Optical systems and imaging devices and electronic equipment including them
By introducing superlenses and aspherical refractive lenses into the optical system, and introducing nanostructure layers on the lens surface, the contradiction between large aperture and small overall system length is resolved, realizing the lightweighting and miniaturization of the imaging device, and improving aberration correction capabilities and design freedom.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-06-24
- Publication Date
- 2026-04-03
AI Technical Summary
The optical systems of existing imaging devices cannot simultaneously meet the requirements of large aperture and small overall system length, which limits the miniaturization and lightweighting of electronic devices.
A seven-element optical system consisting of at least one superlens and multiple aspherical refractive lenses is adopted to meet the conditions of 0.05mm≤dML≤2mm and |fML|/f≥45. A nanostructure layer is introduced on the lens surface to modulate the light phase, thereby optimizing the design of the optical system.
It achieves miniaturization and weight reduction of optical systems, while improving aberration correction capabilities and design freedom, making it suitable for space-constrained imaging devices.
Smart Images

Figure CN115032766B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of optical imaging, and more specifically, to optical systems and imaging devices and electronic devices including such systems. Background Technology
[0002] As users' shooting needs grow, more and more electronic devices are equipped with imaging devices.
[0003] As users demand increasingly higher imaging quality from imaging devices, the optical systems of existing imaging devices struggle to simultaneously meet the requirements of large aperture and small overall system length.
[0004] Therefore, there is an urgent need for an optical system that can simultaneously meet the requirements of large aperture and small overall system length, in order to promote the miniaturization and lightweighting of electronic devices. Summary of the Invention
[0005] To address the limitation on miniaturization of projection systems in the prior art due to the number of lenses and lens size, this application provides an optical system. The optical system includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, and a seventh lens arranged sequentially from the object side to the image side.
[0006] Among them, at least one of the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, and the seventh lens is a superlens, and the rest are aspherical refractive lenses;
[0007] Furthermore, in the optical system, all surfaces of the first aspherical refractive lens from the image side to the object side and the second aspherical refractive lens from the image side to the object side include at least one aspherical surface, and the aspherical surface contains a point of inflection.
[0008] The optical system must also satisfy at least the following conditions:
[0009]
[0010] 0.05mm≤d ML ≤2mm;
[0011] |f ML | / f≥45;
[0012] f is the focal length of the optical system; EPD is the entrance pupil diameter of the optical system; d ML f is the thickness of the superlens; ML Let be the focal length of the superlens.
[0013] Optionally, the second lens is a superlens, and the remaining lenses are aspherical refractive lenses; furthermore, the first lens has positive optical power, and the object-side surface of the first lens is convex; the object-side surface of the third lens has a positive radius of curvature; the fifth lens has positive optical power; and the object-side surface of the sixth lens has a positive radius of curvature.
[0014] Optionally, the first lens also satisfies:
[0015]
[0016] Among them, R 1o f1 is the radius of curvature of the object-side surface of the first lens; f1 is the focal length of the first lens at the center wavelength of the working band.
[0017] Optionally, the optical system also satisfies:
[0018] (V1+V4) / 2-V3>20;
[0019] Wherein, V1 is the Abbe number of the first lens; V3 is the Abbe number of the third lens; and V4 is the Abbe number of the fourth lens.
[0020] Optionally, the optical system also satisfies:
[0021] 1.5 <TTL / ImgH<1.8
[0022] Where TTL is the distance from the object-side surface of the first lens to the image plane of the optical system; ImgH is the maximum imaging height of the optical system.
[0023] Optionally, the fourth lens also satisfies:
[0024] |R 4o |>R 4i ;
[0025] Among them, R 4o R is the radius of curvature of the object-side surface of the fourth lens; 4i The radius of curvature of the image-side surface of the fourth lens (40).
[0026] Optionally, the radius of curvature of the image-side surface of the seventh lens is greater than zero.
[0027] Optionally, the first lens also satisfies:
[0028] 0.71≤f1 / f≤0.98;
[0029] Where f1 is the focal length of the first lens at the center wavelength of the working band; and f is the focal length of the optical system.
[0030] Optionally, the superlens includes a base layer and a nanostructure layer disposed on at least one side of the base layer, and the number of nanostructure layers is greater than or equal to 1.
[0031] Each layer of the nanostructure layer comprises periodically arranged nanostructures.
[0032] Optionally, the arrangement period of the nanostructures in any of the nanostructure layers is greater than or equal to 0.3λc and less than or equal to 2λc.
[0033] Wherein, λc is the center wavelength of the working band of the second lens.
[0034] Optionally, the height of the nanostructure in any layer of the nanostructure layer is greater than or equal to 0.3λc and less than or equal to 5λc.
[0035] Wherein, λc is the center wavelength of the working band of the second lens.
[0036] Optionally, any layer of the nanostructure layer includes an array of superstructure units;
[0037] The superstructure unit is a densely packed pattern, and the nanostructure is disposed at the vertices and / or center of the densely packed pattern.
[0038] Optionally, the material of the substrate layer has an extinction coefficient of less than 0.01 for the operating wavelength band.
[0039] Optionally, the extinction coefficient of the nanostructure material for the operating wavelength band is less than 0.01.
[0040] Optionally, the material of the substrate layer includes fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
[0041] Optionally, the materials of the nanostructure include fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
[0042] Optionally, the nanostructure is made of a different material than the substrate layer.
[0043] Optionally, the nanostructure is made of the same material as the substrate layer.
[0044] Optionally, the shape of the nanostructure is a polarization-insensitive structure.
[0045] Optionally, the polarization-insensitive structure includes cylindrical, hollow cylindrical, circular hole, hollow circular hole, square prism, square hole, hollow square prism, and hollow square hole.
[0046] Optionally, the second lens further includes a filler;
[0047] The filler is filled between the nanostructures;
[0048] Furthermore, the extinction coefficient of the filler material for the working wavelength band is less than 0.01.
[0049] Optionally, the absolute value of the difference between the refractive index of the filler and the refractive index of the nanostructure is greater than or equal to 0.5.
[0050] Optionally, the filler includes air, fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
[0051] Optionally, the material of the filler is different from the material of the base layer.
[0052] Optionally, the material of the filler is different from the material of the nanostructure.
[0053] Optionally, the second lens further includes an anti-reflective coating;
[0054] The antireflective film is disposed on the side of the substrate layer away from the nanostructure layer, and / or the nanostructure layer is disposed on the side of the substrate layer away from the substrate layer.
[0055] Optionally, the broadband phase of the superstructure unit satisfies:
[0056]
[0057] Where r is the radial coordinate of the superlens; r0 is the distance from any point on the superlens to the center of the superlens; and λ is the operating wavelength of the superlens.
[0058] Optionally, the superlens comprises at least two nanostructure layers;
[0059] In this configuration, the nanostructures in any two adjacent nanostructure layers are arranged coaxially.
[0060] Optionally, the superlens includes at least two nanostructure layers; wherein the nanostructures in any adjacent nanostructure layers are staggered along a direction parallel to the substrate of the superlens.
[0061] Optionally, the phase of the superlens also satisfies:
[0062]
[0063]
[0064]
[0065]
[0066]
[0067]
[0068]
[0069]
[0070] Where r is the distance from the center of the superlens to any nanostructure; λ is the operating wavelength of the superlens; Let f be any phase related to the operating wavelength of the superlens; (x, y) be the mirror coordinates of the superlens; f ML Let a be the focal length of the superlens; i and b i The coefficients are real numbers.
[0071] Optionally, for the second lens in any of the above embodiments of the optical system, the method includes:
[0072] Step S1: Deposit a structural layer material on the base layer;
[0073] Step S2: Coat the structural layer material with photoresist and expose the reference structure;
[0074] Step S3: Etch the periodically arranged nanostructures on the structural layer according to the reference structure to form the nanostructure layer;
[0075] Step S4: The filler is disposed between the nanostructures;
[0076] Step S5: Trim the surface of the filler so that the surface of the filler coincides with the surface of the nanostructure.
[0077] Optionally, the method further includes:
[0078] Step S6: Repeat steps S1 to S5 until all nanostructure layers are set.
[0079] Optionally, the device includes:
[0080] The optical system provided in any of the above embodiments; and the photosensitive element disposed on the image plane of the optical system.
[0081] Optionally, the device includes the imaging apparatus provided in the above embodiments.
[0082] The optical system provided in this application embodiment uses at least one superlens and multiple aspherical refractive lenses to form a seven-element optical system, which simultaneously satisfies the requirements of an F-number of less than 2 and a total system length of less than 6 mm, thus promoting the miniaturization and weight reduction of the optical system.
