Tri-axis displacement platform and probe module

Abstract

The application provides a three-axis displacement platform and a probe module. The three-axis displacement platform comprises a fixed seat, a Y-direction moving seat, a Z-direction moving seat, a mounting seat, a Y-direction adjusting knob, a Z-direction adjusting knob, an X-direction adjusting knob, a first steering mechanism and a second steering mechanism. When the Y-direction adjusting knob is rotated, the first steering mechanism moves the Y-direction moving seat along the Y-axis relative to the fixed seat. When the X-direction adjusting knob is rotated, the second steering mechanism moves the mounting seat along the X-axis relative to the Y-direction moving seat. When the Z-direction adjusting knob is rotated, the Z-direction moving seat moves along the Z-axis relative to the Y-direction moving seat. The X-direction adjusting knob, the Z-direction adjusting knob and the Z-direction adjusting knob are all located on the top of the three-axis displacement platform. Since the three adjusting knobs are all located on the top of the three-axis displacement platform, the user can easily touch and rotate all the knobs, and multiple three-axis displacement platforms can be arranged compactly.

Description

Technical Field

[0001] This invention relates to the field of displacement platform technology, and in particular to a triaxial displacement platform and probe module. Background Technology

[0002] During wafer testing, it is usually necessary to test the wafer's dies. The die testing method is roughly as follows: the tip of a probe is brought into contact with the pads on the die, the testing system inputs a specific electrical signal to the die through the probe, and receives the electrical signal fed back by the die through the probe. The testing system determines whether the die is qualified based on the feedback signal.

[0003] In existing technology, chip testers mount probes on a manual displacement platform, forming a probe module. Users can rotate knobs on the displacement platform to move the probes along the X, Y, or Z axes. Users can fine-tune the probe position using the displacement platform to match the probe's position to the chip's location.

[0004] Wafers are typically diced into multiple dies. To expedite the inspection of all dies on the wafer, some testers incorporate multiple probe modules into their inspection devices. However, due to the structural characteristics of the displacement platform, when multiple probe modules are arranged side-by-side, some knobs on the platform may be difficult for the tester to reach, affecting the adjustment of probe positions. Increasing the spacing between adjacent displacement platforms to facilitate probe adjustments would reduce the compactness of the die inspection device, hindering efforts to minimize its overall size. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a three-axis displacement platform in which the adjustment knobs of the X-axis, Y-axis and Z-axis are all arranged facing upwards; when multiple three-axis displacement platforms are arranged side by side, adjacent three-axis displacement platforms can be placed relatively close, and even if the distance between adjacent three-axis displacement platforms is small, the user can easily touch and rotate all the knobs of the three-axis displacement platform.

[0006] The present invention also proposes a probe module including the above-mentioned triaxial displacement platform.

[0007] A three-axis displacement platform according to a first aspect of the present invention includes: a fixed base; a Y-axis movable base movably connected to the fixed base; a Z-axis movable base movably connected to the Y-axis movable base; a mounting base movably connected to the Z-axis movable base; a Y-axis adjustment knob rotatably connected to the Y-axis movable base; a first steering mechanism, which, when the Y-axis adjustment knob is rotated, causes the Y-axis movable base to move relative to the fixed base in the positive or negative direction of the Y-axis; and a Z-axis adjustment knob rotatably connected to the Z-axis movable base, and also connected to the Y-axis movable base. The system includes a Z-axis adjustment knob, which, when rotated, allows the Z-axis moving seat to move relative to the Y-axis moving seat along the positive or negative direction of the Z-axis; an X-axis adjustment knob, rotatably connected to the Z-axis moving seat; and a second steering mechanism, which, when rotated, causes the mounting seat to move relative to the Z-axis moving seat along the positive or negative direction of the X-axis. The X-axis, Y-axis, and Z-axis adjustment knobs are all located at the top of the three-axis displacement platform, the Z-axis is vertically aligned, and any two of the X-axis, Y-axis, and Z-axis are perpendicular to each other.

[0008] The three-axis displacement platform according to a first aspect embodiment of the present invention has at least the following advantages: Since the X-axis adjustment knob, Y-axis adjustment knob, and Z-axis adjustment knob of the three-axis displacement platform are all located at the top of the platform, and the X-axis and Y-axis adjustment knobs are not located on either side of the platform in the horizontal direction, when a user needs to arrange multiple three-axis displacement platforms horizontally, the three-axis displacement platform of the present invention can reduce or even eliminate the horizontal space reserved for the X-axis and Y-axis adjustment knobs in the prior art. Therefore, the gap between adjacent three-axis displacement platforms can also be reduced, meaning the three-axis displacement platforms can be arranged more compactly in the horizontal direction.

[0009] Furthermore, since the X-axis, Y-axis, and Z-axis adjustment knobs are all located at the top of the three-axis displacement platform, the user can easily rotate all the knobs by reaching their hand above the platform. The user's hand does not need to reach to one side of the platform in the horizontal direction, nor does it need to reach into the narrow gap between adjacent three-axis displacement platforms. Therefore, the user experiences less obstruction when rotating the knobs above the platform, and the three-axis displacement platform of this invention also improves the ease of use for the user when rotating the knobs.

[0010] According to some embodiments of the present invention, the Y-axis adjustment knob is threadedly connected to the Y-axis moving seat, and the Y-axis adjustment knob is vertically arranged. The first steering mechanism includes: a first steering block, rotatably connected to the Y-axis moving seat, the first steering block rotating relative to the Y-axis moving seat about a first axis, the first axis being parallel to the X-axis, and the first steering block abutting against the bottom end of the Y-axis adjustment knob; a first abutting pin, connected to the fixed seat, the first abutting pin abutting against the first steering block; and a first elastic element, both ends of which are respectively connected to the Y-axis moving seat and the fixed seat. When the Y-axis adjustment knob moves downward, the Y-axis adjustment knob drives the first steering block to rotate along a first direction, thereby causing the first steering block to drive the first abutting pin and the fixed seat to move along the negative direction of the Y-axis. When the Y-axis adjustment knob moves upward, the elastic force of the first elastic element drives the Y-axis moving seat and the first abutting pin to move along the positive direction of the Y-axis, and the first abutting pin drives the first steering block to rotate along a second direction, the first direction and the second direction being opposite.

