exciter element
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SPEKTRA SCHWINGUNGSTECHN & AKUSTIK DRESDEN
- Filing Date
- 2021-09-28
- Publication Date
- 2026-06-12
AI Technical Summary
Existing vibration exciters struggle to generate controllable mechanical motion in high-frequency ranges (e.g., 100 kHz to 3 MHz), particularly in-plane and out-of-plane motion of MEMS sensors and actuators, and cannot achieve rotational motion.
The exciter, which uses piezoelectric composite material, achieves reliable holding of the test object by setting segmented activatable contact surfaces and coupling plates on its surface, and generates mechanical motion in a frequency range above 1 kHz, especially above 40 kHz and up to tens of megahertz.
It enables reliable mechanical motion, including out-of-plane motion and rotational motion, in a high frequency range, suitable for testing, characterization, and calibration of MEMS sensors and actuators.
Smart Images
Figure CN116326254B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an exciter element for generating mechanical motion, having an exciter and a holder for a test object, and having an electrical interface for transmitting excitation or measurement data.
[0002] The present invention also relates to a method for manufacturing such an exciter element. Background Technology
[0003] To perform functional testing, characterization, or calibration of sensors, especially vibration sensors, it is known to set them to vibrate in a controlled and deterministic manner using a vibration exciter. The response of the sensor, as the test object or device under test (DUT), is then measured, thereby obtaining information about its functional capabilities or deriving values for calibrating the sensor.
[0004] Calibration is defined as a comparative measurement of the DUT's measured variables, where the DUT's measured variables are related to national standards. The deviation between the DUT's measured variables and the correct values of the measured variables is identified and recorded.
[0005] Functional testing should be understood as measurements performed at different stages of a product (development, validation, service) to analyze the behavior of the DUT relative to measurement variables that are outside its calibration range.
[0006] Characterization defines a measurement in which not only is the DUT energized along with its measured variables, but the DUT's response to disturbances that may occur during its lifespan is also systematically studied.
[0007] For sensor calibration, the applicant's vibration exciter, SE-09, is known, capable of generating clean translational vibrations for calibration in a frequency range up to 20 kHz. Vibration excitation here is performed by a purely electric vibration exciter, which is energized by an electric system housed within a housing. A base plate constitutes the counterweight of the vibration system. The DUT is fixed to the vibration exciter. A drawback here is the upper limit of the vibration frequency to 20 kHz. The vibration exciter can be used for functional testing and characterization of the DUT up to 50 kHz.
[0008] A vibration exciter, designated SE-16, was provided by the applicant. This vibration exciter is as follows: Figure 1a As shown. Here, the vibration exciter is implemented using a purely electric vibration exciter 0.1, which is energized by an electric system housed in the housing 0.2. The base plate 0.3 constitutes the counterweight of the vibration system. The DUT is fixed to the vibration exciter 0.1. The disadvantage here is that, due to the principles involved, the upper limit of the vibration frequency is 100 kHz. Furthermore, clean translational vibration cannot be generated using this vibration exciter.
[0009] Also known is the applicant's vibration control system, named VCS 401-Piezo, which includes a piezoelectric-based vibration exciter, such as... Figure 1b As shown. It uses, for example... Figure 1c The piezoelectric oscillator 1 is shown. The piezoelectric oscillator 1 is arranged between the coupling member 0.4 and the counterweight 0.5. The oscillator 0.4 is equipped with a DUT holder for holding the test object 0.6 (sensor). The DUT holder is contained within the coupling member and consists of two M6 internal threads.
[0010] However, this is only a variation of the design. Therefore, the piezoelectric oscillator consists of a piezoelectric actuator and two vibrating masses, thus forming a free dual-mass oscillator. One mass block only functions as a counterweight (0.5), while the other mass block (0.4) functions as a coupling member to which the DUT can be fastened.
[0011] This piezoelectric oscillator 1 consists of a stack of individual piezoelectric vibrating plates 1a, each having a square, rectangular, or circular base area and thickness d (as shown in the figure). Using this stack of piezoelectric vibrating plates 1a, good translational motion can be achieved, with very few in-plane modes. However, even with this oscillator, it is impossible to generate vibration frequencies above 100 kHz; the datasheet gives an upper limit of 40 kHz. While vibrations above 40 kHz can still be generated here, they are no longer pure translations and therefore no longer fully controllable.
