Jig platform, flexible display assembly transfer method, and peel transfer system

Abstract

The application discloses a jig platform, a flexible display component transfer method and a peeling transfer system. The jig platform comprises a jig platform body and a one-way valve. The jig platform body has a first surface and a second surface arranged oppositely. The first surface is used for placing the flexible display component. The jig platform body is provided with at least one gas channel. The gas channel comprises a first cavity and a second cavity connected with each other. The first cavity is communicated with the first surface. The one-way valve is arranged between the first cavity and the second cavity. When the vacuum degree of the second cavity is increased, the one-way valve is opened, and the jig platform body is used for adsorbing the flexible display component. When the vacuum degree of the second cavity is reduced, the one-way valve is closed, the negative pressure in the first cavity is kept, and the jig platform continues to adsorb the flexible display component. The application can ensure that the flexible display device and the hard substrate do not fall off and relatively displace in the carrying process, so that the flexible display component is smoothly transferred.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display, in particular to a jig platform, a flexible display assembly transfer method and a peeling transfer system. BACKGROUND

[0002] In recent years, flexible display (Flexible Display) and foldable display (Foldable Display) technologies have developed rapidly, and are the focus of domestic and foreign universities and research institutes, and are also the key technologies that display enterprises, terminal manufacturers and the like strive to deploy. At present, flexible display products mainly adopt a S2S (sheet to sheet) production process, use a hard substrate such as glass as a carrier, and are prepared by methods such as attaching and taking down a flexible substrate or thinning glass. Among them, the attaching and taking down method is to attach a flexible substrate to a hard substrate to prepare a flexible display device, and then peel off the hard substrate to take out the flexible display device. This method does not affect the manufacturing precision of the display device, and the manufacturing equipment and process are similar to those of traditional liquid crystal displays, and do not need to be adjusted too much, so it is closer to mass production application in the short term. The other way, the glass thinning method has very high requirements for the thinning process, and the production yield needs to be improved.

[0003] Among them, the attaching and taking down process often uses a laser lift-off technology (Laser Lift-Off, LLO), that is, a laser is directly applied to the interface between the flexible substrate and the hard substrate, the binding force between the flexible substrate and the hard substrate is destroyed by high-energy laser, so that the hard substrate and the flexible display device are separated. However, since the contact interface between the flexible substrate and the hard substrate is carbonized after laser scanning, many small particles are generated, in order to maintain the cleanliness of the LLO working cavity, the hard substrate cannot be peeled off at this time. However, when the separated flexible display device and hard substrate are transferred, the hard substrate and the flexible display device are prone to falling off or uncontrollable relative displacement, resulting in a decrease in product yield. SUMMARY

[0004] The present application provides a jig platform, a flexible display assembly transfer method and a peeling transfer system to solve the technical problem that when the hard substrate and the flexible display device of the flexible display assembly that has been separated are transferred, the hard substrate and the flexible display device are prone to falling off or uncontrollable relative displacement, resulting in a decrease in product yield.

[0005] The present application provides a jig platform, which comprises a jig platform body, the jig platform body has a first surface and a second surface arranged oppositely, the first surface is used for placing a flexible display assembly, at least one gas channel is arranged on the jig platform body, the gas channel comprises a first cavity and a second cavity connected with each other, the first cavity is communicated with the first surface; and

[0006] a one-way valve disposed between the first cavity and the second cavity;

[0007] wherein, when the vacuum degree of the second cavity is increased, the one-way valve is opened, the first cavity and the second cavity are communicated, and the jig platform is used to adsorb the flexible display assembly;

[0008] when the vacuum degree of the second cavity is decreased, the one-way valve is closed, the first cavity maintains negative pressure, and the jig platform continues to adsorb the flexible display assembly.

[0009] Optionally, in some embodiments of the present application, the first cavity and the second cavity are coaxially disposed, and the second cavity is communicated with the second surface.

[0010] Optionally, in some embodiments of the present application, the second cavity is located in the jig platform, and the jig platform is provided with at least one air outlet communicated with the second cavity, and the air outlet is used to exhaust air from the second cavity.

[0011] Optionally, in some embodiments of the present application, a plurality of gas channels are provided, the plurality of gas channels are arrayed, and the plurality of gas channels have the same aperture.

[0012] Correspondingly, the present application also provides a transfer method of a flexible display assembly, which comprises:

[0013] placing a flexible display assembly on a first surface of the jig platform, the flexible display assembly comprising a flexible display device and a rigid substrate which are stacked, and the flexible display device faces the first surface;

[0014] adsorbing the flexible display assembly by using the jig platform;

[0015] performing a pre-peeling treatment on the rigid substrate and the flexible display device;

[0016] transferring the jig platform adsorbed with the flexible display assembly.

[0017] Optionally, in some embodiments of the present application, the step of adsorbing the flexible display assembly by using the jig platform specifically comprises:

[0018] increasing the vacuum degree of the second cavity to open the one-way valve and make the jig platform adsorb the flexible display assembly;

[0019] Optionally, in some embodiments of the present application, after the step of separating the rigid substrate from the flexible display device by using the first peeling platform, the method further comprises:

[0020] The vacuum level of the second cavity is reduced, the one-way valve is closed, the first cavity is kept under negative pressure, the first stripping platform is separated from the fixture platform, and the fixture platform remains attached to the flexible display component.

[0021] Optionally, in some embodiments of this application, when the vacuum degree of the second cavity is greater than or equal to the first vacuum degree, the one-way valve opens and is used to control gas to flow from the first cavity into the second cavity;

[0022] When the vacuum level of the second cavity is less than the first vacuum level, the one-way valve closes.

[0023] The first vacuum degree is 65 kPa to 75 kPa.

[0024] Optionally, in some embodiments of this application, the fixture platform is provided with an air extraction port communicating with the second cavity, and the step of using the fixture platform to adsorb the flexible display component specifically includes:

[0025] The gas channel is evacuated through the air extraction port to increase the vacuum level of the second cavity, thereby opening the one-way valve and allowing the fixture platform to adsorb the flexible display component.

