Sensor mounting device

Abstract

The present invention belongs to the technical field of photoelectric sensors, and specifically relates to a sensor mounting device, including a mounting support in the shape of a circular ring plate and at least three flexible support seats evenly distributed along the circumference of the mounting support. The flexible support seat includes a two-dimensional flexible hinge, a support base, an upper cylinder and a stiffness control hole. The two-dimensional flexible hinge includes a stiffness adjustment plate, a first flexible hinge chain and a second flexible hinge chain that are perpendicular to each other. The two ends of the stiffness adjustment plate are respectively fixedly connected to the first flexible hinge chain and the second flexible hinge chain, and the hinge beam of the second flexible hinge chain is radially arranged along the mounting support; the fastener connects the support base and the mounting support; the upper cylinder can abut and support the sensor; the stiffness control hole extends axially along the flexible support seat. The sensor mounting device of the present invention can balance the thermal deformation of the sensor and has a high thermal resistance, reduce the thermal shock on the workbench, and has a simple structure and positioning method, which is easy to process and install, and reduces the design and manufacturing costs.

Description

Technical Field

[0001] The present invention relates to the technical field of photoelectric sensors, and in particular to a sensor mounting device. Background Art

[0002] The photolithography device, also known as the mask alignment exposure machine, exposure system, photolithography system, etc., is the core equipment for chip manufacturing. The photolithography device uses a technology similar to photo printing to print the fine patterns on the mask onto the silicon wafer through light exposure. In the photolithography device, the micro-motion stage of the workbench is used to carry the silicon wafer, and the silicon wafer is precisely adjusted and positioned in six degrees of freedom in the horizontal and vertical directions to complete the alignment, leveling and focusing tasks. The micro-motion stage is equipped with photoelectric sensors such as point energy sensors, image sensors and mask alignment detection sensors. Since the above sensors all rely on photoelectric conversion, sufficient light needs to be irradiated on the upper surface of the sensor unit. Because the light source of the photolithography device is high-energy-density UV light, the sensor unit will cause temperature rise and thermal expansion due to the thermal effect of light. However, the micro-motion stage of the lithography device has high requirements for temperature stability (surface temperature rise is no more than 0.1°C), so the sensor mounting device needs to have a sufficiently large thermal resistance; in addition, the lithography device also has high requirements for the surface shape of the sensor unit (PV value is required to be ≤5μm), so the stiffness of the sensor mounting device needs to be significantly smaller than that of the sensor unit to release the thermal deformation of the sensor unit.

[0003] Some existing sensor mounting devices have high structural complexity and require a combination of multiple mounting parts to achieve the above functions; the mounting part design is complex, the relative position relationship between the multiple mounting parts needs to be precisely constrained, and the processing and positioning accuracy requirements are high. The design cost and manufacturing cost are high, resulting in low production efficiency. Summary of the invention

[0004] The object of the present invention is to provide a sensor mounting device that can balance the thermal deformation of the sensor and has high thermal resistance, reduces the thermal shock on the workbench, has a simple structure and positioning method, is easy to process and install, reduces design cost and manufacturing cost, and improves production efficiency.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A sensor installation device, comprising:

[0007] A mounting support, the mounting support is configured to be connected to a workbench, and the mounting support is a circular ring plate;

[0008] At least three flexible support seats, the flexible support seats are detachably connected to the mounting support, the at least three flexible support seats are evenly spaced along the circumference of the mounting support, the flexible support seats are configured to support the sensor, and the flexible support seats include:

[0009] A two-dimensional flexible hinge, the two-dimensional flexible hinge comprising a stiffness adjustment plate, a first flexible hinge chain and a second flexible hinge chain perpendicular to each other, the two ends of the stiffness adjustment plate are respectively fixedly connected to the first flexible hinge chain and the second flexible hinge chain, and the hinge beam of the second flexible hinge chain is arranged along the radial direction of the mounting support;

[0010] A support base, one end of which is fixedly connected to the second flexible hinge chain, and the other end of which abuts against the mounting support, and a fastener connects the support base and the mounting support;

[0011] an upper cylinder, one end of which is fixedly connected to the first flexible hinge chain, and the other end of which is capable of abutting against the sensor; and

[0012] A stiffness control hole extends along the axial direction of the flexible support seat and sequentially passes through the upper cylinder, the first flexible hinge chain, the stiffness adjustment plate and the second flexible hinge chain.

