transported from the docking inlet to the docking outlet. The entire loading clamping and conveying mechanism 103 has a simple structure, light weight, low vibration, high conveying stability, and significantly shortens the substrate conveying time. It also has a fast running speed and improves the die bonding efficiency and accuracy.

[0106] The feeding drive device 33 includes: a first driven pulley 331, a first driving pulley 332, a first synchronous belt 333, and a second power component 334.

[0107] The first driven pulley 331 is rotatably mounted on the feeding conveyor base 31; the first driving pulley 332 is rotatably mounted on the feeding conveyor base 31; the first synchronous belt 333 is connected between the first driven pulley 331 and the first driving pulley 332, and part of the first synchronous belt 333 is fixedly connected to the feeding clamping device 32; the second power component 334 is mounted on the feeding conveyor base 31, and the output end of the second power component 334 is connected to the first driving pulley 332. The second power component 334 is used to drive the first driving pulley 332 to rotate forward and backward.

[0108] In this embodiment, the second power component 334 is a servo motor that can be precisely controlled by a PLC program. When the second power component 334 is working, it can drive the first synchronous belt 333 to rotate through the first drive wheel. The first synchronous belt 333 then drives the feeding clamping device 32 to reciprocate. The feeding drive device 33 designed above has a simple structure, is easy to operate, has low manufacturing and maintenance costs, and can drive the feeding clamping device 32 to move precisely to a preset position.

[0109] The partition device 34 includes: a fixed base plate 341, an adjustable baffle 342, and multiple locking components. The fixed base plate 341 is horizontally mounted on the feeding conveyor base 31. The adjustable baffle 342 is slidably assembled on the fixed base plate 341. The fixed base plate 341 and the adjustable baffle 342 are arranged vertically. The sliding direction of the adjustable baffle 342 is perpendicular to the sliding direction of the feeding clamping device 32. For example, in this embodiment, the sliding direction of the feeding clamping device 32 is the Y-axis direction, and the sliding direction of the adjustable baffle 342 is the X-axis direction. The locking components are used to lock and fix the adjustable baffle 342 to the fixed base plate 341. The locking components are not specifically shown in the figure. The locking components can be screws or pins or other accessories.

[0110] The auxiliary conveying device 35 includes: a second driving pulley 351, a plurality of second driven pulleys 352, a second synchronous belt 353, and a third power component 354. The second driving pulley 351 is rotatably mounted on the side of the adjustable baffle 342 near the substrate; the second driven pulleys 352 are rotatably mounted on the side of the adjustable baffle 342 near the substrate; the second synchronous belt 353 is connected between the plurality of second driven pulleys 352 and the second driving pulley 351, and the second synchronous belt 353 supports the side of the substrate clamped on the conveying and feeding clamping device 32; the third power component 354 is installed on the side of the adjustable baffle 342 away from the substrate, and the output end of the third power component 354 is connected to the second driving pulley 351, and the third power component 354 is used to drive the second driving pulley 351 to rotate forward and backward.

[0111] In this embodiment, the third power component 354 is a servo motor that can be precisely controlled by a PLC program. When the third power component 354 is working, it can drive the second synchronous belt 353 to rotate through the second active pulley 351. The second synchronous belt 353 then assists the base plate to move through friction. The auxiliary transmission device 35 designed above has a simple structure, is easy to operate, and has relatively low manufacturing and maintenance costs.

[0112] A second guide rail 36 is provided on the feeding conveyor base 31, and a second slider 37 is provided on the feeding clamping device 32. The second slider 37 and the second guide rail 36 are slidably assembled. Through the cooperation of the second slider 37 and the second guide rail 36, the feeding clamping device 32 is more stable during sliding.

[0113] Please see Figure 1 and Figure 4 The feeding clamping device 32 includes: a feeding sliding base 321, a feeding clamping unit 322, and a feeding lifting drive unit 323.

[0114] The loading sliding base 321 is slidably mounted on the loading conveyor base 31; the loading clamping unit 322 is slidably mounted on the loading sliding base 321 in the vertical direction, and the loading clamping unit 322 is used to clamp and fix the substrate; the loading lifting drive unit 323 is mounted on the loading sliding base 321 and connected to the loading clamping unit 322, and the loading lifting drive unit 323 is used to drive the loading clamping unit 322 to lift.