[0026] Air is injected into the gas channel through the air extraction port to reduce the vacuum level of the second cavity. The one-way valve is closed, the first cavity is kept under negative pressure, and the fixture platform is kept adsorbed to the flexible display component.

[0027] This application also provides a peeling and transfer system for a flexible display component, comprising:

[0028] The fixture platform described in any of the above claims is used to place a flexible display component, the flexible display component comprising a flexible display device and a rigid substrate stacked together, the flexible display device facing the first surface;

[0029] A first peeling platform is used to place the fixture platform, and the second surface of the fixture platform is in contact with the first peeling platform;

[0030] A laser scanning component is used to perform laser scanning processing on the interface between the flexible display device and the rigid substrate;

[0031] The second peeling platform is used to carry the fixture platform and the flexible display component transferred by the first peeling platform, and is also used to perform mechanical peeling on the flexible display component after laser scanning to separate the flexible display device from the rigid substrate.

[0032] This application provides a jig platform, a method for transferring flexible display components, and a peeling and transfer system. The jig platform can be used to adsorb flexible display components without the need for an adhesive layer or process protective film. Since the jig platform is recyclable, production costs can be reduced. Simultaneously, after the rigid substrate and flexible display device in the flexible display component are separated, the jig platform is used to transfer the flexible display component, still adhered to it, from a first peeling platform to a second peeling platform. Thus, the jig platform, acting as a carrier for the flexible display component, ensures that the flexible display device and rigid substrate do not detach or shift relative to each other during transport, thereby smoothly transferring the flexible display component. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a first structural schematic diagram of the fixture platform and flexible display component provided in this application;

[0035] Figure 2 yes Figure 1 A top view of the jig platform shown;

[0036] Figure 3 yes Figure 2 The diagram shows the first cross-sectional structure of the fixture platform along XX'.

[0037] Figure 4 This is a schematic diagram of the structure of the flexible display component provided in this application;

[0038] Figure 5 This is a first structural schematic diagram of the fixture platform adsorbing the flexible display component provided in this application;

[0039] Figure 6 This is a schematic diagram of the second structure of the fixture platform adsorbing the flexible display component provided in this application;

[0040] Figure 7 This is a schematic diagram of the third structure of the fixture platform for adsorbing flexible display components provided in this application.

[0041] Figure 8 yes Figure 2 The diagram shows the second cross-sectional structure of the fixture platform along XX'.

[0042] Figure 9 This is a second structural schematic diagram of the fixture platform and flexible display component provided in this application;

[0043] Figure 10 is a first flowchart of a transfer method of a flexible display assembly provided by the present application;

[0044] Figure 11 is a structural diagram of a peeling transfer system of a flexible display assembly provided by the present application;

[0045] Figure 12 is a second flowchart of a transfer method of a flexible display assembly provided by the present application;

[0046] Figure 13 is a structural diagram of a first peeling platform and a jig platform provided by the present application;

[0047] Figure 14 is a cross-sectional structural diagram of a first peeling platform and a jig platform provided by the present application;

[0048] Figure 15 is a structural diagram of a first peeling platform, a jig platform, and a flexible display assembly provided by the present application;

[0049] Figure 16 is a first cross-sectional structural diagram of a first peeling platform, a jig platform, and a flexible display assembly provided by the present application;

[0050] Figure 17 is a second cross-sectional structural diagram of a first peeling platform, a jig platform, and a flexible display assembly provided by the present application;

[0051] Figure 18 is a structural diagram of a jig platform, a flexible display assembly, and a second peeling platform provided by the present application;

[0052] Figure 19 is a third cross-sectional structural diagram of a first peeling platform, a jig platform, and a flexible display assembly provided by the present application.

[0053] BRIEF DESCRIPTION OF DRAWINGS

[0054] 10: jig platform; 10A: first surface; 10B: second surface; 20: flexible display assembly; 110: jig platform body; 11: gas passage; 111: first cavity; 112: second cavity; 12: one-way valve; 21: rigid substrate; 22: flexible display device; 13: air outlet; 14: first protrusion; 15: second protrusion; 30: first peeling platform; 31: vacuum passage; 32: communication hole; 33: telescopic stage; 40: second peeling platform; 50: laser scanning assembly. DETAILED DESCRIPTION

[0055] The technical solutions in the embodiments of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application. In addition, it should be understood that the specific implementation described herein is only used to illustrate and explain the present application, and is not used to limit the present application. In the present application, the orientation words such as "upper" and "lower" generally refer to the upper and lower in the actual use or working state of the device, and specifically refer to the direction of the drawing surface in the drawings; and "inner" and "outer" refer to the contour of the device.

[0056] The present application provides a jig platform, a transfer method of a flexible display assembly and a peel transfer system. The following are described in detail respectively. It should be noted that the description order of the following embodiments is not used to limit the preferred order of the embodiments.

[0057] Please refer to Figure 1 , Figure 2 and Figure 3 , Figure 1 is a first structural schematic diagram of the jig platform and the flexible display assembly provided by the present application, Figure 2 is a top view schematic diagram of the jig platform shown in Figure 1 , Figure 3 is a first cross-sectional structural schematic diagram of the jig platform along XX' shown in Figure 2 .

[0058] In the present application, the jig platform 10 includes a jig platform body 110 and a one-way valve 12. The jig platform body 110 has a first surface 10A and a second surface 10B arranged oppositely. The first surface 10A is used to place the flexible display assembly 20. The jig platform body 110 is provided with at least one gas channel 11. The gas channel 11 includes a first cavity 111 and a second cavity 112 connected. The first cavity 111 is in communication with the first surface 10A. The one-way valve 12 is arranged between the first cavity 111 and the second cavity 112. When the vacuum degree of the second cavity 112 is increased, the one-way valve 12 is opened, the first cavity 111 and the second cavity 112 are in communication, and the jig platform 10 is used to adsorb the flexible display assembly 20. Then, the vacuum degree of the second cavity 112 is reduced, the one-way valve 12 is closed, the negative pressure in the first cavity 111 is maintained, and the jig platform 10 continues to adsorb the flexible display assembly 20.

