Defect inspection apparatus

Abstract

Provided is a defect inspection device capable of suppressing a difference in inspection results depending on a user. A defect inspection device (100) according to the present invention includes a photographing section (image sensor (35)) that photographs an inspection target (7), and a display section (6) that displays an image based on an image photographed by the photographing section. Further, the defect inspection device (100) includes a control section (4) that accepts a setting of a mark (64) of a prescribed attention region (S) on an image (still image (61)) displayed on the display section (6). Further, the control section (4) is configured to inspect a defect of the inspection target (7) based on an image photographed by the photographing section, and to superimpose an image of the mark (64) on a position of an inspection result image (superimposed image (65)) displayed on the display section (6) that corresponds to the prescribed attention region (S).

Description

Technical Field

[0001] This invention relates to a defect inspection device, and more particularly to a defect inspection device including an imaging unit. Background Technology

[0002] Previously, defect inspection devices including imaging units were known. Such defect inspection devices have been disclosed, for example, in Japanese Patent Application Publication No. 2017-219318.

[0003] The defect inspection apparatus disclosed in Japanese Patent Application Publication No. 2017-219318 includes: an excitation unit that excites elastic waves to an object under inspection; an illumination unit that provides strobe illumination to a measurement area on the surface of the object under inspection; and an interferometer comprising an image sensor that detects light reflected from the object under inspection in a state of excitation (vibration) and interfering with each other. Furthermore, the control unit included in the defect inspection apparatus performs data processing based on detection signals obtained from each detection element of the image sensor. By performing known image processing on the image obtained from the result of the data processing, defects on the surface of the object under inspection are detected.

[0004] [Existing technical documents]

[0005] [Patent Literature]

[0006] Patent Document 1: Japanese Patent Application Publication No. 2017-219318 Summary of the Invention

[0007] [The problem the invention aims to solve]

[0008] In the conventional defect inspection apparatus described in Japanese Patent Application Publication No. 2017-219318, a non-defective portion (e.g., a step difference) of the inspected object is displayed in a shape similar to a defect on the image obtained from data processing. In this case, the user must observe the image obtained from data processing and determine whether the displayed image is a defect based on its positional relationship with the region of interest (e.g., a region prone to defects). For example, the user may determine that the displayed image is a defect based on its presence within the region of interest. Here, the position of the region of interest in the image obtained from data processing must be read by the user's own observation of the image; therefore, the position of the region of interest read by the user may vary. Consequently, the images identified as defects by the user will differ, leading to discrepancies in the inspection results depending on the user. Therefore, a defect inspection apparatus capable of suppressing discrepancies in inspection results based on the user is desired.

[0009] The present invention was made to solve the problems described above, and one object of the present invention is to provide a defect inspection device capable of suppressing discrepancies in inspection results based on the user.

[0010] [Technical means to solve the problem]

[0011] To achieve the aforementioned objective, a defect inspection apparatus according to one aspect of the present invention includes: an imaging unit for imaging an inspection object; a display unit for displaying an image based on the image captured by the imaging unit; and a control unit for accepting the setting of a mark for a predetermined area of ​​interest on the image displayed on the display unit. The control unit is configured to inspect defects in the inspection object based on the image captured by the imaging unit, and to overlay the image of the mark onto the position of the inspection result image displayed on the display unit corresponding to the predetermined area of ​​interest.

[0012] [The effects of the invention]

[0013] In the defect inspection apparatus described above, the control unit is configured to accept the setting of a mark for a predetermined area of ​​interest on an image displayed on the display unit, and to overlay the image of the mark onto the position corresponding to the predetermined area of ​​interest on the inspection result image displayed on the display unit. Therefore, even if different users are performing the inspection, the position of the mark displayed in the inspection result image remains the same. As a result, defect determination is made based on the position of the mark displayed on the inspection result image, thereby suppressing discrepancies in inspection results depending on the user. Attached Figure Description

[0014] Figure 1 This is a block diagram showing the structure of the defect inspection device based on the first embodiment.

[0015] Figure 2 This is a diagram illustrating the display of defects in the defect inspection apparatus based on the first embodiment.

[0016] Figure 3 This is a flowchart illustrating the defect display processing performed by the control unit of the defect inspection apparatus based on the first embodiment.

[0017] Figure 4 This is a diagram showing the state of an image with markings superimposed on a dynamic image, based on the defect inspection device of the first embodiment.

[0018] Figure 5 This is a diagram illustrating the control when the marked data of the defect inspection device based on the first embodiment is corrected (added).

[0019] Figure 6 This is a diagram showing the ruler used in the defect inspection apparatus based on the first embodiment.

[0020] Figure 7 This is a diagram illustrating defect inspection using the defect inspection apparatus based on the second embodiment.

[0021] Figure 8 This is a diagram illustrating an example of an overlay image based on the second embodiment.

[0022] Figure 9 This is a diagram showing the image projection of the inspection object by a defect inspection apparatus based on a variation of the first and second embodiments.

[0023] Figure 10 This is a diagram illustrating a defect inspection apparatus for performing three-dimensional measurements based on a reference example of the first and second embodiments.

[0024] Figure 11 This is a diagram showing an image displayed on a defect inspection device for performing three-dimensional measurements based on a reference example of the first and second embodiments.

[0025] [Explanation of Symbols]

[0026] 1: Oscillator (Excitation Unit)

[0027] 2: Laser lighting

[0028] 3, 13, 23: Speckle shear interferometer (interferometer section)

[0029] 4, 14, 44: Control Department

[0030] 5: Signal Generator

[0031] 6: Display Section

[0032] 7.17: Inspection Object

[0033] 8: Storage Department

[0034] 13a: Projected image

[0035] 31: Beam splitter

[0036] 32: Phase shifter

[0037] 34: Condensing Lens

[0038] 35: Image sensor (shooting unit)

[0039] 60: Image

[0040] 61: Still Image

[0041] 62: Animated Images

[0042] 63: Extract Image

[0043] 64: Mark

[0044] 65: Overlay image (inspection result image)

[0045] 71: Steel plate

[0046] 72: Coating

[0047] 73: Defective parts

[0048] 75: Changes

[0049] 80: Ruler

[0050] 91, 92: Defect areas (based on brightness value information)

[0051] 100, 200, 300: Defect inspection device

[0052] 101-112: Step 131: Projection section

[0053] 231: Three-dimensional measuring instrument

[0054] 331: First reflecting mirror

[0055] 332: Second reflecting mirror

[0056] 741, 742: Location

[0057] L: Length

[0058] S: Defined area of ​​concern Detailed Implementation

[0059] Hereinafter, embodiments embodying the present invention will be described with reference to the accompanying drawings.

[0060] [First Implementation Method]

[0061] Reference Figures 1 to 6 The structure of the defect inspection device 100 based on the first embodiment will be explained.

[0062] (Structure of the defect inspection device)

[0063] Reference Figure 1 The structure of the defect inspection apparatus 100 based on the first embodiment will be described below. The defect inspection apparatus 100 is an apparatus for inspecting defects in the inspection object 7.

