Method for manufacturing a structural element and structural element

Abstract

The present invention relates to a method for manufacturing a structural element (10) having a body (2), an electrode structure (4) disposed for electrical contact with the body (2), and a housing (3) adjacent to the body (2) and the electrode structure (4). The method includes the steps of: providing a container (9) together with a liquid solution (90) therein, the liquid solution containing a photocurable material, wherein the body (2) and the electrode structure (4) are arranged in the container (9) and surrounded by the liquid solution (90); and fabricating the housing (3) by means of two-photon lithography, wherein photons are focused at target local locations on the body (2) and the electrode structure (4), thereby polymerizing and curing the photocurable material in the solution (90) at the focused local locations to form the housing (3). The invention also relates to a structural element (10), particularly manufactured according to the method described herein.

Description

Technical Field

[0001] This invention relates to an efficient method for manufacturing compact structural elements. Furthermore, a compact and mechanically stable structural element is provided, which is manufactured, in particular, by the method described herein. Background Technology

[0002] As additive manufacturing processes continue to evolve, and due to the ever-increasing demands for speed and precision, the equipment used to apply additive layers must function better and faster. Furthermore, it is desirable for this manufacturing process to operate with the greatest possible accuracy and material efficiency. Summary of the Invention

[0003] One object of the present invention is to provide an efficient, precise and reliable method for manufacturing compact structural elements. Another object is to provide a compact and mechanically stable structural element.

[0004] These objectives are achieved, in conjunction with the independent claims, by the method for manufacturing the structural element and by the structural element itself. Other designs and modifications of the structural element or method are the subject of the other claims.

[0005] According to at least one embodiment of a method for manufacturing structural elements, a container is provided together with a liquid solution therein. The solution contains a photocurable material. This material is particularly a photosensitive material situated in a liquid solution (e.g., a viscous or sol-like solution). The solution can be a resin-trigger-mixture. For example, the photocurable material is a plastic such as a photopolymer, acrylic resin, epoxy resin, or vinyl ester resin. If the solution is irradiated with light, particularly a laser, the material can absorb sufficient energy, such as photons, thereby polymerizing and curing the material.

[0006] According to at least one embodiment of the method, the body and electrode structure are arranged in a container. The body is particularly arranged on and mechanically and electrically connected to the electrode structure. The body and electrode structure can be immersed in a solution, for example, completely immersed in the solution. Alternatively, the body and electrode structure can be arranged in the container before the container is filled with the liquid solution. The container can have a support structure for accommodating the body and / or electrode structure.

[0007] According to at least one embodiment of the method, the body and electrode structure are arranged in a container and surrounded by a liquid solution, particularly completely surrounded in the lateral and vertical directions. The shell of the structural element to be manufactured is fabricated using two-photon lithography, i.e., by two-photon polymerization. In this method, photons are selectively focused on predetermined local locations on the body and electrode structure, thereby polymerizing and curing a photocurable material in the solution at the focused local locations to form the shell. The photons can originate from two different photon sources or from a single photon source. Thus, the fabricated structural element has a body, electrode structures disposed for electrical contact with the body, and a shell adjacent to the body and the electrode structures.

[0008] The lateral direction is understood as a direction that extends particularly parallel to the main extension surface of the structural element, or particularly parallel to the main extension surface of the main body of the structural element. The vertical direction is understood as a direction that is particularly perpendicular to the main extension surface of the structural element, or the orientation of the main extension surface of the main body of the structural element. In particular, the vertical and lateral directions are orthogonal to each other.

[0009] In two-photon lithography, photons from two photon sources, particularly two laser sources, or photons focused from a single photon source, are used to trigger a chain reaction in a liquid solution, especially in a resin-initiator-mixture. In this method, photons can be focused so that the photocurable material simultaneously or substantially simultaneously absorbs two high-energy photons, thereby triggering a chain reaction in the liquid solution and subsequently initiating polymerization. The starting point of polymerization can be arbitrarily selected depending on the focusing of the photons or beam.

