A kind of can accelerate crucible suspension cooling lifting appliance

Abstract

The application discloses a kind of can accelerate crucible suspension cooling lifting appliance, it is related to silicon carbide crystal preparation technical field, including the gravity clamping lifting appliance for lifting and suspending the crucible in growth furnace, it further includes the heat power heat dissipation mechanism for the crucible using the heat carried by the crucible as power source to carry out heat dissipation.The application has reasonable structure, the application adds heat power heat dissipation mechanism on original lifting appliance, the cooling lifting appliance uses the heat of crucible itself to generate electricity and provides electric energy for motor, and uses the wind power generated to carry out heat dissipation to crucible, can accelerate the suspension cooling speed of crucible, and the heat dissipation effect of the heat power heat dissipation mechanism is mild, and will not produce influence to crucible and crystal.

Description

Technical Field

[0001] This invention relates to a rationally structured invention. The invention adds a thermodynamic cooling mechanism to the original lifting device. This cooling lifting device uses the heat of the crucible itself to generate electricity and provide power to the motor. It also uses the generated wind to dissipate heat from the crucible, which can accelerate the cooling speed of the crucible in mid-air. Moreover, the heat dissipation effect of this thermodynamic cooling mechanism is gentle and will not affect the crucible or the crystal. In particular, it relates to a lifting device that can accelerate the cooling of a crucible in mid-air. Background Technology

[0002] After the silicon carbide crystal is prepared, the cooling process of the crucible needs to be handled carefully to avoid thermal stress and cracking. Cooling is generally divided into natural cooling and rapid cooling. Natural cooling is to let the crucible and crystal cool naturally at room temperature (this method is relatively safe, but it takes a long time, especially for large crystals, which may take several hours or longer). Rapid cooling is to use some cooling medium (such as water or liquid nitrogen) to quickly cool the crucible and crystal (this method is less safe and can easily lead to thermal stress, thereby increasing the risk of the crucible and crystal cracking).

[0003] Existing methods for cooling crucibles using natural cooling typically employ a suspender to suspend the crucible within the growth furnace for cooling. Suspending the crucible allows for better heat transfer to the surrounding environment and facilitates uniform cooling of the crucible and crystal, reducing thermal stress and internal stress within the crystal. However, the natural cooling time is excessively long. Therefore, this application provides a suspender for crucible cooling that can accelerate the process to meet the requirements. Summary of the Invention

[0004] The purpose of this application is to provide a suspension device for crucible cooling that can accelerate the cooling process, thereby solving the problem of excessively long natural cooling time of crucibles in the prior art.

[0005] To achieve the above objectives, this application provides the following technical solution: a crucible suspension cooling device that can accelerate crucible cooling, including a gravity clamping device for suspending and cooling a crucible in a growth furnace, and a thermodynamic cooling mechanism that uses the heat carried by the crucible as a power source to dissipate heat from the crucible.

[0006] Preferably, the gravity clamping lifting device includes a chassis, a limiting column is installed at the center of the chassis, and the upper end of the column is slidably disposed in the inner cavity of the pull rod. A plurality of mounting parts are installed circumferentially on the chassis, and a clamping rod is rotatably mounted on each mounting part. A clamping plate with a contact surface adapted to the outer surface of the crucible is movably mounted at the lower end of each clamping rod. The upper ends of the plurality of clamping rods are movably connected to the pull rod through connecting rods, and a lifting ring is installed at the upper end of the pull rod.

[0007] The thermodynamic heat dissipation mechanism includes a thermoelectric generator fixedly installed at the heat dissipation end and the lower end of the chassis, and a plurality of arc-shaped mounting plates arranged around the outer wall of the chassis. Each of the arc-shaped mounting plates has a plurality of mounting holes, and each mounting hole has an impeller in its inner cavity. Each impeller is mounted on the output shaft of a motor that is electrically connected to the thermoelectric generator.

[0008] The chassis has an inner cavity with a liquid storage chamber filled with a low-boiling-point liquid. The upper end of the chassis has several heat dissipation copper pipes located near the impeller, and the heat dissipation copper pipes have a spiral upward extension structure.