[0012] With the increasing use of sensors and actuators in numerous applications (due to miniaturized designs), especially in microsystems with so-called MEMS (Micro-Electro-Mechanical Systems), it is now necessary to test, characterize, and / or calibrate MEMS sensors. However, MEMS actuators, i.e., components that actively generate motion, also require testing, characterization, and calibration.
[0013] The primary drawback of known exciters is that, even with maximum utilization of physical limits, the frequency range is finite, making it impossible to measure MEMS at higher frequencies (e.g., from 100 kHz to 3 MHz). Furthermore, movement of the DUT 3 is only possible in the out-of-plane direction 5. As indicated by arrows x, y, and z in the figure, movement in the in-plane direction 10, i.e., movement of the motion axis 11 in the horizontal xy direction, and rotational movement about this axis, is not possible. For clarity, the term "out-of-plane" is used for the z-direction, and "in-plane" for the xy-direction. The coordinate axes are labeled in the attached figures.
[0014] Piezoelectric plates with a nominal frequency of 2 MHz or higher are commercially available. Such piezoelectric oscillators are supplied, for example, by PICeramic GmbH, 10 Lindenstraße, 07589 Lederhose. The problem here is the presence of in-plane modes across the entire frequency range, which results in uncontrollable out-of-plane motion.
[0015] like Figure 1c As shown, a drawback of a single piezoelectric vibrating plate 1a is that, even with longitudinal excitation dz, significant transverse excitation dxy is observed, leading to uncontrollable motion of the plate. As already described, good translational motion can be achieved using a stack of piezoelectric vibrating plates 1a, with very few in-plane modes. However, even with such an oscillator, it is impossible to generate vibration frequencies above several kilohertz to several megahertz. Uniform translation in the "out-of-plane" direction 5 is only possible within a selected frequency range, and as mentioned above, "in-plane" motion occurs, but cannot be excited in a controllable manner because it occurs only as a side effect or coupling effect of out-of-plane motion. Rotation of the DUT fixed to the piezoelectric oscillator, or rotation of the DUT itself, is entirely impossible.
[0016] like Figures 3 to 5 As shown, the acoustic signal generator in the form of a piezoelectric composite material 12 is a known achievement in the acoustics field, particularly in acoustic measurement technology. Piezoelectric composite materials are also plates, as discussed in... Figure 1c The explanation is that it is divided into multiple n piezoelectric elements 13. The piezoelectric elements 13 are connected together by a matrix 14. Compared with a standard piezoelectric plate, the advantage of the piezoelectric oscillator 1 can be seen in that it exhibits a significantly smaller lateral excitation dxy. However, it is unknown whether an acoustic source can be used as the piezoelectric oscillator 1 in the measurement or calibration assembly 2. Summary of the Invention
[0017] The object of the present invention is to provide an exciter element for generating or measuring mechanical motion, having an exciter and a holder for the test object, and having an electrical interface for transmitting excitation or measurement data, the exciter element operating reliably at mechanical motions above 1 kHz, particularly above 40 kHz, preferably above 100 kHz up to the order of tens of megahertz, and allowing “out-of-plane” motion and rotation of the DUT.
[0018] This objective is achieved in the component by using a piezoelectric vibrating plate or piezoelectric oscillator in the form of a piezoelectric composite material as the exciter. The piezoelectric composite material has a first surface transverse to the plate thickness, a second surface spaced apart from the first surface by the plate thickness and parallel to the first surface, and a rod-shaped piezoelectric element extending between the first and second surfaces. The exciter has a first contact surface on its first surface and a second contact surface on its second surface, wherein the contact surfaces are activatable. The exciter is configured to hold the object to be tested on its second surface.
[0019] With this component, it is, in principle, possible for the first time to reliably generate mechanical motion in a frequency range above 1 kHz, especially above 40 kHz, preferably above 100 kHz, up to the order of tens of megahertz.
[0020] In one embodiment of the invention, a plate-shaped piezoelectric composite material known per se is used as the exciter. The plate-shaped piezoelectric composite material has a first surface transverse to the plate thickness, a second surface spaced apart from the first surface by the plate thickness and parallel to the first surface, and has rod-shaped piezoelectric elements extending between the first and second surfaces. The exciter is further subdivided into piezoelectric element segments configured to be individually excitable.