[0013] As a preferred structure of the present invention, the first flexible hinge chain and the second flexible hinge chain are both straight beam hinge chains, and both ends of the first flexible hinge chain and both ends of the second flexible hinge chain are provided with transition arcs.

[0014] As a preferred structure of the present invention, the height of the upper cylinder is greater than twice the height of the stiffness adjustment plate.

[0015] As a preferred structure of the present invention, the support base includes a lower cylinder and a mounting positioning plate, the lower cylinder is coaxially arranged with the upper cylinder, the outer diameter of the lower cylinder is equal to the outer diameter of the upper cylinder, the two ends of the lower cylinder are respectively fixedly connected to the first flexible hinge chain and the mounting positioning plate, and the other end of the mounting positioning plate away from the lower cylinder is configured to abut the mounting support.

[0016] As a preferred structure of the present invention, the support base is provided with a first mounting hole, the first mounting hole passes through the lower cylinder and the mounting positioning plate, the stiffness control hole extends to the lower cylinder and is connected to the first mounting hole, and the fastener is threadedly connected to the first mounting hole.

[0017] As a preferred structure of the present invention, the height of the mounting positioning plate is smaller than the depth of the first mounting hole.

[0018] As a preferred structure of the present invention, the support base is also provided with a first positioning hole and a second positioning hole, the first positioning hole and the second positioning hole are symmetrically arranged on both sides of the lower cylinder, and the mounting bracket is provided with a first positioning pin and a second positioning pin, the first positioning pin is passed through the first positioning hole, and the second positioning pin is passed through the second positioning hole.

[0019] As a preferred structure of the present invention, the mounting positioning plate is further provided with a positioning boss, the positioning boss abuts the mounting support, the length of the positioning boss extends along the length direction of the mounting positioning plate, and the length of the positioning boss is greater than the outer diameter of the lower cylinder.

[0020] As a preferred structure of the present invention, the first positioning hole is a circular hole, the second positioning hole is a U-shaped hole, the aperture of the first positioning hole is equal to the U-shaped width of the second positioning hole, and the distance between the axis of the first positioning hole and the axis of the transition cylindrical surface of the second positioning hole is greater than the length of the positioning boss.

[0021] As a preferred structure of the present invention, the mounting support further includes a positioning mark hole.

[0022] Beneficial effects of the present invention: The sensor installation device provided by the present invention, when the sensor generates thermal expansion, the first flexible hinge chain can realize the torsion of the flexible support seat around the T axis in the local coordinate system, and the second flexible hinge chain can realize the torsion of the flexible support seat around the R axis in the local coordinate system, which can respectively balance the torsion of the sensor about the T axis and about the R axis in the local coordinate system due to thermal expansion. At the same time, the first flexible hinge chain can drive the upper cylinder to realize translation relative to the R axis direction, and the stiffness adjustment plate connected in series with the first flexible hinge chain further reduces the translation stiffness of the flexible support seat in the R axis direction by connecting the second flexible hinge chain, balancing the radial translation of the sensor and blocking thermal energy; the second flexible hinge chain acts as a leading role, driving the upper cylinder, the first flexible hinge chain and the stiffness adjustment plate to realize translation relative to the T axis direction, balancing the circumferential displacement of the sensor and blocking thermal energy; the stiffness adjustment plate acts as a leading role, driving the upper cylinder, the first flexible hinge chain and the second flexible hinge chain to realize translation relative to the Z axis direction, thereby balancing the displacement of the sensor relative to the Z axis direction and blocking thermal energy. The stiffness control hole further reduces the overall stiffness of the flexible support seat and improves the thermal resistance, blocking the heat of the sensor from transferring energy to the micro-motion stage through the flexible support seat, thereby reducing the thermal shock to the micro-motion stage. The annular plate-shaped mounting support can evenly bear the stress transmitted by the flexible support seat. The hinged beam of the second flexible hinge chain is arranged along the radial direction of the mounting support. Therefore, the hinged beam of the first flexible hinge chain can be arranged tangentially along the circumference of the mounting support. The thermal stress released by multiple flexible support seats can be dispersed with each other, which is convenient for the mounting support to balance the deformation of the sensor and easy to install and position the flexible support seat. After the characteristic dimensions of the first flexible hinge chain and the second flexible hinge chain are confirmed, the thickness of the stiffness adjustment plate can be reduced, which can increase the thermal resistance of the flexible support seat and achieve the improvement of the target performance thermal resistance. The overall structure and positioning method of the sensor mounting device are simple, easy to process and easy to install, which reduces the design cost and manufacturing cost and improves the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the structure of the sensor installation device provided in the first embodiment of the present invention applied to the micro-motion stage of the workpiece stage of the lithography machine;

