Rotary motor driven by inertia of two piezoelectric tubes in parallel and rotary scanning probe microscope

Abstract

A rotary motor and a rotary scanning probe microscope driven by inertia of two piezoelectric tubes arranged side by side are disclosed, belonging to the technical field of piezoelectric positioners. The disclosed motor addresses the problem of how to design a rotary motor driven by inertia of two piezoelectric tubes arranged side by side for use in a scanning probe microscope in a low-temperature and strong magnetic field. The motor drives a turntable and a pressure arm to move relative to each other by means of tangential or axial inertial motion performed by the first or second piezoelectric tube, thereby driving the coaxial rotation of the rotating shaft and the turntable. The motor has a compact structure, and the two piezoelectric tubes are used in an upright manner, which reduces the radial size of the entire motor and is conducive to the use of the motor in narrow spaces such as low temperatures and strong magnetic fields. The control method of the piezoelectric tube is simple and reliable, and has extremely wide applicability. The axial deformation of the piezoelectric tube is utilized to reduce friction during rotation, thereby generating greater thrust. The overall non-magnetic design can realize the rotation of the scanning probe microscope at any angle in a magnetic field.

Description

Technical Field

[0001] The invention belongs to the technical field of piezoelectric positioners and relates to a rotary motor driven by inertia of two piezoelectric tubes arranged side by side and a rotary scanning probe microscope. Background Art

[0002] Under the influence of an external electric field, piezoelectric materials produce mechanical deformation or stress in a specific direction. When the electric field is reversed, this deformation or stress also reverses. This effect is known as the inverse piezoelectric effect. Research has found that the displacement produced by piezoelectric ceramics under voltage is very fine, at the micro-nanoscale, and the amplitude of the vibration or expansion is very small. Therefore, piezoelectric ceramics have high positioning accuracy. However, the deformation produced by directly utilizing the inverse piezoelectric effect of piezoelectric ceramics is at the micro-nanoscale, making it difficult to achieve large-scale macroscopic movement. Piezoelectric motors (PMs) made of piezoelectric ceramics can produce macroscopically visible displacement through repeated deformation, thereby achieving both high positioning accuracy and a large range of movement. Piezoelectric motors can be divided into linear and rotary types based on their motion mode. Currently, piezoelectric motors are widely used in precision machinery, nanodevice processing, atomic / molecular manipulation, and even subatomic structure imaging. At the same time, as a new type of piezoelectric stepper, piezoelectric motors are gradually developing towards small size, high thrust, high compactness, high positioning accuracy, and resistance to harsh conditions, and have made significant progress. For example, piezoelectric motors used in cutting-edge measuring instruments (such as scanning probe microscopes) have evolved from the inchworm motor, which was born in 1972, to the Pan-style PM motor, which appeared and was widely used in 1993, to the new high-thrust piezoelectric motor suitable for a wide temperature range and resistant to harsh conditions in 2009 and 2013 (patent application number 201210260297.6), and gradually developed to the stacked piezoelectric motor proposed in 2014 with greater thrust, resistance to harsher conditions, a larger operating temperature range, and more precise positioning (patent application number 201410127166.X).

[0003] However, today's cutting-edge scientific research not only requires positioners to have small size, large drive, nanometer-level positioning accuracy, and resistance to harsh conditions, but also needs to meet the needs of rotating cutting-edge measuring instruments (such as scanning probe microscopes) in spatially confined tubular extreme conditions (including strong magnetic fields, extremely low temperatures, etc.), that is, to achieve arbitrary angle rotation of the sample relative to the direction of the magnetic field. For example, the German company Attocube (Attocube Systems AG) uses its unique technology to design and manufacture various nano-precision displacers, including 360° rotational displacers (ANR series products) and inclination displacers (ANG series products), which can provide atomic-level accuracy and centimeter-level movement range in environments such as extremely low temperatures and high magnetic fields. However, the company's rotation series products have low output driving force and therefore cannot drive the microscope to rotate, which greatly limits their application in tubular extreme conditions.