[0083] The superlens fabrication method provided in this application realizes a superlens structure with at least one nanostructure layer through layered fabrication, which improves the aspect ratio of the nanostructure and increases the design freedom of the superlens. Attached Figure Description
[0084] The accompanying drawings are provided to further understand this application and are incorporated in and form a part of this specification. The drawings illustrate embodiments of this application and, together with the following description, serve to explain the principles of this application.
[0085] Figure 1 This paper shows a schematic diagram of an optional structure of the optical system provided in an embodiment of the present application;
[0086] Figure 2 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0087] Figure 3 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0088] Figure 4 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0089] Figure 5 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0090] Figure 6 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0091] Figure 7 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0092] Figure 8 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0093] Figure 9 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0094] Figure 10 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0095] Figure 11 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0096] Figure 12 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0097] Figure 13 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0098] Figure 14 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0099] Figure 15 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0100] Figure 16 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0101] Figure 17 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0102] Figure 18 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0103] Figure 19 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0104] Figure 20 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0105] Figure 21 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0106] Figure 22 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0107] Figure 23 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0108] Figure 24 This paper shows another optional structural schematic diagram of the optical system provided in the embodiments of this application;
[0109] Figure 25 This illustration shows an optional structural diagram of the superlens provided in an embodiment of this application;
[0110] Figure 26 This illustration shows an optional structural diagram of the nanostructure in the superlens provided in an embodiment of this application;
[0111] Figure 27 This illustration shows another optional structural diagram of the nanostructure in the superlens provided in this application embodiment;
[0112] Figure 28 This illustration shows a schematic diagram of an optional arrangement of nanostructures in a superlens provided in an embodiment of this application;
[0113] Figure 29 This illustration shows another optional arrangement of nanostructures in a superlens provided in an embodiment of this application;
[0114] Figure 30 This illustration shows another optional arrangement of nanostructures in a superlens provided in an embodiment of this application;
[0115] Figure 31 This illustration shows another optional structural diagram of the nanostructure in the superlens provided in this application embodiment;
[0116] Figure 32 This illustration shows another optional structural diagram of the nanostructure in the superlens provided in this application embodiment;
[0117] Figure 33 This illustration shows another optional structural diagram of the nanostructure in the superlens provided in this application embodiment;
[0118] Figure 34 This illustration shows another optional structural diagram of the superlens provided in an embodiment of this application;
[0119] Figure 35 This illustration shows a schematic diagram of an optional arrangement of nanostructures in adjacent nanostructure layers provided in an embodiment of this application;
[0120] Figure 36 This illustration shows another optional structural diagram of the superlens provided in an embodiment of this application;
[0121] Figure 37 This illustration shows an optional phase diagram of a superlens provided in an embodiment of this application;
[0122] Figure 38 This illustration shows an optional transmittance diagram of the superlens provided in an embodiment of this application;
[0123] Figure 39 This illustration shows another optional phase diagram of the superlens provided in an embodiment of this application;
[0124] Figure 40 This illustration shows another optional transmittance diagram of the superlens provided in the embodiments of this application;
[0125] Figure 41 A schematic flowchart of an optional superlens fabrication method provided in an embodiment of this application is shown;
[0126] Figure 42 This illustration shows another optional flowchart of the superlens fabrication method provided in the embodiments of this application;
[0127] Figure 43 This illustration shows another optional flowchart of the superlens fabrication method provided in the embodiments of this application;
[0128] Figure 44 It shows Figure 1 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0129] Figure 45 It shows Figure 1 Astigmatism diagram of the optical system shown;
[0130] Figure 46 It shows Figure 1 The distortion diagram of the optical system shown;
[0131] Figure 47 It shows Figure 1 The broadband matching degree of the superlens in the optical system shown;
[0132] Figure 48 It shows Figure 2 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0133] Figure 49 It shows Figure 2 Astigmatism diagram of the optical system shown;
[0134] Figure 50 It shows Figure 2 The distortion diagram of the optical system shown;
[0135] Figure 51 It shows Figure 2 The broadband matching degree of the superlens in the optical system shown;
[0136] Figure 52 It shows Figure 3 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0137] Figure 53 It shows Figure 3 Astigmatism diagram of the optical system shown;
[0138] Figure 54 It shows Figure 3 The distortion diagram of the optical system shown;
[0139] Figure 55 It shows Figure 3 The broadband matching degree of the superlens in the optical system shown;
[0140] Figure 56 It shows Figure 4 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0141] Figure 57 It shows Figure 4 Astigmatism diagram of the optical system shown;
[0142] Figure 58 It shows Figure 4 The distortion diagram of the optical system shown;
[0143] Figure 59 It shows Figure 4 The broadband matching degree of the superlens in the optical system shown;
[0144] Figure 60 It shows Figure 5 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0145] Figure 61 It shows Figure 5 Astigmatism diagram of the optical system shown;
[0146] Figure 62 It shows Figure 5 The distortion diagram of the optical system shown;
[0147] Figure 63 It shows Figure 5 The broadband matching degree of the superlens in the optical system shown;
[0148] Figure 64 It shows Figure 6 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0149] Figure 65 It shows Figure 6 Astigmatism diagram of the optical system shown;
[0150] Figure 66 It shows Figure 6 The distortion diagram of the optical system shown;
[0151] Figure 67 It shows Figure 6 The broadband matching degree of the superlens in the optical system shown;
[0152] Figure 68 It shows Figure 7 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0153] Figure 69 It shows Figure 7 Astigmatism diagram of the optical system shown;
[0154] Figure 70 It shows Figure 7 The distortion diagram of the optical system shown;
[0155] Figure 71 It shows Figure 7 The broadband matching degree of the superlens in the optical system shown;
[0156] Figure 72 It shows Figure 8 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0157] Figure 73 It shows Figure 8 Astigmatism diagram of the optical system shown;
[0158] Figure 74 It shows Figure 8 The distortion diagram of the optical system shown;
[0159] Figure 75 It shows Figure 8 The broadband matching degree of the superlens in the optical system shown;
[0160] Figure 76 It shows Figure 9 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0161] Figure 77 It shows Figure 9 Astigmatism diagram of the optical system shown;
[0162] Figure 78 It shows Figure 9 The distortion diagram of the optical system shown;
[0163] Figure 79 It shows Figure 9 The broadband matching degree of the superlens in the optical system shown;
[0164] Figure 80 It shows Figure 10 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0165] Figure 81 It shows Figure 10Astigmatism diagram of the optical system shown;
[0166] Figure 82 It shows Figure 10 The distortion diagram of the optical system shown;
[0167] Figure 83 It shows Figure 10 The broadband matching degree of the superlens in the optical system shown;
[0168] Figure 84 It shows Figure 11 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0169] Figure 85 It shows Figure 11 Astigmatism diagram of the optical system shown;
[0170] Figure 86 It shows Figure 11 The distortion diagram of the optical system shown;
[0171] Figure 87 It shows Figure 11 The broadband matching degree of the superlens in the optical system shown;
[0172] Figure 88 It shows Figure 12 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0173] Figure 89 It shows Figure 12 Astigmatism diagram of the optical system shown;
[0174] Figure 90 It shows Figure 12 The distortion diagram of the optical system shown;
[0175] Figure 91 It shows Figure 12 The broadband matching degree of the superlens in the optical system shown;
[0176] Figure 92 It shows Figure 13 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0177] Figure 93 It shows Figure 13 Astigmatism diagram of the optical system shown;
[0178] Figure 94 It shows Figure 13 The distortion diagram of the optical system shown;
[0179] Figure 95 It shows Figure 13The broadband matching degree of the superlens in the optical system shown;
[0180] Figure 96 It shows Figure 14 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0181] Figure 97 It shows Figure 14 Astigmatism diagram of the optical system shown;
[0182] Figure 98 It shows Figure 14 The distortion diagram of the optical system shown;
[0183] Figure 99 It shows Figure 14 The broadband matching degree of the superlens in the optical system shown;
[0184] Figure 100 It shows Figure 15 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0185] Figure 101 It shows Figure 15 Astigmatism diagram of the optical system shown;
[0186] Figure 102 It shows Figure 15 The distortion diagram of the optical system shown;
[0187] Figure 103 It shows Figure 15 The broadband matching degree of the superlens in the optical system shown;
[0188] Figure 104 It shows Figure 16 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0189] Figure 105 It shows Figure 16 Astigmatism diagram of the optical system shown;
[0190] Figure 106 It shows Figure 16 The distortion diagram of the optical system shown;
[0191] Figure 107 It shows Figure 16 The broadband matching degree of the superlens in the optical system shown;
[0192] Figure 108 It shows Figure 17 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0193] Figure 109 It shows Figure 17 Astigmatism diagram of the optical system shown;
[0194] Figure 110 It shows Figure 17 The distortion diagram of the optical system shown;
[0195] Figure 111 It shows Figure 17 The broadband matching degree of the superlens in the optical system shown;
[0196] Figure 112 It shows Figure 18 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0197] Figure 113 It shows Figure 18 Astigmatism diagram of the optical system shown;
[0198] Figure 114 It shows Figure 18 The distortion diagram of the optical system shown;
[0199] Figure 115 It shows Figure 18 The broadband matching degree of the superlens in the optical system shown;
[0200] Figure 116 It shows Figure 19 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0201] Figure 117 It shows Figure 19 Astigmatism diagram of the optical system shown;
[0202] Figure 118 It shows Figure 19 The distortion diagram of the optical system shown;
[0203] Figure 119 It shows Figure 19 The broadband matching degree of the superlens in the optical system shown;
[0204] Figure 120 It shows Figure 20 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0205] Figure 121 It shows Figure 20 Astigmatism diagram of the optical system shown;
[0206] Figure 122 It shows Figure 20 The distortion diagram of the optical system shown;
[0207] Figure 123 It shows Figure 20 The broadband matching degree of the superlens in the optical system shown;
[0208] Figure 124 It shows Figure 21 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0209] Figure 125 It shows Figure 21 Astigmatism diagram of the optical system shown;
[0210] Figure 126 It shows Figure 21 The distortion diagram of the optical system shown;
[0211] Figure 127 It shows Figure 21 The broadband matching degree of the superlens in the optical system shown;
[0212] Figure 128 It shows Figure 22 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0213] Figure 129 It shows Figure 22 Astigmatism diagram of the optical system shown;
[0214] Figure 130 It shows Figure 22 The distortion diagram of the optical system shown;
[0215] Figure 131 It shows Figure 22 The broadband matching degree of the superlens in the optical system shown;
[0216] Figure 132 It shows Figure 23 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0217] Figure 133 It shows Figure 23 Astigmatism diagram of the optical system shown;
[0218] Figure 134 It shows Figure 23 The distortion diagram of the optical system shown;
[0219] Figure 135 It shows Figure 23 The broadband matching degree of the superlens in the optical system shown;
[0220] Figure 136 It shows Figure 24 A schematic diagram of phase modulation of the superlens in the optical system at different wavelengths;
[0221] Figure 137 It shows Figure 24 Astigmatism diagram of the optical system shown;
[0222] Figure 138 It shows Figure 24 The distortion diagram of the optical system shown;
[0223] Figure 139 It shows Figure 24 The broadband matching degree of the superlens in the optical system shown.
