Overhead transport vehicle

By designing a movable container contact part and cooperating with a magnet, the problem of height detection error and surface damage when the container is deviated by the overhead conveyor is solved, achieving accurate height detection and reducing damage.

CN116490416BActive Publication Date: 2026-07-10MURATA MASCH LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
MURATA MASCH LTD
Filing Date
2021-09-02
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing overhead conveyor vehicles have difficulty accurately detecting the height position of the container contact area when the container is horizontally offset, resulting in height detection errors and damage to the container surface.

Method used

An elevated conveyor was designed, in which the container contact part can move freely in the horizontal direction. By using magnets and components with different coefficients of friction, the container contact part is ensured to maintain stable contact with the container surface in the horizontal direction, preventing movement in the vertical direction. The relative height of the container contact part is detected by an optical circuit breaker.

Benefits of technology

It enables accurate height position detection of the container contact area relative to the lifting platform, reducing detection errors and damage to the container surface, and improving the stability and service life of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

An overhead transport vehicle includes: a lifting platform that moves a container; a container contact portion that contacts an upper surface of the container and is configured to move freely in a height direction with respect to the lifting platform; and a height detection portion that detects a relative height position of the container contact portion with respect to the lifting platform. The container contact portion is configured to move freely in a horizontal direction with respect to the lifting platform.
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Description

Technical Field

[0001] One aspect of this invention relates to an elevated transport vehicle. Background Technology

[0002] Patent Document 1 discloses an overhead conveyor vehicle comprising: a lifting platform (holding part) for transferring containers; and a container contact part (positioning part) disposed on the lifting platform and in contact with the upper surface of the container. In the overhead conveyor vehicle described in Patent Document 1, the container contact part is movably disposed relative to the lifting platform in the height direction, and the relative height position of the container contact part relative to the lifting platform is detected by a height detection part (detection part).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: International Publication No. 2018 / 179931 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In the aforementioned overhead conveyor, when transferring containers via the lifting platform, if the container shifts horizontally, the container contact portion that contacts the upper surface of the container may move vertically (for example, due to concave, convex, or tilted portions of the upper surface of the container, this shift is converted into vertical movement of the container contact portion). In this case, it is difficult to accurately determine the height position of the container contact portion using the height detection unit.

[0008] Therefore, one aspect of the present invention is to provide an overhead conveyor that can accurately determine the relative height position of the container contact portion relative to the lifting platform.

[0009] Methods for solving problems

[0010] The elevated transport vehicle of one side of the present invention includes: a lifting platform, a transfer container; a container contact portion that contacts the upper surface of the container and is configured to be freely movable relative to the lifting platform in the height direction; and a height detection portion that detects the relative height position of the container contact portion relative to the lifting platform, the container contact portion being configured to be freely movable relative to the lifting platform in the horizontal direction.

[0011] In this overhead conveyor, when a container shifts horizontally, the container contact portion can move horizontally in response to that shift. As a result, it is possible to prevent this shift from translating into vertical movement of the container contact portion. Therefore, the relative height position of the container contact portion with respect to the lifting platform can be accurately determined.

[0012] In one aspect of the overhead conveyor of the present invention, the container contact portion may be a positioning portion embedded in a recess formed on the upper surface of the container. In this case, the lifting platform can be positioned relative to the container by means of the container contact portion.

[0013] Alternatively, the elevated conveyor on one side of the present invention may include a sliding component mounted on a lifting platform, capable of sliding horizontally relative to a container contact portion, the container contact portion including a storage space for accommodating the sliding component. This allows for a configuration where the container contact portion can move freely horizontally relative to the lifting platform.

[0014] Alternatively, one side of the overhead conveyor of the present invention may include a force-applying part that applies force to the container contact part to position the sliding member at a predetermined position within the storage space. Thus, for example, when there is no load and the container contact part is not in contact with the upper surface of the container, the position of the container contact part relative to the lifting platform can be maintained constant.