[0010] In other words, sufficient energy is provided by absorbing two photons to initiate the polymerization process. When the two beams meet in 3D space, the photocurable material begins to harden and solidify. This method is particularly useful for the electrode structure and / or body of the lead frame, allowing it to be fully immersed in a liquid solution, where a complete shell is formed around the body and / or electrode structure without contacting it during shell fabrication. This eliminates the need for prefabricated molds or masks used to manufacture the shell.

[0011] Manipulating and focusing one or more photon sources allows for the hardening of materials in solution at any time and place, enabling the fabrication of housings of any shape. Hardening of materials that are normally inaccessible or difficult to access from above or below using conventional methods can be achieved using individual photon sources, especially paired photon sources, for example, from all possible directions. Therefore, two-photon lithography is particularly suitable for forming housings around electrode structures, especially those with semi-etched lead frames, or around electrode structures with localized recesses or protrusions, or around electrode structures with curved or angled surfaces.

[0012] According to at least one embodiment of the method, the body comprises a semiconductor body. The body itself can be a semiconductor body. The structural element to be manufactured is, in particular, an optoelectronic structural element. For example, the semiconductor body has a first semiconductor layer, a second semiconductor layer, and an active region disposed between the semiconductor layers. During operation of the structural element, the active region is particularly configured to generate or detect an electromagnetic beam, for example, in the visible, ultraviolet, or infrared spectral range. In contrast, the body may not be configured to generate or detect an electromagnetic beam. For example, the body may differ from a semiconductor body or may not have such a semiconductor body. The body can be an electronic component. For example, the body includes an integrated circuit and can be an IC chip, particularly a controller chip.

[0013] In at least one embodiment of the method for manufacturing a structural element, the structural element has a body, electrode structures disposed for electrical contact with the body, and a shell adjacent to the body and electrode structures, with a container provided together with a liquid solution therein. The solution contains a photocurable material, wherein the body and electrode structures are arranged in the container and surrounded by the liquid solution. The shell is manufactured by means of two-photon lithography, wherein photons are focused on target local locations on the body and electrode structures, thereby polymerizing and curing the photocurable material in the solution at the focused local locations to form the shell.

[0014] Therefore, a so-called two-photon polymerization (2PP) method has been proposed to form the shell, a technique in which one or two photon sources, particularly two laser sources, are used to cure photocurable materials, such as epoxy resins or acrylates. The basic principle is two-photon absorption, where two photons are absorbed simultaneously by a molecule or atom, in which the molecule or atom transitions to a high-energy excited state. Typically, the energy of just one of these photons is insufficient to cover the energy difference between the ground state and the excited state.

[0015] This method particularly relates to so-called true 3D systems because it enables the virtual construction and hardening of shells in 3D space, without the need for additional carrier layers. Through the focusing of photons, the shell can be grown at any location in a liquid solution. In other words, the starting point for shell formation can be arbitrarily chosen, for example, directly on the host, on the electrode structure, or in the environment surrounding the host or the electrode structure.

[0016] Compared to standard processes like FAM (Foil Assisted Molding) or injection molding, two-photon polymerization does not require specialized and more expensive tooling. Furthermore, the housing is formed precisely only at the required locations, resulting in minimal or no unnecessary material waste. This technology allows for the fabrication of housings in all arbitrary locations and shapes within the surrounding environment of the body and / or electrode structures.

[0017] According to at least one embodiment of the method, the photocurable material has monomers of photocurable plastics, such as the base monomers of photopolymers. Specifically, the liquid solution is an acrylic resin-, epoxy resin-, or vinyl ester resin solution. The solution can have additional components, such as initiators that trigger chain reactions to polymerize the photocurable material. The monomers can attach to the initiator and form polymer chains.

[0018] According to at least one embodiment of the method, the body and electrode structures are completely surrounded by a liquid solution. The shell is formed, particularly without additional auxiliary means (e.g., without additional support structures), simply by focusing photons at a localized target location. However, the only support structure can be a support structure at least partially located within the container, on which the body and electrode structures are arranged, particularly before the shell is formed.

