A tactile sensor used in cooperation with a dexterous hand and a tactile sensor system thereof

Abstract

The present application belongs to the technical field of micro-electro-mechanical system sensor, and provides a tactile sensor used in cooperation with a dexterous hand and a tactile sensor system thereof, and the technical scheme is as follows: a sensor body is provided, the sensor body comprises two housings, the first housing is provided with a first cavity, a glass body and a silicon micro pressure sensitive chip are arranged at the bottom of the first cavity, an elastic silicon film is arranged on the silicon micro pressure sensitive chip, a second cavity is arranged in the glass body, the second housing is provided with a third cavity, and the second cavity and the third cavity are communicated with each other; the pressure received by the third cavity is transmitted to the elastic silicon film through the first cavity and the second cavity, and is converted into the deformation of the elastic silicon film, and the deformation of the elastic silicon film is measured to detect the gripping pressure of the dexterous hand. The third cavity can be inflated / deflated, and the gripping force during the gripping of the dexterous hand is adjusted, so that the dynamic balance of the gripping force is realized.

Description

Technical Field

[0001] This invention belongs to the field of microelectromechanical systems sensor technology, and particularly relates to a tactile sensor and its tactile sensor system used in conjunction with a dexterous hand. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] Currently, robotic dexterous hands, as a replacement and functional extension of human hands, are capable of performing more precise and complex operations and are widely used in service robots, telemedicine, and space teleoperation. Dexterous hand systems are typically equipped with force sensors and tactile sensors.

[0004] Tactile sensors sense the force generated by the direct contact between a robotic hand and a target object, providing more precise positioning information and information on the physical characteristics of the target object, enabling precise manipulation in conjunction with a dexterous hand. Research on force-tactile perception has become one of the key technologies in the development of robotic and digital workshops, and countries worldwide are investing significant human, financial, and material resources in systematic research on robotic tactile sensors. Currently, there is a lack of reliable pressure sensors and tactile sensors specifically designed for dexterous hands, and existing pressure sensors are difficult to integrate with robotic fingers in design. Furthermore, a single pressure sensor can only measure pressure at a single point, failing to measure multi-dimensional pressure and positional information at contact points of linear or area arrays. Summary of the Invention

[0005] To address at least one of the technical problems in the background art described above, the first aspect of the present invention provides a tactile sensor for use with a dexterous hand. This sensor can be inflated / deflated to change the pressure range, thereby adjusting the gripping force during the robot's dexterous hand's grasping of objects, achieving dynamic balance of gripping force, improving the stability and accuracy of the system, and ensuring the smooth execution of fine operations.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] The present invention provides a tactile sensor for use with a dexterous hand, comprising: a sensor body, the sensor body comprising two housings, the first housing having a first cavity, a glass body and a silicon micro pressure sensitive chip being disposed at the bottom of the first cavity, an elastic silicon film being disposed on the silicon micro pressure sensitive chip, a second cavity being disposed inside the glass body, and a third cavity being disposed in the second housing, the second cavity and the third cavity being interconnected.

[0008] The pressure in the third cavity is transmitted to the elastic silicon membrane through the first and second cavities, and is converted into the deformation of the elastic silicon membrane. The grasping pressure of the dexterous hand is detected by measuring the changes in electrical parameters caused by the deformation of the elastic silicon membrane.

[0009] In one embodiment, a miniature one-way valve is provided on the first housing. The miniature one-way valve passes through the glass body and connects to the second cavity. The range of contact pressure is changed by filling and releasing gas / liquid into the second cavity and the third cavity through the miniature one-way valve.

[0010] In one implementation, multiple strain resistors are integrated on the elastic silicon diaphragm, and an excitation terminal and a signal output terminal are provided inside the silicon micro pressure sensitive chip. The multiple strain resistors, the excitation terminal and the signal output terminal are connected to form a Wheatstone bridge. When the elastic silicon diaphragm is compressed, the resistance value of the strain resistor changes proportionally to the measured pressure, and the Wheatstone bridge outputs a changing voltage signal.