[0064] like Figure 1 As shown, the defect inspection device 100 based on the first embodiment includes an oscillator 1, a laser illumination 2, a speckle shearing interferometer 3, a control unit 4, a signal generator 5, a display unit 6, and a storage unit 8. Furthermore, Figure 1The control unit 4, display unit 6, and storage unit 8 are illustrated in a manner where they are arranged separately from each other, but this is not a limitation. The control unit 4, display unit 6, and storage unit 8 may also be located at a common terminal. In addition, the oscillator 1 and the speckle shear interferometer 3 are examples of the "excitation unit" and "interference unit" of the claims, respectively.

[0065] The oscillator 1 and the laser illumination 2 are connected to the signal generator 5 via cables.

[0066] The vibrator 1 excites vibration (acoustic vibration) to the object under inspection 7. Specifically, the vibrator 1 is configured to contact the object under inspection 7 and converts the alternating current signal from the signal generator 5 into mechanical vibration, thereby exciting vibration (acoustic vibration) to the object under inspection 7. In addition, the vibrator 1 excites ultrasonic vibration to the object under inspection 7.

[0067] Laser illumination 2 irradiates the object under inspection 7 with laser light. Laser illumination 2 includes a laser source (not shown) and an illumination lens. The illumination lens extends the laser light irradiated from the laser source to the entire measurement area on the surface of the object under inspection 7. Moreover, laser illumination 2 irradiates the object under inspection at predetermined times based on an electrical signal from signal generator 5. That is, laser illumination 2 irradiates the object under inspection 7 in response to the vibration generated by oscillator 1.

[0068] The speckle shearing interferometer 3 is configured to interfere with the reflected light from laser beams arriving at different positions on the inspection object 7 excited by the oscillator 1. Furthermore, the speckle shearing interferometer 3 includes a beam splitter 31, a phase shifter 32, a first mirror 331, a second mirror 332, a condenser lens 34, and an image sensor 35. The image sensor 35 is an example of the "image capturing unit" mentioned in the claims.

[0069] Beam splitter 31 includes a semi-transparent mirror. Furthermore, beam splitter 31 is positioned at the point where the laser reflected from the surface of the object being inspected 7 is incident. Beam splitter 31 reflects the incident laser to the phase shifter 32 side and transmits it to the second mirror 332 side. Furthermore, beam splitter 31 reflects the laser incident by the second mirror 332 to the condenser lens 34 side, and transmits the laser incident by the first mirror 331 to the condenser lens 34 side.

[0070] The first reflector 331 is positioned at a 45-degree angle relative to the reflecting surface of the beam splitter 31 in the optical path of the laser light reflected by the beam splitter 31. The first reflector 331 reflects the incident laser light reflected by the beam splitter 31 back to the beam splitter 31 side.

[0071] The second reflector 332 is positioned in the optical path of the laser beam from the beam splitter 31 at a slightly tilted angle of 45 degrees relative to the reflecting surface of the beam splitter 31. The second reflector 332 reflects the incident laser beam reflected by the beam splitter 31 back to the beam splitter 31 side.

[0072] The phase shifter 32 is disposed between the beam splitter 31 and the first reflector 331, and changes (shifts) the phase of the transmitted laser by means of the control unit 4. Specifically, the phase shifter 32 is configured to change the optical path length of the transmitted laser.

[0073] Image sensor 35 has multiple detection elements, arranged in a configuration where the laser light reflected by beam splitter 31 is reflected by first mirror 331 and transmitted through beam splitter 31. Figure 1 The straight line in the middle), and the laser light that is reflected by the second mirror 332 and then reflected by the beam splitter 31 after the transmission beam splitter 31 (the laser light in the middle), and the laser light that is reflected by the second mirror 332 and then by the beam splitter 31 (the laser light in the middle). Figure 1 The image sensor 35 is located on the optical path (as shown by the dashed line in the image). The image sensor 35 may include, for example, a complementary metal-oxide-semiconductor (CMOS) image sensor or a charge-coupled device (CCD) image sensor. The image sensor 35 is configured to capture the incident laser light. Furthermore, the image sensor 35 is configured to capture the reflected light after interference by the speckle shearing interferometer 3. Thus, the object under inspection 7 is captured by the image sensor 35.

[0074] A focusing lens 34 is positioned between the beam splitter 31 and the image sensor 35, allowing the laser light transmitted through the beam splitter 31 to pass through. Figure 1 The straight line in the beam splitter 31 and the laser reflected by the beam splitter 31 Figure 1 (The dotted line in the image) focuses the light.

[0075] The position 741 on the surface of the object being inspected 7 and the laser reflected by the first reflecting mirror 331 ( Figure 1 The straight line in the image is aligned with the position 742 on the surface of the object being inspected 7 and the laser reflected by the second reflector 332. Figure 1 The dotted lines in the image sensor 35 interfere with each other and are incident on the same part of the image sensor 35. Positions 741 and 742 are positions separated by a small distance. Similarly, the reflected light from lasers arriving at different positions from the different areas of the object being inspected is guided by the speckle shear interferometer 3 and incident on the image sensor 35 respectively.

[0076] The control unit 4 uses an actuator (not shown) to operate the phase shifter 32 located within the speckle shear interferometer 3, causing a change in the phase of the transmitted laser. This results in a change in the phase difference between the laser reflected from position 741 and the laser reflected from position 742. The detection elements of the image sensor 35 detect the intensity of the interference light generated by these two laser interferences.

[0077] The control unit 4 controls the vibration of the oscillator 1 and the timing of laser irradiation by the laser illumination 2 via the signal generator 5, capturing images while changing the phase shift. The phase shift is changed sequentially by λ / 4, and at each phase shift (0, λ / 4, λ / 2, 3λ / 4), 32 images are captured for the laser irradiation timing j (j = 0~7), plus 5 images taken before and after each phase shift (0, λ / 4, λ / 2, 3λ / 4) when the light is off, totaling 37 images. Here, λ represents the wavelength of the laser.

[0078] The control unit 4 processes the detection signals from each detection element according to the following procedure to acquire a dynamic image 62 representing the vibration state (see reference). Figure 2 The control unit 4 measures the spatial distribution of periodically changing physical quantities generated by the vibration propagation of the object under inspection 7 based on the interferometric reflected light captured by the image sensor 35. For example, the control unit 4 generates a dynamic image 62 (spatial distribution image) related to the vibration propagation of the object under inspection 7 based on the interferometric reflected light captured by the image sensor 35.

[0079] Control unit 4 calculates the brightness value I of four images (each with the same laser irradiation timing j (j = 0 to 7) and a phase shift difference of λ / 4. j0 ~I j3 The optical phase (the phase difference between the two optical paths when the phase shift is zero) Φj can be obtained by using the following formula (1).

[0080] Φ j =-arctan{(I j3 -I j1 ) / (I j2 -I j0 )}…(1)

[0081] Furthermore, the control unit 4 approximates the optical phase Φj using the least squares method to obtain the approximation coefficients A, θ, and C in the following equation (2).