[0011] According to some embodiments of the present invention, the second steering mechanism includes: a second steering block rotatably connected to the Z-axis moving seat, the second steering block rotating relative to the Z-axis moving seat about a second axis, the second axis being parallel to the Y-axis, and the second steering block abutting against the bottom end of the X-axis adjusting knob; a second abutting pin connected to the mounting seat, the second abutting pin abutting against the second steering block; and a second elastic member, both ends of which are respectively connected to the Z-axis moving seat and the mounting seat; when the X-axis adjusting knob moves downward, the X-axis adjusting knob drives the second steering block to rotate in a third direction, thereby causing the second steering block to drive the second abutting pin and the mounting seat to move in the negative direction of the X-axis; when the X-axis adjusting knob moves upward, the elastic force of the second elastic member drives the mounting seat and the second abutting pin to move in the positive direction of the X-axis, and the second abutting pin drives the second steering block to rotate in a fourth direction, the third direction being opposite to the fourth direction.

[0012] According to some embodiments of the present invention, the top surface of the X-axis adjustment knob is provided with a first character, the top surface of the Y-axis adjustment knob is provided with a second character, and the top surface of the Z-axis adjustment knob is provided with a third character, wherein any two of the first character, the second character, and the third character are different.

[0013] According to some embodiments of the present invention, the Z-axis adjustment knob is threadedly connected to the Z-axis moving seat, the Z-axis adjustment knob is vertically arranged, and the bottom end of the Z-axis adjustment knob abuts against the Y-axis moving seat; when the Z-axis adjustment knob rotates along the fifth direction, the Z-axis adjustment knob moves downward relative to the Z-axis moving seat, thereby causing the Z-axis moving seat to rise relative to the Y-axis moving seat; when the Z-axis adjustment knob rotates along the sixth direction, the Z-axis adjustment knob moves upward relative to the Z-axis moving seat, thereby causing the Z-axis moving seat to fall relative to the Y-axis moving seat, wherein the fifth direction and the sixth direction are opposite.

[0014] According to a second aspect of the present invention, a probe module includes: a triaxial displacement platform as described in the first aspect embodiment; and a probe for contacting a pad of a die, the probe being fixed relative to the mounting base.

[0015] According to the second aspect of the present invention, the probe module has at least the following advantages: since the three adjustment knobs of the three-axis moving platform are all located at the top of the three-axis displacement platform, the position of the probe of the probe module of the present invention is easy to adjust, and multiple probe modules can be arranged together relatively compactly on the horizontal plane.

[0016] According to some embodiments of the present invention, the probe module further includes: a pressure sensor, one end of which is connected to the mounting base; a needle clamp, connected to the other end of the pressure sensor; and a locking member, detachably connected to the needle clamp, wherein the locking member and the needle clamp together hold the probe, and the pressure sensor is used to detect the pressure on the probe from the grain.

[0017] According to some embodiments of the present invention, the locking member includes: a connecting portion having a threaded outer peripheral surface, the connecting portion being threadedly connected to the needle clamp, the central axis of the connecting portion being a third axis; a blocking portion connected to the top end of the connecting portion, the bottom surface of the blocking portion being a blocking surface, the blocking surface surrounding the top end of the connecting portion, the side surface of the blocking portion including a slit and an arc surface, the normal of the slit being perpendicular to the third axis, the arc surface being arranged around the third axis, the bottom edge of the slit and the bottom edge of the arc surface intersecting the outer edge of the blocking surface, and the two ends of the arc surface being connected to the two ends of the slit respectively along the circumference of the blocking portion; the locking member is rotatable relative to the needle clamp to switch between a first state and a second state, when the locking member is in the first state, the blocking surface and the needle clamp together clamp the probe in the vertical direction; when the locking member is in the second state, the blocking surface and the probe are offset from each other.

[0018] According to some embodiments of the present invention, the needle clamp has a positioning groove, and the probe includes: a clamping section, the clamping section being horizontally disposed, a portion of the clamping section being disposed in the positioning groove, and the locking member and the needle clamp jointly clamping the portion of the clamping section located in the positioning groove; and a detection section, the top end of the detection section being connected to the end of the clamping section away from the mounting base, and the bottom end of the detection section being used to contact the pad.

[0019] According to some embodiments of the present invention, the needle clamp further has a positioning hole, the axis of which is vertically arranged; the probe further includes a plug section, the plug section and the detection section are respectively connected to the two ends of the clamping section, and the plug section is inserted into the plug hole.

[0020] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0022] Figure 1 This is a schematic diagram of a displacement platform in the prior art;

[0023] Figure 2 This is a schematic diagram of a three-axis displacement platform according to one embodiment of the present invention;

[0024] Figure 3 for Figure 2 A schematic diagram of the three-axis displacement platform from another angle;

[0025] Figure 4 for Figure 3 A schematic diagram showing the assembly relationship between the fixed seat, the Y-axis movable seat, the first steering block, the first abutting pin, and the first elastic element.

[0026] Figure 5 A schematic diagram illustrating the process of the Y-axis moving seat moving along the negative Y-axis direction as the Y-axis adjustment knob moves downward.

[0027] Figure 6 This is a schematic diagram showing the assembly relationship between the Z-axis moving seat, the mounting seat, the second steering block, the second abutment pin, and the second elastic element.

[0028] Figure 7 A schematic diagram illustrating the process by which the mounting base moves along the positive X-axis direction when the X-axis adjustment knob moves downward.

[0029] Figure 8 This is a schematic diagram showing the assembly relationship between the Y-axis moving seat, the Z-axis moving seat, the third elastic element, and the Z-axis adjusting knob.

[0030] Figure 9 This is a schematic diagram illustrating the process by which the Z-axis adjustment knob drives the Z-axis moving seat to rise relative to the Y-axis moving seat.