[0059] It can be understood that the normal pressure refers to one atmosphere, that is, the gas pressure generated by the atmosphere in our daily life. A standard atmosphere is 101.325 kilopascals. Negative pressure refers to a gas state lower than the atmospheric pressure, that is, the so-called "vacuum". The vacuum degree refers to the degree of thinness of the gas in a space in a vacuum state. If the pressure in the measured device is lower than the atmospheric pressure, the pressure measurement needs a vacuum gauge. The vacuum degree value is the value indicating that the actual value of the system pressure is lower than the atmospheric pressure, which is usually represented by a negative number.

[0060] The jig platform 10 can be made of any one of bakelite, acrylic, aluminum alloy, stainless steel, etc., and the present application does not make specific limitations thereto.

[0061] The first surface 10A can be the upper surface of the jig platform body 110, and the second surface 10B can be the lower surface of the jig platform body 110. Of course, the first surface 10A can also be the lower surface of the jig platform body 110, and the second surface 10B can be the upper surface of the jig platform body 110. The present application defaults that the first surface 10A is the upper surface of the jig platform body 110 and the second surface 10B is the lower surface of the jig platform body 110 without special instructions.

[0062] In actual application, the second cavity 112 can be subjected to vacuumizing operation by the vacuumizing device to reduce the gas density in the second cavity 112, thereby improving the vacuum degree of the second cavity 112. When the vacuum degree of the second cavity 112 reaches a stable value, the power of the vacuumizing device can be reduced to reduce power loss.

[0063] In actual application, the vacuumizing operation can be stopped to make the second cavity 112 communicate with the outside world to reduce the vacuum degree of the second cavity 112. Or the vacuumizing operation is stopped and air is injected into the second cavity 112 to improve the speed of reducing the vacuum degree.

[0064] The one-way valve 12 is used to control the gas from the first cavity 111 to the second cavity 112. The one-way valve 12 is used to prevent the gas from the second cavity 112 to the first cavity 111 in the reverse direction.

[0065] Specifically, the one-way valve 12 is also called check valve or non-return valve. The one-way valve 12 can be used in a pneumatic system to prevent the reverse flow of compressed air. For example, in the gas passage 11 of the present application, due to the one-way valve 12, the gas can only flow from the first cavity 111 to the second cavity 112, but cannot flow from the second cavity 112 to the first cavity 111. The one-way valve 12 has two types of straight-through and right-angle. The straight-through one-way valve 12 can be installed on the inner side wall of the gas passage 11 by screw connection. The right-angle one-way valve 12 has three forms of screw connection, plate connection and flange connection. In addition, the one-way valve 12 is a device structure known to those skilled in the art, which will not be described here. It should be noted that the one-way valve 12 shown in the drawings of the present application is only a conceptual schematic diagram and cannot be understood as a limitation of the present application.

[0066] Wherein, please refer to Figure 4 , Figure 4 is a structural schematic diagram of the flexible display assembly provided by the present application. The flexible display assembly 20 comprises a hard substrate 21 and a flexible display device 22.

[0067] Specifically, the hard substrate 21 can be a glass substrate, but the present application is not limited thereto. For example, the hard substrate 21 can also be a hard resin substrate, etc.

[0068] Specifically, the flexible display device 22 comprises, but is not limited to, a flexible substrate, an array layer, a light-emitting layer, an encapsulation layer and a polarizer (not marked in the figure) which are sequentially laminated on the hard substrate 21. Generally, the flexible substrate adopts organic materials such as polyimide, polyethylene, polypropylene, polystyrene, polyethylene terephthalate or polyethylene naphthalate, etc. to improve the flexibility of the flexible display device 22. It should be noted that the specific film layer structure of the flexible display device 22 is not shown in the drawings. However, the structure and specific arrangement of the array layer, the light-emitting layer, the encapsulation layer and the polarizer are all common technical means in the art, which will not be described here.

[0069] It can be understood that, since the rigidity of the flexible display device 22 is weak, forming the flexible display device 22 on the hard substrate 21 can reduce the difficulty of the process. However, after the flexible display device 22 is made, the hard substrate 21 needs to be peeled off from the flexible display device 22 to ensure the flexibility of the product. However, since many small particles are generated by carbonization of the contact interface between the flexible substrate and the hard substrate 21 after laser scanning, in order to maintain the cleanliness of the LLO working cavity, the separated flexible display device 22 and the hard substrate 21 need to be transferred, and it is ensured that the hard substrate 21 and the flexible display device 22 will not fall off or have uncontrollable relative displacement during the transfer process.

[0070] In this regard, the present application can use the jig platform 10 to adsorb the flexible display assembly 20 without setting a bonding layer or a process protection film. Since the jig platform 10 can be recycled, the production cost can be reduced. After the rigid substrate 21 and the flexible display device 22 in the flexible display assembly 20 are separated by laser, the jig platform 10 continues to adsorb the flexible display assembly 20 as a carrier of the flexible display assembly 20. In the transfer process, the flexible display assembly 20 is transferred by the transfer jig platform 10, so that mechanical actions such as clamping can not damage the flexible display assembly 20. At the same time, it can ensure that the rigid substrate 21 and the flexible display device 22 do not fall off and relatively displace during the carrying process, so that the flexible display assembly 20 can be smoothly transferred.

[0071] Please refer to Figures 5-7 , Figure 5 FIG. 1 is a first structural schematic diagram of a jig platform adsorbing a flexible display assembly provided by the present application; Figure 6 FIG. 2 is a second structural schematic diagram of a jig platform adsorbing a flexible display assembly provided by the present application; Figure 7 FIG. 3 is a third structural schematic diagram of a jig platform adsorbing a flexible display assembly provided by the present application.

