Actuator, actuator assembly, electronic module, and electronic device

Abstract

This application provides an actuator, an actuator assembly, an electronic module, and an electronic device. The actuator includes a substrate, a driver, and a flexure assembly. The driver includes a fixed comb tooth component and a movable comb tooth component with interleaved and parallel comb teeth. The flexure assembly includes a first flexure component, a retaining component, and a second flexure component connected in sequence. The first and second flexure components are fixed to the substrate by protrusions; the first and second flexure components are respectively connected to the movable comb tooth component. When the movable comb tooth component moves along a first direction, the first and second flexure components deform. The retaining component maintains a gap between the comb teeth of the fixed and movable comb tooth components to prevent contact between the comb teeth of the movable and fixed comb tooth components, allowing the movable comb tooth component to move a longer distance, thereby increasing the actuator's stroke and enabling electronic devices using this actuator for shake stabilization to achieve better shake compensation.

Description

Technical Field

[0001] This application relates to the field of electronic equipment technology, and more particularly to an actuator, actuator assembly, electronic module, and electronic equipment. Background Technology

[0002] With the technological advancements in mobile devices and other electronic equipment, users have increasingly higher demands for image quality. When using electronic devices to take photos, hand or device tremors can easily cause the image of the subject to shift on the image sensor, resulting in blurry images. To improve this, optical image stabilization technology can be incorporated into electronic devices.

[0003] Current optical image stabilization technologies typically employ optical image stabilization, which achieves image stabilization during shooting through anti-motion compensation. For example, an actuator assembly with actuators, including movable and fixed comb teeth, is introduced into the camera module of an electronic device. Specifically, when the electronic device unexpectedly shakes, its processor detects the shaking and inputs an electrical signal to the actuator based on the shaking parameters (e.g., direction, angle, distance). This causes the movable comb teeth to move towards the fixed comb teeth, thereby displacing the image sensor connected to the movable comb teeth in the opposite direction of the shaking, thus achieving shake compensation. However, this method is ineffective when the shooting device shakes significantly. Summary of the Invention

[0004] This application provides an actuator, actuator assembly, electronic module, and electronic device to increase the motion stroke of the actuator in the electronic device, thereby achieving good anti-shake compensation function.

[0005] In a first aspect, this application provides an actuator. The actuator includes a substrate and a driver and a flexible member assembly disposed on the substrate, wherein: the driver includes a fixed comb tooth component and a movable comb tooth component, the fixed comb tooth component is fixed to the substrate, the movable comb tooth component is suspended from the substrate, the comb teeth of the fixed comb tooth component and the comb teeth of the movable comb tooth component are parallel and staggered, and the movable comb tooth component is capable of moving in a first direction toward the fixed comb tooth component; the flexible member assembly includes a protrusion and a first flexible member, a retaining component and a second flexible member connected sequentially along a second direction, wherein the second direction is perpendicular to the first direction, the first flexible member and the second flexible member are fixed to the substrate by the protrusion, and the first flexible member and the second flexible member have gaps between themselves and the substrate, and the first flexible member and the second flexible member are fixedly connected to the movable comb tooth component. When the movable comb component moves along the first direction, the first and second flexural members deform along the first direction, and the retaining member maintains a gap between the comb teeth of the fixed comb component and the comb teeth of the movable comb component to prevent the comb teeth of the movable comb component from coming into contact with the comb teeth of the fixed comb component. This prevents the movable comb component from laterally deflecting due to the staggered movement of the first and second flexural members along the first direction, allowing the movable comb component to continue moving a longer distance along the first direction after its comb teeth insert into the comb teeth of the fixed comb component, thereby increasing the stroke of the actuator. This actuator, used in anti-shake electronic devices, can achieve better shake compensation.

[0006] In the specific design, the retaining component includes a first elastic element and a second elastic element, which are rigidly connected. The first elastic element is connected to a first flexible element, and the second elastic element is connected to a second flexible element. When the movable comb tooth component moves along the first direction, the first and second elastic elements deform along the second direction, causing the opposite ends of the first and second flexible elements to move away from each other along the second direction. At the same time, the first and second elastic elements prevent the first and second flexible elements from moving away from each other along the first direction, thereby avoiding lateral deflection of the movable comb tooth component caused by the misalignment of the first and second flexible elements.

[0007] In order to securely connect the first elastic element and the second elastic element while preventing the first flexural element and the second flexural element from misaligning along the first direction, the retaining component further includes a rigid connector, to which the first elastic element and the second elastic element are respectively fixedly connected.

[0008] In the specific technical solution, the first elastic element includes two first spring plates, and the second elastic element includes two second spring plates. The two first spring plates and the two second spring plates are respectively fixedly connected to a rigid connecting member. The planes containing the first and second spring plates are perpendicular to the substrate; therefore, the thickness direction of the spring plates is the second direction. During the movement of the movable comb tooth component, the first flexure member drives the first spring plates to deform along the second direction, and the second flexure member drives the second spring plates to deform along the second direction. However, in the length and width directions of the spring plates, the spring plates are hard or rigid and do not easily deform, thereby preventing the first and second flexure members from misaligning along the first direction.

[0009] In a specific technical solution, the cross-sectional shape of the aforementioned rigid connector parallel to the substrate can be I-shaped or I-shaped.

[0010] In a specific technical solution, the cross-sectional shape of the aforementioned retaining component parallel to the substrate can be H-shaped.

[0011] To enhance the torsional stiffness of the actuator, the actuator may further include a movable frame, with a movable comb tooth component and a flexural component assembly connected to the movable frame. The movable frame is suspended above the base plate, and the fixed comb tooth component, the movable comb tooth component, and the flexural component assembly are disposed within the movable frame.

[0012] In a specific technical solution, the aforementioned flexural component group may include two flexural component groups, which may be symmetrically arranged on both sides of the driver along a first direction. Compared with the arrangement of flexural component groups on one side of the driver, this technical solution can reduce the oscillation of the movable comb component.

[0013] To simplify the actuator structure, in a specific technical solution, the substrate can be a circuit board, with the fixed comb tooth component and the movable comb tooth component electrically connected to the substrate respectively.

[0014] In a specific technical solution, the aforementioned first direction can be a straight line extending from the comb teeth of the movable comb component, or it can be a circumferential direction around the rotation axis of the movable comb component.

[0015] Secondly, this application provides an actuator assembly, including a support platform and the actuator described in any of the above-mentioned technical solutions. The support platform is connected to the movable comb tooth component of each actuator. When the movable comb tooth component moves along a first direction, it drives the support platform to perform a jitter compensation movement. During this process, a retaining component maintains a gap between the comb teeth of the fixed comb tooth component and the comb teeth of the movable comb tooth component to prevent the comb teeth of the movable comb tooth component from engaging with the comb teeth of the fixed comb tooth component. This prevents the first and second flexure components from moving in opposite directions along the first direction, causing the movable comb tooth component to deflect laterally. This avoids the comb teeth of the movable comb tooth component engaging with the comb teeth of the fixed comb tooth component, allowing the movable comb tooth component to continue moving a longer distance along the first direction after its comb teeth are inserted into the comb teeth of the fixed comb tooth component, thereby increasing the actuator's stroke. This actuator assembly, when used in electronic devices with anti-shake functionality, can achieve better jitter compensation.

[0016] In the specific technical solution, the aforementioned support platform is connected to the movable comb tooth component through a cantilever connector. The cantilever connector is suspended in the air, allowing the support platform to be suspended in the air to avoid other components from obstructing the movement of the support platform.

