Force measurement control system

Abstract

The present disclosure describes a measurement force control system for controlling a measurement force acting on a measured object generated by a probe contacting the measured object, comprising a measuring rod, a supporting mechanism, a magnet, a magnetic conductor, at least one coil wound on the magnetic conductor, and a control module; the probe and the magnet are fixedly arranged on the measuring rod, the measuring rod is rotatably arranged on the supporting mechanism and drives the magnet to move along a preset motion path when the measuring rod rotates, at the same time, the probe contacts the measured object, the magnetic conductor is fixedly arranged relative to the supporting mechanism and is configured to form a magnetic loop inside the magnetic conductor for the magnetic field generated by the magnet, and the coil wound on the magnetic conductor forms a preset area covering the preset motion path of the magnet, the control module is configured to control the force acting on the magnet generated by the coil according to the material of the measured object, and further control the measurement force acting on the measured object by the probe on the measuring rod. According to the measurement force control system of the present disclosure, a relatively constant measurement force can be obtained.

Description

[0001] This application is a divisional application of the patent application filed on October 9, 2023, with application number 2023112999720 and invention title "Constant Force Measuring Device". Technical Field

[0002] This disclosure generally relates to the intelligent manufacturing equipment industry, and specifically to a force measurement control system. Background Technology

[0003] A profilometer, also known as a profilometer, is an instrument that measures the true shape and comprehensive characteristics of the surface profile of an object using a probe. In practical applications, the probe is generally made of diamond or other high-hardness materials. During the measurement process, the probe moves laterally across the surface of the object and undergoes vertical undulations in accordance with the geometric contours of the object's surface. The probe's sensor detects the vertical displacement of the probe and outputs an electrical signal that matches the contour of the object, thereby obtaining the surface profile parameters of the object.

[0004] In the profilometry process, the measuring force is a crucial factor affecting the contact between the probe and the object being measured. In actual measurements, to enable the profilometry to measure deep pits or grooves and to maintain a fast probe movement speed, the probe should possess a large measuring force. However, if the measuring force is too large, the probe may scratch the surface of the object being measured, making it unsuitable for softer materials. If the measuring force is too small, the probe may bounce (i.e., the probe detaches from the surface) upon contact, affecting the accuracy and precision of the measurement. Therefore, different measuring forces are required for objects made of different materials, and maintaining a constant measuring force as much as possible during the measurement process can reduce bounce or distortion caused by variations in measuring force.

[0005] Therefore, there is an urgent need to develop a constant force measuring device for profilometers. Summary of the Invention

[0006] This disclosure was made in view of the above-mentioned state of the prior art, and its purpose is to provide a constant measuring force device that can control the probe to contact the object being measured with a relatively constant measuring force based on the material of the object being measured. Thus, during the measurement process, on the one hand, it can reduce the occurrence of the object being measured being scratched by the probe, and on the other hand, it can maintain good contact between the probe and the object being measured, thereby reducing the occurrence of probe jumping.

[0007] To this end, this disclosure provides a constant force measuring device that controls the measuring force acting on the object being measured generated by a probe contacting the object being measured. The device includes a probe, a support mechanism, a magnet, a magnetic conductor, at least one coil wound around the magnetic conductor, and a control module. The probe and the magnet are fixedly mounted on the probe. The probe is rotatably mounted on the support mechanism and, when the probe rotates, drives the magnet to move along a preset motion path, simultaneously causing the probe to contact the object being measured. The magnetic conductor is fixed relative to the support mechanism and configured such that the magnetic field generated by the magnet forms a magnetic circuit within the magnetic conductor. The coil wound around the magnetic conductor forms a preset area covering the preset motion path of the magnet. The control module is configured to control the force generated by the coil acting on the magnet according to the material of the object being measured, thereby controlling the measuring force exerted by the probe on the probe on the probe on the object being measured.

[0008] In this disclosure, by fixing the probe and magnet to the measuring rod, the measuring rod can rotate on the support mechanism during measurement, thereby driving the magnet to move along a preset motion path. Simultaneously, the probe contacts the object being measured. During the oscillation of the magnet with the measuring rod, the magnetic field generated by the magnet can pass through the conductor of the coil and enter the magnetic conductor to form a closed magnetic circuit. Furthermore, the magnetic conductor can guide the magnetic field, reducing the number of times the magnetic field passes through the coil. When the coil is energized via the control module, the conductor through which the magnetic field passes generates a controllable Ampere force within the magnetic field of the magnet. This Ampere force is related to the current value of the coil, and the magnet experiences a reaction force from the Ampere force. The force (which can be called the first magnetic force) can be transmitted to the probe through the probe rod. Therefore, the control module can control the current flowing through the coil to precisely control the Ampere force, thereby controlling the first magnetic force and ultimately the measuring force. Furthermore, since the coil wound around the magnetic conductor forms a preset area covering the predetermined movement path of the magnet, in other words, during the oscillation of the magnet with the probe rod, the magnetic field generated by the magnet can almost entirely pass through the coil conductor. Thus, the magnetic field strength passing through the coil conductor remains almost constant during the oscillation of the magnet with the probe rod, which is beneficial for generating a more constant Ampere force and further for obtaining a more constant measuring force. Therefore, during the measurement process, based on the material of the object being measured, the control module can output the required constant current to the coil to obtain the desired and constant measuring force. This facilitates obtaining a more constant measuring force and reduces the possibility of the object being scratched by the probe and probe jump.

[0009] Additionally, according to the constant force measuring device disclosed herein, optionally, the magnetic conductor includes a first part, a third part, and a second part connected in sequence, the magnet is located in the space formed by the first part, the second part, and the third part, the first part has a first inner surface close to the magnet, and the second part has a second inner surface close to the magnet. In this configuration, the first, third, and second parts can be connected sequentially to form a magnetic circuit that guides and concentrates the magnetic field. The magnetic field generated by the magnet can form a magnetic circuit through the first, third, and second parts. Specifically, taking the first magnetic pole of the magnet as the north pole and the second magnetic pole as the south pole as an example, the magnetic field lines can originate from the first magnetic pole, enter the interior of the magnetic conductor, and return to the second magnetic pole sequentially along the first, third, and second parts. Thus, during the swinging process of the measuring rod, when the measuring rod is in any position, it is beneficial to make the magnetic field generated by the magnet form a closed magnetic circuit in the magnetic conductor as much as possible. This allows the magnetic field lines to return to the second magnetic pole along the specified magnetic circuit as much as possible. Therefore, when the magnet is at different swinging angles, it can reduce the occurrence of the magnetic field generated by the magnet passing through the coil multiple times, thereby obtaining the measuring force more accurately. In addition, the magnet can swing along a preset motion path in the first rotation surface within the space formed by the first part, the second part and the third part, which helps to give the magnet more motion space. This allows the probe to achieve a larger swing amplitude, which in turn helps the probe to achieve a larger measurement range, thus helping the profilometer to achieve a larger measurement range.

[0010] Additionally, according to the constant force measuring device disclosed herein, optionally, the coil includes a first coil wound around the first portion, the first coil forming a first conductor surface on the first inner surface, and the plane containing the preset motion path being parallel to the first conductor surface. In this case, during the measurement process, when the measuring rod swings, the number of conductors on the first conductor surface covered by the magnetic field generated by the magnet remains approximately constant. Therefore, when the measuring rod is in different swinging positions, the conductors on the first conductor surface can obtain a relatively constant Ampere force, thereby enabling the constant force measuring device to obtain a relatively constant measuring force.

[0011] Additionally, according to the constant force measuring device disclosed herein, optionally, the coil further includes a second coil disposed in the second portion, the second coil forming a second conductor surface on the second inner surface, and the preset motion path parallel to the second conductor surface. In this case, the magnet can be subjected to a first magnetic force by the combined action of the first and second coils, thereby obtaining a larger first magnetic force, which improves the response speed of the probe to the first magnetic force, and thus enables the probe to obtain a constant measuring force as quickly as possible, thereby improving the measurement speed of the profilometer. Furthermore, since the preset motion path is parallel to the second conductor surface, during the measurement process, when the probe swings, the number of conductors on the second conductor surface covered by the magnetic field generated by the magnet remains approximately constant, thereby obtaining a more constant Ampere force, and thus a more constant measuring force.

