Three-dimensional video measuring machine

Abstract

The present application provides a kind of three coordinate image measuring machine, can solve the problem of the phenomenon of tremor, shaking of backlight source in servo motion process in prior art, influence measurement accuracy and measurement efficiency.The three coordinate image measuring machine, including workbench, crossbeam, carriage, carriage motion system for driving carriage along crossbeam sliding, imaging system is set on carriage and slides along with carriage;Backlight source motion system for driving backlight source sliding;Control system for controlling imaging system and backlight source always keep optical axis coincident in sliding process.The present application can shorten the length of connecting piece cantilever where backlight source is, effectively reduce even avoid the phenomenon of tremor and shaking of backlight source in machine body motion process, improve the measurement accuracy of instrument, speed up detection efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of measuring equipment, in particular to the improvement of a three-coordinate video measuring machine. BACKGROUND

[0002] At present, high-precision video measuring instruments are widely used in 3C electronics, high-precision instruments and chip industries. The imaging quality of the video system directly affects the function and measurement precision of the measuring equipment. Especially, the backlight source as the main light source for contour size measurement is the key component affecting the measurement function and precision of the video measuring instrument. The motion of the imaging sensor and the backlight source needs to be highly synchronized to ensure the imaging quality and improve the measurement precision.

[0003] In order to eliminate the influence of Abbe error on the measurement precision, the three-coordinate video measuring machine generally adopts the structure of fixed bridge + moving table. The light source of the video system is usually connected with the slide through a mechanical rigid connection mode to keep synchronous motion. In order to avoid the interference between the connecting piece of the imaging sensor and the backlight source and the moving table, the connecting piece needs to be made into a U-shaped structure, that is, the backlight source is fixed to the X-axis slide through the U-shaped connecting piece. The U-shaped connecting piece is transversely arranged and includes an upper horizontal connecting rod, a lower horizontal connecting rod and a vertical connecting rod. Through this connection mode, the backlight source and the imaging sensor can keep following motion.

[0004] The disadvantage of the above-mentioned traditional connection mode is that in order not to interfere with the operation of the moving table, the longer the Y-direction stroke of the video measuring instrument, the longer the length of the U-shaped connecting piece. The backlight source can only be fixed to the end of the lower horizontal connecting rod of the U-shaped connecting piece. With the lengthening of the U-shaped connecting piece, the connecting rod is prone to shaking during the movement, which makes the backlight source unable to reach a stable working state, thereby affecting the imaging effect.

[0005] At present, the detection efficiency of the measuring industry is becoming higher and higher. Large batch, high efficiency and programmed detection have become the trend. However, when the traditional backlight source following mode is adopted, the backlight source will shake during the photographing and measuring process, causing the image formed by the sensor to be blurred at the edge, thereby affecting the measurement precision of the equipment. At present, the method to solve this problem is to reduce the running speed and acceleration and prolong the positioning time before photographing, but this method will inevitably reduce the measurement efficiency of the product.

[0006] Therefore, it is urgent to further improve the existing three-coordinate video measuring machine. SUMMARY

[0007] The present application provides a three-coordinate video measuring machine, which can solve the problem that the backlight source is prone to shaking and shaking during the following motion in the prior art, thereby affecting the measurement precision and efficiency.

[0008] To solve the above technical problems, the technical scheme adopted by the three-coordinate image measuring machine is as follows:

[0009] A workbench;

[0010] A cross beam is arranged above the workbench;

[0011] A slide is arranged on the cross beam and can slide along the cross beam;

[0012] A slide movement system is used to drive the slide to slide along the cross beam;

[0013] An imaging system is arranged on the slide and slides with the slide;

[0014] A backlight source is arranged below the imaging system, and the optical axis of the backlight source is parallel to the optical axis of the imaging system;

[0015] A backlight source movement system is used to drive the backlight source to slide in a direction parallel to the movement direction of the slide;

[0016] A control system is in communication connection with at least the slide movement system and the backlight source movement system, and is used to control the imaging system and the backlight source to always keep the optical axes coincident during sliding.

[0017] The backlight source movement system comprises a first driving motor, a speed reducer, a linear module, a backlight source connecting frame and a grating ruler; one end of the backlight source connecting frame is connected to the sliding table of the linear module, and the other end is suspended; the backlight source is arranged on the suspended end of the backlight source connecting frame; the scale grating of the grating ruler is arranged on the guide rail of the linear module and is consistent with the extension direction of the guide rail of the linear module; and the grating reading head of the grating ruler is arranged on the sliding table of the linear module.

[0018] The backlight source connecting frame is in a straight line type and is perpendicular to the linear module.

