A single-crystal lifting mechanism for a single-crystal furnace and a single-crystal furnace

Abstract

The present invention relates to a single crystal lifting mechanism for a single crystal furnace, comprising a crystal rotation component, a crystal lifting component and a fixed pulley component, wherein the top of the crystal rotation component is connected to the crystal lifting component, and the fixed pulley component is arranged on the crystal lifting component. The crystal lifting component comprises a connecting chassis, a box, a wire winding structure and a wire pressing structure. The wire winding structure can wind multiple turns of a wire winding rope, and can retract and release the wire winding rope by rotation. The wire pressing structure is arranged on one side of the wire winding structure, and when the wire winding rope jumps, the wire pressing structure can press the wire winding rope toward one side of the wire winding structure so that the wire winding rope and the wire winding structure are offset again. The fixed pulley component is arranged on the crystal lifting component, and the fixed pulley component is used to convert the rotation of the wire winding rope into lifting and lowering. By arranging the wire pressing structure on one side of the wire winding structure, when the wire winding rope jumps, when the wire winding rope contacts the wire pressing mechanism, the wire pressing mechanism can press the wire winding rope toward one side of the wire winding structure to prevent the wire winding rope from escaping from the winding groove.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnace equipment, and in particular to a single crystal lifting mechanism for a single crystal furnace and a single crystal furnace. Background Art

[0002] The single crystal furnace includes a furnace bottom plate, a main furnace chamber, a furnace cover, an isolation valve chamber, an auxiliary furnace chamber, a lifting mechanism and a crucible drive device. Among them, the lifting mechanism, as the core component in the single crystal furnace, is installed at the top of the auxiliary furnace chamber of the single crystal furnace, and includes a crystal rotation assembly, a crystal lifting assembly, a fixed pulley assembly, a distribution box assembly, a conductive slip ring assembly, and a self-weight assembly.

[0003] Among them, the crystal rotation component is arranged on the auxiliary furnace chamber, the crystal lifting component is connected to the crystal rotation component, and the crystal rotation component can rotate to drive the crystal lifting component to rotate.

[0004] At present, the existing crystal rise assembly is driven by a servo motor through a worm gear reduction and a spline shaft to drive the overall rotation of the winding shaft. The winding shaft is provided with a spiral winding groove, and the winding rope is wound in the winding groove. The winding shaft is rotated to release or reel in the winding rope, and the winding rope is then transmitted up and down through a fixed pulley assembly. However, the existing winding rope is only provided with a single guide wheel during the process of reeling in and out, but the single crystal connected to the winding rope will be unstable during the forming process, that is, when there is no gravity below, the winding rope will jump up and then detach from the winding groove. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a single crystal lifting mechanism for a single crystal furnace and a single crystal furnace thereof, which solve the technical problem that the existing wire rope is only provided with a single guide wheel during the wire-winding and unwinding process, but the single crystal connected to the wire rope will be unstable during the forming process, that is, when there is no gravity below, the wire rope will jump upwards and then detach from the winding groove.

[0007] (II) Technical solution

[0008] In order to achieve the above object, the main technical solutions adopted by the present invention include:

[0009] A single crystal lifting mechanism for a single crystal furnace, comprising a crystal rotation assembly, a crystal lifting assembly and a fixed pulley assembly, wherein the top of the crystal rotation assembly is connected to the crystal lifting assembly, and the fixed pulley assembly is arranged on the crystal lifting assembly, the crystal rotation assembly is connected to the crystal lifting assembly, and the crystal rotation assembly can drive the crystal lifting assembly to rotate;

[0010] The Jingsheng assembly includes a connecting chassis, a box body, a wire winding structure and a wire pressing structure;

[0011] The box body is arranged on the connection chassis, and a lifting cavity is formed between the box body and the connection chassis. The wire winding structure is arranged in the lifting cavity;

[0012] The bottom of the connection chassis is fixedly connected to the crystal rotation assembly, and the mounting structural members of the fixed pulley assembly are all fixedly installed on the top of the connection chassis;

[0013] A communication port communicating with the fixed pulley body is opened at the top of the box body;

[0014] The wire winding structure can wind the wire winding rope for multiple turns and can wind and unwind the wire winding rope by rotation;

[0015] The wire pressing structure is arranged on one side of the wire winding structure and is fixedly installed on the box body. When the wire winding rope jumps the line, the wire pressing structure can press the wire winding rope against one side of the wire winding structure so that the wire winding rope abuts against the wire winding structure again;

[0016] The fixed pulley assembly is arranged on the crystal lifting assembly, and the fixed pulley assembly is used to convert the rotation of the wire winding rope into up and down lifting.

