Air cushion platform

Abstract

This invention provides a high-load air-bearing platform, relating to the field of precision motion platform technology. The air-bearing platform includes a base and a displacement mechanism. The displacement mechanism includes a guide rail and an air-bearing slide. The guide rail is mounted on the base, and the air-bearing slide is slidably fitted onto the guide rail. A pair of side plates of the air-bearing slide are provided with second small-hole throttling devices. Each pair of side plates has a second air outlet hole for the second small-hole throttling device on its side facing the guide rail. Each pair of side plates also has a strip-shaped groove on its side facing the guide rail, which communicates with the second air outlet hole. This invention increases the air film area and improves the platform's load capacity by providing grooves on the side plate surfaces that communicate with the second air outlet holes.

Description

Technical Field

[0001] This invention relates to the field of precision motion platform technology, and in particular to a large-load air-bearing platform. Background Technology

[0002] In the electronics manufacturing industry, product dimensions are getting smaller and smaller, while the precision requirements are getting higher and higher. Therefore, for the development of advanced electronic manufacturing equipment, a high-precision, high-stability motion platform is of decisive significance.

[0003] Traditional mechanical guideways mainly consist of a track and a slider. The slider contains rolling balls as rolling elements, and movement relies on the rolling friction between the rolling elements and the track. This makes the equipment prone to overheating and wear during use, and also prone to lag, thus affecting positioning accuracy. Unlike traditional mechanical guideways, air-bearing positioning platforms utilize air-bearing support technology, avoiding contact between moving parts. This not only fully meets users' requirements for high geometric accuracy, high positioning accuracy, and high stability, but also reduces energy consumption during platform operation.

[0004] In existing air flotation platforms, the air flotation holes mostly adopt a small-hole throttling structure. The small-hole throttling structure has a large gas diffusion loss, the formed air film area is small, the load capacity is poor, and it is easy to cause air hammer self-excitation phenomenon. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention provides an air flotation platform. By creating a groove on the side plate surface that communicates with a second air outlet, the area of ​​the air film is increased, thereby improving the platform's load-bearing capacity. The technical solution is as follows:

[0006] This invention specifically provides an air flotation platform, including a base and a displacement mechanism. The displacement mechanism includes a guide rail and an air flotation slide. The guide rail is disposed on the base, and the air flotation slide is slidably sleeved on the guide rail. A pair of side plates of the air flotation slide are provided with a second small-hole throttling device. A second air outlet of the second small-hole throttling device is opened on the side of the pair of side plates facing the guide rail. A strip-shaped groove is also opened on the side of the pair of side plates facing the guide rail, and the groove communicates with the second air outlet.

[0007] Furthermore, the width and depth of the groove are less than the radius of the second vent, and the length of the groove is greater than the diameter of the second vent.

[0008] Furthermore, the axial cross-sectional shape of the groove is a minor arc.

[0009] Furthermore, the second air outlet is provided with multiple outlets, and the multiple grooves are respectively connected to one of the multiple second air outlets. The grooves are arranged in several parallel columns along the movement direction of the air-bearing slide.

[0010] Furthermore, the multiple grooves in each column are connected to each other to form multiple parallel long grooves, the same number as the number of columns.

[0011] Furthermore, the air-floating slide also includes a base plate, and a pair of side plates are respectively connected to both ends of the base plate; the base plate is provided with a first small-hole throttle, and the surface of the base plate facing the base is provided with a first air outlet of the first small-hole throttle; the base plate is provided with an air extraction hole, and the surface of the base plate facing the base is provided with an air inlet communicating with the air extraction hole; a plurality of first air outlets are evenly provided on the outer side of a plurality of air inlets.

[0012] Furthermore, the air-floating slide also includes a top plate slidably disposed on the top surface of the guide rail, with two side plates fixedly connected to both ends of the top plate, and the top plate, the side plates, and the bottom plate being fixedly connected in sequence and slidably sleeved on the guide rail.