[0082] Φ j =Acos(θ+jπ / 4)+C=Bexp(jπ / 4)+C…(2)

[0083] Where B is a complex amplitude, as expressed in equation (3) below.

[0084] B = Aexp(iθ): Complex amplitude…(3)

[0085] Furthermore, the control unit 4 outputs a dynamic image 62 (30-60 frames) showing the phase change of light at each phase moment ξ (0 ≦ ξ < 2π) of the vibration by removing the constant term C from the approximation of equation (2). In addition, in the above process, a spatial filter is appropriately applied to the complex amplitude B in order to remove noise. Moreover, the step size of the phase shift or the laser irradiation timing (λ / 4 and T / 8 in this example, respectively, where T is the period of vibration) is not limited to this. At this time, the calculation formula becomes a different formula from the above equations (1) to (3).

[0086] The control unit 4 uses a spatial filter to detect discontinuous regions of vibration state from the dynamic image 62 as defective parts 73 of the inspection object 7. That is, the control unit 4 extracts the discontinuous parts of vibration based on the spatial distribution of physical quantities. Specifically, the control unit 4 acquires an extracted image 63 from the dynamic image 62 in which the discontinuous parts of vibration have been extracted.

[0087] Here, as Figure 2 As shown, the control unit 4 acquires a static image 61 and a dynamic image 62 based on the interfered reflected light captured by the image sensor 35. The static image 61 is an image showing the brightness of light on the object under inspection 7. Furthermore, the dynamic image 62 is an image showing the brightness of light or the phase variation caused by the ultrasonic vibration of the object under inspection 7. Additionally, the dynamic image 62 is an example of the claim "an image representing the vibration state of the object under inspection".

[0088] The control unit 4 is configured to acquire a static image 61 based on multiple images 60 (static images) captured by the image sensor 35. Specifically, the control unit 4 is configured to acquire a static image 61 by averaging multiple images 60 captured to generate a dynamic image 62 related to the vibration propagation of the object under inspection 7. In the static image 61, the structural changes 75 of the object under inspection 7 can be identified. In contrast, while the dynamic image 62 related to the vibration propagation of the object under inspection 7 can confirm vibration, it is difficult to visually identify the structural changes of the object under inspection 7.

[0089] In this first embodiment, the control unit 4 is configured to accept the setting of a mark 64 on the still image 61. The mark 64 includes graphics and characters. Furthermore, the control of the control unit 4 related to the mark 64 will be described in detail later.

[0090] Furthermore, the control unit 4 is configured to perform control by highlighting and overlaying the discontinuous portions of vibration extracted from the dynamic image 62 onto a static image 61 obtained by additive averaging. Thus, the control unit 4 is configured to generate (obtain) a superimposed image 65, on which the discontinuous portions of vibration extracted from the dynamic image 62 are superimposed on the static image 61, as an inspection result image. Additionally, the superimposed image 65 is an example of the claim's "inspection result image based on an image representing the vibration state of the inspected object."

[0091] Display unit 6 displays a still image 61, a moving image 62, and an overlay image 65. Display unit 6 includes a liquid crystal display or an organic electroluminescence (EL) display, etc. In addition, the still image 61 and the moving image 62 are examples of "images based on images captured by the imaging unit" as claimed in the claims.

[0092] The inspection object 7 is a steel plate 71 with a coating 72 applied to its surface (see reference). Figure 1 The defective portion 73 includes cracks, peeling, and lifting under the coating. Furthermore, in the case where the object of inspection 7 is a component made of dissimilar materials, the defective portion 73 includes poorly joined parts.

[0093] (Defect display processing)

[0094] Next, refer to Figure 3 The defect display processing performed by the defect inspection device 100 according to the first embodiment will be explained based on a flowchart. Furthermore, the defect display processing is performed by the control unit 4.

[0095] Figure 3 In step 101, vibration is applied to the object under inspection 7 from the oscillator 1. This excites the object under inspection 7 to vibrate. In step 102, laser light is irradiated onto the measurement area of ​​the object under inspection 7 from the laser illumination 2.

[0096] In step 103, the shift amount of phase shifter 32 is changed, and interference data is acquired. That is, multiple images 60 (refer to) are captured to produce interference by changing the phase. Figure 2 In detail, the phase shifter 32 of the speckle shear interferometer 3 is operated by changing the phase of the laser by λ / 4 in successive steps, and the intensity of the interference light of the laser at each phase is detected (captured) by the image sensor 35.

[0097] In step 104, the vibration imparted from the oscillator 1 to the object under inspection 7 is terminated.

[0098] In step 105, based on the multiple images 60 obtained in step 103, a still image 61 is obtained (generated) (referencing) Figure 2 ).

[0099] In step 106, the control unit 4 handles the setting of markings 64 for a specified area of ​​interest S (e.g., a defect-prone area) displayed on the static image 61 on the display unit 6. Specifically, the user inputs markings 64 on the static image 61, thereby setting (initial setting) the input markings 64. That is, the data of markings 64 input on the static image 61 is saved to the storage unit 8 (see reference). Figure 1 ).

[0100] Next, in step 107, the control unit 4 checks for defects in the object 7 based on the image 60 captured by the image sensor 35. Specifically, first, the control unit 4 acquires (generates) a dynamic image 62 (referencing) from multiple images 60. Figure 2 Next, the control unit 4 extracts (see reference 62) from the dynamic image 62. Figure 2 The discontinuous portion of the vibration. Then, the control unit 4 acquires the static image 61 acquired in step 105, overlaid with the discontinuous portion of the vibration extracted from the dynamic image 62 (extracted image 63: reference). Figure 2 The superimposed image 65 (refer to) Figure 2 ).

[0101] Here, in the first embodiment, the control unit 4 is configured to save the data of the inspection result image (overlay image 65 before the overlapping mark 64) to the storage unit 8 separately from the data of the mark 64 set in the subsequent step 108. Furthermore, for images other than those mentioned above, the data of images obtained during the inspection process can also be saved to the storage unit 8. For example, the data of the moving image 62, the data of the still image 61, the data of the extracted image 63, and the data of each of the multiple images 60 can be saved to the storage unit 8. Moreover, the storage unit 8 also stores images of images with the mark 64 overlapping on the inspection result image (see [reference]). Figure 5 ).

[0102] Next, in step 108, the control unit 4 displays the overlay image 65 acquired in step 107 on the display unit 6. Here, in the first embodiment, the control unit 4 is configured to overlay the image of the mark 64 onto the overlay image 65 (inspection result image) displayed on the display unit 6, within a predetermined area of ​​interest S (reference area). Figure 2 The control unit 4 is configured to control the position (coordinates) of the inspection object 7 on which the mark 64 is arranged in the overlay image 65 to be the same as the position (coordinates) of the inspection object 7 on which the mark 64 is arranged in the static image 61. Furthermore, the control unit 4 is configured to display the overlay image 65, which overlaps the image of the mark 64, on the display unit 6 by using the data of the overlay image 65 stored in the storage unit 8 and the data of the image of the mark 64.