[0012] Additionally, according to the constant force measuring device disclosed herein, optionally, the magnetic conductor further includes a fourth portion connecting the first portion and the second portion, wherein the first portion, the third portion, the second portion, and the fourth portion are connected end-to-end in sequence. In this case, the first portion, the third portion, the second portion, and the fourth portion can be connected end-to-end in series to form a closed magnetic conductor. This allows the magnetic field lines to form a closed magnetic circuit within the conductor, which helps reduce the occurrence of magnetic field line leakage, thereby reducing the risk of magnetization of other peripheral components by the magnetic field generated by the magnet and the magnetic field generated after the coil is energized.

[0013] Furthermore, according to the constant force measuring device disclosed herein, optionally, the magnetic axis of the magnet's magnetic poles is perpendicular to the first conductor surface and / or the second conductor surface. In this case, taking a wire in the first conductor surface as an example, since the magnetic axis is perpendicular to the first conductor surface, the magnetic field strength of the magnet on the first conductor surface remains almost constant during the oscillation of the magnet with the measuring rod. Therefore, the magnetic field strength of the conductor passing through the first coil remains almost constant during the oscillation of the magnet with the measuring rod, which is beneficial for generating a more constant Ampere force, and further beneficial for obtaining a more constant measuring force. Similarly, since the magnetic axis is perpendicular to both the first and second conductor surfaces, the magnetic field strength of the magnet on the first and second conductor surfaces remains almost constant during the oscillation of the magnet with the measuring rod. Therefore, the magnetic field strength of the conductor passing through the first and second coils remains almost constant during the oscillation of the magnet with the measuring rod, which is beneficial for generating a more constant Ampere force, and further beneficial for obtaining a more constant measuring force.

[0014] Furthermore, according to the constant force measuring device disclosed herein, optionally, when the control module inputs a preset current to the first coil and the second coil, the direction of the current flowing through the first conductor surface is the same as the direction of the current flowing through the second conductor surface. In this case, the direction of the Ampere force on the conductor on the first conductor surface is the same as the direction of the Ampere force on the conductor on the second conductor surface, so the direction of the first magnetic force on the magnet generated by the magnetic fields acting on the first and second conductor surfaces is also the same. This prevents the first magnetic forces from canceling each other out, thereby facilitating the control of the measuring force to obtain a more constant measuring force.

[0015] Furthermore, according to the constant force measuring device disclosed herein, optionally, the distance from the geometric center of the magnet to the first conductor surface and the second conductor surface is the same. In this case, when the first coil and the second coil are energized, the first and second portions of the magnetic conductor are magnetized, forming a magnetic force on the magnet in a direction parallel to the magnetic axis of the magnet. The magnet is located exactly in the middle of the first conductor surface and the second conductor surface, which allows the magnetic force formed on the magnet in a direction parallel to the magnetic axis of the magnet to remain balanced.

[0016] Furthermore, according to the constant force measuring device disclosed herein, optionally, the first inner surface and the second inner surface are fan-shaped rings matching the preset motion path. In this case, since the preset motion path of the measuring rod driving the magnet to swing is a fan-shaped arc centered on the rotation center, by setting the first inner surface and the second inner surface as fan-shaped rings matching the preset motion path, the volume of the magnetic conductor can be reduced. This saves material from the magnetic conductor and the volume of the magnetic force control device, thereby reducing the volume of the profilometer and increasing its portability.

[0017] Furthermore, according to the constant force measuring device disclosed herein, optionally, the probe, the magnet, and the magnetic conductor are located on one or both sides of the support mechanism. In this case, when the probe, the magnet, and the magnetic conductor are located on one side of the support mechanism, there is more free space on the other side of the support mechanism for placing other related equipment of the profilometer, which helps to reduce the size of the constant force measuring device, that is, it helps to reduce the size of the profilometer and improve its portability. When the probe, the magnet, and the magnetic conductor are located on both sides of the support mechanism, it is advantageous to utilize the lever mechanism formed by the probe rod to improve the sensitivity of controlling the measuring force. In other words, by applying a small first magnetic force to the magnet, a larger measuring force can be obtained through the lever mechanism of the probe rod.

[0018] According to this disclosure, a constant measuring force device can be provided, which can control the probe to contact the object being measured with a relatively constant measuring force based on the material of the object being measured. Thus, during the measurement process, on the one hand, it can reduce the occurrence of the object being measured being scratched by the probe, and on the other hand, it can maintain good contact between the probe and the object being measured, thereby reducing the occurrence of jumping. Attached Figure Description

[0019] This disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings.

[0020] Figure 1 This is a schematic diagram illustrating the force measurement involved in the example of this disclosure.

[0021] Figure 2A This is a schematic diagram illustrating the profilometer involved in the example of this disclosure.

[0022] Figure 2B This is a block diagram illustrating the structure of the profilometer involved in the example of this disclosure.

[0023] Figure 3A This is a schematic diagram showing the measurement component involved in the example of this disclosure engaging with a first slider.

[0024] Figure 3B This is a static schematic diagram of the constant force measuring device involved in the example of this disclosure.

[0025] Figure 3C This is a schematic diagram illustrating the dynamics of the constant force measuring device involved in the example of this disclosure.

[0026] Figure 4 This is a schematic diagram illustrating the support structure involved in the example of this disclosure.

[0027] Figure 5A This is a schematic diagram illustrating a first embodiment of the magnetic control device involved in the examples of this disclosure.

[0028] Figure 5B A perspective schematic diagram of a first embodiment of the magnetic control device involved in this disclosure is shown.

[0029] Figure 5C This is a schematic diagram showing the magnetic circuit of the magnetic control device using a magnetic conductor, as illustrated in the examples of this disclosure.

[0030] Figure 5D This is a schematic diagram illustrating the force analysis of a magnet in a first embodiment of the present disclosure.

[0031] Figure 5E This is a schematic diagram illustrating a magnetic control device according to an example of this disclosure that does not employ magnetic conductors for its magnetic field lines.

[0032] Figure 5F This is a schematic diagram illustrating the magnetic conductor involved in the example of this disclosure, excluding the magnetic field lines of the second part.

[0033] Figure 5G This is a schematic diagram showing that the coil is not tightly wound on the magnetic conductor in the first embodiment of the present disclosure.

[0034] Figure 6 This is a schematic diagram illustrating a second embodiment of the magnetic control device involved in the examples of this disclosure.

[0035] Figure 7A This is a schematic diagram illustrating a third embodiment of the magnetic control device involved in the examples of this disclosure.

[0036] Figure 7B This is a schematic diagram showing the magnetic field lines in a third embodiment of the magnetic control device involved in the examples of this disclosure.

[0037] Figure 8A This is a schematic diagram illustrating a fourth embodiment of the magnetic control device involved in the examples of this disclosure.

[0038] Figure 8B This is a perspective schematic diagram illustrating a fourth embodiment of the magnetic control device involved in the examples of this disclosure.

[0039] Figure 9A This is a perspective schematic diagram illustrating a fifth embodiment of the magnetic control device involved in the examples of this disclosure.

[0040] Figure 9B This is a side view illustrating a fifth embodiment of the magnetic control device involved in the examples of this disclosure.

[0041] Figure 10 This is a schematic diagram illustrating the positional relationship between the magnetic control device and the support mechanism involved in the example of this disclosure.

[0042] Figure 11A This is a schematic diagram showing that the center of mass of the magnet involved in the example of this disclosure is located on the axis of the measuring rod.

[0043] Figure 11B This is a schematic diagram illustrating the force analysis of a magnet whose center of mass is not located on the axis of the measuring rod, as described in this disclosure example.

[0044] Figure 12 This is a flowchart illustrating the calibration method of the constant force measuring device involved in the example of this disclosure.