[0011] In one implementation, the silicon micro pressure-sensitive chip is further provided with a signal compensation board. The signal compensation board is provided with multiple connection terminals, which are connected to the excitation terminal and the signal output terminal. The signal compensation board is provided with a constant current source for providing an excitation constant current source to the Wheatstone bridge.

[0012] As one implementation method, the multiple strain resistors integrated on the elastic silicon film are as follows: a single-crystal silicon film is fabricated using MEMS technology, and a set of equivalent resistors is diffused in a specific direction of the single-crystal silicon film using integrated circuit technology, and impurities are diffused on the film to form strain resistors.

[0013] In one implementation, the signal compensation board is provided with a first terminal, a second terminal, a third terminal, and a fourth terminal. The first terminal is connected to the positive terminal of the excitation connection, the second terminal is connected to the negative terminal of the excitation connection, the third terminal is connected to the positive terminal of the signal output, and the fourth terminal is connected to the negative terminal of the signal output. The first and second terminals serve as the inputs of the silicon Wheatstone bridge, and the third and fourth terminals serve as the outputs of the silicon Wheatstone bridge.

[0014] In one embodiment, the second housing is a silicone cap.

[0015] To address the aforementioned issues, a second aspect of this invention provides a tactile sensor system for use with a dexterous hand. All the flexible silicon caps of the tactile sensor can be arrayed to cover the finger surface. When grasping an object, pressure allows the dexterous hand to acquire information about the contact point location, the magnitude of the contact force, and its direction. This compensates for the shortcomings of existing pressure sensors, and can determine whether the grasped target has slipped. It is suitable for adjusting the gripping force during the robot hand's grasping process, achieving dynamic balance of gripping force, improving the system's stability and accuracy, and ensuring the smooth execution of fine operations.

[0016] To achieve the above objectives, the present invention adopts the following technical solution:

[0017] The present invention provides a tactile sensor system for use with a dexterous hand, comprising a plurality of tactile sensors as described in the first aspect and a tactile control board, wherein the plurality of tactile sensors are mounted in an array on the tactile control board and the tactile control board is disposed inside the fingertip of the dexterous hand;

[0018] The tactile control board also includes an electronic analog switch, a signal amplification and processing module, and a microcontroller. The microcontroller is used to control the electronic analog switch to realize the time-division access of the sensitive unit to the measurement circuit in a row and column scanning manner, and then to collect data in a cyclic scanning manner. After passing through the signal amplification and processing circuit, the multidimensional pressure information and position information of the contact points of the linear array or area array are obtained.

[0019] In one embodiment, the tactile control board includes a multi-layer circuit board, with the top and bottom layers being a first signal processing layer and a second signal processing layer, and the middle two layers being a power supply positive terminal layer and a power supply negative terminal layer; the first signal processing layer is connected to the positive terminal of the signal output, the second signal processing layer is connected to the negative terminal of the signal output, the power supply positive terminal layer is connected to the positive terminal of the excitation wiring, and the power supply negative terminal layer is connected to the negative terminal of the excitation wiring.

[0020] In one embodiment, the second housing of the tactile sensor, namely the silicone cap, remains on the fingertip surface, and a soft rubber layer covers the fingertip surface. The soft rubber layer has a concave spherical pit that matches the silicone cap of the second housing on the surface corresponding to the tactile sensor.

[0021] The beneficial effects of this invention are:

[0022] 1. This invention uses a built-in one-way valve to fill the body with liquid or gas, changing the internal pressure so that it can detect larger or smaller forces, improving the sensitivity of the force. Each sensing unit can independently acquire external information, and the pressure detection range of the pressure sensor can be easily changed. The pressure force on the flexible silicone cap can be calibrated by a standard pressure testing machine.

[0023] 2. When the present invention is applied to an object, the pressure can enable the dexterous hand to obtain information on the contact point position, the magnitude and direction of the contact force, which can compensate for the shortcomings of relying on existing pressure sensors. It can determine whether the target being grasped has slipped. It is suitable for adjusting the gripping force during the process of the robot hand grasping the object, realizing dynamic balance of gripping force, improving the stability and accuracy of the system, and ensuring the smooth operation of fine operations.