[0024] Figure 2 is a structural schematic diagram of a sensor installation device provided in Embodiment 1 of the present invention;

[0025] Figure 3 is a schematic structural diagram of a flexible support base provided in Embodiment 1 of the present invention;

[0026] Figure 4 is a schematic diagram of heat conduction of a sensor mounting device provided in Embodiment 1 of the present invention;

[0027] Figure 5is a schematic diagram of thermal resistance of the flexible support base provided in the first embodiment of the present invention;

[0028] Figure 6 is a top view of the structure of the sensor installation device provided in the first embodiment of the present invention;

[0029] Figure 7 yes Figure 6 A cross-sectional view of the sensor installation device along the AA direction;

[0030] Figure 8 yes Figure 7 A cross-sectional view of the sensor installation device along the BB direction;

[0031] Fig. 9 This is a structural front view of the flexible support base provided in the second embodiment of the present invention;

[0032] Fig.10 is a top view of the structure of the flexible support base provided in the second embodiment of the present invention;

[0033] Fig.11 is a cross-sectional view of the flexible support seat provided in the second embodiment of the present invention Figure 1 ;

[0034] Fig.12 is a cross-sectional view of the flexible support seat provided in the second embodiment of the present invention Figure 2 .

[0035] In the figure:

[0036] 1. Mounting support; 11. First positioning pin; 12. Second positioning pin; 13. Positioning mark hole; 2. Flexible support seat; 21. Upper cylinder; 22. First flexible hinge chain; 23. Stiffness adjustment plate; 24. Second flexible hinge chain; 25. Support base; 251. Lower cylinder; 252. Mounting positioning plate; 2521. Positioning boss; 253. First mounting hole; 254. First positioning hole; 255. Second positioning hole; 26. Stiffness control hole; 27. Transition arc; 28. Fastener;

[0037] 100. sensor; 101. mask alignment detection sensor; 102. image sensor; 103. point energy sensor; 200. micro-motion stage. DETAILED DESCRIPTION

[0038] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It is also necessary to explain that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0042] Embodiment 1

[0043] like Figure 1-Figure 8 As shown, an embodiment of the present invention provides a sensor mounting device, which is applied to a micro-motion stage 200 of a workpiece stage of a photolithography machine. Figure 1 As shown in FIG. 1 , it is a schematic diagram of the sensor mounting device applied to the micro-motion stage 200 of the workpiece stage of the lithography machine. The sensor mounting device can fix and mount photoelectric sensors such as the mask alignment detection sensor 101, the image sensor 102 and the point energy sensor 103. For the convenience of explanation, as Figure 2As shown, the overall coordinate system of the sensor mounting device is set, which is represented by the X-axis, Y-axis and Z-axis respectively. The sensor mounting device includes a mounting support 1 and at least three flexible support seats 2. The mounting support 1 is configured to connect to the micro-motion table 200. The mounting support 1 is a circular ring plate. The circular ring plate-shaped mounting support 1 can evenly bear and balance external stress and reduce deformation. The flexible support seat 2 is detachably connected to the mounting support 1. At least three flexible support seats 2 are evenly distributed along the circumference of the mounting support 1. The flexible support seat 2 is configured to support the sensor 100. Preferably, the sensor 100 can be fixed to the upper surface of the flexible support seat 2 by glue, as shown in FIG. Figure 4 As shown. The embodiment of the present invention is provided with three flexible support seats 2, which are evenly distributed at intervals of 120° along the circumference of the mounting support 1 to form a stable triangle, which can stably support the sensor 100 and facilitate the mounting support 1 to balance the thermal stress released by the three flexible support seats 2. In other embodiments, more than three flexible support seats 2 may be provided, and this embodiment does not limit this. Figure 3 As shown, the flexible support seat 2 includes a two-dimensional flexible hinge, a support base 25, an upper cylinder 21 and a stiffness control hole 26. The two-dimensional flexible hinge includes a stiffness adjustment plate 23, a first flexible hinge chain 22 and a second flexible hinge chain 24 which are perpendicular to each other. Both ends of the stiffness adjustment plate 23 are respectively fixedly connected to the first flexible hinge chain 22 and the second flexible hinge chain 24, and the hinge beam of the second flexible hinge chain 24 is arranged along the radial direction of the mounting support 1; one end of the support base 25 is fixedly connected to the second flexible hinge chain 24, and the other end abuts the mounting support 1, and a fastener 28 connects the support base 25 and the mounting support 1; one end of the upper cylinder 21 is fixedly connected to the first flexible hinge chain 22, and the other end can abut the sensor 100; the stiffness control hole 26 extends along the axial direction of the flexible support seat 2, and sequentially passes through the upper cylinder 21, the first flexible hinge chain 22, the stiffness adjustment plate 23 and the second flexible hinge chain 24, as shown in FIG. Figure 7 shown.