[0045] Figure 13 This is a schematic diagram illustrating the swing angle of the measuring rod involved in the example of this disclosure. Detailed Implementation

[0046] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments filled in by those of ordinary skill in the art without creative effort are within the scope of protection of this disclosure.

[0047] It should be noted that the terms "first," "second," "third," and "fourth," etc., in the specification, claims, and accompanying drawings of this disclosure are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses. In the following description, the same reference numerals are used for the same components, and repeated descriptions are omitted. Additionally, the accompanying drawings are merely schematic diagrams, and the scale of the dimensions of the components or the shape of the components may differ from the actual figures.

[0048] In this disclosure, unless otherwise expressly specified and limited, the term "connection" shall be interpreted broadly, for example, "connection" may be a fixed connection, a detachable connection, or an integral part; it may be a direct connection or an indirect connection through an intermediate medium.

[0049] The constant measuring force device provided in this disclosure is applicable to contact profilometers (which can be simply referred to as profilometers), and can provide a relatively constant measuring force to the probe of the profilometer. The constant measuring force device provided in this disclosure can also be called a measuring force adjustment device, a measuring force control device, a measuring force control system, a constant measuring force device, etc. The constant measuring force device provided in this disclosure can also be applied to other types of measuring instruments. This disclosure uses a profilometer as an example to illustrate the constant measuring force device.

[0050] It should be noted that the constant force measuring device provided in this disclosure can provide a relatively constant measuring force. This relatively constant measuring force is a measuring force that can meet the measurement requirements, and it is not required that the measuring force must remain absolutely constant during the measurement process.

[0051] In some examples, a profilometer can be a measuring instrument used to measure the surface profile and shape of an object being measured. A profilometer can also be called a stylus-type profilometer, surface profile measuring instrument, or surface topography measuring device. In some examples, the object being measured can be a high-precision component such as a long shaft, cylinder, curved surface part, lead screw, or thread.

[0052] To better illustrate the profilometer and constant force measuring device involved in this disclosure, this disclosure defines the X-axis, Y-axis and Z-axis, and defines a three-dimensional coordinate system based on the X-axis, Y-axis and Z-axis.

[0053] The X, Y, and Z axes can be perpendicular to each other. The X-axis can be parallel to the direction in which the probe slides along the surface of the object being measured. The Z-axis can be vertical, meaning it can be perpendicular to both the X and Y axes. Similarly, the Y-axis can be perpendicular to both the X and Z axes. It should be noted that movement or sliding along the X-axis refers to reciprocating motion along both directions of the X-axis, and similarly, movement or sliding along the Z-axis refers to reciprocating motion along both directions of the Z-axis.

[0054] In this disclosure, a first direction and a second direction are defined, wherein the first direction may be parallel to the X-axis and the second direction may be parallel to the Z-axis.

[0055] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same reference numerals are used for the same components, and repeated descriptions are omitted. Furthermore, the drawings are merely schematic diagrams, and the proportions of the components or the shapes of the components may differ from actual figures.

[0056] Figure 1 This is a schematic diagram illustrating the measuring force F1 involved in the example of this disclosure.

[0057] In this disclosure, during the measurement process, the probe 121 of the profilometer 10 slides on the surface of the object being measured 20, see [reference]. Figure 1 When the probe 121 pushes against the object 20 being measured, a contact force F is generated acting on the object 20. The direction of the contact force F varies depending on the surface morphology of the object 20. For ease of analysis and study, the vertical component of the contact force F is usually defined as the measuring force F1. As described in the background art, the measuring force F1 is an important factor affecting the quality of contact between the probe 121 and the object 20 during the measurement process.

[0058] Figure 2A This is a schematic diagram illustrating the profilometer 10 involved in the example of this disclosure. Figure 2B This is a block diagram illustrating the structure of the profilometer 10 involved in the example of this disclosure.

[0059] See in some examples Figure 2A The profilometer 10 may include a guide rail assembly 11, which can guide the movement of the measuring component 12 of the profilometer 10. In some examples, the guide rail assembly 11 can guide the measuring component 12 of the profilometer 10 to move along the X-axis direction.

[0060] In some examples, the guide rail assembly 11 may include a first guide rail 112 and a first slider 111 that can slide along the first guide rail 112. Thus, the first slider 111 and the first guide rail 112 can form a first sliding pair, so that the first slider 111 can slide along the first guide rail 112.

[0061] In some examples, the length direction of the first guide rail 112 may be extended along a first direction. In some examples, the profilometer 10 may include a stage 13, on which the object to be measured 20 may be fixed by a clamp 15.

[0062] In some examples, the measuring component 12 may include a probe 121 (see Figure 2A In some examples, the measuring component 12 can be fixedly connected to the first slider 111 via the connector 16. Thus, the first slider 111 can drive the probe 121 to slide along the first guide rail 112 in a first direction, thereby driving the probe 121 to slide along the surface of the object being measured 20.

[0063] In some examples, connector 16 can be fixedly connected to the first slider 111 and the measuring assembly 12 respectively by bolts.

[0064] In some examples, the profilometer 10 may include a column 14, which may be vertically disposed on the stage 13 along a second direction. A second guide rail 141 and a second slider 142 forming a second sliding pair with the second guide rail 141 may be disposed on the column 14. In some examples, the second slider 142 may slide along the second guide rail 141 in the second direction.

[0065] In some examples, the first guide rail 112 can be fixedly connected to the second slider 142. In this case, when the second slider 142 slides on the second guide rail 141, it can drive the first guide rail 112 to slide in the second direction, and thus drive the probe 121 to move in the second direction through the first slider 111, thereby changing the position of the probe 121 in the second direction according to the size of the object being measured 20.

[0066] See in some examples Figure 2B The profilometer 10 may include a drive mechanism 17. In some examples, the drive mechanism 17 may drive a first slider 111 to slide along a first direction on a first guide rail 112. In some examples, the drive mechanism 17 may drive a second slider 142 to slide along a second direction on a second guide rail 141.

[0067] In some examples, the profilometer 10 may include a displacement sensor 18 (see [reference]). Figure 2BIn some examples, displacement sensor 18 can measure the displacement and angle generated by probe 121 when measuring the surface profile of object 20. In some examples, displacement sensor 18 can be a grating sensor. In this case, by using a grating sensor, an electrical signal characterizing the displacement generated by probe 121 when measuring the surface profile of object 20 can be obtained with high accuracy and high resolution.

[0068] In some examples, the measuring component 12 may include a constant force measuring device 122 (see [reference]). Figure 2A The constant measuring force device 122 can control the measuring force acting on the object 20 generated by the probe 121 contacting the object 20. Specifically, when the probe 121 slides along the first direction on the surface of the object 20, the constant measuring force device 122 can apply a constant measuring force F1 to the probe 121 to act on the object 20. In this case, on the one hand, a suitable measuring force F1 can be selected according to the material of the object 20, which can reduce the possibility of the probe 121 scratching the object 20; on the other hand, during the measurement process, it is beneficial to maintain a relatively constant measuring force F1, thereby reducing the jumping of the probe 121 when it contacts the surface of the object 20. As a result, the probe 121 can slide smoothly along the first direction on the surface of the object 20 to obtain more accurate contour information.

[0069] Figure 3A This is a schematic diagram showing the engagement of the measuring component 12 with the first slider 111 as described in this disclosure example. Figure 3B This is a static schematic diagram of the constant force measuring device 122 involved in the example of this disclosure. Figure 3C This is a schematic diagram illustrating the dynamics of the constant force measuring device 122 involved in the example of this disclosure. Figure 4 This is a schematic diagram illustrating the support mechanism 1222 involved in the example of this disclosure.

[0070] See in some examples Figure 3A The constant force measuring device 122 may include a measuring rod 1221, and the measuring needle 121 may be fixedly mounted on the measuring rod 1221.

