Actuator and fluid control device
By employing a polygonal frame and connecting components in the actuator, the gap and opening area are increased, solving the problem of insufficient rigidity in the connecting part, and realizing an actuator design that is easy to miniaturize and has improved reliability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MURATA MFG CO LTD
- Filing Date
- 2021-06-18
- Publication Date
- 2026-06-12
AI Technical Summary
The narrow gap at the connection of existing actuators makes manufacturing difficult, makes it hard to ensure rigidity and makes miniaturization difficult, which may reduce reliability.
The design employs a polygonal frame and multiple connecting components. By placing a central plate and connecting components within the opening of the frame, a larger gap is created to increase the distance between the connecting components and the frame, ensuring the rigidity of the connection. Furthermore, etching is used to create a larger opening area to prevent the width of the connecting components from becoming narrower.
This design enhances the rigidity of the connection without increasing the overall size, facilitates miniaturization, effectively prevents vibration leakage, and improves the reliability of the actuator.
Smart Images
Figure CN115702291B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an actuator having a structure that vibrates a flat plate by means of a driving element such as a piezoelectric element. Background Technology
[0002] Patent Document 1 discloses a pump. The pump of Patent Document 1 includes a vibrating plate, a frame, and a connecting portion. The frame surrounds the vibrating plate and is connected to the outer edge of the vibrating plate via the connecting portion. The portion between the vibrating plate and the frame, excluding the connecting portion, is a gap, and the connecting portion is beam-shaped. Thus, the connecting portion supports the vibrating plate so that it can vibrate relative to the frame. In other words, an actuator is realized through the vibrating plate, the frame, and the connecting portion.
[0003] The connecting part has a first part, a second part, and a third part.
[0004] Part 1 is shaped to extend radially (from the center of the vibrating plate towards the outer side of the vibrating plate). One end of the extension of Part 1 is connected to the outer periphery of the vibrating plate. The other end of the extension of Part 1 is connected to Part 2.
[0005] The second part is a shape that extends along the outer periphery of the vibrating plate. The approximate center of the second part in the direction of extension is connected to the first part, and the two ends in the direction of extension are connected to the frame via the third part that extends radially as described above.
[0006] Patent Document 1: International Publication No. 2012 / 140967
[0007] However, in the existing structure shown in Patent Document 1, the gap is narrow, making manufacturing difficult. If the gap is not properly designed without increasing the pump's size, the width of the second part becomes narrower. Therefore, it is difficult to ensure the required rigidity of the connection, potentially leading to reduced reliability. Summary of the Invention
[0008] Therefore, the object of the present invention is to realize an actuator that can easily ensure the required rigidity of the connection and is easy to miniaturize.
[0009] The actuator of the present invention includes a frame, a first plate, and a plurality of connecting members. The frame has a polygonal opening. The first plate, which is circular, is disposed inside the opening and has a drive body mounted thereon. The plurality of connecting members are disposed between the first plate and the frame inside the opening, connecting the outer peripheral end of the first plate and the frame through a portion of the opening. The connecting members have a first part and a second part. The first part is shaped to extend away from the first plate in a direction away from the first plate, with one end of the extension direction connected to the outer peripheral end and the other end of the extension direction connected to the second part. The second part is shaped to extend in a direction different from the first part. The two ends of the extension direction of the second part are connected to different sides of a plurality of sides of the inner peripheral end of the frame formed by the polygonal opening.
[0010] In this structure, the opening (gap) between the connecting member and the frame can be enlarged without increasing the overall shape. Furthermore, by making the opening (gap) larger, the narrowing of the width of the second part during the formation of the connecting member is prevented.
[0011] According to the present invention, it is possible to realize an actuator that easily ensures the required rigidity of the connection and is easily miniaturized. Attached Figure Description
[0012] Figure 1 This is an exploded perspective view of a fluid control device 10 including the actuator 11 according to the first embodiment.
[0013] Figure 2 (A) is a top view of the actuator 11 according to the first embodiment. Figure 2 (B) is its AA sectional view.
[0014] Figure 3 This is a top view of the actuator of the existing structure.