[0031] Figure 10 This is a schematic diagram of a probe module according to an embodiment of the present invention;

[0032] Figure 11 for Figure 10 A schematic diagram of the probe module detecting the crystal grains;

[0033] Figure 12 For multiple such Figure 10 The diagram shows the probe modules arranged side by side.

[0034] Figure 13 for Figure 10 A schematic diagram of the needle clamp, probe, and locking mechanism (the locking mechanism is in the first state).

[0035] Figure 14 for Figure 13 A schematic diagram showing the locking mechanism after switching to the second state;

[0036] Figure 15 for Figure 14 Exploded view of the structure shown;

[0037] Figure 16 for Figure 13 A schematic diagram of the locking component.

[0038] Figure label:

[0039] 11-X knob, 12-Y knob, 13-Z knob, 14-Fourth seat, 15-Third seat, 16-Second seat, 17-First seat, 18-Fixing plate;

[0040] 100-Three-axis displacement platform, 101-Fixed seat, 102-Y-axis moving seat, 103-Z-axis moving seat, 104-Mounting seat, 105-Y-axis adjustment knob, 106-Z-axis adjustment knob, 107-X-axis adjustment knob, 108-Second steering block, 109-Third elastic element, 110-Mounting surface, 112-Second elastic element;

[0041] 201-Fifth connector, 202-Sixth connector, 203-Third slide groove, 204-Third slider section;

[0042] 301-First steering block, 302-First abutment pin, 303-First elastic element, 304-First connector, 305-Second connector, 306-First slide groove, 307-First slider part;

[0043] 401-Second abutment pin, 402-Third connector, 403-Fourth connector, 404-Second slide groove, 405-Second slider part;

[0044] 500-Probe module, 501-Connecting plate, 502-Pressure sensor, 503-Insulating plate, 504-Needle clamp, 505-Locking component, 506-Probe;

[0045] 601 - Die, 602 - Pad;

[0046] 701-Cut surface, 702-Arc surface, 703-Blocking surface, 704-Blocking part, 705-Connecting part, 706-Positioning groove, 707-Insertion hole, 708-Threaded hole;

[0047] 801-Clamping section, 802-Detection section, 803-Connection section. Detailed Implementation

[0048] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0049] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0050] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0051] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0052] Figure 1A prior art displacement platform is shown, comprising an X knob 11, a Y knob 12, a Z knob 13, a first base 17, a second base 16, a third base 15, and a fourth base 14. A probe 506 can be mounted on the fourth base 14. Figure 1 (Probe 506 is not shown in the image). The first seat 17 is used to connect to the fixing plate 18. When the user rotates the X knob 11, the second seat 16, the third seat 15, the fourth seat 14, and the probe 506 will all move along the X-axis (along the X-axis). Figure 1 (Movement in the left and right directions). When the user rotates the Y knob 12, the third seat 15, the fourth seat 14, and the probe 506 will all move along the Y-axis (along a direction perpendicular to the left and right direction). Figure 1 (Movement in the direction of the paper). When the user rotates the Z knob 13, both the fourth seat 14 and the probe 506 will move along the Z-axis (along the direction of the paper). Figure 1 (Movement in the up and down direction).

[0053] The fixed plate 18 is connected to the drive mechanism, which includes a power source such as a motor or cylinder. The drive mechanism is used to drive the displacement platform and probe 506 to move, thereby adjusting the position of probe 506. After the drive mechanism stops running, the user can rotate the X knob 11, Y knob 12 or Z knob 13 to fine-tune the position of probe 506 mounted on the displacement platform.

[0054] Reference Figure 1 Due to the structural characteristics of the displacement platform, the probe module 500 in the prior art suffers from inconvenient adjustment. For example, when a user needs to rotate the X knob 11, the user needs to put their hand into the gap between the fixed plate 18 and the first seat 17. This gap is small, making it inconvenient for the user's fingers to move and rotate the X knob 11. Another example is assuming multiple displacement platforms are perpendicular to... Figure 1 If the paper surfaces are arranged side-by-side, the Y-knob 12 of one displacement platform will be blocked by the other. When the user needs to rotate the Y-knob 12, it may be difficult for the user's hand to reach into the gap between the two displacement platforms to rotate the knob. Increasing the distance between adjacent displacement platforms would require a larger space for multiple displacement platforms.

[0055] Therefore, in order to reduce the obstruction encountered by the user when turning the knob without reducing the compactness of the displacement platform arrangement, the present invention provides a three-axis displacement platform 100.

[0056] Figure 2 and Figure 3 A triaxial displacement platform 100 according to an embodiment of the present invention is shown. Figure 2 and Figure 3The same three-axis displacement platform 100 is shown from different angles. The three-axis displacement platform 100 includes a fixed base 101, a Y-axis movable base 102, a Z-axis movable base 103, a mounting base 104, an X-axis adjustment knob 107, a Y-axis adjustment knob 105, a Z-axis adjustment knob 106, a first steering mechanism, and a second steering mechanism. The first and second steering mechanisms are not shown in the image. Figure 2 and Figure 3 The specific structures of the first and second steering mechanisms are illustrated in detail below.

[0057] The fixed base 101 can be connected to a bracket, thereby fixing the entire three-axis displacement platform 100 to a bracket. Alternatively, the fixed base 101 can be connected to a drive mechanism, which is used to drive the entire three-axis displacement platform 100 to move. The mounting base 104 is used to mount the object to be adjusted; for example, the mounting base 104 can be used to mount the probe 506 (such as...). Figure 10 (As shown).

[0058] The Y-axis movable seat 102 is movably connected to the fixed seat 101, and the Y-axis movable seat 102 can move relative to the fixed seat 101 along the positive and negative directions of the Y-axis. The Z-axis movable seat 103 is movably connected to the Y-axis movable seat 102, and the Z-axis movable seat 103 can move relative to the Y-axis movable seat 102 along the positive and negative directions of the Z-axis. The mounting seat 104 is movably connected to the Z-axis movable seat 103, and the mounting seat 104 can move relative to the Z-axis movable seat 103 along the positive and negative directions of the X-axis. The mounting seat 104 is equivalent to an "X-axis movable seat". Thus, the mounting seat 104 can move relative to the fixed seat 101 along the X-axis, Y-axis, and Z-axis, thereby realizing the three-axis movement of the object mounted on the mounting seat 104 relative to the fixed seat 101.