[0013] Furthermore, elastic blocks are provided at both ends of the guide rail, and the elastic blocks are located on the movement path of the air-bearing slide; or the elastic blocks are fixedly connected to both ends of the air-bearing slide, and baffles are fixedly connected to both ends of the guide rail, with the baffles located on the movement path of the elastic blocks.

[0014] Furthermore, the displacement mechanism is configured as two sets, namely a first direction displacement mechanism and a second direction displacement mechanism. The first direction displacement mechanism is disposed on the base, and the second direction displacement mechanism is fixedly connected to the top plate of the first direction displacement mechanism.

[0015] Furthermore, the base is made of marble or granite.

[0016] The beneficial effects of this invention are:

[0017] First, the present invention provides an air flotation platform. By setting a groove to cooperate with a small orifice throttling device, the groove shares part of the pressure reduction of the gas, which on the one hand reduces the occurrence of air hammer self-excitation phenomenon, and on the other hand facilitates the increase of gas pressure, thereby enabling the air flotation platform to obtain greater load-bearing capacity and rigidity.

[0018] Secondly, on the one hand, compared to the small orifice, the groove, due to its narrow width and long length, greatly reduces the loss of gas caused by diffusion flow; on the other hand, the groove also increases the air supply area, making the load-bearing air film area formed between the air-floating slide and the guide rail larger and more stable, thereby improving the load-bearing capacity and rigidity of the air-floating platform.

[0019] Finally, the combined use of the groove and the orifice throttle allows for a more relaxed processing precision and size for the orifice throttle and the groove, reducing the processing difficulty and manufacturing cost of the orifice throttle and the groove, and also reducing the risk of clogging of the orifice throttle and the groove. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below.

[0021] Figure 1 This is a schematic diagram of the displacement mechanism in one embodiment;

[0022] Figure 2 yes Figure 1 Top view;

[0023] Figure 3 yes Figure 1 The front view;

[0024] Figure 4 This is a structural schematic diagram of the side plate in one embodiment;

[0025] Figure 5 yes Figure 4 The front view;

[0026] Figure 6 This is a schematic diagram of the base plate in one embodiment;

[0027] Figure 7 This is a schematic diagram of the overall structure of one embodiment.

[0028] In all views, the same label indicates equivalent or similar parts or components.

[0029] 1. Base; 2. Displacement mechanism; 21. First direction displacement mechanism; 22. Second direction displacement mechanism; 3. Air-floating slide; 31. Side plate; 311. Second air outlet; 312. Groove; 313. Second air pipe connector; 32. Base plate; 321. Air inlet; 322. Air extraction hole; 323. First air outlet; 324. First air pipe connector; 33. Top plate; 4. Guide rail. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0031] In the description of this specification, the terms "Embodiment 1," "this embodiment," or "in one embodiment," etc., indicate that the specific features, structures, materials, or characteristics described in connection with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example; moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in one or more embodiments or examples.

[0032] In the description of this specification, the terms "connection," "installation," "fixing," "setting," and "having" are interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0033] In the description of this specification, relational terms such as “first” and “second” are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0034] In one embodiment, such as Figure 1 , 4 As shown in Figure 7, an air flotation platform includes a base 1 and a displacement mechanism 2. The displacement mechanism 2 includes a guide rail 4 and an air flotation slide 3. The guide rail 4 is mounted on the base 1, and the air flotation slide 3 is slidably mounted on the guide rail 4. A pair of side plates 31 of the air flotation slide 3 are provided with second small-hole throttling devices. The sides of the pair of side plates 31 facing the guide rail 4 are each provided with a second air outlet 311 of the second small-hole throttling device. A strip-shaped groove 312 is also provided on the sides of the pair of side plates 31 facing the guide rail 4, and the groove 312 communicates with the second air outlet 311.