[0004] Another example is a recently proposed rotary piezoelectric motor and control method driven by the free ends of four piezoelectric bodies arranged in a U-shape (patent application number 201810046568.5). Its technical features are: it includes four identical strip piezoelectric bodies, four strip plates, a base and a rotor, and is characterized in that the four strip piezoelectric bodies are each fixed on the base with one end as a fixed end to form a U-shape, and the remaining end of each strip piezoelectric body is a free end; the four strip plates are respectively fixed to the free ends of the four strip piezoelectric bodies; a positive pressure is set in a direction perpendicular to the deformation direction of the four strip piezoelectric bodies to press the strip plates and the rotor, and the strip plates are elastically pressed against the rotor through the elasticity of the strip plates and / or the elasticity of the base and / or the elasticity of the rotor and / or the elasticity of the elastic body added between the strip piezoelectric body and the strip plates. The four positive pressures set between the strip plates and the rotor have equal magnitude of maximum static friction force on the rotor. This symmetrical structure is more conducive to the drive control of the motor and can provide maximum thrust. However, this rotary piezoelectric motor has several important disadvantages: 1) The U-shaped structure composed of four identical strip-shaped piezoelectric bodies has a large capacitance, which limits its frequency and prevents rapid movement. The starting voltage is high, and the structure occupies a large space, which particularly affects its application in extreme and harsh conditions such as strong magnetic fields, strong electric fields, and variable temperature and pressure. 2) The control of the four piezoelectric bodies is relatively cumbersome, which is not conducive to user operation.

[0005] To summarize: 1) Most existing piezoelectric rotary motors are piezoelectric structures with large capacitance, cannot move quickly, and have high starting voltages; 2) Existing piezoelectric motors generally have low output torque, and motors with large output torque are relatively large in size, which cannot meet the rotation requirements of cutting-edge measuring instruments under size-restricted tubular conditions (strong magnetic fields, low-temperature environments); 3) Existing piezoelectric motors are cumbersome to control and complex in structure, making them unsuitable for widespread applications. Summary of the Invention

[0006] The technical problem to be solved by the present invention is how to design a rotary motor driven by inertia with two piezoelectric tubes arranged side by side for use in a scanning probe microscope in a low temperature and strong magnetic field.

[0007] The present invention solves the above technical problems through the following technical solutions:

[0008] A rotary motor driven by inertia with two piezoelectric tubes arranged side by side comprises: a base (1), a first piezoelectric tube (2), a second piezoelectric tube (3), a turntable (4), a rotating shaft (5), a turntable clamping frame (6), a pressure arm (8), and a pressure arm fixing frame (9); one end of the first piezoelectric tube (2) and the second piezoelectric tube (3) are fixed side by side on the base (1), and the other ends of the first piezoelectric tube (2) and the second piezoelectric tube (3) are free ends; the upper part of the turntable clamping frame (6) is coaxially fixed to the first piezoelectric tube (2) The free end of the turntable clamping frame (6) clamps the turntable (4) and the rotating shaft (5) inside the first piezoelectric tube (2), the turntable (4) drives the rotating shaft (5) to rotate coaxially, the outer edge of the turntable (4) abuts against the pressure arm (8), the pressure arm (8) is vertically inserted into the second piezoelectric tube (3), one end of the pressure arm (8) is fixedly connected to the pressure arm fixing frame (9), the other end of the pressure arm (8) is movably inserted into the base (1), and the pressure arm fixing frame (9) is fixed to the free end of the second piezoelectric tube (3).

[0009] The present invention discloses a rotary motor driven by inertia of two piezoelectric tubes arranged side by side. The first piezoelectric tube (2) or the second piezoelectric tube (3) performs tangential inertial motion or axial inertial motion, thereby driving the relative motion between the turntable (4) and the pressure arm (8), thereby driving the rotating shaft (5) and the turntable (4) to rotate coaxially. The present invention has a compact structure. The two piezoelectric tubes are used in an upright manner, which reduces the radial size of the entire motor and is conducive to the use of the motor in narrow spaces such as low temperatures and strong magnetic fields. The control method of the piezoelectric tube is simple and reliable, and has extremely wide applicability. The axial deformation of the piezoelectric tube is utilized. , which can generate greater thrust; the driving force is generated by the piezoelectric effect, with nanometer-level positioning accuracy; the piezoelectric tube structure is adopted, and the capacitance of the piezoelectric tube structure is smaller than that of the piezoelectric sheet and the piezoelectric stack, which can move quickly and has a low starting voltage; the overall non-magnetic design can realize the rotation of the scanning probe microscope at any angle in the magnetic field. The rotatable scanning probe microscope is of great significance in the field of physical microscopic detection under extreme conditions; the tangential inertial motion or axial inertial motion mode of the two piezoelectric tubes can be interchanged, which increases the flexibility of the motor when used.