[0059] Any two of the X-axis, Y-axis and Z-axis are perpendicular to each other, and the Z-axis is set vertically. Figures 2 to 10 In the diagram, the positive direction of the Z-axis corresponds to "up", the negative direction of the Z-axis corresponds to "down", the positive direction of the Y-axis corresponds to "right", the negative direction of the Y-axis corresponds to "left", the positive direction of the X-axis corresponds to "forward", and the negative direction of the X-axis corresponds to "backward".

[0060] The movement of the Y-axis movable seat 102, the Z-axis movable seat 103, and the mounting seat 104 is achieved by the user rotating the corresponding knobs, and the installation positions of each knob can be referred to Figure 2 and Figure 3 The X-axis adjustment knob 107, Y-axis adjustment knob 105, and Z-axis adjustment knob 106 are all located at the top of the three-axis displacement platform 100. This means that these three knobs are all located above the geometric center of the three-axis displacement platform 100, and that the area above these three knobs is not obstructed by other components of the three-axis displacement platform 100. (Refer to...) Figure 3The Y-axis adjustment knob 105 is rotatably connected to the Y-axis moving base 102, and the top of the Y-axis adjustment knob 105 protrudes upward relative to the top surface of the Y-axis moving base 102. (Refer to...) Figure 3 The Z-axis adjustment knob 106 is rotatably connected to the Z-axis moving base 103, and the top of the Z-axis adjustment knob 106 protrudes upward relative to the top surface of the Z-axis moving base 103. The X-axis adjustment knob 107 is also rotatably connected to the Z-axis moving base 103. Figure 3 As shown, the Z-axis movable seat 103 has an upward-facing mounting surface 110, which is offset from the top surface of the movable seat. The top of the X-axis adjustment knob 107 protrudes upward relative to the mounting surface 110. The upper side of the mounting surface 110 is not obstructed by other parts of the Z-axis movable seat 103, nor by the Y-axis movable seat 102 and the mounting seat 104. It should be noted that... Figure 2 and Figure 3 The X-axis adjustment knob 107, Y-axis adjustment knob 105, and Z-axis adjustment knob 106 are all vertically arranged. However, in some other embodiments, the aforementioned knobs can also be tilted while ensuring that they are all located at the top of the three-axis displacement platform 100.

[0061] By adjusting the position of the mounting base 104 relative to the fixing base 101, the position of an object (e.g., probe 506) mounted on the mounting base 104 relative to the fixing base 101 can be adjusted. Figure 2 For example, the adjustment method of the position of the mounting base 104 relative to the fixed base 101 is roughly as follows.

[0062] When the height of the mounting base 104 needs to be adjusted, the user can rotate the Z-axis adjustment knob 106 to move the Z-axis moving base 103 relative to the Y-axis moving base 102 in the positive or negative direction of the Z-axis, thereby raising or lowering the mounting base 104 relative to the fixed base 101.

[0063] When it is necessary to adjust the left and right position of the mounting base 104, the user can rotate the Y-axis adjustment knob 105 to move the Y-axis moving base 102 relative to the fixed base 101 in the positive or negative direction of the Y-axis, thereby moving the mounting base 104 to the left or right relative to the fixed base 101.

[0064] When it is necessary to adjust the front and rear position of the mounting base 104, the user can rotate the X-axis adjustment knob 107 to move the X-axis moving base relative to the Z-axis moving base 103 in the positive or negative direction of the X-axis, thereby moving the mounting base 104 forward or backward relative to the fixed base 101.

[0065] The three-axis displacement platform 100 provided by this invention has its X-axis adjustment knob 107, Y-axis adjustment knob 105, and Z-axis adjustment knob 106 all located at the top of the platform. The X-axis adjustment knob 107 and Y-axis adjustment knob 105 are not located on either side of the platform in the horizontal direction. When a user needs to arrange multiple three-axis displacement platforms 100 horizontally, the three-axis displacement platform 100 of this invention can reduce or even eliminate the horizontal space reserved for the X-axis adjustment knob 107 and Y-axis adjustment knob 105 in the prior art. Therefore, the gap between adjacent three-axis displacement platforms 100 can also be reduced, meaning the three-axis displacement platforms 100 can be arranged more compactly in the horizontal direction.

[0066] Furthermore, since the X-axis adjustment knob 107, Y-axis adjustment knob 105, and Z-axis adjustment knob 106 are all located on the top of the three-axis displacement platform 100, the user can easily rotate all the knobs by placing their hand on top of the three-axis displacement platform 100. The user's hand does not need to reach to one side of the three-axis displacement platform 100 in the horizontal direction, nor does it need to reach into the narrow gap between adjacent three-axis displacement platforms 100. Therefore, the user's hand encounters less obstruction when rotating the knobs above the three-axis displacement platform 100, and the three-axis displacement platform 100 of the present invention can also improve the convenience for the user when rotating the knobs.

[0067] The other structures of the triaxial displacement platform 100 of the present invention will now be described in detail.