[0009] Preferably, it further includes a rotating heat dissipation mechanism, which includes a plurality of heat collection shrouds corresponding to the plurality of arc-shaped mounting plates. The heat collection shrouds have a structure that is wider at the bottom and narrower at the top. Each of the heat dissipation copper pipes is located in the inner cavity of the corresponding heat collection shroud. The upper end of the heat collection shroud is connected to the exhaust pipe. The exhaust ports of the plurality of exhaust pipes are arranged along the tangent direction of the circle formed by the plurality of exhaust pipes. The pull rod is rotatably connected to the lifting ring through a connector.

[0010] Preferably, it also includes a Tesla valve for accelerating the gas, the Tesla valve being installed between the exhaust pipe inlet and the upper end of the manifold.

[0011] Preferably, the connector includes an upper magnetic shield and a lower magnetic shield that are fixed together by bolts. The lifting ring is fixed to the upper end of the upper magnetic shield. A first magnetic ring is installed in the inner cavity of the lower magnetic shield. The upper end of the pull rod passes through the lower magnetic shield and the first magnetic ring and has a through hole at the axis, and is fixedly connected to a second magnetic ring. The magnetic poles of the second magnetic ring and the first magnetic ring are the same at opposite ends. The outer surface of the second magnetic ring is provided with a plurality of rolling balls that roll in contact with the inner wall of the upper magnetic shield. The rolling balls are made of non-metallic material.

[0012] Preferably, it also includes a fastening element to promote tight contact between the heat-absorbing end of the thermoelectric generator and the upper end of the crucible lid.

[0013] Preferably, the fastening element includes a mounting block fixed to the upper end of the chassis and having a mounting groove, and a plurality of the mounting elements are slidably disposed in the inner cavity of the mounting block by sliders provided on their side ends, and the mounting elements and the mounting block are connected by a connecting spring.

[0014] In summary, the technical effects and advantages of this invention are as follows:

[0015] The present invention has a reasonable structure. The present invention adds a thermodynamic heat dissipation mechanism to the original lifting device. The cooling lifting device uses the heat of the crucible itself to generate electricity and provide power to the motor. It also uses the generated wind to dissipate heat from the crucible, which can accelerate the cooling speed of the crucible in the air. Moreover, the heat dissipation effect of the thermodynamic heat dissipation mechanism is gentle and will not affect the crucible or the crystal.

[0016] The present invention also includes a rotating heat dissipation mechanism, which uses airflow to drive the crucible to rotate. Combined with the thermodynamic heat dissipation mechanism, it can effectively improve the heat dissipation effect of the crucible and make the heat dissipation of the crucible more uniform.

[0017] In this invention, a connector is provided to suspend the pull rod, and a ball bearing made of non-metallic material is used to contact the inner wall of the upper magnetic shield to maintain the rotational stability of the pull rod. This can greatly reduce the resistance encountered by the pull rod when rotating, which is conducive to further accelerating the rotation speed of the crucible and improving the heat dissipation effect.

[0018] The invention also includes a bonding element that allows the thermoelectric generator to be in close contact with the upper end of the crucible lid, thereby minimizing thermal conductivity resistance and improving thermal energy conduction efficiency. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a schematic diagram of a partially disassembled structure of the present invention;

[0022] Figure 3 For the present invention Figure 2 Schematic diagram of the heat dissipation mechanism of the medium-temperature dynamic system;

[0023] Figure 4 For the present invention Figure 2 Schematic diagram of the middle connector structure;

[0024] Figure 5 For the present invention Figure 4 Diagram showing the disassembled middle connector;

[0025] Figure 6 For the present invention Figure 2 Schematic diagram of the mounting components and fastening components;

[0026] Figure 7 For the present invention Figure 6Diagram showing the disassembly of the centrally attached component.