[0115] When the loading lifting drive unit 323 is working, it can drive the loading clamping unit 322 to move up and down along the loading sliding base 321, which helps the loading clamping unit 322 to quickly align with the position of the substrate, which helps the substrate to be clamped smoothly and efficiently, and improves the conveying efficiency.

[0116] The loading clamping unit 322 includes: a loading clamping base 3221, a loading fixed clamp 3222, a loading movable clamp 3223, and a loading telescopic power member 3224. The loading fixed clamp 3222 is fixedly installed on the loading clamping base 3221. The loading movable clamp 3223 is used to cooperate with the loading fixed clamp 3222 to clamp and fix the substrate. The loading telescopic power member 3224 is installed on the loading clamping base 3221. The loading movable clamp 3223 is connected to the output end of the loading telescopic power member 3224. The loading telescopic power member 3224 is used to drive the loading movable clamp 3223 to move closer to or away from the loading fixed clamp 3222.

[0117] When the loading telescopic power component 3224 is working, it can drive the loading movable clamp 3223 to move. The loading movable clamp 3223, together with the loading fixed clamp 3222, firmly clamps or releases the substrate, achieving the purpose of clamping and releasing the substrate. The structural design is relatively simple, the operation and maintenance are convenient, and the clamping operation is relatively stable, which is conducive to the stable transport of the substrate. In this embodiment, the loading telescopic power component 3224 is a cylinder, and the output end of the cylinder is arranged upward. In other embodiments, the loading telescopic power component 3224 can also be a hydraulic cylinder or an electric push rod.

[0118] The side of the loading sliding base 321 is provided with a vertically arranged first guide rail 324, and the side of the loading clamping base 3221 is provided with a first slider 325. The first slider 325 and the first guide rail 324 are slidably assembled. Through the cooperation of the first slider 325 and the first guide rail 324, the loading clamping unit 322 is more stable during the lifting process.

[0119] The feeding lifting drive unit 323 includes: a lifting screw 3231 and a first power component 3232. The lifting screw 3231 is rotatably mounted on the side of the feeding sliding base 321. The rotation axis of the lifting screw 3231 is arranged vertically. The lifting screw 3231 passes through the feeding clamping base 3221 and is threadedly connected to the feeding clamping base 3221. The first power component 3232 is installed on the side of the feeding sliding base 321. The output end of the first power component 3232 is connected to one end of the lifting screw 3231. The first power component 3232 is used to drive the lifting screw 3231 to rotate forward and backward.

[0120] In this embodiment, the first power component 3232 is a servo motor that can be precisely controlled by a PLC program. When the first power component 3232 is working, it can drive the lifting screw 3231 to rotate, thereby driving the loading clamping base 3221 to rise and fall stably. The loading lifting drive unit 323 designed above has a simple structure, is easy to operate, and has relatively low manufacturing and maintenance costs.

[0121] Both the movable feeding clamp 3223 and the fixed feeding clamp 3222 are elongated plates, and anti-slip structures are provided on the sides of the movable feeding clamp 3223 and the fixed feeding clamp 3222 that are close to each other. The elongated plate shape of the movable feeding clamp 3223 and the fixed feeding clamp 3222 allows for a larger contact area with the end of the substrate, and the anti-slip structure has a large coefficient of friction, effectively preventing the substrate from shaking during transport.

[0122] Please see Figure 1 and Figure 5 The transfer mechanism 104 includes: a transfer support 41, a transfer platform 42, a first transfer drive unit 43, a transfer clamping seat 44, and a second transfer drive unit 45.

[0123] The transfer platform 42 is slidably mounted on the transfer support 41 along a first direction; the first transfer drive unit 43 is mounted on the transfer support 41 and connected to the transfer platform 42, and the first transfer drive unit 43 is used to drive the transfer platform 42 to slide back and forth along the first direction; the transfer clamp 44 is slidably mounted on the transfer platform 42 along a second direction, and the transfer clamp 44 is used to clamp and fix the substrate; the second transfer drive unit 45 is mounted on the transfer platform 42 and connected to the transfer clamp 44, and the second transfer drive unit 45 is used to drive the transfer clamp 44 to slide back and forth along the second direction.

