Method of processing a gas distributor and tooling for a gas distributor

Abstract

The application belongs to the technical field of semiconductor, and discloses a processing method of a gas distributor and a tool for processing the gas distributor. The processing method of the gas distributor comprises the following steps: S10, installing a supporting piece on a machine tool clamp to ensure that the planeness of the upper surface of the supporting piece is within a first preset range; S20, detachably installing a raw material on the supporting piece to ensure that the first side of the raw material is attached to the upper surface of the supporting piece; S30, mechanically processing the second side of the raw material to ensure that the planeness of the second side is within a second preset range; S40, detaching the raw material from the supporting piece, turning over the raw material and installing the raw material on the supporting piece to ensure that the second side is attached to the upper surface of the supporting piece; and S50, mechanically processing the first side to ensure that the planeness of the first side is within the second preset range and the parallelism between the first side and the second side is within a third preset range. The processing method of the gas distributor and the tool for processing the gas distributor can ensure that the planeness and the parallelism of the two sides of the gas distributor meet the high-precision requirements and secondary correction is not needed.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method for processing a gas distributor and a tooling for the gas distributor. Background Technology

[0002] Chemical vapor deposition (CVD) atomic layer deposition is a crucial step in semiconductor fabrication of thin-film devices. Traditional CVD equipment typically includes a chemical gas distributor. The reacting chemicals escape from the distributor and ultimately deposit onto the semiconductor substrate in the reaction zone. Uniform composition, uniform thickness, and steep interfaces are fundamental requirements for thin-film growth. Improving the uniformity of thin-film growth is a core task in the continuous improvement of CVD equipment, and refining the gas distributor's fabrication process is a primary method for enhancing uniformity. The gas distributor usually contains hundreds or even thousands of small holes of equal diameter. Even minute differences in hole diameter, as well as the flatness and parallelism of the components, directly affect the uniformity of the deposited layer thickness. Specifically, the flatness of the side facing the coating chamber affects the sealing performance of the gas distributor. Good sealing ensures that gas escapes uniformly from the small holes; poor sealing allows gas to escape from the gaps between the gas distributor and the coating chamber, resulting in uneven coating thickness. The flatness and parallelism of the side facing the semiconductor substrate also affect the distance to the substrate; even extremely small differences can cause variations in coating thickness.

[0003] In other words, the flatness and parallelism requirements of the gas distributor are extremely high. The thickest part of the gas distributor is 5mm to 10mm, and the thinnest part (that is, the part with several small holes) is only about 1.5mm thick. In current processing technology, the raw material is placed in the machine tool fixture and clamped. During processing, the raw material gradually becomes thinner, and the clamping force inevitably causes slight deformation of the gas distributor. The gas distributor needs to be processed afterward to correct its flatness and parallelism. On the one hand, the gas distributor is deformed during the processing stage. On the other hand, the correction steps are cumbersome, and the correction effect cannot be guaranteed to be ideal, resulting in a high probability of scrap.

[0004] Therefore, there is an urgent need to design a processing method for a gas distributor and a tooling for the gas distributor to solve the above problems. Summary of the Invention

[0005] One objective of this invention is to provide a method for processing a gas distributor that ensures that the flatness and parallelism of both sides of the processed gas distributor meet high precision requirements without the need for secondary correction.

[0006] Another objective of this invention is to provide a tooling for a gas distributor that ensures the machining accuracy of the gas distributor without requiring secondary correction of the flatness and parallelism of the gas distributor.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] The processing methods for gas distributors include:

[0009] S10: Install a support on the machine tool fixture, ensuring that the flatness of the upper surface of the support is within a first preset range;

[0010] S20: The wool fabric is detachably installed on the support member, ensuring that the first side of the wool fabric is in contact with the upper surface of the support member.

[0011] S30: The second side of the above-mentioned raw material is machined to ensure that the flatness of the second side is within a second preset range;

[0012] S40: Remove the above-mentioned wool from the above-mentioned support member, flip it over and install the above-mentioned wool onto the above-mentioned support member, ensuring that the above-mentioned second side is in contact with the upper surface of the above-mentioned support member;

[0013] S50: The first side is machined to ensure that the flatness of the first side is within the second preset range and that the parallelism between the first side and the second side is within the third preset range, thereby forming a gas distributor.

