Robotic apparatus, system, and method for transporting substrates in electronic device manufacturing

Abstract

An electronic device manufacturing system, robotic apparatus, and related methods are described. The robotic apparatus includes an arm having a medial end and a lateral end, the medial end being configured to rotate about a shoulder axis; a first forearm configured to independently rotate relative to the arm about an elbow axis at the lateral end of the arm; a first wrist member configured to independently rotate relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member includes first and second end effectors. The robotic apparatus further includes a second forearm configured to independently rotate relative to the arm about the elbow axis; a second wrist member configured to independently rotate relative to the second forearm about a second wrist axis, wherein the second wrist member includes third and fourth end effectors. The robotic apparatus further includes a third forearm configured to independently rotate relative to the arm about the elbow axis; and a third wrist member configured to independently rotate relative to the third forearm about a third wrist axis, wherein the third wrist member includes fifth and sixth end effectors.

Description

Technical Field

[0001] The present disclosure relates to electronic device manufacturing, and more particularly to apparatus and methods suitable for transporting multiple substrates within an electronic device manufacturing facility. Background Art

[0002] Conventional electronic device manufacturing systems may include processing chambers and load lock chambers, each chamber containing multiple substrate supports to hold a corresponding number of substrates for simultaneous processing. Such processing chambers may be included in a cluster tool, in which several chambers and load locks are distributed around a transfer chamber. Alternatively, the processing chambers may be included in a linear tool, in which the processing chambers and load locks are distributed around a rectangular transfer chamber.

[0003] Electronic device manufacturing systems may employ robotic equipment in a transfer chamber, configured to transfer substrates between a load lock and a processing chamber. The transfer chamber, processing chamber, and load lock may sometimes operate under vacuum. However, in some configurations of electronic device manufacturing systems, utilizing robotic equipment to transfer substrates between chambers can be inefficient and may involve multiple robotic arm trips between the load lock and processing chamber.

[0004] Therefore, improved robotic apparatus, electronic device manufacturing apparatus, and methods for transferring substrates with improved efficiency are sought. Summary of the Invention

[0005] According to an embodiment, the present invention discloses a robotic device, comprising: an arm comprising an inner end and an outer end, the inner end being configured to rotate about a shoulder axis; a first forearm configured to rotate independently relative to the arm about an elbow axis at the outer end of the arm; a first wrist component configured to rotate independently relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite to the elbow axis, wherein the first wrist component includes a first terminal effector and a second terminal effector; a second forearm configured to rotate independently relative to the arm about the elbow axis; a second wrist component configured to rotate independently relative to the second forearm about the second wrist axis, wherein the second wrist component includes a third terminal effector and a fourth terminal effector; a third forearm configured to rotate independently relative to the arm about the elbow axis; and a third wrist component configured to rotate independently relative to the third forearm about a third wrist axis, wherein the third wrist component includes a fifth terminal effector and a sixth terminal effector.

[0006] In a further embodiment, a robotic device is disclosed herein, comprising: a first arm comprising a first medial end and a first lateral end, the first medial end being configured to rotate about a shoulder axis; a first forearm configured to independently rotate relative to the first arm about a first elbow axis at the lateral end of the first arm; a first wrist member configured to independently rotate relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the first elbow axis, wherein the first wrist member comprises a first end effector and a second end effector; a second arm comprising a second medial end and a second lateral end a lateral end, the second medial end being configured to rotate about a shoulder axis; a second forearm being configured to independently rotate relative to the second arm about a second elbow axis; a second wrist member being configured to independently rotate relative to the second forearm about a second wrist axis, wherein the second wrist member includes a third end effector and a fourth end effector; and a third forearm being configured to independently rotate relative to the first arm about a third elbow axis; and a third wrist member being configured to independently rotate relative to the third forearm about a third wrist axis, wherein the third wrist member includes a fifth end effector and a sixth end effector.

[0007] In yet a further embodiment, disclosed herein is an electronic device manufacturing apparatus comprising: a main frame including a transfer chamber and at least two processing chambers; a first load lock coupled to the main frame; a second load lock coupled to the main frame; and a robotic apparatus configured to transfer substrates between the first load lock, the second load lock and the at least two processing chambers, the robotic apparatus comprising: an arm including an inner end and an outer end, the inner end being configured to rotate about a shoulder axis; a first forearm configured to rotate independently relative to the arm about an elbow axis at the outer end of the arm; and a first wrist member configured to rotate relative to the elbow axis. a first forearm configured at its distal end to independently rotate relative to the first forearm about a first wrist axis, wherein the first wrist component includes a first terminal effector and a second terminal effector; a second forearm configured to independently rotate relative to the arm about an elbow axis; a second wrist component configured to independently rotate relative to the second forearm about a second wrist axis, wherein the second wrist component includes a third terminal effector and a fourth terminal effector; a third forearm configured to independently rotate relative to the arm about the elbow axis; and a third wrist component configured to independently rotate relative to the third forearm about a third wrist axis, wherein the third wrist component includes a fifth terminal effector and a sixth terminal effector.

[0008] Numerous other features are provided according to these and other aspects of the present disclosure. Other features and aspects of the present disclosure will become more apparent from the following detailed description, claims, and accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 A top view of a substrate processing system including a robotic apparatus is shown in accordance with one or more embodiments.

[0010] Figure 2A A top view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments.

[0011] Figure 2B A perspective view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments.

[0012] Figure 2C A side view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments.

[0013] Figure 3A A perspective view of a robotic device including three independently controllable forearms, each forearm having independently controllable dual wrist members, is shown in accordance with one or more embodiments.

[0014] Figure 3B A side view of a robotic device comprising three independently controllable forearms, each forearm having independently controllable dual wrist members, is shown in accordance with one or more embodiments.

[0015] Figure 3C A transmission assembly of a robotic device is shown in accordance with one or more embodiments.

[0016] Figure 3D A transmission assembly of a robotic device is shown in accordance with one or more embodiments.

[0017] Figure 3E A transmission assembly of a robotic device is shown in accordance with one or more embodiments.

[0018] Figure 4A A perspective view of a robotic device including four independently controllable forearms, each forearm having independently controllable dual wrist members, is shown in accordance with one or more embodiments.

[0019] Figure 4B A side view of a robotic device comprising four independently controllable forearms, each forearm having independently controllable dual wrist members, is shown in accordance with one or more embodiments.

[0020] Figure 5A A top view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0021] Figure 5BA perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0022] Figure 5C A side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0023] Figure 5D A perspective view of the underside of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0024] Figure 5E A top view of a robotic device in an extended configuration is shown in accordance with one or more embodiments.

[0025] Figure 6A A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0026] Figure 6B A side view of a robotic device is shown, the robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0027] Figure 6C Shown is a perspective view of the underside of a robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0028] Figure 7A A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0029] Figure 7B A side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0030] Figure 7CShown is a perspective view of the underside of a robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0031] Figure 8A A top view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0032] Figure 8B A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0033] Figure 8C A side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0034] Figure 8D A perspective view of the underside of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member, according to one or more embodiments.

[0035] Figure 9A A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0036] Figure 9B A side view of a robotic device is shown, the robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0037] Figure 9C Shown is a perspective view of the underside of a robotic device including two independently controllable arms, one arm having two independently controllable forearms and one arm having one independently controllable forearm, each forearm having a dual wrist member, according to one or more embodiments.

[0038] Figure 10A A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0039] Figure 10B A side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0040] Figure 10C Shown is a perspective view of the underside of a robotic device including two independently controllable arms, each arm having two independently controllable forearms, each forearm having a dual wrist member, according to one or more embodiments.

[0041] Figure 11 is a flow chart illustrating a method of transferring a substrate to and from a processing chamber in accordance with one or more embodiments.

[0042] Figure 12 is a flow chart illustrating a method of transferring a substrate to and from a processing chamber in accordance with one or more embodiments. DETAILED DESCRIPTION

[0043] Precision and efficiency are sought in transferring substrates between various locations in an electronic device transport system. However, in some systems, transfers between various chambers can become a bottleneck that limits efficiency. In steady state production, it is ideal to keep the process running 100% of the time to achieve maximum utilization. To optimize efficiency, the robot should be configured to exchange processed substrates with unprocessed substrates in as few cycles as possible. Providing a robotic apparatus that can extract, place, and transfer multiple substrates in, for example, one or two cycles (e.g., with only one or less trips to the load lock) can help improve efficiency. In a system that is limited in processing, for example, with an hour-long process, the most efficient sequence is to open the slit valve, unload and reload all substrates, and then close the slit valve, minimizing overhead in the substrate transfer process to maximize productivity. For example, in embodiments, a robot having a dual wrist assembly including two end effectors can unload and reload, for example, four (4) or six (6) substrate chambers in one cycle without having to return to the load lock. The robots can be configured in a "butterfly motion" configuration, where the robot's kinematic behavior enables any one blade to extend and retract independently of the other blades. Such robots can increase process chamber utilization and process tool productivity. Robots according to embodiments herein can be multi-blade robots optimized for high-throughput and multi-substrate processing chambers.

[0044] In conventional electronic device manufacturing systems, the robot does not directly reload the chamber (i.e., in a single load / unload cycle). Instead, the robot performs multiple cycles to unload a complete process chamber of processed substrates and multiple cycles to reload unprocessed substrates into the process chamber. For example, a standard setup is a dual-arm robot that includes two end effectors, one on each arm, each end effector capable of holding one substrate. To empty and refill a quad chamber (i.e., having four substrate supports), the robot removes two processed substrates from the process chamber, moves to a load lock, places the two processed substrates on the load lock, picks up two unprocessed substrates from the load lock (or another load lock), returns to the process chamber, places the two unprocessed substrates on the process chamber, retrieves the remaining two processed substrates from the process chamber, returns to the load lock, places the two processed substrates on the load lock, picks up two more unprocessed substrates, returns to the process chamber, and places the other two unprocessed substrates in the process chamber. Alternatively, each wafer in the chamber can be sequentially swapped with a new wafer retrieved from the load lock during each cycle. In contrast, embodiments described herein provide an electronic device manufacturing system in which a transfer chamber robot has a capacity that is at least one element greater than the processing chamber capacity (or the combined processing chamber capacity of a group of processing chambers). Embodiments enable load / unload sequences to be performed in a single cycle, thereby significantly increasing the throughput of the transfer chamber robot.