[0021] In addition to exhibiting significantly smaller lateral excitation dxy, the baffles can be configured in a customized manner.
[0022] To excite the individual septa, to purposefully control the individual septa, to suppress septa patterns, and / or to excite rotation via phase shift between the septa, the exciter is provided with a segmented first contact surface on its first surface and a segmented second contact surface on its second surface, wherein the contact surfaces are segmentally activatable and separated from each other by an interface. The exciter is configured to hold the object under test on its second surface.
[0023] To manufacture the partition, it is specified that the two contact surfaces are divided into strips, with each contact strip having the same width.
[0024] If strip-shaped partitions are to be produced, the contact strips on the two contact surfaces can have the same orientation in the horizontal direction, that is, in the x or y direction.
[0025] However, it is also possible to create an insulating partition because the contact strips on the first contact surface have an orientation in the first horizontal direction (i.e., the x-direction), and the orientation on the second contact surface is located in a second direction orthogonal to the first horizontal direction (i.e., the y-direction). Viewed from a projection in the vertical z-direction, the cut surfaces of the contact strips on the first and second contact surfaces here constitute an insulating partition.
[0026] Preferably, regarding the configuration of the exciter capable of holding the test object on its second surface, the exciter has a segmented coupling plate above the second contact surface. The segments of the coupling plate are used to replicate the partitions of the exciter; that is, the segments are preferably selected such that the cut surfaces of the contact strips of the first and second contact surfaces, as seen in the projection in the vertical z-direction, form partitions corresponding to the segments, so that in each case, the movement of the segments or the movement of the partitions can be transmitted.
[0027] In one embodiment of the exciter element, the coupling plate is segmented into strip-shaped first coupling plate segments, the width and orientation of which correspond to the contact strips of the second contact surface, and the first coupling plate segment is oriented in the y-direction and positioned above the contact strips of the second contact surface in the vertical z-direction. This creates strip-shaped partitions. These partitions can be individually excited by applying a voltage to the contact strips opposite each other in the Z-projection. Therefore, all translational movements of the individual partitions in the Z-direction can be performed independently of each other. Thus, translational movements of the exciter element as a whole, as well as wave-like movements, can be generated. However, by activating adjacent partitions or adjacent groups of partitions, a phase shift of 180° may also be achieved for the first time, resulting in rotation of the DUT about a rotation axis located in the xy-direction plane.
[0028] In another embodiment of the exciter element according to the invention, the coupling plate can be further divided into strips extending along the x-direction to form a square second coupling plate segment, wherein when the contact strips of the first and second contact surfaces are orthogonally oriented to each other, and viewed from the vertical z-direction, the square second coupling plate segment is positioned above the cut surfaces of the contact strips of the first and second contact surfaces in the vertical z-direction. This achieves insulating separation. The intersecting contact strips in the projection can contact individually. When a voltage is applied, the piezoelectric elements located in the cut regions of the respective contact strips are energized. However, as described above, it is still possible to energize the entire strip or group.
[0029] In a preferred embodiment, the first or second coupling plate segments are mechanically connected adjacent to each other by a connecting device. The connecting device may be in the following forms:
[0030] - The weakening of the structure and the related reduction in stiffness in this region
[0031] - The filler material has a lower elastic modulus than the coupling plate segment.
[0032] Therefore, at least within the frequency range considered here, the coupling plate segments can move independently of each other.
[0033] The connecting device can be made of epoxy resin, silicone resin, or another plastic material. These materials achieve mechanical decoupling of the coupling plate segments within the frequency range.
[0034] One objective is mechanical decoupling. Another objective is to achieve sufficiently strong retention between the coupled plate segments during manufacturing.
[0035] The coupling plate has a smooth surface achieved through the connecting device, to which the DUT can be applied, preferably bonded. Specifically, an easily reversible adhesive can be used here, which can be removed from the DUT without leaving residue or causing damage, thus allowing further use of the DUT and the exciter.
[0036] It should be emphasized here that the exciter element described here is associated with the mechanical coupling between the DUT and the exciter element, rather than the acoustic coupling, which corresponds to the actual purpose of the piezoelectric composite material.