[0044] For ease of explanation, Figure 3As shown, the local coordinate system of the flexible support base 2 is set, wherein the Z-axis direction is the same as the Z-axis direction of the overall coordinate system where the sensor mounting device is located, the T-axis corresponds to the tangential direction of the circle in the overall coordinate system, and the R-axis corresponds to the radial direction of the circle in the overall coordinate system. When the sensor 100 generates thermal expansion, the first flexible hinge chain 22 can realize the torsion of the flexible support base 2 around the T-axis in the local coordinate system, and the second flexible hinge chain 24 can realize the torsion of the flexible support base 2 around the R-axis in the local coordinate system, which can respectively balance the torsion of the sensor 100 about the T-axis and about the R-axis in the local coordinate system due to thermal expansion. At the same time, the first flexible hinge chain 22 can drive the upper cylinder 21 to achieve translation relative to the R-axis direction. The stiffness adjustment plate 23 connected in series with the first flexible hinge chain 22 further reduces the translation stiffness of the flexible support seat 2 in the R-axis direction by connecting the second flexible hinge chain 24, balancing the radial translation of the sensor 100 and blocking thermal energy; similarly, the second flexible hinge chain 24 acts as the dominant one, driving the upper cylinder 21, the first flexible hinge chain 22 and the stiffness adjustment plate 23 to achieve translation relative to the T-axis direction, balancing the circumferential displacement of the sensor 100 and blocking thermal energy; the stiffness adjustment plate 23 acts as the dominant one, driving the upper cylinder 21, the first flexible hinge chain 22 and the second flexible hinge chain 24 to achieve translation relative to the Z-axis direction, thereby balancing the displacement of the sensor 100 relative to the Z-axis direction and blocking thermal energy. The stiffness control hole 26 further reduces the overall stiffness of the flexible support seat 2 and improves the thermal resistance, thereby preventing the heat of the sensor 100 from transferring energy to the micro-motion stage 200 through the flexible support seat 2, and reducing the thermal shock to the micro-motion stage 200. The annular plate-shaped mounting support 1 can evenly bear the stress transmitted by the flexible support seat 2. The hinged beam of the second flexible hinge chain 24 is arranged along the radial direction of the mounting support 1, so the hinged beam of the first flexible hinge chain 22 can be arranged tangentially along the circumference of the mounting support 1. The thermal stresses released by multiple flexible support seats 2 can be dispersed with each other, which is convenient for the mounting support 1 to balance the deformation of the sensor 100, and it is easy to install and position the flexible support seat 2. The overall structure and positioning method of the sensor mounting device are simple, easy to process and easy to install, which reduces the design cost and manufacturing cost and improves production efficiency.