[0035] The displacement mechanism 2 also includes a linear drive assembly, which drives the air-floating slide 3 to slide. The air-floating slide 3 generates vertical support force through air buoyancy, achieving contactless sliding on the guide rail 4 under the drive of the linear drive assembly. The groove 312 and the second air outlet 311 cooperate with each other to share the air pressure and perform two throttling operations, forming a larger and more stable air film between the air-floating slide 3 and the guide rail 4, improving the load-bearing capacity and rigidity of the air-floating platform. The guide rail 4 is made of marble, and the air-floating slide 3 is made of 7075 aluminum alloy. In other embodiments, the guide rail 4 and the air-floating slide 3 can also be made of other materials according to actual needs.

[0036] In the above embodiments, such as Figure 4 , 5 As shown, the left and right end faces of the side plate 31 are provided with second air pipe connectors 313, and the side of the side plate 31 near the guide rail 4 is provided with a second air outlet 311 of a second small-hole throttle, with the air outlet direction of the second air outlet 311 facing the side wall of the guide rail 4. A second airflow channel is provided inside the side plate 31, and the second air pipe connectors 313 and the second airflow channel are connected. The second airflow channel is connected to the second small-hole throttle, which is connected to the second air outlet 311. After connecting the air source to the second air pipe connector 313, airflow can be introduced into the second airflow channel, and through the second small-hole throttle and the second air outlet 311, a stable airflow can be provided to the second small-hole throttle and the side plate 31. This allows an air film to be formed between the side plate 31 and the guide rail 4, achieving contactless sliding.

[0037] In one embodiment, such as Figure 4 As shown, the second airflow channel is connected to multiple second small-hole throttling devices. The multiple second air outlets 311 of these devices can provide a higher-pressure air film, thereby not only achieving contactless sliding but also further improving the load-bearing capacity of the air-bearing slide 3 and preventing seizing. In one embodiment, there are eight second air outlets 311, with four outlets 311 in a row and eight outlets 311 arranged parallel to each other with equal left and right spacing. This results in a more uniform air film formed between the air-bearing slide 3 and the guide rail 4, making the sliding of the air-bearing slide 3 more stable.

[0038] In one embodiment, such as Figure 5As shown, eight grooves 312 are formed corresponding to the eight second air outlets 311, and the grooves 312 are formed along the movement direction of the air flotation slide 3. The eight grooves 312 are divided into two rows, and the two rows of grooves 312 are arranged in parallel, with each row of grooves 312 on the same straight line. Furthermore, the width and depth of the grooves 312 are smaller than the radius of the second air outlets 311, and the length of the grooves 312 is larger than the diameter of the second air outlets 311. Due to the presence of high-pressure gas, the small-hole throttling device is prone to air hammer vibration. The design of the grooves 312 can share some of the gas pressure, reduce the occurrence of air hammer self-excitation, and also facilitate further increasing the pressure, thereby improving the load-bearing capacity of the air flotation platform. The gas flowing from the second outlet 311 of the small-orifice throttling device generally diffuses, resulting in significant losses. Other outlets, such as square or round ones, also cause substantial gas losses, reducing the load-bearing capacity of the air-float platform. However, the narrow width and long length of the groove 312 cause the gas flowing through it to become viscous, minimizing gas diffusion and reducing losses. Simultaneously, the slender groove 312, in conjunction with the second outlet 311, increases the air supply area, further enhancing the load-bearing capacity and rigidity of the air-float platform by creating a better connection between the air-float slide 3 and the guide rail 4.

[0039] In one embodiment, the axial cross-section of the groove 312 can be set to any shape, all of which can achieve the effect of distributing air pressure and increasing the air supply area. Preferably, the axial cross-section of the groove 312 is set to an arc shape, and the arc-shaped surface facilitates gas flow and reduces gas loss. More preferably, the axial cross-section of the groove 312 is set to a minor arc, with the two tangents at the end of the minor arc intersecting on the convex side of the arc, and the other ends of the two tangents not intersecting. That is, when air flows into the groove 312, it will spread out to both sides of the groove 312, further increasing the air supply area, reducing gas pressure, reducing the occurrence of air hammer phenomenon, and increasing the rigidity of the air flotation platform.