[0024] 3. In all tactile arrays of this invention, the excitation voltage and signal output adopt a four-layer control board, with the middle two layers being the positive and negative layers of the power supply. The control board is built into the finger. The flexible tactile sensor body and the control board are designed separately, which facilitates miniaturization and is suitable for robotic hands to grasp and manipulate objects.

[0025] 4. The pressure sensor of the present invention is equipped with a signal compensation board, which has four terminals and their corresponding leads. Two terminals are connected to the constant current source of the control board as the input of the silicon film Wheatstone bridge, and the other two terminals serve as the first-stage output. The first-stage output can be processed and different pressure output ranges can be obtained according to the power supply voltage of the control board, i.e., the second-stage output, with a wide output adjustment range.

[0026] 5. Linear or area array tactile sensors are easy to integrate with fingertips in a unified design. They are characterized by their small size, large measurement range, and excellent flexibility. They can be distributed and combined for installation. The main body of the tactile sensor is separated from the control circuit board, and the signal compensation board is separated from the control board. A two-stage lead method is used, which improves the practicality of the tactile sensor.

[0027] Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0028] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0029] Figure 1 This is an overall schematic diagram of the tactile sensor used in conjunction with a dexterous hand, provided in an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the internal structure of a tactile sensor used in conjunction with a dexterous hand, provided in an embodiment of the present invention.

[0031] Figure 3 This is the elastic membrane Wheatstone bridge structure provided in the embodiments of the present invention;

[0032] Figure 4 This is a combination of a tactile sensor and a control board provided in this embodiment of the invention for use with a dexterous hand;

[0033] Figure 5 This is a front view of a tactile sensor system for use with a dexterous hand, provided in an embodiment of the present invention.

[0034] Figure 6 This is a side view of a tactile sensor system used in conjunction with a dexterous hand, provided in an embodiment of the present invention.

[0035] Figure 7 This is the finger soft rubber layer provided in the embodiments of the present invention;

[0036] Figure 8 This is a tactile sensor control board inside the finger provided in an embodiment of the present invention;

[0037] Figure 9 This is a circuit diagram of a pressure sensor constant current source and signal processing circuit provided in an embodiment of the present invention;

[0038] Figure 10 This is a chip control circuit diagram provided in an embodiment of the present invention.

[0039] In the figure, 1-first housing, 2-first cavity, 21-glass body, 211-second cavity, 22-silicon cup, 23-silicon film adhesive gel, 24-chip adhesive layer, 25-silicon micro pressure sensitive chip, 251-elastic silicon film, 252-strain resistor, 26-signal compensation board, 261-first terminal, 262-second terminal, 263-third terminal, 264-fourth terminal, 27-insulating layer, 28-end face fixing layer, 29-constant current source, 3-second housing, 31-third cavity, 4-miniature one-way valve, 5-excitation terminal, 51- 52-Excitation wiring positive terminal, 6-Signal output terminal, 61-Signal output positive terminal, 62-Signal output negative terminal, 7-Tactile control board, 71-First signal processing layer, 72-Second signal processing layer, 73-Power supply positive terminal layer, 74-Power supply negative terminal layer, 75-Electronic analog switch, 76-Signal amplification and processing module, 761-Signal amplification and processing circuit, 77-Microcontroller, 8-Tactile sensor array, 9-Fingertip, 91-Fingertip soft rubber layer, 10-Middle knuckle, 101-Middle finger soft rubber layer, 11-Concave ball pit. Detailed Implementation

[0040] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0041] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0042] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0043] In this invention, terms such as "upper," "lower," and "bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are merely relational terms determined for the convenience of describing the structural relationship of the various components or elements of this invention, and do not specifically refer to any component or element in this invention, nor should they be construed as limiting this invention.