[0017] Optionally, the wire pressing structure includes a mounting bracket, a pressing component and an adjusting component;

[0018] One side of the mounting bracket is detachably connected to the inner side of the box body, and a pressing component is arranged on the other side of the mounting bracket. The pressing component can press the wire winding rope when contacting with the wire winding rope;

[0019] The adjusting component can adjust the distance between the pressing component and the wire winding structure.

[0020] Optionally, the pressing component includes a wire pressing wheel and a mounting shaft;

[0021] The wire pressing wheel is sleeved on the mounting shaft and is arranged in a horizontal direction. The mounting wheel is installed on the mounting bracket through the adjusting component;

[0022] The adjusting component includes a spring, an adjusting structural member and a setscrew;

[0023] The adjusting structural member passes through the mounting shaft and is fixedly installed on the mounting bracket. The spring is sleeved on the end section of the adjusting structural member. The spring is arranged in the groove body of the mounting bracket, and the two ends of the spring abut against the inner wall of the groove body and the adjusting structural member respectively;

[0024] The setscrew penetrates from one side of the mounting shaft and abuts against the outer side wall of the adjusting structural member.

[0025] Optionally, the wire winding structure includes a wire winding motor and a wire winding shaft disposed outside the box body;

[0026] The output end of the wire winding motor is horizontally arranged, and the output end of the wire winding motor drives the wire winding shaft to rotate along its own axis through a crystal lifting transmission component. A plurality of tooth grooves are circumferentially formed on the outer wall of the wire winding shaft, and the tooth grooves are used for winding a wire winding rope.

[0027] Optionally, the wire winding structure further includes a guiding unit;

[0028] The guiding unit is fixedly installed on the top of the box body and can cooperate with and abut against the wire winding rope on the wire winding shaft, so that the wire winding rope is used for guiding the wire winding shaft during winding and unwinding.

[0029] Optionally, the guiding unit includes a guiding wheel, a guiding shaft and an adjusting structure;

[0030] The guiding wheel meshes with the tooth grooves of the wire winding shaft. The guiding wheel is sleeved on the guiding shaft and rotates relative to the guiding shaft;

[0031] The axis of the guiding shaft is parallel to the axis of the wire winding shaft;

[0032] The adjusting structure can adjust the guiding wheel so that the guiding wheel is located at the center of the tooth grooves of the wire winding shaft, so that it can be in full contact with the wire winding rope on the wire winding shaft.

[0033] Optionally, the fixed pulley assembly includes a fixed pulley body, a fixed pulley shaft and two weighing structures;

[0034] The fixed pulley body is sleeved on the fixed pulley shaft, and the fixed pulley shaft is horizontally arranged;

[0035] The two weighing structures are respectively arranged below the two ends of the fixed pulley shaft and can support the fixed pulley shaft. Each weighing structure includes a piezoelectric sensor. The piezoelectric sensor is disc-shaped, and the two ends of the fixed pulley shaft are respectively pressed on the piezoelectric sensors to weigh the crystal.

[0036] Optionally, the weighing structure further includes a mounting structural member and a supporting structural member;

[0037] The mounting structural member is used to fixedly install the piezoelectric sensor on the crystal lifting assembly;

[0038] The supporting structural member is connected to the fixed pulley shaft and is used to support the fixed pulley shaft.

[0039] Optionally, the mounting structure includes a mounting base plate, an adjusting screw, and a locking nut;

[0040] The mounting base plate is detachably connected to the crystal lifting assembly, and the piezoelectric sensor is disposed on the mounting base plate;

[0041] The adjusting screw is a rod-shaped structural member, and an annular pressing plate protrudes outward along the radial direction of the outer peripheral side wall of the adjusting screw, and the bottom end surface of the annular pressing plate is used to press the piezoelectric sensor;

[0042] The locking nut is located above the annular pressing plate, and the locking nut is screwed on the outer wall of the adjusting screw, and the locking nut can move up and down along the adjusting screw and abut against the annular pressing plate to lock the piezoelectric sensor.