[0037] To ensure a better connection between the DUT and the coupling plate, and to generate a vibration system in the form of a free dual-mass oscillator, the exciter is connected to a counterweight at its first contact surface. Therefore, the coupling plate element on one side acts as the mass of the vibration system, while the counterweight on the other side acts as the second mass.
[0038] To further configure and manufacture individual dual-mass oscillators to form a dual-mass oscillator array, the counterweight is set in the form of a counterweight plate, constructed as a counterweight segment corresponding to the coupling plate, wherein the thickness of the counterweight plate can be different from the thickness of the coupling plate. It is also conceivable that the DUT is also fixed to the first surface.
[0039] In another embodiment, the exciter element is specified to be fixed to a second vibration exciter. This second vibration exciter may be, for example, an electrically driven vibration exciter known in the prior art (e.g., the applicant's SE-16). Thus, the low-frequency range in which the second vibration exciter can operate can be covered by the second vibration exciter, and higher frequencies above the reliable operating range of the second vibration exciter can be covered by the exciter element according to the invention.
[0040] The object of the invention is also achieved by a method for producing exciter elements. A coupling plate has grooves provided at a distance and direction corresponding to a segment of the coupling plate, starting from its second or first surface. However, the grooves do not extend to the corresponding other second or first surface, but only to a distance from the opposing first or second surface. The grooves are then filled with a connecting device. To separate the coupling plate elements, the coupling plates located on the opposing first or second surfaces are removed until the grooves are reached.
[0041] The coupling plate can be bonded to the exciter, for example, by adhesive. This connection is achieved by having multiple exciter elements, specifically one or more piezoelectric segments, located opposite the coupling plate segment. Thus, the multiple exciter elements are responsible for either exciting the DUT in the region of the coupling plate element or for detecting the DUT's movement in the region of the corresponding coupling plate element.
[0042] To generate the vibration system, the exciter is connected to a counterweight plate, and the counterweight plate is constructed as a coupling plate. Thus, a single small dual-mass oscillator with a partition size is formed, which, according to the invention, can be activated independently, thereby generating various forms of motion of the DUT, such as translational and / or rotational motion, particularly tilting and / or wavy motion.
[0043] In particular, if adjacent partitions are activated, for example, in opposite directions, rotational motion about a rotation axis located in the plane can be generated. Attached Figure Description
[0044] The present invention will now be explained in more detail through exemplary embodiments. (See accompanying drawings.)
[0045] Figure 1a The applicant's vibration exciter SE-16 is shown.
[0046] Figure 1b A piezoelectric-based vibration exciter is shown, which is part of the applicant's vibration control system VCS401-piezo.
[0047] Figure 1c The standard piezoelectric oscillators with different structural forms and their vibration behavior are shown.
[0048] Figure 2 The basic setup of the measurement or calibration component according to the present invention is shown.
[0049] Figure 3 These are perspective and cross-sectional views of piezoelectric composite materials.
[0050] Figure 4 The image shows magnified details of a perspective view of a piezoelectric composite material.
[0051] Figure 5 A piezoelectric composite material with contact strips is shown.
[0052] Figure 6 This is a perspective view of a piezoelectric composite material on which a DUT (Device Under Test) is arranged.
[0053] Figure 7 It shows Figure 6 The cross-section of a piezoelectric composite material, on which a DUT and an applied voltage for translational excitation are arranged.
[0054] Figure 8 It shows Figure 6 The cross-section of a piezoelectric composite material, on which a DUT and an applied voltage for rotary excitation are arranged.
[0055] Figure 9 This is a perspective view of a piezoelectric composite material having a strip-shaped coupling plate and a DUT arranged on its second surface.
[0056] Figure 10 This is a side view of a piezoelectric composite material, which has contact strips on a first surface in the y-direction and on a second surface in the y-direction.
[0057] Figure 11 This is a plan view of a piezoelectric composite material, wherein a contact strip is provided on the second surface of the piezoelectric composite material in the x-direction.
[0058] Figure 12 This is a plan view of a piezoelectric composite material, wherein a contact strip is provided on the first surface of the piezoelectric composite material in the y-direction.
