A 16x16 polymer optical waveguide directional coupling thermo-optic switch array

Abstract

The application relates to a 16*16 polymer optical waveguide directional coupling thermo-optic switch array, which belongs to the technical field of photonic integration. The array is composed of 113 directional coupling switch units and is arranged in 15 columns, wherein each column is controlled by a group of square external power supply connection leads (E1-E15); each odd column is composed of 8 directional coupling switch units, and each even column is composed of 7 directional coupling switch units; when the directional coupling switch array of a column has no external voltage, the switch is in a cross state transmission; when the directional coupling switch array of a column has external voltage, the switch is in a straight-through state transmission; when signal light is input from input ports In1-In 16 , by controlling the external voltage (0V) of E1-E15, or by controlling the external voltage (U) of any one to two of E1-E15, the output ports Out1-Out 16 can be switched, and the function of the 16*16 polymer optical waveguide directional coupling switch array is realized.

Description

Technical Field

[0001] This invention belongs to the field of photonic integration technology, specifically relating to a 16×16 polymer optical waveguide directional coupling thermo-optical switch array. Background Technology

[0002] High-speed optical communication has become the largest application area of ​​optoelectronics. Photonic chips have broad application prospects in big data network centers, supercomputer systems, and intelligent optical routing networks. With the continuous development of global fiber optic information networking, polymer waveguide directional coupling switch arrays based on integrated optical paths in photonic chips have been widely used in high-speed optical interconnect network systems due to their selectable operating channels, controllable phase delay, and adjustable signal routing. Currently, commercially available polymer waveguide directional coupling switch arrays are mainly planar optical waveloop structures, but problems such as high optical loss, limited array channel number, and large size restrict the scalability and flexibility of polymer waveguide switch arrays, and cannot meet the development requirements of large-scale photonic integrated chips. Therefore, low-loss polymer waveguide directional coupling switch arrays suitable for large-scale integration urgently need to be developed. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of existing multi-channel switch array control circuits being complex and large in size. It proposes a 16×16 polymer optical waveguide directional coupling thermo-optical switch array, which realizes the function of optical switch array by thermo-optical modulation of the effective refractive index of the optical waveguide and using optical waveguide coupling technology, thus solving the technical difficulties of routing switching in high-speed, high-density on-chip optical interconnects.

[0004] Taking a 16×16 polymer optical waveguide directional coupling thermo-optical switch array as an example, this invention adopts the following technical solution to solve the above-mentioned difficulties:

[0005] like Figure 1 As shown in (a), the directional coupling switch unit of the 16×16 polymer optical waveguide directional coupling thermo-optic switch array of the present invention consists of a substrate layer 1, a core layer 2, an upper cladding layer 3, and an electrode 4 from bottom to top. In a cross-section perpendicular to the light transmission direction, the core layer 2 has a rectangular structure. The core layer 2 and the upper cladding layer 3 are both located on the substrate layer 1, with the core layer 2 encased within the upper cladding layer 3. The electrode 4 is located on the upper cladding layer 3. The core layer 2 has a symmetrical structure, consisting of two input curved waveguides, two parallel straight waveguides, and two output curved waveguides. The two input curved waveguides have a large spacing in segments AB (input end) and CD (output end), while the two parallel straight waveguides have a small spacing in segment BC, forming a coupling structure. Coupling occurs when the signal light propagates through the two parallel straight waveguides. A narrow rectangular metal thermoelectrode parallel to the straight waveguide is disposed above the upper cladding layer outside one of the straight waveguides, as shown in the figure. Figure 1As shown in (b), the two sides of the narrow rectangular metal thermoelectrode are connected to the square external power supply connection lead through the wide rectangular metal connecting line; the narrow rectangular metal thermoelectrode, the wide rectangular metal connecting line and the square external power supply connection lead together constitute electrode 4.