[0124] In this embodiment, the first transfer drive unit 43 is a first flat linear motor, the mover of which is mounted on the transfer platform 42, and the stator of which is mounted on the transfer support 41; the second transfer drive unit 45 is a second flat linear motor, the mover of which is mounted on the transfer clamp 44, and the stator of which is mounted on the transfer platform 42.

[0125] Please see Figure 1 and Figure 6 The transfer clamping base 44 includes: a clamping base plate 441, a fixed baffle 442, a movable baffle 443, a transfer clamping drive unit 444, and a transfer tray 445.

[0126] The fixed baffle 442 is fixedly installed on one side of the clamping base plate 441; the movable baffle 443 is slidably assembled on the other side of the clamping base plate 441. The movable baffle 443 and the fixed baffle 442 are arranged in parallel. A flexible plate 4431 is provided on the side of the movable baffle 443 near the fixed baffle 442. The flexible plate 4431 has deformable characteristics, so that the substrate can be protected from being damaged when clamping the substrate.

[0127] The transfer clamping drive unit 444 is mounted on the clamping base plate 441 and connected to the movable baffle 443. The transfer clamping drive unit 444 is used to drive the movable baffle 443 to move closer to or away from the fixed baffle 442. The transfer support plate 445 is mounted on the clamping base plate 441 and is used to support the substrate.

[0128] In this embodiment, the transfer clamping drive unit 444 is a set of multiple synchronously operating cylinders. In other embodiments, the transfer clamping drive unit 444 may also be a hydraulic cylinder, an electric push rod, or a linear lead screw slide module driven by a servo motor.

[0129] Please see Figure 1 and Figure 7 The unloading clamping and conveying mechanism 105 includes: an unloading support base 51, an unloading sliding base 52, an unloading drive device 53, an unloading lifting drive unit 54, and an unloading clamping unit 55.

[0130] The unloading sliding seat 52 is slidably mounted on the unloading support seat 51 along the first direction; the unloading drive device 53 is mounted on the unloading support seat 51 and connected to the unloading sliding seat 52, and the unloading drive device 53 is used to drive the unloading sliding seat 52 to slide back and forth along the first direction; the unloading lifting drive unit 54 is mounted on the unloading sliding seat 52; the unloading clamping unit 55 is slidably mounted on the unloading sliding seat 52 along the vertical direction, and the unloading clamping unit 55 is used to clamp and fix the substrate, and the unloading lifting drive unit 54 drives the unloading clamping unit 55 to lift up and down.

[0131] In this embodiment, the unloading drive device 53 is a synchronous pulley and synchronous belt transmission structure driven by a servo motor. In other embodiments, the unloading drive device 53 can also be a linear lead screw slide module driven by a servo motor.

[0132] In this embodiment, the unloading lifting drive unit 54 is a cylinder. In other embodiments, the unloading lifting drive unit 54 may also be a hydraulic cylinder, an electric push rod, or a linear screw slide module driven by a servo motor.

[0133] The unloading clamping unit 55 includes: an unloading clamping base 551, an unloading fixed clamp 552, an unloading movable clamp 553, and an unloading telescopic power member 554. The unloading fixed clamp 552 is fixedly installed on the unloading clamping base 551. The unloading movable clamp 553 is used to cooperate with the unloading fixed clamp 552 to clamp and fix the substrate. The unloading telescopic power member 554 is installed on the unloading clamping base 551. The unloading movable clamp 553 is connected to the output end of the unloading telescopic power member 554. The unloading telescopic power member 554 is used to drive the unloading movable clamp 553 to move closer to or away from the unloading fixed clamp 552.

[0134] When the unloading telescopic power component 554 is working, it can drive the unloading movable clamp 553 to move. The unloading movable clamp 553, together with the unloading fixed clamp 552, firmly clamps or releases the substrate, achieving the purpose of clamping and releasing the substrate. The structural design is relatively simple, the operation and maintenance are convenient, and the clamping operation is relatively stable, which is conducive to the stable transport of the substrate. In this embodiment, the unloading telescopic power component 554 is a cylinder, and the output end of the cylinder is arranged upward. In other embodiments, the unloading telescopic power component 554 can also be a hydraulic cylinder or an electric push rod.