[0015] Figure 4 This is a top view of the actuator according to the second embodiment.
[0016] Figure 5 This is a top view of the actuator according to the third embodiment.
[0017] Figure 6 This is a top view of the actuator according to the fourth embodiment. Detailed Implementation
[0018] (First Embodiment)
[0019] The actuator and fluid control device according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an exploded perspective view of a fluid control device 10 including the actuator 11 according to the first embodiment. Figure 2(A) is a top view of the actuator 11 according to the first embodiment. Figure 2 (B) is its AA sectional view. Figure 3 This is a top view of the actuator of the existing structure. Figure 2 (A) Figure 3 In the figures, the description of the driving body is omitted. In addition, in order to make it easier to understand the structure of the actuator 11 and the fluid control device 10, the shapes of each structural element are exaggerated, either partially or as a whole.
[0020] (Structure of actuator 11)
[0021] like Figure 1 , Figure 2 (A) Figure 2 As shown in (B), the actuator 11 includes a flat plate member 20 and a drive body 30. The drive body 30 is, for example, a piezoelectric element and is mounted on the flat plate member 20. More specifically, the drive body 30 is mounted on the main surface 201 of the central flat plate 21 of the flat plate member 20, the detailed structure of which will be described later.
[0022] (Structure of flat plate component 20)
[0023] The flat plate component 20 is made of a metal plate or the like and has a main surface 201 and a main surface 202. The flat plate component 20 includes a central flat plate 21, a frame 22, and multiple connecting structural members 23. The central flat plate 21, the frame 22, and the multiple connecting structural members 23 are integrally formed, for example, using a single flat plate.
[0024] The central plate 21 is a plate, and its top view (shape viewed in the thickness direction (z-axis direction)) is circular. As described above, a drive body 30 is mounted on the main surface 201 of the central plate 21. The central plate 21 corresponds to the "first plate" of the present invention.
[0025] The frame 22 is a flat plate, and its top view shape is square. An opening is formed in the frame 22. The opening extends through the flat plate forming the frame 22 in the thickness direction (z-axis direction). When viewed from above, the opening is square. The shape of the opening is similar to the outer shape of the frame 22, and the center of the frame 22 is aligned with the center of the opening. The closest pair of corners C20 of the frame 22 and corners C24 of the opening are in the same direction relative to the center. By providing such an opening, the frame 22 has four inner peripheral ends 221, 222, 223, and 224. Inner peripheral ends 221 and 223 are parallel, inner peripheral ends 222 and 224 are parallel, and inner peripheral ends 221 and 223 are orthogonal to inner peripheral ends 222 and 224. One end of the inner circumferential end 221 is connected to one end of the inner circumferential end 222, the other end of the inner circumferential end 222 is connected to one end of the inner circumferential end 223, the other end of the inner circumferential end 223 is connected to one end of the inner circumferential end 224, and the other end of the inner circumferential end 224 is connected to the other end of the inner circumferential end 221. The connecting portion of the aforementioned inner circumferential ends becomes the corner portion C24 of the aforementioned opening.
[0026] A central plate 21 is disposed inside the opening of the frame 22. At this time, the center of the opening is aligned with the center o21 of the central plate 21. The area of the central plate 21 is smaller than the area of the opening of the frame 22, so even though the central plate 21 is disposed inside the opening of the frame 22, an opening remains between the outer periphery of the central plate 21 and the frame 22.
[0027] Multiple connecting structural members 23 are beam-shaped. These connecting structural members 23 are positioned at the opening between the central plate 21 and the frame. The multiple connecting structural members 23 are spaced apart from each other along the outer perimeter of the central plate 21.
[0028] Through this structure, the central plate 21 is supported by multiple connecting members 23 in a state that allows it to bend and vibrate relative to the frame 22.
[0029] (The more specific structure of connecting structural member 23)
[0030] The multiple connecting members 23 each have a first part 231, a second part 232, and a third part 233. The first part 231 has a shape that extends along the radial direction r. Figure 2 As shown in (B), the radial direction r is from the center o21 of the central plate 21 outward. Part 232 is an arc extending along the outer periphery of the central plate 21. Part 333 is a shape extending along the radial direction r.