[0006] like Figure 2 As shown in (a), 2(b), and 2(c), the 16×16 polymer optical waveguide directional coupling switch array of the present invention consists of 113 directional coupling switch units (D1-D113) as described above, arranged in 15 columns. Each column is controlled by a set of square external power supply connection lead pairs (E1-E15). Each odd-numbered column consists of 8 directional coupling switch units (D1-D8, D16-D23, D31-D38, D46-D53, D61-D68, D...). The column consists of 76-D83, D91-D98, D106-D113, with each odd-numbered column having 16 inputs and 16 outputs; each even-numbered column consists of 7 directional coupling switch units (D9-D15, D24-D30, D39-D45, D54-D60, D69-D75, D84-D90, D99-D105), with each even-numbered column having 14 inputs and 14 outputs; the first column has 8 directional coupling switch units (D1- The 16 input terminals of D8 directly input external optical signals, and the 16 output terminals of the 8 directional coupling switch units (D106-D113) in the tail row directly output optical signals to the outside. The two outermost output terminals of the 8 directional coupling switch units in the odd-numbered columns are respectively connected to the two outermost input terminals of the next 8 directional coupling switch units in the odd-numbered columns. The output terminal of each directional coupling switch unit in the remaining columns is sequentially connected to the input terminal of the directional coupling switch unit in the next column. Each pair of square external power supply connection leads (E1-E15) consists of 2 square external power supply connection leads, several wide rectangular metal connection lines and narrow rectangular metal thermoelectrodes, forming a sequential connection structure of "square external power supply connection lead - wide rectangular metal connection line - narrow rectangular metal thermoelectrode - wide rectangular metal connection line - narrow rectangular metal thermoelectrode ... - wide rectangular metal connection line - square external power supply connection lead". Each narrow rectangular metal thermoelectrode is located outside the straight waveguide of the coupling structure and is set parallel to the straight waveguide.

[0007] The 16×16 polymer optical waveguide directional coupling switch array described in this invention has In1 to In2 16 16 input ports and Out1~Out 16The system has 16 output ports; the metal thermocouples and metal connecting wires of the directional coupling switch units (D1-D8) are connected to the external power supply connection lead pair E1; the metal thermocouples and metal connecting wires of the directional coupling switch units (D9-D15) are connected to the external power supply connection lead pair E2; the metal thermocouples and metal connecting wires of the directional coupling switch units (D16-D23) are connected to the external power supply connection lead pair E3; the metal thermocouples and metal connecting wires of the directional coupling switch units (D24-D30) are connected to... External power supply connection lead E4 is connected; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D31-D38) are connected to the external power supply connection lead E5; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D39-D45) are connected to the external power supply connection lead E6; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D46-D53) are connected to the external power supply connection lead E7; the metal thermoelectrodes of the directional coupling switch units (D54-D60)... The metal connecting wires and external power supply connection leads of the directional coupling switch units (D61-D68) are connected to the external power supply connection leads of E9; the metal connecting wires and external power supply connection leads of the directional coupling switch units (D69-D75) are connected to the external power supply connection leads of E10; the metal connecting wires and external power supply connection leads of the directional coupling switch units (D76-D83) are connected to the external power supply connection leads of E11; the metal connecting wires and external power supply connection leads of the directional coupling switch units (D84-D... The metal thermoelectrode and metal connecting wire of the directional coupling switch unit (D91-D98) are connected to the external power supply connection lead pair E12; the metal thermoelectrode and metal connecting wire of the directional coupling switch unit (D99-D105) are connected to the external power supply connection lead pair E14; and the metal thermoelectrode and metal connecting wire of the directional coupling switch unit (D106-D113) are connected to the external power supply connection lead pair E15.

[0008] The substrate layer 1 is made of one of the following materials: EpoClad, FSU-8, SU-8, P (MMA-co-GMA), polymethyl methacrylate (PMMA), polyethylene (PE), polyester (PET), and polystyrene (PS).

[0009] The core layer 2 material is one of FSU-8, SU-8 2002, SU-8 2005, polycarbonate (PC), and polyimide (PI).

[0010] The material of the upper cladding layer 3 is one of EpoClad, FSU-8, SU-8, P (MMA-co-GMA), polymethyl methacrylate (PMMA), polyethylene (PE), polyester (PET), and polystyrene (PS).

[0011] The electrode 4 is made of an alloy composed of one or more of the following materials: silver, gold, aluminum, and platinum.