[0014] As an optional solution, the aforementioned S50 includes:

[0015] S51: Machining is performed on the large surface of the first side mentioned above;

[0016] S52: Machining grooves on the aforementioned large surface;

[0017] S53: Ensure that the flatness of the large surface and the flatness of the groove are both within the second preset range, ensure that the parallelism between the large surface and the second side is within the third preset range, and ensure that the parallelism between the bottom surface of the groove and the second side is within the third preset range.

[0018] As an optional solution, the above S53 includes:

[0019] S531: Measure the flatness of the large surface, the flatness of the groove, the parallelism between the large surface and the second side, and the parallelism between the bottom surface of the groove and the second side. If all the above measurement parameters fall within their respective preset ranges, the gas distributor is completed. If any of the above measurement parameters exceeds the tolerance, execute S532.

[0020] S532: For planes with out-of-tolerance flatness or parallelism, reprocess them until all the measurement parameters in S531 above fall within their respective preset ranges.

[0021] As an optional solution, the above S30 includes:

[0022] S31: Perform machining on the second side and measure the flatness of the second side. If the flatness of the second side is within the second preset range, then execute S40. If the flatness of the second side is outside the second preset range, then execute S32.

[0023] S32: For the second side where the flatness exceeds the tolerance, perform machining again on the second side, measure the flatness of the second side, until the flatness of the second side is within the second preset range, and then execute S40.

[0024] As an optional solution, the processing method of the gas distributor also includes S60 following S50, where S60 is:

[0025] Remove the gas distributor and place it in the subsequent fixture, then machine multiple air passage holes on the bottom surface of the groove.

[0026] As an alternative, when machining the second side mentioned above, rough turning is performed first, with the spindle speed corresponding to the machine tool fixture ranging from 250 r / min to 350 r / min and the turning feed rate ranging from 25 mm / min to 35 mm / min, leaving a margin of 0.05 mm, and then finish turning is performed.

[0027] When machining the above-mentioned large surfaces, rough turning should be performed first. The spindle speed corresponding to the machine tool fixture is in the range of 250r / min to 350r / min, and the turning feed is 25mm / min to 35mm / min, leaving a margin of 0.05mm. Then, finish turning should be performed.

[0028] When machining the above-mentioned grooves, the spindle speed of the machine tool fixture is in the range of 250 r / min to 350 r / min, and the turning feed rate is 4 mm / min to 7 mm / min.

[0029] As an optional solution, the processing method of the gas distributor further includes S70, wherein S70 is located between S20 and S30, or between S30 and S40, and S70 is:

[0030] The outer periphery of the aforementioned raw material is machined to ensure that the outer diameter of the raw material is within the fourth preset range.

[0031] The tooling for the gas distributor is used in the above-described gas distributor processing method. The tooling for the gas distributor includes:

[0032] The support member includes a connected support portion and a connecting portion, wherein the connecting portion protrudes from the lower surface of the connecting portion.

[0033] The machine tool fixture has several jaws, and the jaws can jointly hold the connecting part.

[0034] As an optional solution, the tooling of the gas distributor also includes a locking member, which passes through the support member along the axial direction and connects to the gas distributor to fix the gas distributor to the support member.

[0035] As an optional solution, multiple locking components are evenly distributed circumferentially. The locking components are screws, and the gas distributor has multiple threaded holes that are connected to the screws one by one.

[0036] The beneficial effects of this invention are as follows:

[0037] This invention provides a method for processing a gas distributor. A support component is set in a machine tool fixture. When the flatness of the upper surface of the support component is within a first preset range (high flatness grade), a blank is then mounted on the upper surface of the support component. The second side of the blank is processed, ensuring its flatness. After the flatness of the second side is within the second preset range and meets the process standards, the blank is flipped over and processed on the first side, with the second side as the processing reference. After the first side is processed and its flatness and parallelism with the second side are both qualified, the gas distributor is removed. Throughout the process, the blank does not contact the machine tool fixture, avoiding the clamping force of the machine tool fixture from being applied to the gas distributor. This ensures that the flatness and parallelism of the gas distributor are not affected after being removed from the support component, guaranteeing the final processing accuracy of the gas distributor. Furthermore, no secondary correction is required, saving processing steps.