[0224] The reference numerals in the figure represent:
[0225] 10 - First lens; 20 - Second lens; 30 - Third lens; 40 - Fourth lens; 50 - Fifth lens; 60 - Sixth lens; 70 - Seventh lens; 80 - Aperture stop; 90 - Infrared filter;
[0226] 201 - Substrate layer; 202 - Nanostructure layer; 203 - Superstructure unit; 204 - Antireflective coating;
[0227] 2021 - Nanostructures; 2022 - Fillers;
[0228] 202a - Structural layer material; 205 - Photoresist; 206 - Reference structure. Detailed Implementation
[0229] The present application will now be described more fully below with reference to the accompanying drawings, in which various embodiments are illustrated. However, the present application may be implemented in many different ways and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present application will be exhaustive and complete, and will fully convey the scope of the present application to those skilled in the art. The same reference numerals denote the same parts throughout the drawings. Furthermore, in the drawings, the thickness, proportions, and dimensions of parts are enlarged for clarity.
[0230] The terminology used herein is for descriptive purposes only and is not intended to be limiting. Unless the context clearly indicates otherwise, the terms “a,” “an,” “the,” and “at least one” as used herein are not intended to limit the quantity but are intended to include both singular and plural forms. For example, unless the context clearly indicates otherwise, “a component” has the same meaning as “at least one component.” “At least one” should not be construed as limited to the quantity “a.” “Or” means “and / or.” The term “and / or” includes any and all combinations of one or more of the associated listed items.
[0231] Unless otherwise specified, all terms used herein, including technical and scientific terms, shall have the same meaning as commonly understood by one of ordinary skill in the art. Terms defined in commonly used dictionaries shall be interpreted as having the same meaning as in the relevant technical context, and shall not be construed as having a formal meaning in an idealized or overly formal sense unless expressly defined in the specification.
[0232] The meaning of “includes” or “contains” specifies a nature, quantity, step, operation, component, part, or combination thereof, but does not exclude other natures, quantities, steps, operations, components, parts, or combinations thereof.
[0233] This document describes embodiments with reference to cross-sectional views as idealized implementations. Thus, variations in shape relative to the illustrations are anticipated as a result of, for example, manufacturing techniques and / or tolerances. Therefore, the embodiments described herein should not be construed as limited to the specific shapes of the regions shown herein, but should include deviations in shape due to, for example, manufacturing processes. For example, regions shown or described as flat may typically have rough and / or non-linear characteristics. Furthermore, acute angles shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to show precise shapes of the regions and are not intended to limit the scope of the claims.
[0234] In the following description, exemplary embodiments according to this application will be described with reference to the accompanying drawings.
[0235] In the miniaturization of optical systems, optical systems using traditional plastic lenses are limited by their injection molding process, making it difficult to achieve breakthroughs in thickness and large curvature. This results in limitations in the thickness of individual lenses, the spacing between lenses, and the overall system length for seven-element lens structures. Furthermore, the availability of only a dozen or so materials for plastic lenses restricts the freedom of aberration correction in optical systems. While glass-resin hybrid lenses have addressed chromatic aberration to some extent, the injection molding process still significantly hinders the miniaturization and weight reduction of optical systems. Currently, reducing the overall system length of an optical system by even 1 millimeter requires tremendous effort. As the pixel count and size of optical sensors in imaging devices, such as charge-coupled devices (CCDs) and complementary metal-oxide semiconductors (CMOS), increase, it becomes increasingly difficult for matching optical systems to simultaneously achieve large apertures and small overall system lengths.
[0236] In a first aspect, embodiments of this application provide an optical system, such as Figures 1 to 24As shown, the optical system includes a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, and a seventh lens 70 arranged sequentially from the object side to the image side. At least one of the first lens 10, second lens 20, third lens 30, fourth lens 40, fifth lens 50, sixth lens 60, and seventh lens 70 is a superlens, and the rest are aspherical refractive lenses. Furthermore, all surfaces of the first aspherical refractive lens from the image side to the object side and the second aspherical refractive lens from the image side to the object side in this optical system include at least one aspherical surface, which contains a point of inflection. The optical system also satisfies at least the following formulas (1-1) to (1-3):
[0237]
[0238] 0.05mm≤d ML ≤2mm; (1-2)
[0239] |f ML | / f≥45;(1-3)
[0240] f is the focal length of the optical system; EPD is the entrance pupil diameter of the optical system; d ML f is the thickness of the superlens; ML This is the focal length of the superlens.
[0241] The optical system provided in this application, by satisfying the aforementioned arrangement, enables the seven-lens optical system to simultaneously achieve a large aperture (i.e., a small F-number) and a small overall system length. The ratio of the absolute value of the superlens focal length to the entire optical system being greater than or equal to 45 enhances the aberration correction capability of the optical system and increases its design freedom. The inclusion of a curvature point in the aspherical surface helps to reduce the effective radii of the first aspherical refractive lens (from image to object) and the second aspherical refractive lens (from image to object), thereby reducing the size of the optical system and making it more suitable for space-constrained imaging devices.
[0242] The above configuration enhances the imaging capabilities of the optical lens system, allowing it to coordinate with the sensor in terms of pixel size, resolution, and principal ray incident angle. It also provides sufficient design freedom in the lens surface specifications to smoothly meet various design requirements, such as controlling lens size. It should be noted that... Figures 1 to 24 Only some optional structures of the optical system provided in the embodiments of this application are shown. Figures 1 to 24 The figure only shows the arrangement of the lenses in the optical system provided in the embodiment of this application. The spacing between the lenses in the figure is not the actual spacing between the lenses.
[0243] Furthermore, in the optical system of this embodiment, the second lens 20 is a superlens, and the remaining lenses are aspherical refractive lenses. The first lens 10 has positive optical power, and its object-side surface is convex; the third lens 30 has a positive radius of curvature on its object-side surface; the fifth lens 50 has positive optical power; and the sixth lens 60 has a positive radius of curvature on its object-side surface. The optical powers of the fourth lens 40 and the seventh lens 70 can be selected according to the design requirements of the optical system.
[0244] According to an embodiment of this application, the fourth lens 40 further satisfies formula (2):
[0245] |R 4o |>R 4i (2)
[0246] Among them, R 4o R is the radius of curvature of the object-side surface of the fourth lens 40. 4i R is the radius of curvature of the image-side surface of the fourth lens 40. no and R ni The radius of curvature is used to represent the object-side and image-side surfaces of each lens in the optical system, where n is the lens arrangement order from the object side to the image side, o represents the object side, and i represents the image side.