[0010] Furthermore, two first rectangular cracks (21) are symmetrically provided on the left and right sides of the first piezoelectric tube (2) and extending downward from the free end. The length of the first rectangular cracks (21) is greater than the diameter of the turntable (4) and less than the length of the first piezoelectric tube (2). Mounting holes (22) are symmetrically provided on the front and rear sides of the first piezoelectric tube (2).

[0011] Furthermore, a second rectangular crack (31) is provided on the left side of the second piezoelectric tube (3) starting from the free end downwards, and the length of the second rectangular crack (31) is greater than the diameter of the turntable (4) and less than the length of the second piezoelectric tube (3).

[0012] Furthermore, the outer edge of the rotating disk (4) passes through the second rectangular crack (31) on the left side of the second piezoelectric tube (3) and vertically contacts the pressure arm (8).

[0013] Furthermore, it also includes: a first base (7) and a second base (10); one end of the first piezoelectric tube (2) is fixed on the first base (7), the first base (7) is fixed on the base (1), one end of the second piezoelectric tube (3) is fixed on the second base (10), and the second base (10) is fixed on the base (1).

[0014] Furthermore, it also includes: a frustum cover (11), the upper end of the pressure arm (8) passes through the frustum cover (11) and is fixedly connected to the pressure arm fixing frame (9), the pressure arm fixing frame (9) is fixed on the frustum cover (11), the frustum cover (11) is fixed to the free end of the second piezoelectric tube (3), and the lower end of the pressure arm (8) is inserted into the center hole of the second base (10).

[0015] Furthermore, the upper portion of the turntable clamping frame (6) is a cylindrical cover (61) and the lower portion is a cylindrical body (62); the cylindrical cover (61) and the cylindrical body (62) are fixedly connected to form a whole; the left and right sides of the cylindrical body (62) are provided with openings (65) for installing the turntable (4); the front and rear sides of the cylindrical body (62) are provided with a front hole (63) and a rear hole (64) for installing the rotating shaft (5); the lower cylindrical body (62) of the turntable clamping frame (6) is inserted into the first piezoelectric tube (2), and the free end of the first piezoelectric tube (2) is fixedly connected to the cylindrical cover (61).

[0016] Furthermore, the center lines of the front hole (63) and the rear hole (64) opened on the cylindrical body (62) coincide with the center line of the mounting hole (22) opened on the first piezoelectric tube (2), the opening (65) opened on the cylindrical body (62) is aligned with the first rectangular crack (21) opened on the first piezoelectric tube (2), the turntable (4) passes through the first rectangular crack (21) and the opening (65) and is inserted into the cylindrical body (62), and the rotating shaft (5) passes through the mounting hole (22), the front hole (63), and the rear hole (64) to confine the turntable (4) on the cylindrical body (62).

[0017] Furthermore, the external electrodes of the first piezoelectric tube (2) and the second piezoelectric tube (3) are divided into two electrodes or four electrodes, and the front hole (63) and the rear hole (64) are both located on the electrode dividing line.

[0018] A rotary scanning probe microscope based on a rotary motor driven by inertia of the two piezoelectric tubes arranged side by side, wherein the mirror body of the scanning probe microscope is fixedly connected to a rotating shaft (5).

[0019] The advantages of the present invention are:

[0020] 1) The present invention has a compact structure. The first piezoelectric tube (2) and the second piezoelectric tube (3) are used vertically, which reduces the radial size of the entire motor, making it easier to use the motor in narrow spaces such as low temperatures and strong magnetic fields. The control method of the piezoelectric tube is simple and reliable, and has extremely wide applicability.

[0021] 2) The axial deformation of the piezoelectric tube is utilized to generate greater thrust;

[0022] 3) The driving force is generated by the piezoelectric effect, with nanometer-level positioning accuracy;

[0023] 4) It uses a piezoelectric tube structure. The capacitance of the piezoelectric tube structure is smaller than that of the piezoelectric sheet and the piezoelectric stack, and it can move quickly and has a low starting voltage.