[0071] See in some examples Figure 3A and Figure 3B The constant force measuring device 122 may include a support mechanism 1222. A measuring rod 1221 is rotatably mounted on the support mechanism 1222, and when the measuring rod 1221 rotates, it can drive the probe 121 to contact the object being measured 20. In this case, during the measurement process, when the probe 121 slides along the first direction on the surface of the object being measured 20, it can oscillate in the second direction according to the undulations of the surface of the object being measured 20 (see...). Figure 3CThus, the displacement sensor 18 can obtain the surface contour parameters of the object under test 20 by measuring the displacement of the probe 121 in the second direction.

[0072] See in some examples Figure 3A The constant measuring force device 122 may include a magnetic control device 1223. The magnetic control device 1223 may be used to apply a relatively constant first magnetic force F3 (described later) to the measuring rod 1221, and may be transmitted through the measuring rod 1221 to the probe 121 so that the probe 121 contacts the object 20 to be measured with a relatively constant measuring force F1.

[0073] In some examples, the magnetic control device 1223 may include a magnet 12231, a magnetic conductor 12232, and at least one coil 12233 (described later) wound on the magnetic conductor 12232. In this case, when a constant current is input to the at least one coil 12233 wound on the magnetic conductor 12232, it is advantageous to apply a relatively constant first magnetic force F3 to the magnet 12231. The first magnetic force F3 can then be transmitted to the probe 121 through the probe rod 1221. By adjusting the input current of the coil 12233, it is advantageous to obtain a relatively constant measuring force F1 for the probe 121 based on the material of the object being measured 20, so as to facilitate contact with the object being measured 20.

[0074] In some examples, the magnetic control device 1223 may also include a control module 12234. In this case, the control module 12234 is able to output a variable current to at least one coil 12233, thereby enabling the probe 121 to obtain a more constant measuring force F1 based on the material of the object 20 being measured, so as to facilitate contact with the object 20 being measured.

[0075] See in some examples Figure 3A The magnetic control device 1223 may include a housing 12235. In some examples, the housing 12235 may be an electromagnetic shield. In this case, the electromagnetic shield provides electromagnetic protection, reducing interference from external electromagnetic fields to the interior of the shield, thereby enabling a more accurate first magnetic force F3, and consequently a more accurate measuring force F1. Simultaneously, the electromagnetic shield also reduces interference and magnetization of the magnetic field within it to external equipment.

[0076] See in some examples Figure 3A The housing 12235 can be fixedly connected to the connector 16. In some examples, the support mechanism 1222 can be fixedly connected to the housing 12235. In some examples, the magnetic conductor 12232 can be fixedly connected to the housing 12235.

[0077] See in some examples Figure 3CThe magnet 12231 can be fixedly mounted on the measuring rod 1221. The measuring rod 1221 can be rotatably mounted on the support mechanism 1222 and can drive the magnet 12231 to move along the preset motion path J when the measuring rod 1221 rotates.

[0078] In some examples, the magnetic conductor 12232 can be fixedly disposed relative to the support mechanism 1222. In some examples, the magnetic conductor 12232 can be fixedly connected to the housing 12235, while the support mechanism 1222 can also be fixedly connected to the housing 12235. In this case, the magnetic conductor 12232 can be fixedly disposed relative to the support mechanism 1222, thereby allowing the measuring rod 1221 to drive the magnet 12231 to swing relative to the magnetic conductor 12232.

[0079] In some examples, the magnetic conductor 12232 may also be referred to as a magnetic yoke, and the magnetic conductor 12232 may be a soft magnetic conductor. In this case, the magnetic conductor 12232 is made of a material with high magnetic conductivity or permeability to magnetic fields, which enables the magnetic conductor 12232 to have high permeability, that is, high magnetic permeability. Thus, under the action of a magnetic field, the magnetic conductor 12232 can effectively concentrate and guide the magnetic field lines 122313 (described later), guide the magnetic field to the desired location, and the magnetic field can form a closed magnetic loop inside the magnetic conductor 12232.

[0080] In some examples, the magnetic conductor 12232 can be configured such that the magnetic field generated by the magnet 12231 forms a magnetic circuit (i.e., a magnetic loop) inside the magnetic conductor 12232, and a coil 12233 can be wound around the magnetic conductor 12232. In this case, during the oscillation of the magnet 12231 with the measuring rod 1221, the magnetic field generated by the magnet 12231 can pass through the conductor of the coil 12233 and enter the magnetic conductor 12232 to form a closed magnetic circuit. Furthermore, the magnetic conductor 12232 can guide the magnetic field, reducing the number of times the magnetic field passes through the coil 12233. When the coil 12233 is energized, the conductor through which the magnetic field passes can generate a controllable Ampere force F2 within the magnetic field of the magnet 12231, and this Ampere force F2 interacts with the coil 12233. The current applied is related to the energizing current value, and the magnet 12231 can receive a reaction force from the Ampere force F2 (which can be called the first magnetic force F3). The first magnetic force F3 can be transmitted to the probe 121 through the measuring rod 1221. Therefore, by controlling the energizing current value of the coil 12233, the Ampere force F2 can be controlled more precisely, which in turn controls the first magnetic force F3, and further controls the measuring force F1. Thus, during the measurement process, by inputting a constant current value to the coil 12233, the constant measuring force device 122 can obtain a relatively constant measuring force F1. The Ampere force F2 and the first magnetic force F3 mentioned above will be described in detail later.

[0081] In some examples, the coil 12233 wound around the magnetic conductor 12232 can form a predetermined region covering the predetermined movement path J (described later) of the magnet 12231. In this case, since the coil 12233 wound around the magnetic conductor 12232 forms a predetermined region covering the predetermined movement path J of the magnet 12231, in other words, during the oscillation of the magnet 12231 with the measuring rod 1221, the magnetic field generated by the magnet 12231 can almost entirely pass through the conductor of the coil 12233. Therefore, during the oscillation of the magnet 12231 with the measuring rod 1221, the magnetic field strength passing through the conductor of the coil 12233 is almost constant, which is conducive to generating a more constant Ampere force F2, and further conducive to obtaining a more constant measuring force F1.

[0082] See in some examples Figure 4 The support mechanism 1222 may include a support base 12221, a support bearing 12222, and a support shaft 12223. The support shaft 12223 may be sleeved within the support bearing 12222, and the support bearing 12222 may be fixedly connected to the support base 12221. The axis D1 of the support shaft 12223 may overlap with the axis D2 of the support bearing 12222. In this configuration, with the support base 12221 fixed, the support bearing 12222 allows the support shaft 12223 to rotate only within the support bearing 12222, meaning the support bearing 12222 can only rotate about the axis D1 of the support shaft 12223.

[0083] In this disclosure, the axis D1 of the support shaft 12223 and the axis D2 of the support bearing 12222 can be parallel to the Y-axis direction.

[0084] See in some examples Figure 4The measuring rod 1221 can be fixedly connected to the support shaft 12223, and the axis G1 of the measuring rod 1221 is orthogonal to the axis D1 of the support shaft 12223. The point where the axis G1 of the measuring rod 1221 intersects the axis D1 of the support shaft 12223 can be the rotation center P, where the axis G1 of the measuring rod 1221 can be the geometric center line of the measuring rod 1221. In this case, with the support 12221 fixed, the probe 1221 can and can only swing in the first rotational plane with the rotation center P as the center point. In other words, the probe 1221 can only swing in a two-dimensional plane (i.e., the first rotational plane), where the first rotational plane is parallel to the plane formed by the X-axis and the Z-axis. Thus, during the measurement process, when the probe 121 slides along the first direction on the surface of the object being measured 20, the probe 121 can be restricted to swinging only in the first rotational plane, that is, only in a two-dimensional plane. This reduces the movement of the probe 121 in the Y-axis direction, thereby enabling the probe 121 to move smoothly along the first direction on the surface of the object being measured 20 to obtain accurate contour information.

[0085] In this disclosure, the axis G1 of the measuring rod 1221 can refer to the axis passing through the geometric center and the center of mass of the measuring rod 1221.