[0012] The working principle of the directional coupling thermo-optical switch unit is as follows: Figure 3 As shown, when the external power supply connection leads (E1~E15) of a certain column of the directional coupling switch array are not subject to external voltage (0V), the coupling coefficient between the two parallel straight waveguides of the coupling structure is high, exhibiting directional coupling. The signal light transmitted along the input waveguide (segment AB) is... Figure 1 The BC segment shown exhibits cross-mode transmission due to highly efficient directional coupling, as... Figure 3 As shown in (a); when an external voltage (U) is applied to the external power supply connection leads (E1~E15) of a certain column of directional coupling switch array, heat is generated due to the thermal resistance of the metal thermoelectric electrodes. This causes a change in the refractive index of the waveguide on the side of the coupling structure affected by the metal thermoelectric electrodes, reducing the coupling coefficient. The signal light transmitted along the input waveguide... Figure 1 The BC segment shown is transmitted in a straight-through state due to inefficient coupling, as... Figure 3 As shown in (b).

[0013] The 16×16 polymer optical waveguide directional coupling switch array is controlled by 15 sets of external power supply connection lead pairs (E1-E15) to switch the transmission path of 113 directional coupling thermo-optical switch units D1-D113. When there is no external voltage applied to E1-E15, the signal light will be transmitted in a cross-state in the directional coupling thermo-optical switches D1-D113. Taking the In2 input port as an example, the signal light will travel along the Out output port. 14 Output, such as Figure 4As shown in (a). When an external voltage (U) is applied to E1, the signal light will be transmitted in a straight-through state from D1 to D8; when an external voltage (U) is applied to E2, the signal light will be transmitted in a straight-through state from D9 to D15; when an external voltage (U) is applied to E3, the signal light will be transmitted in a straight-through state from D16 to D23; when an external voltage (U) is applied to E4, the signal light will be transmitted in a straight-through state from D24 to D30; when an external voltage (U) is applied to E5, the signal light will be transmitted in a straight-through state from D31 to D38; when an external voltage (U) is applied to E6, the signal light will be transmitted in a straight-through state from D39 to D45; when an external voltage (U) is applied to E7, the signal light will be transmitted in a straight-through state from D46 to D53; when an external voltage (U) is applied to E8, the signal light will be transmitted in a straight-through state from D54 to D55. -D60 will be transmitted in a direct-through state; when E9 has an external voltage (U), the signal light will be transmitted in a direct-through state from D61 to D68; when E10 has an external voltage (U), the signal light will be transmitted in a direct-through state from D69 to D75; when E11 has an external voltage (U), the signal light will be transmitted in a direct-through state from D76 to D83; when E12 has an external voltage (U), the signal light will be transmitted in a direct-through state from D84 to D90; when E13 has an external voltage (U), the signal light will be transmitted in a direct-through state from D91 to D98; when E14 has an external voltage (U), the signal light will be transmitted in a direct-through state from D99 to D105; when E15 has an external voltage (U), the signal light will be transmitted in a direct-through state from D106 to D113. Taking input port In2 as an example, if E1 is subjected to an external voltage (U) while E2-E15 are not subjected to an external voltage, the signal light will travel along port Out. 16 Output, such as Figure 4 As shown in (b). When the signal light travels from the input port In1-In 16 With any input port, the output ports Out1-Out can be completed by controlling E1-E15 to have no external voltage (0V) or any one or two to have an external voltage (U). 16 The arbitrary switching enables the 16×16 polymer optical waveguide directional coupling switch array function.

[0014] Compared with existing device structures and fabrication techniques, the advantages of this invention are:

[0015] I. Compared with traditional polymer optical waveguide directional coupling switch arrays, the present invention adopts a scheme of multiple cascaded metal hot electrodes, which can greatly simplify the circuit control scheme.

[0016] Second, compared with traditional polymer optical waveguide directional coupling switch arrays, the present invention uses a metal thermoelectrode heating method to control the coupling state, which can reduce the size of the unit structure and improve the integration. Attached Figure Description

[0017] Figure 1Figure (a) is a front view of the directional coupling thermo-optical switch unit according to the present invention; Figure (b) is a top view of the directional coupling thermo-optical switch unit.