[0247] According to an embodiment of this application, optionally, the radius of curvature of the image-side surface of the seventh lens 70 is greater than zero.
[0248] According to an embodiment of this application, optionally, the first lens 10 also satisfies formula (3):
[0249]
[0250] Among them, R 1o f1 is the radius of curvature of the object-side surface of the first lens 10; f1 is the focal length of the first lens 10 at the center wavelength of the working band. The setting that satisfies formula (3) helps to ensure that the optical system has sufficient positive refractive power, which in turn helps to further compress the overall length of the optical system.
[0251] In an optional implementation, the optical system provided in this application embodiment also satisfies formula (4):
[0252] (V1+V4) / 2-V3>20;(4)
[0253] Wherein, V1 is the Abbe number of the first lens (10); V3 is the Abbe number of the third lens 30; and V4 is the Abbe number of the fourth lens 40. Thus, the optical system can be further optimized to correct chromatic aberration in imaging.
[0254] In yet another optional embodiment of this application, the optical system also satisfies formula (5):
[0255] 1.5 <TTL / ImgH<1.8;(5)
[0256] Wherein, TTL is the distance from the object-side surface of the first lens 10 to the image plane of the optical system (also referred to as the total tracking length in this application); ImgH is the maximum imaging height of the optical system. The maximum imaging height refers to half the total diagonal length of the effective sensing area of the electronic photosensitive element. This arrangement is beneficial for achieving a balance between the miniaturization of the optical system and the matching degree between the optical system and the photosensitive element, thereby reducing manufacturing difficulties.
[0257] More advantageously, the first lens 10 also satisfies:
[0258] 0.71≤f1 / f≤0.98;(6)
[0259] Where f1 is the focal length of the first lens 10 at the center wavelength of the operating band; and f is the focal length of the optical system. This allows for sufficient positive refractive power and effectively reduces the overall length of the optical system.
[0260] It is understood that in the optical system provided in this application embodiment, the material of the aspherical refractive lens can be optical glass, such as crown glass, flint glass, quartz glass, etc.; or it can be various optical plastics, such as APL5514, OKP4HT, etc. Preferably, the aspherical refractive lens is made of optical plastic. Using optical plastic for the aspherical refractive lens allows for low-cost, large-scale mass production of aspherical lenses through injection molding.
[0261] Next, combine Figures 25 to 43 The superlens (i.e., the second lens 20) provided in the embodiments of this application will be described.
[0262] Specifically, a metalens is a specific application of metasurfaces, which modulate the phase, amplitude, and polarization of incident light through periodically arranged subwavelength nanostructures.
[0263] Figure 25 A schematic diagram of an optional structure of the superlens provided in an embodiment of this application is shown. See also Figure 25 The superlens provided in this application embodiment includes a substrate layer 201 and a nanostructure layer 202 disposed on at least one side of the substrate layer 201, wherein the number of nanostructure layers 202 is greater than or equal to 1. Each of the aforementioned at least one nanostructure layer 202 includes periodically arranged nanostructures 2021.
[0264] According to embodiments of this application, optionally, in any of the at least one nanostructure layer 202, the arrangement period of the nanostructures 2021 is greater than or equal to 0.3λ. c And less than or equal to 2λ c ; where λ c This is the center wavelength of the working band of the superlens.
[0265] According to embodiments of this application, optionally, the height of the nanostructure 2021 in any one of the at least one nanostructure layer 202 is greater than or equal to 0.3λ. c And less than or equal to 5λ c ; where λ c This is the center wavelength of the working band of the superlens.
[0266] Figure 26 and Figure 27 A perspective view of nanostructure 2021 in any nanostructure layer 202 of the second lens 20 is shown. Optionally, Figure 26 It has a cylindrical structure. Optionally, Figure 27 The nanostructure 2021 in the image is a square prismatic structure. Optionally, such as... Figure 25 and Figure 27 As shown, the superlens also includes a filler 2022, which fills the spaces between the nanostructures 2021, and the material of the filler 2022 has an extinction coefficient of less than 0.01 for the operating wavelength. Optionally, the filler 2022 may include air or other materials that are transparent or translucent for the operating wavelength. According to embodiments of this application, the absolute value of the difference between the refractive index of the filler 2022 material and the refractive index of the nanostructure 2021 should be greater than or equal to 0.5. When the superlens provided in the embodiments of this application has at least two nanostructure layers 202, the filler 2022 in the nanostructure layer 202 furthest from the substrate layer 201 may be air.
[0267] In some optional embodiments of this application, such as Figures 28 to 30 As shown, at least one nanostructure layer 202 includes an array of superstructure units 203. Each superstructure unit 203 is a densely stackable pattern, with nanostructures 2021 disposed at its vertices and / or center. In this embodiment, a densely stackable pattern refers to one or more patterns that can fill an entire plane without gaps or overlaps.
[0268] like Figure 28 As shown, according to an embodiment of this application, the superstructure units can be arranged in a fan shape. Figure 29 As shown, according to an embodiment of this application, the superstructure units can be arranged in a regular hexagonal array. Furthermore, as... Figure 30As shown, according to an embodiment of this application, the superstructure unit 203 can be arranged in a square array. Those skilled in the art will recognize that the superstructure unit 203 included in the nanostructure layer 202 can also include other forms of array arrangement, and all such variations are covered within the scope of this application. It is understood that in some optional embodiments, the period of the superstructure unit 203 is greater than or equal to 0.3λ. c And less than or equal to 2λ c ; where λ c This is the center wavelength of the working band of the superlens.
[0269] Optionally, the broadband phase of the superstructure unit 203 provided in this application embodiment also satisfies the following with the operating band of the superlens: Where r is the radial coordinate of the superlens; r0 is any point on the superlens; and λ is the operating wavelength.
[0270] For example, the nanostructure 2021 provided in the embodiments of this application can be a polarization-independent structure, such a structure imposing a propagation phase on the incident light. According to embodiments of this application, such as Figure 31 , Figure 32 and Figure 33 As shown, nanostructure 2021 can be either a positive or negative structure. For example, the shapes of nanostructure 2021 include cylinders, hollow cylinders, square prisms, and hollow square prisms.
[0271] More advantageously, such as Figure 34 As shown, the second lens 20 provided in this embodiment includes at least two nanostructure layers 202. Optionally, as... Figure 35 As shown in (a), in at least two nanostructure layers 202, the nanostructures 2021 in adjacent nanostructure layers are arranged coaxially. The aforementioned coaxial arrangement means that the nanostructures 2021 in two adjacent nanostructure layers 202 have the same periodicity; or the axes of nanostructures 2021 at the same position in two adjacent nanostructure layers coincide. Optionally, as... Figure 35 As shown in (b), in at least two nanostructure layers 202, the nanostructures 2021 in adjacent nanostructure layers are staggered along a direction parallel to the substrate 201 of the superlens. This arrangement helps to overcome the limitations of fabrication technology on the aspect ratio of nanostructures in the superlens, thereby achieving greater design freedom. Figure 34 A perspective view of an optional three-layer nanostructure is shown. According to embodiments of this application, the shape, size, or material of the nanostructures 2021 in adjacent nanostructure layers 202 may be the same or different.
[0272] For example, Figure 31 a to Figure 31The d in the figure shows that the shape of the nanostructure 2021 includes a cylinder, a hollow cylinder, a square cylinder, and a hollow square cylinder, and the nanostructure 2021 is surrounded by filler 2022. Figure 31 In this embodiment, the nanostructure 2021 is positioned at the center of the quadrilateral superstructure unit 203. In an optional embodiment of this application, Figure 32 a to Figure 32 The d in the figure shows that the shape of the nanostructure 2021 includes a cylinder, a hollow cylinder, a square cylinder, and a hollow square cylinder, and there is no filler 2022 around the nanostructure 2021. Figure 32 In this structure, nanostructure 2021 is positioned at the center of the quadrilateral superstructure unit 203.
[0273] According to the embodiments of this application, Figure 33 a to Figure 33 The d in the figure shows that the shape of the nanostructure 2021 includes a square column, a cylinder, a hollow square column, and a hollow cylinder, and there is no filler 2022 around the nanostructure 2021. Figure 33 a to Figure 33 In the d-shape, the nanostructure 2021 is positioned at the center of the hexagonal superstructure unit 203. Optionally, Figure 33 e to Figure 33 The h in the figure represents the nanostructures 2021, which are negative nanostructures, such as square pore pillars, circular pore pillars, square ring pillars, and circular ring pillars. Figure 33 e to Figure 33 In h, nanostructure 2021 is a negative structure located at the center of the superstructure unit 203 in a regular hexagon.