[0043] On the other hand, a single crystal furnace includes the single crystal lifting mechanism for the single crystal furnace described above.

[0044] (III) Advantageous Effects

[0045] The advantageous effects of the present invention are as follows: For the single crystal lifting mechanism for a single crystal furnace of the present invention, by providing a wire pressing structure on one side of the wire winding structure, when the phenomenon of the wire winding rope skipping occurs, when the wire winding rope contacts the wire pressing mechanism, the wire pressing mechanism can press the wire winding rope toward the side of the wire winding structure, so that the wire winding rope is re-abutted against the wire winding structure, thereby preventing the wire winding rope from detaching from the wire winding groove. Description of the Drawings

[0046] Figure 1 is an overall three-dimensional schematic diagram of the lifting head of the present invention;

[0047] Figure 2 is a cross-sectional structural schematic diagram of the crystal lifting assembly for a single crystal furnace of the present invention;

[0048] Figure 3 is a partial three-dimensional structural schematic diagram of the crystal lifting assembly for a single crystal furnace of the present invention;

[0049] Figure 4 is Figure 3 a partial top view structural schematic diagram of the wire pressing structure of;

[0050] Figure 5 is Figure 3 a partial top view structural schematic diagram of the guiding unit of;

[0051] Figure 6 is a cross-sectional structural schematic diagram of the fixed pulley assembly of the weighing structure of the present invention;

[0052] Figure 7 is Figure 6Enlarged detail view of the area marked "A"

[0053] Figure 8 Is a three-dimensional schematic diagram of the crystal rotation component of the present invention;

[0054] Figure 9 Is Figure 8 Schematic cross-sectional structure diagram of

[0055]

Description of the attached drawing reference numerals

[0056] 1: Crystal rotation component; 11: Crystal rotation motor; 12: Magnetohydrodynamic shaft core; 13: Bearing seat; 14: Crossed roller bearing; 15: Crystal rotation transmission component; 2: Crystal lifting component; 21: Connection chassis; 22: Box body; 23: Lifting cavity; 24: Wire winding structure; 241: Wire winding motor; 242: Wire winding shaft; 243: Tooth groove; 244: Guide wheel; 245: Guide shaft; 25: Wire pressing structure; 251: Mounting bracket; 2511:; 2512:; 2513:; 252: Pressing component; 2521: Wire pressing wheel; 2522: Mounting shaft; 253: Adjusting component; 2531: Spring; 2532: Adjusting structural member; 2533: Set screw; 26: Adjusting structure; 3: Fixed pulley component; 31: Fixed pulley body; 32: Fixed pulley shaft; 33: Weighing structure; 331: Piezoelectric sensor; 332: Mounting base plate; 333: Adjusting structural member; 334: Locking nut; 4: Conductive slip ring. Detailed implementation manners

[0057] For better explaining the present invention and facilitating understanding, the present invention will be described in detail below with reference to the attached drawings through specific implementation manners. Among them, the orientation nouns such as "up", "down", "left", "right", "front" and "back" mentioned in this article are based on the orientation of Figure 1 as a reference.

[0058] Referring to Figure 1 and Figure 2 as shown, a single crystal lifting mechanism for a single crystal furnace proposed in an embodiment of the present invention includes a crystal rotation component 1, a crystal lifting component 2, a fixed pulley component 3, a distribution box component, a conductive slip ring component and a self-counterweight component.

[0059] In this embodiment, referring to Figure 3 as shown, the top of the crystal rotation component 1 is connected to the crystal lifting component 2, and the fixed pulley component 3 is arranged on the crystal lifting component 2. The crystal rotation component 1 is connected to the crystal lifting component 2, and the crystal rotation component 1 can drive the crystal lifting component 2 to rotate. The top of the crystal rotation component 1 is connected to the crystal lifting component 2, and the fixed pulley component 3, the distribution box component, the conductive slip ring component and the self-counterweight component are all arranged on the crystal lifting component 2. The crystal rotation component 1 can rotate to drive the crystal lifting component 2, the fixed pulley component 3, the distribution box component, the conductive slip ring component and the self-counterweight component to rotate as a whole.

[0060] Further, referring to Figures 8 - 9 As shown, the crystal rotation assembly 1 includes a crystal rotation motor 11, a crystal rotation transmission assembly 15, and a magnetorheological fluid core 12. The output end of the crystal rotation motor 11 is arranged in the vertical direction. The crystal rotation motor 11 drives the crystal rotation transmission assembly 15 to rotate, so as to drive the magnetorheological fluid core 12 to rotate. The top of the magnetorheological fluid core 12 passes through and is connected to the lifting cavity 23 through the connecting chassis 21.