[0019] The slide movement system comprises a second driving motor, a lead screw and a nut seat; the nut seat is fixedly connected to the slide; and the slide is driven to slide by the second driving motor through the transmission of the lead screw and the nut seat.

[0020] The slide is sleeved on the cross beam and is in sliding fit with the cross beam through air floating bearings.

[0021] The cross beam is in a rectangular cross section, the slide is a rectangular slide, and the air floating bearings are arranged on the inner wall of the slide.

[0022] The Z-axis assembly is installed on the slide, and the Z-axis assembly comprises a column and a Z-axis, the column is vertically fixed on the slide, the Z-axis is in sliding fit with the column, and the imaging system is installed on the end of the Z-axis; the circumferential side of the column comprises a vertical plane and two vertical inclined planes located on the same side of the vertical plane, the vertical plane is parallel to the cross beam, the two vertical inclined planes are mirror images and are both inclined away from the side where the vertical plane is located; the top end of the Z-axis is fixedly connected with a sleeve, the sleeve is sleeved on the column, and a first air floating bearing perpendicular to the vertical plane and a second air floating bearing perpendicular to the vertical inclined plane are installed on the inner wall of the sleeve.

[0023] The cross-sectional profile shape of the sleeve is matched with the cross-sectional profile shape of the column.

[0024] The inclination angle of the vertical inclined plane is 30-60°.

[0025] Compared with the prior art, the imaging system in the application is arranged on the slide, and the imaging system is driven to move by the slide movement system, the backlight source is driven to move by the backlight source movement system, and the control system is at least in communication connection with the slide movement system and the backlight source movement system, and is used for controlling the imaging system and the backlight source to always keep the optical axes coincident in the sliding process, that is, the good cooperative follow-up effect of the backlight source and the imaging system is realized. The application does not need to set a traditional U-shaped connecting frame, can shorten the cantilever length of the connecting piece where the backlight source is located, effectively reduces or even avoids the shaking and shaking phenomenon of the backlight source in the movement process of the machine body, improves the measurement accuracy of the instrument, and speeds up the detection efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0027] Figure 1 It is a perspective view of a three-coordinate image measuring machine in one view angle in the embodiment of the application;

[0028] Figure 2 It is a perspective view of a three-coordinate image measuring machine in another view angle in the embodiment of the application;

[0029] Figure 3 It is an enlarged view of A part of Figure 2

[0030] Figure 4 It is a perspective view of the column in the embodiment of the application; ​

[0031] Figure 5 Figure 3 is a perspective view of the Z-axis and sleeve in the embodiment of the present application.

[0032] Reference signs: 100 - workbench; 200 - cross beam; 300 - sliding carriage; 400 - sliding carriage movement system; 410 - second driving motor; 420 - screw rod; 430 - nut seat; 440 - sliding carriage air bearing; 500 - imaging system; 600 - backlight source; 700 - backlight source movement system; 710 - first driving motor; 720 - linear module; 730 - backlight source connecting frame; 740 - grating ruler; 741 - scale grating; 742 - grating reading head; 800 - vertical beam; 900 - Z-axis assembly; 910 - vertical column; 911 - vertical plane; 912 - vertical inclined plane; 920 - Z-axis; 930 - sleeve; 940 - first air bearing; 950 - second air bearing. DETAILED DESCRIPTION

[0033] In the description of the present application, it should be noted that unless specifically defined and limited otherwise, the terms "mounting", "connected", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be directly connected, or indirectly connected through intermediate medium, or the internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict.

[0035] Reference Figures 1 to 3 The three-coordinate image measuring machine, i.e. three-dimensional image measuring machine, of the embodiment comprises a workbench 100, a cross beam 200, a sliding carriage 300, a sliding carriage movement system 400, an imaging system 500, a backlight source 600, a backlight source movement system 700 and a control system.

[0036] Specifically, the cross beam 200 extends along the X direction of the workbench 100, and is specifically supported by two vertical beams 800 on the left and right sides of the workbench 100.

[0037] The sliding carriage 300 is arranged on the cross beam 200 and can slide along the cross beam 200, i.e. the sliding carriage 300 can slide along the X direction.

[0038] The sliding carriage movement system 400 is used to drive the sliding carriage 300 to slide along the cross beam 200, i.e. to provide power for the sliding of the sliding carriage 300.

[0039] The imaging system 500 is arranged on the slide carriage 300 and slides with the slide carriage 300. The imaging system 500 adopts an existing imaging system 500, which will not be described herein.

[0040] The backlight source 600 is arranged below the imaging system 500 and provides a transmission light source for the imaging system 500. The backlight source 600 and the imaging system 500 are arranged to satisfy that the optical axis of the backlight source 600 is parallel to the optical axis of the imaging system 500.

