High-precision six-degree-of-freedom compliant motion platform with motion decoupling

Abstract

This invention discloses a high-precision six-degree-of-freedom compliant motion platform with motion decoupling, comprising a three-axis decoupled rotation module and a three-axis decoupled translation module. The three-axis decoupled rotation module is fixedly connected to the three-axis decoupled translation module, forming a series configuration. The Rx and Ry rotational degree-of-freedom actuation modules of the three-axis decoupled rotation module, along with a large rotational Hooke hinge, are connected to the inner ring of the rotational output platform. An Rz piezoelectric ceramic is mounted on the inner ring to achieve the synthesis and output of the three-axis rotational displacements. The three-axis decoupled rotation module is connected in series with the three-axis decoupled translation module, forming a hybrid six-degree-of-freedom configuration. This invention's platform, through a fully decoupled six-degree-of-freedom design, decouples attitude adjustment, ensuring that the two do not interfere with each other, thereby achieving high-precision control of attitude and position. The platform features compactness, low coupling, low parasitic motion, and high dynamic performance, meeting the practical applications in aerospace and precision optics.

Description

Technical Field

[0001] This invention relates to a high-precision six-degree-of-freedom compliant motion platform with motion decoupling, belonging to the field of precision positioning platform design. Background Technology

[0002] There are two types of construction methods for precision positioning platforms: one is a positioning platform built using ball screws, servo motors and rigid mechanisms and rigid transmission, also known as a rigid positioning table. Its disadvantages include limited accuracy, the need for frequent periodic maintenance, and difficulty in building multi-degree-of-freedom parallel positioning platforms. Ball screws and rolling bearings require complex and expensive electrical systems and bulky structures. Air suspension is not suitable for high-precision, high-dynamic and highly compact micro-nano operations.

[0003] Another type is a positioning platform constructed using a compliant mechanism through flexible transmission, also known as a flexible positioning stage or compliant positioning stage. It has advantages such as zero backlash, zero friction, zero wear, zero hysteresis, no lubrication, high precision, high stability and compact structure, which gives the compliant positioning stage a great technological advantage in the field of precision positioning platforms.

[0004] Meanwhile, most six-degree-of-freedom motion platforms based on compliant mechanisms are currently asymmetric and non-decoupled designs. Since compliant hinges often use the parallelogram principle to decouple each axis, the motion coupling between each axis is large, and the parasitic motion in undesired motion (for the translation part, the other three rotational motions are parasitic motions; the same applies to the rotational part) is also large.

[0005] Chinese patent CN113464780B discloses a compliant positioning platform with three degrees of freedom of spatial translation. The structural design is unreasonable and the space utilization is poor, resulting in a bulky structure. The ratio of its workspace to platform volume is small, making it difficult to use in applications with limited space as mentioned above.

[0006] Applications such as synthetic aperture optical zero-echo interferometry often require corresponding three-dimensional positioning platforms with positioning accuracy at the sub-micron or even nanometer level, while also demanding rapid motion performance. Since the platform's accuracy ultimately reflects the combined accuracy of the actuators and the motion transmission performance of the positioning platform mechanism, existing six-degree-of-freedom motion platforms based on compliant mechanisms suffer from the aforementioned shortcomings, resulting in insufficient accuracy or dynamic performance to meet these requirements. Therefore, they have not been widely adopted in practical applications and remain largely in the laboratory research and development stage. Meanwhile, Chinese patent CN107984443B discloses a cross-curved beam six-degree-of-freedom parallel compliant mechanism, which is a micron-level high-precision six-degree-of-freedom platform, but lacks a light-passing aperture design, hindering light transmission and making it unsuitable for optical applications such as synthetic aperture optical interferometry imaging. Summary of the Invention

[0007] The technical problem solved by this invention is to overcome the shortcomings of the prior art and propose a high-precision six-degree-of-freedom compliant motion platform with motion decoupling. It adopts a fully decoupled six-degree-of-freedom design to decouple the pose adjustment so that the two do not interfere with each other, thereby achieving high-precision control of attitude and position.