[0038] The present invention also provides a tooling for a gas distributor. By setting up a support member, the machine tool fixture can be prevented from directly clamping the raw material, thereby preventing the machine tool fixture from generating clamping force on the circumference of the finished gas distributor and causing deformation of the gas distributor. At the same time, the machining accuracy of the gas distributor can be improved. Attached Figure Description

[0039] Figure 1 This is a flowchart of the processing method of the gas distributor provided in the embodiment of the present invention;

[0040] Figure 2 This is an assembly diagram of the gas distributor and the tooling for the gas distributor provided in this embodiment of the invention. Figure 1 ;

[0041] Figure 3This is an assembly diagram of the gas distributor and the tooling for the gas distributor provided in this embodiment of the invention. Figure 2 ;

[0042] Figure 4 yes Figure 3 Cross-sectional view at point AA;

[0043] Figure 5 This is an assembly diagram of the gas distributor and the tooling for the gas distributor provided in this embodiment of the invention. Figure 3 .

[0044] In the picture:

[0045] 10. Machine tool fixtures; 11. Clamping jaws;

[0046] 20. Supporting component; 21. Supporting part; 22. Connecting part;

[0047] 30. Locking component; 31. Tightening part;

[0048] 200, Gas distributor; 210, Second side; 220, First side; 221, Large surface; 222, Groove; 2221, First groove; 2222, Second groove; 230, Threaded hole. Detailed Implementation

[0049] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0050] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0051] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0052] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0053] This embodiment provides a method for processing a gas distributor, applied to the processing of a gas distributor 200. See [link to documentation]. Figures 1-4 The processing method of the gas distributor includes:

[0054] S10: Install the support 20 on the machine tool fixture 10, and ensure that the flatness of the upper surface of the support 20 is within a first preset range;

[0055] S20: The wool fabric is detachably installed on the support member 20, ensuring that the first side 220 of the wool fabric is in contact with the upper surface of the support member 20;

[0056] S30: The second side 210 of the raw material is machined to ensure that the flatness of the second side 210 is within a second preset range;

[0057] S40: Remove the fabric from the support 20, flip it over and install the fabric onto the support 20, ensuring that the second side 210 fits against the upper surface of the support 20.

[0058] S50: The first side 220 is machined to ensure that the flatness of the first side 220 is within a second preset range and to ensure that the parallelism between the first side 220 and the second side 210 is within a third preset range, thereby forming a gas distributor 200.

[0059] The above-mentioned gas distributor processing method involves setting a support member 20 on the machine tool fixture 10. When the flatness of the upper surface of the support member 20 is within a first preset range and its flatness grade is high, a blank is then installed on the upper surface of the support member 20. The second side 210 of the blank is processed to ensure that the flatness of the second side 210 meets the process standard after the flatness of the second side 210 is within the second preset range. The blank is then flipped over and processed on the first side 220, with the second side 210 as the processing reference. After the first side 220 is processed and its flatness and parallelism with the second side 210 are qualified, the gas distributor 200 is removed. Throughout the process, the blank does not contact the machine tool fixture 10, avoiding the clamping force of the machine tool fixture 10 from being applied to the gas distributor 200. This ensures that the flatness and parallelism of the gas distributor 200 are not affected after it is removed from the support member 20, guaranteeing the final processing accuracy of the gas distributor 200. No secondary correction is required, saving process steps.

[0060] It should be noted that the states shown in the figure are all after the second side 210 has been machined, with the first side 220 facing upwards.

[0061] Specifically, such as Figure 1 , Figure 2 and Figure 4 As shown, S50 includes:

[0062] S51: Machining the large surface 221 of the first side 220;

[0063] S52: Machining groove 222 on large surface 221;

[0064] S53: Ensure that the flatness of the large surface 221 and the flatness of the groove 222 are both within the second preset range, ensure that the parallelism between the large surface 221 and the second side 210 is within the third preset range, and ensure that the parallelism between the bottom surface of the groove 222 and the second side 210 is within the third preset range.