[0045] like Figure 4 FIG. 1 is a schematic diagram of heat conduction of a sensor installation device according to an embodiment of the present invention. The light source is irradiated from above the sensor 100. Figure 4As shown by the arrow in the middle. According to the series-parallel characteristics of thermal resistance, after the sensor mounting device of this embodiment is installed on the micro-motion table 200 and fixedly connected to the sensor 100, the three flexible support seats 2 are equivalent to three parallel thermal resistances, and are connected in series with the thermal resistance of the sensor 100 and the thermal resistance of the mounting support 1. When the thermal resistance of the sensor 100 and the thermal resistance of the mounting support 1 are constant, increasing the thermal resistance of the flexible support seat 2 can reduce the thermal shock to the micro-motion table 200. According to the structural characteristics of the flexible support seat 2, the two ends of the stiffness adjustment plate 23 are respectively connected in series with the first flexible hinge chain 22 and the second flexible hinge chain 24. The equivalent thermal resistance model of the flexible support seat 2 can be approximately simplified to the series-parallel connection of five resistors, such as Figure 5 As shown. Among them, R1 represents the equivalent approximate thermal resistance of the upper cylinder 21, R2 represents the equivalent approximate thermal resistance of the first flexible hinge chain 22, R3 represents the equivalent approximate thermal resistance of the 1 / 4 configuration of the stiffness adjustment plate 23, R4 represents the equivalent approximate thermal resistance of the second flexible hinge chain 24, and R5 represents the equivalent approximate thermal resistance of the support base 25. According to Kirchhoff's law, it can be known that the first-level simplified formula of the thermal resistance of the flexible support base 2 of the embodiment of the present invention is: Combined with the characteristic dimensions of the upper cylinder 21, the first flexible hinge chain 22, the stiffness adjustment plate 23, the second flexible hinge chain 24 and the support base 25, the equivalent approximate thermal resistance of the flexible support base 2 is as follows: Among them, k is the thermal conductivity, λ1 and λ2 represent the aspect ratios of the first flexible hinge chain 22 and the second flexible hinge chain 24, respectively, Δ represents the wall thickness of the upper cylinder 21, B represents the median diameter of the upper cylinder 21 (that is, the average value of the outer diameter and the inner diameter of the upper cylinder 21), H represents the height of the flexible support seat 2, ∑ represents the sum of the heights of the first flexible hinge chain 22, the stiffness adjustment plate 23, and the second flexible hinge chain 24, and t represents the thickness of the stiffness adjustment plate 23. By observing the equivalent approximate thermal resistance of the flexible support seat 2, it can be seen that after the characteristic dimensions of the first flexible hinge chain 22 and the second flexible hinge chain 24 are confirmed, reducing the thickness of the stiffness adjustment plate 23 can increase the thermal resistance of the flexible support seat 2, thereby achieving an improvement in the target performance thermal resistance. Moreover, the flexible support seat 2 of this embodiment is essentially different from the flexible hinge in the known technology in achieving the required stiffness performance and thermal resistance performance. The flexible support seat 2 of this embodiment is based on the overall requirements of stiffness and thermal resistance. The combination of the first flexible hinge chain 22, the stiffness adjustment plate 23 and the second flexible hinge chain 24 meets the stiffness requirements and thermal resistance requirements of the sensor 100 for the installation device. By adjusting the characteristic dimensions of the first flexible hinge chain 22, the stiffness adjustment plate 23 and the second flexible hinge chain 24, the balance of stiffness performance and thermal resistance performance can be achieved. In addition to the consideration of characteristic dimensions, based on the balance requirements of the stiffness performance and thermal resistance performance of the flexible support seat 2, this embodiment does not limit the design of material selection.

[0046] Furthermore, the first flexible hinge chain 22 and the second flexible hinge chain 24 are both straight beam hinge chains, and transition arcs 27 are provided at both ends of the first flexible hinge chain 22 and the second flexible hinge chain 24. The straight beam hinge chain has a right-angle cut, and compared with the flexible hinge with an arc-shaped cut, it can obtain better thermal resistance characteristics and lower translational stiffness under the same weakest size of the support beam. The thermal resistance calculation formula of the flexible hinge is as follows: Where: R is thermal resistance, k is thermal conductivity, b is hinge beam width, h(x) is hinge beam height, and C is arc diameter of the flexible hinge. It is obvious from the above formula that under the same weakest dimension, the straight beam hinge chain with right angle cutout has better thermal resistance than the arc hinge chain with arc cutout. Not only that, the straight beam type first flexible hinge chain 22 and the second flexible hinge chain 24 also make the flexible support seat 2 have lower translational stiffness. The stiffness calculation formula of the flexible hinge is as follows: Where K is the stiffness of the flexible hinge, E is the elastic modulus, b is the hinge beam width, and D is the arc diameter of the hinge beam. When the flexible hinge is a straight beam hinge chain, the above stiffness calculation formula can be simplified to: K = 4Eb (h / D) 3 . It can be seen that the straight beam type first flexible hinge chain 22 and the second flexible hinge chain 24 are easier to optimize parameters during design, reduce design costs, and meet the stiffness requirements and thermal resistance requirements of the sensor mounting device. Preferably, both ends of the first flexible hinge chain 22 and both ends of the second flexible hinge chain 24 are provided with transition arcs 27, which can reduce structural damage caused by stress concentration. Of course, this embodiment adopts a straight beam hinge chain as a preferred solution. In other embodiments, the first flexible hinge chain 22 and the second flexible hinge chain 24 may also adopt flexible hinges of other structures such as arc-shaped flexible hinges, which is not limited in this embodiment.