[0019] In standard polymerization methods (such as VAT- or SLA-polymerization), the shell sinks slightly deeper into the liquid after each step and returns to a position to form sublayers of the shell. In contrast, in two-photon polymerization, the shell can be completely immersed in the liquid solution throughout the manufacturing process. Therefore, the shell is constructed from a focal point that is freely solidified in space. Compared to standard polymerization, the shell can avoid containing a sequence of layers consisting of parallel, especially flat, and stacked sublayers. Instead, shells manufactured by two-photon polymerization can have regions that are closely adjacent to each other, particularly bulk regions, which grow beside or on top of each other.

[0020] According to at least one embodiment of the method, a support structure with openings is located in a container. The body and electrode structures are arranged on the support structure such that the body and / or electrode structures at least partially cover the openings in a top view. The support structure can have multiple openings, with multiple bodies and / or multiple electrode structures arranged on the support structure such that each at least partially covers one of the openings. In this arrangement, multiple structural elements with separate housings can be manufactured simultaneously. In contrast, the support structure can be without openings, with multiple bodies arranged side-by-side with their associated electrode structures on the support structure, forming multiple spatially spaced housings surrounding the bodies and / or surrounding the electrode structures. In this way, multiple structural elements with separate housings can be manufactured simultaneously. It is not necessary to subsequently separate the common housing or separate the structural elements by passing through the housings. Spatially separated housings can be connected to a continuous electrode structure before separating the structural elements. Separation of structural elements is accomplished, in particular, only by passing through the continuous electrode structure. Multiple housings of multiple structural elements or the housing of a single structural element can be without dividing marks. However, the electrode structure of structural elements can have segmentation marks.

[0021] According to at least one embodiment of the method, a housing is formed on the surface of the body and / or the surface of the electrode structure. Specifically, in order to form the housing on the surface of the body facing the opening and / or on the surface of the electrode structure facing the opening, photons are focused through the opening in the support structure. Specifically, in order to form the housing on the surface of the body away from the opening and / or on the surface of the electrode structure away from the opening, photons are not focused through the opening in the support structure.

[0022] Therefore, the beam can be focused from above or below the support structure onto the location where the housing should be formed. Especially for electrode structures with localized recesses or protrusions and thus angled or curved surfaces, the housing can be manufactured very precisely and reliably in a simple manner using two-photon polymerization. Such an electrode structure can be a semi-etched lead frame. The housing is particularly adjacent to the electrode structure and / or body such that there is no gap between the housing and the electrode structure and / or body, which could be filled, for example, with a gaseous medium, such as air. Thus, the housing is adjacent to the electrode structure and / or body over a large area and, particularly, continuously, thereby achieving a particularly mechanically stable connection between the housing and the electrode structure and / or body. The structural element thus achieved is constructed to be particularly mechanically stable.

[0023] According to at least one embodiment of the method, a housing is formed at the local location where the beam is focused, such that the housing completely surrounds the body and / or electrode structure beam in the lateral direction. The housing is capable of covering all sides of the body, especially completely covering them. In a top view, the body can be completely covered by the housing. However, the body may also be uncovered by the housing in a top view. The sides of the body can be covered by the housing only in certain areas.

[0024] According to at least one embodiment of the method, the capping layer and the housing are formed together by two-photon lithography. The capping layer particularly has a lens shape on the body or an annular shape surrounding the body. For example, the capping layer and the housing are formed from the same material. The capping layer can be formed as an integral part of the housing. The housing and the capping layer can particularly be manufactured in the same process steps, such as in the same liquid solution. Therefore, the housing and the capping layer can form a co-grown unit. In this sense, the housing can seamlessly transition into the capping layer, thus there is no identifiable common interface between the housing and the capping layer.