[0274] In one alternative implementation, such as Figure 36 As shown, the superlens provided in this embodiment further includes an antireflective coating 204. The antireflective coating 204 is disposed on the side of the substrate layer 201 away from at least one nanostructure layer 202; or, the antireflective coating 204 is disposed on the side of the at least one nanostructure layer 202 adjacent to air. The function of the antireflective coating 204 is to increase the transmission and reduce the reflection of incident radiation.
[0275] According to embodiments of this application, the substrate 201 is made of a material with an extinction coefficient less than 0.01 for the operating wavelength band. For example, the material of the substrate 201 includes fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon. As another example, when the superlens operates in the visible light band, the material of the substrate 201 includes fused silica, quartz glass, crown glass, flint glass, sapphire, and alkaline glass. In some embodiments of this application, the nanostructure 2021 is made of the same material as the substrate 201. In still other embodiments of this application, the nanostructure 2021 is made of a different material than the substrate 201. Optionally, the filler 2022 is made of the same material as the substrate 201. Optionally, the filler 2022 is made of a different material than the substrate 201.
[0276] It should be understood that in some optional embodiments of this application, the filler 2022 and the nanostructure 2021 are made of the same material. In still some optional embodiments of this application, the filler 2022 and the nanostructure 2021 are made of different materials. For example, the material of the filler 2022 is a high-transmittance material in the working wavelength band, with an extinction coefficient of less than 0.01. For example, the material of the filler 2022 includes fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
[0277] Optionally, the equivalent refractive index range of the superlens provided in this application embodiment is less than 2. The equivalent refractive index range is the maximum refractive index of the superlens minus its minimum refractive index. According to the embodiments of this application, the phase of the superlens provided in this application embodiment also satisfies formula (7):
[0278]
[0279]
[0280]
[0281]
[0282]
[0283]
[0284]
[0285]
[0286] Where r is the distance from the center of the superlens to the center of any nanostructure; λ is the operating wavelength of the superlens. Let f be any phase related to the operating wavelength, (x, y) be the coordinates on the superlens (in some cases, these can be understood as the coordinates on the surface of the substrate 201), and f ML Let a be the focal length of the second lens 20. i and b i The coefficients are real numbers. The phase of a superlens can be expressed using a high-order polynomial, which includes odd-order and even-order polynomials. To avoid disrupting the rotational symmetry of the superlens phase, optimization is usually limited to the phase corresponding to even-order polynomials, significantly reducing the design freedom of the superlens. However, among the formulas (7-1) to (7-8) above, formulas (7-4) to (7-6), compared to the others, can optimize the phase satisfying the odd-order polynomial without disrupting the rotational symmetry of the superlens phase, thus greatly increasing the optimization freedom of the superlens.
[0287] Optionally, the matching between the actual phase and the ideal phase of the superlens provided in this application embodiment, that is, the broadband phase matching degree of the superlens, is given by formula (8):
[0288]
[0289] In formula (8) λ max and λ min These represent the upper and lower limits of the operating wavelength of the superlens, for example, λ. max =700nm, λ min =400nm. and These are the theoretical target phase and the actual phase within the database, respectively.
[0290] Furthermore, the aspherical surface in the aspherical refractive lens of the optical system provided in this application embodiment satisfies:
[0291]
[0292] In formula (9), z represents the surface vector parallel to the z-axis, the z-axis is the optical axis of the optical system, c is the curvature of the center point of the aspherical surface, k is the quadratic surface constant, and A to J correspond to higher-order coefficients respectively.
[0293] In one alternative implementation, such as Figures 1 to 24 As shown, the optical system provided in this application embodiment also includes an aperture stop 80. The aperture stop 80 can be disposed on the object side or image side of any aspherical refractive lens or superlens in the optical system. The aperture stop 80 helps to compress the radius of the lens located downstream of it in the incident light path, thereby promoting the miniaturization of the optical system.
[0294] According to some alternative implementations of this application, such as Figures 1 to 24As shown, the optical system provided in this embodiment further includes an infrared filter 90. The infrared filter 90 is disposed between the seventh lens 70 and the image plane of the optical system provided in this embodiment. When the operating wavelength of the optical system is the visible light band, the infrared filter 90 helps to filter infrared radiation to improve the imaging quality of the optical system, while also preventing the photosensitive element that works with the optical system from being burned and damaged.
[0295] Example 1
[0296] Exemplarily, this application provides a superlens. The superlens includes a substrate layer 201 and two nanostructure layers 202 disposed on the substrate layer 201. The two nanostructure layers 202, along the direction away from the substrate layer 201, are sequentially a first nanostructure layer and a second nanostructure layer. Specific parameters of the superlens are shown in Table 1. Figure 37 The phase diagram of the superlens provided in Embodiment 1 is shown. Figure 37 The horizontal axis represents the wavelength of the incident radiation, and the vertical axis represents the radius of the 2021 nanostructure. Figure 38 A schematic diagram of the transmittance of the superlens provided in Example 1 is shown. Figure 38 The horizontal axis represents the wavelength of the incident radiation, and the vertical axis represents the radius of the 2021 nanostructure.
[0297] In Example 1, the broadband phase response of any superstructure unit 203 in the superlens satisfies the following with respect to wavelength:
[0298] Where r is the radial coordinate of the superlens; r0 is the distance from any point on the superlens to the center of the superlens; and λ is the operating wavelength of the superlens.
[0299] Table 1
[0300]
[0301]
[0302] Example 2
[0303] In another exemplary embodiment, this application provides a superlens. The superlens includes a substrate layer 201 and two nanostructure layers 202 disposed on the substrate layer 201. The two nanostructure layers 202, along the direction away from the substrate layer 201, are sequentially a first nanostructure layer and a second nanostructure layer. Specific parameters of the superlens are shown in Table 2. Figure 39 The phase diagram of the superlens provided in Embodiment 2 is shown. Figure 39 The horizontal axis represents the wavelength of the incident radiation, and the vertical axis represents the radius of the 2021 nanostructure. Figure 40A schematic diagram of the transmittance of the superlens provided in Example 2 is shown. Figure 40 The horizontal axis represents the wavelength of the incident radiation, and the vertical axis represents the radius of the 2021 nanostructure.
[0304] In Example 2, the broadband phase response of any superstructure unit 203 in the superlens satisfies the following with respect to wavelength: Where r is the radial coordinate of the superlens; r0 is the distance from any point on the superlens to the center of the superlens; and λ is the operating wavelength of the superlens.
[0305] Table 2
[0306]
[0307]
[0308] Secondly, embodiments of this application also provide a method for fabricating a superlens, applicable to the second lens 20 provided in any embodiment of this application. For example... Figures 41 to 43 As shown, the method includes at least steps S1 to S5.
[0309] Step S1: A structural layer material 202a is disposed on the base layer 201.
[0310] Step S2: Photoresist 205 is coated on the structural layer material 202a, and the reference structure 206 is exposed.
[0311] Step S3: Based on the reference structure 206, periodically arranged nanostructures 2021 are etched on the structural layer material 202a to form a nanostructure layer 202.
[0312] Step S4: Filler 2022 is placed between the nanostructures 2021.
[0313] Step S5: Trim the surface of filler 2022 so that the surface of filler 2022 coincides with the surface of nanostructure 2021.
[0314] Optionally, such as Figure 42 As shown, the method provided in this application embodiment further includes:
[0315] Step S6: Repeat steps S1 to S5 until all nanostructure layers are set.
[0316] Example 3
[0317] For example, embodiment 3 provides an optical system with the following structure: Figure 1As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 3-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 3-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 3-3-1 and 3-3-2, and the aspherical coefficients are shown in formula (9).
[0318] Figure 44 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 3 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 44 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 45 The astigmatism diagram of this optical system is shown. Figure 45 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 46 The distortion diagram of this optical system is shown. Figure 46 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 47 The broadband matching degree of the superlens in the optical system provided in Embodiment 3 is shown. Figure 47 It can be seen that the actual phase of the superlens in Example 3 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 3 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0319] Table 3-1
[0320] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.6 Like high (ImgH) 3.09mm Total system length (TTL) 5.4mm
[0321] Table 3-2
[0322]
[0323]
[0324] Table 3-3-1
[0325]
[0326] Table 3-3-2
[0327]
[0328]
[0329] Example 4
[0330] For example, embodiment 4 provides an optical system with the following structure: Figure 2 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 4-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 4-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 4-3-1 and 4-3-2, and the aspherical coefficients are shown in formula (9).
[0331] Figure 48 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 4 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 48 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 49 The astigmatism diagram of this optical system is shown. Figure 49 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 50 The distortion diagram of this optical system is shown. Figure 50 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 51 The broadband matching degree of the superlens in the optical system provided in Example 4 is shown. Figure 51 It can be seen that the actual phase of the superlens in Example 4 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 4 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0332] Table 4-1
[0333] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.2mm
[0334] Table 4-2
[0335]
[0336]
[0337] Table 4-3-1
[0338]
[0339] Table 4-3-2
[0340]
[0341]
[0342] Example 5
[0343] For example, embodiment 5 provides an optical system with the following structure: Figure 3 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 5-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 5-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 5-3-1 and 5-3-2, and the aspherical coefficients are shown in formula (9).