[0008] The technical solution of this invention is:

[0009] A high-precision six-degree-of-freedom compliant motion platform with motion decoupling includes a three-axis decoupling rotation module and a three-axis decoupling translation module. The three-axis decoupling rotation module is fixedly connected to the three-axis decoupling translation module to form a series configuration.

[0010] The three-axis decoupled translation module adopts a parallel decoupled configuration, including a base, a ring voice coil motor, an XY intermediate platform, a translation output platform, an x-degree-of-freedom actuation module, a y-degree-of-freedom actuation module, an x-degree-of-freedom guide module, and a y-degree-of-freedom guide module; the stator of the ring voice coil motor is fixed to the base, and the mover output end is connected to the translation output platform;

[0011] One end of both the x-degree-of-freedom actuation module and the y-degree-of-freedom actuation module is connected to and fixed to the base, and the output ends are connected to the XY intermediate platform, providing power sources for the x and y degrees of freedom in the three-axis decoupled translation module, respectively.

[0012] One end of both the x-degree-of-freedom guiding module and the y-degree-of-freedom guiding module is connected to and fixed to the base, and the output ends are connected to the XY intermediate platform. Together with the x-degree-of-freedom actuation module and the y-degree-of-freedom actuation module, they provide symmetrical guidance for the x and y degrees of freedom in the three-axis decoupled translation module.

[0013] Furthermore, the three-axis decoupled rotation module includes a rotation output platform, a large rotational Hooke hinge, an Rz piezoelectric ceramic, an Rz piezoelectric ceramic preload block, an Rx rotational degree-of-freedom actuation module, and an Ry rotational degree-of-freedom actuation module;

[0014] The lower surface of the large rotating Hooke hinge is fixed on the base, and the upper surface is connected to the rotating output platform; the rotating output platform is connected to the Rx rotational degree of freedom actuation module and the Ry rotational degree of freedom actuation module;

[0015] The Rx and Ry rotational degree-of-freedom actuation modules adopt a parallel configuration, with a large rotational Hooke hinge as the axis of rotation. They are installed at 90° intervals in the XY plane to provide rotation centers around Rx and Ry.

[0016] The output ends of the Rx rotational degree of freedom actuation module and the Ry rotational degree of freedom actuation module are both connected to the three-axis decoupled rotation module, and the lower end is connected to the three-axis decoupled translational model. The output displacement is applied to the inner circle of the rotational output platform, so that the rotational output platform generates rotational displacements about the x and y axes respectively.

[0017] Two Rz piezoelectric ceramics are arranged rotationally symmetrically on the rotating output platform. Two Rz piezoelectric ceramic preload blocks respectively tightly bond one Rz piezoelectric ceramic to the rotating output platform as one unit. The output torques of the two Rz piezoelectric ceramics are guided by the flexible hinge on the rotating output platform to generate rotational displacement around the z-axis.

[0018] Furthermore, the rotational output platform provides a connection base for the three rotational degrees of freedom Rx, Ry, and Rz, enabling the motion of the three rotational axes to be transmitted to the rotational output end. The outer ring of the rotational output platform is the output end of the entire platform, connecting the load. By connecting the Rx rotational degree of freedom actuation module, the Ry rotational degree of freedom actuation module, and the large rotational Hooke joint to the inner ring of the rotational output platform, the rotational motion output of the Rx and Ry degrees of freedom is realized. The Rz piezoelectric ceramic is installed on the inner ring to transmit the displacement to the outer ring of the rotational output platform, realizing the synthesis and output of the three-axis rotational displacement.

[0019] Furthermore, the Rx rotational degree of freedom actuation module includes an Rx rhombic amplification mechanism, an Rx piezoelectric ceramic, an Rx piezoelectric ceramic preload block, and an Rx Hooke hinge;

[0020] The Rx piezoelectric ceramic is connected to the Rx rhombic amplification mechanism, and the Rx piezoelectric ceramic preload block tightly binds the Rx piezoelectric ceramic and the Rx rhombic amplification mechanism together; the Rx rhombic amplification mechanism amplifies the output displacement of the Rx piezoelectric ceramic and changes its direction;

[0021] The lower surface of the Rx rhomboid amplification mechanism is connected to the translational output platform, and the upper surface is fixed to the Rx Hooke hinge, which provides a pivot for rotation around the x-axis.