[0025] According to at least one embodiment of the method, a capping layer is subsequently formed directly on the housing using two-photon lithography. The capping layer particularly has a lens shape on the body or an annular shape surrounding the body. For example, the capping layer and the housing are formed of different materials. The capping layer and the housing can have different material compositions. The housing and the capping layer can be manufactured in different process steps, for example, in liquid solutions with different compositions. The housing and the capping layer particularly form two distinct, adjacent components of a structural element. In this sense, the structural element can have a clearly identifiable internal interface between the housing and the capping layer.

[0026] According to at least one embodiment of the method, the housing is manufactured solely through the polymerization and curing of a photocurable material without post-processing. The housing particularly has a chamber in which the main body is arranged. The housing is particularly implemented as a single piece. The chamber is particularly formed by the continuous growth of the housing at designated points. The chamber is particularly not formed, for example, by removing material from the housing. In addition to or as an alternative to the chamber, the housing can in this case have a covering layer as described above.

[0027] According to at least one embodiment of the method, the housing is implemented as a single piece. The housing, in particular, does not contain sublayers arranged, for example, vertically stacked and extending parallel to each other. For example, the housing does not contain flat sublayers arranged vertically stacked. In other words, the housing manufactured by two-photon lithography is not, for example, constructed by a sequence of layers consisting of thin, especially flat, sublayers arranged vertically stacked and extending parallel to each other.

[0028] According to at least one embodiment of the method, sub-regions of the shell are first formed at spatially separated locations. By focusing a beam, the spatially separated sub-regions of the shell can be grown and eventually grown together into a unified shell. A single photon source can be used to fabricate one or more such shells. Alternatively, exactly two photon sources or multiple pairs of photon sources can be used simultaneously.

[0029] According to at least one embodiment of the method, photons from different photon sources are used. In particular, the housings are formed simultaneously at different points by means of the photon sources. In order to manufacture multiple structural elements, photon sources or photon source pairs can be used one after another or simultaneously to form multiple housings, especially to form multiple housings that are spatially separated from each other.

[0030] According to at least one embodiment of the method, a plurality of structural elements are manufactured. For example, the separate bodies of the structural elements are formed side by side in a liquid solution. Therefore, in particular, the bodies of adjacent structural elements are never implemented as continuous. Because the individual shells of adjacent structural elements are already spatially spaced from each other during their manufacturing process, the separation step through the shells can be omitted. Therefore, the shells, for example, have no dividing marks and / or no processing marks on their sides. However, the separation of the structural elements can be carried out through the electrode structure, especially only through the electrode structure. Therefore, the electrode structure of the structural element having a first electrode and a second electrode will have dividing marks on one or more of its sides.

[0031] In at least one embodiment of the structural element, the structural element has a body, an electrode structure disposed for electrical contact with the body, and a housing adjacent to the body and the electrode structure. The housing is particularly designed to be a single piece and to be in close contact with both the body and the electrode structure. For example, the housing does not contain external machining marks and / or does not contain flat internal sublayers that extend parallel to each other, are arranged vertically and horizontally.

[0032] This structural element is particularly a structural element manufactured according to at least one of the methods described herein. The methods described herein are especially suitable for manufacturing the structural elements described herein. Therefore, the features described in conjunction with the methods can also be used for this structural element, and vice versa. Attached Figure Description

[0033] Other preferred embodiments and improvements of the structural element and the method for manufacturing the structural element are described below. Figures 1A to 5B The illustrated embodiments are derived. The accompanying drawings show:

[0034] Figure 1A and 1B The diagram schematically illustrates a method for manufacturing a structural element, and also schematically illustrates the structural element itself.

[0035] Figure 2A and 2B The illustration shows comparative examples of structural elements.

[0036] Figure 3A and 3B Another embodiment of the structural element is schematically shown in top and sectional views, and

[0037] Figure 4A , 4B Other embodiments of the structural elements are schematically shown in top and sectional views, 5A and 5B.

[0038] Identical, similar, or functional elements are given the same reference numerals in the accompanying drawings. The drawings are schematic and therefore not necessarily drawn to scale. Instead, for clarity, relatively small elements and, in particular, layer thicknesses may be exaggerated.