[0135] Both the movable feeding clamp 553 and the fixed feeding clamp 552 are elongated plates, and anti-slip structures are provided on the sides of the movable feeding clamp 553 and the fixed feeding clamp 552 that are close to each other. The elongated plate shape of the movable feeding clamp 553 and the fixed feeding clamp 552 allows for a larger contact area with the end of the substrate, and the anti-slip structure has a large coefficient of friction, effectively preventing the substrate from shaking during transport.

[0136] Please see Figure 1 and Figure 8 The recycling connection mechanism 106 includes: a connection support base 61, a fixed mounting bracket 62, a movable mounting bracket 63, a connection drive unit 64, and a connection belt conveyor unit 65.

[0137] A fixed mounting bracket 62 is fixedly mounted on one side of a connecting support base 61; a movable mounting bracket 63 is slidably mounted on the other side of a connecting support base 61, and the movable mounting bracket 63 and the fixed mounting bracket 62 are arranged in parallel; a connecting drive unit 64 is mounted on the connecting support base 61 and connected to the movable mounting bracket 63, and the connecting drive unit 64 is used to drive the movable mounting bracket 63 to move closer to or away from the fixed mounting bracket 62; two sets of connecting belt conveyor units 65 are respectively mounted on the fixed mounting bracket 62 and the movable mounting bracket 63, and the two sides of the substrate are supported on the two sets of connecting belt conveyor units 65, and the connecting belt conveyor units 65 are used to transfer the substrate.

[0138] In this embodiment, the connecting drive unit 64 is a manually driven linear screw slide module, and the connecting belt conveyor unit 65 is a servo motor driven synchronous pulley and synchronous belt transmission structure. In other embodiments, the connecting drive unit 64 and the connecting belt conveyor unit 65 can also be servo motor driven linear screw slide modules.

[0139] The recycling and connection mechanism 106 designed above can stably transfer the substrate until the substrate is inserted into the substrate storage mechanism 107 from the substrate input port.

[0140] Please see Figure 1 and Figure 9 The substrate storage mechanism 107 includes: a storage support base 71, a storage platform 72, a first storage drive unit 73, a storage box 74, and a second storage drive unit 75.

[0141] The storage platform 72 is vertically slidably mounted on the storage support base 71; the first storage drive unit 73 is mounted on the storage support base 71 and connected to the storage platform 72, and the first storage drive unit 73 is used to drive the storage platform 72 to rise and fall intermittently.

[0142] The storage box 74 is provided with multiple sets of slots arranged vertically and spaced apart for insertion into both sides of the substrate. The slots are arranged along the first direction. The storage box 74 is slidably mounted on the storage platform 72 along the second direction, which is perpendicular to the first direction.

[0143] The second storage drive unit 75 is mounted on the storage platform 72 and connected to the storage box 74. The second storage drive unit 75 is used to drive the storage box 74 to slide back and forth along the second direction.

[0144] In this embodiment, both the first storage drive unit and the second storage drive unit 75 are servo motor driven linear lead screw slide modules. In other embodiments, the first storage drive unit 73 and the second storage drive unit 75 can also be other structural forms, such as servo motor driven pulley transmission structure, gear and rack transmission structure, or cylinder transmission structure, etc.

[0145] In summary, the working process of the substrate transport module provided in this application is roughly as follows:

[0146] After the substrate supply mechanism 102 transfers the substrate from the substrate output port, the loading clamping and conveying mechanism 103 clamps and fixes the substrate and moves it to the transfer mechanism 104. The transfer mechanism 104 then transfers the substrate to the die bonding station. After the die bonding operation, the substrate becomes a substrate. The transfer mechanism 104 then conveys the substrate to the unloading clamping and conveying mechanism 105. The unloading clamping and conveying mechanism 105 clamps and fixes the substrate and moves it to the recycling and connecting mechanism 106. The recycling and connecting mechanism 106 then transfers the substrate into the substrate storage mechanism 107.

[0147] The beneficial technical effects of the substrate transport module provided in this application are roughly as follows:

[0148] The addition of a loading clamping and conveying mechanism 103 and a unloading clamping and conveying mechanism 105 mainly transfers the substrate by clamping it. Compared with belt conveyor transfer, the structure is simpler, the substrate is less prone to shaking and wobbling during the transfer process, and the transport stability is improved. At the same time, the entire substrate transport module has a linear structure, which greatly shortens the transport path length of the substrate, shortens the transfer time, and has a faster operating speed, thus improving the die bonding efficiency and accuracy.