[0344] Figure 52 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 5 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 52 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 53 The astigmatism diagram of this optical system is shown. Figure 53 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 54 The distortion diagram of this optical system is shown. Figure 54 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 55 The broadband matching degree of the superlens in the optical system provided in Example 5 is shown. Figure 55 It can be seen that the actual phase of the superlens in Example 5 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 5 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0345] Table 5-1
[0346] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.2mm
[0347] Table 5-2
[0348]
[0349] Table 5-3-1
[0350]
[0351]
[0352] Table 5-3-2
[0353]
[0354] Example 6
[0355] For example, embodiment 6 provides an optical system with the following structure: Figure 4 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 6-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 6-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 6-3-1 and 6-3-2, and the aspherical coefficients are shown in formula (9).
[0356] Figure 56 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 6 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 56 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 57 The astigmatism diagram of this optical system is shown. Figure 57 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 58 The distortion diagram of this optical system is shown. Figure 58 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 59 The broadband matching degree of the superlens in the optical system provided in Embodiment 6 is shown. Figure 59 It can be seen that the actual phase of the superlens in Example 6 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 6 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0357] Table 6-1
[0358] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.2mm
[0359] Table 6-2
[0360]
[0361]
[0362] Table 6-3-1
[0363]
[0364] Table 6-3-2
[0365]
[0366]
[0367] Example 7
[0368] Exemplary embodiment 7 provides an optical system with the structure as follows: Figure 5 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 7-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 7-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 7-3-1 and 7-3-2, and the aspherical coefficients are shown in formula (9).
[0369] Figure 60 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 7 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 60 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 61 The astigmatism diagram of this optical system is shown. Figure 61 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 62 The distortion diagram of this optical system is shown. Figure 62 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 63 The broadband matching degree of the superlens in the optical system provided in Embodiment 7 is shown. Figure 63 It can be seen that the actual phase of the superlens in Example 7 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 7 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0370] Table 7-1
[0371] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.2mm
[0372] Table 7-2
[0373]
[0374] Table 7-3-1
[0375]
[0376]
[0377] Table 7-3-2
[0378]
[0379] Example 8
[0380] Exemplary embodiment 8 provides an optical system with the following structure: Figure 6 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 8-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 8-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 8-3-1 and 8-3-2, and the aspherical coefficients are shown in formula (9).
[0381] Figure 64 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 8 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 64 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 65 The astigmatism diagram of this optical system is shown. Figure 65 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 66 The distortion diagram of this optical system is shown. Figure 66 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 67 The broadband matching degree of the superlens in the optical system provided in Embodiment 8 is shown. Figure 67 It can be seen that the actual phase of the superlens in Example 8 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 8 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0382] Table 8-1
[0383] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.2mm
[0384] Table 8-2
[0385]
[0386]
[0387] Table 8-3-1
[0388]
[0389] Table 8-3-2
[0390]
[0391]
[0392] Example 9
[0393] Exemplary embodiment 9 provides an optical system with the following structure: Figure 7 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 9-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 9-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 9-3-1 and 9-3-2, and the aspherical coefficients are shown in formula (9).
[0394] Figure 68 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 9 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 68 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 69 The astigmatism diagram of this optical system is shown. Figure 69 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 70 The distortion diagram of this optical system is shown. Figure 70 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 71 The broadband matching degree of the superlens in the optical system provided in Embodiment 9 is shown. Figure 71 It can be seen that the actual phase of the superlens in Example 9 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 9 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0395] Table 9-1
[0396]
[0397]
[0398] Table 9-2
[0399]
[0400] Table 9-3-1
[0401]
[0402]
[0403] Table 9-3-2
[0404]
[0405] Example 10
[0406] For example, embodiment 10 provides an optical system with the following structure: Figure 8 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 10-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 10-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 10-3-1 and 10-3-2, and the aspherical coefficients are shown in formula (9).
[0407] Figure 72 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 3 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 72 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 73 The astigmatism diagram of this optical system is shown. Figure 73 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 74 The distortion diagram of this optical system is shown. Figure 74 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 75 The broadband matching degree of the superlens in the optical system provided in Embodiment 8 is shown. Figure 75 It can be seen that the actual phase of the superlens in Example 8 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 8 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0408] Table 10-1
[0409] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.4mm
[0410] Table 10-2
[0411]
[0412]
[0413] Table 10-3-1
[0414]
[0415] Table 10-3-2
[0416]
[0417]
[0418] Example 11
[0419] For example, embodiment 11 provides an optical system with the following structure: Figure 9 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 11-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 11-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 11-3-1 and 11-3-2, and the aspherical coefficients are shown in formula (9).
[0420] Figure 76 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 11 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 76 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 77 The astigmatism diagram of this optical system is shown. Figure 77 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 78 The distortion diagram of this optical system is shown. Figure 78 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 79 The broadband matching degree of the superlens in the optical system provided in Embodiment 11 is shown. (By...) Figure 79 It can be seen that the actual phase of the superlens in Example 11 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 11 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0421] Table 11-1
[0422] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.4mm
[0423] Table 11-2
[0424]
[0425] Table 11-3-1
[0426]
[0427]
[0428] Table 10-3-2
[0429]
[0430]
[0431] Example 12
[0432] For example, embodiment 12 provides an optical system with the following structure: Figure 10 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 12-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 12-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 12-3-1 and 12-3-2, and the aspherical coefficients are shown in formula (9).
[0433] Figure 80 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 3 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 80 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 81 The astigmatism diagram of this optical system is shown. Figure 81 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 82 The distortion diagram of this optical system is shown. Figure 82 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 83 The broadband matching degree of the superlens in the optical system provided in Example 12 is shown. Figure 83 It can be seen that the actual phase of the superlens in Example 12 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 12 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0434] Table 12-1
[0435] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.1mm Field of view (2ω) 74° F-number 1.8 Like high (ImgH) 3.0896mm Total system length (TTL) 5.4mm
[0436] Table 12-2
[0437]
[0438] Table 12-3-1
[0439]
[0440]
[0441] Table 12-3-2
[0442]
[0443] Example 13
[0444] For example, embodiment 13 provides an optical system with the following structure: Figure 11 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 13-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 13-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 13-3-1 and 13-3-2, and the aspherical coefficients are shown in formula (9).
[0445] Figure 84 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 3 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 84 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 85 The astigmatism diagram of this optical system is shown. Figure 85 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 86 The distortion diagram of this optical system is shown. Figure 86 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 87 The broadband matching degree of the superlens in the optical system provided in Embodiment 13 is shown. Figure 87 It can be seen that the actual phase of the superlens in Example 13 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 13 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0446] Table 13-1
[0447] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.3mm
[0448] Table 13-2
[0449]
[0450]
[0451] Table 13-3-1
[0452]
[0453] Table 13-3-2
[0454]
[0455] Example 14
[0456] For example, embodiment 14 provides an optical system with the following structure: Figure 12 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 14-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 14-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 14-3-1 and 14-3-2, and the aspherical coefficients are shown in formula (9).
[0457] Figure 88 A schematic diagram of phase modulation of the superlens in the optical system provided in Example 12 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 88 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 89 The astigmatism diagram of this optical system is shown. Figure 89 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 90 The distortion diagram of this optical system is shown. Figure 90 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 91 The broadband matching degree of the superlens in the optical system provided in Example 14 is shown. Figure 91 It can be seen that the actual phase of the superlens in Example 14 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 14 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0458] Table 14-1
[0459] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.3mm
[0460] Table 14-2
[0461]
[0462]
[0463] Table 14-3-1
[0464]
[0465] Table 14-3-2
[0466]
[0467]
[0468] Example 15
[0469] For example, embodiment 15 provides an optical system with the following structure: Figure 13 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 15-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 15-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 15-3-1 and 15-3-2, and the aspherical coefficients are shown in formula (9).
[0470] Figure 92 A schematic diagram of phase modulation of the superlens in the optical system provided in Example 15 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 92 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 93 The astigmatism diagram of this optical system is shown. Figure 93 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 94 The distortion diagram of this optical system is shown. Figure 94 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 95 The broadband matching degree of the superlens in the optical system provided in Example 15 is shown. Figure 95 It can be seen that the actual phase of the superlens in Example 15 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 15 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0471] Table 15-1
[0472] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.3mm
[0473] Table 15-2
[0474]
[0475] Table 15-3-1
[0476]
[0477]
[0478] Table 15-3-2
[0479]
[0480] Example 16
[0481] For example, embodiment 16 provides an optical system with the following structure: Figure 14 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 16-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 16-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 16-3-1 and 16-3-2, and the aspherical coefficients are shown in formula (9).