[0039] List of reference numerals

[0040] 10 Structural Components

[0041] 2. Main Body

[0042] 3. Shell

[0043] 30. Chambers of the shell

[0044] 32 Covering layer

[0045] 4 Electrode Structure

[0046] 41 First Electrode

[0047] 42 Second electrode

[0048] 8 Photon Sources / Laser

[0049] 8R beam

[0050] 8S Optical Components

[0051] 9 containers

[0052] 90 solution

[0053] 91 Support Structure

[0054] Front side of 9V container / support structure

[0055] Rear side of 9R container / support structure

[0056] 9S bracket structure opening Detailed Implementation

[0057] Figure 1AThe schematic diagram illustrates method steps for manufacturing structural element 10. Structural element 10 has a body 2 and an electrode structure 4. The electrode structure 4 is configured for electrical contact with the body 2 or with the structural element 10. The electrode structure 4 has a first electrode 41 and a second electrode 42, wherein electrodes 41 and 42 are associated with different polarities of the structural element 10.

[0058] exist Figure 1A In the diagram, the main body 2 is arranged on and mechanically and electrically connected to the first electrode 41. The second electrode 42 is arranged laterally to the first electrode 41. In the top view, the main body 2 and the second electrode 42 do not overlap. Specifically, the first electrode 41 has a mounting surface on which the main body 2 is fixed. The main body 2 is electrically connected directly to the first electrode 41. The main body 2 can be electrically connected, for example, via a wire (for clarity, in...). Figure 1A (The wire connection is not shown in the diagram) and is electrically connected to the second electrode 42.

[0059] and Figure 1A Unlike other electrodes, the main body 2 can be arranged on both the first electrode 41 and the second electrode 42. In this case, the main body 2 overlaps with both the first electrode 41 and the second electrode 42 in a top view. This is, for example... Figure 3B , 4B As schematically shown in 5B. The body 2 has an electrical connection point, particularly on its rear side, through which the body 2 can be electrically connected to electrodes 41 and 42, for example, through direct electrical connection.

[0060] according to Figure 1A Electrode structure 4 and main body 2 are arranged on support structure 91. Support structure 91 is specifically a part of container 9. In contrast, support structure 91 can be independent of container 9. In other words, support structure 91 can be fixedly connected to container 9 or not fixedly connected to container 9. Support structure 91 has opening 9S. In the top view, electrodes 41 and 42 partially cover opening 9S, respectively. Figure 1A Unlike other structures, the support structure 91 can have multiple openings 9S. In order to manufacture multiple structural elements 10, multiple electrode structures 4 and multiple main bodies 2 can be arranged on the support structure 91.

[0061] according to Figure 1AA housing 3 is manufactured in the environment surrounding the electrode structure 4 and the main body 2. For this purpose, a container 9 is filled with a liquid solution 90. Filling the container 9 with the liquid solution 90 can be done before or after the main body 2 and the electrode structure 4 are placed into the container 9. The main body 2 and the electrode structure 4 are completely surrounded by the liquid solution 90. The liquid solution 90 contains a photocurable material that solidifies upon exposure to a beam. This solution 90 particularly contains the base monomers of a photopolymer. The liquid solution 90 can be an acrylic, epoxy, or vinyl ester resin solution. This solution can contain an initiator that, upon irradiation, especially when two photons are absorbed simultaneously, triggers a chain reaction to form a polymer from the base monomers.

[0062] Figure 1A The method steps for forming the shell 3 by means of two-photon lithography, i.e., by means of two-photon polymerization, are shown. This method is, for example, in... Figure 1B It is shown schematically in the middle.