[0059] Figure 13 This is a plan view of a piezoelectric composite material, wherein contact strips are provided on the structured counterweight plate in the y-direction and on the first surface.
[0060] Figure 14 This is a plan view of a piezoelectric composite material, wherein a contact strip and a structured mass plate are provided on the second surface of the piezoelectric composite material in the x-direction.
[0061] Figure 15 This is a plan view of the exciter element with the DUT mounted on the second surface.
[0062] Figure 16 It is a cross-section through a piezoelectric composite material, which is provided with a structured mass plate, a structured counterweight plate, and a DUT.
[0063] Figure 17 It is based on Figure 16 A perspective view of the piezoelectric composite material. Detailed Implementation
[0064] Figure 2 The basic setup of the DUT 3 on the measurement and calibration assembly 2 is shown. The DUT 3 is arranged on the oscillator 4, thus setting it to mechanical movement in a vertical or "out-of-plane" direction 5. The oscillator 4 is connected to a counterweight 6, which can be elastically or fixedly connected to a counterweight 7.
[0065] This DUT 3 consists of one or more motion elements 8 in the form of MEMS and control electronics. The motion elements 8 can be in the form of sensors or actuators, and the control electronics are arranged on a support 9 (in the form of a printed circuit board (PCB) or a chip). The sensors can be, for example, inertial sensors (accelerometers and rotation sensors), and the actuators can be, for example, optical actuators (e.g., mirror actuators), fluid actuators (e.g., valves or pumps), or acoustic actuators (e.g., sound sources).
[0066] This microsystem is arranged on exciter element 4, which consists of a motion element 8 in the form of a MEMS and a support 9 in the form of a PCB. The exciter element is configured as an oscillator according to the prior art, which enables the microsystem 3 to be set up as a DUT in translational vibration, and then the response of the DUT 3 to the vibration is measured. The action of the DUT 3 is unknown when using this setup (i.e., when the DUT 3 contains an actuator as the motion element 8).
[0067] The basic idea of this invention is to... Figure 3 and Figure 4 The piezoelectric composite material 12 is used as a base material. Figure 2 The exciter in the exciter element 4 is used to generate or measure mechanical motion. The piezoelectric composite material 12 is known in itself and has a first surface 15, a second surface 16 spaced apart from the first surface 15 by a thickness d, and a rod-shaped piezoelectric element 13 extending between the first surface 15 and the second surface 16.
[0068] like Figure 5 As shown, the piezoelectric composite material 12 has a segmented first contact surface 17 on its first surface 15 and a segmented second contact surface 18 on its second surface 16, wherein the contact surfaces 17 and 18 are segmented and activatable, and are separated from each other by an interface formed by contacts 31, as shown. Figures 10 to 12 As shown.
[0069] The two contact surfaces 17 and 18 are divided into strips, namely, the first contact strip 19 of the first contact surface 17 and the second contact strip 20 of the second contact surface 18, wherein each of the first contact strip 19 and the second contact strip 20 preferably, but not necessarily, has the same width.
[0070] There are two possibilities for the orientation of the first contact strip 19 and the second contact strip 20.
[0071] like Figure 6 As shown, the piezoelectric element 13, which has contact surfaces 17 and 18, can be equipped with a DUT 3, preferably a PCB with MEMS. In this example, the DUT 3 contains four MEMS 21 arranged on a PCB 22.
[0072] The first contact strip 19 and the second contact strip 20 of the two contact surfaces 17 and 18 can have the same orientation in the horizontal direction, i.e. in the x or y direction.
[0073] Figure 7 As shown, translational motion 23 can be generated by applying equal voltage to the first contact surface 17 and voltages with different polarizations to the second contact surface 18.
[0074] Figure 8 As shown, rotational motion 24 can be generated by applying different voltages to the first contact surface 17 and different voltages with different polarizations to the second contact surface 18.
[0075] like Figure 9 As shown, in an embodiment of the exciter, the piezoelectric composite material 12 is provided with a segmented coupling plate 25 above the second contact surface 18.
[0076] The coupling plate 25 of this segment forms the retainer of DUT 3.
[0077] The coupling plate 25 is divided into strip-shaped first coupling plate segments 26, such that their width and orientation correspond to the second contact strip 20 of the second contact surface 18, and the first coupling plate segments 26 are oriented in the y-direction and are located above the second contact strip 20 of the second contact surface 18 in the vertical z-direction.