[0068] Figure 4 An exploded view of a first steering mechanism, a fixed base 101, and a Y-axis moving base 102 is shown in one embodiment of the present invention. (Refer to...) Figure 4 The first steering mechanism includes a first steering block 301, a first abutment pin 302, and a first elastic element 303. The rotational connection between the Y-axis adjustment knob 105 and the Y-axis moving seat 102 is a threaded connection, and the Y-axis adjustment knob 105 is vertically positioned. If the thread of the Y-axis adjustment knob 105 is a right-hand thread, then when the Y-axis adjustment knob 105 rotates clockwise (from a top-down perspective), the Y-axis adjustment knob 105 will move downwards relative to the Y-axis moving seat 102; when the Y-axis adjustment knob 105 rotates counterclockwise (from a top-down perspective), the Y-axis adjustment knob 105 will move upwards relative to the Y-axis moving seat 102. The first steering block 301 is rotatably connected to the Y-axis rotating seat. If the axis of rotation of the first steering block 301 relative to the Y-axis moving seat 102 is called the first axis, then the first axis is parallel to the X-axis. Figure 5As shown, the first steering block 301 abuts against the bottom end of the Y-axis adjustment knob 105. The first abutting pin 302 is connected to the fixed base 101 and also abuts against the first steering block 301. The two ends of the first elastic member 303 are respectively connected to the Y-axis moving base 102 and the fixed base 101. Specifically, in conjunction with Figure 4 and Figure 5 The three-axis displacement platform 100 also includes a first connecting member 304 and a second connecting member 305. The first connecting member 304 is connected to the Y-axis moving seat 102, and the second connecting member 305 is connected to the fixed seat 101. One end of the first elastic member 303 is connected to the Y-axis moving seat 102 through the first connecting member 304, and the other end of the first elastic member 303 is connected to the fixed seat 101 through the second connecting member 305. The first connecting member 304 and the second connecting member 305 can be configured as screws.

[0069] The working principle of the first steering mechanism can be combined with... Figure 5 To understand, Figure 5 This demonstrates how the downward movement of the Y-axis adjustment knob 105 drives the Y-axis moving seat 102 to move. Figure 5 The Y-axis movable seat 102 is not shown in the diagram, and Figure 5 The structure of the fixed base 101 has been simplified. However, since the first connecting member 304 is relatively fixed to the Y-direction movable base 102 and the second connecting member 305 is relatively fixed to the fixed base 101, it can be achieved through... Figure 5 The distance between the first connector 304 and the second connector 305 in the left and right directions is used to determine the relative position between the Y-direction moving seat 102 and the fixed seat 101.

[0070] Reference Figure 5 When the Y-axis adjustment knob 105 is rotated by the user and moves downward relative to the Y-axis moving base 102, the Y-axis adjustment knob 105 drives the first steering block 301 to rotate along the first direction (the first direction corresponds to...). Figure 5 (In the clockwise direction), after the first steering block 301 rotates, it pushes the first abutment pin 302 to move in the negative direction of the Y-axis (to the left), thereby pushing the fixed seat 101 to move in the negative direction of the Y-axis (to the left). Moreover, as the Y-axis adjustment knob 105 gradually descends, the elastic element is gradually stretched and is in a stretched state as the fixed seat 101 moves. The elastic element in the stretched state applies a spring force to the Y-axis moving seat 102, which tends to drive the Y-axis moving seat 102 and the first connecting pin to move in the positive direction of the Y-axis (to the right) and reset.

[0071] Conversely, when the Y-axis adjustment knob 105 is rotated by the user and moves upward relative to the Y-axis moving seat 102, the elastic force of the first elastic element 303 drives the Y-axis moving seat 102 and the first connecting pin to move together along the positive direction of the Y-axis. Furthermore, during this movement, the first abutment pin 302 pushes the first steering block 301 to rotate in the second direction. The second direction is opposite to the first direction and can correspond to... Figure 5 The counterclockwise direction.

[0072] In this way, the movement of the Y-axis moving seat 102 along the Y-axis can be achieved by moving the Y-axis adjusting knob 105 along the Z-axis.

[0073] It should be noted that, Figure 5 In the illustrated embodiment, the Y-axis adjustment knob 105 abuts against one of the circumferential end faces of the first steering block 301, and the first abutment pin 302 abuts against the other circumferential end face of the first steering block 301. However, in other embodiments, the Y-axis adjustment knob 105 and the first abutment pin 302 may also abut against other positions of the first steering block 301, as long as the Y-axis adjustment knob 105 and the first abutment pin 302 can jointly clamp the first steering block 301 along its circumference.

[0074] In one embodiment, the structure of the second steering mechanism is similar to that of the first steering mechanism. (Refer to...) Figure 6 The second steering mechanism includes a second steering block 108, a second abutment pin 401, and a second elastic element 112. The second steering block 108 is rotatably connected to the Z-axis moving seat 103. If the axis of rotation of the second steering block 108 relative to the Z-axis moving seat 103 is called the second axis, then the second axis is parallel to the Y-axis. (Refer to...) Figure 7 The second steering block 108 abuts against the bottom end of the X-axis adjustment knob 107. The second abutment pin 401 is connected to the mounting base 104 and abuts against the second steering block 108. The second abutment pin 401 and the X-axis adjustment knob 107 abut against the two circumferential end faces of the second steering block 108, respectively, clamping the second steering block 108 circumferentially. The two ends of the second elastic member 112 are connected to the Z-axis moving seat 103 and the mounting base 104, respectively. More specifically, refer to... Figure 6The three-axis displacement platform 100 also includes a third connecting member 402 and a fourth connecting member 403. The third connecting member 402 is fixedly connected to the mounting base 104, and the fourth connecting member 403 is fixedly connected to the bottom end face of the Z-axis moving base 103. Both ends of the second elastic member 112 are connected to the third connecting member 402 and the fourth connecting member 403, respectively. One end of the second elastic member 112 is connected to the mounting base 104 via the third connecting member 402, and the other end of the second elastic member 112 is connected to the Z-axis moving base 103 via the fourth connecting member 403. Specifically, the third connecting member 402 and the fourth connecting member 403 can be screws.

[0075] The method by which the second steering mechanism converts the movement of the Y-axis adjustment knob 105 along the Z-axis into the movement of the Y-axis moving seat 102 along the Y-axis can be found in [reference]. Figure 7 . Figure 7 The Z-axis movable seat 103 is not shown, and the structure of the mounting seat 104 has been simplified. Figure 7 In this process, the relative position between the mounting base 104 and the Z-axis movable base 103 can be roughly determined by the relative position between the third connector 402 and the fourth connector 403.