[0061] Currently, the crystal rotation assembly of the existing lifting head is driven by a servo motor to drive large and small pulleys to drive the magnetorheological fluid core to rotate, thereby providing the overall rotational motion. The magnetorheological fluid and the crystal rotation assembly rotate relative to the box body where they are located through a bearing structure. The magnetorheological fluid itself has its own core diameter restricted by the bearing structure, that is, the diameter of the core of the magnetorheological fluid is not easy to be too large. If the core is too large, its radial load-bearing is unstable. Moreover, the magnetorheological fluid core directly bears the overall weight of the entire crystal lifting assembly and other rotating parts that form the rotating unit, and the axial bearing force is too large. As a result, the strength and rigidity are affected to a certain extent, resulting in the inability to rotate at a high speed.

[0062] In this embodiment, the bearing seat 13 directly bears the overall weight of the crystal lifting assembly 2 through the crossed roller bearing 14, so that the diameter of the magnetorheological fluid core 12 is not affected by the axial and radial bearing forces. Therefore, it can bear a greater axial force, so that the magnetorheological fluid core 12 only bears the force of the rotating part, thereby improving the strength and rigidity of the magnetorheological fluid core 12. At the same time, a crystal rotation assembly that provides a rotation speed for the magnetorheological fluid unit is provided. It can be set with a small-diameter magnetorheological fluid core and only needs to bear the radial force of rotation. Therefore, it is not necessary for the diameter of the magnetorheological fluid unit to be too large, thereby improving the stability of the overall structure during high-speed crystal rotation and improving the crystal pulling efficiency to a certain extent.

[0063] Moreover, in this embodiment, since the magnetorheological fluid core 12 does not bear the force in the axial direction, the diameter of the magnetorheological fluid core 12 is much smaller than the diameter of the magnetorheological fluid core in the prior art. Compared with the prior art where the magnetorheological fluid completely fills the bearing seat, there is a gap between the bearing seat 13 and the smaller-diameter magnetorheological fluid core 12 in this embodiment. This gap is an annular accommodation space for placing the conductive slip ring assembly 4, so that the structure is compact and convenient for installation and subsequent maintenance.

[0064] Referring to Figure 2 As shown, the crystal lifting assembly 2 includes a connecting chassis 21, a box body 22, a wire winding structure 24, and a wire pressing structure 25.

[0065] Further, the box body 22 is arranged on the connecting chassis 21, and a lifting cavity 23 is formed between the box body 22 and the connecting chassis 21. The wire winding structure 24 is arranged in the lifting cavity 23.

[0066] Specifically, the bottom of the connecting chassis 21 is fixedly connected to the crystal rotation assembly 1, and the installation structural members of the fixed pulley assembly 3 are all fixedly installed on the top of the connecting chassis 21. A communication port communicating with the fixed pulley body 31 is provided at the top of the box body 22.

[0067] Moreover, the wire winding structure 24 can wind the wire winding rope for multiple turns, and can wind in and out the wire winding rope by rotation.

[0068] Further, the wire winding structure 24 includes a wire winding motor 241 and a wire winding shaft 242 provided outside the box body 22. The output end of the wire winding motor 241 is horizontally arranged, and the output end of the wire winding motor 241 drives the wire winding shaft 242 to rotate along its own axis through a crystal lifting transmission assembly. A plurality of tooth grooves 243 are circumferentially formed on the outer wall of the wire winding shaft 242, and the tooth grooves 243 are used for winding the wire winding rope.

[0069] The crystal lifting transmission assembly includes a reducer and a spline shaft. The output end of the wire winding motor 241 is connected to the wire winding shaft 242 through the spline shaft to drive the wire winding shaft 242 to rotate along its own axis. A plurality of tooth grooves 243 are circumferentially formed on the outer wall of the wire winding shaft. The crystal rope can wind the crystal rope for multiple turns, and can wind in and out the crystal rope by rotation.

[0070] Further, see Figure 5 As shown, the wire winding structure 24 further includes a guiding unit. The guiding unit is fixedly installed on the top of the box body 22 and can cooperate and abut against the wire winding rope on the wire winding shaft 242, so as to guide the wire winding shaft 242 during the winding and unwinding of the wire winding rope when rotating.