[0017] Thirdly, this application provides an electronic module, including electronic devices and actuator components from any of the above-mentioned technical solutions, wherein the electronic devices are disposed on a support platform. When the movable comb tooth component moves along a first direction, the movable comb tooth component drives the support platform and the electronic devices to perform jitter compensation movement. During this process, a holding component maintains a gap between the comb teeth of the fixed comb tooth component and the comb teeth of the movable comb tooth component to prevent the comb teeth of the movable comb tooth component from engaging with the comb teeth of the fixed comb tooth component. This prevents the first and second flexure components from moving in opposite directions along the first direction, causing the movable comb tooth component to deflect laterally. This avoids the comb teeth of the movable comb tooth component engaging with the comb teeth of the fixed comb tooth component, allowing the movable comb tooth component to continue moving a longer distance along the first direction after its comb teeth insert into the comb teeth of the fixed comb tooth component, thereby increasing the actuator stroke. This electronic module, used for anti-shake electronic devices, can achieve better jitter compensation functionality.

[0018] In a specific technical solution, the aforementioned electronic module can be a camera module, and the aforementioned electronic device can be an image sensor or a lens assembly. This electronic module can be applied to a camera module, allowing the actuator assembly to drive the image sensor or lens assembly to move in the opposite direction of the shaking, thereby compensating for the shaking and achieving optical image stabilization during shooting.

[0019] The aforementioned electronic module also includes a connecting column fixed to the support platform, and the electronic components are fixedly connected to the connecting column. The electronic components are fixed to the support platform via the connecting column, allowing the electronic devices to be mounted above the actuator assembly, thus avoiding contact between the electronic components and other parts of the actuator assembly and ensuring that the movement of the electronic components is not obstructed.

[0020] Fourthly, this application provides an electronic device, including a power supply and an electronic module as described in any of the above technical solutions, wherein a fixed comb tooth component and a movable comb tooth component are electrically connected to the power supply. Thus, when the power supply energizes the fixed and movable comb tooth components, the fixed and movable comb tooth components carry opposite charges, causing the movable comb tooth component to move along a first direction under the influence of electrostatic attraction. During this process, a holding component maintains a gap between the comb teeth of the fixed and movable comb tooth components to prevent the comb teeth of the movable and fixed comb tooth components from coming into contact. This prevents the movable comb tooth component from laterally deflecting due to the staggered movement of the first and second flexure components along the first direction, allowing the movable comb tooth component to move a longer distance along the first direction, thereby increasing the actuator stroke and achieving better anti-shake function in the electronic device.

[0021] It should be understood that electronic devices may also include other components, such as processors, camera devices, and transceivers, which are not specifically limited herein. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a driver structure in the prior art;

[0023] Figure 2 This is a schematic diagram illustrating lateral instability of the actuator in the prior art;

[0024] Figure 3 This is a schematic diagram of one structure of the actuator in an embodiment of this application;

[0025] Figure 4 for Figure 3 A schematic diagram of the motion state of an actuator when the driver is energized;

[0026] Figure 5 for Figure 3 A schematic diagram of the cross-section of the actuator along the AA direction;

[0027] Figure 6 This is a schematic diagram of another structure of the actuator in the embodiments of this application;

[0028] Figure 7 This is a schematic diagram of a structure of the first flexure and the second flexure in an embodiment of this application;

[0029] Figure 8 for Figure 7 A schematic diagram of the motion state of the first and second flexural members;

[0030] Figure 9 This is a schematic diagram of one structure of the retaining component in an embodiment of this application;

[0031] Figure 10 This is a schematic diagram of one structure of the flexural assembly in an embodiment of this application;

[0032] Figure 11 This is a schematic diagram of one structure of the retaining component in an embodiment of this application;

[0033] Figure 12 This is a schematic diagram of another structure of the flexural component in the embodiments of this application;

[0034] Figure 13 This is a schematic diagram of another structure of the flexural component in an embodiment of this application;

[0035] Figure 14 This is a schematic diagram of another structure of the flexural component in an embodiment of this application;

[0036] Figure 15 This is a schematic diagram of another structure of the actuator in the embodiments of this application;

[0037] Figure 16 for Figure 15 A schematic diagram of the cross-section of the actuator along the BB direction;

[0038] Figure 17 This is a schematic diagram of another structure of the actuator in the embodiments of this application;

[0039] Figure 18 for Figure 7 A schematic diagram of the motion state of an actuator;

[0040] Figure 19 This is a schematic diagram of one structure of the actuator assembly in an embodiment of this application;

[0041] Figure 20 This is a schematic diagram of another structure of the actuator assembly in an embodiment of this application;

[0042] Figure 21 This is a schematic diagram of another structure of the actuator assembly in an embodiment of this application;

[0043] Figure 22 This is a schematic diagram of another structure of the actuator assembly in an embodiment of this application;

[0044] Figures 23a-23c This is a schematic diagram of the multi-directional displacement of the actuator assembly in the embodiments of this application;

[0045] Figure 24 This is a schematic diagram of the structure of an electronic module in an embodiment of this application;

[0046] Figure 25 This is a schematic diagram of another structure of the electronic module in the embodiments of this application;

[0047] Figure 26 This is a schematic diagram of the structure of an electronic device in an embodiment of this application.

[0048] Figure label:

[0049] Background Technology Section:

[0050] 01-Fixed comb teeth component; 02-Modible comb teeth component;

[0051] Part of the embodiments of this application:

[0052] 10 - Actuator; 20 - Actuator assembly;

[0053] 30 - Electronic module; 11 - Substrate;

[0054] 12-Driver; 13-Flexible assembly;

[0055] 14-Active frame; 15-Protrusion;

[0056] 21-Fixed base; 22-Supporting platform;

[0057] 23-Cantilever connector; 24-Electronic components;

[0058] 25 - Connecting post; 26 - Circuit board;

[0059] 27 - Connecting cable; 31 - Lens group;

[0060] 32 - Filter; 33 - Image sensor;

[0061] 34 - First shell; 35 - Second shell;

[0062] 40 - Electronic equipment; 10a - First actuator;

[0063] 10b - Second actuator; 10c - Third actuator;

[0064] 10d - Fourth actuator; 121 - Fixed comb tooth component;

[0065] 121a - First fixed comb tooth component; 121b - Second fixed comb tooth component;

[0066] 122-Modible comb tooth component; 122a-Ridge connecting part;

[0067] 122b - First comb tooth; 122c - Second comb tooth;

[0068] 122d - Second body; 131 - First flexural element;

[0069] 131a - First end component; 132 - Second flexural component;

[0070] 132a - Second end component; 133 - Holding component;

[0071] 134 - First elastic element; 135 - Second elastic element;

[0072] 136 - Rigid connector; 401 - Power supply;

[0073] 402 - Processor. Detailed Implementation

[0074] To make the objectives, technical solutions, and advantages of this application clearer, the application will now be described in further detail with reference to the accompanying drawings.

[0075] With the continuous development of photography technology, electronic devices such as smartphones, tablets, dashcams, and drones all possess photography capabilities. In application, electronic devices may experience camera shake during recording, leading to ghosting or distortion in the captured images, resulting in poor image quality. To improve this, actuator components are typically introduced into the camera module of the electronic device. Specifically, an image sensor or lens assembly is mounted within the actuator component, which includes an actuator that uses electrostatic actuation to generate motion for compensation, thereby improving the shooting effect. Figure 1 and Figure 2 An existing actuator shown mainly includes a fixed comb tooth component 01, a movable comb tooth component 02, and a flexure (not shown) connected to the movable comb tooth component 02. The flexure is used to reset the movable comb tooth component 02, which is connected to an image sensor. When the actuator is energized, the fixed comb tooth component 01 and the movable comb tooth component 02 will carry opposite charges, generating an electrostatic attraction between them. Under the action of this electrostatic attraction, the movable comb tooth component 02 moves towards the fixed comb tooth component 01 (e.g., ...). Figure 1 (As shown by the arrow), thereby causing the image sensor to move in the opposite direction of the jitter to compensate for the jitter.