[0065] With the above setup, when processing the large surface 221, the entire plane of the first side 220 is processed first, and then the groove 222 is processed. The groove 222 is thinner, and small holes are made on the bottom surface of the groove 222. After processing the groove 222, the large surface 221 is left with only an annular area, which is convex. This convexity (i.e., the large surface 221 indicated in the figure) is sealed to the inner wall of the coating chamber. In other words, the flatness of the large surface 221 is qualified, which can ensure good sealing with the inner wall of the coating chamber and prevent gas from entering through the convexity and the coating chamber. The leakage from the gaps between the interior walls causes uneven coating thickness. At the same time, during coating, the groove 222 serves as a temporary storage area for gas, which can hold a certain amount of gas. The gas gathers from the groove 222 and then overflows from the small holes to perform coating. The flatness of the bottom surface of the groove 222 and the parallelism between the bottom surface of the groove 222 and the second side 210 meet the process requirements, ensuring that the distance between the small holes and the part to be coated is the same when the gas falls from the gas distributor 200 (the closer the distance, the thicker the coating, and the farther the distance, the thinner the coating), thereby ensuring uniform coating thickness.

[0066] In this embodiment, as Figure 2 As shown, the groove 222 is divided into a first groove 2221 and a second groove 2222. The first groove 2221 is an annular groove and the second groove 2222 is a circular groove. That is to say, after the groove 222 is processed, the large surface 221 forms two rings of protrusions. The above setting can increase the strength of the groove 222 and avoid the situation where only one groove 222 is set, the plane is too large, and the middle of the bottom surface of the groove 222 is prone to bulging or collapse.

[0067] In other embodiments, the groove 222 may be a single circular groove, which is not limited here.

[0068] Specifically, such as Figure 1 As shown, S30 includes:

[0069] S31: Perform machining on the second side 210 and measure the flatness of the second side 210. If the flatness of the second side 210 is within the second preset range, then execute S40. If the flatness of the second side 210 is outside the second preset range, then execute S32.

[0070] S32: For the position where the flatness of the second side 210 is out of tolerance, the second side 210 is machined again, and the flatness of the second side 210 is measured until the flatness of the second side 210 is within the second preset range, and then S40 is executed.

[0071] The above settings ensure that the flatness of the second side 210 is within the second preset range, thereby ensuring the accuracy of subsequent processing of the first side 220, which is based on the second side 210. Field use has shown that in most cases, the flatness of the second side 210 can reach the standard after one processing cycle, requiring at most two processing cycles, greatly reducing the processing difficulty of the gas distributor 200.

[0072] Furthermore, such as Figure 1 As shown, S53 includes:

[0073] S531: Measure the flatness of the large surface 221, the flatness of the groove 222, the parallelism between the large surface 221 and the second side 210, and the parallelism between the bottom surface of the groove 222 and the second side 210. If all the above measurement parameters fall within their respective preset ranges, the gas distributor 200 is completed. If any of the above measurement parameters exceeds the tolerance, execute S532.

[0074] S532: For planes with out-of-tolerance flatness or parallelism, reprocess them until all the measurement parameters in S531 fall within their respective preset ranges.

[0075] By setting the above, it can be ensured that the flatness of the large surface 221, the flatness of the groove 222, the parallelism between the large surface 221 and the second side 210, and the parallelism between the bottom surface of the groove 222 and the second side 210 fall within their respective preset ranges, thus ensuring that each measurement parameter meets the process requirements.

[0076] Based on field use, the processing method of the gas distributor of this embodiment can meet the process requirements in most cases in one operation, including the flatness of the large surface 221, the flatness of the groove 222, the parallelism between the large surface 221 and the second side 210, and the parallelism between the bottom surface of the groove 222 and the second side 210. At most, it only requires two processing operations, which greatly reduces the processing difficulty of the gas distributor 200.

[0077] It should be noted that in this embodiment, both the second and third preset ranges are 0mm to 0.05mm, meaning the tolerance ranges for flatness and parallelism are very small. The second and third preset ranges can be determined according to customer requirements; for different customers, the upper limit of the tolerance may be 0.08mm or 0.1mm, which is not limited here. More preferably, the upper limit of the first preset range is less than the upper limit of the second preset range and less than the upper limit of the third preset range. This setting results in a higher flatness requirement for the upper surface of the support member 20, which serves as the basic plane for subsequent processing of the second side 210 and the first side 220, leading to a smaller cumulative error.