[0063] The shell 3 is fabricated using two-photon lithography, in which the beams 8R of two photon sources 8, particularly two laser sources 8, are focused at a target local location on the body 2 and / or electrode structure 4. This causes the photocurable material in solution 90 to polymerize and harden at the focused local location to form the shell 3. By focusing the beams 8R, the photocurable material can simultaneously absorb two photons, particularly photons from different photon sources. Therefore, these two photon sources provide sufficient energy to initiate the polymerization process. The polymerization process occurs particularly at the point where the beams are focused. Alternatively, according to... Figure 1B Similarly, a single photon source 8 can be used. The beam 8R emitted by the photon source 8 can be focused, in particular, by means of an optical element 8S such as a lens, so that photon pairs are absorbed simultaneously or substantially simultaneously at the focal point. Such a focal point... Figure 1B The image on the right is schematically shown, where polymer chains are formed. This technique allows the shell 3 to be formed in any location and any shape.

[0064] If the main body 2 or the electrode structure 4 partially covers the opening 9S of the support structure 91, the shell 3 can be formed by the focused beam 8R exiting directly from the front side 9V or the rear side 9R of the container 9 through the opening 9S. This is in Figure 1A It is illustrated schematically. According to Figure 1AThe second electrode 42 is, in particular, a structured, for example, semi-etched lead frame. This lead frame has curved or angled surfaces, which are readily accessible only from the front 9V or rear 9R of the container 9. In two-photon lithography, one or more photon sources 8 can be arranged on the front 8V or rear 9R of the container 9 to adjust the focus point. Hardening of the housing material is achieved from above and below using one or more photon sources 8, which is inaccessible or difficult to access from below or above, particularly due to the curved or angled surfaces of the electrode structure 4.

[0065] according to Figure 1A The second electrode 42 has irregularly curved sides. By appropriately selecting the focal point, the housing 3 can be designed to closely abut the second electrode 42 on its curved or angled sides as well. The second electrode 42 can extend vertically through the housing 3. In the transverse direction, the body 2 and the second electrode 42 are completely surrounded by the housing 3. The first electrode 41 can also be completely surrounded by the housing 3 in the transverse direction. The housing 3 can completely cover all sides of the body 2, the first electrode 41, and / or the second electrode 42.

[0066] Figure 2A and 2B A comparative example of structural element 10 is shown, whose shell 3 is manufactured, in particular, by means of standard photolithography or by means of standard polymerization. In this method, for example, a photonic source is used to polymerize a photocurable material, wherein after each step the shell sinks slightly deeper into the liquid and returns to a position to form sublayers of shell 3.

[0067] Unlike in two-photon lithography, the shell 3 typically has a layer sequence consisting of multiple sublayers, which are particularly flat and arranged stacked one on top of the other, extending parallel to each other. Figure 2B The image schematically illustrates this housing 3. According to... Figure 2B The shell 3 has approximately 20 to 30 flat, stacked sublayers, each having a layer thickness, particularly between 10 μm and 20 μm (including the boundary value).

[0068] Using two-photon lithography or two-photon polymerization, it is possible to manufacture materials that do not contain, for example, [the following]. Figure 2B The shell 3 shown is a layered sequence consisting of multiple sublayers. For example, it is particularly advantageous to abandon the manufacture of multiple sublayers arranged in a stacked manner when the height of the body 2 is too large for the layered structure and the material distribution in the solution 90 is uneven.

[0069] exist Figure 3A and 3B The embodiment of structural element 10 shown basically corresponds to Figure 1AThe structural element 10 shown can be manufactured using two-photon lithography. Figure 3B It shows the section along AB. Figure 3A The structural element 10 shown is... Figure 1A Different, according to Figure 3B The electrode structure 4 has two substantially identical electrodes 41 and 42, which are electrically connected to one of the connection points on the rear side of the main body 2. In the top view, electrodes 41 and 42, i.e., the entire electrode structure 4, are completely covered by the housing 3. The electrode structure 4 is completely surrounded by the housing 3 in the lateral direction.