[0045] Embodiments described herein relate to a system comprising at least one process chamber, at least one load lock, and a robotic apparatus (also referred to herein as a robotic assembly or simply a robot) for maximizing substrate processing efficiency when transferring substrates between the at least one process chamber and the at least one load lock (or via or pass-through). At least one process chamber may be a multi-substrate process chamber having multiple substrate supports within the chamber and, if present, one or more additional substrate supports within a substrate holding chamber (also known as a "via"). Embodiments described herein also relate to a specific transfer chamber robot that can increase the throughput of a transfer chamber.

[0046] The at least one processing chamber can be of any suitable shape. For example, the at least one processing chamber can be square, linear (e.g., rectangular), radial, a hybrid combination of any of the above, or any other shape known to those skilled in the art. In an embodiment, the at least one processing chamber is of any suitable shape that is kinematically supported by a robotic apparatus, such as a radial horizontal articulated robot (SCARA) having at least four (4) end effectors on a radial main frame (i.e., a transfer chamber) or on a main frame having another shape. For example, in Figure 1 As shown in , the transfer chamber can have a square shape with four equally sized sides (also called facets). Alternatively, the transfer chamber can have a rectangular shape with two approximately parallel facets having a first length and two approximately parallel facets having a second length. The main frame / transfer chamber can also have other numbers of sides / facets, such as 5 sides, 6 sides, 7 sides, 8 sides, etc. The sides can have the same size as each other, or they can have different sizes.

[0047] The robotic apparatus is configured to unload and reload (e.g., exchange, retrieve, and place) a substrate within at least one processing chamber in a single load / unload cycle (i.e., without returning to a load lock or another station to retrieve and / or place a substrate before completely exchanging the substrate within the at least one processing chamber).

[0048] For example, if a multi-substrate processing chamber includes four (4) substrate supports, the robotic apparatus of an embodiment may include at least six (6) end effectors. During transfer, four (4) end effectors may hold unprocessed substrates and two end effectors may be empty. During transfer, the first and second (empty) end effectors may retrieve two processed substrates from the first and second substrate supports within the processing chamber. The third and fourth end effectors may then place the two unprocessed substrates on the first and second substrate supports. The now empty third and fourth end effectors may retrieve the remaining two processed substrates from the third and fourth substrate supports within the processing chamber. Finally, using the fifth and sixth end effectors, the robot may place the two unprocessed substrates on the third and fourth substrate supports. The robot may then move to a load lock and place the four processed substrates in the load lock chamber. Thus, the robot is able to exchange four unprocessed substrates for four processed substrates in a single cycle. Thus, the robot is able to exchange four unprocessed substrates for four processed substrates in a single cycle.

[0049] In an embodiment, a system may include at least one multi-substrate processing chamber containing a plurality of substrate supports that are accessible by a robotic apparatus having a forearm or wrist assembly having a dual end effector. As used herein, the term "dual end effector" refers to a single wrist assembly having two (e.g., identical) end effectors. In an embodiment, a plurality of substrates may be positioned radially within the processing chamber or in a row. The dual end effector is configured to retrieve two substrates from two substrate supports at a time. In an example, the wrist assembly of the robotic apparatus may have a generally horizontally oriented U-shape, wherein a first end effector is located at a first distal end of the U-shape and a second end effector is located at a second distal end of the U-shape. The wrist assembly may be a rigid body, and for each dual wrist assembly, the relative positions of the first end effector and the second end effector may be fixed. In an embodiment, a multi-substrate processing chamber may include four substrate supports arranged in a circular configuration or in two columns (e.g., two rows entered from an opening of the chamber), and the robotic apparatus may include three forearms, each having two end effectors at its distal end. During substrate transfer, four (4) end effectors may hold four (4) unprocessed substrates, and two end effectors are empty. The empty dual end effectors may simultaneously retrieve two processed substrates from two substrate supports. The robotic apparatus then rotates and simultaneously places the two unprocessed substrates on the two empty substrate supports. The now empty end effectors may retrieve the remaining two processed substrates from the other substrate supports. The robotic apparatus may then place the remaining two unprocessed substrates on the empty substrate supports. The exchange of processed and unprocessed substrates is completed in one cycle.

[0050] The systems described herein may include a robotic device having four or more end effectors. As used herein, an end effector (also referred to as a blade) refers to a portion of an arm, forearm, or wrist member configured to hold a substrate, or an attachment to an arm, forearm, or wrist member. Embodiments of the robotic device described herein may include two or more arm members, optionally two or more forearm members, optionally two or more wrist members, and a plurality of end effectors (e.g., at least six) coupled to one or more arm, forearm, or wrist members.

[0051] The system as described herein further includes at least one load lock comprising at least one substrate support. The at least one load lock can be a single-substrate load lock or a multi-substrate load lock. In embodiments, the system can include at least two load locks. One load lock can be designated for loading, while the other load lock can be designated for unloading. In embodiments, both load locks can be configured for both loading and unloading. The productivity of the system can be increased by using at least one multi-substrate load lock, wherein a robotic apparatus having multiple end effectors is configured to simultaneously exchange all substrates between the end effectors and substrate supports within the multi-substrate load lock. For example, the load lock can include multiple substrate supports, and if all substrate supports are empty, the robotic apparatus can be tilted and configured to simultaneously place all substrates on the substrate supports. In embodiments, the robotic apparatus is then positioned by an adjacent multi-substrate load lock to simultaneously retrieve unprocessed substrates from the substrate supports in the adjacent load lock.

[0052] This article will refer to Figure 1-10C Further details and example implementations of various aspects of the illustrated system and robotic device are described.

[0053] Now refer to Figure 1 , provides an example embodiment of an electronic device manufacturing system 100 according to an embodiment of the present disclosure. The electronic device processing system 100 may include a main frame 101, the main frame including a transfer chamber 113 and at least two multiple processing chambers 103. The housing of the main frame 101 includes the transfer chamber 113 therein. The transfer chamber 113 may include a top wall (not shown), a bottom wall (floor) 139, and side walls. In some embodiments, the transfer chamber 113 may be maintained in a vacuum. In the depicted embodiment, such as Figures 2A-10C The robotic device 102 is depicted as being mounted to the bottom wall (floor) 139. However, it may be mounted elsewhere, such as on the top wall (not shown—removed for clarity). As described above, the transfer chamber may be of any suitable shape known to those skilled in the art.

[0054] The processing chambers 103 can be adapted to perform any number of processes on a substrate (not shown). These processes can include deposition, oxidation, nitration, etching, polishing, cleaning, photolithography, metrology, and the like. Other processes can also be performed. Each processing chamber 103 can include at least one substrate support 110. All processing chambers 103 are multi-substrate chambers, each having four (4) substrate supports 110.

[0055] The robotic apparatus 102 may include multiple end effectors (e.g., four, six, or eight as shown) to transfer substrates between the processing chamber 103 and the load locks 109A and 109B. In the illustrated embodiment, the robotic apparatus 102 includes an arm 112. The arm 112 includes two forearms 116A (not shown) and 116B that can rotate independently about the arm 112. Each forearm 116A and 116B includes a corresponding dual wrist assembly 118A (not shown) and 118B. As shown, a single dual wrist assembly 118B may include two wrist limbs, each having a corresponding end effector 120C and 120D attached to the end of the limb to transfer two substrates at a time.

[0056] The system 100 further includes load locks 109A, 109B configured to interface with a factory interface 117 or other system component that can receive substrates from substrate carriers 119 (e.g., Front Opening Unified Pods (FOUPs)), which can dock, for example, at a load port of the factory interface 117. A loading / unloading robot 121 (shown in phantom) can be used to transfer substrates between the substrate carriers 119 and the load locks 109A, 109B. The transfer of substrates can occur in any order or direction. In some embodiments, the loading / unloading robot 121 can be similar to the robotic device 102, but can include mechanisms to allow the robotic device to move laterally in a lateral direction, as indicated by arrow 123. In one embodiment, the robotic device 102 is configured to operate in a vacuum, while the loading / unloading robot 121 may not be configured to operate in a vacuum. Any other suitable robot can be used. As shown, transfer may be performed through a slit valve 111 , and substrates may be retrieved and / or deposited to or from the load locks 109A and 109B.

[0057] Each load lock 109A, 109B includes at least one substrate support 110A, 110B. In embodiments, the load lock 109A may be configured for the robot 102 to retrieve unprocessed substrates loaded from the substrate carrier 119 (i.e., entry) and the load lock 109B may be configured to place processed substrates received from the process chamber 103 (i.e., exit). In embodiments, each load lock 109A, 109B includes a plurality of substrate supports, for example, the same number as the number of process chambers, as shown as four (4). The substrate supports may be vertically tilted so that at least some processed substrates held by the end effectors 118A-118F of the robot 102 can be simultaneously retrieved from or placed on substrate supports 110 in the load locks 109A, 109B by the robot 102.

[0058] exist Figure 1 In the illustrated use case, the robotic apparatus 102 is a double twin blade robot that can sequentially unload and reload substrates from each processing chamber 103. For example, the robot 102 may have two empty end effectors 120C, 120D (for example) carrying two (2) unprocessed substrates on two of the four end effectors 120A-120B. The empty end effectors 120C, 120D retrieve the two processed substrates from the two substrate supports 110 in the first of the processing chambers 103. The robot 102 then rotates the blades and places the two unprocessed substrates onto the empty substrate supports in the first processing chamber 103 using the end effectors 120A, 120B (for example). The robot 102 then retrieves the remaining two processed substrates from the remaining two substrate supports 110 using the empty end effectors 120A, 120B. After retrieving all processed substrates, the robot 102 then returns to the load lock 109A to exchange the processed substrates for unprocessed substrates, two at a time. For example, the robot 102 may place two processed substrates using end effectors 120A, 120B, and then use the same end effectors to retrieve two unprocessed substrates from two substrate supports within the load lock 109A. Using end effectors 120C, 120D, the robot 102 may place two processed substrates on two substrate supports within the load lock, such that two end effectors 120A-120B (for example) hold unprocessed substrates, while two end effectors 120C, 120D (for example) are empty. The robot 102 may then continue to unload / reload the processing chamber 103.