[0022] Furthermore, the base serves as the foundation for the entire six-degree-of-freedom motion platform, providing support, positioning, and fixation. The base protrudes from its outer edge and is designed with threaded fixing holes to provide positioning and fixation for the x-degree-of-freedom actuation module, y-degree-of-freedom actuation module, x-degree-of-freedom guide module, and y-degree-of-freedom guide module. The base uses a thin-walled plate in its inner ring to provide positioning and fixation for the voice coil motor stator. By fixing the above components to the base, the force is transmitted from the base to the translational output platform.

[0023] Furthermore, the x-translational degree-of-freedom actuation module includes an x-piezoelectric ceramic, an x-piezoelectric ceramic preload block, an x-flexible hinge, a connecting block, and an x-rhombic amplification mechanism;

[0024] The x piezoelectric ceramic and the x piezoelectric ceramic preload block are fixedly connected inside the x rhombic amplification mechanism;

[0025] One end of the x-shaped amplification mechanism is fixedly connected to the base, and the output end is fixedly connected to the x-actuated flexible hinge through a connecting block;

[0026] The flexible hinge is fixed at one end to the base and at the other end to the XY intermediate platform.

[0027] The output displacement x of the piezoelectric ceramic is amplified by a rhombic amplification mechanism and converted to a direction perpendicular to the output direction of the piezoelectric ceramic. This displacement is then transmitted to the XY intermediate platform via a connecting block and an x-actuated flexible hinge, thereby applying a driving force F along the x-axis. x The XY intermediate platform generates decoupled motion in the x-direction.

[0028] Furthermore, the four sides of the XY intermediate platform are equipped with Z decoupling mechanisms to guide the voice coil motor and support the translational output platform.

[0029] Furthermore, in the ring voice coil motor, the moving part and the stator of the ring voice coil motor are suspended and do not contact each other; the air gap between the stator and the moving part of the ring voice coil motor provides the stroke for translation in the XY plane; the moving part of the voice coil motor that drives the z-axis motion moves independently and freely in the z-axis direction, without interfering with the translation in the XY plane, thus achieving complete decoupling of the three-axis motion.

[0030] Furthermore, the x-translational degree of freedom guiding module includes an x-flexible hinge, a connecting block, and a positioning block; wherein, one end of the x-flexible hinge is connected to the base through the positioning block, and the other end is connected to the XY intermediate platform.

[0031] Furthermore, the translational output platform adopts a hollow configuration, and the rotating output platform and the rotating Hooke hinge also adopt a hollow configuration, forming a fully penetrating light-transmitting hole from the rotating output platform to the base, thereby increasing the amount of light transmitted.

[0032] The advantages of this invention compared to the prior art are:

[0033] (1) The present invention adopts a six-degree-of-freedom fully decoupled design, in which the rotational degree of freedom and the translational degree of freedom are completely decoupled, thereby eliminating the coupling motion between translation and rotation in principle, thus achieving high motion accuracy.

[0034] (2) The three translational degrees of freedom of this invention adopt a parallel decoupling design, which has high load-bearing capacity, high dynamics and high precision performance.

[0035] (3) The three-axis translational degrees of freedom of this invention adopt a completely symmetrical design in all directions, and the z-axis degree of freedom adopts a floating design. Therefore, the coupling rotation generated during the translation process is very small and can be ignored, thereby effectively improving the rotational motion accuracy of the platform.

[0036] (4) The present invention has a large light-passing aperture, which is beneficial for performing optical tasks in the space environment, such as long-distance observation, imaging, and communication, to flexibly design the optical path and increase the light transmission, thereby achieving clearer and more detailed images and data.