[0076] Please continue to refer to this. Figure 1As the movable comb tooth component 02 moves toward the fixed comb tooth component 01, the teeth of the movable comb tooth component 02 gradually interlock and insert between the teeth of the fixed comb tooth component 01. However, as the length of the insertion of the teeth of the movable comb tooth component 02 into the teeth of the fixed comb tooth component 01 increases—in other words, as the stroke of the movable comb tooth component 02 gradually increases—the lateral direction perpendicular to the direction of movement of the movable comb tooth component 02 (e.g., ...) becomes more pronounced. Figure 1 In the vertical direction, the electrostatic force between the teeth of the movable comb component 02 and the teeth of the fixed comb component 01 gradually increases. Usually, the lateral electrostatic forces on both sides of the teeth of the movable comb component 02 are opposite in direction and equal in magnitude. Therefore, the forces on both sides of the comb tooth are balanced, so the movable comb component 02 will not be displaced in the lateral direction.

[0077] However, when the actuator is subjected to external disturbances, such as impacts or vibrations, the movable comb tooth component 02 may experience a small lateral displacement. This small displacement will disrupt the force balance of the comb teeth in the movable comb tooth component 02, causing one side of the comb teeth to experience a greater force than the other. This results in the movable comb tooth component 02 deflecting laterally under the influence of a larger lateral electrostatic force (i.e., lateral instability), causing the comb teeth of the movable comb tooth component 02 to come into contact with the comb teeth of the fixed comb tooth component 01, such as... Figure 2 As shown. This lateral instability is undesirable to the user because after bonding, the lateral electrostatic force between the teeth of the movable comb component 02 and the teeth of the fixed comb component 01 will be very large, causing the movable comb component 02 to be unable to continue moving towards the fixed comb component 01, thus limiting the movement stroke of the movable comb component 02 and resulting in poor jitter compensation. Furthermore, the fixed comb component 01 may even come into contact with the movable comb component 02 and become electrically conductive, causing an electrical short circuit in the actuator assembly's drive circuit, thereby damaging the actuator assembly and causing the entire camera module of the electronic device to fail.

[0078] Furthermore, as the movable comb component 02 moves, the flexure will undergo elastic deformation. Moreover, as the stroke of the movable comb component 02 increases, the deformation of the flexure increases, and the lateral stiffness of the flexure decreases. This makes the movable comb component 02 prone to lateral instability when subjected to external lateral disturbances.

[0079] To this end, this application provides an actuator, actuator assembly, electronic module, and electronic device to reduce the lateral deflection of the movable comb component, prevent the comb teeth of the movable comb component from contacting the comb teeth of the fixed comb component, and enable the movable comb component to move a longer distance, thereby increasing the stroke of the actuator.

[0080] Figure 3 and Figure 4 This is a schematic diagram of one structure of the actuator in an embodiment of this application. Figure 5 for Figure 3 A schematic cross-sectional view of the actuator 10 along the AA direction. (See diagram below.) Figures 3 to 5 As shown, the actuator 10 includes a substrate 11, a driver 12, and a flexural assembly 13. Specifically, the driver 12 includes a fixed comb tooth component 121 and a movable comb tooth component 122. The comb teeth of the fixed comb tooth component 121 and the comb teeth of the movable comb tooth component 122 are staggered and parallel to each other along a first direction M. The fixed comb tooth component 121 is fixedly mounted on the substrate 11, and the movable comb tooth component 122 is suspended from the substrate 11. It should be noted that in the embodiments of this application, the "first direction" refers to the extension direction of the comb teeth, for example, it could be... Figure 3 The direction indicated by the horizontal double-headed arrow is to the left, or it could be to the right. The flexural member assembly 13 includes a first flexural member 131, a second flexural member 132, a retaining member 133, and a protrusion 15. The first flexural member 131 and the second flexural member 132 are disposed opposite each other along the second direction N. The retaining member 133 is located between the first flexural member 131 and the second flexural member 132, and the first flexural member 131 and the second flexural member 132 are respectively connected to the retaining member 133. It should be noted that in this embodiment, the "second direction" refers to a direction perpendicular to the first direction M within the plane of the substrate; for example, it could be... Figure 3 The upward direction indicated by the vertical double-headed arrow N can also be the downward direction. For the first flexure 131 and the second flexure 132, one end of each flexure is fixedly connected to the substrate 11 via a protrusion 15, and the other end is fixedly connected to the movable comb tooth component 122. Thus, the movable comb tooth component 122 is suspended relative to the substrate 11 through the first flexure 131 and the second flexure 132, and there is also a gap between each of the first flexure 131 and the substrate 11; in other words, the first flexure 131 and the second flexure 132 do not contact the substrate 11. It should be noted that... Figure 3 and Figure 4 The retaining component 133 is only a schematic diagram and is not intended to limit its quantity, structure, or position relative to other components.

[0081] It should be noted that in the above embodiments, the fixed connection between the flexible members 131 and 132 and the movable comb member 122 can refer to a direct fixed connection or a fixed connection through other components. For example, in Figure 4In one specific embodiment shown, the movable comb tooth component 122 includes a ridge-shaped connecting portion 122a, a first comb tooth 122b, and a second comb tooth 122c. The ridge-shaped connecting portion 122a extends along a second direction N, and the first comb tooth 122b and the second comb tooth 122c are parallel to the first direction M and are each evenly distributed along the second direction N within the ridge-shaped connecting portion 122a. In this embodiment, the flexible members 131 and 132 are fixedly connected to the ridge-shaped connecting portion 122a via connecting members (e.g., the movable frame 14, which will be described in detail below). Alternatively, in another specific embodiment of this application, such as... Figure 6 As shown, the movable comb tooth component 122 includes a first body and a second body 122d. The first body includes a ridge-shaped connecting portion 122a extending along the second direction N, and the ridge-shaped connecting portion 122a is provided with comb teeth parallel to the first direction M. The ridge-shaped connecting portion 122a and the second body 122d can be integrally formed, or they can be fixed together by welding, riveting, threaded connection, or other methods. The comb teeth can include a first comb tooth 122b and a second comb tooth 122c extending in opposite directions along the first direction M. In this embodiment, the flexible members 131 and 132 are directly fixedly connected to the second body 122d, for example, by welding, riveting, threaded connection, or other methods.

[0082] Please continue to refer to this. Figure 3 In the initial state of the actuator 10, the movable comb tooth component 122 is held in its initial position by the flexure assembly 13, that is, the movable comb tooth component 122 and the fixed comb tooth component 121 maintain a certain distance in the first direction M. It should be noted that the initial state in this embodiment refers to the state in which the driver 12 is not energized. In this state, the first flexure 131, the second flexure 132 and the holding component 133 remain in a free state, that is, a state of force balance.

[0083] Figure 4 for Figure 3This is a schematic diagram of the actuator's motion state when the driver is energized. When the processor of the electronic device detects a jitter signal, it energizes the driver 12, causing the fixed comb tooth component 121 and the movable comb tooth component 122 to carry opposite charges, thereby generating an electrostatic attraction between them. Under the action of this electrostatic attraction, the movable comb tooth component 122 moves along the first direction M, and the teeth of the movable comb tooth component 122 are interleaved between the teeth of the fixed comb tooth component 121. During the movement of the movable comb tooth component 122, the first flexure 131 and the second flexure 132 deform along the first direction M. The retaining component 13 prevents the first flexure 131 and the second flexure 132 from being misaligned (or interleaved, i.e., their displacements are significantly inconsistent in the first direction M, thus forming an interleaved shape) along the first direction M. In other words, the retaining component 13 keeps the first flexure 131 and the second flexure 132 opposite each other along the second direction N, thereby maintaining a gap between the teeth of the fixed comb tooth component 121 and the teeth of the movable comb tooth component 122. This means the teeth of the movable comb tooth component 122 do not contact the teeth of the fixed comb tooth component 121, or in other words, the teeth of the movable comb tooth component 122 are kept separate from the teeth of the fixed comb tooth component 121. This avoids the teeth of the movable comb tooth component 122 from coming into contact with the teeth of the fixed comb tooth component 121, thus improving the lateral deflection of the movable comb tooth component 122. This allows the movable comb tooth component 122 to continue moving along the first direction M, increasing the stroke of the actuator 10 and enhancing the shake compensation function. This actuator 10, used in image stabilization electronics, can achieve better shake compensation, resulting in better shooting effects even with significant shake.