[0078] The piezoelectric composite material 12 is connected to the counterweight 27 at its first surface.
[0079] like Figures 10 to 12 As shown, in another embodiment, the first contact strip 19 on the first contact surface 17 may have an orientation in a first horizontal direction, i.e., the x-direction, and on the second contact surface 18 may have an orientation in a second direction orthogonal to the first horizontal direction, i.e., the y-direction. In the figures, the contact point 31 is shown only schematically. Typically, all the first contact strips 19 and the second contact strips 20 are provided with contact points 31. The inclined, annular, or other forms of the contact strips are not shown, but are also possible.
[0080] Therefore, by applying a voltage, the piezoelectric element 13 in the intersection area of the first contact bar 19 and the second contact bar 20 can be intentionally energized or measured, similar to... Figure 7 and Figure 8 The voltage is applied in the middle.
[0081] The coupling plate 25 can be further divided into strips extending in the x direction to form a square second coupling plate segment 28. When the first contact strip 19 and the second contact strip 20 of the first and second contact surfaces 17 and 18 are orthogonally oriented to each other, the square second coupling plate segment 28 is located above the cut surfaces of the first contact strip 19 and the second contact strip 20 of the first and second contact surfaces 17 and 18 in the vertical z direction when viewed from the projection in the vertical z direction.
[0082] The first or second coupling plate segments 26, 28 are mechanically connected adjacent to each other by a connecting device, wherein the elastic modulus of the connecting device is lower than that of the coupling plate segments. The connecting device can be made of epoxy resin or silicone resin. Furthermore, decoupling can also be achieved through appropriate shaping, for example, by using a narrow mesh, such as... Figure 9 As shown in Figure 26.
[0083] like Figure 13 and Figure 17 As shown, the counterweight 27 is in the form of a segmented counterweight plate 29, which is constructed as a counterweight segment 30 corresponding to the coupling plate 25.
[0084] This is achieved by setting grooves on the first or second surface of the coupling plate 25 and / or counterweight plate 29 at a distance and direction corresponding to the first coupling plate segment 26 or counterweight element 30. However, the grooves do not extend to the corresponding other second or first surface, but only extend to a certain distance from the opposite first or second surface. The grooves are filled by the connecting device, and the coupling plate 25 or counterweight plate 29 located on the opposite first or second side are removed until the grooves are reached.
[0085] Figure Labels
[0086] 0.1 Vibration exciter
[0087] 0.2 shell
[0088] 0.3 substrate
[0089] 0.4 oscillator
[0090] 0.5 counterweight
[0091] 0.6DUT Holder
[0092] 1 Piezoelectric oscillator
[0093] 1a Piezoelectric Vibrating Plate
[0094] 2 Measurement or calibration components
[0095] 3 Microsystems, DUT
[0096] 4. Excitation components, oscillator
[0097] 5. "Out-of-plane" direction
[0098] 6 counterweights
[0099] 7 Basic Quality
[0100] 8 moving components, MEMS
[0101] 9 supporting components, PCB
[0102] 10. In-plane motion
[0103] 11 axes of motion
[0104] 12 Piezoelectric composite materials
[0105] 13 piezoelectric elements
[0106] 14-matrix
[0107] 15 First page
[0108] 16 Second page
[0109] 17. The segmented first contact surface on the first surface
[0110] 18. Segmented second contact surface on the second surface
[0111] 19 First contact strip on the first contact surface
[0112] 20 Second contact strip on the second contact surface
[0113] 21MEMS
[0114] 22PCB
[0115] 23 Translational motion
[0116] 24 Rotational motion
[0117] 25-segment coupling plate
[0118] The first coupling plate segment of 26 strips
[0119] 27 counterweights
[0120] The second coupling plate segment of the 28 square
[0121] 29-section counterweight plate
[0122] 30 counterweight section
[0123] 31 contacts
Claims
1. An exciter element for generating mechanical motion, comprising an exciter and a holder for a test object, and having an electrical interface for transmitting excitation or measurement data. - wherein, The piezoelectric vibrating plate (1a) or the piezoelectric oscillator (1) in the form of a piezoelectric composite material (12) is known per se, the piezoelectric composite material (12) having a first surface (15) arranged transversely to the plate thickness (d), a second surface spaced apart from the first surface by the plate thickness and placed parallel to the first surface, and a piezoelectric element between the first surface and the second surface. -The exciter has a first contact surface (17) on its first surface (15) and a second contact surface (18) on its second surface (16), the first contact surface (17) and the second contact surface (18) being activatable, wherein the exciter is subdivided into segments of a plurality of piezoelectric elements (13), the segments being configured to be individually energized, and -The exciter is configured to hold the test object (3) on its second surface (16), wherein the exciter is provided with a segmented coupling plate (25) above the second contact surface (18).