[0037] (5) The present invention uses piezoelectric ceramics and a voice coil motor with a large thrust constant for actuation, which has the characteristics of low heat generation and is suitable for environments with poor heat dissipation conditions such as vacuum. Attached Figure Description

[0038] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0039] Figure 1 This is a schematic diagram of the high-precision six-degree-of-freedom compliant motion platform structure according to an embodiment of the present invention;

[0040] Figure 2 This is a schematic diagram of the three-axis decoupled rotation module structure of the platform in an embodiment of the present invention;

[0041] Figure 3 This is a schematic diagram of the three-axis decoupled translation module structure of the platform in an embodiment of the present invention;

[0042] Figure 4 This is a schematic diagram of the Rx / Ry rotational degree of freedom actuation module structure according to an embodiment of the present invention;

[0043] Figure 5 This is a schematic diagram of the x / y translational degree of freedom actuation module structure according to an embodiment of the present invention;

[0044] Figure 6 This is a schematic diagram of the x / y translational degree of freedom guiding module structure according to an embodiment of the present invention;

[0045] Figure 7 This is a schematic diagram showing the connection relationship of the base and translational degree of freedom parts in an embodiment of the present invention;

[0046] Figure 8 This is a schematic diagram showing the connection relationship between the rotational output platform and the rotational degree-of-freedom components in an embodiment of the present invention;

[0047] Figure 9 This is a schematic diagram illustrating the coordinate system definition in an embodiment of the present invention. Detailed Implementation

[0048] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0049] This invention proposes a high-precision six-DOF compliant motion platform with decoupled motion. The six-DOF decoupled configuration aims to decouple pose adjustment, preventing interference between the two processes and enabling high-precision control of attitude and position. A compliant motion mechanism is used as the transmission mechanism, utilizing the elastic deformation of piezoelectric ceramic materials to transmit motion and force, fundamentally eliminating transmission errors and achieving ultra-high motion resolution.

[0050] The platform includes a three-axis decoupled rotation module 1, a three-axis decoupled translation module 4, an Rx / Ry rotational degree-of-freedom actuation module 2, an x / y translational degree-of-freedom actuation module 5, and an x / y translational degree-of-freedom guiding module 3, such as... Figure 1 As shown, the three-axis decoupled rotation module 1 is stacked and fixed on the three-axis decoupled translation module 4, with a series stroke configuration. The output ends of the two Rx / Ry rotational degree-of-freedom actuator modules 2 are connected to the rotational output platform 9 in the three-axis decoupled rotation module 1, and their lower ends are connected to the translational output platform 21 in the three-axis decoupled translation model 4. Their function is to provide power to the Rx and Ry degrees of freedom in the three-axis decoupled rotation module 1. One end of the two x / y translational degree-of-freedom actuator modules 5 is connected and fixed to the base 17 in the three-axis decoupled translation module 4, and their output ends are connected to the XY intermediate platform 20 in the three-axis decoupled translation module 4, providing power to the x and y degrees of freedom in the three-axis decoupled translation module 4. Two x / y translational degree-of-freedom guiding modules 3 are connected and fixed at one end to the base 17 in the three-axis decoupled translational module 4, and their output ends are connected to the other two sides of the XY intermediate platform 20 in the three-axis decoupled translational module 4. Together with the x / y translational degree-of-freedom actuation module 5, they provide symmetrical guidance for the x and y degrees of freedom in the three-axis decoupled translational module 4. The initial design of this configuration is to meet the requirement that the optical load generally points to the target star first during the interferometric imaging process, and then adjusts the optical path difference for interferometric imaging. That is, it is desirable for the rotation and movement of the platform to be non-interfering, and the translation occurs after the rotation. Therefore, it is required that the translation process (optical path difference adjustment) should not have a coupling effect on the pointing rotation as much as possible.

[0051] Wherein, the x and y degrees of freedom are defined as two mutually perpendicular degrees of freedom in the horizontal direction, and the z degree of freedom is defined as the direction of motion of the voice coil motor in the vertical direction, such as... Figure 9 As shown. Rx and Ry degrees of freedom are defined as the directions of rotation of the rotational output platform about the large rotational Hooke joint; Rz degree of freedom is defined as the direction of rotation of the rotational output platform about the vertical axis.