[0072] It can be understood that the second cavity 112 is subjected to a vacuum operation by a vacuum system or the like, so as to improve the vacuum degree of the second cavity 112. At this time, the gas in the second cavity 112 flows from the one-way valve 12 to the second cavity 112, and flows out of the second cavity 112, as shown in FIG. 4. Figure 5

[0073] When the vacuum degree of the second cavity 112 reaches a certain value, the pressure generated by the gas in the second cavity 112 causes the one-way valve 12 to open. The first cavity 111 and the second cavity 112 are communicated. The gas in the first cavity 111 begins to flow to the second cavity 112, and the vacuum degree of the first cavity 111 is improved, as shown in FIG. 5. At this time, a negative pressure is generated in the first cavity 111. The negative pressure causes the jig platform 10 to adsorb the flexible display assembly 20 flatly and tightly. Figure 6

[0074] Further, by injecting air into the second cavity 112, the vacuum degree of the second cavity 112 is reduced, and the pressure generated by the gas in the second cavity 112 is reduced, so that the one-way valve 12 is closed, as shown in FIG. 6. At this time, the first cavity 111 still maintains a certain vacuum degree, that is, the first cavity 111 still maintains a negative pressure, and the jig platform 10 continues to adsorb the flexible display assembly 20. Figure 7

[0075] ​​​It should be noted that the vacuum degree of the first cavity 111 and the second cavity 112 depends on the structural precision of the jig platform 10. Therefore, the vacuum degree of the first cavity 111 and the second cavity 112 can be tested by using a vacuum gauge or the like according to actual conditions, and the relationship between the vacuum degree and the opening of the one-way valve 12 is determined.

[0076] For example, in an embodiment of the present application, when the vacuum degree of the second cavity 112 reaches-70 kPa measured by the vacuum gauge, the one-way valve 12 is opened. The first cavity 111 and the second cavity 112 are communicated. The vacuum degree of the first cavity 111 begins to increase. It can be understood that-70 kPa is the vacuum pressure in the second cavity 112 measured by the vacuum gauge, which means that the pressure in the second cavity 112 is lower than the corresponding atmospheric pressure value, that is, the negative value of the vacuum degree. When the vacuum degree of the first cavity 111 continues to increase, the vacuum pressure in the second cavity 112 reaches-80 kPa, the vacuum degree of the first cavity 111 and the second cavity 112 remains stable, and the jig platform 10 can adsorb the flexible display assembly 20 flat and tightly. Then, the vacuum degree of the second cavity 112 is reduced, and when the vacuum pressure of the second cavity 112 is less than-70 kPa, the one-way valve 12 is closed. At this time, the first cavity 111 still maintains negative pressure, and there is a certain vacuum degree between the jig platform 10 and the flexible display assembly 20, so that the jig platform 10 continues to adsorb the flexible display assembly 20.

[0077] Please continue to refer to Figure 1 and Figure 2 In the present application, a plurality of gas channels 11 are provided. The plurality of gas channels 11 are arranged in an array. Specifically, the gas channels 11 can be provided as 2, 3, 6, 10, 20, 30, etc. The present application provides a plurality of arrayed gas channels 11, which can improve the adsorption uniformity of the jig platform 10, so that the flexible display assembly 20 is flatly attached to the first surface 10A.

[0078] Among them, the distance between adjacent gas channels 11 can be set according to the adsorption capacity of the gas channels 11 to the flexible display assembly 20. It can be understood that the smaller the distance between adjacent gas channels 11, the greater the distribution density of the gas channels 11, and the stronger the adsorption capacity to the flexible display assembly 20.

[0079] Among them, the openings of the plurality of gas channels 11 can be square, circular, etc. The size of the openings of the plurality of gas channels 11 can be set according to the size of the jig platform body 110, etc., which is not limited in the present application. Further, the apertures of the plurality of gas channels 11 are the same. This setting can further improve the adsorption uniformity of the jig platform 10, so that the flexible display assembly 20 is flatly attached to the first surface 10A.

[0080] Of course, in other embodiments of the present application, the gas passage 11 can also be provided as one. When the gas passage 11 is one, in order to improve the adsorption capacity of the jig platform 10, the aperture of the gas passage 11 can be increased.

[0081] Please continue to refer to Figure 3 In some embodiments of the present application, the first cavity 111 and the second cavity 112 are coaxially arranged, and the second cavity 112 is in communication with the second surface 10B. That is, the first cavity 111 and the second cavity 112 pass through the jig platform body 110. This arrangement is simple, and the first cavity 111 and the second cavity 112 can be integrally formed, simplifying the manufacturing process.

[0082] In other embodiments of the present application, please refer to Figure 8 , Figure 8 is Figure 2 the second cross-sectional structure of the jig platform along XX' is shown. Different from Figure 3 , in the present embodiment, the second cavity 112 is located in the jig platform body 110. The jig platform body 110 is provided with at least one gas suction port 13. The gas suction port 13 is in communication with the second cavity 112. The gas suction port 13 is used for suction of the second cavity 112, so as to improve the vacuum degree of the second cavity 112.

[0083] Among them, the gas suction port 13 can be provided as one, or can be provided as multiple, which can be set according to the size of the jig platform 10, so as to quickly improve the vacuum degree of the second cavity 112.

[0084] In the present embodiment, the second cavity 112 is arranged in the jig platform body 110, and at least one gas suction port 13 is arranged on the jig platform body 110. The vacuum degree of the second cavity 112 can be conveniently and quickly improved through the gas suction port 13. At the same time, compared with the structure that the second cavity 112 is in communication with the second surface 10B, the present embodiment improves the sealing property of multiple second cavities 112 during vacuumizing, and reduces the difficulty of improving the vacuum degree.

[0085] Please refer to Figure 9 , Figure 9 is a second structure diagram of the jig platform and the flexible display assembly provided by the present application. Different from Figure 1 , in the present embodiment, the outer side wall of the jig platform body 110 is symmetrically provided with a first protruding part 14 and a second protruding part 15. The first protruding part 14 and the second protruding part 15 are used for transferring the jig platform 10.

[0086] Among them, the shape and size of the first protruding part 14 and the second protruding part 15 are not limited in the present application. The first protruding part 14 can be provided as one, or can be provided as multiple. The second protruding part 15 can be provided as one, or can be provided as multiple.