[0040] In one embodiment, the four grooves 312 in each row are connected to form two long grooves, which further enhances the viscosity of the gas, further reduces the diffusion flow of the gas, reduces gas loss, and increases the air pressure intensity, thereby significantly improving the load-bearing capacity and stiffness of the air flotation platform.

[0041] In one embodiment, such as Figure 1-3 As shown, the air-bearing slide 3 also includes a base plate 32, which is slidably connected to the bottom surface of the guide rail 4. Side plates 31 are slidably connected to the two sides of the guide rail 4, and the two side plates 31 are fixedly connected to the two sides of the base plate 32. The upper surfaces of the two side plates 31 can be connected to other components, thereby driving the high-precision and high-stability movement of other components.

[0042] Specifically, such as Figure 6As shown, a first small-hole throttle is provided on the base plate 32, and a first air outlet 323 of the first small-hole throttle is provided at the bottom of the base plate 32. The first air outlet 323 is connected to an air source, which provides airflow to the first air outlet 323, thereby forming an air film between the bottom surface of the base plate 32 and the base 1, providing a vertical support force for the air-floating slide 3 and achieving contactless sliding. Specifically, a first air outlet 323 is opened at each of the four corners of the lower surface of the base plate 32, and a first air pipe connector 324 is opened on the four side walls of the base plate 32. A first airflow channel is opened inside the base plate 32, and the first air pipe connector 324 is connected to the first air outlet 323 through the first airflow channel. After the air source is connected to the first air pipe connector 324, airflow can be introduced into the first airflow channel, and through the first small-hole throttle and the first air outlet 323, airflow can be stably provided to the first small-hole throttle and the base plate 32. This allows an air film to be formed between the base plate 32 and the base 1, providing a vertical support force for the air-floating slide 3 and enabling contactless sliding.

[0043] In one embodiment, such as Figure 6 As shown, the base plate 32 has an air extraction hole 322 on its side and an air inlet hole 321 on its bottom surface. A third airflow channel is also provided inside the base plate 32. The air inlet hole 321 and the air extraction hole 322 are connected through the third airflow channel. Connecting an air extraction device to the air extraction hole 322 allows air to be extracted from the air inlet hole 321 through the third airflow channel, creating a negative pressure between the base plate 32 and the base 1. This negative pressure provides preload, creating an attraction between the base plate 32 and the base 1, thus providing a constant vertical preload force between them. This ensures that the air-bearing slide 3 can be stably positioned on the guide rail 4, remaining in a gapless state even under working stress, further improving the rigidity and accuracy of the air-bearing platform.

[0044] In other embodiments, the multiple air inlets 321 are arranged in two parallel rows perpendicular to the movement direction of the air-bearing slide 3, with four inlets in each row. The air inlets 321 perpendicular to the movement direction of the air-bearing slide 3 can better counteract the instability caused by the movement of the air-bearing slide 3, thereby making the constant preload force in the vertical direction between the base plate 32 and the base 1 more stable.

[0045] In other embodiments, multiple first air outlets 323 are evenly distributed on the outer sides of multiple air inlets 321. This structure allows the base plate 32 to form an air film with a larger area between itself and the base 1, ensuring that the air-bearing slide 3 receives stable vertical support and achieves contactless sliding. Simultaneously, the air inlets 321 in the middle of the base plate 32 form an air intake area, creating negative pressure and further improving the rigidity and accuracy of the air-bearing platform. The internal and external structures of the first air outlets 323 and air inlets 321 ensure that the air-bearing slide 3 can slide stably and with high precision on the guide rail 4 without contact.