[0047] Further, the support base 25 includes a lower cylinder 251 and a mounting positioning plate 252, the lower cylinder 251 is coaxially arranged with the upper cylinder 21, the outer diameter of the lower cylinder 251 is equal to the outer diameter of the upper cylinder 21, the two ends of the lower cylinder 251 are respectively fixedly connected to the first flexible hinge chain 22 and the mounting positioning plate 252, and the other end of the mounting positioning plate 252 away from the lower cylinder 251 is configured to abut against the mounting support 1. The lower cylinder 251 can further reduce the rigidity of the flexible support seat 2, and the positioning and installation of the flexible support seat 2 can be easily achieved by installing the positioning plate 252.

[0048] Further, the support base 25 is provided with a first mounting hole 253, the first mounting hole 253 passes through the lower cylinder 251 and the mounting positioning plate 252, the stiffness control hole 26 extends to the lower cylinder 251 and communicates with the first mounting hole 253, and the fastener 28 is threadedly connected to the first mounting hole 253. The fastener 28 can pass through the stiffness control hole 26 and be threadedly connected to the first mounting hole 253. Preferably, the mounting support 1 is also provided with a corresponding threaded connection hole, so that the connection between the flexible support base 2 and the mounting support 1 is realized through the fastener 28.

[0049] Furthermore, the support base 25 is also provided with a first positioning hole 254 and a second positioning hole 255, which are symmetrically arranged on both sides of the lower cylinder 251, and the mounting support 1 is provided with a first positioning pin 11 and a second positioning pin 12, which are inserted into the first positioning hole 254 and the second positioning pin 12 are inserted into the second positioning hole 255. The first positioning pin 11 and the second positioning pin 12 facilitate the position of the flexible support seat 2 to be limited, so that the rotation of the flexible support seat 2 relative to the Z axis is controllable; the first positioning hole 254 and the second positioning hole 255 are symmetrically arranged on both sides of the lower cylinder 251, so that the stress of the flexible support seat 2 can be better balanced.

[0050] Furthermore, the mounting plate 252 is also provided with a positioning boss 2521, which abuts against the mounting support 1, and the length of the positioning boss 2521 extends along the length direction of the mounting plate 252. The mounting surface of the positioning boss 2521 is finely processed, which can provide accurate positioning and installation reference for the flexible support seat 2.

[0051] Furthermore, the first positioning hole 254 is a circular hole, the second positioning hole 255 is a U-shaped hole, and the diameter of the first positioning hole 254 is equal to the U-shaped width of the second positioning hole 255. Accurate positioning can be achieved through the first positioning hole 254, and over-positioning of the flexible support seat 2 can be avoided through the U-shaped hole, thereby releasing the local stress of the flexible support seat 2.

[0052] Furthermore, the mounting support 1 further comprises a positioning mark hole 13. Preferably, the positioning mark hole 13 is arranged in the positive direction of the Y axis of the overall coordinate system, so as to serve as a positioning reference and an installation reference for the overall structure.

[0053] Embodiment 2

[0054] like Figure 9-12As shown, the embodiment of the present invention provides a preferred sensor mounting device, including the mounting support 1 in the first embodiment and at least three flexible support seats 2. In this embodiment, the diameter of the stiffness control hole 26, the outer diameter of the upper cylinder 21, the width of the first flexible hinge chain 22, and the width of the second flexible hinge chain 24 are all necessary dimensions for the stiffness design and thermal resistance design of the flexible support seat 2. In order to ensure that the flexible support seat 2 meets the stiffness and thermal resistance requirements, the important dimensions of the flexible support seat 2 will be defined below. H1 represents the height of the upper cylinder 21, H2 represents the length of the first flexible hinge chain 22, H3 represents the height of the stiffness adjustment plate 23, H4 represents the length of the second flexible hinge chain 24, H5 represents the height of the positioning boss 2521, H6 represents the height of the mounting positioning plate 252, H7 represents the depth of the stiffness control hole 26, and H8 represents the depth of the first mounting hole 253; L1 represents the diameter of the stiffness control hole 26, L2 represents the width of the first flexible hinge chain 22, L3 represents the length of the positioning boss 2521, L4 represents the width of the second flexible hinge chain 24, and L5 represents The diameter of the first positioning hole 254, L6 represents the outer diameter of the upper cylinder 21, L7 represents the distance between the axis of the first positioning hole 254 and the axis of the transition cylindrical surface of the second positioning hole 255, and L8 represents the U-shaped width of the second positioning hole 255. The above parameters are the main characteristic parameters of the flexible support seat 2, among which the diameter L1 of the stiffness control hole 26, the outer diameter L6 of the upper cylinder 21, the width L2 of the first flexible hinge chain 22, and the width L4 of the second flexible hinge chain 24 are all necessary dimensions for the stiffness design and thermal resistance design of the flexible support seat 2. The design control standards of the above parameters are as follows:

[0055] The diameter L5 of the first positioning hole 254 and the U-shaped width L8 of the second positioning hole 255 are nominally equal in size, and the axis of the first positioning hole 254 and the axis of the transition cylindrical surface of the second positioning hole 255 are symmetrical about the plane formed by the R axis and the Z axis of the local coordinate system, which can better balance the deformation displacement of the flexible support seat 2.

[0056] The distance L7 between the axis of the first positioning hole 254 and the axis of the transition cylindrical surface of the second positioning hole 255 is greater than the length L3 of the positioning boss 2521. Therefore, when the fastener 28 is threadedly connected to the first mounting hole 253, the first positioning hole 254 and the second positioning hole 255 do not contact the mounting support 1 to avoid over-positioning.

[0057] The length L3 of the positioning boss 2521 is greater than the outer diameter L6 of the upper cylinder 21. The positioning boss 2521 serves as a precision reference for installation. When the length L3 is greater than the outer diameter L6 of the upper cylinder 21, it can provide more stable support for the upper structure.

[0058] The depth H7 of the stiffness control hole 26 is greater than the sum of the height H1 of the upper cylinder 21, the length H2 of the first flexible hinge chain 22, the height H3 of the stiffness adjustment plate 23, and the length H4 of the second flexible hinge chain 24, that is, the stiffness control hole 26 extends to the lower cylinder 251 after sequentially penetrating the upper cylinder 21, the first flexible hinge chain 22, the stiffness adjustment plate 23, and the second flexible hinge chain 24. The depth of the stiffness control hole 26 can ensure the stiffness characteristics and thermal resistance characteristics of the first flexible hinge chain 22 and the second flexible hinge chain 24. When it extends to the lower cylinder 251, the installation position of the fastener 28 is further lowered to avoid the fastener 28 affecting the stiffness of the second flexible hinge chain 24 and the thermal resistance characteristics of the flexible support seat 2.

[0059] The depth H8 of the first mounting hole 253 is greater than the height H6 of the mounting positioning plate 252, that is, the first mounting hole 253 extends from the mounting positioning plate 252 to the lower cylinder 251, so that the depth H8 of the first mounting hole 253 is greater than the height H6 of the mounting positioning plate 252, and the fastener 28 can connect part of the lower cylinder 251, thereby improving the installation stability of the support base 25.

[0060] The height H5 of the positioning boss 2521 is 0.05 mm to 0.1 mm, which can meet the installation accuracy of the positioning boss 2521 without affecting the supporting strength of the installation positioning plate 252 .

[0061] In the embodiment of the present invention, based on the stiffness requirements and thermal resistance requirements of the flexible support base 2, in order to achieve the above-mentioned design size relationship, the design steps of the flexible support base 2 are as follows:

[0062] 1. Define the initial design values ​​of the outer diameter L6 of the upper cylinder 21 and the diameter L1 of the stiffness control hole 26 under space constraints;

[0063] 2. Under the premise of meeting the fundamental frequency, thermal deformation and thermal resistance design requirements, determine the design values ​​of the length H2 of the first flexible hinge chain 22 and the width L2 of the first flexible hinge chain 22;

[0064] 3. Determine the design values ​​of the length H4 of the second flexible hinge chain 24 and the width L4 of the second flexible hinge chain 24 according to the T-axis stiffness requirements;

[0065] 4. According to the Z-direction stiffness requirement, modify the height H3 of the stiffness adjustment plate 23 used for Z-direction stiffness adjustment;

[0066] 5. Verify the design results. If all design requirements are met, the design is completed; if not, return to steps 1 to 4 and iterate again.