[0084] The movement of the movable comb tooth component 122 of the aforementioned driver 12 toward the fixed comb tooth component 121 can be a linear motion, such as... Figure 3 As shown by the horizontal double-headed arrow M, in this case, the first direction is a straight line; or it can be a rotational motion (not shown), in which case the first direction is a circumferential direction about the rotation axis of the movable comb tooth component 122. In the embodiments of this application, the first direction M will be as follows: Figure 3 The direction of the horizontal double-headed arrow is used as an example to describe actuator 10.

[0085] Below, we will refer to Figures 7 to 14 The flexural assembly 13 is described below.

[0086] Figure 7 This is a schematic diagram of one structure of the first and second flexural members in an embodiment of this application. Figure 7 As shown, the flexible component assembly 13 includes a first flexible component 131 and a second flexible component 132 respectively fixed to the substrate 11. Please refer to... Figure 3The first flexural member 131 and the second flexural member 132 are disposed opposite to each other along the second direction N, that is, they are aligned or substantially aligned along the second direction N; Figure 7 In the plane shown, the first direction M is horizontal, and the second direction N is vertical. It should be noted that in this embodiment, the lateral direction is the second direction N. The first flexural member 131 includes four strip springs parallel to the second direction N. The ends of the strip springs near the second flexural member 132 are connected together via a first end member 131a. The two inner strip springs are fixedly connected to the protrusion 15, and the two outer strip springs are connected to the movable comb tooth member 122. Similarly, the second flexural member 132 includes four strip springs parallel to the second direction N. The ends of the strip springs near the first flexural member 131 are connected together via a second end member 132a. The two inner strip springs are fixedly connected to the protrusion 15, and the two outer strip springs are connected to the movable comb tooth member 122. To prevent the first flexure 131 and the second flexure 132 from being blocked by the substrate 11 when they move with the movable comb tooth component 122, the protrusion 15 can have a certain height, so that the first flexure 131 and the second flexure 132 are parallel and suspended above the substrate 11 without contacting it. In a specific embodiment, when the flexure assembly 13 is in a free state, the first end component 131a and the second end component 132a are arranged opposite each other along the second direction N to maximize the torsional stiffness of the flexure assembly 13.

[0087] Figure 8 for Figure 7 A schematic diagram of the motion of the first and second flexural members, where the dashed lines represent... Figure 7 The initial state is shown. Please refer to... Figure 4 and Figure 8 When the movable comb component 122 moves along the first direction M (e.g., Figure 8 When moving (as indicated by the arrow to the left), since the first flexure 131 and the second flexure 132 are respectively connected to the movable comb tooth component 122, the ends of the first flexure 131 and the second flexure 132 connected to the movable comb tooth component 122 both move accordingly, resulting in elastic deformation of the first flexure 131 and the second flexure 132. During this process, when subjected to external lateral disturbances, because the lateral elastic resistance provided by the deformed first flexure 131 and the second flexure 132 becomes smaller, the first flexure 131 and the second flexure 132 may undergo different displacements in the lateral direction due to external lateral disturbances.

[0088] The displacements of the first flexural member 131 and the second flexural member 132 will be described in detail below. When the movable comb tooth component 122 moves along the first direction M, it causes the first flexural member 131 and the second flexural member 132 to move in opposite directions. It should be noted that "movement in opposite directions" refers to the phenomenon that, during the movement of the movable comb tooth component 122 along the first direction M, the first flexural member 131 and the second flexural member 132 deform along with the movement of the movable comb tooth component 122, causing the first end component 131a and the second end component 132a to move away from each other. Specifically, taking... Figure 8 The first flexural member 131 and the second flexural member 132 shown are illustrated as examples. Please refer to... Figure 4 and Figure 8 One end of the first flexure 131 is fixed to the substrate 11. When the other end of the first flexure 131 moves with the movement of the movable comb tooth component 122, the first flexure 131 deforms. The movement trajectory of the first end component 131a is along the movement direction of the movable comb tooth component 122 in the first direction M. Figure 8 (in the left direction), in the second direction N is the direction away from the second end member 132a ( Figure 8 The movement (in the upward direction) will eventually result in the following trajectory: Figure 8 The arc m shown; similarly, one end of the second flexure 132 is fixed to the substrate 11, and when the other end of the second flexure 132 moves with the movement of the movable comb member 122, the second flexure 132 deforms, and the movement trajectory of the second end member 132a is along the movement direction of the movable comb member 122 in the first direction M. Figure 8 (in the left direction), and in the second direction N, it is along the direction away from the first end member 131a (in the left direction). Figure 8 The movement (in the downward direction) will eventually result in the following trajectory: Figure 8 The arc n shown in the figure. It should be noted that the "reciprocal motion" in the embodiments of this application refers to the relative displacement of the first flexure 131 and the second flexure 132 in the first direction M. Specifically, it refers to the relative displacement of the first end component 131a and the second end component 132a in the first direction M. This relative displacement may be caused by the first end component 131a and the second end component 132a moving in the same direction along the first direction M but with different speeds, or it may be caused by the first end component 131a and the second end component 132a moving in opposite directions along the first direction M.

[0089] Figure 9 This is a schematic diagram of one structure of the retaining component in an embodiment of this application. Figure 9As shown, the retaining component 133 includes a first elastic element 134 and a second elastic element 135. The first elastic element 134 is connected to the first end component 131a of the first flexure 131, and the second elastic element 135 is connected to the second end component 132a of the second flexure 132. The first elastic element 134 and the second elastic element 135 are rigidly connected. It should be noted that, in the embodiments of this application, "rigid connection" refers to a connection method in which the first elastic element 134 and the second elastic element 135 do not move or substantially do not move in opposite directions when subjected to force. In other words, it refers to a connection method in which the first elastic element 134 and the second elastic element 135 move the same or substantially the same distance along the first direction M when subjected to force.

[0090] It should be noted that, although Figure 9 The first elastic element 134 and the second elastic element 135 shown are each one, but the specific number of the first elastic element 134 and the second elastic element 135 is not limited. For example, there can be two first elastic elements 134 and one second elastic element 135, or two first elastic elements 134 and two second elastic elements 135, or three first elastic elements 134 and two second elastic elements 135, etc.

[0091] Figure 10 This is a schematic diagram of one structure of the flexural assembly in an embodiment of this application. Figure 10 As shown, taking the retaining component 133, which includes two first elastic elements 134 and two second elastic elements 135, as an example, when the first flexure 131 and the second flexure 132 move in opposite directions with the movable comb component 122, the first elastic element 134 can deform under the action of the first flexure 131, and the second elastic element 135 can deform under the action of the second flexure 132, so that the first end component 131a and the second end component 132a can move along the second direction N ( Figure 10 The vertical directions in the middle gradually move away from each other, while in the first direction M ( Figure 10 As indicated by the arrow in the diagram, the first elastic element 134 and the second elastic element 135 prevent the first flexure element 131 and the second flexure element 132 from moving in opposite directions.