[0041] The backlight source movement system 700 is used to drive the backlight source 600 to slide in a direction parallel to the movement direction of the slide carriage 300, that is, the backlight source 600 can also slide in the X direction.

[0042] The control system is communicatively connected with at least the slide carriage movement system 400 and the backlight source movement system 700 and is used to control the imaging system 500 and the backlight source 600 to always keep the optical axes coincident during the sliding process.

[0043] In the embodiment, the imaging system 500 is arranged on the slide carriage 300 and moves with the slide carriage 300 driven by the slide carriage movement system 400, while the backlight source 600 moves by the backlight source movement system 700. The control system controls the imaging system 500 and the backlight source 600 to always keep the optical axes coincident during the sliding process, that is, the good cooperative follow-up effect of the backlight source 600 and the imaging system 500 is achieved. The traditional U-shaped connecting frame is not needed, the cantilever length of the connecting member where the backlight source 600 is arranged can be shortened, the shaking and jitter phenomenon of the backlight source 600 during the movement of the machine body is effectively reduced or even avoided, the measurement accuracy of the instrument is improved, and the detection efficiency is accelerated.

[0044] Further, the backlight source movement system 700 includes a first driving motor 710, a speed reducer, a linear module 720, a backlight source connecting frame 730, and a grating ruler 740. One end of the backlight source connecting frame 730 is connected to the sliding table of the linear module 720, and the other end is suspended. The backlight source 600 is arranged on the suspended end of the backlight source connecting frame 730. The scale grating 741 of the grating ruler 740 is arranged on the guide rail of the linear module 720 and is consistent with the extension direction of the guide rail of the linear module 720. The grating reading head 742 of the grating ruler 740 is arranged on the sliding table of the linear module 720.

[0045] Specifically, the first driving motor 710 is an encoder servo motor. During the movement of the backlight source 600, the scale grating 741 cooperates with the grating reading head 742 to detect the position of the backlight source 600 in real time and sends the detected position information to the control system. The control system controls the slide carriage movement system 400 to move, so that the slide carriage 300 drives the imaging system 500 to move to the corresponding position, thereby realizing that the imaging system 500 and the backlight source 600 always keep the optical axes coincident during the sliding process.

[0046] Preferably, the backlight connecting frame 730 adopts a polyether ether ketone material instead of a conventional metal alloy material, and the density of the polyether ether ketone material is only half of that of the metal alloy material under the same strength condition. When the backlight connecting frame 730 made of the polyether ether ketone material is used to connect the backlight 600, the inertial force generated by the backlight 600 during the following movement is only one fourth of that of the conventional following movement under the same acceleration, thereby effectively avoiding the shaking phenomenon of the backlight 600 during the movement of the instrument.

[0047] The backlight connecting frame 730 is in a straight line type, which is perpendicular to the linear module 720. The straight line type backlight connecting frame 730 has a simple structure and a relatively short length, and greatly reduces the shaking phenomenon of the backlight 600 during the following movement.

[0048] For the carriage movement system 400, it specifically includes a second driving motor 410, a lead screw 420, and a nut seat 430. The second driving motor 410 is arranged on the vertical beam 800. The lead screw 420 is connected to the second driving motor 410 through a shaft coupling. The nut seat 430 is threadedly connected to the lead screw 420. The nut seat 430 is fixedly connected to the carriage 300. The second driving motor 410 drives the carriage 300 to slide through the transmission of the lead screw 420 and the nut seat 430, thereby driving the imaging system 500 to move.

[0049] Further, the carriage 300 is sleeved on the cross beam 200 and is in sliding fit with the cross beam 200 through the carriage air floating bearing 440, so as to improve the sliding stability of the carriage 300 and the movement stability of the imaging system 500.

[0050] The cross beam 200 has a rectangular cross section. Correspondingly, the carriage 300 is a rectangular carriage 300, and the carriage air floating bearings 440 are a plurality of bearings arranged on the inner walls of the carriage 300. Specifically, the four inner walls of the rectangular carriage 300 correspond to the four side walls of the cross beam 200 one by one. The carriage 300 is in envelope type sleeving on the cross beam 200, and one carriage air floating bearing 440 is arranged on each inner wall of the carriage 300.