[0015] In one aspect of the elevated transport vehicle of the present invention, the force-applying part may include a first magnet disposed on the sliding member and a second magnet disposed on the container contact portion. In this case, the magnetic force of the first magnet and the second magnet can be used to maintain the position of the container contact portion relative to the lifting platform at a constant level.

[0016] In one aspect of the overhead conveyor of the present invention, the storage space may be divided by an opening provided at the container contact portion and opening upwards. The overhead conveyor also includes a cover member that blocks a portion of the opening. In this case, the cover member prevents the sliding member from falling out of the storage space.

[0017] In one aspect of the overhead conveyor of the present invention, a plate member with a smaller coefficient of friction than the container contact portion may be provided between the container contact portion and the sliding member. In this case, for example, when the container contact portion is in contact with the upper surface of the container, and the container shifts in the horizontal direction, the plate member facilitates sliding between the sliding member and the container contact portion. This suppresses sliding between the upper surface of the container and the container contact portion, and prevents damage to the upper surface of the container.

[0018] In one aspect of the overhead conveyor of the present invention, the container contact portion may contact the upper surface of the container via a friction member with a coefficient of friction greater than that of the container contact portion. Thus, for example, when the container contact portion is in contact with the upper surface of the container, if the container shifts in the horizontal direction, the friction member can suppress slippage between the upper surface of the container and the container contact portion, thereby preventing damage to the upper surface of the container.

[0019] In one aspect of the overhead conveyor of the present invention, the container contact portion may be movable relative to the lifting platform in a first direction along the horizontal direction and in a second direction along the horizontal direction and orthogonal to the first direction. Thus, if the container is offset not only in the first direction along the horizontal direction but also in the second direction, the container contact portion can move horizontally in accordance with that offset.

[0020] Invention Effects

[0021] According to one aspect of the invention, an overhead conveyor can be provided that can accurately determine the relative height position of the container contact portion with respect to the lifting platform. Attached Figure Description

[0022] Figure 1 This is a front view showing the elevated transport vehicle of the first embodiment.

[0023] Figure 2 It means Figure 1 A cross-sectional view formed by the periphery of the central cone.

[0024] Figure 3 It means Figure 1 A 3D view of the area below the lifting platform.

[0025] Figure 4 It means Figure 1 A three-dimensional sectional view of a portion of the periphery of the central cone.

[0026] Figure 5 (a) indicates the normal state. Figure 1 A cross-sectional view formed by the periphery of the central cone. Figure 5 (b) is an enlarged representation. Figure 5 A sectional view of a portion of (a).

[0027] Figure 6 (a) represents the case where FOUP is offset in the horizontal direction. Figure 1 A cross-sectional view formed by the periphery of the central cone. Figure 6 (b) is an enlarged representation. Figure 6 A sectional view of a portion of (a).

[0028] Figure 7 This is a schematic cross-sectional view showing the periphery of the central cone in the second embodiment.

[0029] Figure 8 This indicates the case where the POD is offset in the horizontal direction. Figure 7 A schematic sectional view of the periphery of the central cone. Detailed Implementation

[0030] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. Furthermore, the same or equivalent parts are labeled with the same symbols in each figure, and repeated descriptions are omitted.

[0031] [First Implementation]

[0032] The first embodiment will be described. For example... Figure 1 As shown, the overhead conveyor 1 of the first embodiment travels along a track 101 laid near the ceiling of a cleanroom for manufacturing semiconductor devices. The overhead conveyor 1 transports FOUPs (containers) 90 containing multiple semiconductor wafers. The overhead conveyor 1 transfers FOUPs 90 to a loading port (transfer destination) 102, which is provided in a processing apparatus that performs various processes on semiconductor wafers. That is, the overhead conveyor 1 retrieves FOUPs 90 disposed on the mounting surface 102a of the loading port 102, or arranges FOUPs 90 on the mounting surface 102a of the loading port 102.

[0033] The elevated transport vehicle 1 includes a traveling unit 2, a lateral unit 3, a theta unit 4, a lifting drive unit 5, a lifting platform 6, and a control unit 7. The traveling unit 2 receives power non-contactly from a high-frequency current line laid along the traveling track 101, for example, and travels along the track 101. The lateral unit 3 causes the theta unit 4, the lifting drive unit 5, and the lifting platform 6 to move laterally relative to the direction in which the traveling track 101 extends. The theta unit 4 causes the lifting drive unit 5 and the lifting platform 6 to rotate in the horizontal plane.