[0059] In some embodiments, Figure 1 In the use case shown, the robotic device 102 may be, for example, a reference Figure 3A-3B 、 Figures 6A-6C 、 Figures 9A-9C The triple double blade robot described, reference Figure 4A-4B 、 Figures 7A-7C 、 Figures 10A-10C The quadruple dual blade robot described, etc., can sequentially unload substrates from and reload substrates to each processing chamber 103. For example, when implemented using a triple dual blade robot, the robot can carry four (4) unprocessed substrates on four of the six end effectors. Two of the end effectors are empty. The empty end effectors can retrieve two processed substrates from the two substrate supports 110 in the first of the processing chambers 103. The robot then rotates the blades and places the two unprocessed substrates on the empty substrate supports in the first processing chamber 103. Using the empty end effectors, the robot then retrieves the remaining two processed substrates from the remaining two substrate supports 110. The robot then rotates and places the two unprocessed substrates on the two empty substrate supports 110. After retrieving all processed substrates, the robot then returns to the load lock 109A to exchange the processed substrates with the unprocessed substrates two at a time. The robot 102 can then continue to unload / reload the processing chambers 103. Using a triple dual-blade robot to exchange substrates within a process chamber having four substrate supports enables the exchange to occur within a single cycle, thereby reducing exchange time and increasing throughput.

[0060] Figure 2A A top view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments. Figure 2B A perspective view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments. Figure 2C A side view of a robotic device including two independently controllable forearms, each with independently rotatable dual wrist members, is shown in accordance with one or more embodiments.

[0061] In an embodiment, the robotic device 200 corresponds to Figure 1 In such embodiments, the robotic apparatus 200 may be configured and adapted to, for example, transfer substrates between various processing chambers 103 and / or exchange substrates at one or more load lock apparatuses 109A, 109B. Figure 1In the illustrated embodiment, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 200 may be used with only one load lock apparatus or with more than two load lock apparatuses.

[0062] The robotic device 200 has an arm 212 that includes an inner end 212i and an outer end 212o. The inner end 212i is configured to be rotated about a shoulder axis 222 by an arm drive motor of a drive motor assembly 226. A drive assembly and transmission components of drive and driven pulleys (e.g., circular or non-circular) are included in the arm 212. The drive assembly can be any suitable pulley transmission assembly known to those skilled in the art. The arm 212 can have a center-to-center length of L1, where the center of the length L1 is the shoulder axis 222 and the outer axis 224 (also known as the elbow axis).

[0063] The robotic device 200 shown in the figure includes two forearms 216A and 216B, which are coupled to the outer end 212o of the arm 212 opposite the inner end 212i. Each forearm 216A and 216B has a center-to-center length L2, wherein the center of the length L2 of the forearm 216A and 216B is the outer axis 224 (also known as the elbow joint of the forearm or the elbow axis of the forearm) and the first wrist axis and the second wrist axis, respectively, corresponding to the axis 228 (i.e., when the robot is in the zero and folded configuration). Each forearm 216A and 216B is independently rotatable about a common axis at the outer axis 224 by the command action of the first drive motor and the second drive motor, respectively. The first drive motor and the second drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver capable of processing control instructions and executing the movements of the forearms 216A and 216B.

[0064] Coupled to each forearm 216A, 216B via a first wrist axis and a second wrist axis, respectively, is an independently rotatable dual wrist member 218A, 218B, each having two legs to which end effectors 220A-220D are attached. Figures 2A-2C In the embodiment shown, each wrist member 218A, 218B has two end effectors 220A, 220B and 220C, 220D, respectively. These end effectors are arranged transversely, which can also be called a butterfly arrangement. Each wrist member 218A, 218B can be independently rotated about the first wrist axis and the second wrist axis respectively by the command of the first drive motor and the second drive motor. When in the state as shown Figure 2A-2CIn the zeroed and folded configuration shown in the illustrated embodiment, the first wrist axis is aligned with the second wrist axis, as indicated by axis 228. The first drive motor and the second drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver capable of processing control instructions and executing the movements of the wrist members 218A, 218B. The wrist members 218A, 218B are configured to rotate about a nominal center or midpoint located midway between each leg, as indicated by axis 228 shown in the illustrated embodiment.

[0065] The nominal centers 225A, 225B of the end effectors 220A-220D are the locations on which the substrate will rest when nominally positioned on each of the end effectors 220A-220D, as shown. The limiting features limit the position of the substrate on the end effectors 220A-220D to within a limited range. In the depicted embodiment, the wrist members 218A, 218B and the end effectors 220A-220D are separate interconnected components. However, it should be understood that in some embodiments, each forearm member and end effector can be integrally formed and constitute a unitary member. In the depicted embodiment, each of the forearm members 216A, 216B can include a corresponding directional adjuster at its end to allow fine directional adjustment of each of the end effectors 220A-220D (e.g., adjustment for sag and / or tilt). The orientation adjuster can use screws and / or shims to adjust the attitude of the end effector.

[0066] As will be apparent, the first forearm 216A is configured to rotate independently relative to the arm 212 about a common axis at an outer axis 224. The first forearm 216A is coupled to a first wrist member 218A at a nominal center corresponding to a first wrist axis, about which the wrist member 218A rotates. The wrist member 218A has two legs, each coupled to a first end effector 220A and a second end effector 220B. In an embodiment, the wrist member 218A is "U"-shaped, with the first wrist axis at the first wrist axis located at the bottom center of the "U," the first end effector 220A located at the first distal end of one arm of the "U," and the second end effector 220B located at the second distal end of the other arm of the "U." The first forearm member 216A can be positioned directly below the second forearm member 216B, with the first and second end effectors 220A, 220B located below the third and fourth end effectors 220C, 220D, respectively. Similarly, the second forearm 216B can be configured to rotate independently relative to the arm 212 about the outer axis 224. The second forearm 216B is coupled to a second wrist member 218B at a nominal center corresponding to the second wrist axis, about which the wrist member 218B rotates. The wrist member 218B has two legs, each coupled to a third end effector 220C and a fourth end effector 220D. In an embodiment, the wrist member 218A is "U" shaped, wherein the first wrist axis at the first wrist axis is located at the bottom center of the "U", and the first end effector 220A is located at a first distal end of one arm of the "U" and the second end effector 220B is located at a second distal end of the other arm of the "U".

[0067] from Figure 2A-2C As can be seen in FIG, when configured in a folded and zeroed configuration (e.g., a vertically stacked configuration), the first and second end effectors 220A, 220B are located directly below the third and fourth end effectors 220C, 220D, respectively. For example, this folded and zeroed configuration is a neutral configuration, and the forearms 216A, 216B can be rotated approximately + / - 170 degrees from this orientation. Figures 2A-2C As further shown, in an embodiment, the first wrist member 218A is positioned above the first forearm 216A and between the first and second forearms 216A, 216B. The second wrist member 218B is positioned below the second forearm 216B and between the first wrist member 218A and the second forearm 216B.

[0068] If the first forearm assembly, consisting of forearm 216A, wrist 218A, and end effectors 220A, 220B, is extended into the processing chamber 103, then the second forearm assembly, consisting of forearm 216B, wrist 218B, and end effectors 220C, 220D, can rotate about shoulder axis 222. Correspondingly, if the second forearm assembly is extended into the processing chamber 103, then the first forearm assembly can rotate about shoulder axis 222.

[0069] Figure 3A and Figure 3B A robot 201 is shown having the same configuration as robot 200, but with an additional forearm 216C, a wrist member 218C, and additional end effectors 220E and 220F. As shown, each wrist member is approximately U-shaped and includes a first wrist axis located at the center of the bottom of the U, a first end effector located at a first distal end of the U, and a second end effector located at a second distal end of the U. The wrist member can be a rigid body, and the relative positions of the first and second end effectors can be fixed for each dual wrist member.

[0070] Robot 201 can correspond to Figure 1 The robot 102 in FIG. 1 is applicable to a multi-substrate processing chamber 103 having four substrate supports, for example. Figure 3A and Figure 3B In the illustrated embodiment, forearm 216C is positioned above forearm 216B and is rotatable about axis 224 via a common axis. Wrist member 218C is positioned below forearm 216C and above forearm 216B and is rotatable about a third wrist axis corresponding to Figure 3A and 3B Axis 228 in the middle. Figure 3B As shown, the spacing between wrist members 218B and 218C (e.g., 30 mm or 100 mm spacing) is greater than the spacing between wrist members 218A and 218B (e.g., 15 mm or 50 mm spacing). In embodiments, the spacing between forearms 216A and 216B can be greater than the spacing between forearms 216B and 216C. In embodiments, the spacing between forearms 216A-216C and wrist members 218A-218E can be the same.

[0071] The load locks 109A and 109B may include a plurality of substrate supports arranged in two vertical columns (e.g., two above two). In one embodiment, the vertical spacing between the end effectors 220A and 220B and the end effectors 220C and 220D is equal to a first vertical spacing, and the vertical spacing between the end effectors 220C and 220D and the end effectors 220E and 220F is equal to a second vertical spacing. The first vertical spacing may be equal to the vertical spacing between the upper and lower load lock supports in the load lock 109A (for example). The second vertical spacing may be equal to the vertical spacing between the upper and lower load lock supports of the second load lock 109B. In one embodiment, the first vertical spacing is less than the second vertical spacing; for example, the second vertical spacing may be approximately twice the first vertical spacing. In one embodiment, the first load lock may be positioned above the second load lock. The first load lock may be configured to receive the end effectors 220A-220D. In an embodiment, the second load lock is configured to receive end effectors 220A, 220B and 220E, 220F, or 220C, 220D and 220E, 220F. In an embodiment, the end effectors 220A, 220B and 220E, 220F are spaced apart to place substrates onto and extract substrates from the upper and lower load lock supports of the second load lock. In an embodiment, the end effectors 220C, 220D and 220E, 220F, and 220A, 220B and 220C, 220D are spaced apart to place substrates onto and extract substrates from the upper and lower load lock supports of the first load lock.