[0092] Specifically, the flexibility direction of the first elastic element 134 and the second elastic element 135 can be set along the second direction N. In other words, when the first elastic element 134 and the second elastic element 135 are subjected to a force along the second direction N, or when the force has a component along the second direction N, the first elastic element 134 and the second elastic element 135 can deform. For example, in a specific embodiment, the first elastic element 134 and the second elastic element 135 can be selected as spring sheets. It should be noted that, in this embodiment, since the spring sheet is relatively thin, for ease of description, the surface formed by the length direction and the width direction of the spring sheet is taken as the plane where the spring sheet is located. In this embodiment, the spring sheet is set such that its plane is perpendicular to the substrate 11; in other words, the first direction M is the normal direction of the plane where the spring sheet is located. Please continue to refer to... Figure 10 The deformation direction of the first elastic element 134 and the second elastic element 135 is along their thickness direction, that is, the second direction N. Figure 10 In the vertical direction of the spring sheet, the spring sheet is rigid or stiff and does not easily deform. Therefore, the first elastic element 134 and the second elastic element 135 deform when subjected to a force along the second direction N, allowing the first flexure 131 and the second flexure 132 to move along the second direction N. In the first direction M, the first elastic element 134 and the second elastic element 135 prevent the first flexure 131 and the second flexure 132 from moving in opposite directions along the first direction M. In other words, the first elastic element 134 and the second elastic element 135 make the movement of the first flexure 131 and the second flexure 132 in the first direction M consistent or substantially consistent. From the second direction N, the first flexure 131 and the second flexure 132 remain relative (i.e., do not cross), so as to reduce the lateral deflection of the movable comb tooth component 122 and increase the torsional stiffness of the actuator 10. In addition, the first elastic member 134 and the second elastic member 135 will also exert a resisting force on the first flexure member 131 and the second flexure member 132 during the deformation process. This force can slow down the opposing motion and reduce the amount of change of the opposing motion, thereby slowing down the reduction of the lateral stiffness of the first flexure member 131 and the second flexure member 132.

[0093] The specific types of the first elastic element 134 and the second elastic element 135 are not specifically limited in this application embodiment, as long as they can elastically deform in the second direction N and are not easily deformed in the first direction M.

[0094] The rigid connection between the first elastic element 134 and the second elastic element 135 can be achieved by directly fixing the first elastic element 134 and the second elastic element 135 together, for example, by gluing or welding; or by rigidly connecting the first elastic element 134 and the second elastic element 135 together through a connector, for example, by bolting. Alternatively, the first elastic element 134 and the second elastic element 135 can be formed by drilling holes in the same piece of material, so that the first elastic element 134 and the second elastic element 135 are integrally formed.

[0095] In some embodiments of this application, the retaining component 133 further includes a rigid connector 136, to which the first elastic member 134 and the second elastic member 135 are respectively fixedly connected. The rigid connector 136 provides a more secure connection between the first elastic member 134 and the second elastic member 135, and further restricts the staggered movement of the first flexural member 131 and the second flexural member 132 in the first direction M.

[0096] Figure 11 This is a schematic diagram of one structure of the retaining component in an embodiment of this application. Figure 11 As shown, the retaining component 133 includes two first elastic elements 134, two second elastic elements 135, and an I-shaped rigid connector 136. The two first elastic elements 134 are arranged along a first direction M and respectively connected to a first end component 131a. One end of the rigid connector 136 is located between and connected to the two first elastic elements 134. The two second elastic elements 135 are arranged along the first direction M and respectively connected to a second end component 132a. The other end of the rigid connector 136 is located between and connected to the two second elastic elements 135. In their respective free states, the first elastic elements 134 and the second elastic elements 135, in their cross-sectional shape parallel to the substrate 11, are generally H-shaped. When the first flexure 131 and the second flexure 132 move in opposite directions as the movable comb tooth component 122 moves, the first flexure 131 causes the two first elastic elements 134 to deform, and the second flexure 132 causes the two second elastic elements 135 to deform. Under the action of the elastic deformation of the first elastic elements 134 and the second elastic elements 135, the first flexure 131 and the second flexure 132 can move away from each other along the second direction N, while the cross-movement in the first direction M is prevented (or restricted), thereby reducing the phenomenon of lateral deflection of the movable comb tooth component 122.

[0097] Figure 12 This is a schematic diagram of another structure of the flexural assembly in an embodiment of this application. For example... Figure 12As shown, the retaining component 133 includes a first elastic element 134, a second elastic element 135, and an I-shaped rigid connector 136. The two ends of the first elastic element 134 are fixed to one side of the rigid connector 136, and a first end component 131a is connected to the middle portion of the first elastic element 134. The two ends of the second elastic element 135 are fixed to the other side of the rigid connector 136, and a second end component 132a is connected to the middle portion of the second elastic element 135. When the first flexure 131 and the second flexure 132 move in opposite directions, the middle portion of the first elastic element 134 deforms under the force of the first flexure 131, and the middle portion of the second elastic element 135 deforms under the force of the second flexure 132. In the first direction M, the opposing movements of the first flexure 131 and the second flexure 132 are restricted.

[0098] The specific shape of the rigid connector 136 along its cross-section parallel to the substrate 11 is not limited; for example, it can be as follows: Figure 11 and Figure 12 The I-shape shown, or as... Figure 13 The I-shape shown, or as... Figure 14 The sun shape shown.

[0099] Furthermore, in some embodiments of this application, the retaining component 133 is located between the first flexure 131 and the second flexure 132 without occupying other space in the actuator 10, thereby enabling a more compact space design.

[0100] Figure 15 This is a schematic diagram of another actuator structure in an embodiment of this application. Figure 16 for Figure 15 A schematic cross-sectional view of the actuator along the BB direction. (See diagram below.) Figure 15 and Figure 16 As shown, in some embodiments of this application, the actuator 10 further includes a movable frame 14 suspended above the substrate 11 to enhance the torsional stiffness of the actuator 10. The movable comb tooth component 122 and the flexure assembly 13 are respectively connected to the movable frame 14. The movable comb tooth component 122, the fixed comb tooth component 121, and the flexure assembly 13 are all located within the movable frame 14, thereby achieving the suspended installation of the movable comb tooth component 122 through the movable frame 14 and the flexure assembly 13. Since the movable frame 14 moves towards the fixed comb tooth component 121 along with the movable comb tooth component 122, in some embodiments, the flexure assembly 13 and the movable frame 14 can be arranged on the same plane to reduce the torsional force experienced by the movable frame 14 when subjected to external disturbances. For example, as... Figure 16As shown, the first flexible member 131 and the second flexible member 132 of the flexible member assembly 13 are fixed to the substrate 11 by the protrusion 15, so that the flexible member assembly 13 can also be suspended from the substrate 11 to avoid the movable frame 14 being blocked by the substrate 11 when it moves with the movable comb member 122. In one specific embodiment, for ease of manufacturing, the first flexible member 131 and the second flexible member 132 can be directly welded to the protrusion 15.

[0101] According to the simulation and experimental results of the above embodiments, when the movable comb component 122 moves along the first direction M, under the action of the holding component 133, the ratio of the displacement of the movable frame 14 to the displacement of the first end component 131a and the second end component 132a is 2:1. It can be seen that the structure significantly reduces the deformation of the first flexure component 131 and the second flexure component 132 along the first direction M, so as to reduce the decrease in the lateral stiffness of the first flexure component 131 and the second flexure component 132.

[0102] In this embodiment, the number and position of the movable comb tooth component 122 and the fixed comb tooth component 121 are not specifically limited; for example, they can be... Figure 15 The two fixed comb tooth components 121 shown, and the movable comb tooth component 122 located between the two fixed comb tooth components 121, are used to achieve bidirectional long stroke movement; or, there may be one fixed comb tooth component 121 and one movable comb tooth component 122.