[0086] In some examples, the control module 12234 can be configured to control the force generated by the coil 12233 acting on the magnet 12231 according to the material of the object under test 20, thereby controlling the measuring force F1 of the probe 121 on the probe rod 1221 acting on the object under test 20. In this case, the required measuring force F1 can be determined based on the material of the object being measured 20. For example, if the material of the object being measured 20 is relatively soft, a smaller measuring force F1 is selected. Then, the control module 12234 outputs a current corresponding to the measuring force F1 to the coil 12233, thereby applying a first magnetic force F3 to the magnet 12231 and transmitting it to the probe 121 through the probe rod 1221. Thus, during the measurement process, based on the material of the object being measured 20, the control module 12234 can output a constant current to the coil 12233 to obtain a more constant and required measuring force F1. This facilitates obtaining a more constant measuring force F1 during the measurement process and reduces the occurrence of scratches on the object being measured 20 by the probe 121 and the jumping of the probe 121.

[0087] In some examples, the power supply for the control module 12234 can be an adjustable DC power supply, which can output a preset current value.

[0088] Figure 5A This is a schematic diagram illustrating a first embodiment of the magnetic control device 1223 according to the examples of this disclosure. Figure 5A yes Figure 3BView of section line AA in the middle. Figure 5B A perspective schematic diagram of a first embodiment of the magnetic control device 1223 involved in this disclosure is shown. Figure 5C This is a schematic diagram showing the magnetic circuit of the magnetic control device 1223 according to the example of this disclosure, which employs a magnetic conductor 12232. Figure 5D This is a schematic diagram illustrating the force analysis of the magnet 12231 in the first embodiment of the present disclosure. Figure 5E This is a schematic diagram showing the magnetic control device 1223 of the present disclosure example, which does not employ magnetic field lines 122313 of magnetic conductor 12232. Figure 5F This is a schematic diagram showing the magnetic conductor 12232 involved in the example of this disclosure, excluding the magnetic field lines of the second part 122322. Figure 5G This is a schematic diagram showing that, in the first embodiment of the present disclosure, the coil 12233 is not tightly wound on the magnetic conductor 12232.

[0089] See in some examples Figure 5A The magnet 12231 may include a first magnetic pole 122311 and a second magnetic pole 122312.

[0090] In some examples, the first magnetic pole 122311 can be the North Pole, and the second magnetic pole 122312 can be the South Pole.

[0091] In this disclosure, the polarity of the first magnetic pole 122311 and the second magnetic pole 122312 is not limited. For ease of explanation, this disclosure will use the example of the first magnetic pole 122311 being the North Pole and the second magnetic pole 122312 being the South Pole.

[0092] See in some examples Figure 5A and Figure 5B The magnetic conductor 12232 may include a first part 122321, a third part 122323, and a second part 122322 connected in sequence. In this case, the first part 122321, the third part 122323, and the second part 122322 are connected end to end in series to form a magnetic circuit that guides and concentrates the magnetic field.

[0093] In some examples, the magnet 12231 may be located within the space formed by the first part 122321, the second part 122322, and the third part 122323. In this case, the magnet 12231 can oscillate along a preset motion path J in the first rotational surface within the space formed by the first part 122321, the second part 122322, and the third part 122323. This allows the magnet 12231 to have ample space for movement, which in turn allows the probe 121 to achieve a larger oscillation amplitude, and consequently, allows the probe 121 to achieve a larger measurement range, thus enabling the profilometer 10 to achieve a larger measurement range.

[0094] See in some examples Figure 5A The first part 122321 may have a first inner surface M1 adjacent to the magnet 12231, and the second part 122322 may have a second inner surface M2 adjacent to the magnet 12231. In this case, the magnetic field generated by the magnet 12231 can form a magnetic circuit through the first part 122321, the third part 122323, and the second part 122322. Specifically, see [link to documentation]. Figure 5C Taking the first magnetic pole 122311 of magnet 12231 as the north pole and the second magnetic pole 122312 as the south pole as an example, the magnetic field lines 122313 can originate from the first magnetic pole 122311 and enter the interior of the magnetic conductor 12232, sequentially returning to the second magnetic pole 122312 along the first part 122321, the third part 122323, and the second part 122322. Therefore, during the swinging process of the measuring rod 1221, when the measuring rod 1221 is in any position, it is beneficial to ensure that the magnetic field generated by the magnet 12231 forms a closed magnetic circuit in the magnetic conductor 12232 as much as possible, thus enabling the magnetic field lines 122313 to follow the specified path as much as possible. The magnetic circuit returns to the second magnetic pole 122312. Therefore, when the magnet 12231 is in different swinging positions, the number of times the magnetic field generated by the magnet 12231 passes through the coil 12233 is reduced. This allows for more accurate measurement of the force F1. Assuming the magnetic conductor 12232 only includes the first part 122321 and the third part 122323 connected in sequence, and excludes the second part 122322, during the swinging process of the measuring rod 1221, the magnet 12231 may be far from the third part 122323, resulting in the magnetic field of the magnet 12231 potentially passing through the coil 12233 multiple times. Figure 5F As shown in the case of magnetic field lines 122313, the accuracy of the first magnetic force F3 obtained is relatively low, which may adversely affect the accuracy of the measured force F1. For a detailed analysis, please refer to [the following section / reference]. Figure 5E Introduction.

[0095] In some examples, coil 12233 may include a first coil 122331 wound around the first portion 122321, the first coil 122331 may form a first conductor surface T1 on the first inner surface M1 (see...). Figure 5B In practical applications, the conductors of coil 12233 are closely spaced without gaps. Figure 5B This is for illustrative purposes only and does not represent actual application scenarios.

[0096] See in some examples Figure 5A The conductor of the first coil 122331 extends on the first inner surface M1 in a direction that can be perpendicular to the direction of the measuring force F1, i.e., parallel to the first direction. In this case, the wire Q in the first conductor surface T1 (see...) Figure 5C For example, see [example]. Figure 5D When the coil 12233 is energized, taking the current direction on the conductor Q on the first conductor surface T1 as being perpendicular and away from the paper as an example, the energized conductor Q, under the influence of the magnetic field of the magnet 12231, can generate an Ampere force F2 parallel to the second direction according to the "left-hand rule" in electromagnetism. That is, the direction of the Ampere force F2 is vertical. Consequently, the Ampere force F2 can generate a reaction force on the magnet 12231, namely the first magnetic force F3. The direction of the first magnetic force F3 is also vertical. During the swinging process of the measuring rod 1221, the first magnetic force F3 can have a component perpendicular to the measuring rod 1221. Thus, the first magnetic force F3 can be transmitted to the measuring needle 121 through the measuring rod 1221. Therefore, it is convenient to control the Ampere force F2 more precisely by controlling the current input to the coil 12233, and then to control the first magnetic force F3 more precisely. Furthermore, it is convenient to control the measuring force F1 more precisely and obtain the measuring force F1 more accurately.

[0097] See in some examples Figure 5A The magnetic axis C1 of the magnetic poles of magnet 12231 can be perpendicular to the first inner surface M1; in other words, the magnetic axis C1 can be perpendicular to the first conductor surface T1. In this case, since the magnetic axis C1 is perpendicular to the first conductor surface T1, the magnetic field strength of magnet 12231 on the first conductor surface T1 can remain almost constant during the oscillation of magnet 12231 with measuring rod 1221. Therefore, the magnetic field strength of the conductor passing through the first coil 122331 is almost constant during the oscillation of magnet 12231 with measuring rod 1221. This facilitates the generation of a relatively constant Ampere force F2, and further facilitates the acquisition of a relatively constant measuring force F1.

[0098] In this disclosure, the magnetic axis C1 where the magnetic poles of the magnet 12231 are located can be the geometric center line of the magnet 12231 along the Y direction.

[0099] In some examples, the plane containing the preset motion path J (i.e., the first rotation surface) can be parallel to the first conductor surface T1. In this case, during the measurement process, when the measuring rod 1221 swings, the number of conductors on the first conductor surface T1 covered by the magnetic field generated by the magnet 12231 remains approximately constant. Therefore, when the measuring rod 1221 is in different swing positions, the conductors on the first conductor surface T1 can obtain a relatively constant Ampere force F2, and thus the constant measuring force device 122 can obtain a relatively constant measuring force F1.