[0072] In further embodiments, the spacing between the wrist members 218B, 218C can be at an active heating pitch (e.g., 30 mm or 100 mm) and the spacing between the first and second wrist members 218A, 218B can be at a passive cooling pitch (e.g., 15 mm or 50 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities, such as active heating, active cooling, or both. The batch load lock apparatus can include the capability to preheat the substrates before transferring them to the processing chamber 103, and can include the capability to cool the substrates after returning them from the processing chamber and transferring them back to the factory interface. For example, using the robot 201, two unprocessed substrates can be simultaneously retrieved from the heater pedestal by two end effectors, such as 220E, 220F, at a spacing of 30 mm or 100 mm. Additionally, two processed substrates can be placed on two cooling pedestals by end effectors 220C, 220D at a spacing of 15 mm or 50 mm. In embodiments, the spacing between the wrist members and the end effectors can be reversed. For example, the spacing between wrist members 218B, 218C may be smaller than the spacing between wrist members 218A and 218B. In an embodiment, the spacing between each of the forearms 216A-216C is the same.

[0073] Figure 3C 2 shows an example embodiment of a drive assembly for rotating the forearms 216A-216C and wrists 218A-218C of the robot 201 according to embodiments herein. Figure 3CAs shown, the transmission assembly for rotating the first forearm 216A includes a first drive pulley 240A and a first driven pulley 242A. The first drive pulley 240A is positioned at the inner end 212i of the arm 212, and the first driven pulley 242A is positioned at the outer end 212o of the arm 212. A pair of belts 244A and 245A wrapped around the first drive pulley 240A and the first driven pulley 242A drive the first driven pulley 242A to rotate about a common shaft 246 along with the first forearm 216A attached to the first driven pulley 242A. The second forearm 216B is coupled to the common shaft 246 and can be rotated about the axis 224 and the shaft 246 via a second transmission assembly having a second drive pulley 240B and a second driven pulley 242B. A second drive pulley 240B is located at the inner end 212i of the arm 212, and a second driven pulley 242B is located at the outer end 212o of the arm 212. The second drive pulley 240B and the second driven pulley 242B are located above the first drive pulley 240A and the first driven pulley 242A, respectively. A pair of belts 244B and 245B wrapped around the second drive pulley 240B and the second driven pulley 242B drive the second driven pulley 242B to rotate about a common shaft 246 along with the second forearm 216B attached to the second driven pulley 242B. The third forearm 216C is coupled to the common shaft 246 and can rotate about the axis 224 and the shaft 246 via a third transmission assembly having the third drive pulley 240C and the third driven pulley 242C. A third driving pulley 240C is located at the inner end 212i of the arm 212, and a third driven pulley 242C is located at the outer end 212o of the arm 212. The third driving pulley 240C and the third driven pulley 242C are located above the second driving pulley 240B and the second driven pulley 242B. A pair of belts 244C and 245C wrapped around the third driving pulley 240C and the third driven pulley 242C drive the third driven pulley 242C to rotate about a common axis 246 together with the third forearm 216C attached to the third driven pulley 242C.

[0074] like Figure 3CAs shown, the transmission assembly for rotating the first wrist member 218A includes a first drive pulley 247A and a first driven pulley 248A. The first drive pulley 247A is located at the outboard end 212o of the arm 212, and the first driven pulley 248A is located at the rotation axis 228. A pair of belts 250A and 252A wrapped around the first drive pulley 247A and the first driven pulley 248A drive the first driven pulley 248A to rotate about the axis 228 along with the first wrist member 218A attached to the first driven pulley 248A. The first driven pulley 248A includes a pair of bearings 254A and 254B to facilitate rotation of the first driven pulley 248A. The rotation of the second wrist member 218B involves the second drive pulley 247B and the second driven pulley 248B. A second drive pulley 247B is located at the outboard end 212o of the arm 212, and a second driven pulley 248B is located at the rotation axis 228. A pair of belts 250B and 252B wrapped around the second drive pulley 247B and the second driven pulley 248B drive the second driven pulley 248B to rotate about the axis 228 along with the second wrist member 218B attached to the second driven pulley 248B. The second driven pulley 248B includes a pair of bearings 254C and 254D to facilitate rotation of the second driven pulley 248B. The third wrist member 218C includes a third drive pulley 247C and a third driven pulley 248C. The third drive pulley 247C is located at the outboard end 212o of the arm 212, and the third driven pulley 248C is located at the rotation axis 228. A pair of belts 250C, 252C wrapped around the third drive pulley 247C and the third driven pulley 248C drives the third driven pulley 248C to rotate along with the third wrist member 218C attached to the third driven pulley 248C about the axis 228. The third driven pulley 248C includes a pair of bearings 254E, 254F to facilitate rotation of the third driven pulley 248C.

[0075] An alternative embodiment of a transmission assembly 300 for a robot having three forearms 216A-216C and equally spaced corresponding wrist members 218A-218C is shown in FIG. Figure 3D As shown in the embodiment shown in the figure, the spacing between the first wrist member 218A and the second wrist member 218B is the same as the spacing between the second wrist member 218B and the third wrist member 218C. The forearms 216A-216C and the wrist members 218A-218C are rotated by the pulley drive assembly, as shown in FIG. Figure 3C Just as described.

[0076] An alternative embodiment of a transmission assembly 301 for a robot having three forearms 216A-216C and corresponding wrist members 218A-218C is shown in FIG. Figure 3EAs shown in the embodiment shown in the figure, the distance between the first wrist member 218A and the second wrist member 218B is greater than the distance between the second wrist member 218B and the third wrist member 218C. The forearms 216A-216C and the wrist members 218A-218C are rotated by the pulley drive assembly, as shown in FIG. Figure 3C Just as described.

[0077] Figure 4A and 4B A robot 202 is shown having the same configuration as the robot 201, but with an additional forearm 216D, a wrist member 218D, and additional end effectors 220G, 220H. The robot 202 may correspond to Figure 1 The robot 102 in FIG. 1 is applicable to a multi-substrate processing chamber 103 having, for example, four to six substrate supports. Figure 4A and Figure 4B In the illustrated embodiment, the fourth forearm 216D is positioned above the third forearm 216C and is rotatable about axis 224 via a common axis. The fourth wrist member 218D is positioned below the forearm 216D and above the third wrist member 218C and is rotatable about a fourth wrist axis, which corresponds to axis 228 in the illustrated embodiment, via a fourth wrist axis. Figure 4B As shown, the spacing between the third and fourth wrist members 218C, 218D is smaller than the spacing between the second and third wrist members 218B, 218C. Similarly, the spacing between the third and fourth forearms 216C, 216D is larger than the spacing between the second and third forearms 216B, 216C. In an embodiment, the spacing between the first and second wrist members 218A, 218B is the same as the spacing between the third and fourth wrist members 218C, 218D. In an embodiment, the spacing between the forearms 216A-216C and the wrist members 218A-218C can be the same.

[0078] As about Figure 3A and 3BAs described with reference to the robot 201 in FIG. 1 , the end effectors 220C, 220D and 220G, 220H may have a different spacing than the end effectors 220A, 220B, 220E, 220F and may be configured to retrieve heated or cooled substrates. In an embodiment, the robot 202 may be configured to simultaneously retrieve four (4) unprocessed substrates from four (4) substrate supports in the load lock 109A using the end effectors 220A-220D at a first spacing. Alternatively, the robot may simultaneously retrieve two (2) substrates and then raise or lower in the Z direction (i.e., up or down) to retrieve two additional substrates through the slit valve. The robot 202 may then move to the processing chamber to retrieve processed substrates using the end effectors 220E-220H at a second spacing and place four unprocessed substrates on empty substrate supports using the end effectors 220A-220D.

[0079] The robot 202 is suitable for use in a multi-substrate processing chamber, for example, having two (2) to six (6) substrate supports. Figure 1In the illustrated use case, the quadruple dual blade robot 202 can sequentially unload and reload substrates from a processing chamber 103 having four (4) substrate supports as shown, or a processing chamber having six (6) substrate supports (not shown). For example, for a processing chamber having six (6) substrate supports, the robot 202 has two empty end effectors 220G, 220H (for example) carrying six (6) unprocessed substrates on six (6) of the eight (8) end effectors 220A-220F (for example). The empty end effectors 220G, 220H retrieve two processed substrates from the two substrate supports in the first of the processing chambers. The robot 202 then rotates the blades and places the two unprocessed substrates on the empty substrate supports in the first of the processing chambers using the end effectors 220A, 220B (for example). Using the empty end effectors 220A, 220B, the robot 202 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 220C, 220D. Using the empty end effectors 220C, 220D, the robot 202 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 220E, 220F. The robot 202 then returns to the load lock 109A to exchange the processed substrates for the unprocessed substrates two at a time. Using the empty end effectors 220E, 220F (for example), the robot 202 can retrieve two unprocessed substrates from two substrate supports within the load lock 109A and place two processed substrates on the empty substrate supports. The robot 202 may continue to exchange unprocessed substrates with processed substrates two at a time until six end effectors 220A, 220B, 220E-220H (for example) hold unprocessed substrates and two end effectors 220C, 220D (for example) are empty. The robot 202 may then continue to unload / reload the process chamber.

[0080] Figure 5A A top view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 5B A perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 5CA side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 5D A perspective view of the underside of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 5E A top view of a robotic device in an extended configuration is shown in accordance with one or more embodiments.

[0081] In an embodiment, the robotic device 500 corresponds to Figure 1 In such embodiments, the robotic apparatus 500 may be configured and adapted to, for example, transfer substrates between various processing chambers 103 and / or exchange substrates at one or more load lock apparatuses 109A, 109B. Figure 1 In the illustrated embodiment, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 500 may be used with only one load lock apparatus, or with more than two load lock apparatuses.

[0082] The robotic device 500 has a first arm 512A and a second arm 512B, each including an inner end 512Ai, 512Bi and an outer end 512Ao, 512Bo, respectively. The inner ends 512Ai, 512Bi are configured to be rotated about the shoulder axis 522 by an arm drive motor of a drive motor assembly 526. A drive assembly and transmission components of drive and driven pulleys (e.g., circular or non-circular) are included in the arms 512A, 512B. Each arm 512A, 512B can have a center-to-center length L1, where the center of the length L1 is the shoulder axis 522 and the outer axes 524A, 524B.