[0076] Reference Figure 7 When the X-axis adjustment knob 107 is rotated by the user and moves downward relative to the Z-axis moving seat 103, the X-axis adjustment knob 107 pushes the second steering block 108 and causes the second steering block 108 to rotate in a third direction (the third direction can correspond to...). Figure 7 (In the clockwise direction); the rotating second steering block 108 will push the second abutment pin 401, thereby causing both the second abutment pin 401 and the mounting base 104 to move (reversely) along the negative X-axis. During the movement of the mounting base 104 along the negative X-axis, the second elastic element 112 is gradually stretched and in a stretched state. When the X-axis adjustment knob 107 is rotated by the user and moves upward relative to the Z-axis moving seat 103, the elastic force of the second elastic element 112 drives the mounting base 104 and the second abutment pin 401 to move along the positive X-axis. The second abutment pin 401 pushes the second steering block 108 and causes the second steering block 108 to rotate in the fourth direction. The fourth direction is opposite to the third direction and can correspond to... Figure 7 The counterclockwise direction.

[0077] Reference Figure 8 In one embodiment, the Z-axis adjustment knob 106 is threadedly connected to the Z-axis moving seat 103. The Z-axis adjustment knob 106 is vertically positioned, and its bottom end abuts against the Y-axis moving seat 102. Due to the threaded connection, when the Z-axis adjustment knob 106 rotates relative to the Z-axis moving seat 103, the Z-axis adjustment knob 106 can also rise and fall relative to the Z-axis moving seat 103.

[0078] Reference Figure 9Since the Z-axis adjustment knob 106 abuts against the Y-axis moving seat 102, the position of the Z-axis adjustment knob 106 relative to the Y-axis moving seat 102 remains unchanged. By changing the position of the Z-axis adjustment knob 106 relative to the Z-axis moving seat 103, the position of the Z-axis moving seat 103 relative to the Y-axis moving seat 102 can be changed. (Refer to...) Figure 9 When the Z-axis adjustment knob 106 is rotated along the fifth direction (which can be clockwise from a top-view perspective), the Z-axis adjustment knob 106 moves downward relative to the Z-axis moving seat 103, and the Z-axis moving seat 103 rises relative to the Y-axis moving seat 102. Conversely, when the Z-axis adjustment knob 106 is rotated along the sixth direction, the Z-axis adjustment knob 106 moves upward relative to the Z-axis moving seat 103, and the Z-axis moving seat 103 falls relative to the Y-axis moving seat 102. The fifth and sixth directions are opposite; from a top-view perspective, the sixth direction can be counterclockwise.

[0079] Reference Figure 8 and Figure 9 In one embodiment, the triaxial displacement platform 100 further includes a fifth connecting member 201, a sixth connecting member 202, and a third elastic member 109. The fifth connecting member 201 is fixedly connected to the Z-axis moving seat 103, the sixth connecting member 202 is fixedly connected to the Y-axis moving seat 102, and the two ends of the third elastic member 109 are respectively connected to the fifth connecting member 201 and the sixth connecting member 202. The gravity of the Z-axis moving seat 103 and the elastic force of the third elastic member 109 can ensure the contact between the Z-axis adjustment knob 106 and the Y-axis moving seat 102.

[0080] The movable connection between different bases can be achieved through the cooperation between the slider and the groove. (See reference...) Figure 4 The fixed base 101 has a first sliding groove 306, and the Y-axis movable base 102 has a first sliding block portion 307. Both the first sliding groove 306 and the first sliding block portion 307 extend along the Y-axis, and the first sliding block portion 307 is slidably disposed in the first sliding groove 306. (Refer to...) Figure 6 The mounting base 104 has a second slide groove 404, and the Y-axis movable base 102 has a second slider portion 405. Both the second slider portion 405 and the second slide groove 404 extend along the X-axis, and the second slider portion 405 is slidably disposed in the second slide groove 404. (Refer to...) Figure 8 The Z-axis movable seat 103 has a third slide groove 203, and the Y-axis movable seat 102 has a third slider portion 204. Both the third slider portion 204 and the third slide groove 203 extend in the vertical direction, and the third slider portion 204 is slidably disposed in the third slide groove 203.

[0081] To facilitate user differentiation of different knobs, in some embodiments, the top surface of the X-axis adjustment knob 107 is provided with a first character, the top surface of the Y-axis adjustment knob 105 is provided with a second character, and the top surface of the Z-axis adjustment knob 106 is provided with a third character. Any two of the first, second, and third characters are different. The characters on the top surface of the knobs help users distinguish them, thereby reducing the risk of users turning the wrong knob. The characters can be engraved or printed on the top surface of the knob. In a specific embodiment, the first character can be "X", the second character can be "Y", and the third character can be "Z".

[0082] The present invention also provides a probe module 500, which includes a probe 506 and a three-axis displacement platform 100 as described in any of the above embodiments, wherein the probe 506 is fixed relative to the mounting base 104. The user can adjust the position of the probe 506 by rotating three adjustment knobs of the three-axis displacement platform 100, thereby matching the position of the probe 506 with the position of the pad 602 of the die 601. Since the three adjustment knobs of the three-axis moving platform are all located on the top of the three-axis displacement platform 100, the position of the probe 506 in the probe module 500 of the present invention is easy to adjust, and multiple probe modules 500 can be arranged relatively compactly together on a horizontal plane (e.g., Figure 12 (As shown).

[0083] Reference Figure 10 The probe module 500 also includes a pressure sensor 502, a connecting plate 501, an insulating plate 503, a needle clamp 504, and a locking member 505. The connecting plate 501 is connected to the mounting base 104. One end of the pressure sensor 502 is connected to the connecting plate 501, and the other end is connected to the insulating plate 503. The needle clamp 504 is connected to the insulating plate 503, and the probe 506 is mounted on the needle clamp 504. The locking member 505 is detachably connected to the needle clamp 504. The locking member 505, together with the needle clamp 504, can clamp the probe 506. The pressure sensor 502 is used to detect the pressure exerted on the probe 506 by the die 601. Specifically, refer to... Figure 11 When the tip of probe 506 contacts the pad 602 of die 601, die 601 applies an upward force to probe 506. This force causes pressure sensor 502 to bend and deform; the greater the force, the greater the deformation of pressure sensor 502. Pressure sensor 502 contains a strain gauge; the greater the deformation of the strain gauge, the greater the output pressure value of pressure sensor 502.