[0052] (1) Three-axis decoupled rotation module

[0053] Three-axis decoupled rotation module, such as Figure 2 As shown, it includes a rotary output platform 9, a large rotary Hooke hinge 6, an Rz piezoelectric ceramic 7, an Rz piezoelectric ceramic preload block 8, and an Rx / Ry rotational degree-of-freedom actuation module 2. The rotary output platform 9 and the large rotary Hooke hinge 6 adopt a hollow configuration.

[0054] The rotary output platform is the output end of the compliant motion platform, used to connect to the load, such as... Figure 8 As shown. The function of the rotational output platform 9 is twofold: firstly, to provide a connection base for the three rotational degrees of freedom Rx, Ry, and Rz, enabling the motion of the three rotational axes to be transmitted to the rotational output end; secondly, to serve as the carrier of the Rz degree of freedom, upon which the Rz transmission mechanism (four flexible hinges) is directly designed. This integrated design greatly simplifies the mechanism, reduces rotational inertia, and improves the dynamic performance of the system. The outer ring of the rotational output platform 9 is the output end of the entire platform. By connecting the Rx / Ry rotational degree of freedom actuator module 2 and the large rotational Hooke hinge 6 to the inner ring of the rotational output platform 9, the rotational motion output of the Rx and Ry degrees of freedom is realized. Then, the Rz rotational degree of freedom actuator (piezoelectric ceramic) is installed on the inner ring, further transmitting the displacement to the outer ring of the rotational output platform, realizing the synthesis and output of the three-axis rotational displacement. Since the Rz degree of freedom is designed with rotational symmetry through two piezoelectric ceramic actuators, its output is pure torque, ensuring the accuracy of the pure rotational motion of the Rz degree of freedom. This achieves the goal of connecting Rx and Ry in parallel and Rz in series. In addition, the entire rotating part is connected in series on the three-axis translational output platform, forming a six-degree-of-freedom hybrid configuration.

[0055] The Rx and Ry rotational actuation modules adopt a parallel configuration, using a large rotational Hooke hinge 6 as the axis of rotation to provide the rotation center around Rx and Ry, respectively. These modules provide the power source for the Rx and Ry degrees of freedom in the three-axis decoupled rotation module.

[0056] like Figure 4 As shown, the Rx rotational degree of freedom actuation module is for Rx rotational degree of freedom, including Rx rhombic amplification mechanism 10, Rx piezoelectric ceramic 12, Rx piezoelectric ceramic preload block 11, and Rx Hooke hinge 13.

[0057] By installing the same Ry rotational degree-of-freedom actuation module at a 90° angle in the XY plane, a parallel rotational configuration of Rx and Ry is formed.

[0058] The motion principle of the three-axis decoupled rotation module is as follows: A large rotating Hooke hinge 6 provides the rotation axes for the Rx and Ry axes. The displacement output by the Rx / Ry piezoelectric ceramics 12 is amplified and redirected via the Rx / Ry rhomboid amplification mechanism 10, and then applied to the inner ring of the rotation output platform 9 to generate rotational displacement around the x and y axes. Rotation around the z-axis is completed on the rotation output platform 9. Two Rz piezoelectric ceramics 7 are arranged rotationally symmetrically to directly output a torque, which is guided by a flexible hinge on the rotation output platform 9 to generate rotational displacement around the z-axis. This allows for the convergence of rotation along all three axes, thereby eliminating coupled motion and improving pointing accuracy.

[0059] (2) Three-axis decoupled translation module

[0060] The three-axis decoupled translation module 4 adopts a parallel decoupled configuration, thereby improving its stiffness and dynamic performance. Its working principle is as follows: Figure 3 As shown, it includes a base 17, a ring voice coil motor, an XY intermediate platform 20 (with a Z decoupling mechanism on it), a translational output platform 21, an x / y translational degree of freedom actuation module 5, and an x / y translational degree of freedom guide module 3.