[0027] In the diagram: 1. Crucible; 2. Gravity clamping lifting device; 21. Base; 22. Column; 23. Tie rod; 24. Lifting ring; 25. Mounting component; 26. Clamping rod; 27. Connecting rod; 28. Clamping plate; 3. Thermodynamic heat dissipation mechanism; 31. Thermoelectric generator; 32. Mounting plate; 33. Mounting hole; 34. Impeller; 35. Copper heat dissipation pipe; 4. Rotary heat dissipation mechanism; 41. Flow collector; 42. Tesla valve; 43. Exhaust pipe; 5. Connecting component; 51. Upper magnetic shield; 52. Lower magnetic shield; 53. First magnetic ring; 54. Second magnetic ring; 55. Ball bearing; 6. Fitting component; 61. Mounting block; 62. Slider; 63. Connecting spring. Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example: Reference Figure 1-2 The invention described is a crucible suspension cooling device that can accelerate crucible cooling. It includes a gravity clamping device 2 for suspending crucible 1 in the growth furnace for cooling, and a thermodynamic cooling mechanism 3 that uses the heat carried by crucible 1 as a power source to dissipate heat from crucible 1.

[0030] As a preferred embodiment of this example, Figure 2 and Figure 3As shown, the gravity clamping lifting device 2 includes a chassis 21, with a limiting column 22 installed at the center of the chassis 21. The upper end of the column 22 is slidably disposed in the inner cavity of the pull rod 23. Several mounting parts 25 are circumferentially mounted on the chassis 21, and each mounting part 25 is rotatably mounted with a clamping rod 26. The lower end of each clamping rod 26 is movably mounted with a clamping plate 28 whose contact surface is adapted to the outer surface of the crucible 1. The upper ends of the multiple clamping rods 26 are movably connected to the pull rod 23 through connecting rods 27. A lifting ring 24 is installed on the upper end of the pull rod 23. The thermal cooling mechanism 3 includes a cooling end and a chassis. The chassis 21 has a fixed thermoelectric generator 31 at its lower end and several arc-shaped mounting plates 32 arranged around the outer wall of the chassis 21. Each of the arc-shaped mounting plates 32 has several mounting holes 33, and each mounting hole 33 has an impeller 34 in its inner cavity. Each impeller 34 is mounted on the output shaft of a motor that is electrically connected to the thermoelectric generator 31. The chassis 21 has a liquid storage chamber filled with a low-boiling-point liquid. The upper end of the chassis 21 has several heat dissipation copper pipes 35 located near the impellers 34, and the heat dissipation copper pipes 35 have a spiral upward extension structure.

[0031] In use, the gravity clamping lifting device 2 is lifted using a lifting device, and the upper end of the crucible 1 is inserted into the clamping cavity formed by several clamping rods 26, so that the base plate 21 contacts the upper end of the crucible lid. At this time, the lifting device pulls the pull rod 23 upward, and the pull 23 drives one end of the connecting rod 27 to move upward, thereby causing the upper end of the clamping rod 26 to rotate outward about the connection point with the mounting part 25, so that several clamping plates 28 clamp and fix the crucible 1. After fixing, the crucible 1 is suspended in the air, and the metal heat-absorbing end of the thermoelectric generator 31 contacts the upper end of the crucible lid. The low-boiling-point liquid dissipates heat from the heat-dissipating end of the thermoelectric generator 31, so that both ends... A large temperature difference is created, which causes each motor to drive the impeller 34 to rotate rapidly. Airflow is drawn in from below the mounting hole 33 and discharged from above, thus cooling the crucible 1. The upward discharge of gas can accelerate the flow of gas around the heat dissipation copper pipe 35, thereby dissipating heat from the heat dissipation copper pipe 35 and accelerating the reflux of low-boiling-point liquid (which is beneficial to maintaining a larger temperature difference between the two ends of the thermoelectric generator 31). This cooling device uses the heat of the crucible 1 itself to generate electricity and provide power to the motor, and uses the generated airflow to dissipate heat from the crucible 1, which can accelerate the suspended cooling speed of the crucible 1. Moreover, the heat dissipation effect of this thermodynamic heat dissipation mechanism 3 is gentle and will not affect the crucible or the crystal.