[0018] Figure 2 Figure 1 is a schematic diagram of the 16×16 polymer optical waveguide directional coupling switch array structure of the present invention; Figure 2 is a front view of the 16×16 polymer optical waveguide directional coupling switch array structure; Figure 3 is a cross-sectional view of position a in Figure 4; Figure 4 is a top view of the 16×16 polymer optical waveguide directional coupling switch array.

[0019] Figure 3 Figure (a) shows the signal light transmission of the directional coupling thermo-optical switch unit under no external voltage, and Figure (b) shows the signal light transmission of the directional coupling thermo-optical switch unit under external voltage.

[0020] Figure 4 Figure 1 shows the working principle diagram of the 16×16 polymer optical waveguide directional coupling switch array described in this invention; Figure (a) shows the signal light transmission of the 16×16 polymer optical waveguide directional coupling switch array without external voltage; Figure (b) shows the signal light transmission of the 16×16 polymer optical waveguide directional coupling switch array with external voltage applied only to E1 by the metal passivated electrode.

[0021] Figure 5 This is a diagram of the core structure of a 16×16 polymer optical waveguide directional coupling switch array in an embodiment of the present invention.

[0022] Figure 6 This is a structural diagram of the core layer of the directional coupling thermo-optical switch unit in an application embodiment of the present invention.

[0023] Figure 7 This is a diagram of the electrode structure of a 16×16 polymer optical waveguide directional coupling switch array in an application embodiment of the present invention.

[0024] Figure 8 This is a top view of the directional coupling thermo-optical switch unit in the application embodiment of the present invention.

[0025] Figure 9 This is a curve showing the relationship between the coupling length and transmission efficiency of the directional coupling thermo-optical switch unit in the application embodiment described in this invention.

[0026] Figure 10 This is a curve showing the relationship between the temperature of the metal thermoelectrode and the transmission efficiency of the directionally coupled thermo-optical switch unit at a coupling length of 2550 μm in the application embodiment of the present invention.

[0027] Figure 11 The figures show the transmission curves of the directionally coupled thermo-optical switch unit in the 1500nm-1600nm band in the application embodiment of the present invention; Figure (a) shows the transmission curve at room temperature of 295K; and Figure (b) shows the transmission curve after heating to 309K.

[0028] Figure 12 The figure shows the simulation results of the transmission of each metal passivated electrode without external voltage in the application embodiment of the present invention.

[0029] Figure 13 This is a simulation result diagram of the transmission situation when only the metal passivated electrode E1 is subjected to an external voltage of 4.8V in the application embodiment described in this invention.

[0030] Figure 14 This is a schematic diagram of the manufacturing process of an application embodiment of the present invention. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Example 1

[0033] In this embodiment, the substrate layer 1 is made of polymethyl methacrylate (PMMA) with a thickness of 2000 μm.

[0034] In this embodiment, the core layer 2 material is fluorinated bisphenol A phenolic resin (FSU-8), all adopting a strip structure, with a core layer width of 5μm and a thickness of 5μm; as Figure 5 As shown, in this embodiment, the spacing between adjacent input ports and adjacent output ports of the 16×16 polymer optical waveguide directional coupling switch array is 127 μm, and the lateral length of each directional coupling thermo-optical switch unit is 3550 μm; Figure 6 As shown, in a single directionally coupled thermo-optical switch unit (taking D113 as an example), the projected length of the curved waveguides in segments AB and CD along the transverse direction (the axis of symmetry of the directionally coupled thermo-optical switch unit) is 500 μm, and the longitudinal projected length of the center lines of the curved waveguides on both sides along the center lines of the straight waveguides is 60 μm; the transverse length of the straight waveguide coupling part at the BC end is 2550 μm, and the inner spacing of the straight waveguide coupling part at the BC end is 2 μm.

[0035] In this embodiment, the upper cladding layer 3 is made of polymethyl methacrylate (PMMA) with a thickness of 8 μm.