[0061] The base 17 serves as the foundation of the entire six-degree-of-freedom motion platform, providing support, positioning, and fixation. To realize the parallel kinematic characteristics of the three-axis decoupled translational modules, the x / y translational degree-of-freedom actuation module 5, the x / y translational degree-of-freedom guide module 3, and the voice coil motor stator 18 are bolted to the base, thereby enabling the transmission of force from the base 17 to the translational output platform 21. Figure 7 As shown, to reduce weight and accommodate different module heights while ensuring the structural strength of the base, the base has protruding outer edges with threaded fixing holes to provide positioning and fixation for the x / y translational degree-of-freedom actuation module 5 and x / y translational degree-of-freedom guide module 3; while the inner ring uses a thin-walled plate to provide positioning and fixation for the voice coil motor stator 18. The stepped bosses on the flange are for positioning the modules.

[0062] The translational output platform 21 adopts a hollow configuration. A circular voice coil motor, serving as the actuator for the z-axis degree of freedom, includes a stator 18 and a mover 19. The stator 18 is fixed to the base 17, while the output end of the mover 19 is connected to the translational output platform 21. The mover 19 and stator 18 are suspended and do not contact each other, reducing coupled motion. The x / y translational degree of freedom actuation module 5 is connected to the base 17 at one end and to the XY intermediate platform 20 at the other. The x / y translational degree of freedom guiding module 3 is connected to the base 17 at one end and to the XY intermediate platform 20 at the other. The four sides of the XY intermediate platform 20 are connected to the Z-decoupling mechanism on the XY intermediate platform 20. The flexible hinges on the XY intermediate platform 20 serve as the transmission mechanism, improving transmission accuracy. The Z-decoupling mechanism provides guidance for the voice coil motor and supports the translational output platform.

[0063] The detailed composition of the x / y translational degree of freedom actuation module 5 is as follows: Figure 5 As shown, it mainly consists of an x / y piezoelectric ceramic 24, an x / y piezoelectric ceramic preload block 25, a gap shim 23, an x / y flexible hinge 14, a connecting block 15, and an x / y rhombic amplification mechanism 22. The x / y piezoelectric ceramic 24 and the x / y piezoelectric ceramic preload block 25 are located within and fixedly connected to the x / y rhombic amplification mechanism 22. One end of the x / y rhombic amplification mechanism 22 is fixedly connected to the base 17, and the output end is fixedly connected to the x / y actuation flexible hinge 14 via the connecting block 15. One end of the x / y flexible hinge 14 is fixedly connected to the base 17, and the other end is connected to the XY intermediate platform 20.

[0064] The detailed components of the x / y translational degree-of-freedom guiding module 3 are as follows: Figure 6 As shown, it mainly consists of an x / y flexible hinge 14, a connecting block 15, and a positioning block 16. One end of the x / y flexible hinge 14 is connected to the base 17 via the positioning block 16, and the other end is connected to the XY intermediate platform 20.

[0065] When the x / y piezoelectric ceramic 24 elongates under voltage, its displacement is amplified and its direction is changed by the x / y rhomboid amplification mechanism 22. This displacement is then transmitted to the XY intermediate platform 20 via the connecting block 15 and the x / y actuated flexible hinge 14, thereby applying driving forces Fx and Fy to the x and y axes. At this time, the XY intermediate platform 20 will generate decoupled motion in the xy plane. Similarly, when the ring voice coil motor mover 19 applies a driving force Fz to the z-axis on the translational output platform 21, the mechanism will only generate decoupled motion on the z-axis without causing coupled motion on other axes.

[0066] The z-axis motion and the motion in the xy plane adopt a motion decoupling scheme. The stroke of the motion in the xy plane is provided by the air gap between the stator 18 and the mover 19 of the voice coil motor. This allows the moving parts responsible for the x-axis and y-axis to move freely in the xy plane, while the voice coil motor mover 19 responsible for the z-axis motion can move independently and freely in the z-axis direction. The two do not interfere with each other, thus achieving the purpose of complete decoupling of the three-axis motion.