[0024] 5) The overall non-magnetic design enables the scanning probe microscope to be rotated at any angle in a magnetic field. The rotatable scanning probe microscope is of great significance in the field of physical microscopic detection under extreme conditions;

[0025] 6) The tangential inertial motion or axial inertial motion modes of the two piezoelectric tubes can be interchanged, which increases the flexibility of the motor in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a front view of a rotary motor with dual piezoelectric tubes in parallel and inertial drive according to an embodiment of the present invention;

[0027] Figure 2 2. It is a front view of a rotary motor with dual piezoelectric tubes in parallel and inertially driven according to an embodiment of the present invention;

[0028] Figure 3 This is an exploded view of the first and second piezoelectric tubes of a dual piezoelectric tube side-by-side inertial driven rotary motor according to an embodiment of the present invention, separated from the components contained therein (excluding the base);

[0029] Figure 4 2. It is a schematic structural diagram of a turntable clamping frame of a rotary motor driven by inertia with two piezoelectric tubes arranged side by side according to an embodiment of the present invention;

[0030] Figure 5 1. It is a schematic structural diagram of a rotating disk and a rotating shaft of a rotating motor driven by inertia with two piezoelectric tubes arranged side by side according to an embodiment of the present invention;

[0031] Figure 6It is a structural schematic diagram of a pressure arm and a pressure arm fixing frame of a rotary motor driven by inertia with two piezoelectric tubes arranged in parallel according to an embodiment of the present invention. DETAILED DESCRIPTION

[0032] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0033] The technical solution of the present invention is further described below with reference to the accompanying drawings and specific embodiments:

[0034] Example 1

[0035] For ease of description, a three-dimensional xyz coordinate system is established, wherein the positive direction of the x-axis is forward, the positive direction of the y-axis is right, and the positive direction of the z-axis is upward.

[0036] like Figures 1 to 3 As shown, a rotary motor with dual piezoelectric tubes driven by inertia in parallel includes: a base 1, a first piezoelectric tube 2, a second piezoelectric tube 3, a turntable 4, a rotating shaft 5, a turntable clamping frame 6, a first base 7, a pressure arm 8, a pressure arm fixing frame 9, a second base 10, and a frustum cover 11.

[0037] like Figure 1 or Figure 2 As shown, the first piezoelectric tube 2 and the second piezoelectric tube 3 are fixed on the base 1 side by side along the y-axis direction; one end of the first piezoelectric tube 2 is fixed on the first base 7, the first base 7 is fixed on the base 1, and the other end of the first piezoelectric tube 2 is a free end; one end of the second piezoelectric tube 3 is fixed on the second base 10, the second base 10 is fixed on the base 1, and the other end of the second piezoelectric tube 3 is a free end.

[0038] like Figure 3 As shown, two first rectangular cracks 21 are symmetrically opened on the left and right sides of the first piezoelectric tube 2 starting from the free end downward, and the length of the first rectangular crack 21 is greater than the diameter of the turntable 4 and less than the length of the first piezoelectric tube 2. Mounting holes 22 are symmetrically opened on the front and back sides of the first piezoelectric tube 2; a second rectangular crack 31 is opened on the left side of the second piezoelectric tube 3 starting from the free end downward, and the length of the second rectangular crack 31 is greater than the diameter of the turntable 4 and less than the length of the second piezoelectric tube 3.

[0039] like Figure 4 The structure of the turntable clamping frame 6 is shown as follows. Figure 5The structure and matching relationship of the turntable 4 and the shaft 5 are shown; Figure 4 As shown, the upper part of the turntable clamping frame 6 is a cylindrical cover 61, and the lower part is a cylindrical body 62. The cylindrical cover 61 and the cylindrical body 62 are fixedly connected to form a whole. The left and right sides of the cylindrical body 62 are provided with openings 65 for installing the turntable 4, and the front and rear sides of the cylindrical body 62 are provided with a front hole 63 and a rear hole 64 for installing the rotating shaft 5; the lower cylindrical body 62 of the turntable clamping frame 6 is inserted into the first piezoelectric tube 2, and the free end of the first piezoelectric tube 2 is fixedly connected to the cylindrical cover 61. The center line of the front hole 63 and the rear hole 64 opened on the cylindrical body 62 is aligned with the center line of the opening on the first piezoelectric tube 2. The center lines of the mounting holes 22 are coincident, the outer electrodes of the first piezoelectric tube 2 and the second piezoelectric tube 3 are divided into two electrodes or four electrodes, and the front hole 63 and the rear hole 64 are located on the electrode dividing line; the opening 65 opened on the cylindrical body 62 is aligned with the first rectangular crack 21 opened on the first piezoelectric tube 2, the turntable 4 is inserted into the cylindrical body 62 through the first rectangular crack 21 and the opening 65, the rotating shaft 5 passes through the mounting hole 22, the front hole 63, and the rear hole 64 to confine the turntable 4 on the cylindrical body 62, and the turntable 4 drives the rotating shaft 5 to rotate coaxially in the yz plane.