[0036] In this embodiment, electrode 4 is made of aluminum with a thickness of 100 nm; Figure 7 As shown, in this embodiment, electrodes 4 are arranged on the surface of the upper cladding 3, with square external power supply connection leads on the top and bottom sides for contacting and connecting with external voltage source probes. The horizontal and vertical widths are both 1000 μm. The metal thermoelectrode has a horizontal width of 2550 μm and a vertical width of 10 μm. The metal connection line has a horizontal width of 100 μm (the vertical width is determined by the position of the metal thermoelectrode and the square external power supply connection lead pair). The metal thermoelectrode positions are the same in each directional coupling thermo-optical switch unit. Taking the directional coupling thermo-optical switch unit D113 as an example... Figure 8 As shown, each metal hot electrode is located on the upper cladding 3 above the outer side of each straight waveguide, and the distance between the metal hot electrode and the projection of the outer side of the straight waveguide onto the substrate surface is 0.5 μm.

[0037] In this embodiment, a center wavelength of 1550 nm is selected, and the working band is 1500–1600 nm. Within this band, the effective refractive index of polymethyl methacrylate (PMMA) is 1.48, and the effective refractive index of fluorinated bisphenol A phenolic resin (FSU-8) is 1.52.

[0038] This embodiment uses Rsoft software to simulate the transmission efficiency of a directionally coupled thermo-optical switch unit at different coupling lengths, and the change in transmission efficiency caused by temperature variations controlled by electrodes. Figure 9 It can be seen that, at a coupling length of 2550 μm, the directional coupling cross-transmission efficiency is the highest, reaching 99.7%, without the influence of external voltage. From... Figure 10 It can be seen that, with a coupling length of 2550 μm, under the influence of an external voltage, when the temperature increases from room temperature (295 K, external voltage 0 V) ​​to 309 K (external voltage 4.8 V), the transmission efficiency of directional coupling switching from cross-transmission to direct transmission is the highest, reaching 98.7%. The directionally coupled thermo-optical switching unit under both temperature conditions was scanned in the 1500–1600 nm wavelength band, as shown... Figure 11 As shown in (a), it can be seen that the transmission efficiency at room temperature (295K) in the 1500–1600 nm range is above 90%, such as Figure 11 As shown in (b), it can be seen that when the temperature is raised to 309K, the transmission efficiency in the 1500-1600nm range reaches more than 95%. Therefore, the directional coupling thermo-optical switching unit in the 1500-1600nm band realizes the switching function.

[0039] This embodiment uses Rsoft software to simulate the optical field propagation of a 16×16 polymer optical waveguide directional coupling switch array under different combinations of control of 15 sets of external power supply connection leads E1-E15. Taking the signal light input from input port In2 as an example, the signal light transmission when there is no external voltage on external power supply connection leads E1-E15 is as follows: Figure 12 As shown, the directional coupling thermo-optical switch units D1-D113 all operate at a temperature of 295K and transmit in a crossover state. The signal light will be output from the Out port. 14 The output, as shown by the white optical path on the left side of the figure, achieves a transmission efficiency of 75%, as shown by the curved output terminal on the right side of the figure. When only the external power supply connection lead E1 has a 4.8V external voltage, and the other 14 sets of external power supply connection leads E2-E15 have no external voltage, the signal optical transmission is as follows: Figure 13 As shown, the directional coupling thermo-optical switch unit D1 will operate at a temperature of 309K, transmitting in a direct-through state. The remaining directional coupling thermo-optical switch units D2-D113 will all operate at a temperature of 295K, transmitting in a crossover state. The signal light will be transmitted from Out... 16 The output port outputs, as shown by the white optical path on the left side of the figure, with a transmission efficiency of 75%, as shown by the curved output end on the right side of the figure. This meets the requirements of the technical solution and realizes the function of a 16×16 polymer optical waveguide directional coupling switch array.

[0040] The manufacturing process of this embodiment is as follows: Figure 14 As shown, in order to better express the process steps, with Figure 2 (a) is illustrated using the cross-section of a single directional coupling switch unit at point a as an example:

[0041] (1) Spin-coat a 5 μm thick FSU-8 core film 2a onto a polymethyl methacrylate (PMMA) substrate (10 s at a forward rotation rate of 600 r / min and 20 s at a backward rotation rate of 3000 r / min). After spin coating, place the film on a heating plate at 65°C for 10 min and at 95°C for 20 min.