[0100] Figure 5E A schematic diagram of the distribution of magnetic field lines 122313 is shown without the use of magnetic conductor 12232. Figure 5F The diagram illustrates the possible existence of magnetic field lines 122313 when the magnetic conductor 12232 includes only the first part 122321 and the third part 122323 connected in sequence, but excludes the second part 122322.

[0101] See Figure 5E and Figure 5F Without using the magnetic conductor 12232 or without including the second part 122322, the magnetic field line 122313 may pass through the first conductor surface T1 twice, and the direction of the magnetic field line 122313 passing through the first conductor surface T1 each time is opposite. As a result, the Ampere force F2 on the conductor on the first conductor surface T1 may cancel each other out, making it impossible to control the measuring force F1 more accurately.

[0102] In some examples, the coil 12233 is wound around the magnetic conductor 12232, and the gap between the first conductor surface T1 and the first inner surface M1 may not exceed a preset value. In this case, it is required that the coil 12233 be tightly wound around the magnetic conductor 12232, which is beneficial for the magnetic field generated by the magnet 12231 to enter the magnetic conductor 12232, and the magnetic field lines 122313b can return from the first magnetic pole 122311 to the second magnetic pole 122312 through the magnetic circuit inside the magnetic conductor 12232. Assuming the gap between coil 12233 and magnetic conductor 12232 is too large, some magnetic field lines 122313a may leak from the gap between coil 12233 and magnetic conductor 12232, forming a magnetic loop along the air path. Consequently, magnetic field lines 122313a may cross the first conductor surface T1 twice, and the directions of these multiple crossings may be opposite. Therefore, the Ampere force F2 on the conductor on the first conductor surface T1 may cancel each other out (see...). Figure 5G ).

[0103] Figure 6 This is a schematic diagram illustrating a second embodiment of the magnetic control device 1223 involved in the examples of this disclosure.

[0104] In some examples, coil 12233 may also include a second coil 122332 disposed in the second part 122322 (see Figure 6 The second coil 122332 can form a second conductor surface T2 on the second inner surface M2. In this case, the magnet 12231 can be subjected to a first magnetic force F3 by the combined action of the first coil 122331 and the second coil 122332. As a result, a larger first magnetic force F3 can be obtained, thereby improving the response speed of the probe 1221 to the first magnetic force F3. This allows the probe 121 to obtain a constant measuring force F1 as quickly as possible, thereby improving the measuring speed of the profilometer 10.

[0105] In some examples, when the control module 12234 inputs a preset current to the first coil 122331 and the second coil 122332, the direction of the current flowing through the first conductor surface T1 can be the same as the direction of the current flowing through the second conductor surface T2. In this case, the Ampere force F2 on the conductor on the first conductor surface T1 and the Ampere force F2 on the conductor on the second conductor surface T2 can be in the same direction. As a result, the first magnetic force F3 generated by the magnetic fields acting on the first conductor surface T1 and the second conductor surface T2 on the magnet 12231 is also in the same direction. This prevents the first magnetic force F3 from canceling each other out, which is beneficial for controlling the measuring force F1.

[0106] In some examples, the direction of the current flowing through the first conductor surface T1 and the direction of the current flowing through the second conductor surface T2 can be adjusted using the first terminal 122333 and the second terminal 122334. Specifically, the first coil 122331 and the second coil 122332 can be connected in series or in parallel using the first terminal 122333 and the second terminal 122334 to ensure that the direction of the current flowing through the first conductor surface T1 is the same as the direction of the current flowing through the second conductor surface T2.

[0107] In some examples, the preset motion path J can be parallel to the second conductor surface T2. In this case, during the measurement process, when the measuring rod 1221 swings, the number of conductors on the second conductor surface T2 covered by the magnetic field generated by the magnet 12231 remains approximately constant. As a result, a relatively constant Ampere force F2 can be obtained, and consequently, a relatively constant measuring force F1 can be obtained.

[0108] In some examples, the conductor of the second coil 122332 extends on the second inner surface M2 in a direction perpendicular to the direction of the measuring force F1, i.e., parallel to the first direction. Therefore, during the oscillation of the measuring rod 1221, the first magnetic force F3 generated by the second coil 122332 can have a component perpendicular to the measuring rod 1221. Consequently, the first magnetic force F3 can be transmitted to the measuring needle 121 through the measuring rod 1221. This allows for more precise control of the Ampere force F2 by controlling the current input to the coil 12233, and thus more precise control of the first magnetic force F3. Furthermore, it facilitates more precise control of the measuring force F1, enabling more accurate acquisition of the measuring force F1.

[0109] In some examples, the magnetic axis C1 containing the magnetic poles of magnet 12231 can be perpendicular to the second inner surface M2 (see [reference]). Figure 5A In other words, the magnetic axis C1 can be perpendicular to the second conductor surface T2. In this case, since the magnetic axis C1 is perpendicular to the second conductor surface T2, the magnetic field strength of the magnet 12231 on the second conductor surface T2 can remain almost constant during the oscillation of the magnet 12231 with the measuring rod 1221. Therefore, the magnetic field strength of the conductor passing through the second coil 122332 is almost constant during the oscillation of the magnet 12231 with the measuring rod 1221. This is beneficial for generating a more constant Ampere force F2, and further beneficial for obtaining a more constant measuring force F1.

[0110] In some examples, the magnetic axis C1 of the magnetic poles of magnet 12231 can be perpendicular to the first inner surface M1 and the second inner surface M2. In other words, the magnetic axis C1 can be perpendicular to the first conductor surface T1 and the second conductor surface T2. In this case, during the oscillation of magnet 12231 with measuring rod 1221, the magnetic field strength of magnet 12231 on the first conductor surface T1 and the second conductor surface T2 can remain almost constant. Therefore, during the oscillation of magnet 12231 with measuring rod 1221, the magnetic field strength of the conductors passing through the first coil 122331 and the second coil 12232 is almost constant, which is conducive to generating a more constant Ampere force F2, and further conducive to obtaining a more constant measuring force F1.

[0111] In some examples, the distance from the geometric center O of magnet 12231 to the first conductor surface T1 and the second conductor surface T2 can be the same. In other words, magnet 12231 can be located exactly in the middle of the first conductor surface T1 and the second conductor surface T2. In this case, when the first coil 122331 and the second coil 122332 are energized, the first part 122321 and the second part 122322 of the magnetic conductor 12232 are magnetized, forming a magnetic force parallel to the Y-axis direction (i.e., the direction of the magnetic axis C1 of magnet 12231) on magnet 12231. Since magnet 12231 is located exactly in the middle of the first conductor surface T1 and the second conductor surface T2, the magnetic force parallel to the Y-axis direction formed on magnet 12231 can be kept in balance.

[0112] In some examples, the distance from the first magnetic pole 122311 of the magnet 12231 to the first conductor surface T1 may not exceed a first preset value. In this case, the magnetic field near the first magnetic pole 122311 is strong and uniformly distributed. The first magnetic pole 122311 is as close as possible to the first conductor surface T1, which can obtain a more constant measuring force F1 more quickly, thereby improving the response speed of the probe 121 to obtain a constant measuring force F1, and thus improving the measurement speed of the profilometer 10.

[0113] In some examples, the distance between the second magnetic pole 122312 of the magnet 12231 and the second conductor surface T2 may not exceed a second preset value. In this case, the magnetic field near the second magnetic pole 122312 is strong and uniformly distributed. The second magnetic pole 122312 is as close as possible to the second conductor surface T2, which can obtain a more constant measuring force F1 more quickly, thereby improving the response speed of the probe 121 to obtain a constant measuring force F1, and thus improving the measurement speed of the profilometer 10.

[0114] In some examples, the first preset value can be any value between 1 mm and 10 mm. For example, the first preset value can be 1 mm, 3 mm, 5 mm, 7 mm, 9 mm, or 10 mm.

[0115] In some examples, the second preset value can be any value between 1 mm and 10 mm. For example, the second preset value can be 1 mm, 3 mm, 5 mm, 7 mm, 9 mm, or 10 mm.