[0040] like Figure 6 The structure of the pressing arm 8 and the pressing arm fixing frame 9 is shown. The pressing arm 8 adopts a spring sheet. Figure 3 and Figure 6 As shown, the spring sheet is arranged inside the second piezoelectric tube 3, and the upper end of the spring sheet passes through the conical cover 11 and is fixedly connected to the pressure arm fixing frame 9. The pressure arm fixing frame 9 is fixed on the conical cover 11, and the conical cover 11 is fixed to the free end of the second piezoelectric tube 3. The lower end of the spring sheet is inserted into the center hole of the second base 10; the outer edge of the turntable 4 passes through the second rectangular crack 31 on the left side of the second piezoelectric tube 3 and elastically offsets the wide surface of the spring sheet, and the yz plane of the turntable 4 is perpendicular to the wide surface of the spring sheet; when the electrode of the second piezoelectric tube 3 is energized, the free end of the second piezoelectric tube 3 performs axial inertial motion along the z-axis, thereby driving the spring sheet to perform axial inertial motion along the z-axis, and the spring sheet then drives the turntable 4 to perform axial inertial motion, thereby driving the turntable 4 to rotate in the yz plane.

[0041] Working principle of a rotary motor driven by inertia using two piezoelectric tubes in parallel

[0042] 1. The situation where only one piezoelectric tube is used to drive the turntable 4 to rotate is as follows:

[0043] 1. Power the outer electrode of the second piezoelectric tube 3 to control the second piezoelectric tube 3 to perform axial inertial motion.

[0044] (1) The free end of the second piezoelectric tube 3 first slowly extends upward, driving the pressure arm 8 to move slowly upward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly counterclockwise in the yz plane. Then, the free end of the second piezoelectric tube 3 contracts rapidly downward, driving the pressure arm 8 to move rapidly downward, thereby driving the turntable 4 to rotate rapidly clockwise in the yz plane.

[0045] (2) The free end of the second piezoelectric tube 3 first contracts slowly downward, driving the pressure arm 8 to move slowly downward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly clockwise in the yz plane. Then, the free end of the second piezoelectric tube 3 extends rapidly upward, driving the pressure arm 8 to move rapidly upward, thereby driving the turntable 4 to rotate rapidly counterclockwise in the yz plane.

[0046] 2. Power the outer electrode of the first piezoelectric tube 2 to control the first piezoelectric tube 2 to perform axial inertial motion.

[0047] (1) The free end of the first piezoelectric tube 2 first slowly extends upward, thereby driving the turntable 4 to rotate slowly clockwise in the yz plane. Then the free end of the first piezoelectric tube 2 quickly contracts downward, driving the turntable 4 to move downward rapidly. Since the turntable 4 and the pressure arm 8 are in contact, the turntable 4 is driven to rotate rapidly counterclockwise in the yz plane.

[0048] (2) The free end of the first piezoelectric tube 2 first contracts slowly downward, thereby driving the turntable 4 to rotate slowly counterclockwise in the yz plane. Then the free end of the first piezoelectric tube 2 extends rapidly upward, driving the turntable 4 to move rapidly upward. Since the turntable 4 is in contact with the pressure arm 8, the turntable 4 is driven to rotate rapidly clockwise in the yz plane.

[0049] 2. The situation of using two piezoelectric tubes to drive the turntable 4 to rotate is as follows:

[0050] 1. Power the outer electrodes of the first piezoelectric tube 2 and the second piezoelectric tube 3 respectively to control the first piezoelectric tube 2 to perform tangential inertial motion and the second piezoelectric tube 3 to perform axial inertial motion.