[0103] Moreover, in the first embodiment, such as Figure 4 As shown, the control unit 4 is configured to overlay the image of the mark 64 onto the position of the moving image 62 corresponding to the predetermined area of ​​interest S. That is, control is performed to make the position (coordinates) of the inspection object 7 on which the mark 64 is placed in the moving image 62 the same as the position (coordinates) of the inspection object 7 on which the mark 64 is placed in the static image 61. Furthermore, the control unit 4 is configured to display the moving image 62, with the image of the mark 64 overlaid, on the display unit 6 by using the data of the moving image 62 and the data of the mark 64 stored in the storage unit 8. Here, the defect portion 73 (discontinuous portion) is more easily and clearly displayed in the moving image 62 compared to the overlaid image 65. Therefore, the configuration allows the mark 64 to be overlaid on the moving image 62 in addition to the overlaid image 65. Thus, the moving image 62 can be used when it is difficult to identify the defect portion 73 on the overlaid image 65, thereby making it easier to identify the defect portion 73.

[0104] Furthermore, the control unit 4 is configured to allow the gauge 80 (reference) to be adjusted. Figure 6 The image is superimposed on the overlay image 65. Therefore, by using the ruler 80, the user can easily determine (measure) the size of the defect portion 73 on the overlay image 65. Furthermore, Figure 6 The superimposed image 65 is shown as an example, but the ruler 80 can also be displayed in the moving image 62 or the extracted image 63.

[0105] Next, in step 109, it is determined whether the user has modified (including appending, etc.) the data marked 64 on the overlay image 65 (moving image 62). For example, assuming... Figure 5 As shown, when the position of the image marked 64 on the overlay image 65 (moving image 62) is offset from the position of the image of the defect portion 73, the data of the marked 64 is corrected (added) by the user. Figure 5 In the example shown, the position of the upper right marker 64 is offset from the position of the defect portion 73. Furthermore, in this example, the marker 64 (dashed line) surrounding the defect portion 73 has been corrected (added). However, examples of correcting (adding) the data for marker 64 are not limited to this.

[0106] If the control unit accepts the correction (addition) of the data of marker 64 on the overlay image 65 (moving image 62), proceed to step 110. If the correction (addition) of the data of marker 64 is not accepted on the overlay image 65 (moving image 62) (i.e., if the user does not make a correction (addition)), proceed to step 111.

[0107] In the first embodiment, in step 110, the control unit 4 is configured to reflect the correction (addition) of the data of the marker 64 to the set data of the marker 64. Specifically, the correction (addition) is reflected to the data of the marker 64 stored in the storage unit 8.

[0108] Furthermore, the control unit 4 is configured such that, in the event that the data of the marker 64 has been modified (added), the modified (added) marker 64 ( Figure 5 The color of the dashed line marked 64 is the same as the original mark 64. Figure 5 The solid line marked 64 is displayed in different colors.

[0109] Next, in step 111, the inspection results are output. Specifically, the image with marker 64 superimposed on the overlay image 65 (moving image 62) is output as data (bitmap file or moving image file). At this time, the output is data based on the image of the marker 64, which reflects the correction (addition) in step 110, superimposed on the image of the overlay image 65 (moving image 62). Alternatively, it can be configured to output data based on the image of the marker 64 before the correction (addition), superimposed on the image of the overlay image 65 (moving image 62).

[0110] Furthermore, the system is configured such that the dynamic image 62 (before the marking overlap) acquired in step 107, the superimposed image 65 (before the marking overlap) acquired in step 108, the static image 61 acquired in step 105, the image marked only 64, and the multiple images 60 acquired in step 103 can also be output separately.

[0111] Then, in step 112, the control unit 4 ends the inspection based on the user's instruction to end the inspection. If the inspection is to continue, it returns to step 101.

[0112] In this first embodiment, the control unit 4 is configured to repeatedly use the data of the mark 64 stored in the storage unit 8 whenever different inspections are performed. In other words, the data of the mark 64 set in the initial inspection is also used (recycled) in subsequent inspections (defect display processing). As a result, the process of initially setting the mark 64 (step 106) can be omitted in subsequent inspections.

[0113] Specifically, in cases where multiple inspection objects 7 of the same type are inspected individually, and in cases where the same inspection object 7 is inspected multiple times, the control unit 4 performs the inspection while reading the data of the marker 64 stored in the storage unit 8 during the initial inspection. At this time, the control unit 4 is configured to overlay the image of the read marker 64 onto the position of the current inspection result image (overlay image 65, motion image 62) corresponding to the designated area of ​​interest S. Furthermore, if the data of the marker 64 has been corrected (added) up to the previous inspection, the user can choose whether to overlay the data reflecting the corrected (added) marker 64 or the data reflecting the marker 64 before the correction (addition) (i.e., the initial data of the marker 64) onto the inspection result image.

[0114] Additionally, in step 106, the control unit 4 can determine whether the setting of mark 64 has been completed. If configured this way, in the first inspection, it is determined that the setting of mark 64 has not been completed, and in subsequent inspections, it is determined that the setting of mark 64 has been completed. Furthermore, the control unit 4 can also be configured to notify the user (e.g., display this notification on the display unit 6) when it is determined that the setting of mark 64 has not been completed. On the other hand, the control unit 4 can also be configured to automatically (without user input) read the data of mark 64 stored in the storage unit 8 when it is determined that the setting of mark 64 has been completed. Furthermore, in different inspections, the orientation and shooting range of the inspection object 7 installed on the defect inspection device 100 must be adjusted to be the same for each other.

[0115] (Effects of the first implementation method)

[0116] In the first embodiment, the following effects can be obtained.

[0117] In the first embodiment, as described above, the control unit 4 is configured to inspect the defects of the inspection object 7 based on the image captured by the image sensor 35 (capturing unit), and to overlay the image of the mark 64 onto the overlay image 65 (inspection result image) displayed on the display unit 6 at a position corresponding to the predetermined area of ​​interest S. Therefore, even if different users perform the inspection, the position of the mark 64 displayed on the overlay image 65 remains the same. As a result, defect determination is based on the position of the mark 64 displayed on the overlay image 65, thereby suppressing discrepancies in inspection results depending on the user.

[0118] Furthermore, in the defect inspection apparatus based on the first embodiment, by configuring it as follows, the further effects described below can be obtained.

[0119] In the first embodiment, as described above, the defect inspection apparatus 100 includes: an oscillator 1 (excitation unit) for exciting acoustic vibrations in the inspection object 7; a laser illumination 2 for irradiating the inspection object 7 with laser light; and a speckle shear interferometer 3 (interference unit) for interfering the reflected light from different positions of the laser light arriving from the inspection object 7 excited by the oscillator 1. Furthermore, an image sensor 35 (image capturing unit) is configured to capture the interfered reflected light. Moreover, a control unit 4 is configured to acquire an image representing the vibration state of the inspection object 7 based on the interfered reflected light captured by the image sensor 35, and to overlay the image of the marker 64 onto a superimposed image 65 (inspection result image) representing the vibration state of the inspection object 7 at a position corresponding to a predetermined area of ​​interest S. Here, when inspection is performed based on an image representing the vibration state of the inspection object 7, the brightness of the laser illumination 2 irradiating the inspection object 7 may sometimes be uneven. As a result, a defect-like appearance may sometimes occur in areas with relatively low light intensity. Therefore, when inspection is performed based on an image representing the vibration state of the inspection object 7, a relatively high level of skill is required to identify defects. Therefore, by overlaying the image of marker 64 onto the position of the overlay image 65 corresponding to the specified area of ​​interest S, the discrepancy in inspection results depending on the user is suppressed, which is particularly effective when the inspection is based on an image representing the vibration state of the object 7 being inspected.