[0046] In one embodiment, as shown in Figure 1-3, the air-bearing slide 3 further includes a top plate 33, which is slidably connected to the top surface of the guide rail 4. Side plates 31 are fixedly connected to both ends of the top plate 33. The U-shaped structure formed by the top plate 33, the two side plates 31, and the bottom plate 32 is slidably fitted onto the guide rail 4, resulting in stronger overall integrity and a more stable structure. The top plate 33 has a through-hole, allowing the air blown out by the pair of side plates 31 to be smoothly discharged. This enables the top plate 33 to move under the influence of the side plates 31 and the bottom plate 32, preventing additional positive / negative pressure between the top plate 33 and the guide rail from affecting the smooth sliding of the guide rail 4. Other components can be connected to the top surface of the top plate 33; the connecting surface is larger than the end faces of the side plates 31, thus enabling more stable movement of other components.

[0047] In one embodiment, a pair of parallel guide rails 4 are provided above the base 1, and the guide rails 4 are used to cooperate with the side plate 31 to support the air film. In other embodiments, the guide rails 4 may be formed by creating grooves in the base 1, so that the connection between the guide rails 4 and the base 1 can be more stable to adapt to high-load and high-speed moving loading.

[0048] In one embodiment, the linear drive assembly includes a linear motor. The stator and grating ruler of the linear motor are both mounted on the base 1 and located between a pair of guide rails 4. The mover and reading head of the linear motor are both mounted on the bottom of the top plate 33. The ruler strip of the grating ruler is made of marble. The mover of the linear motor can drive the air-bearing slide 3 to move back and forth along the guide rails 4 within its stroke. The reading head and grating ruler can directly determine the movement distance, achieving precise control. Mounting the stator and grating ruler of the linear motor on the base 1 ensures secure fixation and high space utilization.

[0049] In another embodiment, the displacement mechanism 2 is configured as two sets, namely a first-direction displacement mechanism 21 and a second-direction displacement mechanism 22. The first-direction displacement mechanism 21 is fixedly connected to the base 1, and the second-direction displacement mechanism 22 is fixedly connected to the top plate 33 of the first-direction displacement mechanism 21, completing the transmission of movement in the first direction to the top plate 33 in the second direction, so that the top plate 33 in the second direction has the function of movement in both the first and second directions. The top plate 33 of the second-direction displacement mechanism 22 is used to connect other components, so that other components can be displaced along the first and second directions under the drive of the first-direction displacement mechanism 21 and the second-direction displacement mechanism 22. The guide rail 4, the air-bearing slide 3, and the linear drive assembly in the previous embodiments can all be applied to the first-direction displacement mechanism 21 and the second-direction displacement mechanism 22 in this embodiment.

[0050] In one embodiment, the displacement mechanism 2 includes anti-collision components fixed to both ends of the guide rail 4, with the anti-collision blocks located on the movement path of the air-bearing slide 3. The anti-collision components limit the forming range of the air-bearing slide 3, serving a limiting and anti-collision function. In this case, the anti-collision components can be elastic blocks such as rubber. In other embodiments, elastic blocks are fixedly connected to both ends of the air-bearing slide 3, and baffles are fixedly connected to both ends of the guide rail 4, with the baffles located on the movement path of the elastic blocks. In this case, the elastic components are the elastic blocks and the baffles.

[0051] In one embodiment, the base 1 is made of marble or granite. Using a marble platform as the base 1 to support the entire air flotation platform is less costly, and marble has sufficient hardness. Granite is hard and dense, resistant to acids and alkalis, and has strong stability. When the air flotation platform is used in a corrosive environment, granite is more suitable for using granite as the base 1 of the air flotation platform.