[0051] (1) The free end of the first piezoelectric tube 2 first bends slowly to the right, thereby driving the turntable 4 to move slowly to the right (movement distance is in the micron order), increasing the dynamic friction between the turntable 4 and the pressure arm 8. At the same time, the free end of the second piezoelectric tube 3 first extends slowly upward, driving the pressure arm 8 to move slowly upward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly counterclockwise in the yz plane; then the free end of the second piezoelectric tube 3 contracts rapidly downward, driving the pressure arm 8 to move rapidly downward, thereby driving the turntable 4 to rotate rapidly clockwise in the yz plane. After the turntable 4 rotates rapidly clockwise, the free end of the first piezoelectric tube 2 immediately bends rapidly to the left, thereby driving the turntable 4 to move rapidly to the left, reducing the dynamic friction between the turntable 4 and the pressure arm 8.

[0052] (2) The free end of the first piezoelectric tube 2 first bends slowly to the right, thereby driving the turntable 4 to move slowly to the right (movement distance is in the micron order), increasing the dynamic friction between the turntable 4 and the pressure arm 8. At the same time, the free end of the second piezoelectric tube 3 first shortens slowly downward, driving the pressure arm 8 to move slowly downward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly clockwise in the yz plane. Then the free end of the second piezoelectric tube 3 extends rapidly upward, driving the pressure arm 8 to move rapidly upward, thereby driving the turntable 4 to rotate rapidly counterclockwise in the yz plane. After the turntable 4 rotates rapidly counterclockwise, the free end of the first piezoelectric tube 2 immediately bends rapidly to the left, thereby driving the turntable 4 to move rapidly to the left, reducing the dynamic friction between the turntable 4 and the pressure arm 8.

[0053] 2. Power the outer electrodes of the first piezoelectric tube 2 and the second piezoelectric tube 3 respectively to control the first piezoelectric tube 2 to perform axial inertial motion and the second piezoelectric tube 3 to perform tangential inertial motion.

[0054] (1) The free end of the second piezoelectric tube 3 first slowly bends to the left, thereby driving the pressure arm 8 to move slowly to the left (movement distance is in the micron order), increasing the dynamic friction between the turntable 4 and the pressure arm 8. At the same time, the free end of the first piezoelectric tube 2 first slowly extends upward, driving the turntable 4 to move slowly upward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly clockwise in the yz plane. Then the free end of the first piezoelectric tube 2 quickly contracts downward, driving the turntable 4 to move downward rapidly, thereby driving the turntable 4 to rotate rapidly counterclockwise in the yz plane. After the turntable 4 rotates rapidly counterclockwise, the free end of the second piezoelectric tube 3 immediately bends to the right, thereby driving the pressure arm 8 to move rapidly to the right, reducing the dynamic friction between the turntable 4 and the pressure arm 8.

[0055] (2) The free end of the second piezoelectric tube 3 first bends slowly to the left, thereby driving the pressure arm 8 to move slowly to the left (movement distance is in the micron order), increasing the dynamic friction between the turntable 4 and the pressure arm 8. At the same time, the free end of the first piezoelectric tube 2 first shortens slowly downward, driving the turntable 4 to move slowly downward. Since the turntable 4 and the pressure arm 8 are in contact with each other, the turntable 4 is driven to rotate slowly counterclockwise in the yz plane. Then the free end of the first piezoelectric tube 2 extends rapidly upward, driving the turntable 4 to move rapidly upward, thereby driving the turntable 4 to rotate rapidly clockwise in the yz plane. After the turntable 4 rotates rapidly clockwise, the free end of the second piezoelectric tube 3 immediately bends rapidly to the right, thereby driving the pressure arm 8 to move rapidly to the right, reducing the dynamic friction between the turntable 4 and the pressure arm 8.

[0056] Example 2

[0057] This embodiment provides a scanning probe microscope. The scanning probe microscope of this embodiment is a piezoelectric scanning probe microscope in which a scanning probe is connected to the end of the rotating shaft 5 of the rotating motor driven by the inertia of the dual piezoelectric tubes in parallel in embodiment 1. When the rotating shaft 5 rotates, it drives the scanning probe to rotate together.

[0058] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A rotary motor with dual piezoelectric tubes in parallel and inertial drive, characterized in that: include: A base (1), a first piezoelectric tube (2), a second piezoelectric tube (3), a turntable (4), a rotating shaft (5), a turntable clamping frame (6), a pressure arm (8), and a pressure arm fixing frame (9); one end of the first piezoelectric tube (2) and the second piezoelectric tube (3) are fixed side by side on the base (1), and the other ends of the first piezoelectric tube (2) and the second piezoelectric tube (3) are free ends; the upper part of the turntable clamping frame (6) is coaxially fixed to the free end of the first piezoelectric tube (2), and the turntable clamping frame The lower part of (6) clamps the turntable (4) and the rotating shaft (5) inside the first piezoelectric tube (2), the turntable (4) drives the rotating shaft (5) to rotate coaxially, the outer edge of the turntable (4) abuts against the pressure arm (8), the pressure arm (8) is vertically inserted into the second piezoelectric tube (3), one end of the pressure arm (8) is fixedly connected to the pressure arm fixing frame (9), the other end of the pressure arm (8) is movably inserted into the base (1), and the pressure arm fixing frame (9) is fixed to the free end of the second piezoelectric tube (3).