[0034] The lifting drive unit 5 raises or lowers the lifting platform 6 (moves it in the height direction) by releasing or winding multiple belts 5a with the lifting platform 6 mounted on their lower ends. The lifting platform 6 transfers the FOUP 90. The lifting platform 6 holds or opens the flange portion 91 of the FOUP 90 by opening and closing a pair of claw members 6a. The control unit 7 controls the operation of each part of the overhead conveyor 1.

[0035] The elevated conveyor 1 also includes a center cone 8, a stop block 10, and a height detection unit 20. The center cone 8 is a container contact part that contacts the upper surface of the FOUP 90. The center cone 8 is a positioning part embedded in a recess 91a formed on the upper surface of the flange 91 for positioning the lifting platform 6 relative to the FOUP 90. Here, the center cone 8 is located at the center of the lifting platform 6 when viewed from below, constituting a centering component that positions (centers) the center position of the lifting platform 6 relative to the FOUP 90. The center cone 8, the stop block 10, and the height detection unit 20 are provided on the lifting platform 6.

[0036] like Figure 2 as well as Figure 3As shown, the central cone 8, the stop block 10, and the height detection unit 20 are supported by a support member 62 on the base 61 of the lifting platform 6. A pair of guide members 63 are fixed to the support member 62. Each guide member 63 is a cylindrical member extending in the vertical direction. A rod 64 is inserted into each guide member 63. The upper ends of each rod 64 are connected to each other by a connecting member 65. The central cone 8 is mounted on the lower end of each rod 64. A helical spring 66 is arranged between the central cone 8 and each guide member 63 with each rod 64 inserted through it. The pair of helical springs 66 exert a force on the central cone 8 downward relative to the support member 62.

[0037] Based on the above configuration, the central cone 8, rod 64, and connecting component 65 take the position where the connecting component 65 abuts against the upper end of each guide member 63 as their initial position, and can move freely relative to the lifting platform 6 along the height direction (vertical and vertical directions). In other words, the central cone 8, rod 64, and connecting component 65 can move freely up and down relative to the lifting platform 6.

[0038] like Figure 2 As shown, the stop 10 includes a first light-shielding plate 11 and a second light-shielding plate 12. The first light-shielding plate 11 and the second light-shielding plate 12 are integrally formed, for example, by means of a metal plate and fixed to the connecting member 65. Thus, the first light-shielding plate 11 and the second light-shielding plate 12 move freely in conjunction with the relative lifting action of the central cone 8 relative to the lifting platform 6. The first light-shielding plate 11 has a first upper end 11a and a first lower end 11b parallel to the horizontal direction. The second light-shielding plate 12 has a second upper end 12a and a second lower end 12b parallel to the horizontal direction. The distance between the first upper end 11a and the first lower end 11b is equal to the distance between the second upper end 12a and the second lower end 12b. The first lower end 11b and the second upper end 12a are at the same height (the same position in the vertical direction).

[0039] The height detection unit 20 includes a first optical circuit breaker 21 and a second optical circuit breaker 22. The first optical circuit breaker 21 is mounted on the support member 62 such that a first light-shielding plate 11 can pass through its optical axis 21a (between the light-emitting and light-receiving parts of the first optical circuit breaker 21). Thus, the first optical circuit breaker 21 can detect the position of the first light-shielding plate 11. The second optical circuit breaker 22 is mounted on the support member 62 such that a second light-shielding plate 12 can pass through its optical axis 22a (between the light-emitting and light-receiving parts of the second optical circuit breaker 22). Thus, the second optical circuit breaker 22 can detect the position of the second light-shielding plate 12. The optical axes 21a of the first optical circuit breaker 21 and the optical axes 22a of the second optical circuit breaker 22 are at the same height (the same position in the vertical direction). With the central cone 8 in its initial position (i.e., the position where the connecting member 65 abuts against the upper ends of each guide member 63), the first upper end 11a of the first light shield 11 is located below the optical axis 21a of the first optical circuit breaker 21.