[0087] The first protruding portion 14 and the second protruding portion 15 can be gripped by a transfer device such as a mechanical arm to achieve the transfer of the jig platform 10. Meanwhile, since the first protruding portion 14 and the second protruding portion 15 are symmetrically arranged on the outer sidewall of the jig platform 10, the first protruding portion 14 and the second protruding portion 15 play a role of bearing the jig platform 10 and the flexible display assembly 20 when the jig platform 10 is transferred, so that the transfer process is more convenient.

[0088] The present application also provides a transfer method of a flexible display assembly. Please refer to Figure 10 , Figure 10 is a first flowchart of the transfer method of the flexible display assembly provided by the present application. The transfer method of the flexible display assembly specifically includes the following steps:

[0089] 101. Place the flexible display assembly on the first surface of the jig platform, the flexible display assembly including a flexible display device and a rigid substrate arranged in a stack, the flexible display device facing the first surface.

[0090] 102. Use the jig platform to adsorb the flexible display assembly.

[0091] Specifically, the vacuum degree of the second cavity is increased to open the one-way valve. At this time, the first cavity and the second cavity are in communication. The vacuum degree of the first cavity is increased accordingly. Then the flexible display assembly can be adsorbed flat on the jig platform.

[0092] Wherein, when the vacuum degree of the second cavity is greater than or equal to the first vacuum degree, the one-way valve is opened. The first vacuum degree is 65 kiloPascal to 75 kiloPascal. For example, when the vacuum degree of the second cavity is 65 kiloPascal, 70 kiloPascal, 75 kiloPascal, etc., the one-way valve is opened.

[0093] 103. Perform a pre-peeling treatment on the rigid substrate and the flexible display device.

[0094] Specifically, a high-energy excimer laser can be used to perform laser scanning treatment at the interface between the rigid substrate and the flexible display device. The laser penetrates the rigid substrate and focuses on the interface between the flexible substrate (not labeled in the figure) and the rigid substrate, and scans the entire flexible substrate. Since the flexible substrate is formed of organic materials such as polyimide, the polyimide material absorbs laser energy, and the bond energy between the flexible substrate and the rigid substrate is destroyed. The polyimide material itself decomposes and carbonizes, accompanied by the release of a small amount of gas, thereby forming a separation state between the flexible display device and the rigid substrate.

[0095] 104. Transfer the jig platform with the flexible display assembly adsorbed thereon.

[0096] Specifically, the vacuum of the second cavity is reduced, so that the one-way valve is closed. When the one-way valve is closed, the first cavity still has a certain vacuum degree, and the negative pressure is continuously maintained. At this time, the jig platform and the flexible display assembly are adsorbed and attached, and the jig platform and the flexible display assembly are conveniently transferred subsequently. When the vacuum degree of the second cavity is less than the first vacuum degree, the one-way valve is closed.

[0097] Then, the jig platform adsorbed with the flexible display assembly can be transferred by using a mechanical arm with a clamping structure. After the flexible display assembly is transferred to another operation platform, the rigid substrate needs to be completely peeled off to obtain the flexible display device. For example, a blade can be used for separation, that is, the blade is inserted between the flexible display device and the rigid substrate, and then the blade is dragged by the mechanical arm to complete the peeling of the rigid substrate.

[0098] In the flexible assembly transfer method provided in the present application, when the rigid substrate and the flexible display assembly separated from the flexible display device are transferred, the flexible display assembly is transferred by transferring the jig platform, so that damage to the flexible display assembly caused by clamping and other mechanical actions is avoided. At the same time, since the flexible display assembly is adsorbed on the jig platform, it can be ensured that the rigid substrate and the flexible display device will not fall off and relatively displace during the carrying process, so that the flexible display assembly is stably transferred.

[0099] Please refer to Figure 11 The present application also provides a flexible display assembly peeling and transferring system 1000. The flexible display assembly peeling and transferring system 1000 comprises a jig platform 10, a first peeling platform 30, a laser scanning assembly 50 and a second peeling platform 40.

[0100] The jig platform 10 is the jig platform 10 described in any of the above embodiments, and specific details can be referred to the above description, which will not be repeated here. The jig platform 10 is used to place the flexible display assembly, which comprises a flexible display device and a rigid substrate stacked together, and the flexible display device faces the first surface 10A of the jig platform.

[0101] The first peeling platform 30 is used to place the jig platform 10. The second surface 10B of the jig platform 10 is attached to the first peeling platform 30. It should be noted that the first peeling platform 30 can be a laser peeling platform, which is used for laser peeling operation. It should be noted that the laser peeling platform is a technology known to those skilled in the art, which will not be repeated here.

[0102] The laser scanning assembly 50 is used for laser scanning treatment on the interface between the flexible display device and the rigid substrate. The laser scanning assembly can be provided on the first peeling platform 30, or can be independently provided. The working principle and specific structure of the laser scanning assembly 50 are known to those skilled in the art, which will not be repeated here.

[0103] The second stripping platform 40 is used to carry the jig platform 10 and the flexible display assembly transferred by the first stripping platform 30, and is also used to perform mechanical stripping treatment on the flexible display assembly subjected to laser scanning treatment, so as to separate the flexible display device and the rigid substrate. The second stripping platform 40 can be a film layer stripping platform.

[0104] The stripping and transferring system 1000 of the flexible display assembly provided in the present application can perform laser stripping operation on the flexible display assembly. Since the stripping and transferring system 1000 of the flexible display assembly includes the jig platform 10, when the flexible display assembly in which the rigid substrate and the flexible display device have been separated is transferred, the flexible display assembly is transferred by the transfer jig platform 10, so that damage of the flexible display assembly caused by mechanical action such as clamping is avoided. Meanwhile, since the flexible display assembly is adsorbed on the jig platform 10, it can be ensured that the rigid substrate and the flexible display device will not fall off and relatively displace during the carrying process, so that the flexible display assembly is stably transferred.

[0105] Further, the following embodiments of the present application will describe in detail the transfer method of the flexible display assembly by using the stripping and transferring system of the flexible display assembly provided in the present application, but cannot be understood as a limitation on the present application.