[0071] Further, the guiding unit includes a guiding wheel 244, a guiding shaft 245 and an adjusting structure 26. Among them, the guiding wheel 244 meshes with the tooth groove 243 of the wire winding shaft 242. The guiding wheel 244 is sleeved on the guiding shaft 245 and rotates relative to the guiding shaft 245. The axis of the guiding shaft 245 is parallel to the axis of the wire winding shaft 242.

[0072] Further, the adjusting structure 26 can adjust the guiding wheel 244 so that the guiding wheel 244 is at the center of the tooth groove 243 of the wire winding shaft 242, so that it can be in full contact with the wire winding rope on the wire winding shaft 242.

[0073] Specifically, the adjusting structure 26 includes two adjusting parts arranged left and right. The two adjusting parts are detachably sleeved on the guiding shaft 245 and are respectively located at both ends of the guiding single wheel 244 and abut against it.

[0074] The two adjusting parts move along the axis direction of the guiding shaft 245 so that the middle line perpendicular to the axis of the guiding single wheel 244 coincides with the middle line where the tooth opening of the wire winding wheel 242 is located.

[0075] It should be noted that before the crystal lifting component is started, the positions of the two adjusting parts are manually adjusted, and then the guiding single wheel 244 between the two adjusting parts is adjusted to a suitable position, and the guiding single wheel 244 is fixed through the adjusting parts at both ends. The suitable position means that the guiding single wheel 244 is perpendicular to its axis, and the middle line C of the guiding single wheel 244 arranged in the vertical direction coincides with the middle line where the tooth opening of the wire winding wheel 242 is located, so as to ensure that the distances between both ends of the guiding single wheel 244 and the inner side wall of the tooth opening are the same in the transverse direction. If there are the same gaps at both ends in the transverse direction after adjustment, then the overall mounting component 1 is controlled to move downward by the setscrew, thereby driving the guiding shaft 245 and the guiding single wheel 244 to move downward synchronously, so that the guiding single wheel 244 can better abut against the wire winding rope.

[0076] In this embodiment, the wire pressing structure 25 is arranged on one side of the wire winding structure 24, and the wire pressing structure 25 is fixedly installed on the box body 22. When the wire winding rope jumps out of the groove, the wire pressing structure 25 can abut against the wire winding rope to press the wire winding rope. By arranging the wire pressing structure on one side of the wire winding structure, when the wire winding rope jumps out of the groove, the wire pressing mechanism can press the wire winding rope to prevent it from detaching from the wire winding groove.

[0077] Furthermore, the wire pressing structure 25 includes a mounting bracket 251, a pressing component 252 and an adjusting component 253.

[0078] Specifically, the mounting bracket 251 includes a gland 2521, a wire pressing wheel bracket 2522 and a mounting plate 2523. The gland 2521 passes through the mounting plate 2523 and is fixedly installed on the wire pressing wheel bracket 2522. The wire pressing wheel bracket 2522 is used to install the pressing component 252. The gland 2521 is fixedly installed on one side of the inner side wall of the box body 22 and is located behind the wire winding rope.

[0079] See Figure 4 As shown, one side of the mounting bracket 251 is detachably connected to the inner side of the box body 22, and the other side of the mounting bracket 251 is provided with a pressing component 252, and the pressing component 252 can press the wire winding rope when it contacts the wire winding rope.

[0080] Among them, the adjusting component 253 can adjust the distance between the pressing component 252 and the wire winding structure 24.

[0081] Furthermore, the pressing component 252 includes a wire pressing wheel 2521 and a mounting shaft 2522. The wire pressing wheel 2521 is sleeved on the mounting shaft 2522 and is arranged in the horizontal direction. The mounting wheel is installed on the mounting bracket 251 through the adjusting component 253.

[0082] In this embodiment, the adjusting assembly 253 includes a spring 2531, an adjusting structural member 2532, and a setscrew 2533. The adjusting structural member 2532 passes through the mounting shaft 2522 and is fixedly installed on the mounting bracket 251. The spring 2531 is sleeved on the end section of the adjusting structural member 2532. The spring 2531 is arranged in the groove body of the mounting bracket 251, and both ends of the spring 2531 are abutted against the inner wall of the groove body and the adjusting structural member 2532 respectively.