[0042] (2) Place a photomask 5 with the photolithographic pattern of the core layer on the core layer, expose the core layer film for 55-65 seconds (60 seconds in this embodiment) using a photolithography machine, and obtain the designed device pattern on the film surface by photolithography.

[0043] (3) Remove the uncrosslinked core film with developer PGMEA (development time not exceeding 15s, which can be adjusted according to the development situation) to obtain core layer 2 with a width of 5μm. Then, cure the developed device on a heating plate at a temperature of 120℃ for 30min to achieve a hard film effect.

[0044] (4) Apply spin coating process to prepare 8 μm thick polymethyl methacrylate (PMMA) top coating 3 (10 s at a forward rotation rate of 600 r / min and 20 s at a backward rotation rate of 3000 r / min). After spin coating, place on a heating plate at 120℃ for 30 min.

[0045] (5) Aluminum film is deposited on the upper cladding layer 3 using a vacuum coating machine, and BP-212 mask is placed on the aluminum layer and spin-coated at a speed of 2500 r / min for 30 s. The metal layer film is exposed for 2 to 2.5 s using a photolithography machine (2 s in this embodiment) so that the bottom electrode pattern is displayed on the aluminum metal layer. BP-212 on the electrode surface is removed using a developing solution (sodium hydroxide solution with a mass ratio of NaOH:H2O = 1:200) to obtain electrode 4.

Claims

1. A 16×16 polymer optical waveguide directional coupling thermo-optical switch array, characterized in that: It consists of 113 directional coupling switching units (D1-D113). The directional coupling switching unit is composed of a substrate (1), a core layer (2), an upper cladding layer (3), and an electrode (4) from bottom to top. On the cross section perpendicular to the light transmission direction, the core layer (2) has a rectangular structure. The core layer (2) and the upper cladding layer (3) are located on the substrate layer (1), and the core layer (2) is covered by the upper cladding layer (3). The electrode (4) is located on the upper cladding layer (3). The core layer (2) has a symmetrical structure, consisting of two input curved waveguides, two parallel straight waveguides, and two output curved waveguides. The curved waveguides have a larger spacing at the input and output ends, while the two parallel straight waveguides have a smaller spacing, forming a coupling structure. Coupling occurs when the signal light propagates through the two parallel straight waveguides. 113 directional coupling switch units (D1-D113) are arranged in 15 columns, each column controlled by a set of square external power supply connection leads (E1-E15). Each odd-numbered column consists of 8 directional coupling switch units (D1-D8, D16-D23, D31-D38, D46-D53, D61-D68, D76-D83, D91-D98, D106-D113). The system is structured as follows: each odd-numbered column has 16 inputs and 16 outputs; each even-numbered column consists of 7 directional coupling switch units (D9-D15, D24-D30, D39-D45, D54-D60, D69-D75, D84-D90, D99-D105), each with 14 inputs and 14 outputs; the outermost two outputs of the 8 directional coupling switch units in the odd-numbered columns are connected to the outermost two inputs of the next 8 directional coupling switch units in the odd-numbered columns, and the outputs of each directional coupling switch unit in the remaining columns are connected to... The input terminals of the next column of directional coupling switch units are connected sequentially; each group of square external power connection lead pairs (E1-E15) consists of 2 square external power connection leads, several wide rectangular metal connection lines and narrow rectangular metal thermoelectrodes, forming a sequential connection structure of "square external power connection lead - wide rectangular metal connection line - narrow rectangular metal thermoelectrode - wide rectangular metal connection line - narrow rectangular metal thermoelectrode ... - wide rectangular metal connection line - square external power connection lead". Each narrow rectangular metal thermoelectrode is located outside the straight waveguide of each coupling structure and is set parallel to the straight waveguide; The metal thermoelectrodes and metal connecting wires of the directional coupling switch unit (D1-D8) are connected to the external power supply connection lead E1; The metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D9-D15) are connected to the external power supply connection lead pair E2; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D16-D23) are connected to the external power supply connection lead pair E3; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D24-D30) are connected to the external power supply connection lead pair E4. The metal thermoelectrodes and metal connecting wires of the directional coupling switch unit (D31-D38) are connected to the external power supply connection lead E5. The metal thermoelectrodes and metal connecting wires of the directional coupling switch unit (D39-D45) are connected to the external power supply connection lead E6. The metal thermoelectrodes and metal connecting wires of the directional coupling switch unit (D46-D53) are connected to the external power supply connection lead E7; The metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D54-D60) are connected to the external power supply connection lead pair E8; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D61-D68) are connected to the external power supply connection lead pair E9; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D69-D75) are connected to the external power supply connection lead pair E10; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D76-D83) are connected to the external power supply connection lead pair E11; directional The metal thermoelectrodes and metal connecting wires of the coupling switch units (D84-D90) are connected to the external power supply connection lead pair E12; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D91-D98) are connected to the external power supply connection lead pair E13; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D99-D105) are connected to the external power supply connection lead pair E14; the metal thermoelectrodes and metal connecting wires of the directional coupling switch units (D106-D113) are connected to the external power supply connection lead pair E15. When there is no external voltage applied to the external power supply connection pairs (E1~E15) of a certain column of the directional coupling switch array, the coupling coefficient between the two parallel straight waveguides of the coupling structure is high, exhibiting directional coupling. The signal light propagating along the input waveguide is transmitted in a cross-state due to the highly efficient directional coupling in the straight waveguide section. When an external voltage is applied to the external power supply connection pairs (E1~E15) of a certain column of the directional coupling switch array, the signal light propagating along the input waveguide is transmitted in a straight-through state due to the inefficient coupling in the straight waveguide section. When the signal light travels from the input port In1-In... 16 With any input port, the output ports Out1-Out can be completed by controlling E1-E15 to have no external voltage or any one or two of them to have an external voltage. 16 The arbitrary switching enables the 16×16 polymer optical waveguide directional coupling switch array function.