2. The exciter element according to claim 1, characterized in that, The exciter has a segmented first contact surface (17) on its first surface (15) and a segmented second contact surface (18) on its second surface (16), wherein the first contact surface (17) and the second contact surface (18) are segmented and activatable and are separated from each other by an interface.
3. The exciter element according to claim 1, characterized in that, The first contact surface (17) and the second contact surface (18) are segmented in strips, wherein the first contact strip (19) and the second contact strip (20) have the same width.
4. The exciter element according to any one of claims 1 to 3, characterized in that, The first contact strip (19) and the second contact strip (20) of the first contact surface (17) and the second contact surface (18) have the same orientation in the horizontal direction, that is, in the x or y direction.
5. The exciter element according to any one of claims 1 to 3, characterized in that, The first contact strip (19) on the first contact surface (17) has an orientation in the first horizontal direction, i.e., the x direction, and the second contact strip (20) on the second contact surface (18) has an orientation in the second direction orthogonal to the first horizontal direction, i.e., the y direction.
6. The exciter element according to claim 5, characterized in that, The coupling plate (25) is divided into a strip-shaped first coupling plate segment (26) such that its width and direction correspond to the second contact strip (20) of the second contact surface (18), and the first coupling plate segment is oriented in the y direction and is located above the second contact strip (20) of the second contact surface (18) in the vertical z direction.
7. The exciter element according to claim 6, characterized in that, The coupling plate (25) is further divided into strips extending in the x direction to form a square second coupling plate segment (28). When the first contact strip (19) and the second contact strip (20) of the first contact surface (17) and the second contact surface (18) are orthogonally oriented to each other, the square second coupling plate segment (28) is located above the cut surface of the first contact strip (19) and the second contact strip (20) of the first contact surface (17) and the second contact surface (18) in the vertical z direction, as viewed from the projection in the vertical z direction.
8. The exciter element according to claim 6, characterized in that, The first coupling plate segment (26) or the second coupling plate segment (28) are mechanically connected adjacent to each other by a connecting device, wherein the elastic modulus of the connecting device is less than the elastic modulus of the first coupling plate segment (26) and the second coupling plate segment (28).
9. The exciter element according to claim 8, characterized in that, The connecting device is made of epoxy resin, silicone resin or another plastic material.
10. The exciter element according to claim 1, characterized in that, The exciter is connected to the counterweight (6) at its first face (15).
11. The exciter element according to claim 10, characterized in that, The counterweights (6, 27) are in the form of counterweight plates (29), and their construction is a counterweight section (30) corresponding to the coupling plate (25).
12. The exciter element according to claim 1, characterized in that, The exciter element is fixed to the second vibration exciter (0.1).
13. A method for producing an exciter element according to any one of claims 1 to 12, characterized in that, The coupling plate (25) has a groove on its second surface (16) or first surface (15) at a distance and direction corresponding to the first coupling plate segment (26) and the second coupling plate segment (28). However, the groove does not extend to the corresponding other second surface (16) or first surface (15), but only extends to a certain distance from the opposite first surface (15) or second surface (16). The groove is filled by the connecting device, and the coupling plate (25) located on the opposite first surface (15) or second surface (16) is removed until the groove is reached.
14. The method according to claim 13, characterized in that, The coupling plate (25) is connected to the exciter, such that multiple exciter elements are located opposite the first coupling plate segment (26) and the second coupling plate segment (28).
15. The method according to any one of claims 13 to 14, characterized in that, The exciter is connected to the counterweight plate (29), and the counterweight plate (29) is constructed as a coupling plate (25).