[0482] Figure 96 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 16 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 96 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 97 The astigmatism diagram of this optical system is shown. Figure 97 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 98 The distortion diagram of this optical system is shown. Figure 98 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 99 The broadband matching degree of the superlens in the optical system provided in embodiment 16 is shown. Figure 99 It can be seen that the actual phase of the superlens in Example 16 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 16 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0483] Table 16-1
[0484] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.3mm
[0485] Table 16-2
[0486]
[0487]
[0488] Table 16-3-1
[0489]
[0490] Table 16-3-2
[0491]
[0492]
[0493] Example 17
[0494] For example, embodiment 17 provides an optical system with the following structure: Figure 15 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 17-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 17-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 3-3-1 and 17-3-2, and the aspherical coefficients are shown in formula (9).
[0495] Figure 100 A schematic diagram of phase modulation of the superlens in the optical system provided in Example 17 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 100 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 101 The astigmatism diagram of this optical system is shown. Figure 101 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 102 The distortion diagram of this optical system is shown. Figure 102 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 103 The broadband matching degree of the superlens in the optical system provided in Embodiment 17 is shown. Figure 103 It can be seen that the actual phase of the superlens in Example 17 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 17 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0496] Table 17-1
[0497]
[0498]
[0499] Table 17-2
[0500]
[0501] Table 17-3-1
[0502]
[0503]
[0504] Table 17-3-2
[0505]
[0506] Example 18
[0507] Exemplary embodiment 18 provides an optical system with the following structure: Figure 16 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 18-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 18-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 18-3-1 and 18-3-2, and the aspherical coefficients are shown in formula (9).
[0508] Figure 104 A schematic diagram of phase modulation of the superlens in the optical system provided in Example 18 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 104 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 105 The astigmatism diagram of this optical system is shown. Figure 105 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 106 The distortion diagram of this optical system is shown. Figure 106 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 107 The broadband matching degree of the superlens in the optical system provided in Embodiment 18 is shown. Figure 107 It can be seen that the actual phase of the superlens in Example 18 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 18 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0509] Table 18-1
[0510] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.5mm
[0511] Table 18-2
[0512]
[0513]
[0514] Table 18-3-1
[0515]
[0516] Table 18-3-2
[0517]
[0518]
[0519] Example 19
[0520] For example, embodiment 19 provides an optical system with the following structure: Figure 17 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 19-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 19-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 19-3-1 and 19-3-2, and the aspherical coefficients are shown in formula (9).
[0521] Figure 108 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 19 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 108 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 109 The astigmatism diagram of this optical system is shown. Figure 109 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 110 The distortion diagram of this optical system is shown. Figure 110 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 111 The broadband matching degree of the superlens in the optical system provided in Embodiment 19 is shown. Figure 111 It can be seen that the actual phase of the superlens in Example 19 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 19 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0522] Table 19-1
[0523]
[0524]
[0525] Table 19-2
[0526]
[0527] Table 19-3-1
[0528]
[0529]
[0530] Table 19-3-2
[0531]
[0532] Example 20
[0533] For example, embodiment 20 provides an optical system with the following structure: Figure 18 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 18-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 18-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 18-3-1 and 18-3-2, and the aspherical coefficients are shown in formula (9).
[0534] Figure 112 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 20 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 112 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 113 The astigmatism diagram of this optical system is shown. Figure 113 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 114 The distortion diagram of this optical system is shown. Figure 114 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 115 The broadband matching degree of the superlens in the optical system provided in Example 20 is shown. Figure 115 It can be seen that the actual phase of the superlens in Example 20 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 20 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0535] Table 20-1
[0536] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.5mm
[0537] Table 20-2
[0538]
[0539]
[0540] Table 20-3-1
[0541]
[0542] Table 20-3-2
[0543]
[0544]
[0545] Example 21
[0546] For example, embodiment 21 provides an optical system with the following structure: Figure 19 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 21-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 21-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 21-3-1 and 21-3-2, and the aspherical coefficients are shown in formula (9).
[0547] Figure 116 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 21 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 116 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 117 The astigmatism diagram of this optical system is shown. Figure 117 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 118 The distortion diagram of this optical system is shown. Figure 118 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 119 The broadband matching degree of the superlens in the optical system provided in Embodiment 21 is shown. Figure 119 It can be seen that the actual phase of the superlens in Example 21 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 21 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0548] Table 21-1
[0549]
[0550]
[0551] Table 21-2
[0552]
[0553] Table 21-3-1
[0554]
[0555]
[0556] Table 21-3-2
[0557]
[0558] Example 22
[0559] By way of example, embodiment 22 provides an optical system with the structure as follows Figure 20 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 22-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 22-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 22-3-1 and 22-3-2, and the aspherical coefficients are shown in formula (9).
[0560] Figure 120 A schematic diagram of phase modulation of the superlens in the optical system provided in Example 22 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 120 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 121 The astigmatism diagram of this optical system is shown. Figure 121 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 122 The distortion diagram of this optical system is shown. Figure 122 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 123 The broadband matching degree of the superlens in the optical system provided in Example 22 is shown. Figure 123 It can be seen that the actual phase of the superlens in Example 22 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 22 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0561] Table 22-1
[0562] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.5mm
[0563] Table 22-2
[0564]
[0565]
[0566] Table 22-3-1
[0567]
[0568] Table 22-3-2
[0569]
[0570]
[0571] Example 23
[0572] For example, embodiment 23 provides an optical system with the following structure: Figure 21 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 23-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 23-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 23-3-1 and 23-3-2, and the aspherical coefficients are shown in formula (9).
[0573] Figure 124 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 23 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 124 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 125 The astigmatism diagram of this optical system is shown. Figure 125 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 126 The distortion diagram of this optical system is shown. Figure 126 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 127 The broadband matching degree of the superlens in the optical system provided in Embodiment 23 is shown. Figure 127 It can be seen that the actual phase of the superlens in Example 23 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 23 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0574] Table 23-1
[0575] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.7mm
[0576] Table 23-2
[0577]
[0578] Table 23-3-1
[0579]
[0580] Table 23-3-2
[0581]
[0582] Example 24
[0583] For example, embodiment 24 provides an optical system with the following structure: Figure 22 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 24-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 24-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 24-3-1 and 24-3-2, and the aspherical coefficients are shown in formula (9).
[0584] Figure 128 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 24 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 128 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 129 The astigmatism diagram of this optical system is shown. Figure 129 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 130 The distortion diagram of this optical system is shown. Figure 130 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 131 The broadband matching degree of the superlens in the optical system provided in Example 24 is shown. Figure 131 It can be seen that the actual phase of the superlens in Example 24 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 24 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0585] Table 24-1
[0586] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.7mm
[0587] Table 24-2
[0588]
[0589]
[0590] Table 24-3-1
[0591]
[0592] Table 24-3-2
[0593]
[0594] Example 25
[0595] For example, embodiment 25 provides an optical system with the following structure: Figure 23 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 25-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 25-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 25-3-1 and 25-3-2, and the aspherical coefficients are shown in formula (9).
[0596] Figure 132 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 25 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 132 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 133 The astigmatism diagram of this optical system is shown. Figure 133 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 134 The distortion diagram of this optical system is shown. Figure 134 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 135 The broadband matching degree of the superlens in the optical system provided in Embodiment 25 is shown. Figure 135 It can be seen that the actual phase of the superlens in Example 25 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 25 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0597] Table 25-1
[0598] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.7mm
[0599] Table 25-2
[0600]
[0601]
[0602] Table 25-3-1
[0603]
[0604] Table 25-3-2
[0605]
[0606]
[0607] Example 26
[0608] For example, embodiment 26 provides an optical system with the following structure: Figure 24 As shown. The optical system includes an aperture stop 80, a first lens 10, a second lens 20, a third lens 30, a fourth lens 40, a fifth lens 50, a sixth lens 60, a seventh lens 70, and an infrared filter 90 arranged sequentially from the object side to the image side. The specific parameters of the optical system are shown in Table 26-1. The curvature, thickness, refractive index, and other parameters of each surface of each lens in the optical system are shown in Table 26-2. The aspherical coefficients of each surface of each lens in the optical system are shown in Tables 26-3-1 and 26-3-2, and the aspherical coefficients are shown in formula (9).
[0609] Figure 136 A schematic diagram of phase modulation of the superlens in the optical system provided in Embodiment 3 at 486.13 nm, 587.56 nm, and 656.27 nm is shown. Figure 136 It can be seen that the phase coverage of the superlens at different wavelengths is 0 to 2π. Figure 136 The astigmatism diagram of this optical system is shown. Figure 137 It can be seen that the astigmatism of this optical system does not exceed 0.5mm. Figure 138 The distortion diagram of this optical system is shown. Figure 138 Therefore, the distortion of this optical system within the field of view of 0 to 1 does not exceed 5%. Figure 139 The broadband matching degree of the superlens in the optical system provided in Embodiment 26 is shown. (By...) Figure 139 It can be seen that the actual phase of the superlens in Example 26 matches the theoretical phase by more than 90%. Therefore, the optical system provided in Example 26 exhibits good imaging performance and excellent control over astigmatism and distortion.