[0106] Specifically, please refer to Figure 12 , Figure 12 which is a second flowchart of the transfer method of the flexible display assembly provided in the present application. The transfer method of the flexible display assembly specifically includes the following steps:

[0107] 201, placing the jig platform on the first stripping platform, the second surface being attached to the first stripping platform, the first stripping platform being provided with a plurality of vacuum channels, the vacuum channels being in communication with external air.

[0108] Specifically, as shown in Figure 13 and Figure 14 , the jig platform 10 can be placed on the first stripping platform 30 by using a transfer device such as a mechanical arm. The second surface 10B of the jig platform 10 is attached to the first stripping platform 30.

[0109] The jig platform 10 is the jig platform 10 described in any of the above embodiments of the present application, and specific details can be referred to the above description, which will not be repeated here.

[0110] The first stripping platform 30 is a laser stripping platform, which is used to perform laser stripping operation. The first stripping platform 30 is provided with a plurality of vacuum channels 31, and the vacuum channels 31 are in communication with external air. The number and aperture of the vacuum channels 31 can be set according to the size of the first stripping platform 30. It should be noted that the laser stripping platform is a technology well known to those skilled in the art, which will not be repeated here.

[0111] 202. placing a flexible display assembly on the first surface, the flexible display assembly comprising a rigid substrate and a flexible display device stacked together, the flexible display device being attached to the first surface.

[0112] As shown in FIG. 2, the flexible display assembly 20 comprises a rigid substrate 21 and a flexible display device 22 stacked together. The flexible display device 22 comprises, but is not limited to, a flexible substrate, an array layer, a light-emitting layer, an encapsulation layer, and a polarizer stacked in sequence on the rigid substrate 21. The film layer structure and arrangement of the flexible display device 22 and the rigid substrate 21 can refer to the above embodiments, which will not be described here again. Figure 15 Specifically, the flexible display assembly 20 can be transferred to the first surface 10A of the jig platform body 110 by a transfer device such as a mechanical arm. It can be understood that, at this time, the rigid substrate 21 and the flexible display device 22 have not been separated. Therefore, directly moving the flexible display assembly 20 by the transfer device such as a mechanical arm will not cause damage to the flexible display assembly 20.

[0113] 203. adsorbing the flexible display assembly by the jig platform.

[0114] In some embodiments of the present application, as shown in FIG. 1, when the first cavity 111 and the second cavity 112 are coaxially arranged, and the second cavity 112 is in communication with the second surface 10B, the second cavity 112 is in communication with at least one vacuum passage 31. At this time, step 203 is specifically:

[0115] Figure 16 2031. vacuumizing the gas passage by the vacuum passage to improve the vacuum degree of the second cavity, to open the one-way valve, and to adsorb the jig platform and the flexible display assembly by the first peeling platform.

[0116] Specifically, the vacuum system of the first peeling platform 30 is started, the gas passage 11 is vacuumized by the vacuum passage 31, the vacuum degree of the second cavity 112 is improved, to open the one-way valve 12. At this time, the first cavity 111 and the second cavity 112 are in communication. The vacuum degree of the second cavity 112 is gradually improved. The jig platform 10 and the flexible display assembly 20 are adsorbed on the first peeling platform 30.

[0117] Further, at least one communication hole 32 can be arranged in the first peeling platform 30. The communication hole 32 is used to communicate the vacuum passage 31 with the outside air. The vacuum system of the first peeling platform 30 can be connected with the communication hole 32, to vacuumize the vacuum passage 31. The number and size of the communication hole 32 can be set according to actual conditions, which will not be limited in the present application.

[0118] Further, at least one communication hole 32 can be arranged in the first peeling platform 30. The communication hole 32 is used to communicate the vacuum passage 31 with the outside air. The vacuum system of the first peeling platform 30 can be connected with the communication hole 32, to vacuumize the vacuum passage 31. The number and size of the communication hole 32 can be set according to actual conditions, which will not be limited in the present application.

[0119] ​Specifically, when the vacuum degree of the second cavity 112 is greater than or equal to the first vacuum degree, the one-way valve 12 is opened and used to control the gas to pass from the first cavity 111 to the second cavity 112. When the vacuum degree of the second cavity 112 is less than the first vacuum degree, the one-way valve 12 is closed.

[0120] The first vacuum degree is 65 kiloPascal to 75 kiloPascal. Specifically, the first vacuum degree can be 65 kiloPascal, 70 kiloPascal, 75 kiloPascal, etc. That is, the vacuum pressure in the second cavity 112 measured by the vacuum gauge can be -65 kiloPascal, -70 kiloPascal, -75 kiloPascal, etc. When the vacuum degree of the second cavity 112 reaches the first vacuum degree, the one-way valve 12 will remain in an open state, so that the gas passes from the first cavity 111 to the second cavity 112, thereby reducing the vacuum degree in the first cavity 111, achieving the purpose of adsorbing the flexible display assembly 20.

[0121] It should be noted that the size of the first vacuum degree is determined by the structure of the one-way valve 12. It can be understood that the pressure required to open one-way valves 12 with different structures is different, and the size of the vacuum degree is also different.

[0122] It should be noted that the first peeling platform 30 has a vacuum system that can perform vacuumizing operation and gas injection operation, which is a technology familiar to those skilled in the art and will not be described here.

[0123] In another embodiment of the present application, as shown in Figure 17 When the second cavity 112 is located in the jig platform body 110, the jig platform 10 is provided with at least one air outlet 13, the air outlet 13 is in communication with the second cavity 112, and the air outlet 13 is used to exhaust the second cavity 112 to improve the vacuum degree of the second cavity 112, step 203 specifically includes the following steps:

[0124] 2032, the gas passage is vacuumized through the air outlet to improve the vacuum degree of the second cavity, to open the one-way valve, and to continue to adsorb the flexible display assembly on the jig platform.

[0125] Specifically, the vacuumizing device can be connected with the air outlet 13, and the gas passage 11 is vacuumized through the air outlet 13 to improve the vacuum degree of the second cavity 112 to open the one-way valve 12. At this time, the first cavity 111 and the second cavity 112 are in communication. The vacuum degree of the first cavity 111 is gradually improved. Then the flexible display assembly 20 can be adsorbed flat on the jig platform 10.