[0083] As shown, the robotic device 500 includes two forearms 516A, 516B, which are coupled to the outer ends 512Ao, 512Bo of the arms 512A, 512B opposite the inner ends 512Ai, 512Bi. Each set of forearms 516A, 516B has a center-to-center length L2, wherein the center of the length L2 of the forearms 516A, 516B is the outer axis 524A, 524B (also known as the elbow joint of the forearm) and the axis 528 (also known as the wrist axis of each wrist member). Each forearm 516A, 516B is independently rotatable about the corresponding outer axis 524A, 524B by the command action of the first forearm drive motor and the second forearm drive motor. The first drive motor and the second drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver capable of processing control instructions and executing the movements of the forearms 516A, 516B.

[0084] Coupled to each forearm 516A, 516B is an independently rotatable dual wrist member 518A, 518B, each having two legs to which end effectors 520A-520D are attached. In an embodiment, the wrist members 518A, 518B are "U" shaped, with the first and second wrist axes at the respective first and second wrist axes located at the bottom center of the "U", and the first end effector 520A, 520C located at the first distal end of one arm of the "U" and the second end effector 520B, 520D located at the second distal end of the other arm of the "U". Figures 5A-5E As shown in the illustrated embodiment, each wrist member 518A, 518B has two end effectors 520A, 520B and 520C, 520D, respectively, in a butterfly configuration. Each wrist member 518A, 518B can be independently rotated about a first wrist axis and a second wrist axis, respectively, via commanded action of a first wrist drive motor and a second wrist drive motor, respectively. In the illustrated embodiment, when the robot 500 is in the zero and folded configuration, the first wrist axis is located below the second wrist axis. The first wrist axis and the second wrist axis are aligned at axis 528, as shown in FIG. Figure 5B As shown. The first wrist drive motor and the second wrist drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver capable of processing control instructions and executing the movements of the wrist members 518A, 518B. The wrist members 518A, 518B are configured to rotate about a nominal center at an axis 528 located midway between each leg.

[0085] The nominal centers 525A, 525B of the end effectors 520A-520D are the locations on which the substrate will rest when nominally positioned on each of the end effectors, as shown. The restriction features restrict the position of the substrate on the end effectors 520A-520D to within a restricted range. In the depicted embodiment, the wrist members 518A, 518B and the end effectors 520A-520D are separate interconnected components. However, it should be understood that in some embodiments, each forearm member and the end effector can be integrally formed and constitute a unitary member. In the depicted embodiment, each of the forearm members 516A, 516B can include a corresponding directional adjuster at its end to allow fine directional adjustment of each of the end effectors 520A-520D (e.g., for droop and / or tilt adjustment). The directional adjuster can use screws and / or shims to adjust the attitude of the end effector.

[0086] As will be apparent, the first forearm 516A is configured to independently rotate relative to the arm 512A about an outer axis 524A. The first forearm 516A is coupled to a first wrist member 518A at a nominal center corresponding to a first wrist axis, about which the wrist member 518A rotates. The wrist member 518A has two legs, each coupled to a first end effector 520A and a second end effector 520B. The first forearm member 516A can be positioned directly below the second forearm member 516B, with the first and second end effectors 520A, 520B respectively positioned below the third and fourth end effectors 520C, 520D. Similarly, the second forearm 516B can be configured to independently rotate relative to the arm 512B about an outer axis 524B. The second forearm 516B is coupled to a second wrist member 518B at a nominal center corresponding to a second wrist axis, about which the wrist member 518B rotates. The wrist member 518B has two legs, each coupled to a third end effector 520C and a fourth end effector 520D.

[0087] from Figures 5A-5E As can be seen in FIG, when configured in a folded and zeroed configuration (e.g., a vertically stacked configuration), the first and second end effectors 520A, 520B are positioned directly below the third and fourth end effectors 520C, 520D, respectively, as shown. In the zeroed, folded configuration, the forearms 516A, 516B are angled approximately 45° about axis 528, and in the zeroed, folded configuration, the arms 512A, 512B are also angled approximately 45° about axis 522. For example, this folded and zeroed configuration is a neutral configuration, and the forearms 516A, 516B can be rotated approximately + / - 170 degrees from this orientation. Figures 5A-5EAs further shown, in an embodiment, the first wrist member 518A is positioned above the first forearm 516A and below the second forearm 516B. The second wrist member 518B is positioned below the second forearm 516B and above the first wrist member 518A.

[0088] exist Figure 1 In the illustrated use case, the robot 500 can sequentially unload substrates from a process chamber 103 or a process chamber containing two (2) substrates and reload substrates from the process chamber. For example, the robot 500 has two empty end effectors 520C, 520D (for example) carrying two (2) unprocessed substrates on two of the four end effectors 520A, 520B (for example). The empty end effectors 520C, 520D retrieve the two processed substrates from the two substrate supports 110 in the first of the process chambers. The robot 500 then uses the end effectors 520A, 520B (for example) to place the two unprocessed substrates on the empty substrate supports in the first process chamber. The robot 500 can then return to the load lock 109A to exchange the processed substrates with the unprocessed substrates two at a time. Using the empty end effectors 520A, 520B (for example), the robot 500 can retrieve two unprocessed substrates from two substrate supports within the load lock 109A and place two processed substrates on the empty substrate supports using the end effectors 520C, 520D. The robot 500 can then continue to unload / reload the processing chamber.

[0089] Figures 6A-6C A robot 501 is shown having the same configuration as the robot 500, but with an additional arm 512C, a forearm 516C, a wrist member 518C, and connected end effectors 520E, 520F. As shown, each wrist member is approximately U-shaped and includes a first wrist axis located at the center of the bottom of the U-shape, a first end effector located at a first distal end of the U-shape, and a second end effector located at a second distal end of the U-shape. The wrist member may be a rigid body, and for each dual wrist member, the relative positions of the first end effector and the second end effector may be fixed. The robot 501 may correspond to Figure 1 The robot 102 in FIG. 1 is applicable to a multi-substrate processing chamber 103 having four substrate supports, for example. Figures 6A-6CIn the illustrated embodiment, a third arm 512C is positioned directly above the first arm 512A, with each arm 512A, 512C having its own transmission assembly to control independent rotation of the arms about a common axis at axis 522. In an embodiment, the first and third arms 512A, 512C together are twice as thick as the second arm 512B. A third forearm 516C is positioned above the first forearm 516A and is rotatable about axis 524A via a common axis with the forearm 516A. A third wrist member 518C is positioned below the forearm 516C and between the forearms 516A and 516C.

[0090] like Figure 6B As shown, the spacing between the second and third wrist members 518B, 518C (e.g., 30 mm or 100 mm spacing) is greater than the spacing between the first and third wrist members 518A, 518C (e.g., 15 mm or 50 mm spacing). Similarly, the spacing between the first and third forearms 516A, 516C is greater than the spacing between the second and third forearms 516B, 516C. In an embodiment, the spacing between the forearms 516A-516C and the wrist members 518A-518C can be the same.

[0091] In further embodiments, the spacing between wrist members 518B, 518C can be at an active heating pitch (e.g., 30 mm or 100 mm) and the spacing between wrist members 518A, 518B can be at a passive cooling pitch (e.g., 15 mm or 50 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities, such as active heating, active cooling, or both. The batch load lock apparatus can include the ability to preheat substrates before transferring them to the processing chamber 103, and can include the ability to cool the substrates after returning them from the processing chamber and transferring them back to the factory interface. For example, using robot 501, two unprocessed substrates can be retrieved simultaneously from the heater pedestal by two end effectors, such as 520E, 520F, at a spacing of 30 mm or 100 mm. Additionally, two processed substrates can be placed on two cooling pedestals by end effectors 520C, 520D at a spacing of 15 mm or 50 mm.

[0092] In yet further embodiments, the spacing between the second and third wrist members 518B, 518C can be at an active heating pitch (e.g., 30 mm or 100 mm) and the spacing between the first and third wrist members 518A, 518C can be at a passive cooling pitch (e.g., 15 mm or 50 mm). For example, using the robot 501, two unprocessed substrates can be simultaneously retrieved from the heater pedestal by two end effectors, such as 520C, 520D, at a spacing of 30 mm or 100 mm. Additionally, two processed substrates can be placed on two cooling pedestals by end effectors 520E, 520F at a spacing of 15 mm or 50 mm.

[0093] In embodiments, the spacing between the wrist members and the end effectors can be reversed. For example, the spacing between wrist members 518B and 518C can be smaller than the spacing between wrist members 518A and 518B. Correspondingly, the spacing between forearms 516B and 516C can be larger than the spacing between forearms 516A and 516B.

[0094] Figures 7A-7C A robot 502 is shown having the same configuration as robot 501, but with an additional forearm 516D, wrist member 518D, and attached end effectors 520G, 520H. Robot 502 may correspond to Figure 1 The robot 102 in FIG. 1 and is applicable to a robot having Figure 1 The four substrates shown or the multi-substrate processing chamber 103 having two to six substrates. Figures 7A-7C In the illustrated embodiment, the fourth forearm 516D is positioned below the second forearm 516B and is rotatable about the axis 524B via a common axis with the second forearm 516B. The fourth wrist member 518D is positioned above the fourth forearm 516D and below the second wrist member 518B. Figure 7B As shown, the spacing between the third and fourth wrist members 518C, 518D is greater than the spacing between the first and third wrist members 518A, 518C and the second and fourth wrist members 518B, 518D. Similarly, the spacing between the third and fourth forearms 516C, 516D is greater than the spacing between the first and third forearms 516A, 516C and the spacing between the second and fourth forearms 516B, 516D. In an embodiment, the spacing between the first and third wrist members 518A, 518C is the same as the spacing between the second and fourth wrist members 518B, 518D. In an embodiment, the spacing between the forearms 516A-516D and the wrist members 518A-518D can be the same.

[0095] As about Figures 6A-6CAs described with reference to the robot 501 in FIG. 1 , the end effectors 520A, 520B, 520E, 520F may have a different spacing than the end effectors 520C, 520D, 520G, 520H and may be configured to retrieve heated or cooled substrates. In an embodiment, the robot 502 may be configured to simultaneously retrieve four (4) unprocessed substrates from four (4) substrate supports in the load lock 109A using the end effectors 520A, 520B, 520E, 520F at a first spacing. Alternatively, the robot may simultaneously retrieve two (2) substrates through the slit valve and then be raised or lowered in the Z direction (i.e., up or down) to retrieve two additional substrates through the slit valve. The robot 502 may then move to the processing chamber to retrieve the processed substrate at a second spacing using the end effectors 520C, 520D, 520G, 520H and place four unprocessed substrates on empty substrate supports using the end effectors 520A-520D.