[0083] Moreover, the setscrew 2533 penetrates from one side of the mounting shaft 2522 and abuts against the outer side wall of the adjusting structural member 2532. Specifically, the working process of pressing the winding rope is as follows: When the winding rope jumps, the winding rope will contact the rope pressing wheel 2521. At this time, the winding rope will apply a force to the rope pressing wheel 2521 towards the side (outside) away from the winding structure 24. Then, the rope pressing wheel 2521 will apply an outward pressure to the adjusting structural member 2532 through the mounting shaft 2522 to compress the spring 2531. At this time, the spring 2531 will generate a reaction force, a force towards the side (inside) close to the winding structure 24 to press the winding rope to prevent the winding rope from jumping. That is to say, when the pre-tightening force generated by the winding rope on the spring 2531. In addition, through the mutual cooperation of the adjusting structural member 2532 and the setscrew 2533, the mutual acting force between the adjusting structural member 2532 and the spring 2531 can be adjusted automatically according to the thickness of the winding rope and the degree of jumping, so that the pre-tightening force of the spring 2531 becomes larger or smaller, forming an adjustable pre-tightening force, thus facilitating the adjustment of the rope pressing effect.

[0084] In this embodiment, the fixed pulley assembly 3 is arranged on the crystal lifting assembly 2, and the fixed pulley assembly 3 is used to convert the rotation of the winding rope into up and down lifting.

[0085] As shown in FIGS. 6-7, the fixed pulley assembly 3 includes a fixed pulley main body 31, a fixed pulley shaft 32, and two weighing structures 33. The fixed pulley main body 31 is sleeved on the fixed pulley shaft 32, and the fixed pulley shaft 32 is horizontally arranged. The two weighing structures 33 are respectively arranged below both ends of the fixed pulley shaft 32 and can support the fixed pulley shaft 32. Each weighing structure 33 includes a piezoelectric sensor 331. The piezoelectric sensor 331 is disc-shaped, and both ends of the fixed pulley shaft 32 are respectively pressed on the piezoelectric sensor 331 for weighing the crystal.

[0086] Furthermore, the weighing structure 33 further includes a mounting structural member and a supporting structural member. The mounting structural member is used to fixedly install the piezoelectric sensor 331 on the crystal lifting assembly 2. The supporting structural member is connected to the fixed pulley shaft 32 and is used to support the fixed pulley shaft 32.

[0087] At present, the deformation of the existing S-type weighing sensor is not controlled. In addition to the up and down deformation required for measurement, deformation in the left and right directions may occur, resulting in the measurement accuracy being affected.

[0088] Compared with the existing S-type load cell, the piezoelectric load cell 331 with a double-supported circular ring structure is formed by the sensor units 1 arranged at both ends of the pulley shaft 2. This weighing form has a simple structure and is easy to adjust. The piezoelectric load cell 331 adopted in the present invention is based on the piezoelectric effect. The piezoelectric effect is that when some dielectrics are deformed under the action of external forces in a certain direction, polarization phenomena will occur inside them, and at the same time, positive and negative charges with opposite polarities will appear on their two opposite surfaces. When the external force is removed, it will return to the uncharged state. When the direction of the acting force changes, the polarity of the charges also changes accordingly. It is not easy to deform, has high weighing accuracy, a compact structure, and is convenient for installation and debugging such as centering and leveling.

[0089] Furthermore, the installation structure member includes an installation base plate 332, an adjusting screw 333, and a locking nut 334. The installation base plate 332 is detachably connected to the crystal lifting assembly 2, and the piezoelectric sensor 331 is arranged on the installation base plate 332. The adjusting screw 333 is a rod-shaped structural member, and an annular pressing plate protrudes outward along the radial direction of the outer peripheral side wall of the adjusting screw 333. The bottom end surface of the annular pressing plate is used to press the piezoelectric sensor 331.

[0090] Furthermore, the locking nut 334 is located above the annular pressing plate, and the locking nut 334 is screwed onto the outer wall of the adjusting screw 333. The locking nut 334 can move up and down along the adjusting screw 333 and abut against the annular pressing plate to lock the piezoelectric sensor 331. The locking of the locking nut 334 makes the fixing effect of the piezoelectric sensor 331 better.

[0091] It should be noted that the installation structure member is used to fixedly install the piezoelectric load cell 331 on the crystal lifting mechanism, so that the connection effect of the piezoelectric load cell 331 is more stable and the measurement accuracy is more accurate.