[0149] This application also provides a die bonder, including a frame 101, a substrate transport module as described above, and a conventionally designed die bonder module. The die bonder module includes a die supply mechanism, a die ring platform, a ejector mechanism, a camera unit, and a die bonder mechanism. The die bonder designed above significantly shortens the substrate transport path length, reduces the substrate transfer time, operates at a faster speed, and improves die bonder efficiency and accuracy.

[0150] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A substrate transport module, characterized in that, include: A substrate supply mechanism (102) is provided with a substrate output port; The loading clamping and conveying mechanism (103) is located on the side of the substrate supply mechanism (102) near the substrate output port, and is used to clamp, fix and convey the substrate. The transfer mechanism (104) is located on the side of the loading clamping and conveying mechanism (103) away from the substrate supply mechanism (102), and is used to transfer the substrate to the die bonding station. The unloading clamping and conveying mechanism (105) is located on the side of the transfer mechanism (104) away from the loading clamping and conveying mechanism (103), and is used to clamp and fix the substrate and transfer the substrate. A recycling connection mechanism (106), located on one side of the unloading clamping and conveying mechanism (105), is used to transfer the substrate from one side of the recycling connection mechanism (106) to the other side of the recycling connection mechanism (106); and, A substrate storage mechanism (107) is provided with a substrate input port on its side near the recycling docking mechanism (106); The loading clamping and conveying mechanism (103) includes: The feeding conveyor base (31) is provided with a connection inlet and a connection outlet at its two ends respectively; The feeding clamping device (32) is slidably mounted on the feeding conveying base (31) along the first direction and is used to clamp and fix the substrate; A feeding drive device (33) is installed on the feeding conveying base (31) and connected to the feeding clamping device (32), and is used to drive the feeding clamping device (32) to slide back and forth along the first direction; Two sets of partition devices (34) are installed on the feeding conveyor base (31) along a first direction. The partition devices (34) are arranged along the first direction, and the two sets of partition devices (34) are located on both sides of the feeding clamping device (32). Each partition device (34) includes: a fixed base plate (341), an adjustable baffle (342), and multiple locking components. An auxiliary conveying device (35) is mounted on the partition device (34) for contacting the side of the substrate held by the feeding clamping device (32) and assisting in conveying the substrate along a first direction; wherein, the auxiliary conveying device (35) includes: a second driving pulley (351), a plurality of second driven pulleys (352), a second synchronous belt (353), and a third power component (354), wherein the second driving pulley (351) is rotatably mounted on the side of the adjustable baffle (342) near the substrate; the second driven pulleys (352) are rotatably mounted on the side of the adjustable baffle (342) near the substrate; the second synchronous belt (353) is connected between multiple second driven pulleys (352) and second driving pulleys (351), and the second synchronous belt (353) supports and conveys the side of the substrate held on the feeding clamping device (32); the third power component (354) is installed on the side of the adjustable baffle (342) away from the substrate, and the output end of the third power component (354) is connected to the second driving pulley (351). The third power component (354) is used to drive the second driving pulley (351) to rotate forward and backward; the third power component (354) is a servo motor that can be precisely controlled by a PLC program.

2. The substrate transport module as described in claim 1, characterized in that, The substrate supply mechanism (102) includes: Supply support base (21); The supply platform (22) is vertically slidably mounted on the supply support base (21); The first supply drive unit (23) is installed on the supply support base (21) and connected to the supply platform (22) for driving the supply platform (22) to rise and fall intermittently; A supply storage box (24) is provided in which multiple sets of slots are arranged vertically and spaced apart for insertion into both sides of the substrate. The slots are arranged along a first direction. The supply storage box (24) is slidably mounted on the supply platform (22) along a second direction, which is perpendicular to the first direction. A second supply drive unit (25), mounted on the supply platform (22) and connected to the supply storage box (24), is used to drive the supply storage box (24) to slide back and forth along a second direction; and, A feeding pusher unit (26) is installed on the side of the feeding platform (22) away from the substrate output port, for feeding substrates one by one from the feeding storage box (24) along a first direction.