[0044] In this invention, terms such as "fixed connection," "connected," and "linked" should be interpreted broadly, indicating a fixed connection, an integral connection, or a detachable connection; a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can determine the specific meaning of these terms in this invention based on the specific circumstances, and they should not be construed as limitations on the invention.

[0045] Terminology Explanation

[0046] Micro-Electro-Mechanical Systems (MEMS) are high-tech devices with dimensions of a few millimeters or even smaller. MEMS is a comprehensive technology focusing on ultra-precision machining, involving numerous disciplines such as microelectronics, materials science, mechanics, chemistry, and mechanical engineering. Common MEMS products include pressure sensors, accelerometers, and gyroscopes. Sensors designed using MEMS offer advantages such as small size, light weight, low power consumption, high reliability, high sensitivity, and ease of integration, and are gradually replacing traditional mechanical sensors, finding widespread application in consumer electronics, the automotive industry, machinery, chemical engineering, and pharmaceuticals.

[0047] Example 1

[0048] Reference Figures 1-2 This embodiment provides a tactile sensor for use with a dexterous hand, comprising: a sensor body, the sensor body comprising two housings, the two housings being fixed by an end face fixing layer; the first housing 1 having a first cavity 2, the bottom of the first cavity 2 having a glass body 21, the glass body 21 having a second cavity 211 inside the glass body 21, and the second housing 3 having a third cavity 31, the second cavity 211 and the third cavity 31 being interconnected;

[0049] A miniature one-way valve 4 is provided on the first housing 1, and the miniature one-way valve 4 passes through the glass body 21 and is connected to the second cavity 211;

[0050] The contact pressure range is changed by filling and releasing gas / liquid into the second cavity 211 and the third cavity 31 through the miniature one-way valve 4. The one-way valve 4 is also used to prevent gas / liquid from flowing in reverse or to prevent compressed air / liquid from flowing in reverse.

[0051] The advantages of the above scheme are that the internal pressure can be changed by filling the body with liquid or air through the built-in one-way valve, so that it can detect larger or smaller forces and improve the sensitivity of the force. Each sensing unit can independently acquire external information, and the pressure detection range of the pressure sensor can be easily changed. The pressure force on the contact surface can be calibrated by a standard pressure testing machine.

[0052] A silicon micro pressure-sensitive chip 25 is disposed in the first cavity 2, and the silicon micro pressure-sensitive chip 25 is fixed to the glass body 21 through a chip adhesive layer 24;

[0053] The silicon micro pressure sensitive chip 25 is provided with a silicon cup 22, a silicon film gel 23 and an elastic silicon film 251. The silicon cup 22 is filled with silicon film gel 23, and the elastic silicon film 251 is provided on the silicon cup 22. Multiple strain resistors 252 are integrated on the elastic silicon film 251.

[0054] Since silicone film gel is a molding potting compound, it is elastic, tough, soft and sticky, can form effective adhesion, has good self-healing properties, and can buffer the pressure it receives before acting on the elastic silicone film 25.

[0055] In this embodiment, there are four strain gauges 252.

[0056] Reference Figure 1 The silicon micro pressure-sensitive chip 27 is also provided with multiple excitation terminals 5 and signal output terminals 6. The excitation terminals 5 include an excitation positive terminal 51 and an excitation negative terminal 52; the signal output terminals 6 include a signal output positive terminal 61 and a signal output negative terminal 62.

[0057] Reference Figure 3 The multiple strain resistors 252, the excitation terminal 5, and the signal output terminal 6 are connected to form a Wheatstone bridge. When the elastic silicon diaphragm 25 is compressed, the resistance of the strain resistor changes proportionally to the measured pressure, and the Wheatstone bridge outputs a changing voltage signal.

[0058] Reference Figure 2The silicon micro pressure-sensitive chip 27 also includes a signal compensation board 26 and an insulating layer 27. The signal compensation board 26 has multiple connection terminals, which are connected to the excitation terminal 5 and the signal output terminal 6, respectively. Figure 9 The signal compensation board 26 is equipped with a constant current source 29, which is used to provide an excitation constant current source to the Wheatstone bridge.