[0092] In the single crystal lifting mechanism for a single crystal furnace of the present invention, in this embodiment, aiming at the defects of the weighing form of the above-mentioned S-type load cell, the new structure weighing form is improved to a double-supported disc-type piezoelectric sensor type 331 weighing form. This structure is simple and reasonable, easy to adjust, has high weighing accuracy, a compact structure, and is convenient for installation and debugging such as centering and leveling.

[0093] In this embodiment, aiming at the characteristics that the radial bearing capacity of the magnetic fluid shaft core 12 of the above-mentioned crystal rotation assembly 1 is unstable and it cannot rotate at a high speed, the crystal rotation part is improved. The support of the original crystal rotation magnetic fluid shaft core 12 is cancelled, and the new structure is improved to be directly supported by a cross roller bearing for axial force, so that the axial and radial bearing capacities are greater. The rotation diameter of the large belt pulley is made close to the diameter of the cross roller bearing, which improves the stability of the overall structure during high-speed crystal rotation and improves the crystal pulling efficiency to a certain extent.

[0094] In this embodiment, the C-shaped bracket is cancelled for the above-mentioned installation method and its drawbacks, and the conductive slip ring 4 is directly placed inside the gap of the annular chamber of the rotating shaft. The outer ring of the conductive slip ring 4 is fixed to the large pulley of the crystal rotation transmission assembly, and the inner ring of the conductive slip ring 4 is fixed to the bearing seat 13. Their positions are relatively stationary in pairs, which is convenient for disassembly and assembly, and greatly reduces its damage rate.

[0095] In the description of the present invention, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality of" means two or more unless otherwise specifically defined.

[0096] In the present invention, unless otherwise clearly defined and limited, the terms "installation", "connection", "connection", "fixation" and other terms should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium; it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0097] In the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0098] In the description of this specification, the descriptions of terms such as "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0099] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A single-crystal lifting mechanism for a single-crystal furnace, comprising a crystal rotation assembly (1), a crystal lifting assembly (2) and a fixed pulley assembly (3). The top of the crystal rotation assembly (1) is connected to the crystal lifting assembly (2), and the fixed pulley assembly (3) is arranged on the crystal lifting assembly (2). Characterized in that, The crystal rotation assembly (1) is connected to the crystal lifting assembly (2), and the crystal rotation assembly (1) can drive the crystal lifting assembly (2) to rotate; The crystal lifting assembly (2) includes a connecting chassis (21), a box body (22), a wire winding structure (24) and a wire pressing structure (25); The box body (22) is arranged on the connecting chassis (21), and a lifting cavity (23) is formed between the box body (22) and the connecting chassis (21). The wire winding structure (24) is arranged in the lifting cavity (23); The bottom of the connecting chassis (21) is fixedly connected to the crystal rotation assembly (1), and the mounting structural members of the fixed pulley assembly (3) are all fixedly installed on the top of the connecting chassis (21); The top of the box body (22) is provided with a communication port communicating with the fixed pulley main body (31); The wire winding structure (24) can wind the wire winding rope for multiple turns and can take in and release the wire winding rope by rotation; The wire pressing structure (25) is arranged on one side of the wire winding structure (24), and the wire pressing structure (25) is fixedly installed on the box body (22). When the wire winding rope jumps the line, the wire pressing structure (25) can press the wire winding rope towards one side of the wire winding structure (24) so that the wire winding rope abuts against the wire winding structure again; The fixed pulley assembly (3) is arranged on the crystal lifting assembly (2), and the fixed pulley assembly (3) is used to convert the rotation of the wire winding rope into up and down lifting; The wire pressing structure (25) includes a mounting bracket (251), a pressing component (252) and an adjusting component (253); One side of the mounting bracket (251) is detachably connected to the inner side of the box body (22), and the other side of the mounting bracket (251) is provided with a pressing component (252). The pressing component (252) can press the wire winding rope when contacting with the wire winding rope; The adjusting component (253) can adjust the distance between the pressing component (252) and the wire winding structure (24); The pressing component (252) includes a wire pressing wheel (2521) and a mounting shaft (2522); The wire pressing wheel (2521) is sleeved on the mounting shaft (2522) and is arranged in a horizontal direction. The pressing component (252) is installed on the mounting bracket (251) through the adjusting component (253); The adjusting component (253) includes a spring (2531), an adjusting structural member (2532) and a setscrew (2533); The adjusting structural member (2532) passes through the mounting shaft (2522) and is fixedly mounted on the mounting bracket (251). The spring (2531) is sleeved on the end section of the adjusting structural member (2532). The spring (2531) is arranged in the groove body of the mounting bracket (251), and both ends of the spring (2531) are abutted against the inner wall of the groove body and the adjusting structural member (2532) respectively. The set screw (2533) penetrates from one side of the mounting shaft (2522) and abuts against the outer side wall of the adjusting structural member (2532).