2. The 16×16 polymer optical waveguide directional coupling thermo-optical switch array as described in claim 1, characterized in that: The substrate (1) is made of one of EpoClad, FSU-8, SU-8, P (MMA-co-GMA), polymethyl methacrylate, polyethylene, and polystyrene; the core layer (2) is made of one of FSU-8, SU-8 2002, SU-8 2005, polycarbonate, and polyimide; the upper cladding (3) is made of one of EpoClad, FSU-8, SU-8, P (MMA-co-GMA), polymethyl methacrylate, polyethylene, and polystyrene; and the electrode (4) is made of an alloy composed of one or more of silver, gold, aluminum, and platinum.

3. The 16×16 polymer optical waveguide directional coupling thermo-optical switch array as described in claim 1, characterized in that: The substrate (1) has a thickness of 2000 μm, the core layer (2) has a width and thickness of 5 μm, the cladding layer (3) has a thickness of 8 μm, and the electrode (4) has a thickness of 100 nm. The spacing between adjacent input ports and adjacent output ports of the 16×16 polymer optical waveguide directional coupling switch array is 127 μm, and the lateral length of each directional coupling thermo-optic switch unit is 3550 μm. The lateral projection length of the curved waveguide along the symmetry axis of the directional coupling thermo-optic switch unit is 500 μm, and the longitudinal projection length of the center lines of the curved waveguides on both sides along the center lines of the straight waveguides is 60 μm. The lateral length of the coupling parts of the two parallel straight waveguides is 2550 μm, and the inner spacing of the coupling parts is 2 μm. The lateral and longitudinal widths of the square external power supply connection leads are both 1000 μm. The lateral width of the metal thermoelectrode is 2550 μm, and the longitudinal width is 10 μm. The lateral width of the metal connection wire is 100 μm. μm; Each metal hot electrode is located on the upper cladding (3) above the outer side of each straight waveguide, and the projection distance between it and the outer side of the straight waveguide on the surface of the substrate (1) is 0.5 μm.

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