[0103] by Figure 15The actuator structure shown is an example. To enable bidirectional movement of the movable comb tooth component 122 in the two directions indicated by the arrows in the figure, the corresponding fixed comb tooth component 121 includes a first fixed comb tooth component 121a and a second fixed comb tooth component 121b arranged opposite to and parallel to each other. The movable comb tooth component 122 is located between the two fixed comb tooth components 121. The movable comb tooth component 122 includes a ridge-shaped connecting portion 122a. An array of first comb teeth 122b is provided on the side of the ridge-shaped connecting portion 122a facing the first fixed comb tooth component 121a, and a second comb tooth 122c is provided on the side of the ridge-shaped connecting portion 122a facing the second fixed comb tooth component 121b. The comb teeth of the first fixed comb tooth component 121a are parallel to and staggered with the first comb teeth 122b of the movable comb tooth component 122, and the comb teeth of the second fixed comb tooth component 121b are parallel to and staggered with the second comb teeth 122c of the movable comb tooth component 122. The movable comb tooth component 122 is grounded via the flexible component assembly 13 and the metal pad at the protrusion 15. This grounding potential serves as a reference potential for the fixed comb tooth component 121. When a positive or negative voltage of a certain amplitude is applied to the first fixed comb tooth component 121a through the pad, the movable comb tooth component 122 moves toward the first fixed comb tooth component 121a, simultaneously driving the movable frame 14 to move in the same direction. When a positive or negative voltage of a certain amplitude is applied to the second fixed comb tooth component 121b through the pad, the movable comb tooth component 122 moves toward the second fixed comb tooth component 121b, simultaneously driving the movable frame 14 to move in the same direction. In this way, the actuator 12 can drive the movable frame 14 to move bidirectionally along the direction of motion.

[0104] Figure 17 and Figure 18 This is a schematic diagram of another actuator structure in an embodiment of this application. For example... Figure 17 and Figure 18 As shown, the flexural element group 13 may include two, and the two flexural element groups 13 are respectively arranged on both sides of the actuator 12 along the first direction M (indicated by the arrow in the figure). The symmetrical arrangement of the flexural element groups 13 on both sides of the actuator 12, compared with the arrangement of the flexural element group 13 on one side of the actuator 12, can reduce the swaying of the movable frame 14 and the movable comb tooth component 122, and also reduces the lateral instability of the bidirectional movement of the movable comb tooth component 122 along the first direction M, further increasing the stroke of the actuator 10.

[0105] Simulation and experimental results of the above embodiments show that setting the retaining component 133 can increase the stroke of the movable comb component 122 by 260%, and setting the movable frame 14 can increase the stroke of the movable comb component 122 by 20%. By combining the structures of the retaining component 133 and the movable frame 14, the actuator 10 provided by the present invention increases the stroke by about 3 times compared with the actuators of the prior art, and the actuator 10 used in the anti-shake electronic device can achieve better shake compensation function.

[0106] To miniaturize the actuator 10 and reduce its space footprint within the camera module, MEMS (Micro-Electro-Mechanical System) manufacturing technology can be employed. MEMS manufacturing technology, developed based on semiconductor manufacturing technology, is capable of fabricating high-precision structures typically in the micrometer or even sub-micrometer range. Therefore, applying MEMS manufacturing technology to the actuator 10 results in a smaller actuator (referred to as a MEMS actuator) with lower power consumption, making it more suitable for applications in fields with stringent space and power consumption requirements, such as portable electronic devices.

[0107] The aforementioned substrate 11 can be fixedly connected to a circuit board, and components such as the driver 12 can be electrically connected to the circuit board; alternatively, the aforementioned substrate 11 itself can also be a circuit board and electrically connected to components such as the driver 12.

[0108] Figure 19 This is a schematic diagram of one structure of the actuator assembly in an embodiment of this application. Figure 19As shown, this application also provides an actuator assembly 20, which includes a fixed base 21, a support platform 22 disposed on the fixed base 21, and at least one actuator 10 according to any of the above embodiments. The base plate 11 of the actuator 10 can be mounted on the fixed base 21, or the fixed base 21 can be used as the base plate 11 of the actuator 10. The specific number of actuators 10 is not limited and can be determined according to specific needs. For example, to increase the output driving force of the actuator 10, two or more actuators 10 can be provided. The support platform 22 is connected to the movable comb tooth component 122 of each actuator 10. When the movable comb tooth component 122 moves along the first direction M, it drives the support platform 22 to perform a vibration compensation movement. During this process, the holding component 133 maintains a gap between the comb teeth of the fixed comb tooth component 121 and the comb teeth of the movable comb tooth component 122, preventing them from contacting each other. This prevents the first flexure component 131 and the second flexure component 132 from moving in opposite directions along the first direction M, causing the movable comb tooth component 122 to deflect laterally and resulting in the comb teeth of the movable comb tooth component 122 coming into contact with the comb teeth of the fixed comb tooth component 121. This allows the movable comb tooth component 122 to continue moving a longer distance along the first direction M after its comb teeth are inserted into the comb teeth of the fixed comb tooth component 121, thereby increasing the stroke of the actuator 10. This actuator assembly 20, used for the anti-shake electronic device, can achieve better vibration compensation.

[0109] In one specific embodiment, the support platform 22 can be connected to the movable comb tooth component 122 via a cantilever connector 23. The cantilever connector 23 is suspended above the fixed base 21, which allows the support platform 22 to be suspended above the fixed base 21, thus preventing the fixed base 21 from hindering the compensating movement of the support platform 22.

[0110] The support stage 22 is used to support electronic devices, such as image sensors in a camera module. The image sensor can be a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor) device.

[0111] like Figure 20As shown, in some embodiments of this application, the actuator assembly 20 includes at least two actuators 10 mounted on the same fixed base 21, and the plurality of actuators 10 are respectively connected to the support platform 22 via cantilever connectors 23. In addition to connecting the support platform 22 and the actuators 10, the cantilever connectors 23 can also transmit the driving force of the actuators 10 to the support platform 22, causing the support platform 22 to perform corresponding movements. One end of the cantilever connector 23 is connected to the apex or a location near the apex of the support platform 22, and the other end is connected to the movable frame 14 of the actuator 10. The length direction of each cantilever connector 23 is consistent with the movement direction of the corresponding actuator 10, thus providing higher stiffness in the movement direction of the actuator 10 for transmitting thrust. Lower stiffness is provided in the vertical direction perpendicular to the movement direction of the actuator 10 to avoid interfering with the movement of the support platform 22 in that vertical direction.

[0112] When there are multiple actuators 10, in order to make the driving force acting on the support platform 22 more uniform, these actuators 10 can be evenly distributed on the fixed base 21. In one embodiment of this application, the actuators 10 include three and are distributed in an equilateral triangle shape, such as... Figure 20 As shown, in this embodiment, the support platform 22 can be triangular in shape, and the three actuators 10 are respectively fixed to the three vertices of the support platform 22 by cantilever connectors 23, thereby forming a triangular region surrounding the support platform 22. In another embodiment of this application, the actuators 10 include four actuators, which are distributed in a quadrilateral shape, such as... Figure 21 As shown, four actuators 10 are distributed around the support platform 22, and the four vertices of the support platform 22 are respectively suspended and fixed to each actuator 10 by cantilever connectors 23. In another embodiment of this application, the support platform 22 can also be a frame surrounding the actuators 10. The inner edge of the frame of the support platform 22 near the vertices is suspended and fixed to each actuator 10 by cantilever connectors 23, as shown. Figure 22 As shown, the border of the support platform 22 can also be discontinuous. It should be noted that other configurations of the actuator 10 and the support platform 22 are also possible. For example, the support platform 22 can be pentagonal, hexagonal, etc., and the actuator 10 can be set at the vertices corresponding to the shape of the support platform 22 to obtain more degrees of freedom for the actuator assembly 20.

[0113] The aforementioned actuator assembly 20 can achieve multi-directional motion within a plane. Below, using... Figure 21 The actuator assembly 20 shown is an example to illustrate how the actuator assembly 20 achieves multi-directional displacement.