[0116] In some examples, the first preset value can be equal to the second preset value.

[0117] Figure 7A This is a schematic diagram illustrating a third embodiment of the magnetic control device 1223 involved in the examples of this disclosure. Figure 7B This is a schematic diagram showing the magnetic field lines 122313 in a third embodiment of the magnetic control device 1223 involved in the present disclosure.

[0118] See in some examples Figure 7A The magnetic conductor 12232 may further include a fourth part 122324 connecting the first part 122321 and the second part 122322. The first part 122321, the third part 122323, the second part 122322, and the fourth part 122324 can be connected end-to-end in sequence. In this case, the first part 122321, the third part 122323, the second part 122322, and the fourth part 122324 can be connected end-to-end in series to form a closed magnetic conductor 12232. Thus, the magnetic field lines 122313 can form a closed magnetic circuit in the magnetic conductor 12232 (see...). Figure 7B ),and Figure 5A or Figure 6 Compared to the proposed solution, Figure 7A The proposed solution can help reduce leakage of the magnetic field line 122313, thereby reducing the risk of magnetization of other peripheral components caused by the magnetic field generated by the magnet 12231 and the magnetic field generated after the coil 12233 is energized.

[0119] Figure 8A This is a schematic diagram illustrating a fourth embodiment of the magnetic control device 1223 involved in the examples of this disclosure. Figure 8B This is a perspective schematic diagram showing a fourth embodiment of the magnetic control device 1223 involved in the examples of this disclosure.

[0120] See in some examples Figure 8A and Figure 8B As shown, the magnetic conductor 12232 may include a first part 122321, a third part 122323, a second part 122322 and a fourth part 122324 connected in series from end to end. The first coil 122331 may be wound around the first part 122321 and the second coil 122332 may be wound around the second part 122322.

[0121] Figure 9A This is a perspective view showing a fifth embodiment of the magnetic control device 1223 involved in the examples of this disclosure. Figure 9B This is a side view showing a fifth embodiment of the magnetic control device 1223 involved in the examples of this disclosure.

[0122] See in some examples Figure 9A and Figure 9B The first inner surface M1 and the second inner surface M2 can be fan-shaped to match the preset motion path J. In this case, since the preset motion path J that the measuring rod 1221 drives the magnet 12231 to swing is centered on a rotation center P (see... Figure 4The fan-shaped arc centered on the first inner surface M1 and the second inner surface M2 are set as fan-shaped rings that match the preset motion path J, which can reduce the volume of the magnetic conductor 12232. This can save the material of the magnetic conductor 12232 and the volume of the magnetic force control device 1223, thereby reducing the volume of the profiler 10 and increasing the portability of the profiler 10.

[0123] In some examples, the center of rotation P can be set (see...) Figure 4 The projection of the rotation center P onto the first conductor surface T1 is designated as the first projection center P1. In some examples, the projection of the rotation center P onto the second conductor surface T2 can be designated as the second projection center P2.

[0124] See in some examples Figure 9A The first part 122321 can be a circular ring plate, and the center of the circular ring plate can be the first projection center P1. In this case, the first part 122321 can be a circular ring plate with a regular shape, which is beneficial for processing and manufacturing and for winding the coil 12233 on the first part 122321.

[0125] In some examples, the second part 122322 can be a circular ring plate, and the center of the circular ring plate can be the second projection center P2. In this case, the second part 122322 can be a regularly shaped circular ring plate, which is beneficial for processing and manufacturing and for winding the coil 12233 on the second part 122322.

[0126] See in some examples Figure 9A The first coil 122331 extends through the first projection center P1 along the direction of its extension on the first inner surface M1. In other words, the first coil 122331 can be wound around the first portion 122321 of the magnetic conductor 12232 with the first projection center P1 as the center to form a fan-shaped first conductor surface T1. In this case, when the first coil 122331 is energized, the conductor on the first conductor surface T1 is subjected to the magnetic field of the magnet 12231, and the direction of the Ampere force F2 generated is tangent to the preset movement path J of the magnet 12231. In other words, the first magnetic force F3 generated by the Ampere force F2 acting on the magnet 12231 is perpendicular to the measuring rod 1221. That is, the first magnetic force F3 has almost no component in other directions except for the component perpendicular to the measuring rod 1221. Therefore, the first magnetic force F3 can be transmitted to the measuring needle 121 more accurately to obtain a more accurate measuring force F1.

[0127] In some examples, the extension direction of the second coil 122332 on the second inner surface M2 can pass through the second projection center P2. In other words, the second coil 122332 can be wound around the second portion 122322 of the magnetic conductor 12232 with the second projection center P2 as the center to form a fan-shaped second conductor surface T2. Thus, as described above, the first magnetic force F3 generated by the second coil 122332 can be transmitted to the probe 121 more accurately to obtain a more accurate measuring force F1.

[0128] Figure 10 This is a schematic diagram showing the positional relationship between the magnetic control device 1223 and the support mechanism 1222 involved in the example of this disclosure.

[0129] In some examples, the probe 121, along with the magnet 12231 and the magnetic conductor 12232, may be located on one side of the support mechanism 1222 (see [reference]). Figure 10 In this case, there is more free space on the other side of the support mechanism 1222, which can be used to place other related equipment of the profilometer 10, thereby reducing the size of the constant force measuring device 122, which in turn reduces the size of the profilometer 10 and improves its portability.

[0130] See in some examples Figure 3A The probe 121, magnet 12231, and magnetic conductor 12232 can be located on both sides of the support mechanism 1222. This allows for improved sensitivity in controlling the measuring force F1 by utilizing the lever mechanism formed by the probe 1221. In other words, by applying a small initial magnetic force F3 to the magnet 12231, a larger measuring force F1 can be obtained through the lever mechanism of the probe 1221.

[0131] Figure 11A This is a schematic diagram showing the center of mass H of the magnet 12231 involved in the example of this disclosure located on the axis G1 of the measuring rod 1221. Figure 11B This is a schematic diagram showing the force analysis of the magnet 12231 whose center of mass H is not located on the axis G1 of the measuring rod 1221, as described in the example of this disclosure.

[0132] In some examples, magnet 12231 can be fixed to the upper part of probe 1221 (see [reference]). Figure 3A or Figure 10 (or the lower part corresponding to the upper part)

[0133] See in some examples Figure 11A The center of mass H of magnet 12231 can be located on the axis G1 of measuring rod 1221. In other words, magnet 12231 can be located at the midpoint of the radial direction of measuring rod 1221 perpendicular to its length. See [reference needed] for this case. Figure 11B When the center of mass H of magnet 12231 is not located on the axis G1 of measuring rod 1221 (i.e., magnet 12231 is fixed to the upper part of measuring rod 1221 or the lower part corresponding to the upper part), the torque of rotating measuring rod 1221 relative to the rotation center P is actually the torque generated by the component F31 of the first magnetic force F3 acting on magnet 12231. Therefore, the measurement force F1 obtained based on the first magnetic force F3 will have an error. When the center of mass H of magnet 12231 is located on the axis G1 of measuring rod 1221, the torque of rotating measuring rod 1221 relative to the rotation center P can be the torque generated by the entire first magnetic force F3, thereby reducing the ineffective effect of the first magnetic force F3 and enabling more precise control of the measurement force F1.

[0134] In some examples, the center of mass H of magnet 12231 can coincide with the geometric center O of magnet 12231. In this case, magnet 12231 has a symmetrical and uniform shape and a uniform mass distribution, which can help simplify the design of magnetic control device 1223.

[0135] In some examples, magnet 12231 can be made of a hard magnetic material. This allows it to maintain a stable magnetic field over a long period of time.

[0136] In some examples, the measuring rod 1221 can be made of a non-magnetic material. This reduces the occurrence of magnetization, thereby minimizing interference with the magnet 12231 and enabling more accurate measurement of the force F1.

[0137] Figure 12 This is a flowchart illustrating the calibration method of the constant force measuring device 122 involved in the example of this disclosure. Figure 13 This is a schematic diagram showing the swing angle A of the measuring rod 1221 involved in the example of this disclosure.