[0126] The vacuumizing device can be an additional device, or the vacuum system of the first peeling platform 30 can be used, which is not limited in the present application.

[0127] 2033、through the air injection port to the gas passage, reducing the vacuum of the second cavity, the one-way valve is closed, the first cavity remains negative pressure, the jig platform and the flexible display assembly remain adsorbed.

[0128] Specifically, after the jig platform 10 is adsorbed flat with the flexible display assembly 20, the vacuum device can be disconnected from the air injection port 13, so that the air injection port 13 is in communication with the outside air to break the vacuum of the second cavity 112, so that the one-way valve 12 is closed. After the one-way valve 12 is closed, the first cavity 111 still has a certain vacuum degree, and continues to maintain negative pressure. At this time, the jig platform 10 and the flexible display assembly 20 are adsorbed and attached, which facilitates subsequent transfer of the jig platform 10 and the flexible display assembly 20.

[0129] Of course, in other embodiments, air can also be injected into the second cavity 112 through the air injection port 13 to increase the speed of reducing the vacuum degree of the second cavity 112.

[0130] 2034、open the vacuum system of the first peeling platform, so that the first peeling platform adsorbs the jig platform.

[0131] Specifically, after the jig platform 10 and the flexible display assembly 20 are adsorbed and attached, the vacuum system of the first peeling platform 30 is opened, and the vacuum passage 31 is subjected to vacuumizing operation, so that the first peeling platform 30 adsorbs the jig platform 10. This step fixes the jig platform 10 on the first peeling platform 30, which can avoid movement of the jig platform 10, thereby improving the precision of laser peeling in the subsequent steps.

[0132] Of course, in other embodiments of the present application, step 2034 can be omitted to improve production efficiency. It can be understood that, since the jig platform 10 has a certain weight, compared with the flexible display assembly 20, the jig platform 10 is more difficult to move on the first peeling platform 30. And the flexible display assembly 20 has been adsorbed on the jig platform 10 in step 2033, so that the precision of laser peeling in the subsequent steps can be ensured by omitting step 2034.

[0133] 204、through the first peeling platform to the hard substrate and the flexible display device for pre-peeling treatment.

[0134] Specifically, the high-energy excimer laser of the first peeling platform 30 irradiates laser on the side of the hard substrate 21 away from the flexible substrate (not shown in the figure). The laser penetrates the hard substrate and focuses on the interface between the flexible substrate and the hard substrate 21, and scans the whole flexible substrate. Since the flexible substrate is formed of organic material such as polyimide, the polyimide material absorbs the laser energy, and the bond energy between the flexible substrate and the hard substrate 21 is destroyed. The polyimide material itself decomposes and carbonizes, accompanied by the release of a small amount of gas, thereby forming a separation state between the flexible substrate and the hard substrate 21.

[0135] It should be noted that generally, when performing LLO laser peeling, the laser energy is controlled so that there is still a certain adhesion between the flexible display device 22 and the hard substrate 21 instead of complete separation, in order to further reduce the probability of falling or relative displacement of the flexible display device 22 and the hard substrate 21 during subsequent movement.

[0136] In addition, as described above, when step 203 is step 2031, after step 204, the following steps are further included:

[0137] 2041, air is injected into the gas channel through the vacuum channel, the vacuum of the second cavity is reduced, the one-way valve is closed, the negative pressure is maintained in the first cavity, the first peeling platform is separated from the jig platform, and the jig platform is adsorbed with the flexible display assembly.

[0138] Specifically, the vacuum system of the first peeling platform 30 is turned on, air is injected into the gas channel 11 through the vacuum channel 31, the vacuum degree of the second cavity 112 is reduced, and the one-way valve 12 is closed. When the one-way valve 12 is closed, the first cavity 111 still has a certain vacuum degree, and the negative pressure is continuously maintained.

[0139] This step makes the first peeling platform 30 separate from the jig platform 10, and the jig platform 10 adsorbs and is attached to the flexible display assembly 20, which facilitates subsequent transfer of the jig platform 10 adsorbing the flexible display assembly 20.

[0140] 205, the jig platform adsorbing the flexible display assembly is transferred to the second peeling platform.

[0141] As shown in Figure 18 The second peeling platform 40 is a film layer peeling platform. Before transfer, since the jig platform 10 and the flexible display assembly 20 still have a certain vacuum degree, the jig platform 10 continues to stably adsorb the flexible display assembly 20. Then, the jig platform 10 is transferred to the second peeling platform 40 by using a transfer device such as a mechanical arm, that is, the transfer of the flexible display assembly 20 is realized. In addition, in order to further ensure the stability of the transfer, a mechanical arm with a clamping structure can be used for conveying.

[0142] Specifically, in some embodiments of the present application, step 205 specifically comprises the following steps:

[0143] 2051, vertically lifting the jig platform on which the flexible display assembly is adsorbed.

[0144] Specifically, please refer to Figure 19 , the first peeling platform 30 comprises at least one telescopic table 33. The telescopic table 33 is located between adjacent vacuum channels 31. By adjusting the telescopic length of the telescopic table 33, the jig platform 10 is vertically lifted.

[0145] Of course, the telescopic table 33 can also be vertically arranged above the first peeling platform 30. At this time, the telescopic table 33 can adopt a vacuum chuck or a hook structure, and the present application does not make specific limitations hereon.

[0146] 2052, transferring the lifted jig platform on which the flexible display assembly is adsorbed to the second peeling platform.

[0147] Specifically, the jig platform 10 and the flexible display assembly 20 can be transferred to the second peeling platform 40 by using a mechanical arm or other transfer device.

[0148] In this embodiment, the telescopic table 33 is used to lift the jig platform 10, so that the mechanical arm can be inserted from the gap of the telescopic table 33, facilitating the carrying of the jig platform 10, thereby making the transfer process more convenient.