[0114] The process by which the support platform 22 translates along the x-axis is as follows: Figure 23aAs shown, when the first actuator 10a is energized and moves in the positive x-axis direction, and the third actuator 10c is energized and moves in the positive x-axis direction, while the second actuator 10b and the fourth actuator 10d are not energized, the following can be achieved: Figure 23a The support platform 22 shown moves in the positive x-axis direction. Figure 23a The middle arrow indicates the direction of movement. When the first actuator 10a is energized, it moves in the negative x-axis direction; when the third actuator 10c is energized, it moves in the negative x-axis direction; and when the second actuator 10b and the fourth actuator 10d are de-energized, the support platform 22 can move in the negative x-axis direction (i.e., in conjunction with...). Figure 23a (The direction opposite to the middle arrow).

[0115] The process by which the support platform 22 translates along the y-axis is as follows: Figure 23b As shown, when the second actuator 10b is energized and moves in the positive y-axis direction, and the fourth actuator 10d is energized and moves in the positive y-axis direction, while the first actuator 10a and the third actuator 10c are not energized, the following can be achieved: Figure 23b The support platform 22 shown moves in the positive y-axis direction. Figure 23b The middle arrow indicates the direction of movement. When the second actuator 10b is energized, it moves in the negative y-axis direction; when the fourth actuator 10d is energized, it moves in the negative y-axis direction; and when the first actuator 10a and the third actuator 10c are de-energized, the support platform 22 can move in the negative y-axis direction (i.e., in conjunction with...). Figure 23b (The direction opposite to the middle arrow).

[0116] The process by which the bearing platform 22 achieves the rotation of the roll shaft is as follows: Figure 23c As shown, when the first actuator 10a is energized, it moves in the positive x-axis direction; when the second actuator 10b is energized, it moves in the positive y-axis direction; when the third actuator 10c is energized, it moves in the negative x-axis direction; and when the fourth actuator 10d is energized, it moves in the negative y-axis direction. Thus, based on the force conditions of the support platform 22, the following is achieved: Figure 23c The bearing platform 22 shown rotates counterclockwise. Figure 23c The middle arrow indicates the direction of rotation. Referring to the above process, controlling the actuator 10 to move in the opposite direction will achieve clockwise rotation of the bearing platform 22's roll axis.

[0117] The support platform 22 can simultaneously perform any one, two, or a combination of all three of the above movements. It should be noted that the support platform 22 is connected to the movable frame 14 of the actuator 10 via a cantilever connector 23. Taking movement along the x-axis as an example, when the support platform 22 moves in the x-axis direction, the cantilever connector 23 in the y-axis direction deforms to accommodate the movement of the support platform 22 in the x-axis direction. Since the displacement of the support platform 22 is provided by the deformation of the cantilever connector 23 in the y-axis direction, the first actuator 10a and the third actuator 10c are not subjected to significant lateral tension. Therefore, the combination of movements between different axes does not increase the risk of lateral instability of the actuator 10, thereby ensuring the long-stroke movement of the actuator 10 to provide the long-stroke movement of the actuator assembly 20.

[0118] When using actuator assembly 20, jitter compensation objects (such as electronic devices) are typically fixed to the support stage 22 in actuator assembly 20. Figure 24 This is a schematic diagram of the structure of an electronic module in an embodiment of this application. Figure 24 As shown, the electronic module 30 includes an electronic device 24 and an actuator assembly as described in any of the above embodiments. The electronic device 24 is disposed on the support platform 22. When the movable comb tooth component 122 moves along the first direction M, the movable comb tooth component 122 drives the support platform 22 and the electronic device 24 to perform jitter compensation movement. During this process, the holding component 133 maintains a gap between the comb teeth of the fixed comb tooth component 121 and the comb teeth of the movable comb tooth component 122, preventing them from contacting each other. This prevents the first flexure component 131 and the second flexure component 132 from moving in opposite directions along the first direction M, causing the movable comb tooth component 122 to deflect laterally and resulting in the comb teeth of the movable comb tooth component 122 coming into contact with the comb teeth of the fixed comb tooth component 121. This allows the movable comb tooth component 122 to continue moving a longer distance along the first direction M after its comb teeth are inserted into the comb teeth of the fixed comb tooth component 121, thereby increasing the stroke of the actuator 10. The electronic module 30 used for jitter stabilization can achieve better jitter compensation function.

[0119] Please continue to refer to this. Figure 24 The electronic device 24 can be fixed to the support platform in the actuator assembly 20 by the connecting post 25. The connecting post 25 protrudes from the support platform 22, that is, the connecting post 25 has a certain height, so that the electronic device 24 is mounted above the fixed base 21, the circuit board 26 and the actuator assembly 20, so that the electronic device 24 does not contact the actuator assembly 20 and the circuit board 26, and the actuator assembly 20 and the circuit board 26 do not obstruct the movement of the electronic device 24.

[0120] The connecting post 25 can be a plate-like structure with dimensions corresponding to the support platform 22. For example, the connecting post 25 can be a plate-like structure with the same or slightly smaller dimensions as the support platform 22, and the plate-like structure has a certain thickness; or, the connecting post 25 can also include multiple column-like structures of equal height, through which the electronic device 24 is supported on the support platform 22. This application embodiment does not specifically limit the structure of the connecting post 25.

[0121] The fixing base 21 can be disposed within the recess of the circuit board 26, such as... Figure 24 As shown, this reduces the overall height of the component. The aforementioned fixed base 21 can also be part of the circuit board 26.

[0122] To save space, the outer perimeter of the entire actuator assembly 20 can correspond to the outer perimeter of the electronic device 24. Since the outer perimeter of the actuator assembly 20 and the perimeter of the fixed base 21 are the same, the dimensions of the fixed base 21 can also correspond to the dimensions of the electronic device 24. For example, the dimensions of the fixed base 21 can be the same as the dimensions of the electronic device 24, or the dimensions of the fixed base 21 can be slightly smaller than the dimensions of the electronic device 24, or the dimensions of the fixed base 21 can be slightly larger than the dimensions of the electronic device 24, etc. This application embodiment does not specifically limit this; different dimensional correspondences can be set according to actual circumstances.

[0123] Please continue to refer to this. Figure 24 Electrical connection terminals can be provided on the surfaces of circuit board 26, actuator assembly 20, and electronic device 24. The electrical connection terminals of circuit board 26 are connected to the electrical connection terminals on the surface of actuator assembly 20 via flexible connection lines 27, and the electrical connection terminals of circuit board 26 are also connected to the electrical connection terminals of electronic device 24 via flexible connection lines 27. The electrical connection terminals can be solder pads, and the flexible connection lines 27 are in a relaxed state or a critical buckling state to avoid interfering with the movement of electronic device 24. In another embodiment of this application, the electrical connection terminals of circuit board 26 and electronic device 24 are connected via flexible connection lines 27. The electrical connection terminals of circuit board 26 are located near the actuator assembly 20, and the electrical connection terminals on the surface of actuator assembly 20 are connected to the electrical connection terminals of circuit board 26 via flip-chip bonding or through-silicon via (TSV) technology. This can further reduce the overall size of the assembly.

[0124] Figure 25 This is a schematic diagram of another structure of the electronic module in an embodiment of this application, wherein the electronic module can be a camera module. For example... Figure 25As shown, the electronic module 30 can be applied to electronic devices with shooting functions, such as mobile phones, tablets, digital cameras, medical devices, etc., to realize the optical image stabilization function of the image sensor.

[0125] Please continue to refer to this. Figure 25 When the electronic module 30 is a camera module, it includes a housing, a lens group 31, a filter 32, an image sensor 33, and an actuator assembly 20 of any of the above embodiments. The image sensor 33 is mounted on the support platform 22 of the actuator assembly 20, enabling multi-directional long-stroke movement. The housing may include a first housing 34 accommodating the image sensor 33 and the actuator assembly 20, and a second housing 35 accommodating the lens group 31 and the filter 32, wherein the filter 32 is located between the lens group 31 and the image sensor 33.