[0120] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to overlay the image of the mark 64 onto the position corresponding to the predetermined area of ​​interest S in the overlay image 65 (inspection result image) acquired using the static image 61 and the moving image 62 captured by the image sensor 35 (capturing unit). Therefore, defects can be determined based on the position of the mark 64 displayed on the overlay image 65 acquired using the static image 61 and the moving image 62. As a result, when a user views the overlay image 65 to determine (identify) defects, discrepancies in inspection results depending on the user can be suppressed.

[0121] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to acquire a static image 61 showing the brightness of light on the inspection object 7 and a dynamic image 62 representing the vibration state of the inspection object 7, based on the interfered reflected light captured by the image sensor 35 (capturing unit). It also acquires a superimposed image 65, on which the discontinuous portion of vibration extracted from the dynamic image 62 is superimposed from the static image 61, as the inspection result image. Moreover, the control unit 4 is configured to accept the setting of a mark 64 for a predetermined area of ​​interest S displayed on the static image 61 on the display unit 6, and superimpose the image of the mark 64 onto the superimposed image 65 at the position corresponding to the predetermined area of ​​interest S. Therefore, when a user views the superimposed image 65, on which the discontinuous portion extracted from the dynamic image 62 is superimposed on the static image 61, to determine (identify) defects, discrepancies in the inspection results based on the user's perspective can be suppressed.

[0122] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to overlay the image of the mark 64 onto the position of the moving image 62 corresponding to the predetermined area of ​​interest S. Therefore, when a user views the moving image 62 to determine (identify) defects, discrepancies in the inspection results depending on the user can be suppressed.

[0123] Furthermore, in the first embodiment, as described above, the defect inspection apparatus 100 includes a storage unit 8 that stores data for the set markers 64. Moreover, the control unit 4 is configured to repeatedly use the data for the markers 64 stored in the storage unit 8 whenever different inspections are performed. Therefore, it is unnecessary to set the markers 64 for each different inspection. For example, during each inspection, the effort of searching for the designated area of ​​interest S while referring to specifications can be saved. As a result, when performing multiple inspections, the inspection time can be reduced.

[0124] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to inspect the defects of the current inspection object 7 while reading the data of the marker 64 stored in the storage unit 8 during the initial inspection of the inspection object 7, whether in the case of individually inspecting multiple inspection objects 7 of the same type or in the case of inspecting the same inspection object 7 multiple times. The read image of the marker 64 is then overlaid on the current overlay image 65 (inspection result image) at the position corresponding to the predetermined area of ​​interest S. Therefore, since the marker 64 is set only during the initial inspection, the process of setting the marker 64 can be omitted in subsequent inspections. As a result, in the case of multiple inspections, the inspection time can be further reduced.

[0125] Furthermore, in the first embodiment, as described above, the data of the overlay image 65 (inspection result image) preceding the image overlapping the mark 64 is saved to the storage unit 8 separately from the data of the mark 64. This allows for efficient processing of the image of the mark 64 and the overlay image 65 preceding the image overlapping the mark 64 (e.g., individually publishing each image in the report).

[0126] Furthermore, in the first embodiment, as described above, the control unit 4 is configured to reflect the correction of the data of the mark 64 to the set data of the mark 64 when the data of the mark 64 is corrected on the overlay image 65 (inspection result image). Therefore, after the data of the mark 64 is corrected, if the image of the mark 64 is overlaid on the overlay image 65 during other inspections of the inspection object 7, the corrected image of the mark 64 can be overlaid on the overlay image 65.

[0127] [Second Implementation]

[0128] In the second embodiment, unlike the first embodiment which inspects the entire area of ​​the image displayed on the display unit 6, the inspection target area can be limited to a portion of the image displayed on the display unit 6.

[0129] Specifically, such as Figure 7 As shown, the control unit 14 is configured to inspect images ( Figure 7 In the example shown (where the moving image 62) overlaps with an image of a marker 64 surrounding a certain range, areas outside the certain range are excluded from the inspection target area, and defects within that range are detected (extracted). That is, only discontinuous portions within the range of the marker 64 are displayed (extracted) as the extracted image 63. Thus, the control unit 14 has the function of extracting (cutting out) only the range to be inspected from the entire shooting range (inspection range cutting function).

[0130] Furthermore, the control unit 14 is configured to detect defects based on the brightness of each pixel in the image 60 captured by the image sensor 35. In the second embodiment, the control unit 14 is configured to detect defects based on the brightness value of each pixel. The control unit 14 has a function of detecting defects based on a comparison of the brightness value (brightness of each pixel) with a threshold (threshold comparison function).

[0131] Moreover, in the second embodiment, such as Figure 7As shown, the control unit 14 is configured to detect portions with brightness values ​​above a predetermined threshold as defects (discontinuities) within a certain range (the range marked 64). Specifically, the control unit 14 detects the brightness value of each pixel (detection element) within the range marked 64 (e.g., six stages from 0 to 5). Furthermore, the control unit 14 detects (extracts) pixels (detection elements) with brightness values ​​above the predetermined threshold (e.g., 3 or higher) as pixels (detection elements) containing defects (discontinuities). Figure 7 The diagram roughly illustrates the distribution of brightness values.

[0132] Furthermore, the control unit 14 can detect (extract) defects based on a comparison of the brightness value (brightness of each pixel) with a threshold for the entire shooting range displayed on the display unit 6. That is, the control unit 14 is configured to switch the range (inspection range) for defect detection (extraction) based on the comparison of the brightness value (brightness of each pixel) with a threshold to the entire shooting range and a certain range (the range of the markers 64). Moreover, the control unit 14 can also perform defect detection (extraction) based on the comparison of the brightness value (brightness of each pixel) with a threshold within the respective ranges of multiple markers 64.

[0133] Furthermore, the control unit 14 has a function (ratio determination function) to determine the state of the inspection object 7 (whether the inspection result is qualified or not) based on the ratio of the pixels corresponding to the detected defect in the image 60 captured by the image sensor 35. The control unit 14 is configured to determine whether a defect exists in the inspection range of the inspection object 7 because it exceeds a preset benchmark (prescribed ratio).