[0032] It should be noted that: First, the upward exhaust method, with its exhaust direction aligned with the upward direction of the hot airflow, accelerates airflow and facilitates faster heat dissipation from the crucible 1 and the heat dissipation copper pipe 35. Second, this gravity clamping and lifting device 1 is existing technology and is not limited to this structure; existing products can also be directly selected to replace this design structure. Third, the thermoelectric generator 31 converts some of the heat from the crucible 1 into electrical energy, and some of this energy is consumed, reducing the heat loss from the crucible 1 into the indoor air and promoting heat dissipation from the crucible 1.

[0033] As a preferred embodiment of this example, Figure 2 and Figure 4 As shown, it also includes a rotating heat dissipation mechanism 4, which includes several flow collectors 41 corresponding to several arc-shaped mounting plates 32. The flow collectors 41 have a structure that is wider at the bottom and narrower at the top. Each heat dissipation copper pipe 35 is located in the inner cavity of the corresponding flow collector 41. The upper end of the flow collector 41 is connected to the exhaust pipe 43. The exhaust ports of the several exhaust pipes 43 are arranged along the tangent direction of the circle formed by the several exhaust pipes 43. The pull rod 23 is rotatably connected to the lifting ring 24 through the connector 5. The flow collectors 41 collect the upward airflow. Its structure that is wider at the bottom and narrower at the top can further accelerate the airflow, so that the airflow is quickly discharged from the exhaust pipe 43. The discharged airflow drives the lifting device and the crucible 1 to rotate. The rotation of the crucible 1 causes the surrounding air to flow (i.e., air convection). At the same time, the surface of the rotating crucible 1 passes through a given point at a faster speed, which is equivalent to a larger surface area contacting the surrounding gas. Heat is transferred to the surrounding environment through the surface of the object. The velocity of the surrounding environment is proportional to the surface area. Therefore, since the rotation increases the effective contact area of ​​the surface, the heat dissipation efficiency of the crucible increases. That is, the rotation of crucible 1 can have a good heat dissipation effect (the heat dissipation is uniform by using rotation). At the same time, the longitudinal wind force generated by the thermodynamic heat dissipation mechanism 3 can effectively improve the heat dissipation effect of crucible 1 (i.e., accelerate cooling) and also make the heat dissipation of crucible 1 more uniform (when rotation and longitudinal wind force act on crucible 1 at the same time, part of the airflow that is flowed upward by the longitudinal wind force will continue to move upward due to rotation and inertia and flow through the crucible part corresponding to the part without impeller 34, such as the part between two adjacent mounting plates 32 (when crucible 1 is not rotating, this part of crucible 1 is a blind spot of longitudinal airflow. The rotation of crucible 1 can dissipate heat from this blind spot while also being covered by the longitudinal airflow for heat dissipation), thus making the heat dissipation of crucible more uniform.

[0034] It should be noted that: first, the shroud 41 can be provided with densely packed pits, which can reduce air resistance, thereby making the crucible 1 rotate faster and more conducive to the rapid heat dissipation of the crucible 1; second, the shroud 41 adopts a streamlined design to reduce wind resistance.

[0035] As a preferred embodiment of this example, Figure 2 As shown, it also includes a Tesla valve 42 for accelerating the gas. The Tesla valve 42 is installed between the air inlet end of the exhaust pipe 43 and the upper end of the manifold 41. The Tesla valve 42 can further accelerate the exhaust of the gas flow, which is beneficial to speed up the rotation speed of the crucible 1 and thus improve the heat dissipation effect.