[0059] The structure of the constant current source 29 is an existing structure, which can be directly implemented using the existing structure, and will not be elaborated further here.

[0060] The purpose of the insulating layer 27 is to isolate the signal compensation board, metal casing and led-out electrodes, etc., and it has a protective function.

[0061] Reference Figure 10 Specifically, the signal compensation board 26 is provided with a first terminal 261, a second terminal 262, a third terminal 263, and a fourth terminal 264. The first terminal 261 is connected to the positive terminal 51 of the excitation connection, the second terminal 262 is connected to the negative terminal 52 of the excitation connection, the third terminal 263 is connected to the positive terminal 61 of the signal output, and the fourth terminal 264 is connected to the negative terminal 62 of the signal output.

[0062] Two terminals serve as the inputs to the silicon film Wheatstone bridge, and two terminals serve as the first-stage outputs.

[0063] In this embodiment, the second housing 3 is a silicone cap.

[0064] The pressure from the contact surface when the finger grasps the object is transmitted to the gel 23 through the second cavity 211 and the third cavity 31 via liquid filling or other actions. This gel then transmits the pressure to the elastic silicon membrane 251 on the silicon-sensitive chip 25 within the sensor. The pressure is converted into deformation of the elastic silicon membrane 251, and the pressure is detected by measuring the changes in electrical parameters caused by this deformation. The chip does not directly contact the measured medium, thus providing protection for pressure measurement and allowing for applications in various scenarios.

[0065] It should be noted that, in this embodiment, the size and thickness parameters of the elastic silicon film 251 are limited to a small deformation range in order to obtain a linear input-output relationship. Those skilled in the art can set these parameters according to specific working conditions, which will not be described in detail here.

[0066] In this embodiment, the shape of the diaphragm is not specifically limited and can be circular or square.

[0067] The method of integrating multiple strain resistors 252 on the elastic silicon film 251 can be used to fabricate a single-crystal silicon film in the middle of the material using MEMS technology. On the single-crystal silicon film, using integrated circuit technology, a set of equivalent resistors are diffused in a specific direction of the single-crystal silicon film, and then impurities are diffused on the film to form four strain resistors.

[0068] The position and orientation of the four bridge arm resistors on the template are determined according to the crystal orientation and stress. The strain resistors are then connected into a circuit using a Wheatstone bridge to obtain high sensitivity. Depending on the excitation source of the bridge, its output can be set to various analog quantities such as 0-3.3V and 0-5V. The measurement range depends on the thickness of the diaphragm and the strain resistors.

[0069] When the diaphragm is subjected to pressure, the resistance of the varistor changes, and the bridge circuit composed of varistors outputs a weak voltage change. When an excitation constant current source is added to one side of the Wheatstone bridge structure, when the pressure changes, the single crystal silicon produces strain, causing the strain resistor directly diffused on it to change proportionally to the measured pressure, and the corresponding voltage output signal is obtained by the bridge circuit.

[0070] After being calibrated on a pressure test bench, each MEMS pressure sensor can measure the pressure at a single point.

[0071] In this embodiment, the pressure refers to the elastic deformation of the silicon film caused by changes in internal air pressure or hydraulic pressure, which in turn causes a change in the Wheatstone strain gauge, thereby causing a change in the output voltage of the Wheatstone bridge. This voltage is collected, amplified, and calibrated to detect the magnitude of the contact pressure.

[0072] Example 2

[0073] Reference Figure 4 This embodiment provides a tactile sensor system for use with a dexterous hand, including: a tactile control board 7 and a plurality of tactile sensors including those in the first embodiment. The plurality of tactile sensors form a sensor array and are mounted on the tactile control board 7. The excitation power supply and output signals of all tactile sensors are processed by the tactile control board 7.

[0074] Reference Figures 5-6 The tactile control board 7 is disposed inside the tip of a dexterous fingertip. The tactile control board 7 includes a multi-layer circuit board, including a signal processing layer and a power supply layer.