[0067] The hollow configuration of the translational output platform 21 and the hollow configuration of the rotational output platform 9 and the large rotating Hooke hinge 6 provide a fully penetrating light-transmitting aperture from the rotational output platform 9 to the base 17.

[0068] The high-precision six-degree-of-freedom compliant motion platform designed in this invention is combined with a common large-stroke six-degree-of-freedom motion platform through the pre-reserved mounting holes on the base 17 to form a high-precision satellite simulation pointing platform; the optical load to be tested can be fixed to the high-precision six-degree-of-freedom compliant motion platform through the mounting holes on the rotation output platform 9, and the compliant motion platform can perform high-precision translation or tilting according to the optical load requirements.

[0069] The embodiments described above are merely preferred embodiments of the present invention. Ordinary variations and substitutions made by those skilled in the art within the scope of the technical solution of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-precision six-degree-of-freedom compliant motion platform with motion decoupling, characterized in that, It includes a three-axis decoupled rotation module and a three-axis decoupled translation module. The three-axis decoupled rotation module is fixedly connected to the three-axis decoupled translation module to form a series configuration. The three-axis decoupled translation module adopts a parallel decoupled configuration, including a base, a ring voice coil motor, an XY intermediate platform, a translation output platform, an x-degree-of-freedom actuation module, a y-degree-of-freedom actuation module, an x-degree-of-freedom guide module, and a y-degree-of-freedom guide module; the stator of the ring voice coil motor is fixed to the base, and the mover output end is connected to the translation output platform; One end of both the x-degree-of-freedom actuation module and the y-degree-of-freedom actuation module is connected to and fixed to the base, and the output ends are connected to the XY intermediate platform, providing power sources for the x and y degrees of freedom in the three-axis decoupled translation module, respectively. One end of both the x-degree-of-freedom guiding module and the y-degree-of-freedom guiding module is connected to and fixed to the base, and the output ends are both connected to the XY intermediate platform. Together with the x-degree-of-freedom actuation module and the y-degree-of-freedom actuation module, they provide symmetrical guidance for the x and y degrees of freedom in the three-axis decoupled translation module. The three-axis decoupled rotation module includes a rotation output platform, a large rotational Hooke hinge, an Rz piezoelectric ceramic, an Rz piezoelectric ceramic preload block, an Rx rotational degree-of-freedom actuation module, and an Ry rotational degree-of-freedom actuation module. The lower surface of the large rotating Hooke hinge is fixed to the base, and the upper surface is connected to the rotating output platform. The rotational output platform is connected to the Rx rotational degree-of-freedom actuation module and the Ry rotational degree-of-freedom actuation module; The Rx and Ry rotational degree-of-freedom actuation modules adopt a parallel configuration, with a large rotational Hooke hinge as the axis of rotation. They are installed at 90° intervals in the XY plane to provide rotation centers around Rx and Ry. The output ends of the Rx rotational degree of freedom actuator module and the Ry rotational degree of freedom actuator module are both connected to the three-axis decoupled rotation module, and the lower end is connected to the three-axis decoupled translation module. The output displacement is applied to the inner circle of the rotational output platform, so that the rotational output platform generates rotational displacements about the x and y axes respectively. Two Rz piezoelectric ceramics are arranged rotationally symmetrically on the rotating output platform. Two Rz piezoelectric ceramic preload blocks respectively tightly bond one Rz piezoelectric ceramic to the rotating output platform as one unit. The output torques of the two Rz piezoelectric ceramics are guided by the flexible hinge on the rotating output platform to generate rotational displacement around the z-axis.

2. The high-precision six-degree-of-freedom compliant motion platform of claim 1, wherein, The rotary output platform provides a connection base for the three rotational degrees of freedom Rx, Ry, and Rz, enabling the motion of the three rotational axes to be transmitted to the rotary output end. The outer ring of the rotary output platform is the output end of the entire platform and is connected to the load. By connecting the Rx and Ry rotational degree of freedom actuation modules and the large rotational Hooke joint to the inner ring of the rotary output platform, the rotational motion output of the Rx and Ry degrees of freedom is realized. The Rz piezoelectric ceramic is installed on the inner ring to transmit the displacement to the outer ring of the rotary output platform, realizing the synthesis and output of the three-axis rotational displacement.