[0134] In the second embodiment, the control unit 14 is configured to determine the state of the inspection object 7 (whether the inspection result is acceptable) based on the ratio of pixels corresponding to the detected defects within a certain range (the range of the marker 64). In the second embodiment, the control unit 14 has the function of determining the state of the inspection object 7 based on the ratio of pixels corresponding to the defective part (the part detected as defective in the inspection range extracted from the entire shooting range) to the inspection range extracted (cut) from the entire shooting range by the inspection range cutting function. Specifically, the state of the inspection object 7 (whether the inspection result is acceptable) is determined based on the ratio of the number of pixels of the part detected as defective by the threshold comparison function to the number of pixels of the inspection range extracted (cut) by the inspection range cutting function.

[0135] Furthermore, the control unit 14 can determine the state of the object under inspection 7 based on the ratio of the number of pixels in the defective area (the area detected as defective by the threshold comparison function) to the total number of pixels in the shooting range. That is, the control unit 14 is configured to switch the number of pixels compared with the number of pixels in the defective area (the area detected as defective by the threshold comparison function) in the ratio determination function to the total number of pixels in the shooting range and the number of pixels within a certain range (the range of the marker 64).

[0136] Furthermore, the control unit 14 is configured to overlay information based on brightness values ​​of each pixel in the image 60 captured by the image sensor 35 as a measure of brightness onto the overlay image 65 (inspection result image). Specifically, as... Figure 8 As shown, defect regions 91 and 92 (areas shown by dashed lines) based on the brightness (brightness value) of each pixel are superimposed on the inspection result image. Furthermore, defect regions 91 and 92 are examples of the "information based on brightness value" in the claims. For example, defect region 91 is a region with a brightness value of 4 or higher, and defect region 92 is a region with a brightness value of 3 or higher. Moreover, the control unit 14 can also visualize the changes in brightness (brightness value) of each pixel through color and superimpose it on the overlay image 65 (inspection result image), similar to a heatmap. That is, the changes in brightness (brightness value) of each pixel can also be displayed through color changes (color or saturation changes) and superimposed on the overlay image 65 (inspection result image). Furthermore, values ​​(numerical values) based on brightness values ​​can also be superimposed on the overlay image 65 (inspection result image). For example, the brightness values ​​of pixels with brightness values ​​of a predetermined threshold or higher (see reference...) can also be superimposed. Figure 7 It is displayed overlaid on the overlay image 65 (the inspection result image).

[0137] Furthermore, the other structures of the second embodiment are the same as those of the first embodiment.

[0138] (Effects of the second implementation method)

[0139] In the second embodiment, the following effects can be obtained.

[0140] In the second embodiment, similar to the first embodiment, it is possible to suppress discrepancies in inspection results based on the user.

[0141] Furthermore, in the defect inspection apparatus based on the second embodiment, by configuring it as follows, the further effects described below can be obtained.

[0142] In the second embodiment, as described above, the control unit 14 is configured to detect defects based on the brightness (luminance value) of each pixel in the image captured by the image sensor 35 (capturing unit). Therefore, the control unit 14 can automatically detect defects based on the brightness (luminance value) of each pixel in the image captured by the image sensor 35 (capturing unit). As a result, unlike the case where defects are judged (identified) by the user, discrepancies in inspection results based on the user can be suppressed.

[0143] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to determine the state of the object to be inspected 7 based on the proportion of pixels corresponding to the detected defects in the image captured by the image sensor 35 (capturing unit). Therefore, the condition of the object to be inspected 7 can be determined based on the proportion of defects within the inspection range. Moreover, if the proportion of defects within the inspection range is high, the user can take appropriate action regarding the object to be inspected 7.

[0144] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to overlay information based on brightness values ​​of each pixel in the image 60 captured by the image sensor 35 (capturing unit) onto the overlay image 65 (inspection result image). This allows the user to view and confirm the brightness value-based information, thus easily grasping changes in brightness values ​​within the inspection range.

[0145] Furthermore, in the second embodiment, as described above, when an image of a marker 64 surrounding a certain range is superimposed on the inspection image (moving image 62), areas outside the certain range are excluded from the inspection target area, and defects within the certain range are detected (extracted). Thus, inspection outside the range of the marker 64 is omitted, thereby reducing the load on the control unit 14.

[0146] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to detect portions of each pixel in the image 60 captured by the image sensor 35 (capturing unit) within a certain range (the range of mark 64) where the brightness value as a measure of brightness is above a predetermined threshold as a defect (discontinuity). Therefore, compared to confirming defects through visual inspection by the user, defects within the range of mark 64 can be reliably detected.

[0147] Furthermore, in the second embodiment, as described above, the control unit 14 is configured to determine the state of the inspection object 7 based on the ratio of pixels corresponding to the detected defects (discontinuous portions) within a certain range (the range of the markings 64). Therefore, the state of the inspection object 7 can be determined based on the ratio of pixels corresponding to defects (discontinuous portions) within any range of the shooting range. As a result, even if a structural variation 75 or the like of the inspection object 7 is detected as a defect, parts of the inspection object 7 that are not intended to be considered defects (non-defective parts) can be excluded from the range for determining whether the inspection result of the inspection object 7 is acceptable. Therefore, the state of the inspection object 7 can be determined more accurately.

[0148] Furthermore, the other effects of the second embodiment are the same as those of the first embodiment.

[0149] Furthermore, at least a portion of the structures of the first and second embodiments can be combined with each other to form a configuration.

[0150] [Variation Example]

[0151] Furthermore, it should be considered that the embodiments disclosed herein are illustrative in all respects and not limiting. The scope of the invention is shown by the claims rather than the description of the embodiments, and therefore includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0152] For example, the embodiment described illustrates an example where the inspection result image (overlay image 65, etc.) is displayed only on the display unit 6, but the present invention is not limited thereto. For example, in the present invention, the inspection result image may also be projected onto the surface of the object being inspected 7.

[0153] Specifically, such as Figure 9 As shown, the defect inspection apparatus 200 includes a projection unit 131 that projects an inspection result image (overlay image 65) with an image superimposed on the mark 64 onto the inspection object 7. The projection unit 131 is provided in the speckle shearing interferometer 13 included in the defect inspection apparatus 200. Alternatively, the projection unit 131 may be provided independently of the speckle shearing interferometer 13. Moreover, the speckle shearing interferometer 13 is an example of the "interference unit" in the claims.

[0154] Figure 9 In the example shown, the projected image 13a of the inspection result image (overlay image 65) is projected onto the inspection object 7. Therefore, based on the projected image 13a, the position of the defect portion 73 (especially internal defects and other defects that cannot be directly seen) and the mark 64 displayed on the display unit 6 can be easily determined on the actual object 7. Furthermore, the projection unit 131 is controlled to ensure that the projected image 13a is at full size.

[0155] Furthermore, the embodiment described illustrates an example using a ruler 80, but the invention is not limited thereto. For example, a three-dimensional measuring instrument can also be used to measure the size of the defect.

[0156] Specifically, such as Figure 10 As shown, the defect inspection device 300 includes a three-dimensional measuring instrument 231. The three-dimensional measuring instrument 231 is housed within the speckle shear interferometer 23 included in the defect inspection device 300. Alternatively, the three-dimensional measuring instrument 231 may be provided independently of the speckle shear interferometer 23.