2. The single-crystal lifting mechanism for a single-crystal furnace according to claim 1, characterized in that, the wire winding structure (24) includes a wire winding motor (241) and a wire winding shaft (242) arranged outside the box body (22); the output end of the wire winding motor (241) is horizontally arranged, and the output end of the wire winding motor (241) drives the wire winding shaft (242) to rotate along its own axis through a crystal lifting transmission component. A plurality of tooth grooves (243) are formed in the circumferential direction of the outer wall of the wire winding shaft (242), and the tooth grooves (243) are used for winding a wire winding rope.

3. The single-crystal lifting mechanism for a single-crystal furnace according to claim 2, characterized in that, the wire winding structure (24) further includes a guiding unit; the guiding unit is fixedly mounted on the top of the box body (22) and can cooperate and abut against the wire winding rope on the wire winding shaft (242), so that the wire winding rope is used for guiding the wire winding shaft (242) during winding and unwinding.

4. The single-crystal lifting mechanism for a single-crystal furnace according to claim 3, characterized in that, the guiding unit includes a guiding wheel (244), a guiding shaft (245) and an adjusting structure (26); the guiding wheel (244) meshes with the tooth groove (243) of the wire winding shaft (242). The guiding wheel (244) is sleeved on the guiding shaft (245) and rotates relative to the guiding shaft (245); the axis of the guiding shaft (245) is parallel to the axis of the wire winding shaft (242); the adjusting structure (26) can adjust the guiding wheel (244) so that the guiding wheel (244) is located at the center of the tooth groove (243) of the wire winding shaft (242), so that it can be in full contact with the wire winding rope on the wire winding shaft (242).

5. The single-crystal lifting mechanism for a single-crystal furnace according to claim 1, characterized in that, the fixed pulley assembly (3) includes a fixed pulley main body (31), a fixed pulley shaft (32) and two weighing structures (33); the fixed pulley main body (31) is sleeved on the fixed pulley shaft (32), and the fixed pulley shaft (32) is horizontally arranged; Two of the weighing structures (33) are respectively arranged below both ends of the fixed pulley shaft (32) and can support the fixed pulley shaft (32). Each weighing structure (33) includes a piezoelectric sensor (331). The piezoelectric sensor (331) is disc-shaped. Both ends of the fixed pulley shaft (32) are respectively pressed on the piezoelectric sensor (331) to weigh the crystal.

6. The single-crystal lifting mechanism for a single-crystal furnace according to claim 5, characterized in that the weighing structure (33) further includes a mounting structure member and a support structure member; the mounting structure member is used to fixedly mount the piezoelectric sensor (331) on the crystal lifting assembly (2); the support structure member is connected to the fixed pulley shaft (32) and is used to support the fixed pulley shaft (32).

7. The single-crystal lifting mechanism for a single-crystal furnace according to claim 6, characterized in that the mounting structure member includes a mounting base plate (332), an adjusting screw (333) and a locking nut (334); the mounting base plate (332) is detachably connected to the crystal lifting assembly (2), and the piezoelectric sensor (331) is arranged on the mounting base plate (332); the adjusting screw (333) is a rod-shaped structural member, and an annular pressing plate protrudes outward along the radial direction of the outer peripheral side wall of the adjusting screw (333). The bottom end face of the annular pressing plate is used to press the piezoelectric sensor (331); the locking nut (334) is located above the annular pressing plate, and the locking nut (334) is screwed on the outer wall of the adjusting screw (333), and the locking nut (334) can move up and down along the adjusting screw (333) and abut against the annular pressing plate to lock the piezoelectric sensor (331).

8. A single-crystal furnace, characterized in that it includes the single-crystal lifting mechanism for a single-crystal furnace according to any one of claims 1-7.

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