[0084] When the pressure value measured by the pressure sensor 502 is too low, the tip of the probe 506 may be located in the gap between adjacent grains 601; when the measured pressure value is too high, the position of the probe 506 may be too low. The user can judge whether the position of the probe 506 is obviously appropriate based on the pressure value, and thus adjust the probe 506 to the appropriate position.

[0085] It should be noted that in some embodiments, when the mounting base 104 has a suitable mounting position for the pressure sensor 502, the probe module 500 may not need to include the connecting plate 501, and the pressure sensor 502 can be directly connected to the mounting base 104. Furthermore, if the surface of the needle clamp 504 that contacts the pressure sensor 502 is provided with an insulating coating, then the probe module 500 may not need to include the insulating plate 503, and the needle clamp 504 can be directly connected to the pressure sensor 502.

[0086] Reference Figure 15 The needle clamp 504 has a positioning groove 706, and the probe 506 includes a clamping section 801 and a detection section 802. The clamping section 801 is horizontally arranged, and a part of the clamping section 801 is disposed in the positioning groove 706. The locking member 505 and the needle clamp 504 can work together to clamp the part of the clamping section 801 located in the positioning groove 706. Figure 15 In this context, "the clamping segment 801 is horizontally positioned" specifically means that the clamping segment 801 extends along the X-axis. However, in other embodiments, the clamping segment 801 may also be positioned along other horizontal directions. The top end of the detection segment 802 is connected to the end of the clamping segment 801 furthest from the mounting base 104, in conjunction with... Figure 11 and Figure 15 The bottom end of the detection section 802 is the tip of the probe 506, and the bottom end of the detection section 802 is used to contact the pad 602. The cooperation between the positioning groove 706 and the clamping section 801 enables the positioning between the pin clamp 504 and the probe 506, thereby improving the ease of installation of the probe 506.

[0087] Reference Figure 15 The probe 506 also includes a connector section 803, the top of which is connected to the clamping section 801. The connector section 803 and the detection section 802 are respectively connected to the two ends of the clamping section 801. The needle clamp 504 also has a positioning hole with its axis vertically arranged. The connector section 803 is inserted into the connector hole 707. The fit between the connector hole 707 and the connector section 803 can also achieve positioning between the needle clamp 504 and the probe 506, thereby improving the ease of installation of the probe 506. In addition, the groove wall of the positioning groove 706 can limit the movement of the clamping section 801 along the Y-axis, and the hole wall of the connector hole 707 can limit the movement of the connector section 803 along the X-axis.

[0088] Reference Figure 16In one embodiment, the locking member 505 includes a connecting portion 705 and a blocking portion 704. The outer peripheral surface of the connecting portion 705 has threads (not shown), and the needle clamp 504 has a threaded hole 708. The connecting portion 705 is disposed in the threaded hole 708 to achieve a threaded connection between the connecting portion 705 and the needle clamp 504. The blocking portion 704 is connected to the top of the connecting portion 705, and the bottom surface of the blocking portion 704 is a blocking surface 703, which surrounds the top of the connecting portion 705. The side surface of the blocking portion 704 includes a cut surface 701 and an arc surface 702. The bottom edge of the cut surface 701 and the bottom edge of the arc surface 702 intersect with the outer edge of the blocking surface 703. Along the circumference of the blocking portion 704, the two ends of the cut surface 701 are respectively connected to the two ends of the arc surface 702. The cut surface 701 is a plane. If the central axis of the connecting part 705 is denoted as the third axis, then the normal of the cut surface 701 is perpendicular to the third axis. The arc surface 702 is set around the third axis.

[0089] The locking member 505 has a first state and a second state. The user can turn the locking member 505 to rotate relative to the needle clamp 504, thereby switching the locking member 505 between the first state and the second state. Figure 13 The locking element 505 is in the first state. Figure 14 The locking element 505 is in the second state. (Refer to...) Figure 13 When the locking member 505 is in the first state, the blocking surface 703 and the needle clamp 504 together clamp the probe 506 in the vertical direction. That is, when the locking member 505 is in the first state, the locking member 505 fixes the probe 506 on the needle clamp 504, and the locking member 505 prevents the probe 506 from moving upward and disengaging from the positioning groove 706. (Refer to...) Figure 14 When the locking member 505 is in the second state, the blocking surface 703 and the probe 506 are offset from each other, the blocking surface 703 no longer covers the upper side of the probe 506, the blocking surface 703 on the probe 506 is released, and the user can pull the probe 506 upward to remove the probe 506 from the needle clamp 504.

[0090] In this embodiment, the probe 506 is directly clamped by the locking member 505 and the needle clamp 504. Compared to the method of pressing a pressure plate on top of the probe 506 and then locking the pressure plate and the needle clamp 504 together by the locking member 505, this embodiment can eliminate the pressure plate, thereby reducing the total number of parts in the probe module 500, thus improving the ease of disassembly and assembly of the probe 506 and reducing the cost of the probe module 500. In addition, the locking member 505 in this embodiment is equivalent to a part obtained by cutting off a part of the nut of a screw. The manufacturing method of the locking member 505 is relatively simple and the cost of the locking member 505 is low, which helps to reduce the cost of the probe module 500.