[0096] The robot 502 is suitable for use in a multi-substrate processing chamber, for example, having two (2) to six (6) substrate supports. Figure 1In the illustrated use case, the quadruple dual blade robot 502 can sequentially unload substrates from a process chamber 103 having four (4) substrate supports as shown, or a process chamber having six (6) substrate supports (not shown), and reload substrates to the process chamber. For example, in the use case where the process chamber has six (6) substrate supports, the robot 502 has two empty end effectors 520C, 520D (for example) carrying six (6) unprocessed substrates on six (6) end effectors 520A, 520B, 520E-520H (for example) of the eight (8) end effectors. The empty end effectors 520C, 520D retrieve two processed substrates from the two substrate supports in the first of the process chambers. The robot 502 then rotates the blades and places the two unprocessed substrates on the empty substrate supports in the first of the process chambers using the end effectors 520A, 520B (for example). Using the empty end effectors 520A, 520B, the robot 502 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 520E, 520F. Using the empty end effectors 520E, 520F, the robot 502 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 520G, 520H. The robot 502 then returns to the load lock 109A to exchange the processed substrates for the unprocessed substrates two at a time. Using the empty end effectors 520G, 520H (for example), the robot 502 can retrieve two unprocessed substrates from two substrate supports within the load lock 109A and place two processed substrates on the empty substrate supports. The robot 502 may continue to exchange unprocessed substrates with processed substrates two at a time until six end effectors 520C-520H (for example) hold unprocessed substrates and two end effectors 520A, 520B (for example) are empty. The robot 502 may then continue to unload / reload the process chamber.

[0097] Figure 8A A top view of a robotic device according to one or more embodiments is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm, and each forearm having a dual wrist member. As shown, each wrist member is approximately U-shaped and includes a first wrist axis located at the center of the bottom of the U, a first end effector located at a first distal end of the U, and a second end effector located at a second distal end of the U. The wrist member can be a rigid body, and the relative positions of the first and second end effectors can be fixed for each dual wrist member. Figure 8BA perspective view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 8C A side view of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments. Figure 8D A perspective view of the underside of a robotic device is shown, the robotic device including two independently controllable arms, each arm having an independently controllable forearm and each forearm having a dual wrist member, according to one or more embodiments.

[0098] In an embodiment, the robotic device 800 corresponds to Figure 1 In such embodiments, the robotic apparatus 800 may be configured and adapted to transfer substrates between the various processing chambers 103 and / or exchange substrates at one or more load lock apparatuses 109A, 109B. Figure 1 In the illustrated embodiment, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 800 may be used with only one load lock apparatus, or with more than two load lock apparatuses.

[0099] The robotic device 800 has a first arm 812A and a second arm 812B, each including an inner end 812Ai, 812Bi and an outer end 812Ao, 812Bo, respectively. The inner ends 812Ai, 812Bi are configured to be rotated about the shoulder axis 822 by an arm drive motor of a drive motor assembly 826. Drive assemblies and transmission components of drive and driven pulleys (e.g., circular and non-circular) are included in the arms 812A, 812B. Each arm 812A, 812B can have a center-to-center length L1, where the center of the length L1 is the shoulder axis 822 and the outer axis 824B, 824B.

[0100] As shown, the robotic device 800 includes two forearms 816A, 816B, which are coupled to the outer ends 812Ao, 812Bo of the arms 812A, 812B opposite the inner ends 812Ai, 812Bi. Each forearm 816A, 816B has a center-to-center length L2, wherein the center of the length L2 is the outer axis 824A, 824B (also known as the elbow joint of the forearm) and the axis 828A, 828B (also known as the wrist joint). Each forearm 816A, 816B is independently rotatable around the corresponding outer axis 824A, 824B by the command action of the first forearm drive motor and the second forearm drive motor. The first forearm drive motor and the second forearm drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver that can process control instructions and execute the movement of the forearms 816A, 816B.

[0101] Coupled to each forearm 816A, 816B is an independently rotatable dual wrist member 818A, 818B, respectively, each having two legs to which end effectors 820A-820D are attached. Figures 8A-8D In the illustrated embodiment, each wrist member 818A, 818B has two end effectors 820A, 820B and 820C, 820D, respectively, in a butterfly configuration. Each wrist member 818A, 818B can be independently rotated about an axis 828A, 828B by command of a first wrist drive motor and a second wrist drive motor, respectively. As shown, each forearm 816A, 816B is asymmetrically coupled to each wrist member 818A, 818B at its respective rotation axis 828A, 828B. The first wrist drive motor and the second wrist drive motor are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronic device, and / or driver capable of processing control instructions and executing the movements of the wrist members 818A, 818B. The wrist members 818A, 818B are configured to rotate about a nominal center at the axis 828A, 828B located midway between each leg.

[0102] The nominal centers 825A, 825B of the end effectors 820A-820D are the locations on which the substrate will rest when nominally positioned on each end effector, as shown. The restriction features restrict the position of the substrate on the end effectors 820A-820D to within a restricted range. In the depicted embodiment, the wrist members 818A, 818B and the end effectors 820A-820D are separate interconnected components. However, it should be understood that in some embodiments, each forearm member and the end effector can be integrally formed and constitute a unitary member. In the depicted embodiment, each of the forearm members 816A, 816B can include a corresponding directional adjuster at its end to allow fine directional adjustment of each of the end effectors 820A-820D (e.g., for droop and / or tilt). The directional adjuster can use screws and / or shims to achieve adjustment of the end effector's posture.

[0103] As will be apparent, the first forearm 816A is configured to rotate independently relative to the arm 812A about an outer axis 824A. The first forearm 816A is coupled to the first wrist member 818A at a location corresponding to axis 828A offset from the nominal center of the wrist member 818A, and the wrist member 818A rotates about axis 828A. The wrist member 818A has two legs, each coupled to a first end effector 820A and a second end effector 820B. The first arm 812A can be positioned above the second arm 812B. The first forearm member 816A can be positioned above the first arm 812A. The second forearm 816B can be configured to rotate independently relative to the arm 812B about the outer axis 824B. The second forearm 816B is coupled to the second wrist member 818B at a location corresponding to axis 828B offset from the nominal center of the wrist member 818B, and the wrist member 818B rotates about axis 828B. The wrist member 818B has two legs, each coupled to a third end effector 820C and a fourth end effector 820D. The second forearm member 816B can be positioned above the second arm 812B and below the first forearm 816A. The first wrist member 818A and the first and second end effectors 820A, 820B are positioned above the second wrist member 818B and the third and fourth end effectors 820C, 820D.

[0104] from Figures 8A-8DAs can be seen in FIG, when configured in a folded and zeroed configuration (e.g., a vertically stacked configuration), the first and second end effectors 820A, 820B are positioned directly above the third and fourth end effectors 820C, 820D, respectively, as shown. When in the zeroed, folded configuration, the forearms 816A, 816B are acutely angled relative to the arms 812A, 812B about the axes 824A, 824B. For example, this zeroed and folded configuration is a neutral configuration, and the forearms 816A, 816B can be rotated approximately + / - 170 degrees from this orientation. Figures 8A-8D As further shown, in an embodiment, the first wrist member 818A is positioned below the first forearm 816A and above the second wrist member 818B. The second wrist member 818B is positioned above the second forearm 816B.

[0105] exist Figure 1 In the illustrated use case, the robot 800 can sequentially unload substrates from a processing chamber 103 or a processing chamber containing two (2) substrates and reload substrates into the processing chamber. For example, the robot 800 has two empty end effectors 820C, 820D (for example) carrying two (2) unprocessed substrates on two of the four end effectors 820A, 820B (for example). The empty end effectors 820C, 820D retrieve the two processed substrates from the two substrate supports 110 in the first of the processing chambers. The robot 800 then uses the end effectors 820A, 820B (for example) to place the two unprocessed substrates on the empty substrate supports in the first processing chamber. The robot 800 can then return to the load lock 109A to exchange the processed substrates with the unprocessed substrates two at a time. Using the empty end effectors 820A, 820B (for example), the robot 800 can retrieve two unprocessed substrates from two substrate supports within the load lock 109A and place two processed substrates on the empty substrate supports using the end effectors 820C, 820D. The robot 800 can then continue to unload / reload the processing chamber.

[0106] Figures 9A-9C A robot 801 is shown having the same configuration as robot 800, but with an additional arm 812C, a forearm 816C, a wrist member 818C, and connected end effectors 820E, 820F. The robot 801 may correspond to Figure 1 The robot 102 in FIG. 1 is applicable to a multi-substrate processing chamber 103 having four substrate supports, for example. Figures 9A-9CIn the illustrated embodiment, arm 812C is positioned directly above arm 812A, with each arm 812A, 812C having its own transmission assembly to control independent rotation of the arms about a common axis at axis 822. In an embodiment, arms 812B, 812C together are twice the thickness of arm 812B. Forearm 816C is positioned above forearm 816B and is in the same plane or height as forearm 816A. This configuration may be more compact than a configuration in which the forearms are in different planes. Forearm 816C can rotate about axis 824B via an axis common to forearm 816B. Wrist member 818C is positioned above forearm 816C. Figure 9B As shown, the spacing between wrist members 818B and 818C (e.g., 30 mm or 65 mm spacing) is greater than the spacing between wrist members 818A and 818C (e.g., 15 mm or 32.5 mm spacing). Similarly, the spacing between forearms 816A and 816C is greater than the spacing between forearms 816B and 816C. In embodiments, the spacing between forearms 816A-816C and wrist members 818A-818C can be the same.

[0107] In further embodiments, the spacing between the wrist members 818B, 818C can be at an active heating pitch (e.g., 30 mm or 65 mm) and the spacing between the first and second wrist members 818A, 818B can be at a passive cooling pitch (e.g., 15 mm or 32.5 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities, such as active heating, active cooling, or both. The batch load lock apparatus can include the ability to preheat substrates before transferring them to the processing chamber 103, and can include the ability to cool the substrates after returning them from the processing chamber and transferring them back to the factory interface. For example, using the robot 801, two unprocessed substrates can be simultaneously retrieved from the heater pedestal by two end effectors, such as 820E, 820F, at a spacing of 30 mm or 65 mm. Additionally, two processed substrates can be placed on two cooling pedestals by end effectors 820C, 820D at a spacing of 15 mm or 32.5 mm.