[0149] In another embodiment of the present application, please refer to Figure 9 , when the first protruding part 14 and the second protruding part 15 are symmetrically arranged on the outer side wall of the jig platform body 110 and are used for transferring the jig platform 10, step 205 can be to use the mechanical arm to grab the first protruding part 14 and the second protruding part 15, so as to transfer the jig platform 10 and the flexible display assembly 20 to the second peeling platform.

[0150] Compared with the scheme of lifting the jig platform 10 by using the telescopic table 33, the embodiment can omit the step of controlling the telescoping of the telescopic table 33, thereby simplifying the process. Moreover, since the first protruding part 14 and the second protruding part 15 are arranged on the outer side wall of the jig platform body 110, the mechanical arm is easier to grab, thereby further improving the convenience of transfer.

[0151] In addition, after the flexible display assembly 20 is transferred to the second peeling platform, the rigid substrate 21 needs to be peeled to obtain the flexible display device 22. For example, a blade can be used to separate, that is, the blade is inserted between the flexible display device 22 and the rigid substrate 21, and then the rigid substrate 21 can be peeled by the mechanical arm driving the blade to move. The flexible display device 22 can be a flexible display panel, a flexible organic light-emitting diode (OLED) display panel or an active-matrix organic light-emitting diode (AMOLED) display panel, which is not limited in the present application.

[0152] In the flexible assembly transfer method provided by the present application, when the rigid substrate 21 and the flexible display assembly 20 in which the flexible display device 22 has been separated are transferred, the flexible display assembly 20 is transferred by the transfer jig platform 10, so that mechanical actions such as clamping do not damage the flexible display assembly 20. At the same time, since the flexible display assembly 20 is adsorbed on the jig platform 10, it can be ensured that the rigid substrate 21 and the flexible display device 22 do not fall off and relatively displace during the transfer process, so that the flexible display assembly 20 is stably transferred.

[0153] The jig platform, the flexible display assembly transfer method and the peeling and transfer system provided by the present application are described in detail above, and specific examples are applied to explain the principles and implementation modes of the present application. The above examples are only used to help understand the method of the present application and its core idea; at the same time, for those skilled in the art, according to the idea of the present application, the specific implementation mode and application range will be changed, and the above description should not be understood as a limitation of the present application.

Claims

1. A fixture platform, characterized in that, The fixture platform includes: A fixture platform body has a first surface and a second surface disposed opposite to each other. The first surface is used to place a flexible display component. The fixture platform body is provided with at least one gas channel, each gas channel including a first cavity and a second cavity connected to each other. The first cavity is in communication with the first surface. Multiple gas channels are provided, and the multiple gas channels are arranged in an array. A one-way valve is disposed between the first cavity and the second cavity, the first cavity and the second cavity are coaxially arranged, and the second cavity is in communication with the second surface; When the vacuum level of the second cavity is increased, the one-way valve opens, the first cavity and the second cavity are connected, and the fixture platform body is used to adsorb the flexible display component; When the vacuum level of the second cavity is reduced, the one-way valve closes, the first cavity remains under negative pressure, and the fixture platform body continues to adsorb the flexible display component. The jig platform body has a first protrusion and a second protrusion symmetrically arranged on its outer side wall. The first protrusion and the second protrusion are used to transfer the jig platform.

2. The fixture platform according to claim 1, characterized in that, The second cavity is located inside the fixture platform, and the fixture platform is provided with at least one air extraction port, which is connected to the second cavity and is used to extract air from the second cavity.

3. The fixture platform according to claim 1, characterized in that, The orifices of the multiple gas channels are identical.

4. A method for transferring a flexible display component, characterized in that, include: A flexible display component is placed on a first surface of the fixture platform as described in any one of claims 1-3, the flexible display component comprising a flexible display device and a rigid substrate stacked together, the flexible display device facing the first surface; The flexible display component is adsorbed using the fixture platform; The rigid substrate and the flexible display device are pre-peeled. The fixture platform on which the flexible display component is transferred and adsorbed.

5. The method for transferring a flexible display component according to claim 4, characterized in that, The step of using the fixture platform to adsorb the flexible display component specifically involves: Increase the vacuum level of the second cavity to open the one-way valve and allow the fixture platform to adsorb the flexible display component.

6. The method for transferring a flexible display component according to claim 5, characterized in that, The step of pre-peeling the rigid substrate from the flexible display device further includes: The vacuum level of the second cavity is reduced, the one-way valve is closed, the first cavity is kept under negative pressure, and the fixture platform remains attached to the flexible display component.

7. The method for transferring a flexible display component according to claim 6, characterized in that, When the vacuum level of the second cavity is greater than or equal to the first vacuum level, the one-way valve opens and is used to control the gas to flow from the first cavity into the second cavity; When the vacuum level of the second cavity is less than the first vacuum level, the one-way valve closes. The first vacuum degree is 65 kPa to 75 kPa.

8. The method for transferring a flexible display component according to claim 4, characterized in that, The fixture platform is provided with an air extraction port communicating with the second cavity. The step of using the fixture platform to adsorb the flexible display component specifically includes: The gas channel is evacuated through the air extraction port to increase the vacuum level of the second cavity, thereby opening the one-way valve and allowing the fixture platform to adsorb the flexible display component. Air is injected into the gas channel through the air extraction port to reduce the vacuum level of the second cavity, thereby closing the one-way valve. The first cavity is kept under negative pressure, and the fixture platform remains attached to the flexible display component.

9. A peeling and transfer system for a flexible display component, characterized in that, include: The fixture platform as described in any one of claims 1-3 is used to place a flexible display assembly, the flexible display assembly comprising a flexible display device and a rigid substrate stacked together, the flexible display device facing the first surface; A first peeling platform is used to place the fixture platform, and the second surface of the fixture platform is in contact with the first peeling platform; A laser scanning component is used to perform laser scanning processing on the interface between the flexible display device and the rigid substrate; The second peeling platform is used to carry the fixture platform and the flexible display component transferred by the first peeling platform, and is also used to perform mechanical peeling on the flexible display component after laser scanning to separate the flexible display device from the rigid substrate.

Images