[0052] The above description of the embodiments is intended to enable those skilled in the art to understand and apply the technology of this invention. Those skilled in the art can easily make various modifications to these examples and apply the general principles described herein to other embodiments without creative effort. Therefore, this invention is not limited to the above embodiments. Modifications in the following situations should be within the scope of protection of this invention: ① New technical solutions implemented based on the technical solution of this invention and combined with existing common knowledge, where the technical effects of the new technical solution do not exceed the technical effects of this invention; ② Equivalent substitutions of some features of the technical solution of this invention using known technology, resulting in the same technical effects as those of this invention; ③ Extendable technical solutions based on the technical solution of this invention, where the substantive content of the extended technical solution does not exceed the technical solution of this invention; ④ Equivalent transformations made using the content of this specification and drawings, directly or indirectly applied to other related technical fields.

Claims

1. An air-float platform, comprising a base and a displacement mechanism, the displacement mechanism comprising a guide rail and an air-float slide, the guide rail being horizontally disposed above the base, the air-float slide being horizontally slidably sleeved on the guide rail, and a pair of side plates of the air-float slide being provided with a second small-hole throttling device, and each of the pair of side plates having a second air outlet of the second small-hole throttling device on its side facing the guide rail, characterized in that, Each of the two side plates facing the guide rail is provided with a strip-shaped groove, which communicates with the second air outlet. The axial cross-sectional shape of the groove is a minor arc. The air-floating slide also includes a base plate, and a pair of side plates are respectively connected to both ends of the base plate. The base plate is slidably connected to the bottom surface of the guide rail. The base plate is provided with a first small-hole throttle, and a first air outlet of the first small-hole throttle is opened at each of the four corners of the surface of the base plate facing the base, so as to form an air film between the base plate and the base. The base plate is provided with an air extraction hole, and an air inlet is opened on the surface of the base plate facing the base, which communicates with the air extraction hole. The multiple air inlets are arranged in two parallel rows perpendicular to the movement direction of the air-floating slide. The air extraction hole is connected to an air extraction device. The air inlet in the middle of the base plate forms a negative pressure air intake area. The multiple first air outlets are evenly opened on the outer side of the multiple air inlets. The second air outlet is provided with multiple outlets, and the multiple grooves are respectively connected to one of the multiple second air outlets. The grooves are arranged in several parallel columns along the movement direction of the air-bearing slide, and the multiple grooves in each column are connected to each other to form multiple parallel long grooves with the same number of columns. The base plate has a first air pipe connector on each of its four side walls, and a first airflow channel inside the base plate. The first air pipe connector is connected to the first air outlet through the first airflow channel. The base plate also has a third airflow channel inside the base plate, and the air inlet and the air extraction hole are connected through the third airflow channel. The left and right ends of the side plate are provided with second air pipe connectors, and the inside of the side plate is provided with a second airflow channel. The second air pipe connectors are connected to the second airflow channel. The second airflow channel is connected to the second small hole throttle, and the second small hole throttle is connected to the second air outlet. The air-floating slide also includes a top plate slidably disposed on the top surface of the guide rail. Two side plates are fixedly connected to both ends of the top plate. The top plate, the side plates, and the bottom plate are sequentially fixedly connected and slidably sleeved on the guide rail. The top plate has a through-hole for discharging gas blown out by the pair of side plates.

2. The air flotation platform as described in claim 1, characterized in that, The width and depth of the groove are less than the radius of the second vent, and the length of the groove is greater than the diameter of the second vent.

3. The air flotation platform as described in any one of claims 1-2, characterized in that, The guide rail is provided with elastic blocks at both ends, and the elastic blocks are located on the movement path of the air-bearing slide; or the elastic blocks are fixedly connected to both ends of the air-bearing slide, and baffles are fixedly connected to both ends of the guide rail, and the baffles are located on the movement path of the elastic blocks.

4. The air flotation platform as described in any one of claims 1-2, characterized in that, The displacement mechanism is configured in two sets, namely a first direction displacement mechanism and a second direction displacement mechanism. The first direction displacement mechanism is disposed on the base, and the second direction displacement mechanism is fixedly connected to the top plate of the first direction displacement mechanism.

5. The air flotation platform as described in any one of claims 1-2, characterized in that, The base is made of marble or granite.

Images