[0157] At this time, the three-dimensional data of the inspection object 17 measured by the three-dimensional measuring instrument 231 is sent to the control unit 44.

[0158] The control unit 44 extracts defects using the methods described in the embodiment. Furthermore, the control unit 44 overlays an image containing the defect image onto a three-dimensional image of the object under inspection 17 (see reference). Figure 11 The data is displayed on the display unit 6. The control unit 44 is configured to calculate the length L of the defect portion in the three-dimensional image displayed on the display unit 6 based on the acquired three-dimensional data, etc. Therefore, even when the object being inspected has a three-dimensional and complex shape, the size of the defect can be easily calculated. Moreover, since it is not necessary to use rulers or the like, the operation of measuring the size of the defect can be simplified.

[0159] Furthermore, the embodiment described illustrates an example of setting a marker 64 on a static image 61, but the present invention is not limited thereto. For example, the marker 64 may also be set on at least a portion of multiple images 60. In this case, the image 60 with the marker 64 set may be overlaid with the extracted image 63 to generate a superimposed image.

[0160] Furthermore, while the described embodiment illustrates an example of defect inspection (flaw detection) using ultrasonic vibration, the present invention is not limited thereto. For example, defect inspection using magnetism (magnetic flaw detection) can also be performed. Moreover, defect inspection using sound wave vibrations other than ultrasound can also be performed. Furthermore, in addition to the above, the method of the present invention can be applied to any method that uses images for defect inspection.

[0161] Furthermore, the described embodiment illustrates an example of setting the overlaid image 65 as the inspection result image, but the invention is not limited thereto. For example, the dynamic image 62 and the extracted image 63 may also be set as the inspection result image.

[0162] Furthermore, the described embodiment illustrates an example of a user determining whether the position of the defective portion 73 and the position of the mark 64 are misaligned, but the present invention is not limited thereto. The control unit may also determine whether the position of the defective portion 73 and the position of the mark 64 are misaligned using artificial intelligence (AI) or the like.

[0163] Furthermore, the embodiment described herein illustrates an example of displaying (setting) a graphic (circle, etc.) as the marker 64, but the invention is not limited thereto. For example, characters may also be displayed (set) as the marker.

[0164] Furthermore, in the embodiments described above, for ease of explanation, the processing of the control unit is illustrated using a process-driven approach where processing is performed sequentially along a processing flow. However, the present invention is not limited to this. In the present invention, the processing of the control unit can also be performed using an event-driven approach where processing is executed on an event-by-event basis. In this case, it can be performed entirely as an event-driven approach, or a combination of event-driven and process-driven approaches can be used.

[0165] Furthermore, in the second embodiment, an example is shown where the control unit 14 is configured to switch the range (inspection range) for defect detection (extraction) based on the comparison of the brightness value (brightness of each pixel) with a threshold to the entire shooting range and a certain range (the range marked 64), but the present invention is not limited thereto. In the present invention, the control unit may also be configured to perform defect detection (extraction) based on the comparison of the brightness value (brightness of each pixel) with a threshold only in either the entire shooting range or a certain range (the range marked 64).

[0166] Furthermore, in the second embodiment, an example is shown where the control unit 14 is configured to switch the number of pixels compared in the scaling function with the number of pixels of the portion (defective portion) detected as defective by the threshold comparison function to the total number of pixels of the shooting range and the number of pixels within a certain range (the range marked 64). However, the present invention is not limited to this. In the present invention, the control unit may also be configured such that the number of pixels compared in the scaling function with the number of pixels of the portion (defective portion) detected as defective by the threshold comparison function is only either the total number of pixels of the shooting range or the number of pixels within a certain range (the range marked 64).

[0167] [form]

[0168] Those skilled in the art will understand that the exemplary embodiments described are specific examples of the following forms.

[0169] (Project 1)

[0170] A defect inspection device, comprising:

[0171] The photography department is responsible for photographing and inspecting the objects.

[0172] The display unit displays an image based on an image captured by the imaging unit; and

[0173] The control unit accepts the setting of markers for a specified area of ​​interest on the image displayed on the display unit.

[0174] The control unit is configured to inspect defects in the object under inspection based on images captured by the imaging unit, and to overlay the marked image onto the position of the inspection result image displayed on the display unit corresponding to the predetermined area of ​​interest.

[0175] (Project 2)

[0176] The defect inspection device according to Project 1 further includes:

[0177] The excitation unit excites acoustic vibrations to the object under inspection;

[0178] Laser illumination, irradiating the object under inspection with laser light; and

[0179] The interference section causes interference between reflected light from laser beams arriving at different positions on the object under inspection, which are excited by the excitation section.

[0180] The imaging unit is configured to capture the reflected light after interference.

[0181] The control unit is configured to acquire an image representing the vibration state of the object under inspection based on the interference reflected light captured by the imaging unit, and to overlay the marked image onto a position corresponding to the predetermined region of interest of the inspection result image based on the image representing the vibration state of the object under inspection.

[0182] (Project 3)

[0183] According to the defect inspection apparatus of Project 1 or 2, the control unit is configured to overlay the image of the mark on the position of the inspection result image corresponding to the predetermined area of ​​interest, which is obtained using a static image and a dynamic image based on the image captured by the imaging unit.

[0184] (Project 4)

[0185] The defect inspection device according to Project 3 includes:

[0186] The excitation unit excites acoustic vibrations to the object under inspection;

[0187] Laser illumination, irradiating the object under inspection with laser light; and

[0188] The interference section causes interference between reflected light from laser beams arriving at different positions on the object under inspection, which are excited by the excitation section.

[0189] The imaging unit is configured to capture the reflected light after interference.

[0190] The control unit is configured to acquire, based on the interference-reflected light captured by the imaging unit, a static image showing the brightness of the light on the object under inspection, and a dynamic image representing the vibration state of the object under inspection; and to acquire, as the inspection result image, a superimposed image of the static image and the discontinuous portion of the vibration extracted from the dynamic image.

[0191] The control unit is configured to accept the setting of a mark for a predetermined area of ​​interest on the static image displayed on the display unit, and to overlay the image of the mark onto the overlaid image at a position corresponding to the predetermined area of ​​interest.

[0192] (Project 5)

[0193] According to the defect inspection apparatus of Project 3 or 4, the control unit is configured to overlay the image of the mark onto the position of the dynamic image corresponding to the specified area of ​​interest.

[0194] (Project 6)

[0195] The defect inspection apparatus according to any one of items 1 to 5 further includes:

[0196] The storage unit stores the data associated with the set markers.

[0197] The control unit is configured to repeatedly use the data of the marker stored in the storage unit whenever different checks are performed.

[0198] (Project 7)

[0199] According to the defect inspection apparatus described in Project 6, the control unit is configured to perform the current inspection while reading the data of the marker stored in the storage unit during the initial inspection, in cases where multiple inspection objects of the same type are inspected individually, and in cases where the same inspection object is inspected multiple times, and to overlay the image of the read marker onto the position of the current inspection result image corresponding to the predetermined area of ​​interest.