[0051] For the installation of the imaging system 500, specifically, as shown in Figure 2 and Figure 3 The Z-axis assembly 900 is installed on the carriage 300, and the Z-axis assembly 900 includes a column 910 and a Z-axis 920. The column 910 is vertically arranged and fixed on the carriage 300. The Z-axis 920 is in sliding fit with the column 910, and the imaging system 500 is installed on the end of the Z-axis 920. Referring to Figure 4 and Figure 5The circumferential side of the column 910 comprises a vertical plane 911 and two vertical inclined planes 912 located on the same side of the vertical plane 911, so that the cross section is approximately trapezoidal, the vertical plane 911 is parallel to the cross beam 200, the two vertical inclined planes 912 are mirror images and are both inclined away from the side where the vertical plane 911 is located; the top end of the Z-axis 920 is fixedly connected with a sleeve 930, the sleeve 930 is sleeved on the column 910, and a first air floating bearing 940 perpendicular to the vertical plane 911 and a second air floating bearing 950 perpendicular to the vertical inclined plane 912 are installed on the inner wall of the sleeve 930.

[0052] The second air floating bearing 950 perpendicular to the vertical inclined plane 912 has a vertical air floating clamping force on the vertical inclined plane 912, which has X and Y directional components, so when the air floating clamping force between the Z-axis sleeve 930 and the column 910 needs to be adjusted, only the pre-tightening force of the corresponding second air floating bearing 950 on one of the vertical inclined planes 912 needs to be adjusted, so that the air floating gap of the other air floating bearings can be automatically adjusted, and each air floating bearing does not need to be adjusted correspondingly, the air floating adjustment efficiency is improved, and the space for the operator to adjust the operation at the inclined plane is saved, and the operation is facilitated.

[0053] Correspondingly, the cross-sectional profile shape of the sleeve 930 is matched with the cross-sectional profile shape of the column 910, so as to facilitate the vertical installation of the first air floating bearing 940 and the second air floating bearing 950.

[0054] Further, the inclination angle of the vertical inclined plane 912 is preferably 30-60°, and in the embodiment, the inclination angle is 45°.

[0055] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A three-coordinate video measuring machine, characterized in that, It comprises: a workbench; a beam which is arranged above the workbench; a slide which is arranged on the beam and can slide along the beam; a slide movement system for driving the slide to slide along the beam; an imaging system which is arranged on the slide and slides with the slide; a backlight which is located below the imaging system and whose optical axis is parallel to the optical axis of the imaging system; a backlight movement system for driving the backlight to slide in a direction parallel to the movement direction of the slide; the backlight movement system comprises a first driving motor, a speed reducer, a linear module, a backlight connecting frame and a grating ruler; one end of the backlight connecting frame is connected to the slide table of the linear module, and the other end is suspended; the backlight is arranged on the suspended end of the backlight connecting frame; the scale grating of the grating ruler is arranged on the guide rail of the linear module and is consistent with the extension direction of the guide rail of the linear module; the grating reading head of the grating ruler is arranged on the slide table of the linear module; a control system which is at least communicatively connected with the slide movement system and the backlight movement system, for controlling the imaging system and the backlight to always keep the optical axes coincident during sliding; during the movement of the backlight, the scale grating cooperates with the grating reading head to detect the position of the backlight in real time, and sends the detected position information to the control system, and the control system controls the movement of the slide movement system to drive the imaging system to move to the corresponding position, so that the imaging system and the backlight always keep the optical axes coincident during sliding; a Z-axis assembly is installed on the slide, the Z-axis assembly comprises a column and a Z-axis, the column is vertically and fixedly arranged on the slide, the Z-axis is in sliding cooperation with the column, and the imaging system is installed on the end of the Z-axis; the circumferential side of the column comprises a vertical plane and two vertical inclined planes located on the same side of the vertical plane, the vertical plane is parallel to the beam, the two vertical inclined planes are mirror images and both tilt away from the side where the vertical plane is located; the top end of the Z-axis is fixedly connected with a sleeve, the sleeve is sleeved on the column, and a first air floating bearing which is perpendicular to the vertical plane and a second air floating bearing which is perpendicular to the vertical inclined plane are installed on the inner wall of the sleeve.

2. The three-coordinate image measuring machine according to claim 1, wherein the backlight connecting frame is linear and perpendicular to the linear module.

3. The three-coordinate image measuring machine according to claim 1, wherein the slide movement system comprises a second driving motor, a lead screw and a nut seat, the nut seat is fixedly connected to the slide, and the slide is driven to slide by the second driving motor through the transmission of the lead screw and the nut seat.

4. The three-coordinate image measuring machine according to claim 1, wherein the slide is sleeved on the beam and is in sliding cooperation with the beam through an air floating bearing.

5. The three-coordinate image measuring machine according to claim 4, wherein ​ ​ ​ The cross section of the cross beam is rectangular, the slide is a rectangular slide, and the air floating bearings are arranged on the inner wall of the slide.

6. The three-coordinate video measuring machine according to claim 1, characterized in that, The cross section profile of the sleeve is matched with the cross section profile of the column.

7. The three-coordinate video measuring machine according to claim 6, characterized in that, The inclination angle of the vertical inclined surface is 30-60°.

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