[0091] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A three-axis displacement platform, characterized in that, include: Fixed base; The Y-axis movable seat is movably connected to the fixed seat; The Z-axis movable seat is movably connected to the Y-axis movable seat; The mounting base is movably connected to the Z-axis movable base; Y-axis adjustment knob, the Y-axis adjustment knob being rotatably connected to the Y-axis moving base; The first steering mechanism, when the Y-axis adjustment knob is rotated, causes the Y-axis moving seat to move relative to the fixed seat in the positive or negative direction of the Y-axis. The Z-axis adjustment knob is rotatably connected to the Z-axis moving seat and is also connected to the Y-axis moving seat. When the Z-axis adjustment knob is rotated, the Z-axis moving seat can move relative to the Y-axis moving seat in the positive or negative direction of the Z-axis. The X-axis adjustment knob is rotatably connected to the Z-axis moving base; The second steering mechanism, when the X-axis adjustment knob is rotated, causes the mounting base to move relative to the Z-axis moving base in the positive or negative direction of the X-axis. The X-axis adjustment knob, Y-axis adjustment knob, and Z-axis adjustment knob are all located at the top of the three-axis displacement platform, and all three adjustment knobs face upwards. The Z-axis is vertically oriented, and any two of the X-axis, Y-axis, and Z-axis are perpendicular to each other.

2. The triaxial displacement platform according to claim 1, characterized in that, The Y-axis adjustment knob is threadedly connected to the Y-axis moving seat, and the Y-axis adjustment knob is vertically positioned. The first steering mechanism includes: The first steering block is rotatably connected to the Y-axis moving seat. The first steering block rotates about a first axis relative to the Y-axis moving seat. The first axis is parallel to the X-axis. The first steering block abuts against the bottom end of the Y-axis adjusting knob. The first abutment pin is connected to the fixed seat and abuts against the first steering block; The first elastic element has its two ends connected to the Y-direction movable seat and the fixed seat, respectively. When the Y-axis adjustment knob moves downward, the Y-axis adjustment knob drives the first steering block to rotate in the first direction, thereby causing the first steering block to drive the first abutment pin and the fixed seat to move in the negative direction of the Y-axis. When the Y-axis adjustment knob moves upward, the elastic force of the first elastic element drives the Y-axis moving seat and the first abutment pin to move along the positive direction of the Y-axis, and the first abutment pin drives the first steering block to rotate along the second direction, which is opposite to the second direction.

3. The triaxial displacement platform according to claim 1 or 2, characterized in that, The second steering mechanism includes: The second steering block is rotatably connected to the Z-axis moving seat. The second steering block rotates about a second axis relative to the Z-axis moving seat. The second axis is parallel to the Y-axis. The second steering block abuts against the bottom end of the X-axis adjusting knob. The second abutment pin is connected to the mounting base and abuts against the second steering block; The second elastic element is connected at both ends to the Z-axis movable seat and the mounting seat, respectively. When the X-axis adjustment knob moves downward, the X-axis adjustment knob drives the second steering block to rotate in the third direction, thereby causing the second steering block to drive the second abutment pin and the mounting base to move in the negative direction of the X-axis. When the X-axis adjustment knob moves upward, the elastic force of the second elastic element drives the mounting base and the second abutment pin to move along the positive direction of the X-axis, and the second abutment pin drives the second steering block to rotate along the fourth direction, which is opposite to the fourth direction.

4. The triaxial displacement platform according to claim 1, characterized in that, The top surface of the X-axis adjustment knob is provided with a first character, the top surface of the Y-axis adjustment knob is provided with a second character, and the top surface of the Z-axis adjustment knob is provided with a third character. Any two of the first character, the second character, and the third character are different.

5. The triaxial displacement platform according to claim 1, characterized in that, The Z-axis adjustment knob is threadedly connected to the Z-axis moving seat. The Z-axis adjustment knob is vertically positioned, and the bottom end of the Z-axis adjustment knob abuts against the Y-axis moving seat. When the Z-axis adjustment knob is rotated in the fifth direction, the Z-axis adjustment knob moves downward relative to the Z-axis moving seat, thereby causing the Z-axis moving seat to rise relative to the Y-axis moving seat; when the Z-axis adjustment knob is rotated in the sixth direction, the Z-axis adjustment knob moves upward relative to the Z-axis moving seat, thereby causing the Z-axis moving seat to fall relative to the Y-axis moving seat, and the fifth direction and the sixth direction are opposite.

6. A probe module, characterized in that, include: A three-axis displacement platform as described in any one of claims 1 to 5; A probe is used to contact the pads of the die, and the probe is fixed relative to the mounting base.

7. The probe module according to claim 6, characterized in that, The probe module also includes: A pressure sensor, one end of which is connected to the mounting base; A needle clamp is connected to the other end of the pressure sensor; A locking element is detachably connected to the needle clamp plate. The locking element and the needle clamp plate together hold the probe. The pressure sensor is used to detect the pressure on the probe from the grain.

8. The probe module according to claim 7, characterized in that, The locking element includes: The connecting part has threads on its outer peripheral surface, and the connecting part is threadedly connected to the needle clamp plate. The central axis of the connecting part is a third axis. A blocking part is connected to the top of the connecting part. The bottom surface of the blocking part is a blocking surface. The blocking surface surrounds the top of the connecting part. The side surface of the blocking part includes a slit and an arc surface. The normal of the slit is perpendicular to the third axis. The arc surface is arranged around the third axis. The bottom edge of the slit and the bottom edge of the arc surface intersect with the outer edge of the blocking surface. Along the circumference of the blocking part, the two ends of the arc surface are respectively connected to the two ends of the slit. The locking member can rotate relative to the needle clamp to switch between a first state and a second state. When the locking member is in the first state, the blocking surface and the needle clamp together hold the probe in the vertical direction. When the locking member is in the second state, the blocking surface and the probe are offset from each other.

9. The probe module according to claim 7, characterized in that, The needle clamp has a positioning groove, and the probe includes: A clamping section is provided, wherein the clamping section is horizontally arranged, and a portion of the clamping section is disposed in the positioning groove, and the locking member and the needle clamping plate jointly clamp the portion of the clamping section located in the positioning groove; The detection segment has its top end connected to the end of the clamping segment away from the mounting base, and its bottom end used to contact the pad.

10. The probe module according to claim 9, characterized in that, The needle clamp also has a positioning hole, the axis of which is vertically arranged; the probe also includes a plug section, the plug section and the detection section are respectively connected to the two ends of the clamping section, and the plug section is inserted into the plug hole.

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