[0040] As described above, the first light-shielding plate 11 and the second light-shielding plate 12 constituting the stop 10 move freely in conjunction with the relative lifting and lowering action of the central cone 8 relative to the lifting platform 6. The first optical circuit breaker 21 and the second optical circuit breaker 22 constituting the height detection unit 20 can detect the positions of the first light-shielding plate 11 and the second light-shielding plate 12 (the opening / closing of the output from each light-receiving part of the first optical circuit breaker 21 and the second optical circuit breaker 22). That is, the height detection unit 20 detects the relative height position of the central cone 8 relative to the lifting platform 6 by detecting the position of the stop 10. As a result, the control unit 7, based on the relative height position of the central cone 8 relative to the lifting platform 6, identifies, for example, whether the FOUP 90 is present in the loading port 102, whether the lifting platform 6 has reached the holding position, and whether the lifting platform 6 holds the flange portion 91 of the FOUP 90.

[0041] Next, the surrounding structure of the central cone 8 will be described in detail.

[0042] like Figure 4 , Figure 5 (a) and Figure 5 As shown in (b), the overhead conveyor 1 has a central cone 8, a sliding member 35, a cover member 92, a first magnet 93, a second magnet 94, and a sheet member 95. The central cone 8 has a downwardly convex shape, including a parabolic lower surface 8a. The central cone 8 is formed of a non-magnetic material, such as resin. A step 81 is formed on the upper surface 8b of the central cone 8, recessed except for its edge. On the bottom surface of the step 81, an upwardly opening portion 82 is formed at the center of the central cone 8, including when viewed from above. The opening portion 82 is circular in shape concentric with the central cone 8 when viewed from above. The sliding member 35 is housed within the opening portion 82. The opening portion 82 defines a storage space R for housing the sliding member 35.

[0043] The sliding member 35 is a cylindrical component. The sliding member 35 is formed of a non-magnetic material, such as resin. The sliding member 35 is fixed, for example, to the rods 64 (see reference 64) via a retaining flange 96 formed of stainless steel. Figure 2 A connecting member (not shown) is connected to the lower end of the lifting platform 6. Thus, the sliding member 35 is mounted on the lifting platform 6. As described above, the sliding member 35 is disposed inside the opening 82 (receiving space R). The diameter of the sliding member 35 is smaller than the diameter of the opening 82. The thickness of the sliding member 35 is smaller than the depth of the opening 82. The sliding member 35 can slide (move) horizontally relative to the central cone 8 inside the receiving space R.

[0044] The cover member 92 is a component that blocks a portion of the opening of the opening 82. The cover member 92 is a circular plate-shaped component with a central hole 92a. The cover member 92 is formed of a non-magnetic material, such as resin. The cover member 92 is disposed within the step 81 and fixed to the central cone 8 in a state coaxial with the central cone 8. The cover member 92 blocks the outer periphery of the opening of the opening 82. A portion of the fixing flange 96, which is fixed to the sliding member 35, is inserted through the hole 92a. The cover member 92 defines a storage space R for accommodating the sliding member 35.

[0045] The first magnet 93 is a cylindrical component. The first magnet 93 is, for example, made of neodymium. The first magnet 93 is embedded in the center of the sliding component 35. The second magnet 94 is a cylindrical component. The second magnet 94 is, for example, made of neodymium. The second magnet 94 is embedded in the center of the bottom surface of the central cone 8. The second magnet 94 has magnetic poles different from those of the first magnet 93. Thus, a pulling force (attraction force) acts between the first magnet 93 and the second magnet 94. The first magnet 93 and the second magnet 94 constitute a force-applying part that applies force to the central cone 8, so that the sliding component 35 is located in the center (predetermined position) within the storage space R.

[0046] A plate component 95 is disposed between the central cone 8 and the sliding component 35. The plate component 95 is a circular plate-shaped component with a smaller coefficient of friction than the central cone 8. The plate component 95 is laid on the bottom surface of the opening 82.