[0036] As a preferred embodiment of this example, Figure 5 As shown, the connector 5 includes an upper magnetic shield 51 and a lower magnetic shield 52 fixed together by bolts. The lifting ring 24 is fixed to the upper end of the upper magnetic shield 51. A first magnetic ring 53 is installed in the inner cavity of the lower magnetic shield 52. The upper end of the pull rod 23 passes through the lower magnetic shield 52 and the first magnetic ring 53, and has a through hole at the axis, and is fixedly connected to a second magnetic ring 54. The magnetic poles of the second magnetic ring 54 and the first magnetic ring 53 are the same at opposite ends. The outer surface of the second magnetic ring 54 is provided with a number of rolling balls 55 that roll in contact with the inner wall of the upper magnetic shield 51. The rolling balls 55 are made of non-metallic material. Since the magnetic poles of the second magnetic ring 54 and the first magnetic ring 53 are the same at opposite ends, a repulsive force is generated, which allows the pull rod 23 to be suspended in the magnetic shield. The rolling balls 55 made of non-metallic material contact the inner wall of the upper magnetic shield 51 to keep the rotation of the pull rod 23 stable, which can greatly reduce the resistance encountered by the pull rod 23 when rotating, which is conducive to further accelerating the rotation speed of the crucible 1 and improving the heat dissipation effect.

[0037] It is important to note that: First, the ball bearing 55 is made of non-metallic material to prevent the second magnetic ring 54 and the first magnetic ring 53 from generating magnetic force on the ball bearing, thus hindering the rolling of the ball bearing 55 and avoiding significant resistance to the rotation of the pull rod 23. The ball bearing 55 can be made of alumina ceramic, which has high hardness and high wear resistance. Second, the main resistance to the rotation of the pull rod 23 is the longitudinal frictional resistance (because the pull rod 23 bears the weight of the entire lifting device and the crucible 1, its longitudinal pressure is large, and the resulting frictional resistance is large). Therefore, the first magnetic ring 53 and the second magnetic ring 54 are used to suspend the pull rod 23, so that the pull rod 23 is not subject to friction in the longitudinal direction. Then, the ball bearing 55 provides lateral restraint for the pull rod 23, which is conducive to the stability of the crucible 1 during rotation, making it less prone to swaying and facilitating the stable clamping of the crucible 1 by the lifting device.

[0038] As a preferred embodiment of this example, Figure 2 and Figure 6 As shown, it also includes a fastening member 6 that promotes the heat-absorbing end of the thermoelectric generator 31 to be tightly attached to the upper end of the crucible cover. The tight contact between the heat-absorbing end and the heat source end (i.e., the crucible cover) can minimize the thermal conductivity resistance and improve the thermal energy conduction efficiency, making the temperature difference between the heat-absorbing end and the heat source end of the thermoelectric generator larger, thereby improving the efficiency of converting thermal energy into electrical energy, while avoiding heat loss.

[0039] As a preferred embodiment of this example, Figure 7 As shown, the fastening component 6 includes a mounting block 61 fixed to the upper end of the chassis 21 and having a mounting groove. Several mounting components 25 are slidably disposed in the inner cavity of the mounting block 61 via sliders 62 provided on their side ends. The mounting components 25 are connected to the mounting block 61 by a connecting spring 63. When the crucible 1 is clamped by the clamping plate 28 (at this time, the clamping rod 26 is tilted outward), as the pull rod 23 continues to move upward, the clamping rod 26 will drive the mounting components 25 to overcome the elastic force of the connecting spring 63 and move outward, i.e., clamp. As the upper end of the holding rod 26 opens outward, it causes the mounting part 25 to move slightly outward. The end of the mounting part 25 then forms a block with the end of the mounting block 61. During this process, since the crucible 1 is fixed by multiple clamping plates 28, as the clamping rod 26 and the mounting part 25 move outward, the chassis 21 will cause the thermoelectric generator 31 to move slightly downward. This causes the heat-absorbing end of the thermoelectric generator 31 to be pressed against the upper end of the crucible cover with a certain force, thereby making the thermoelectric generator 31 and the upper end of the crucible cover in close contact.