[0067] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A sensor installation device, characterized in that: include: A mounting support (1), wherein the mounting support (1) is configured to be connected to a workbench, and the mounting support (1) is a circular ring plate; At least three flexible support seats (2), the flexible support seats (2) being detachably connected to the mounting support (1), the at least three flexible support seats (2) being evenly spaced along the circumference of the mounting support (1), the flexible support seats (2) being configured to support a sensor (100), and the flexible support seats (2) comprising: A two-dimensional flexible hinge, the two-dimensional flexible hinge comprising a stiffness adjustment plate (23), a first flexible hinge chain (22) and a second flexible hinge chain (24) which are perpendicular to each other, the two ends of the stiffness adjustment plate (23) are respectively fixedly connected to the first flexible hinge chain (22) and the second flexible hinge chain (24), and the hinge beam of the second flexible hinge chain (24) is arranged along the radial direction of the mounting support (1); A support base (25), one end of the support base (25) is fixedly connected to the second flexible hinge chain (24), and the other end abuts against the mounting support (1), and a fastener (28) connects the support base (25) and the mounting support (1); an upper cylinder (21), one end of the upper cylinder (21) being fixedly connected to the first flexible hinge chain (22), and the other end of the upper cylinder (21) being capable of abutting against the sensor (100); and A stiffness control hole (26), wherein the stiffness control hole (26) extends along the axial direction of the flexible support seat (2) and sequentially passes through the upper cylinder (21), the first flexible hinge chain (22), the stiffness adjustment plate (23) and the second flexible hinge chain (24).

2. The sensor mounting device according to claim 1, characterized in that: The first flexible hinge chain (22) and the second flexible hinge chain (24) are both straight beam hinge chains, and transition arcs (27) are provided at both ends of the first flexible hinge chain (22) and both ends of the second flexible hinge chain (24).

3. The sensor mounting device according to claim 1, characterized in that: The height of the upper cylinder (21) is greater than twice the height of the stiffness adjustment plate (23).

4. The sensor mounting device according to claim 1, characterized in that: The support base (25) includes a lower cylinder (251) and a mounting positioning plate (252), wherein the lower cylinder (251) is coaxially arranged with the upper cylinder (21), and the outer diameter of the lower cylinder (251) is equal to the outer diameter of the upper cylinder (21), and the two ends of the lower cylinder (251) are respectively fixedly connected to the first flexible hinge chain (22) and the mounting positioning plate (252), and the other end of the mounting positioning plate (252) away from the lower cylinder (251) is configured to abut against the mounting support (1).

5. The sensor mounting device according to claim 4, characterized in that: The support base (25) is provided with a first mounting hole (253), the first mounting hole (253) passes through the lower cylinder (251) and the mounting positioning plate (252), the stiffness control hole (26) extends to the lower cylinder (251) and is connected to the first mounting hole (253), and the fastener (28) is threadedly connected to the first mounting hole (253).

6. The sensor mounting device according to claim 5, characterized in that: The height of the installation positioning plate (252) is smaller than the depth of the first installation hole (253).

7. The sensor mounting device according to claim 4, characterized in that: The support base (25) is also provided with a first positioning hole (254) and a second positioning hole (255), and the first positioning hole (254) and the second positioning hole (255) are symmetrically arranged on both sides of the lower cylinder (251), and the mounting support (1) is provided with a first positioning pin (11) and a second positioning pin (12), and the first positioning pin (11) is inserted into the first positioning hole (254), and the second positioning pin (12) is inserted into the second positioning hole (255).

8. The sensor mounting device according to claim 7, characterized in that: The mounting positioning plate (252) is also provided with a positioning boss (2521), the positioning boss (2521) abuts against the mounting support (1), the length of the positioning boss (2521) extends along the length direction of the mounting positioning plate (252), and the length of the positioning boss (2521) is greater than the outer diameter of the lower cylinder (251).

9. The sensor mounting device according to claim 8, characterized in that: The first positioning hole (254) is a circular hole, and the second positioning hole (255) is a U-shaped hole. The diameter of the first positioning hole (254) is equal to the U-shaped width of the second positioning hole (255), and the distance between the axis of the first positioning hole (254) and the axis of the transition cylindrical surface of the second positioning hole (255) is greater than the length of the positioning boss (2521).

10. The sensor installation device according to any one of claims 1 to 9, characterized in that: The mounting support (1) further comprises a positioning mark hole (13).

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