[0078] Optionally, the flatness and parallelism measurements described above can be performed using a dial indicator or a coordinate measuring machine, which are existing technologies and will not be elaborated upon here.

[0079] Preferably, such as Figure 1 As shown, the processing method of the gas distributor also includes S60 after S50. S60 involves: removing the gas distributor 200 and placing it into a subsequent fixture, and processing multiple air passage holes on the bottom surface of the groove 222. Through the above settings, the processing of air passage holes (i.e., the small holes mentioned above) is achieved. The structure of the fixture and the structure for processing the air passage holes are relatively common in the prior art and will not be described in detail here.

[0080] Preferably, when machining the second side 210, rough turning is performed first, with the spindle speed corresponding to the machine tool fixture 10 ranging from 250 r / min to 350 r / min, preferably 300 r / min, and the turning feed rate ranging from 25 mm / min to 35 mm / min, preferably 305 mm / min, leaving a margin of 0.05 mm, and then finish turning is performed.

[0081] When machining the large surface 221, rough turning is performed first. The spindle speed corresponding to the machine tool fixture 10 is in the range of 250r / min to 350r / min, preferably 300r / min. The turning feed rate is 25mm / min to 35mm / min, preferably 305mm / min. A margin of 0.05mm is left before finishing turning.

[0082] When machining the groove 222, the spindle speed of the machine tool fixture 10 is in the range of 250 r / min to 350 r / min, preferably 300 r / min, and the turning feed is 4 mm / min to 7 mm / min, preferably 5 mm / min. The feed is reduced accordingly when machining the groove 222 to avoid machining deformation on the thin bottom surface of the groove 222.

[0083] Preferably, the processing method of the gas distributor further includes S70, which is located between S20 and S30, or between S30 and S40. S70 is to machine the outer periphery of the raw material to ensure that the outer diameter of the raw material is within a fourth preset range, so as to ensure the outer periphery size of the gas distributor 200.

[0084] This embodiment also provides a tooling for a gas distributor, used in the above-described gas distributor processing method, such as... Figures 2-5As shown, the tooling for the gas distributor includes a support member 20 and a machine tool fixture 10. The support member 20 includes a connected support portion 21 and a connecting portion 22, with the connecting portion 22 protruding from the lower surface of the support portion 21. The machine tool fixture 10 has several jaws 11, which together can clamp the connecting portion 22. By providing the support member 20, the machine tool fixture 10 can be prevented from directly clamping the raw material, thereby preventing the machine tool fixture 10 from generating a clamping force on the circumference of the finished gas distributor 200, which could cause deformation of the gas distributor 200. At the same time, the machining accuracy of the gas distributor 200 can be improved.

[0085] Optionally, such as Figure 5 As shown, the machine tool fixture 10 is provided with three grippers 11. The three grippers 11 are driven by a driving member (not shown) to move closer or further apart to clamp the connecting part 22. The upper sides of the three grippers 11 are fitted against the lower side of the supporting part 21. That is to say, the entire supporting part 20 is subjected to both radial clamping force and axial supporting force, making the force on the machine tool fixture 10 more balanced and stable. In other embodiments, the number of grippers 11 may be four, five or more, which is not limited here.

[0086] Optionally, the tooling for the gas distributor also includes a locking member 30, which passes through the support member 20 along the axial direction and connects to the gas distributor 200 to fix the gas distributor 200 to the support member 20. With this configuration, the locking member 30 locks the blank material axially onto the upper surface of the support portion 21, ensuring that the blank material is not subjected to force in the circumferential and radial directions. After processing, the gas distributor 200 can be removed without any change in its flatness and parallelism, and the flatness and parallelism of the product do not require correction or calibration.