[0047] In this embodiment, under no-load conditions where it is not in contact with the flange 91 of the FOUP 90, the center cone 8 is automatically aligned by the attraction between the first magnet 93 and the second magnet 94, maintaining its position at the center coaxial with the sliding member 35 (returning to the center position). In this state, the center cone 8 is freely movable relative to the sliding member 35 and the lifting platform 6 on which the sliding member 35 is mounted in a first horizontal direction and a second horizontal direction orthogonal to the first direction. That is, the center cone 8 is freely movable (horizontally free-moving) relative to the lifting platform 6 in all horizontal directions by a certain amount (the difference between the radius of the storage space R and the radius of the sliding member 35).

[0048] Next, the movement of FOUP90 is maintained by a pair of claw components 6a of the lifting platform 6.

[0049] The lifting platform 6 descends, and the central cone 8 engages with the recess 91a of the flange 91. When the lifting platform 6 reaches the holding position, its descent stops. A pair of claw components 6a close, entering the lower side of the flange 91. Then, the lifting platform 6 rises, and the pair of claw components 6a entering the lower side of the flange 91 abut against the lower surface of the flange 91, lifting the FOUP 90. Thus, as... Figure 5 As shown in (a), FOUP90 is held. Normally, a gap of approximately 1 mm is provided in the horizontal direction between each claw member 6a and the flange 91. Normally, as... Figure 5 As shown in (b), the central cone 8 abuts against the bottom surface of the opening 82 via the plate member 95 and is located at the center position coaxial with the sliding member 35.

[0050] At this time, as Figure 6 As shown in (a), sometimes a certain force is applied to FOUP90, for example, by the amount by which the flange 91 deviates horizontally from the gap between the claw member 6a and the flange 91. Regarding this, as described above, this embodiment has a structure that allows sliding in the horizontal direction within the central cone 8, i.e., the central cone 8 is freely movable in the horizontal direction relative to the sliding member 35 (lifting platform 6). Therefore, even when this deflection occurs, the central cone 8 slides horizontally relative to the sliding member 35 and moves horizontally integrally with the flange 91 in a manner that follows the movement of the flange 91. As a result, the engagement of the central cone 8 with the recess 91a can be maintained in its original state, and the upward movement of the central cone 8 towards the recess 91a or the downward movement of the central cone 8 towards the recess 91a can be suppressed.

[0051] According to the above-described embodiment of the elevated transport vehicle 1, when the FOUP90 deviates in the horizontal direction, the central cone 8 can move in the horizontal direction in accordance with the deviation. As a result, it is possible to suppress the conversion of this deviation into a vertical movement of the central cone 8. Therefore, the relative height position of the central cone 8 with respect to the lifting platform 6 can be accurately determined by the height detection unit 20. By making the central cone 8 follow the horizontal movement of the flange 91, false detection by the height detection unit 20 can be prevented. Furthermore, vibration transmission via the central cone 8 in the horizontal direction can be reduced. In addition, sliding between the upper surface of the flange 91 and the central cone 8 can be suppressed, and damage (abrasion) to the upper surface of the flange 91 can be suppressed.

[0052] In the overhead conveyor 1, the central cone 8 is a positioning part that is embedded in the recess 91a formed on the upper surface of the flange 91 of the FOUP 90. In this case, the lifting platform 6 can be positioned relative to the FOUP 90 by means of the central cone 8.

[0053] The elevated conveyor 1 includes a sliding component 35, which is mounted on the lifting platform 6 and can slide horizontally relative to the central cone 8. The central cone 8 includes a storage space R for accommodating the sliding component 35. Thus, a configuration is achieved in which the central cone 8 can move freely horizontally relative to the lifting platform 6.