2. The dual piezoelectric tube inertia-driven rotary motor according to claim 1, characterized in that: Two first rectangular cracks (21) are symmetrically provided on the left and right sides of the first piezoelectric tube (2) and downward from the free end. The length of the first rectangular cracks (21) is greater than the diameter of the turntable (4) and less than the length of the first piezoelectric tube (2). Mounting holes (22) are symmetrically provided on the front and rear sides of the first piezoelectric tube (2).

3. The dual piezoelectric tube inertia-driven rotary motor according to claim 2, characterized in that: A second rectangular crack (31) is provided on the left side of the second piezoelectric tube (3) and extends downward from the free end. The length of the second rectangular crack (31) is greater than the diameter of the turntable (4) and less than the length of the second piezoelectric tube (3).

4. The dual piezoelectric tube inertia-driven rotary motor according to claim 3, characterized in that: The outer edge of the rotating disk (4) passes through the second rectangular crack (31) on the left side of the second piezoelectric tube (3) and vertically contacts the pressure arm (8).

5. The dual piezoelectric tube inertia-driven rotary motor according to claim 1, characterized in that: It also includes: a first base (7) and a second base (10); one end of the first piezoelectric tube (2) is fixed on the first base (7), the first base (7) is fixed on the base (1), one end of the second piezoelectric tube (3) is fixed on the second base (10), and the second base (10) is fixed on the base (1).

6. The dual piezoelectric tube inertia-driven rotary motor according to claim 5, characterized in that: Also includes: The upper end of the pressure arm (8) passes through the truncated cone cover (11) and is fixedly connected to the pressure arm fixing frame (9), the pressure arm fixing frame (9) is fixed on the truncated cone cover (11), the truncated cone cover (11) is fixed to the free end of the second piezoelectric tube (3), and the lower end of the pressure arm (8) is inserted into the center hole of the second base (10).

7. The dual piezoelectric tube inertia-driven rotary motor according to claim 1, characterized in that: The upper part of the turntable clamping frame (6) is a cylindrical cover (61) and the lower part is a cylindrical body (62). The cylindrical cover (61) and the cylindrical body (62) are fixedly connected to form a whole. The left and right sides of the cylindrical body (62) are provided with openings (65) for installing the turntable (4), and the front and rear sides of the cylindrical body (62) are provided with a front hole (63) and a rear hole (64) for installing the rotating shaft (5). The lower cylindrical body (62) of the turntable clamping frame (6) is inserted into the first piezoelectric tube (2), and the free end of the first piezoelectric tube (2) is fixedly connected to the cylindrical cover (61).

8. The dual piezoelectric tube inertia-driven rotary motor according to claim 7, characterized in that: The center lines of the front hole (63) and the rear hole (64) opened on the cylindrical body (62) coincide with the center line of the mounting hole (22) opened on the first piezoelectric tube (2); the opening (65) opened on the cylindrical body (62) is aligned with the first rectangular crack (21) opened on the first piezoelectric tube (2); the turntable (4) passes through the first rectangular crack (21) and the opening (65) and is inserted into the cylindrical body (62); the rotating shaft (5) passes through the mounting hole (22), the front hole (63), and the rear hole (64) to confine the turntable (4) on the cylindrical body (62).

9. The dual piezoelectric tube inertia-driven rotary motor according to claim 8, characterized in that: The external electrodes of the first piezoelectric tube (2) and the second piezoelectric tube (3) are divided into two electrodes or four electrodes, and the front hole (63) and the rear hole (64) are both located on the electrode dividing line.

10. A rotary scanning probe microscope based on a rotary motor driven by inertia using two piezoelectric tubes arranged in parallel according to any one of claims 1 to 9, characterized in that: The mirror body of the scanning probe microscope is fixedly connected to the rotating shaft (5).

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