[0087] Preferably, such as Figure 3 and Figure 4 As shown, multiple locking elements 30 are evenly distributed circumferentially. Each locking element 30 is a screw. The gas distributor 200 has multiple threaded holes 230, each corresponding to a screw. With this setup, before installing the blank, threaded holes 230 corresponding to the through holes (not shown in the cross-sectional view) on the support 20 are machined on the blank. When installing the blank, the operator simply inserts the screw through the through hole and threadedly connects it to the corresponding threaded hole 230 from bottom to top. It should be noted that the end of the screw is located inside the threaded hole 230, ensuring no interference between the screw and the machining of the large surface 221. Furthermore, even after the second side 210 is machined and flipped over, changing the direction of the threaded holes 230, the screw can still be threadedly connected to the threaded hole 230 from bottom to top, providing high flexibility.

[0088] Preferably, the screw is provided with a screw-tightening part 31, which facilitates the operator to screw the screw.

[0089] In this embodiment, a total of twelve threaded holes 230 are provided, with six on the inner ring protrusion and six on the outer ring protrusion. In other embodiments, the number of threaded holes 230 can be flexibly set according to the size of the gas distributor 200 product, and is not limited here.

[0090] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A method for processing a gas distributor, characterized in that, include: S10: Install the support (20) on the machine tool fixture (10) and ensure that the flatness of the upper surface of the support (20) is within a first preset range; S20: The wool fabric is detachably installed on the support member (20) to ensure that the first side (220) of the wool fabric is in contact with the upper surface of the support member (20); S30: The second side (210) of the fabric is machined to ensure that the flatness of the second side (210) is within a second preset range; S40: Remove the wool from the support (20), flip it over and install the wool onto the support (20), ensuring that the second side (210) is in contact with the upper surface of the support (20); S50: The first side (220) is machined to ensure that the flatness of the first side (220) is within the second preset range, and to ensure that the parallelism between the first side (220) and the second side (210) is within the third preset range, thereby forming a gas distributor (200); The S50 includes: S51: Machining is performed on the large surface (221) of the first side (220); S52: Machining grooves (222) on the large surface (221); S53: Ensure that the flatness of the large surface (221) and the flatness of the groove (222) are both within the second preset range, ensure that the parallelism between the large surface (221) and the second side (210) is within the third preset range, and ensure that the parallelism between the bottom surface of the groove (222) and the second side (210) is within the third preset range. S53 includes: S531: Measure the flatness of the large surface (221), the flatness of the groove (222), the parallelism between the large surface (221) and the second side (210), and the parallelism between the bottom surface of the groove (222) and the second side (210). If all the above measured parameters fall within their respective preset ranges, the gas distributor (200) is completed. If any of the above measured parameters exceeds the tolerance, then execute S532. S532: For planes with out-of-tolerance flatness or parallelism, reprocess them until all the measurement parameters in S531 fall within their respective preset ranges; The processing method of the gas distributor further includes S60, which is located after S50, and S60 is: Remove the gas distributor (200) and place it in the subsequent fixture, and machine multiple air passage holes on the bottom surface of the groove (222); When machining the second side (210), rough turning is performed first. The spindle speed range corresponding to the machine tool fixture (10) is 250r / min to 350r / min, and the turning feed is 25mm / min to 35mm / min. A margin of 0.05mm is left before finishing turning. When machining the large surface (221), rough turning is performed first. The spindle speed of the machine tool fixture (10) is in the range of 250r / min to 350r / min, and the turning feed is 25mm / min to 35mm / min. A margin of 0.05mm is left before finishing turning. When machining the groove (222), the spindle speed of the machine tool fixture (10) is in the range of 250r / min to 350r / min, and the turning feed is 4mm / min to 7mm / min.

2. The processing method of the gas distributor according to claim 1, characterized in that, S30 includes: S31: Perform machining on the second side (210), measure the flatness of the second side (210), if the flatness of the second side (210) is within the second preset range, then execute S40; if the flatness of the second side (210) is outside the second preset range, then execute S32. S32: For the position where the flatness of the second side (210) is out of tolerance, the second side (210) is machined again, and the flatness of the second side (210) is measured until the flatness of the second side (210) is within the second preset range, and then S40 is executed.

3. The processing method of the gas distributor according to any one of claims 1-2, characterized in that, The processing method of the gas distributor further includes S70, wherein S70 is located between S20 and S30, or S70 is located between S30 and S40, and S70 is: The outer periphery of the wool is machined to ensure that the outer diameter of the wool is within a fourth preset range.

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