[0075] like Figure 7As shown, in this embodiment, the circuit board has four layers: the top and bottom layers are the first signal processing layer 71 and the second signal processing layer 72, and the middle two layers are the power supply positive terminal layer 73 and the power supply negative terminal layer 74. The first signal processing layer 71 is connected to the signal output positive terminal 61, the second signal processing layer 72 is connected to the signal output negative terminal 62, the power supply positive terminal layer 73 is connected to the excitation wiring positive terminal 51, and the power supply negative terminal layer 74 is connected to the excitation wiring negative terminal 52.

[0076] The advantage of the above solution is that the excitation voltage and signal output in all tactile arrays adopt a four-layer control board, with the middle two layers being the positive and negative layers of the power supply. The control board is built into the finger, and the flexible tactile sensor body and the control board are designed separately, which facilitates miniaturization and is suitable for robotic hands to grasp and manipulate objects.

[0077] The tactile control board 7 also includes an electronic analog switch 75, a signal amplification and processing module 76, and a microcontroller 77. The microcontroller 77 controls the electronic analog switch 75 to realize the time-division access of the sensitive unit to the measurement circuit in a row and column scanning manner, and then collects data in a cyclic scanning manner. After passing through the signal amplification and processing circuit 761, the multidimensional pressure information and position information of the contact points of the linear array or area array are obtained.

[0078] In this embodiment, the structure of the signal amplification and processing circuit 761 is an existing structure, which can be directly implemented using the existing structure, and will not be described in detail here.

[0079] In this embodiment, the microcontroller is an ARM microcontroller.

[0080] The array tactile sensors are equipped with a signal compensation board, which has four terminals and their corresponding leads. Two terminals are connected to the constant current source of the control board as the input of the silicon film Wheatstone bridge, and two terminals are used as the first-stage output.

[0081] The first-level output is processed by the haptic control board 7 and different pressure output ranges are obtained according to the power supply voltage of the control board, which is the second-level output, with a wide output adjustment range.

[0082] The tactile sensor body is separated from the control circuit board, and the signal compensation board is separated from the control board. A two-stage lead method is adopted, which improves the practicality of the tactile sensor.

[0083] Therefore, tactile sensor systems can provide information on the location of the contact point, the magnitude and direction of the contact force, and can accurately reflect the state and precise information of the contact surface, which can significantly improve the robot's dexterity.

[0084] The advantage of the above solution is that, in the above system, all the flexible silicon caps of the tactile sensors can be arrayed to cover the finger surface. When grasping an object, the pressure can enable the dexterous hand to obtain the contact point position, information, contact force magnitude and direction information. This can make up for the shortcomings of relying on existing pressure sensors, and can determine whether the grasped target has slipped. It is suitable for adjusting the gripping force during the robot hand's grasping process, realizing dynamic balance of gripping force, improving the stability and accuracy of the system, and ensuring the smooth operation of fine operations.

[0085] Since the output signal is independent of temperature when using a constant current source, this embodiment uses a constant current source 22.

[0086] like Figure 5 The diagram shows a tactile sensor system used in conjunction with a dexterous hand. The robot dexterous hand has a fingertip portion 9 and a middle knuckle portion 10. The fingertip portion is covered with a soft rubber layer 91, and the middle knuckle portion is covered with a soft rubber layer 101. The inner shape of each layer is as follows: Figure 6 As shown;

[0087] Reference Figure 8 The second housing 3 of the tactile sensor, i.e. the silicone cap, remains on the fingertip surface, and a soft rubber layer 8 covers the fingertip surface. The soft rubber layer 8 has a concave ball pit 11 that matches the silicone cap of the second housing 3 on the surface corresponding to the tactile sensor. The function of the soft rubber layer is to protect the tactile sensor.

[0088] The advantages of the above solution are that linear or area array tactile sensors are easy to integrate with the fingertips in the overall design, and have the characteristics of small size, large measurement range and excellent flexibility, and can be installed in a distributed combination.