[0126] In the application, the imaging beam of the object being photographed passes through the lens assembly and is imaged on the image sensor 33 of the electronic module 30. The image sensor 33 and the actuator assembly 20 are assembled using the assembly method described in the above embodiments. This enables long-stroke movement of the image sensor 33 in multiple directions (x, y-axis movement and roll axis) within a plane, as well as electrical connection between the image sensor 33 and the external environment. When this camera module is applied to an electronic device with camera functionality, the image sensor 33 and the actuator assembly 20 are electrically connected to the processor of the electronic device. When the electronic device senses shaking during shooting, the processor generates a voltage control signal to control the actuator 10 to move, thereby controlling the image sensor 33 to move in the opposite direction of the shaking, thus compensating for the shaking.

[0127] Image sensor 33 and actuator assembly 20 are electrically connected to the processor. For example, image sensor 33 and actuator assembly 20 can be electrically connected to the processor via wires, or image sensor 33 and actuator assembly 20 can be electrically connected to the processor via circuit board 26. The processor is electrically connected to image sensor 33 so that the processor can receive image signals sent by image sensor 33, process the image signals, and perform the image acquisition function of the electronic device.

[0128] The processor described above can also be used to analyze the shaking of the electronic device, and then, based on the shaking of the electronic device, control the actuator assembly 20 to drive the image sensor 33 to move. For example, the electronic device may include an inertial sensor for detecting shaking information. For example, when shaking occurs during a user's handheld shooting of the electronic device, the inertial sensor can detect the shaking information of the electronic device (which may include shaking displacement and shaking angle), and can send the detected shaking information to the processor. Based on the shaking information of the electronic device, the processor can determine the compensation amount on the x-axis, y-axis, and roll axis respectively, and based on the compensation amount on the x-axis and y-axis, control the power / voltage value of each actuator 10, so that the actuator assembly 20 drives the stage 22 to move, and then the stage 22 drives the image sensor 33 to move, thereby improving the imaging stability of the image sensor 33.

[0129] Figure 26 This is a schematic diagram of the structure of an electronic device according to an embodiment of this application. For example... Figure 26 As shown, the electronic device 40 includes a power supply 401 and an electronic module 30 as described in any of the above embodiments. The fixed comb tooth component 121 and the movable comb tooth component 122 are electrically connected to the power supply 401. After the power supply 401 supplies power to the fixed comb tooth component 121 and the movable comb tooth component 122, the fixed comb tooth component 121 and the movable comb tooth component 122 carry opposite charges, causing the movable comb tooth component 122 to move along the first direction M under the action of electrostatic attraction. During this process, the retaining component 133 maintains a gap between the teeth of the fixed comb component 121 and the teeth of the movable comb component 122 so that they do not come into contact. This prevents the first flexure 131 and the second flexure 132 from moving in opposite directions along the first direction M, which would cause the movable comb component 122 to deflect laterally and result in the teeth of the movable comb component 122 coming into contact with the teeth of the fixed comb component 121. This allows the movable comb component 122 to move a longer distance along the first direction M, increasing the stroke of the actuator 10 and achieving better anti-shake function for the electronic device 40.

[0130] The aforementioned electronic device 40 also includes a processor 402. The processor 402 may be the central processing unit of the electronic device 40, or it may be an independent central processing unit located inside or outside the electronic module 30 and responsible for calculations and control related to the image stabilization function. The embodiments of this application do not specifically limit the type of processor 402.

[0131] In the embodiments of this application, the electronic device 40 may be a device with a shooting function, such as a mobile phone, tablet computer, digital camera, medical device, etc., to realize the optical image stabilization function of the image sensor; or it may be a device that requires image stabilization function, such as an alignment device; or it may be other electronic devices that need to adjust the position of electronic components, and this application does not impose any restrictions.

[0132] The terminology used in the above embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise.

[0133] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in another embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0134] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An actuator, characterized by Includes a substrate and a driver and flexure assembly disposed on the substrate, wherein: The driver includes a fixed comb tooth component and a movable comb tooth component. The fixed comb tooth component is fixed to the substrate, and the movable comb tooth component is suspended from the substrate. The comb teeth of the fixed comb tooth component and the comb teeth of the movable comb tooth component are parallel and staggered. The movable comb tooth component is capable of moving in a first direction toward the fixed comb tooth component. The flexible component assembly includes a protrusion and a first flexible component, a retaining component, and a second flexible component connected sequentially along a second direction, the second direction being perpendicular to the first direction; the first flexible component and the second flexible component are fixed to the substrate by the protrusion, and there are gaps between the first flexible component and the substrate and between the second flexible component and the substrate, respectively; the first flexible component and the second flexible component are respectively fixedly connected to the movable comb component. When the movable comb tooth component moves along the first direction, the first flexure and the second flexure deform along the first direction, and the retaining component maintains a gap between the comb teeth of the fixed comb tooth component and the comb teeth of the movable comb tooth component.

2. The actuator as claimed in claim 1, characterized in that, The retaining component includes a first elastic element and a second elastic element that are rigidly connected, the first elastic element being connected to the first flexible element, and the second elastic element being connected to the second flexible element; When the movable comb component moves along the first direction, the first elastic element and the second elastic element deform along the second direction, and the first elastic element and the second elastic element prevent the first flexure and the second flexure from being misaligned along the first direction.

3. The actuator as described in claim 2, characterized in that, The retaining component further includes a rigid connector, and the first elastic element and the second elastic element are respectively fixedly connected to the rigid connector.

4. The actuator as claimed in claim 3, characterized in that, The first elastic element includes two first spring plates, and the second elastic element includes two second spring plates. The two first spring plates and the two second spring plates are respectively fixedly connected to the rigid connecting member, and the planes on which the first spring plates and the second spring plates are located are perpendicular to the substrate.

5. The actuator as described in claim 3 or 4, characterized in that, The rigid connector has an I-shaped or I-shaped cross-section parallel to the substrate.

6. The actuator as claimed in any one of claims 1 to 4, characterized in that, The retaining member has an H-shaped cross-section parallel to the substrate.

7. The actuator as claimed in any one of claims 1 to 6, characterized in that, It also includes a movable frame, the movable comb tooth component and the flexible component assembly are respectively connected to the movable frame, and the movable frame is suspended above the substrate. The fixed comb tooth component, the movable comb tooth component and the flexible component assembly are disposed within the movable frame.

8. The actuator as claimed in any one of claims 1 to 7, characterized in that, The flexure assembly includes two flexure assemblies, which are symmetrically arranged on both sides of the driver along the first direction.

9. The actuator as claimed in any one of claims 1 to 8, characterized in that, The substrate is a circuit board, and the fixed comb tooth component and the movable comb tooth component are electrically connected to the substrate.

10. An actuator assembly, characterized in that, It includes a support platform and at least one actuator as claimed in any one of claims 1 to 9, wherein the support platform is connected to the movable comb tooth component of each actuator.

11. The actuator assembly as claimed in claim 10, characterized in that, It also includes a cantilever connector suspended above the substrate, the cantilever connector connecting the support platform and the movable comb tooth component.

12. An electronic module, characterized in that, It includes electronic components and an actuator assembly as described in claim 10 or 11, wherein the electronic components are disposed on the support platform.

13. The electronic module as described in claim 12, characterized in that, The electronic module is a camera module, and the electronic device is an image sensor or a lens group.

14. The electronic module as described in claim 12 or 13, characterized in that, It also includes a connecting column fixed to the support platform, and the electronic device is fixedly connected to the connecting column.

15. An electronic device, characterized in that, The device includes a power supply and an electronic module as described in any one of claims 12 to 14, wherein the fixed comb tooth component and the movable comb tooth component are respectively electrically connected to the power supply.

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