[0031] One end of the extension direction of part 231 is connected to the outer peripheral end of the central plate 21. The other end of the extension direction of part 231 is connected to approximately the center of the extension direction of part 232. The two ends of the extension direction of part 232 are connected to different inner peripheral ends via part 233.
[0032] Specifically, one end of one second part 232 is connected to the inner peripheral end 221, and the other end is connected to the inner peripheral end 222. One end of one second part 232 is connected to the inner peripheral end 222, and the other end is connected to the inner peripheral end 223. One end of one second part 232 is connected to the inner peripheral end 223, and the other end is connected to the inner peripheral end 224. One end of one second part 232 is connected to the inner peripheral end 224, and the other end is connected to the inner peripheral end 221.
[0033] According to this structure, multiple connecting members 23 have openings 241 that include a region closer to the central plate 21 than the second part 232 and openings 242 that include a region closer to the frame 22 than the second part 232, thereby connecting the central plate 21 and the frame 22.
[0034] With this structure, the opening 242 is shaped to include the corner C24, achieving an opening area larger than existing structures without increasing the shape of the frame 22. Specifically, as... Figure 3 As shown, in the existing structure's flat plate member 20P, the opening on the side of the frame 22P closer to the second part 232 is an arc shape along the second part 232. In contrast, as... Figure 2 As shown in (B), in the flat plate member 20 of this application, the distance (opening width) w242 between the second part 232 and the corner C24 of the opening is greater than the width w232 of the second part 232. Therefore, the area of the opening 242 of the flat plate member 20 of this application is greater than the area of the opening 242P of the conventional flat plate member 20. Furthermore, in the extending direction of the second part 232, excluding both ends, the separation distance between the second part 232 and the frame 22 is greater than the separation distance between the second part 232 and the frame 22P of the conventional application.
[0035] Therefore, it is easy to form the opening 242, especially when the opening 242 is formed by machining a flat plate, and even more particularly when the opening 242 is formed by etching a metal plate, so that the narrowing of the width of the second part 232 can be suppressed while forming the opening 242. That is, in the existing structure, if the opening 242P is to be reliably formed without changing the shape of the frame 22P in the same way as the structure of the present invention, the width of the second part 232 will be narrowed. However, by forming the opening 242 as in the present invention, the narrowing of the width of the second part 232 can be suppressed.
[0036] Therefore, the flat plate member 20 can easily ensure the rigidity required for the connecting member 23, and miniaturization can be easily achieved. In addition, the rigidity required for the connecting member 23 is, for example, the rigidity that prevents the connecting member 23 from breaking up to a predetermined condition when the fluid control device 10 containing the flat plate member 20 is dropped.
[0037] Furthermore, it is preferable that the width of the opening 241 (the separation distance between the central plate 21 and the second part 232) w241 is the same as the width of the second part 232 w232. This prevents the area of the central plate 21 from becoming smaller and allows the shape of the plate member 20 to be miniaturized as much as possible, and it also allows the opening 241 to be formed more reliably.
[0038] Furthermore, the first portion 231 of each connecting member 23 preferably overlaps with the straight line connecting the center o21 and the corner C24. That is, the multiple connecting members 23 are arranged at equal intervals along the outer periphery of the central plate 21. As a result, the central plate 21 can be supported efficiently relative to the frame 22. In addition, in this structure, the lengths of the third portions 233 connected to both ends of the second portion 232 can be the same. As a result, a support mechanism with good axisymmetry can be realized, which can prevent vibration leakage toward the frame 22 and can support the central plate 21. For example, the vibration displacement of the frame 22 can be suppressed to less than 10% of that of the central plate 21.
[0039] Furthermore, according to this structure, in the second part 232, the distance from the connection point to the first part 231 to one inner peripheral end of the same frame 22 is the same as the distance from the connection point to the first part 231 to one inner peripheral end of the same frame 22. Thus, a support mechanism with good axisymmetry can be achieved, preventing vibration leakage to the frame 22 and supporting the central plate 21. For example, the vibration displacement of the frame 22 can be suppressed to less than 10% of the central plate 21.