[0054] The overhead conveyor 1 is equipped with a first magnet 93 and a second magnet 94, which act as force-applying parts to the central cone 8 to position the sliding member 35 at the center within the storage space R. Thus, for example, when the central cone 8 is not in contact with the upper surface of the flange 91 under no-load conditions, the position of the central cone 8 relative to the lifting platform 6 can be maintained constant. Here, automatic self-aligning is possible to maintain the coaxial center position of the central cone 8 and the sliding member 35. Furthermore, since the first magnet 93 and the second magnet 94 are provided as force-applying parts, the magnetic force of the first magnet 93 and the second magnet 94 can maintain the position of the central cone 8 relative to the lifting platform 6 constant. When the overhead conveyor 1 is running under no-load conditions, the generation of abnormal noise can be suppressed.

[0055] The overhead conveyor 1 includes a cover member 92 that blocks a portion of the opening 82 that divides the storage space R. In this case, the cover member 92 prevents the sliding member 35 from disengaging from the storage space R.

[0056] In the overhead conveyor 1, a plate member 95 with a smaller coefficient of friction than the central cone 8 is provided between the central cone 8 and the sliding member 35. In this case, for example, when the central cone 8 is in contact with the upper surface of the flange 91, if the flange 91 shifts in the horizontal direction, the plate member 95 facilitates sliding between the sliding member 35 and the central cone 8. This suppresses sliding between the upper surface of the flange 91 and the central cone 8, and prevents damage to the upper surface of the flange 91.

[0057] In the overhead conveyor 1, the central cone 8 is freely movable relative to the lifting platform 6 in a first horizontal direction and a second horizontal direction orthogonal to the first direction. Thus, even if the flange 91 is offset not only in the first horizontal direction but also in the second horizontal direction, the central cone 8 can move horizontally in accordance with that offset.

[0058] [Second Implementation]

[0059] The second embodiment will be described. In this description of the embodiment, the differences from the first embodiment will be explained, and repeated descriptions will be omitted.

[0060] like Figure 7 as well as Figure 8 As shown, the difference between the elevated transport vehicle 100 of the second embodiment and the first embodiment is that, instead of the central cone 8, the container is POD190 (see reference). Figure 2 The container has a center pad 108 as its contact part. The center pad 108 has a cylindrical shape and includes a planar lower surface 108a. The center pad 108 abuts against the planar upper surface 191 of the POD 190. A sheet-like friction member 105 with a coefficient of friction greater than that of the center pad 108 is provided on the lower surface 108a of the center pad 108. The center pad 108 contacts the upper surface 191 of the POD 190 via the friction member 105. The friction member 105 is, for example, formed of polyurethane rubber.

[0061] In this embodiment, when the POD190 is held by a pair of claw members 6a, after the lifting platform 6 descends and the center pad 108 abuts against the upper surface 191 of the POD190, the pair of claw members 6a close and enter the underside of the flange portion 192 on the side of the POD190. The lifting platform 6 rises, lifting the POD190 via the flange portion 192 through the pair of claw members 6a.

[0062] Here, as Figure 7As shown, for example, when a pair of claw components 6a are closed, the claw components 6a sometimes come into contact with the POD 190. In this case, in a typical overhead conveyor configuration, it is possible that the pair of claw components 6a may not close completely, resulting in an error, or that the center pad 108 may rub against the upper surface 191. Regarding this, in this embodiment, a structure is provided that allows the center pad 108 to slide horizontally within its interior, i.e., the center pad 108 is freely movable horizontally relative to the sliding member 35 (lifting platform 6). Therefore, as... Figure 8 As shown, when the pair of claw members 6a are closed and in contact with POD 190, as POD 190 is pressed in the horizontal direction by the claw members 6a and shifted, the center pad 108 slides horizontally relative to the sliding member 35 and moves horizontally integrally with POD 190 to follow the movement of POD 190. As a result, the contact between the center pad 108 and the upper surface 191 of POD 190 can be maintained in its original state without slipping.

[0063] In the elevated transport vehicle 100 of this embodiment, the relative height position of the center pad 108 with respect to the lifting platform 6 can be accurately determined. Furthermore, sliding between the upper surface 191 of the POD 190 and the center pad 108 can be suppressed, and damage (friction) to the upper surface 191 of the POD 190 can be prevented.