3. The substrate transport module as described in claim 1, characterized in that, The feeding clamping device (32) includes: A loading sliding base (321) is slidably mounted on the loading conveyor base (31); A loading clamping unit (322) is slidably mounted on a loading sliding base (321) in a vertical direction for clamping and fixing the substrate; and, The loading lifting drive unit (323) is installed on the loading sliding base (321) and connected to the loading clamping unit (322), and is used to drive the loading clamping unit (322) to lift.

4. The substrate transport module as described in claim 1, characterized in that, The transfer mechanism (104) includes: Transfer support (41); The transfer platform (42) is slidably mounted on the transfer support (41) along the first direction; The first transfer drive unit (43) is mounted on the transfer support (41) and connected to the transfer platform (42), and is used to drive the transfer platform (42) to slide back and forth along the first direction; A transfer clamp (44) is slidably mounted on the transfer platform (42) along a second direction for clamping and fixing the substrate; and, The second transfer drive unit (45) is mounted on the transfer platform (42) and connected to the transfer clamp (44), and is used to drive the transfer clamp (44) to slide back and forth along the second direction.

5. The substrate transport module as described in claim 4, characterized in that, The transfer clamp (44) includes: Clamping base plate (441); A fixed baffle (442) is fixedly installed on one side of the clamping base plate (441); A movable baffle (443) is slidably mounted on the other side of the clamping base plate (441). The movable baffle (443) and the fixed baffle (442) are arranged in parallel. A flexible plate (4431) is provided on the side of the movable baffle (443) near the fixed baffle (442). A transfer clamping drive unit (444) is mounted on the clamping base plate (441) and connected to the movable baffle (443) for driving the movable baffle (443) to move closer to or away from the fixed baffle (442). A transfer plate (445) is mounted on the clamping base plate (441) for supporting the substrate.

6. The substrate transport module as described in claim 1, characterized in that, The unloading clamping and conveying mechanism (105) includes: Material feeding support (51); The unloading sliding seat (52) is slidably mounted on the unloading support seat (51) along the first direction; The feeding drive device (53) is installed on the feeding support (51) and connected to the feeding sliding seat (52), and is used to drive the feeding sliding seat (52) to slide back and forth along the first direction; A material unloading lifting drive unit (54) is mounted on the material unloading sliding seat (52); and, The unloading clamping unit (55) is slidably mounted on the unloading sliding seat (52) in the vertical direction for clamping and fixing the substrate. The unloading lifting drive unit (54) drives the unloading clamping unit (55) to lift.

7. The substrate transport module as described in claim 1, characterized in that, The recycling connection mechanism (106) includes: Connection support base (61); A fixed mounting bracket (62) is fixedly installed on one side of the connecting support base (61); The movable mounting bracket (63) is slidably assembled on the other side of the connecting support base (61), and the movable mounting bracket (63) and the fixed mounting bracket (62) are arranged in parallel. A docking drive unit (64) is mounted on the docking support base (61) and connected to the movable mounting frame (63) for driving the movable mounting frame (63) to move closer to or away from the fixed mounting frame (62); Two sets of connecting belt conveyor units (65) are respectively installed on the fixed mounting frame (62) and the movable mounting frame (63). The two sides of the substrate are supported on the two sets of connecting belt conveyor units (65) for transferring the substrate.

8. The substrate transport module as described in claim 1, characterized in that, The substrate storage mechanism (107) includes: Storage support base (71); The storage platform (72) is vertically slidably mounted on the storage support base (71); The first storage drive unit (73) is installed on the storage support base (71) and connected to the storage platform (72) for driving the storage platform (72) to rise and fall intermittently; A storage box (74) is provided inside which are multiple sets of slots arranged vertically at intervals for insertion into both sides of a substrate. The slots are arranged along a first direction. The storage box (74) is slidably mounted on the storage platform (72) along a second direction, the second direction being perpendicular to the first direction. The second storage drive unit (75) is installed on the storage platform (72) and connected to the storage box (74), and is used to drive the storage box (74) to slide back and forth along the second direction.

9. A die bonder, characterized in that, Includes the substrate transport module as described in any one of claims 1 to 8.

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