[0040] Furthermore, in this structure, the extending direction of the first part 231 is orthogonal to the extending direction of the portion of the second part 232 that connects to the first part 231. Thus, compared to the case where the second part 232 is considered to have the same shape and the first part 231 and the second part 232 are not orthogonal, the shape of the flat plate member 20 can be made smaller.
[0041] Furthermore, in this structure, the second part 232 is shaped along the outer periphery of the central plate 21. Thus, considering the second part 232 to be of the same length, it is possible to make the shape of the plate member 20 smaller than the other shapes.
[0042] (Structure of fluid control device 10)
[0043] like Figure 1As shown, a fluid control device 10 can be constructed by using the actuator 11 configured with the above-described structure. The fluid control device 10 includes the actuator 11, the second plate 40, and the sidewall member 50.
[0044] The second plate 40 is disposed on the main surface 202 side of the central plate 21, frame 22, and connecting member 23 of the actuator 11. The second plate 40 has a plurality of through holes 400. In top view, the plurality of through holes 400 are disposed at a position overlapping with the central plate 21.
[0045] The sidewall member 50 is annular with a hollow portion 500 and is disposed between the plate member 20 and the second plate 40 of the actuator 11. The hollow portion 500 has a shape substantially the same as the opening formed through the inner peripheral end of the frame 22. The sidewall member 50 is connected to the frame 22 and the second plate 40. Thus, the space enclosed by the actuator 11, the sidewall member 50, and the second plate 40 (the hollow portion 500 of the sidewall member 50) becomes a pump chamber. The pump chamber communicates with the external space on the side of the second plate 40 of the fluid control device 10 through a plurality of through holes 400. Furthermore, the pump chamber communicates with the external space on the side of the actuator 11 of the fluid control device 10 through a plurality of openings 241, 242.
[0046] (Second Implementation)
[0047] The actuator and fluid control device according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 4 This is a top view of the actuator according to the second embodiment.
[0048] like Figure 4 As shown, the actuator and fluid control device according to the second embodiment differ in structure from the actuator 11 and fluid control device 10 according to the first embodiment in that the flat plate member 20A is different. Other structures in the actuator and fluid control device according to the second embodiment are the same as those in the actuator 11 and fluid control device 10 according to the first embodiment, and descriptions of the same parts are omitted.
[0049] The flat plate member 20A has multiple connecting members 23A. Each connecting member 23A has a first part 231 and a second part 232. In other words, the multiple connecting members 23A does not have a third part 233. That is, the two ends of the extension direction of the second part 232 are directly connected to different inner peripheral ends of the frame 22.
[0050] According to this structure, the actuator of the second embodiment has the same effect as the actuator 11 of the first embodiment, and can be miniaturized than the actuator 11 of the first embodiment.
[0051] (Third Implementation)
[0052] The actuator and fluid control device according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 5 This is a top view of the actuator according to the third embodiment.
[0053] like Figure 5 As shown, the actuator and fluid control device according to the third embodiment differ in structure from the actuator 11 and fluid control device 10 according to the first embodiment in that the flat plate member 20B is different. Other structures in the actuator and fluid control device according to the third embodiment are the same as those in the actuator 11 and fluid control device 10 according to the first embodiment, and descriptions of the same parts are omitted.
[0054] In the flat plate member 20B, the frame 22B is rectangular, and the opening formed therefrom (the part enclosed by the inner peripheral ends 221, 222, 223, and 224) is also rectangular. Specifically, the length L2 in the direction parallel to the inner peripheral ends 222 and 224 is greater than the length L1 in the direction parallel to the inner peripheral ends 221 and 223.
[0055] With such a structure, the actuator according to the third embodiment can also perform the same function as the actuator 11 according to the first embodiment.
[0056] (Fourth implementation)
[0057] The actuator and fluid control device according to the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 6 This is a top view of the actuator according to the fourth embodiment.
[0058] like Figure 6 As shown, the actuator and fluid control device according to the fourth embodiment differ in structure from the actuator and fluid control device according to the second embodiment in that the flat plate member 20C is different. Other structures in the actuator and fluid control device according to the fourth embodiment are the same as those in the actuator and fluid control device according to the second embodiment; descriptions of identical parts are omitted.