[0200] (Project 8)

[0201] According to the defect inspection apparatus of item 6 or 7, the control unit is configured to save, separately from the data of the mark, the data of the inspection result image before the image of the mark overlaps, and the image of the mark overlapping the data of the inspection result image to the storage unit.

[0202] (Project 9)

[0203] According to any one of items 1 to 8, the defect inspection apparatus wherein the control unit is configured to reflect the correction of the marked data to the set marked data when the correction of the marked data is received on the inspection result image.

[0204] (Project 10)

[0205] According to any one of items 1 to 9, the defect inspection apparatus, wherein the control unit is configured to detect the defect based on the brightness of each pixel in an image captured by the imaging unit.

[0206] (Project 11)

[0207] According to the defect inspection apparatus of Item 10, the control unit is configured to detect the defect based on the brightness value of each pixel in the image captured by the imaging unit as a measure of brightness.

[0208] (Project 12)

[0209] According to the defect inspection apparatus of Project 11, the control unit is configured to determine the state of the inspection object based on the ratio of pixels in the image captured by the imaging unit to the pixels corresponding to the detected defect.

[0210] (Project 13)

[0211] According to the defect inspection apparatus of item 11 or 12, the control unit is configured to superimpose information based on the brightness values ​​of each pixel in the image captured by the imaging unit as brightness onto the inspection result image.

[0212] (Project 14)

[0213] According to any one of items 1 to 13, the defect inspection apparatus wherein the control unit is configured to exclude areas outside the certain range from the inspection target area and detect the defects within the certain range when an image of the mark surrounding a certain range is superimposed in the inspection image.

[0214] (Project 15)

[0215] According to the defect inspection apparatus of Project 14, the control unit is configured to detect as the defect a portion of each pixel in an image captured by the imaging unit within the certain range whose brightness value as a degree of brightness is above a predetermined threshold.

[0216] (Project 16)

[0217] According to the defect inspection apparatus of Project 15, the control unit is configured to determine the state of the inspection object based on the ratio of pixels corresponding to the detected defect within the specified range.

[0218] (Project 17)

[0219] The defect inspection apparatus according to any one of items 1 to 16 further includes: a projection unit that projects the inspection result image, which has the image of the mark superimposed on it, onto the inspection object.

Claims

1. A defect inspection device, comprising: The photography department is responsible for photographing and inspecting the objects. The display unit displays an image based on reflected light from the object being inspected, captured by the imaging unit. as well as The control unit accepts the setting of markers for a specified area of ​​interest on the image displayed on the display unit. The control unit is configured to overlay the image of the mark onto either a position corresponding to the predetermined region of interest in a dynamic image formed based on the reflected light captured by the imaging unit, or a position corresponding to the predetermined region of interest in an inspection result image of the defect of the inspected object acquired using the dynamic image. The dynamic image represents the vibration state of the object being inspected. The marking of the defined area of ​​interest is set such that it is received on the static image displayed on the display unit based on the reflected light captured by the imaging unit. The still image shows the brightness and darkness of the light on the object being inspected. The inspection result image is a superimposed image of the static image with discontinuous portions of vibration extracted from the dynamic image.

2. The defect inspection device according to claim 1, further comprising: The excitation unit excites acoustic vibrations to the object under inspection; Laser illumination, irradiating the object under inspection with laser light; as well as The interference section causes interference between reflected light from laser beams arriving at different positions on the object under inspection, which are excited by the excitation section. The imaging unit is configured to capture the reflected light after interference. The control unit is configured to acquire an image representing the vibration state of the object under inspection based on the interference reflected light captured by the imaging unit, and to overlay the marked image onto a position corresponding to the predetermined region of interest of the inspection result image based on the image representing the vibration state of the object under inspection.

3. The defect inspection device according to claim 1, wherein... The control unit is configured to overlay the image of the mark onto the position of the inspection result image corresponding to the predetermined region of interest, which is obtained using the static image and the dynamic image based on the image captured by the imaging unit.

4. The defect inspection device according to claim 3, comprising: The excitation unit excites acoustic vibrations to the object under inspection; Laser illumination, irradiating the object under inspection with laser light; as well as The interference section causes interference between reflected light from laser beams arriving at different positions on the object under inspection, which are excited by the excitation section. The imaging unit is configured to capture the reflected light after interference. The control unit is configured to acquire the static image, the dynamic image, and the inspection result image based on the interfered reflected light captured by the imaging unit. The control unit is configured to accept the setting of a mark for a predetermined area of ​​interest on the static image displayed on the display unit, and to overlay the image of the mark onto the overlaid image at a position corresponding to the predetermined area of ​​interest.

5. The defect inspection device according to claim 3, wherein... The control unit is configured to overlay the marked image onto the dynamic image at a position corresponding to the defined region of interest.

6. The defect inspection device according to claim 1, further comprising: The storage unit stores the data associated with the set markers. The control unit is configured to repeatedly use the data of the marker stored in the storage unit whenever different checks are performed.

7. The defect inspection device according to claim 6, wherein... The control unit is configured to perform the current inspection while reading the data of the marker stored in the storage unit during the initial inspection, in cases where multiple inspection objects of the same type are inspected individually, and in cases where the same inspection object is inspected multiple times, and to overlay the image of the read marker onto the position of the current inspection result image corresponding to the predetermined area of ​​interest.

8. The defect inspection device according to claim 6, wherein The control unit is configured to save, separately from the data of the marker, the data of the inspection result image before the image of the marker overlaps with the data of the inspection result image to the storage unit.

9. The defect inspection device according to claim 1, wherein... The control unit is configured to reflect the correction of the marked data to the set marked data when the correction is received on the inspection result image.

10. The defect inspection device according to claim 1, wherein The control unit is configured to detect the defect based on the brightness level of each pixel in the image captured by the imaging unit.

11. The defect inspection apparatus according to claim 10, wherein The control unit is configured to detect the defect based on the brightness value of each pixel in the image captured by the imaging unit as a brightness level.

12. The defect inspection apparatus according to claim 11, wherein The control unit is configured to determine the state of the object under inspection based on the proportion of pixels in the image captured by the imaging unit that correspond to the detected defect.

13. The defect inspection device according to claim 1, wherein... The control unit is configured to overlay information based on the brightness values ​​of each pixel in the image captured by the imaging unit as brightness levels onto the inspection result image.

14. The defect inspection device according to claim 1, wherein The control unit is configured to exclude areas outside the certain range from the inspection target area and detect the defects within the certain range when an image of the inspection is superimposed on the image of the inspection.

15. The defect inspection apparatus according to claim 14, wherein... The control unit is configured to detect as the defect any portion of each pixel in the image captured by the imaging unit within the specified range whose brightness value, as a measure of brightness, is above a predetermined threshold.

16. The defect inspection apparatus according to claim 15, wherein The control unit is configured to determine the state of the inspected object based on the ratio of pixels corresponding to the detected defect within the specified range.

17. The defect inspection device according to claim 1, further comprising: The projection unit projects the inspection result image, which has the marked image superimposed, onto the inspection object.

Images