[0070] As with Figure 1A Another difference, according to Figure 3A and 3B The housing 3 has a cavity 30 in which the main body 2 is disposed. The housing 3 protrudes vertically beyond the main body 2. In the manufacture of the structural element 10, the electrode structure 4 and the main body 2 can be arranged on the support layer 91 such that the electrode structure 4 and the main body 2 at least partially or completely cover the opening 9S of the support structure 91. The housing 3 is designed to be a single piece. The cavity 30 is manufactured specifically by two-photon lithography, and there is no need to remove material from the housing 3 afterward to form the cavity 30. The outer surface of the housing 3, such as the outer surface of the cavity 30, is free of machining marks.

[0071] and Figure 3B Unlike the housing 3, the chamber 30 can be filled with a material different from that of the housing 3. For example, the chamber 30 may be filled with a filling layer, specifically a filling layer made of a beam-permeable material. In a top view, the filling layer may partially or completely cover the body 2. The filling layer may be implemented in the form of a lens.

[0072] Figure 4A and 4B The embodiment of structural element 10 shown basically corresponds to Figure 3A and 3B The structural element 10 shown is shown. Figure 4B It shows the section along AB. Figure 4A Structural element 10 is shown. In contrast, housing 3 does not have an open chamber. Instead, housing 3 completely covers body 2 in the top view. According to... Figure 4A and 4B The structural element 10 has a covering layer 32. The covering layer 32 has a lens shape and completely covers the main body 2 in a top view. The covering layer 32 can be formed of a beam-permeable or beam-impermeable material.

[0073] The capping layer 32 is formed of a material that is particularly different from that of the housing 3. In this case, the internal interface between the housing 3 and the capping layer 32 can be identified in the fabricated structural element 10. The capping layer 32 can also be fabricated by means of two-photon lithography. For example, the liquid solution 90 has a different material composition in the fabrication of the capping layer 32 than in the fabrication of the housing 3. In contrast, the housing 3 and the capping layer 32 can also be formed of the same material. For example, the housing 3 and the capping layer 32 are fabricated in the same liquid solution 90 during a common process step. In this case, the housing 3 and the capping layer 32 form a unit in which the housing 3 seamlessly transitions into the capping layer 32. Therefore, there is no clearly identifiable internal interface between the capping layer 32 and the housing 3.

[0074] Figure 5A and 5B The embodiment of structural element 10 shown basically corresponds to Figure 4A and 4B The structural element 10 shown, wherein Figure 5B It shows the section along AB. Figure 5A The structural element 10 shown is... Figure 4A and 4B Unlike other structures, the housing 3 terminates vertically flush with the main body 2. In the top view, the main body 2 is not covered by the housing 3. Instead of the lens-shaped covering layer 32, Figure 5A and 5B The structural element 10 shown has an annular cover layer 32. The cover layer 32 extends vertically out of the body 2. The annular cover layer 32 has an opening in the top view, in which the body 2 is located. The cover layer 32 can be formed of a beam-impermeable material, especially a material that absorbs or reflects beams.

[0075] Completely similar Figure 4A and 4B The embodiments shown are based on Figure 5A and 5B The cover layer 32 and housing 3 of the illustrated embodiment can be formed from the same material or different materials. Therefore, the cover layer 32 and housing 3 can be manufactured during common method steps or in different method steps. In this document, Figure 4A and 4B The features of the described structural element 10, especially those relating to the housing 3 and the covering layer 32, can also be used according to Figure 5A and 5B Structural element 10.

[0076] In summary, two-photon lithography can be used to fabricate housings 3 of arbitrary shapes at any location on the body 2 and / or electrode structure 4 in a simple manner. Here, the housing 3 can, for example, have a chamber 30, a predetermined pattern, a cavity, or a cover layer 32 of any shape. The cover layer 32 or the chamber 30 can be fabricated, in particular, solely by means of two-photon lithography without material removal. Therefore, this method can be implemented in a particularly material-saving manner. Furthermore, this technology does not require any pre-fabrication molds or masks to fabricate the housing 3. Moreover, two-photon lithography enables the housing 3 to be arranged with exceptional precision within the structural element 10.

[0077] This invention is not limited to the description of the invention based on embodiments. Rather, the invention covers each new feature and each combination of features, especially each combination of features in the claims, even if the feature or combination itself is not expressly given in the claims or embodiments.