[0138] In actual operation, due to the weight of the measuring rod 1221 itself and the friction of the supporting mechanism 1222, the force on the measuring rod 1221 varies when it is at different swing angles A, thus affecting the accuracy of the measured force F1. A more accurate measured force F1 can be obtained by calibrating the constant force measuring device 122.

[0139] See in some examples Figure 12 The calibration method for the constant force measuring device 122 may include: coupling the force sensor to the probe 121 (step S100); swinging the probe 1221 at different swing angles A (see... Figure 13When the probe 121 is subjected to a preset measuring force F1, the compensation current value input to the control module 12234 is obtained (step S200); the swing angle A of the probe 1221 is correlated with the corresponding current value (step S300). In this case, through this calibration method, it is possible to obtain the compensation required for the measuring force F1 when the probe 1221 is at different swing angles A. Specifically, during the measurement process, when the preset measuring force F1 is already known, when the probe 1221 swings, the displacement sensor 18 (see...) Figure 3A The control module 12234 can measure the swing angle A of the measuring rod 1221. Based on the swing angle A of the measuring rod 1221, the control module 12234 can output a compensation current value to the coil 12233 to compensate for the measuring force F1. This reduces the influence of interference on the measuring force F1 during the swing of the measuring rod 1221, thereby obtaining a more accurate measuring force F1.

[0140] In some examples, in step S100, the force sensor can be coupled to the probe 121. In this case, the preset measurement force F1 can be easily obtained by detection in the calibration method.

[0141] In some examples, in step S200, see Figure 13 The probe 1221 can be swung at different swing angles A, for example, the swing angle A of the probe 1221 can be between 1 degree and 10 degrees. When the control module 12234 outputs current to the coil 12233, so that the probe 121 has a preset measuring force F1, the current value corresponding to the preset measuring force F1 input to the control module 12234 can be obtained (which can be called the calibration current value). In this case, the input current value of the preset measuring force F1 that needs to be obtained before calibration is set to the uncalibrated current value, so that the compensation current value can be obtained by comparing the calibration current value and the uncalibrated current value.

[0142] In this disclosure, the uncalibrated current value can be the current value required to obtain the preset measuring force F1 determined by the profilometer 10 before calibration. Typically, the uncalibrated current value is obtained through preliminary design calculations.

[0143] In some examples, in step S300, the swing angle A of the probe 1221 can be correlated with the corresponding compensation current value. Therefore, in the actual measurement process, the uncalibrated current value required to obtain the preset measuring force F1 is first determined. The uncalibrated current value is then output to the coil 12233 via the control module 12234, causing the probe 121 to contact the object 20 with the initially obtained measuring force F1. During the swing of the probe 1221, the swing angle A of the probe 1221 can be measured by the displacement sensor 18. Based on the relationship between the swing angle A determined by the calibration method and the compensation current value, the compensation current value can be output to the coil 12233 via the control module 12234, thereby obtaining a more accurate measuring force F1.

[0144] In summary, in this disclosure, by fixing the probe 121 and the magnet 12231 to the probe rod 1221, during the measurement process, the probe rod 1221 can rotate on the support mechanism 1222, thereby driving the magnet 12231 to move along the preset motion path J, and simultaneously driving the probe 121 to contact the object being measured 20. During the swinging motion of the magnet 12231 with the probe rod 1221, the magnetic field generated by the magnet 12231 can pass through the conductor of the coil 12233 and enter the magnetic conductor 12232 to form a closed magnetic circuit. Furthermore, the magnetic conductor 12232 can guide the magnetic field, reducing the number of times the magnetic field passes through the coil 12233. When the coil 12233 is energized by the control module, the conductor through which the magnetic field passes in the magnetic field of the magnet 12231 can generate a controllable Ampere force F2. This Ampere force F2 is related to the current value of the coil 12233. Simultaneously, the magnet 12231 can be subjected to... The reaction force of the Ampere force F2 (which can be called the first magnetic force F3) can be transmitted to the probe 121 through the probe rod 1221. Thus, the current of the adjusting coil 12233 can be controlled by the control module 12234 to control the Ampere force F2 more precisely, thereby controlling the first magnetic force F3, and further controlling the measuring force F1. In addition, since the coil 12233 wound on the magnetic conductor 12232 forms a preset area covering the preset movement path J of the magnet 12231, in other words, during the swing of the magnet 12231 with the probe rod 1221, the magnetic field generated by the magnet 12231 can almost completely pass through the conductor of the coil 12233. Therefore, during the swing of the magnet 12231 with the probe rod 1221, the magnetic field strength passing through the conductor of the coil 12233 is almost constant, which is conducive to generating a more constant Ampere force F2, and further conducive to obtaining a more constant measuring force F1. Therefore, during the measurement process, based on the material of the object under test 20, the control module 12234 can output the required constant current to the coil 12233 to obtain a more required and constant measuring force F1. This makes it easier to obtain a more constant measuring force F2 during the measurement process and reduces the occurrence of scratches on the object under test 20 and the jumping of the probe 121.

[0145] While the present disclosure has been specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the foregoing description does not limit the present disclosure in any way. Those skilled in the art can make modifications and alterations to the present disclosure as needed without departing from its essential spirit and scope, and all such modifications and alterations shall fall within the scope of the present disclosure.

Claims

1. A force measurement control system, wherein the force measurement control system controls the force acting on the object being measured generated by the probe contacting the object being measured, characterized in that, The device includes a measuring rod, a support mechanism, a magnet, a magnetic conductor, at least one coil wound around the magnetic conductor, and a control module. The probe and the magnet are fixedly mounted on the measuring rod. The measuring rod is rotatably mounted on the support mechanism and, when the measuring rod rotates, drives the magnet to move along a preset motion path, simultaneously causing the probe to contact the object being measured. The magnetic conductor is fixed relative to the support mechanism and configured such that the magnetic field generated by the magnet forms a magnetic circuit within the magnetic conductor. The coil wound around the magnetic conductor forms a preset area covering the preset motion path of the magnet. The control module is configured to control the force generated by the coil acting on the magnet according to the material of the object being measured, thereby controlling the measuring force exerted by the probe on the measuring rod on the object being measured. The magnetic conductor includes a first part, a third part, and a second part connected in sequence. The magnet is located in the space formed by the first part, the second part, and the third part. The first part has a first inner surface close to the magnet, and the second part has a second inner surface close to the magnet. The coil includes a first coil wound on the first part, and the first coil forms a first conductor surface on the first inner surface. The coil also includes a second coil disposed on the second part, and the second coil forms a second conductor surface on the second inner surface.

2. The force measurement control system according to claim 1, characterized in that, The first inner surface and the second inner surface are fan-shaped rings that match the preset motion path.

3. The force measurement control system according to claim 2, characterized in that, The support mechanism includes a support base, a support bearing, and a support shaft. The support shaft is sleeved in the support bearing, the support bearing is fixedly connected to the support base, and the axis of the support shaft overlaps with the axis of the support bearing. The measuring rod is fixedly connected to the support shaft, and the axis of the measuring rod is orthogonal to the axis of the support shaft. The point where the axis of the measuring rod intersects the axis of the support shaft is the center of rotation, wherein the axis of the measuring rod is the geometric center line of the measuring rod.

4. The force measurement control system according to claim 3, characterized in that, Let the projection of the rotation center onto the first conductor surface be the first projection center; the first part is a circular annular plate, and the center of the first part is the first projection center.

5. The force measurement control system according to claim 3, characterized in that, Let the projection of the rotation center onto the second conductor surface be the second projection center; the second part is a circular ring plate, and the center of the second part is the second projection center.

6. The force measurement control system according to claim 4, characterized in that, The first coil extends through the first projection center in the direction of its extension on the first inner surface.

7. The force measurement control system according to claim 5, characterized in that, The second coil extends through the second projection center on the second inner surface.

8. The force measurement control system according to any one of claims 1 to 7, characterized in that, The measuring rod is made of non-magnetic material.

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