[0064] In the overhead conveyor 100, the center pad 108 contacts the upper surface 191 of the POD 190 via a friction member 105 with a coefficient of friction greater than that of the center pad 108. Therefore, when the center pad 108 is in contact with the upper surface 191 of the POD 190, and the POD 190 shifts in the horizontal direction, the friction member 105 can prevent slippage between the upper surface 191 of the POD 190 and the center pad 108, thus preventing damage to the upper surface 191 of the POD 190.

[0065] The above describes the implementation methods, but one aspect of the present invention is not limited to the above-described implementation methods.

[0066] In the above embodiments, the height detection unit 20 is not limited to the above configuration as long as the relative upward movement of the central cone 8 relative to the lifting platform 6 can be detected. In the above embodiments, the container contact part is not limited to the central cone 8 and the central pad 108 as long as it can contact the upper surface of the container, and containers other than FOUP 90 and POD 190 can be used.

[0067] The above embodiment includes a first magnet 93 and a second magnet 94 as force-applying parts for applying force to the container contact portion, but the force-applying parts are not particularly limited. As long as force can be applied to the container contact portion, various configurations can be used as force-applying parts. For example, a spring or rubber can also be used as force-applying parts, utilizing their elasticity to apply force to the container contact portion.

[0068] The components in the above embodiments and modifications are not limited to the materials and shapes described above, and various materials and shapes can be used. The components in the above embodiments or modifications can be arbitrarily applied to the components in other embodiments or modifications. A portion of the components in the above embodiments or modifications can be appropriately omitted without departing from the spirit of one aspect of the invention.

[0069] Explanation of symbols

[0070] 1, 100: Overhead conveyor; 6: Lifting platform; 8: Central cone (container contact part); 20: Height detection part; 35: Sliding part; 82: Opening part; 90: FOUP (container); 91a: Recess; 92: Cover part; 93: First magnet (force application part); 94: Second magnet (force application part); 95: Sheet part; 105: Friction part; 108: Central pad (container contact part); 190: POD (container); 191: Upper surface; R: Storage space.

Claims

1. An elevated conveyor vehicle, comprising: Lifting platform, transfer container; The container contact portion contacts the upper surface of the container and is configured to move freely along the height direction relative to the lifting platform; and The height detection unit detects the relative height position of the container contact portion with respect to the lifting platform. The container contact portion is configured to move freely in the horizontal direction relative to the lifting platform.

2. The elevated conveyor vehicle according to claim 1, wherein, The aforementioned container contact portion is a positioning portion embedded in a recess formed on the upper surface of the aforementioned container.

3. The elevated transport vehicle according to claim 1 or 2, wherein, The aforementioned elevated conveyor vehicle includes a sliding component mounted on the aforementioned lifting platform, which is capable of sliding horizontally relative to the aforementioned container contact portion. The container contact portion includes a storage space for accommodating the sliding component.

4. The elevated conveyor vehicle according to claim 3, wherein, The aforementioned elevated conveyor vehicle has a force-applying part that applies force to the aforementioned container contact part to position the aforementioned sliding component at a predetermined position within the aforementioned storage space.

5. The elevated conveyor vehicle according to claim 4, wherein, The force-applying part includes a first magnet disposed on the sliding member and a second magnet disposed on the container contact part.

6. The elevated transport vehicle according to any one of claims 3 to 5, wherein, The aforementioned storage space is divided by an opening located at the contact portion of the container and opening upwards. The aforementioned elevated transport vehicle also has a cover component that blocks a portion of the opening of the aforementioned opening.

7. The elevated transport vehicle according to any one of claims 3 to 6, wherein, A piece of material with a smaller coefficient of friction than the container contact portion is provided between the container contact portion and the sliding component.

8. The elevated transport vehicle according to any one of claims 1 to 7, wherein, The container contact portion contacts the upper surface of the container via a friction component with a coefficient of friction greater than that of the container contact portion.

9. The elevated transport vehicle according to any one of claims 1 to 8, wherein, The container contact portion is movable relative to the lifting platform in a first horizontal direction and a second horizontal direction orthogonal to the first direction.