Claims

1. A method for manufacturing a structural element (10), the structural element having a body (2), an electrode structure (4) disposed for electrical contact with the body (2), and a housing (3) adjacent to the body (2) and the electrode structure (4), the method comprising the steps of: - Provide a container (9) together with a liquid solution (90) containing a photocurable material located in the container, wherein the body (2) and the electrode structure (4) are arranged in the container (9) and surrounded by the liquid solution (90); and - The housing (3) is manufactured by means of two-photon lithography, wherein photons are focused on a target local position on the body (2) and the electrode structure (4), thereby polymerizing and hardening the photocurable material in the solution (90) at the focused local position to form the housing (3). wherein The support structure (91) is located in the container (9) and has an opening (9S), wherein the body (2) and the electrode structure (4) are arranged on the support structure (91) such that in a top view the body (2) and / or the electrode structure (4) at least partially cover the opening (9S).

2. The method according to claim 1, wherein The photocurable material has monomers of photocurable plastic.

3. The method according to claim 1, wherein The liquid solution (90) is an acrylic resin, epoxy resin or vinyl ester resin solution.

4. The method according to claim 1, wherein The main body (2) and the electrode structure (4) are completely surrounded by the solution (90), and the shell (3) is formed simply by focusing photons on the target local position without any additional auxiliary means.

5. The method according to claim 1, wherein, The housing (3) is formed on the surface of the body (2) and / or the electrode structure (4), wherein - In order to form the housing (3) on the surface of the body (2) and / or the electrode structure (4) facing the opening (9S), the photons are focused through the opening (9S) of the support structure (91), and - In order to form the housing (3) on the surface of the body (2) and / or the electrode structure (4) opposite to the opening (9S), the photons are not focused through the opening (9S) of the support structure (91).

6. The method according to claim 1, wherein The housing (3) is formed at a local location where the beam (8R) is focused, such that the housing (3) completely surrounds the body (2) and / or the electrode structure (4) in the lateral direction.

7. The method according to claim 1, wherein The cover layer (32) together with the housing (3) is formed by means of two-photon lithography, wherein the cover layer (32) has a lens shape on the body (2) or an annular shape around the body (2), and wherein the cover layer (32) and the housing (3) are made of the same material.

8. The method according to any one of claims 1 to 6, wherein Subsequently, a cover layer (32) is formed directly on the housing (3) using two-photon lithography, wherein the cover layer (32) has a lens shape on the body (2) or an annular shape around the body (2), and wherein the cover layer (32) and the housing (3) are made of different materials.

9. The method according to any one of claims 1 to 6, wherein, The housing (3) is manufactured without post-processing by simply polymerizing and curing the photocurable material in the following manner: the housing (3) has a chamber (30) in which the body (2) is arranged.

10. The method according to claim 1, in, The shell (3) is implemented as a single piece and does not contain sublayers that are stacked vertically and extend parallel to each other.

11. The method according to claim 1, in, The sub-regions of the shell (3) are first formed at different points that are spatially separated from each other, wherein the spatially separated sub-regions of the shell (3) grow due to the focusing of the beam (8R) and eventually grow together into a unified shell (3).

12. The method according to claim 11, in, Using photons from different photon sources (8), wherein the shell (3) is formed simultaneously at different points by means of different photon sources (8).

13. The method according to claim 1, in, Multiple structural elements (10) are manufactured, wherein the bodies (2) of the structural elements (10) are formed side by side separately from each other in the liquid solution (90), and thus the bodies are never implemented as a continuous unit.

14. A structural element (10), said structural element being manufactured according to the method of any one of claims 1-13, wherein, The housing (3) is designed as a single piece and is in close proximity to both the main body (2) and the electrode structure (4).

15. The structural element (10) according to claim 14. in, The shell (3) is free from external processing marks and / or free from internal sublayers that extend parallel to each other, are stacked vertically, and are flat.

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