3. The high-precision six-degree-of-freedom compliant motion platform of claim 1, wherein, The Rx rotational degree of freedom actuation module includes an Rx rhombic amplification mechanism, an Rx piezoelectric ceramic, an Rx piezoelectric ceramic preload block, and an Rx Hooke hinge. The Rx piezoelectric ceramic is connected to the Rx rhombic amplification mechanism, and the Rx piezoelectric ceramic preload block tightly binds the Rx piezoelectric ceramic and the Rx rhombic amplification mechanism together; the Rx rhombic amplification mechanism amplifies the output displacement of the Rx piezoelectric ceramic and changes its direction; The lower surface of the Rx rhomboid amplification mechanism is connected to the translational output platform, and the upper surface is fixed to the Rx Hooke hinge, which provides a pivot for rotation around the x-axis.

4. The high-precision six-degree-of-freedom compliant motion platform of claim 1, wherein, The base serves as the foundation for the entire six-degree-of-freedom motion platform, providing support, positioning, and fixation. The base protrudes from its outer edge and is designed with threaded fixing holes to provide positioning and fixation for the x-degree-of-freedom actuation module, y-degree-of-freedom actuation module, x-degree-of-freedom guide module, and y-degree-of-freedom guide module. The base uses a thin-walled plate in its inner ring to provide positioning and fixation for the voice coil motor stator. By fixing the above components to the base, the force is transmitted from the base to the translational output platform.

5. A high-precision six-degree-of-freedom compliant motion platform with motion decoupling according to claim 1, characterized in that, The x-translational degree-of-freedom actuation module includes x-piezoelectric ceramic, x-piezoelectric ceramic preload block, x-flexible hinge, connecting block, and x-rhomboid amplification mechanism; The x piezoelectric ceramic and the x piezoelectric ceramic preload block are fixedly connected inside the x rhombic amplification mechanism; One end of the x-shaped amplification mechanism is fixedly connected to the base, and the output end is fixedly connected to the x-flexible hinge through a connecting block; The flexible hinge is fixed at one end to the base and at the other end to the XY intermediate platform. The x-axis piezoelectric ceramic output displacement x is amplified by a rhombic amplification mechanism and converted to a direction perpendicular to the piezoelectric ceramic output direction. This displacement is then transmitted to the XY intermediate platform via a connecting block and the x-flexible hinge, thereby applying a driving force F along the x-axis. x The XY intermediate platform generates decoupled motion in the x-direction.

6. The high-precision six-degree-of-freedom compliant motion platform with motion decoupling according to claim 1, characterized in that, The four sides of the XY intermediate platform are equipped with Z decoupling mechanisms to guide the voice coil motor and support the translational output platform.

7. The high-precision six-degree-of-freedom compliant motion platform of claim 1, wherein, The moving part and the stator of the ring voice coil motor are suspended and do not contact each other; the air gap between the stator and the moving part of the ring voice coil motor provides the stroke for translation in the XY plane; the moving part of the voice coil motor that drives the z-axis motion moves independently and freely in the z-axis direction, without interfering with the translation in the XY plane, thus achieving complete decoupling of the three-axis motion.

8. A high-precision six-degree-of-freedom compliant motion platform with motion decoupling according to claim 1, characterized in that, The x-translational degree-of-freedom guiding module includes an x-flexible hinge, a connecting block, and a positioning block; wherein, one end of the x-flexible hinge is connected to the base through the positioning block, and the other end is connected to the XY intermediate platform.

9. A high-precision six-degree-of-freedom compliant motion platform with motion decoupling according to claim 1, characterized in that, The translational output platform adopts a hollow configuration, as do the rotating output platform and the rotating Hooke hinge, forming a fully penetrating light-transmitting hole from the rotating output platform to the base, thereby increasing the amount of light transmitted.

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