[0108] In further embodiments, the spacing between wrist members 818B, 818C is at an active heating pitch (e.g., 30 mm or 65 mm) and the spacing between wrist members 818A, 818C is at a passive cooling pitch (e.g., 15 mm or 32.5 mm). For example, using robot 801, two unprocessed substrates can be simultaneously retrieved from the heater pedestal by two end effectors, such as 820E, 820F, at a spacing of 30 mm or 65 mm. Additionally, two processed substrates can be placed on two cooling pedestals by end effectors 820C, 820D at a spacing of 15 mm or 32.5 mm.

[0109] Figures 10A-10C A robot 802 is shown having the same configuration as robot 801, but with an additional forearm 816D, wrist member 818D, and attached end effectors 820G, 820H. Robot 802 may correspond to Figure 1 The robot 102 in FIG. 1 and is applicable to a robot having Figure 1 The four substrates shown or the multi-substrate processing chamber 103 having two to six substrates. Figures 10A-10C In the illustrated embodiment, forearm 816D is positioned above forearm 816A and is rotatable about axis 824A via a common axis with forearm 816A. Wrist member 818D is positioned below forearm 816D and above wrist member 818C. Figure 10B As shown, the spacing between wrist members 818C, 818A is greater than the spacing between wrist members 818C, 818D and wrist members 818A, 818B. Similarly, the spacing between forearms 816A, 816D is the same as the spacing between forearms 816B, 816C. Forearms 816A and 816C are in the same plane, with forearm 816D above the plane and forearm 816B below the plane.

[0110] As about Figures 9A-9CAs described with reference to the robot 801 in Figure 1, the end effectors 820A-820D may have a different spacing than the end effectors 820E-820G and may be configured to retrieve heated or cooled substrates. In an embodiment, the robot 802 may be configured to simultaneously retrieve four (4) unprocessed substrates from four (4) substrate supports in the load lock 109A using the end effectors 820A-820D at a first spacing. Alternatively, the robot may simultaneously retrieve two (2) substrates through the slit valve and then be raised or lowered in the Z direction (i.e., up or down) to retrieve two additional substrates through the slit valve. The robot 802 may then move to the processing chamber to retrieve processed substrates using the end effectors 820E-820G at a second spacing and place four unprocessed substrates on empty substrate supports using the end effectors 820A-820D.

[0111] The robot 802 is suitable for use in a multi-substrate processing chamber, for example, having two (2) to six (6) substrate supports. Figure 1In the illustrated use case, the quadruple dual blade robot 802 can sequentially unload substrates from and reload substrates to a processing chamber 103 having four (4) substrate supports as shown, or a processing chamber having six (6) substrate supports (not shown). For example, in the use case where the processing chamber has six (6) substrate supports, the robot 802 has two empty end effectors 820G, 820H (for example) carrying six (6) unprocessed substrates on six (6) of the eight (8) end effectors 820A-820F (for example). The empty end effectors 820G, 820H retrieve two processed substrates from the two substrate supports in a first of the processing chambers. The robot 802 then rotates the blades and places the two unprocessed substrates on the empty substrate supports in the first of the processing chambers using the end effectors 820A, 820B (for example). Using the empty end effectors 820A, 820B, the robot 802 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 820C, 820D. Using the empty end effectors 820C, 820D, the robot 802 then retrieves two additional processed substrates from two additional substrate supports and places two unprocessed substrates on the empty substrate supports using the end effectors 820E, 820F. The robot 802 then returns to the load lock 109A to exchange the processed substrates for the unprocessed substrates two at a time. Using the empty end effectors 820E, 820F (for example), the robot 802 can retrieve two unprocessed substrates from two substrate supports within the load lock 109A and place two processed substrates on the empty substrate supports. The robot 802 may continue to exchange unprocessed substrates with processed substrates two at a time until six end effectors 820A, 820B, 820E-820H (for example) hold unprocessed substrates and two end effectors 820C, 820D (for example) are empty. The robot 802 may then continue to unload / reload the process chamber.

[0112] Now refer to Figure 11 , describes a method for conveying a substrate to e.g. Figure 1 A method 1100 of transferring a substrate from a processing chamber having at least one processing chamber having an even number of substrate supports (e.g., at least 2) is provided. The method 1100 may be performed using any of the robotic apparatus described herein. In an embodiment, the robotic apparatus includes four (4) end effectors. Each end effector may be attached to a distal end of a respective dual wrist member of the robotic apparatus. In an embodiment, the robotic apparatus has four wrist members, each wrist member having two blades attached thereto.

[0113] The method 1100 includes, at block 1103, retrieving a first substrate on the first end effector and a second substrate on the second end effector from the first substrate support and the second substrate support, respectively (e.g., simultaneously or in parallel), by a first end effector and a second end effector, wherein the first end effector and the second end effector are attached to a robotic apparatus. The method 1100 includes, at block 1105, placing a third substrate and a fourth substrate (respectively) onto the first substrate support and the second substrate support, respectively (e.g., simultaneously or in parallel), by a third end effector and a fourth end effector, wherein the third end effector and the fourth end effector are attached to the robotic apparatus.

[0114] The method 1100 includes, at block 1107, retrieving, by a third end effector and a fourth end effector, a fifth substrate on the third end effector and a sixth substrate on the fourth end effector from a third substrate support and a fourth substrate support (respectively) in the processing chamber. The method 1100 includes, at block 1109, placing a seventh substrate on the third substrate support and an eighth substrate on the fourth substrate support by a fifth end effector and a sixth end effector, wherein the fifth end effector and the sixth end effector are attached to a robotic apparatus.

[0115] As a result of the retrieval and placement, the third, fourth, seventh, and eighth substrates are placed in the processing chamber, the first, second, third, and fourth end effectors each hold one of the four processed substrates, and the fifth and sixth end effectors are empty. After the processed substrates have been removed from the processing chamber and held on the end effectors, they can be placed into a load lock or other processing chamber. In one embodiment, the first and second end effectors simultaneously or in parallel place processed substrates in the load lock and can retrieve unprocessed substrates from the load lock, and the fifth and sixth end effectors simultaneously or in parallel place processed substrates in the load lock and can retrieve unprocessed substrates from the load lock. The method 1100 is discussed with respect to a manufacturing system that includes a plurality of substrate supports that are processed as a unit and has a robot arm that has a plurality of end effectors (e.g., an even number of end effectors). However, in embodiments, the method 1100 can also be performed to process a processing chamber having six (6) substrate supports with eight (8) end effectors (e.g., from a quad dual robotic apparatus). In such embodiments, additional operations would be performed after block 1109 to pick up the ninth and tenth processed substrates and then place the eleventh and twelfth unprocessed substrates.

[0116] The systems, robotic apparatus, and methods disclosed herein can increase productivity and efficiency over known electronic device manufacturing systems, robots, and methods in the art. For example, a known put and get sequence performed by a known robotic apparatus to unload a set of four processed wafers from a quad process chamber and load four unprocessed wafers into the quad process chamber is as follows:

[0117] Dual GET (pick up 2 substrates) from load lock by first and second end effectors (6.8 seconds)

[0118] Spin to chamber (5 seconds)

[0119] Double take from process chamber via third and fourth end effectors (7.2 seconds)

[0120] Duel PUT (2 substrates placed on 2 substrate holders) into the process chamber via 1st and 2nd end effectors (7.2 seconds)

[0121] Chamber axis rotates (spindle rotate) 180 degrees (0 seconds)

[0122] Rotate to load lock (5 seconds)

[0123] Double placement to load lock via third and fourth end effectors (6.8 seconds)

[0124] Double access from load lock via first and second end effectors (6.8 seconds)

[0125] Rotate to chamber (5.0 seconds)

[0126] Double take from process chamber via third and fourth end effectors (7.2 seconds)

[0127] Double placement into the process chamber via first and second end effectors (7.2 seconds)

[0128] Rotate to load lock (5 seconds)

[0129] Double placement via third and fourth end effectors to load lock (6.8 seconds)

[0130] Total time: 76 seconds => 189.47 substrates per hour

[0131] In contrast, Figures 3A-3C 、 Figures 6A-6C ,and Figures 9A-9CThe appropriate put and get sequence performed by the triple dual yaw robotic apparatus shown in FIG. 1 to unload a set of four processed wafers from a quad processing chamber and to load four unprocessed wafers into a quad processing chamber is as follows:

[0132] Double retrieval (pick up 2 substrates) from load lock via first and second end effector

[0133] (6.8 seconds)

[0134] Double retrieval from load lock (pick up 2 substrates) via 3rd and 4th end effector

[0135] (6.8 seconds)

[0136] Spin to chamber (5 seconds)

[0137] Double get from process chamber using fifth and sixth end effectors (7.2 seconds)

[0138] Double placement into process chamber using third and fourth end effectors (7.2 seconds)

[0139] Double take from process chamber using third and fourth end effectors (7.2 seconds)

[0140] Double placement into process chamber using first and second end effectors (7.2 seconds)

[0141] Rotate to load lock (5 seconds)

[0142] Double placement into process chamber using fifth and sixth end effectors (6.8 seconds)

[0143] Double placement into process chamber using third and fourth end effectors (6.8 seconds)

[0144] Total time: 56 seconds => 257.14 substrates per hour

[0145] As shown in this example, providing a robotic apparatus with at least an even number of end effectors according to embodiments herein can eliminate the need for sequence steps that require return to a load lock. Enabling the robotic apparatus to completely exchange processed substrates with unprocessed substrates within a single cycle can significantly improve the efficiency and substrate yield of an electronic device processing system.

[0146] The foregoing description discloses only certain example embodiments. For example, certain example embodiments describe two stacked end effectors. Modifications of the above-described systems, apparatus, and methods that fall within the scope of the present disclosure will be apparent to those skilled in the art. For example, embodiments discussed with reference to two stacked end effectors are also applicable to three, four, or more stacked end effectors. Furthermore, the embodiments are not limited to the robots, processing chamber architectures, or transfer chamber architectures illustrated and described herein. Therefore, while the present disclosure has been disclosed in conjunction with certain example embodiments, it should be understood that other embodiments may fall within the scope of the present disclosure as determined by the appended claims.