[0089] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A tactile sensor for use with a dexterous hand, characterized in that, The sensor body includes two housings. The first housing has a first cavity, with a glass body and a silicon micro-pressure sensitive chip disposed at the bottom of the first cavity. An elastic silicon membrane is disposed on the silicon micro-pressure sensitive chip. A second cavity is disposed within the glass body, and a third cavity is disposed within the second housing. The second and third cavities are interconnected. A miniature one-way valve is disposed on the first housing, passing through the glass body and connecting to the second cavity. The miniature one-way valve is used to fill and release gas / liquid into the second and third cavities to change the range of contact pressure. The pressure in the third cavity is transmitted to the elastic silicon membrane through the first and second cavities, and is converted into the deformation of the elastic silicon membrane. The grasping pressure of the dexterous hand is detected by measuring the change in electrical parameters caused by the deformation of the elastic silicon membrane. Multiple strain resistors are integrated on the elastic silicon membrane. The silicon micro pressure sensitive chip is provided with an excitation terminal and a signal output terminal. The multiple strain resistors, the excitation terminal and the signal output terminal are connected to form a Wheatstone bridge. When the elastic silicon membrane is compressed, the resistance of the strain resistors changes proportionally to the measured pressure, and the Wheatstone bridge outputs a changing voltage signal. Multiple tactile sensors are mounted in an array on a tactile control board, which includes a multi-layer circuit board. The top and bottom layers are a first signal processing layer and a second signal processing layer, and the middle two layers are a power supply positive terminal layer and a power supply negative terminal layer. The first signal processing layer is connected to the positive terminal of the signal output, the second signal processing layer is connected to the negative terminal of the signal output, the power supply positive terminal layer is connected to the positive terminal of the excitation wiring, and the power supply negative terminal layer is connected to the negative terminal of the excitation wiring.

2. A tactile sensor for use with a dexterous hand as described in claim 1, characterized in that, The silicon micro pressure-sensitive chip also includes a signal compensation board with multiple connection terminals. These terminals connect to the excitation terminal and the signal output terminal. The signal compensation board is equipped with a constant current source to provide an excitation constant current source to the Wheatstone bridge.

3. A tactile sensor for use with a dexterous hand as described in claim 1, characterized in that, The method of integrating multiple strain resistors on the elastic silicon film is as follows: a single-crystal silicon film is fabricated using MEMS technology, and a set of equivalent resistors is diffused in a specific direction of the single-crystal silicon film using integrated circuit technology, and impurities are diffused on the film to form strain resistors.

4. A tactile sensor for use with a dexterous hand as described in claim 2, characterized in that, The connection terminals include a first terminal, a second terminal, a third terminal, and a fourth terminal. The first terminal is connected to the positive terminal of the excitation connection, the second terminal is connected to the negative terminal of the excitation connection, the third terminal is connected to the positive terminal of the signal output, and the fourth terminal is connected to the negative terminal of the signal output. The first and second terminals serve as the inputs of the silicon Wheatstone bridge, and the third and fourth terminals serve as the outputs of the silicon Wheatstone bridge.

5. A tactile sensor for use with a dexterous hand as described in claim 1, characterized in that, The second housing is a silicone cap.

6. A system of tactile sensors for use with a dexterous hand as described in any one of claims 1-5, characterized in that, It includes multiple tactile sensors and a tactile control panel, which is located inside the tip of a dexterous finger; The tactile control board also includes an electronic analog switch, a signal amplification and processing module, and a microcontroller. The microcontroller is used to control the electronic analog switch to realize the time-division access of the sensitive unit to the measurement circuit in a row and column scanning manner, and then to collect data in a cyclic scanning manner. After passing through the signal amplification and processing circuit, the multidimensional pressure information and position information of the contact points of the linear array or area array are obtained.

7. The system of a tactile sensor for use with a dexterous hand as described in claim 6, characterized in that, The second housing of the tactile sensor, namely the silicone cap, remains on the fingertip surface, covering the fingertip surface with a soft rubber layer. The soft rubber layer has a concave spherical pit that matches the silicone cap of the second housing on the surface corresponding to the tactile sensor.

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