[0059] In the flat plate component 20C, the frame 22C is a regular hexagon, and the opening formed therefrom (the part enclosed by the inner perimeter ends 221, 222, 223, 224, 225, and 226) is also a regular hexagon.
[0060] Three connecting structural members 23C are respectively connected to different inner peripheral ends of the frame 22C. A second part 232 of one connecting structural member 23C is connected to inner peripheral ends 221 and 226. Another second part 232 of one connecting structural member 23C is connected to inner peripheral ends 222 and 223. A third second part 232 of one connecting structural member 23C is connected to inner peripheral ends 224 and 225.
[0061] With this structure, the actuator according to the fourth embodiment can also achieve the same effect as the actuator according to the second embodiment. That is, the frame is not limited to a square, but can also be other regular polygons. In addition, the frame is not limited to a regular polygon, but can also be a polygon. Furthermore, this structure can also be applied to structures in which the corner C20 is chamfered (rounded chamfer).
[0062] Furthermore, in the above embodiment, the connection portions between the central plate 21 and the first part of the connecting structure, the connection portions between the first part and the second part, the connection portions between the second part and the third part, and the connection portions between the third part and the frame are angular in shape. However, these connection portions may also be chamfered.
[0063] Furthermore, the above description shows a structure in which a sidewall member 50 is connected to the main surface 202 side of the frame. However, other fixing members may also be connected to the main surface 201 side of the frame, or both the main surface 202 side and the main surface 201 side may be connected to other fixing members.
[0064] Furthermore, the structures of the above-described embodiments can be appropriately combined to achieve the corresponding effects of each combination.
[0065] Explanation of reference numerals in the attached figures
[0066] 10...Fluid control device; 11...Actuator; 20...Plate member; 20A...Plate member; 20B...Plate member; 20C...Plate member; 21...Central plate; 22, 22B, 22C, 22P...Frame; 23, 23A, 23C...Connecting structural member; 30...Driver; 40...Second plate; 50...Side wall member; 201, 202...Main surface; 221, 222, 223, 224, 225, 226...Inner peripheral end; 231...Part 1; 232...Part 2; 233...Part 3; 241, 242, 242P...Opening; 400...Through hole; 500...Hollow.
Claims
1. An actuator, characterized in that, have: A frame with polygonal openings; A circular first plate, disposed inside the opening, and equipped with a drive unit; and Multiple connecting structural members are disposed between the first plate and the frame inside the opening, with a portion of the opening remaining to connect the outer peripheral end of the first plate to the frame. The connecting component comprises a first part and a second part. The first part is shaped like an extension from the outer peripheral end of the first plate away from the first plate, with one end of the extension direction connected to the outer peripheral end and the other end of the extension direction connected to the second part. The second part is a shape that extends in a different direction than the first part. The two ends of the extension direction of the second part are connected to different sides of the inner periphery of the frame formed by the opening of the polygon. The connecting member also has a third portion extending in a direction different from the second portion. The two ends of the second part extending in the direction of extension are connected to different inner peripheral ends via the third part. The distance between the second part and the corner of the opening is greater than the width of the second part.
2. The actuator according to claim 1, characterized in that, The opening is a regular polygon.
3. The actuator according to claim 2, characterized in that, The regular polygon is a square.
4. The actuator according to any one of claims 1 to 3, characterized in that, The second part is a shape in which the connecting portion connected to the first part extends in a direction orthogonal to the direction of the first part away from the first plate.
5. The actuator according to any one of claims 1 to 3, characterized in that, The second part is a shape that extends along the outer peripheral end.
6. The actuator according to any one of claims 1 to 3, characterized in that, The two ends of the extension direction of the second part are connected to the frame.
7. A fluid control device, characterized in that, have: The actuator according to any one of claims 1 to 6; A second plate, facing the first plate, the connecting member, and the frame, and having a through hole in the portion overlapping the first plate; and A sidewall member, which is connected to the second plate and the frame, and together with the first plate, the connecting member, the frame and the second plate, forms a pump chamber.