Claims

1. A robotic device comprising: an arm including a medial end and a lateral end, the medial end being configured to rotate about a shoulder axis; a first forearm configured to independently rotate relative to the arm about an elbow axis at the lateral end of the arm; a first wrist member configured to independently rotate relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member includes a first end effector and a second end effector; a second forearm configured to rotate independently relative to the arm about the elbow axis; a second wrist member configured to independently rotate relative to the second forearm about a second wrist axis, wherein the second wrist member includes a third end effector and a fourth end effector; a third forearm configured to rotate independently relative to the arm about the elbow axis; and a third wrist member configured to independently rotate about a third wrist axis relative to the third forearm, wherein the third wrist member includes a fifth end effector and a sixth end effector, and wherein a first fixed vertical spacing between the first wrist member and the second wrist member is less than a second fixed vertical spacing between the second wrist member and the third wrist member.

2. The robotic device according to claim 1, comprising a drive motor assembly, the drive motor assembly comprising: an arm drive motor configured to cause the independent rotation of the arms; a first forearm drive motor configured to cause said independent rotation of said first forearm; a second forearm drive motor configured to cause said independent rotation of said second forearm; a third forearm drive motor configured to cause said independent rotation of said third forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist member; a second wrist drive motor configured to cause said independent rotation of said second wrist member; and A third wrist drive motor is configured to cause the independent rotation of the third wrist member.

3. The robotic apparatus of claim 2 , wherein the drive motor assembly further comprises an arm axis located at the shoulder axis, a common forearm axis located at the elbow axis, a first wrist axis located at the first wrist axis, a second wrist axis located at the second wrist axis, and a third wrist axis located at the third wrist axis, The drive motor assembly further comprises: a first drive pulley and a first driven pulley, the first drive pulley being positioned at the inboard end of the arm and the first driven pulley being positioned at the outboard end of the arm, a belt wrapped around the first drive pulley and the first driven pulley driving the first driven pulley to rotate about the common forearm axis with the first forearm attached to the first driven pulley; a second drive pulley and a second driven pulley, the second drive pulley being positioned at the inboard end of the arm and the second driven pulley being positioned at the outboard end of the arm, a belt wrapped around the second drive pulley and the second driven pulley driving the second driven pulley to rotate about the common forearm axis with the second forearm attached to the second driven pulley; a third drive pulley coupled to the first wrist axis and configured to cause the independent rotation of the first wrist member; a fourth drive pulley coupled to the second wrist axis and configured to cause the independent rotation of the second wrist member; A fifth drive pulley is coupled to the third wrist axis and configured to cause the independent rotation of the third wrist member.

4. The robotic apparatus of claim 1 , wherein the first fixed vertical spacing is equal to a first spacing between a first upper load lock support and a first lower load lock support of a first load lock, and wherein the second fixed vertical spacing is equal to a second spacing between a second upper load lock support and a second lower load lock support of a second load lock.

5. The robotic device according to claim 1, further comprising: a fourth forearm configured to rotate independently relative to the arm about the elbow axis; and A fourth wrist member is configured to independently rotate relative to the fourth forearm about a fourth wrist axis, wherein the fourth wrist member includes a seventh end effector and an eighth end effector.

6. The robotic apparatus of claim 5 , wherein when configured in a folded and zeroed configuration, the first forearm, the second forearm, the third forearm, and the fourth forearm overlap one another, and wherein when configured in the folded and zeroed configuration, the first end effector, the third end effector, the fifth end effector, and the seventh end effector overlap one another, and wherein when configured in the folded and zeroed configuration, the second end effector, the fourth end effector, the sixth end effector, and the eighth end effector overlap one another.

7. The robotic device of claim 6, comprising a drive motor assembly, the drive motor assembly comprising: an arm drive motor configured to cause the independent rotation of the arms; a first forearm drive motor configured to cause said independent rotation of said first forearm; a second forearm drive motor configured to cause said independent rotation of said second forearm; a third forearm drive motor configured to cause said independent rotation of said third forearm; a fourth forearm drive motor configured to cause the independent rotation of the fourth forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist member; a second wrist drive motor configured to cause said independent rotation of said second wrist member; a third wrist drive motor configured to cause the independent rotation of the third wrist member; and A fourth wrist drive motor is configured to cause the independent rotation of the fourth wrist member.

8. The robotic apparatus of claim 7 , wherein the first forearm is coupled to the first wrist member at a first midpoint of the first wrist member, wherein the second forearm is coupled to the second wrist member at a second midpoint of the second wrist member, and wherein the third forearm is coupled to the third wrist member at a third midpoint of the third wrist member.

9. The robotic apparatus of claim 7 , wherein the first forearm is coupled to the first wrist member at a position offset from a first midpoint of the first wrist member, wherein the second forearm is coupled to the second wrist member at a position offset from a second midpoint of the second wrist member, and wherein the third forearm is coupled to the third wrist member at a position offset from a third midpoint of the third wrist member.

10. The robotic apparatus of claim 1 , wherein the first wrist member has a U-shape and includes a first wrist axis located at a bottom center of the U-shape, and wherein the first end effector is located at a first distal end of the U-shape and the second end effector is located at a second distal end of the U-shape, wherein the second wrist member has the U-shape and includes a second wrist axis, the second wrist axis being located at a bottom center of the U-shape, and wherein the third end effector is located at a first distal end of the U-shape and the fourth end effector is located at a second distal end of the U-shape, and wherein the third wrist member has the U-shape and includes a third wrist axis, the third wrist axis being located at a bottom center of the U-shape, and wherein the fifth end effector is located at a first distal end of the U-shape and the sixth end effector is located at a second distal end of the U-shape.

11. A robotic device comprising: a first arm comprising a first medial end and a first lateral end, the first medial end being configured to rotate about a shoulder axis; a first forearm configured to independently rotate relative to the first arm about a first elbow axis at the lateral end of the first arm; a first wrist member configured to independently rotate relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the first elbow axis, wherein the first wrist member includes a first end effector and a second end effector; a second arm comprising a second medial end and a second lateral end, the second medial end being configured to rotate about the shoulder axis; a second forearm configured to independently rotate relative to the second arm about a second elbow axis at the second lateral end of the second arm; a second wrist member configured to independently rotate relative to the second forearm about a second wrist axis at a distal end of the second forearm opposite the second elbow axis, wherein the second wrist member includes a third end effector and a fourth end effector; and a third forearm configured to independently rotate relative to the first arm about a third elbow axis at the lateral end of the first arm; and a third wrist member configured to independently rotate relative to the third forearm about a third wrist axis at a distal end of the third forearm opposite the third elbow axis, wherein the third wrist member includes a fifth end effector and a sixth end effector, and wherein a first fixed vertical spacing between the first wrist member and the second wrist member is less than a second fixed vertical spacing between the second wrist member and the third wrist member.

12. The robotic device of claim 11, further comprising a drive motor assembly, the drive motor assembly comprising: a first arm drive motor configured to cause the independent rotation of the first arm; a second arm drive motor configured to cause said independent rotation of said second arm; a first forearm drive motor configured to cause said independent rotation of said first forearm; a second forearm drive motor configured to cause said independent rotation of said second forearm; a third forearm drive motor configured to cause said independent rotation of said third forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist member; a second wrist drive motor configured to cause said independent rotation of said second wrist member; and A third wrist drive motor is configured to cause the independent rotation of the third wrist member.

13. The robotic device of claim 12 , wherein the drive motor assembly further comprises a common arm axis at the shoulder axis, a first forearm axis at the first elbow axis, a second forearm axis at the second elbow axis, a first wrist axis at the first wrist axis, a second wrist axis at the second wrist axis, and a third wrist axis at the third wrist axis.

14. The robotic device according to claim 13, further comprising: a fourth forearm configured to independently rotate relative to the second arm about the second elbow axis at the second lateral end of the second arm; and A fourth wrist member is configured to independently rotate relative to the fourth forearm about a fourth wrist axis at a distal end of the fourth forearm opposite the second elbow axis, wherein the fourth wrist member includes seventh and eighth end effectors.

15. The robotic device of claim 14, wherein the first wrist member, the second wrist member, the third wrist member, and the fourth wrist member are stacked on top of each other when configured in the folded and zeroed configuration.

16. The robotic device of claim 11, wherein the first arm and the second arm are inclined relative to each other when configured in the folded and zeroed configuration, and wherein the first forearm and the second forearm are inclined relative to each other.

17. The robotic device of claim 11, wherein the first forearm and the third forearm are in the same plane.

18. The robotic apparatus of claim 11 , wherein the first forearm is coupled to the first wrist member at a first midpoint of the first wrist member, wherein the second forearm is coupled to the second wrist member at a second midpoint of the second wrist member, and wherein the third forearm is coupled to the third wrist member at a third midpoint of the third wrist member.

19. The robotic apparatus of claim 11 , wherein the first forearm is coupled to the first wrist member at a position offset from a first midpoint of the first wrist member, wherein the second forearm is coupled to the second wrist member at a position offset from a second midpoint of the second wrist member, and wherein the third forearm is coupled to the third wrist member at a position offset from a third midpoint of the third wrist member.

20. An electronic device manufacturing apparatus comprising: a main frame comprising a transfer chamber and at least two processing chambers; a first load lock coupled to the main frame; a second load lock coupled to the main frame; and a robotic apparatus configured to transfer substrates between the first load lock and the second load lock and the at least two processing chambers, the robotic apparatus comprising: an arm including a medial end and a lateral end, the medial end being configured to rotate about a shoulder axis; a first forearm configured to independently rotate relative to the arm about an elbow axis at the lateral end of the arm; a first wrist member configured to independently rotate relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member includes a first end effector and a second end effector; a second forearm configured to rotate independently relative to the arm about the elbow axis; a second wrist member configured to independently rotate relative to the second forearm about a second wrist axis, wherein the second wrist member includes a third end effector and a fourth end effector; a third forearm configured to rotate independently relative to the arm about the elbow axis; and a third wrist member configured to independently rotate about a third wrist axis relative to the third forearm, wherein the third wrist member includes a fifth end effector and a sixth end effector, and wherein a first fixed vertical spacing between the first wrist member and the second wrist member is less than a second fixed vertical spacing between the second wrist member and the third wrist member.

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