[0040] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A crucible suspension cooling device for accelerating crucible cooling, comprising a gravity clamping device (2) for suspending and cooling a crucible (1) inside a growth furnace, characterized in that: It also includes a thermodynamic heat dissipation mechanism (3) that uses the heat carried by the crucible (1) as a power source to dissipate heat from the crucible (1); The gravity clamping lifting device (2) includes a chassis (21), a limiting column (22) is installed at the center of the chassis (21), and the upper end of the column (22) is slidably disposed in the inner cavity of the pull rod (23). Several mounting parts (25) are installed in a circular pattern on the chassis (21), and a clamping rod (26) is rotatably installed on each mounting part (25). A clamping plate (28) with a contact surface adapted to the outer surface of the crucible (1) is movably installed at the lower end of each clamping rod (26). The upper ends of the multiple clamping rods (26) are movably connected to the pull rod (23) through a connecting rod (27). A lifting ring (24) is installed at the upper end of the pull rod (23). The pull rod (23) is pulled up by the lifting equipment. The pull rod (23) drives one end of the connecting rod (27) to move upward, thereby causing the upper end of the clamping rod (26) to rotate outward about the connection point of the mounting part (25) as the axis, so that the clamping plates (28) clamp and fix the crucible (1). The thermodynamic heat dissipation mechanism (3) includes a thermoelectric generator (31) with the heat dissipation end fixedly installed at the lower end of the chassis (21) and a plurality of arc-shaped mounting plates (32) arranged around the outer wall of the chassis (21). A plurality of mounting holes (33) are provided on the plurality of arc-shaped mounting plates (32), and an impeller (34) is provided in the inner cavity of each mounting hole (33). Each impeller (34) is mounted on the output shaft of a motor that is electrically connected to the thermoelectric generator (31). The metal heat-absorbing end of the thermoelectric generator (31) is in contact with the upper end of the crucible lid; The inner cavity of the chassis (21) is provided with a liquid storage chamber, and the liquid storage chamber is filled with a low boiling point liquid. The upper end of the chassis (21) is provided with a number of heat dissipation copper pipes (35) close to the impeller (34), and the heat dissipation copper pipes (35) have a spiral upward extension structure. It also includes a rotating heat dissipation mechanism (4), which includes a plurality of flow collectors (41) corresponding to a plurality of arc-shaped mounting plates (32). The flow collectors (41) have a structure that is wider at the bottom and narrower at the top. Each of the heat dissipation copper pipes (35) is located in the inner cavity of the corresponding flow collector (41). The upper end of the flow collector (41) is connected to the exhaust pipe (43). The exhaust ports of the plurality of exhaust pipes (43) are arranged along the tangent direction of the circle formed by the plurality of exhaust pipes (43). The pull rod (23) is rotatably connected to the hanging ring (24) through the connector (5).

2. The crucible suspension cooling device according to claim 1, characterized in that: It also includes a Tesla valve (42) for accelerating the gas, the Tesla valve (42) being installed between the intake end of the exhaust pipe (43) and the upper end of the manifold (41).

3. The crucible suspension cooling device according to claim 1, characterized in that: The connector (5) includes an upper magnetic shield (51) and a lower magnetic shield (52) fixed together by bolts. The lifting ring (24) is fixed to the upper end of the upper magnetic shield (51). A first magnetic ring (53) is installed in the inner cavity of the lower magnetic shield (52). The upper end of the pull rod (23) passes through the lower magnetic shield (52) and the first magnetic ring (53) and has a through hole at the axis and is fixedly connected to a second magnetic ring (54). The second magnetic ring (54) has the same magnetic poles at the opposite end of the first magnetic ring (53). A number of balls (55) are arranged around the outer surface of the second magnetic ring (54) and roll in contact with the inner wall of the upper magnetic shield (51). The balls (55) are made of non-metallic material.

4. The crucible suspension cooling device according to claim 1, characterized in that: It also includes a fastening element (6) to promote the heat absorption end of the thermoelectric generator (31) to be tightly attached to the upper end of the crucible lid.

5. The crucible suspension cooling device according to claim 4, characterized in that: The fastening member (6) includes a mounting block (61) fixed to the upper end of the chassis (21) and having a mounting groove. Several mounting members (25) are slidably disposed in the inner cavity of the mounting block (61) by sliders (62) provided on their side ends. The mounting members (25) and the mounting block (61) are connected by connecting springs (63).

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