[0610] Table 26-1
[0611] Parameter Items numerical values Operating band (WL) VIS (400-700nm) Equivalent focal length (EFL) 4.63mm Field of view (2ω) 74° F-number 2.0 Like high (ImgH) 3.4896mm Total system length (TTL) 5.7mm
[0612] Table 26-2
[0613]
[0614] Table 26-3-1
[0615]
[0616]
[0617] Table 26-3-2
[0618]
[0619] It should be noted that the superlens provided in this application embodiment can be processed by semiconductor technology, and has the advantages of light weight, thin thickness, simple structure and process, low cost and high mass production consistency.
[0620] In summary, the optical system provided in this application embodiment, by employing at least one superlens and multiple aspherical refractive lenses to form a seven-element optical system, simultaneously satisfies the requirements of an F-number of less than 2 and a total system length of less than 6 mm, thus promoting the miniaturization and weight reduction of the optical system.
[0621] The superlens fabrication method provided in this application realizes a superlens structure with at least one nanostructure layer through layered fabrication, which improves the aspect ratio of the nanostructure and increases the design freedom of the superlens.
[0622] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.
Claims
1. An optical system, characterized in that, The optical system includes a first lens (10), a second lens (20), a third lens (30), a fourth lens (40), a fifth lens (50), a sixth lens (60), and a seventh lens (70) arranged sequentially from the object side to the image side. Among them, one of the first lens (10), the second lens (20), the third lens (30), the fourth lens (40), the fifth lens (50), the sixth lens (60) and the seventh lens (70) is a superlens, and the rest are aspherical refractive lenses; Furthermore, in the optical system, all surfaces of the first aspherical refractive lens from the image side to the object side and the second aspherical refractive lens from the image side to the object side include at least one aspherical surface, and the aspherical surface contains a point of inflection; the radius of curvature of the surface of the second lens (20) near the image side is infinite; the surface of the third lens (30) near the object side is curved; the distance between the second lens (20) and the third lens (30) on the optical axis is greater than zero; The optical system must also satisfy at least the following conditions: ; ; ; f is the focal length of the optical system; EPD is the entrance pupil diameter of the optical system; d ML f is the thickness of the superlens; ML Let be the focal length of the superlens.
2. The optical system according to claim 1, characterized in that, The second lens (20) is a superlens, and the other lenses are aspherical refractive lenses; and the first lens (10) has positive optical power, and the object-side surface of the first lens (10) is convex; the object-side surface of the third lens (30) has a positive radius of curvature; the fifth lens (50) has positive optical power; and the object-side surface of the sixth lens (60) has a positive radius of curvature.
3. The optical system according to claim 1, characterized in that, The first lens (10) also satisfies: ; Among them, R 1o f1 is the radius of curvature of the object-side surface of the first lens (10); f1 is the focal length of the first lens (10) at the center wavelength of the working band.
4. The optical system according to claim 1, characterized in that, The optical system also satisfies: ; Wherein, V1 is the Abbe number of the first lens (10); V3 is the Abbe number of the third lens (30); and V4 is the Abbe number of the fourth lens (40).
5. The optical system according to claim 1, characterized in that, The optical system also satisfies: ; Wherein, TTL is the distance from the object-side surface of the first lens (10) to the image plane of the optical system; ImgH is the maximum imaging height of the optical system.
6. The optical system according to claim 1, characterized in that, The fourth lens (40) also satisfies: ; in, The radius of curvature of the object-side surface of the fourth lens (40); The radius of curvature of the image-side surface of the fourth lens (40).
7. The optical system according to claim 1, characterized in that, The radius of curvature of the image-side surface of the seventh lens (70) is greater than zero.
8. The optical system according to any one of claims 1-5, characterized in that, The first lens (10) also satisfies: ; Where f1 is the focal length of the first lens (10) at the center wavelength of the working band; f is the focal length of the optical system.
9. The optical system according to claim 1 or 2, characterized in that, The superlens includes a base layer (201) and a nanostructure layer (202) disposed on at least one side of the base layer (201), and the number of layers of the nanostructure layer (202) is greater than or equal to 1. Each layer of the nanostructure layer (202) includes periodically arranged nanostructures (2021).
10. The optical system according to claim 9, characterized in that, The arrangement period of the nanostructures (2021) in any of the nanostructure layers (202) is greater than or equal to 0.3λc and less than or equal to 2λc; Wherein, λc is the center wavelength of the working band of the second lens (20).
11. The optical system according to claim 9, characterized in that, The height of the nanostructure (2021) in any layer of the nanostructure layer (202) is greater than or equal to 0.3λc and less than or equal to 5λc. Wherein, λc is the center wavelength of the working band of the second lens (20).
12. The optical system according to claim 9, characterized in that, Each of the nanostructure layers (202) includes arrayed superstructure units (203). The superstructure unit (203) is a densely packed pattern, and the nanostructure (2021) is provided at the vertices and / or center of the densely packed pattern.
13. The optical system according to claim 9, characterized in that, The material of the substrate layer (201) has an extinction coefficient of less than 0.01 for the working wavelength band.
14. The optical system according to claim 9, characterized in that, The material of the nanostructure (2021) has an extinction coefficient of less than 0.01 for the working wavelength band.
15. The optical system according to claim 13, characterized in that, The substrate layer (201) is made of materials including fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
16. The optical system according to claim 14, characterized in that, The materials of the nanostructure (2021) include fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
17. The optical system according to claim 9, characterized in that, The nanostructure (2021) is made of a different material than the substrate (201).
18. The optical system according to claim 9, characterized in that, The nanostructure (2021) is made of the same material as the substrate layer (201).
19. The optical system according to claim 9, characterized in that, The shape of the nanostructure (2021) is polarization insensitive.
20. The optical system according to claim 19, characterized in that, The polarization-insensitive structure includes cylindrical, hollow cylindrical, circular hole, hollow circular hole, square column, square hole, hollow square column, and hollow square hole.
21. The optical system according to claim 9, characterized in that, The second lens (20) also includes a filler (2022); The filler (2022) fills the spaces between the nanostructures (2021); Furthermore, the material of the filler (2022) has an extinction coefficient of less than 0.01 for the working wavelength band.
22. The optical system as claimed in claim 21, characterized in that, The absolute value of the difference between the refractive index of the filler (2022) and the refractive index of the nanostructure (2021) is greater than or equal to 0.
5.
23. The optical system according to claim 21, characterized in that, The filler includes air, fused silica, quartz glass, crown glass, flint glass, sapphire, crystalline silicon, amorphous silicon, and hydrogenated amorphous silicon.
24. The optical system according to claim 21, characterized in that, The material of the filler (2022) is different from the material of the base layer (201).
25. The optical system according to claim 21, characterized in that, The material of the filler (2022) is different from the material of the nanostructure (2021).
26. The optical system according to claim 21, characterized in that, The second lens (20) also includes an anti-reflective coating (204); The antireflective membrane (204) is disposed on the side of the substrate layer (201) away from the nanostructure layer (202), and / or the nanostructure layer (202) is disposed on the side of the substrate layer (201) away from the substrate layer (201).
27. The optical system according to claim 12, characterized in that, The broadband phase of the superstructure unit (203) satisfies: ; Where r is the radial coordinate of the superlens; r0 is the distance from any point on the superlens to the center of the superlens; and λ is the operating wavelength of the superlens.
28. The optical system according to claim 9, characterized in that, The superlens comprises at least two nanostructure layers (202); In this configuration, the nanostructures in any two adjacent nanostructure layers (202) are coaxially arranged.
29. The optical system as claimed in claim 9, characterized in that, The superlens includes at least two nanostructure layers (202); wherein the nanostructures in any adjacent nanostructure layers (202) are staggered along a direction parallel to the substrate of the superlens.
30. The optical system according to claim 9, characterized in that, The phase of the superlens also satisfies one of the following: ; ; ; ; ; ; ; ; Where r is the distance from the center of the superlens to any nanostructure; λ is the operating wavelength of the superlens; φ0 is any phase related to the operating wavelength of the superlens; (x, y) are the mirror coordinates of the superlens; f2 is the focal length of the superlens; a i and b i The coefficients are real numbers.
31. An imaging device, characterized in that, The device includes The optical system according to any one of claims 1-30; and the photosensitive element disposed on the image plane of the optical system.
32. An electronic device, characterized in that, The device includes the imaging apparatus as described in claim 31.
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