A polishing liquid supply device and a polishing method for an optical member

Abstract

The application provides a polishing liquid supply device and polishing method for optical parts, which comprises a liquid storage tank for storing polishing liquid, the bottom of which is communicated with a universal water pipe; a stirring assembly is arranged on the liquid storage tank and has a stirring end, which is made of soft material and located in the liquid storage tank for stirring the polishing liquid; a flow control assembly and a pulse controller are arranged on the universal water pipe for respectively controlling the flow and frequency of the polishing liquid discharged through the universal water pipe; by arranging the flow control assembly and the pulse controller, the frequency and amount of the polishing liquid added in the polishing process can be controlled, and the stirring end made of soft material can stir the polishing liquid to prevent the abrasive particles from agglomerating or precipitating and can also avoid damaging the sharpness of the abrasive particles; by controlling the frequency and amount of the polishing liquid added and keeping the sharpness of the abrasive particles, the generation of pits or fine scratches on the surface of the optical part in the polishing process can be effectively avoided, and the polished optical part has good surface quality.

Description

Technical Field

[0001] This application relates to the field of optical cold processing technology, and in particular to a polishing slurry supply device and polishing method for optical components. Background Technology

[0002] Hot-pressed multispectral zinc sulfide optical components are made from zinc sulfide powder through high-temperature and high-pressure forming, followed by hot isostatic pressing to create a polycrystalline material. This material exhibits high transmittance in the visible, near-infrared, and mid-to-long-wave infrared bands, and its manufacturing cost is relatively low, making it an ideal window material for multi-band composite optical systems. However, when polishing this material using existing methods, fine pitting or tiny scratches several micrometers wide are easily generated, affecting the surface quality of the optical components. Research indicates that the frequency of polishing slurry addition and the sharpness of the abrasive grains are the main factors affecting surface quality when polishing optical components made from this material. Summary of the Invention

[0003] The purpose of this application is to address the above-mentioned problems by providing a polishing slurry supply device and a polishing method for optical components.

[0004] In a first aspect, this application provides a polishing slurry supply device for optical components, comprising:

[0005] A liquid storage tank for holding polishing liquid; a universal water pipe is connected to the bottom of the liquid storage tank.

[0006] A stirring assembly is provided on the liquid storage tank and has a stirring end. The stirring end is made of a soft material and is located inside the liquid storage tank for stirring the polishing liquid contained in the liquid storage tank.

[0007] A flow control component is provided on the universal water pipe and is used to control the flow rate of polishing liquid discharged from the storage tank through the universal water pipe;

[0008] A pulse controller is mounted on the universal water pipe, located on the side of the flow control component near the free end of the universal water pipe, and is used to control the frequency at which the polishing liquid in the storage tank is discharged through the universal water pipe.

[0009] According to the technical solutions provided in certain embodiments of this application, the flow control component includes a flow valve and a flow meter, and the flow valve and the flow meter are sequentially arranged on the universal water pipe along the direction of the polishing liquid discharge.

[0010] According to the technical solutions provided in certain embodiments of this application, the stirring assembly includes a drive motor, which is located at the top of the liquid storage tank. Its drive shaft extends vertically into the liquid storage tank and is connected to a stirring rod, which is the stirring end.

[0011] Secondly, this application provides a polishing method for optical components, employing a polishing slurry supply device for optical components as described above, comprising:

[0012] Install the polishing disc and optical components onto the polishing equipment;

[0013] The optical components are polished for the first time until the surface accuracy and dimensions of the polished surface meet the requirements;

[0014] The optical component is removed from the polishing equipment and the polished surface is cleaned.

[0015] The optical component is reinstalled onto the polishing equipment, and the optical component is polished a second time using the polishing fluid supply device until the surface quality of the polished surface meets the requirements.

[0016] The optical component is removed from the polishing equipment, and the polished surface is cleaned and wiped to obtain the polished optical component.

[0017] According to the technical solutions provided in certain embodiments of this application, the second polishing of the optical component using the polishing fluid supply device includes:

[0018] The diamond micron polishing slurry is loaded into the storage tank, and the outlet of the universal water pipe is adjusted to face the polishing surface.

[0019] Open the flow valve and the pulse controller and set the single pulse dosage to 2-5 ml and the pulse frequency to 10-20 times / minute;

[0020] The polishing equipment is set to a rotation speed of 60-200 RPM and a pressure of 0.05-0.2 MPa to polish the optical components.

[0021] According to the technical solutions provided in certain embodiments of this application, the diamond micron polishing liquid is obtained by mixing at least the following components: deionized water, diamond abrasive particles, oxidant, and dispersant.

[0022] According to the technical solutions provided in certain embodiments of this application, before mounting the polishing disc and optical components onto the polishing equipment, the method further includes:

[0023] Attach the polyurethane polishing pad to the polishing disc.

[0024] According to the technical solutions provided in certain embodiments of this application, cerium oxide powder is hot-pressed onto the polyurethane polishing pad.

[0025] According to the technical solutions provided in certain embodiments of this application, the first polishing of the optical component includes:

[0026] The polishing equipment is set to a rotation speed of 60-200 RPM and a pressure of 0.05-0.2 MPa to polish the optical components.

[0027] During the polishing process, aluminum oxide polishing liquid is continuously added between the polyurethane polishing pad and the polishing surface.

[0028] According to the technical solutions provided in certain embodiments of this application, the particle size of the alumina polishing slurry is 1.5μm-2.5μm.

[0029] Compared with the prior art, the beneficial effects of this application are as follows: This application provides a polishing slurry supply device for optical components, including a storage tank for holding polishing slurry, with a universal water pipe connected to the bottom of the storage tank; a stirring assembly is provided on the storage tank, the stirring assembly having a stirring end made of soft material and located inside the storage tank, for stirring the polishing slurry contained in the storage tank; a flow control assembly is provided on the universal water pipe for controlling the flow rate of the polishing slurry discharged from the storage tank through the universal water pipe; a pulse controller is also provided on the universal water pipe, located on the side of the flow control assembly near the free end of the universal water pipe, for controlling... The frequency of polishing slurry discharge from the storage tank through the universal water pipe; by setting up a flow control component and a pulse controller, the frequency and amount of polishing slurry added during the polishing process of optical components can be effectively controlled. At the same time, the stirring end of the stirring component is made of soft material, which can not only meet the requirements of stirring the polishing slurry to prevent abrasive grains from agglomerating or settling, but also avoid damaging the sharpness of the abrasive grains during stirring. By controlling the frequency and amount of polishing slurry added and maintaining the sharpness of the abrasive grains in the polishing slurry, it is possible to effectively avoid the formation of pits or fine scratches on the surface of optical components during the polishing process, so that the polished optical components have good surface quality.

[0030] It should be understood that the descriptions of technical features, technical solutions, beneficial effects, or similar language in this application do not imply that all features and advantages can be achieved in any single embodiment. Rather, it is understood that the description of a feature or beneficial effect means that a specific technical feature, technical solution, or beneficial effect is included in at least one embodiment. Therefore, the descriptions of technical features, technical solutions, or beneficial effects in this specification do not necessarily refer to the same embodiment. Furthermore, the technical features, technical solutions, and beneficial effects described in this embodiment can be combined in any suitable manner. Those skilled in the art will understand that embodiments can be implemented without one or more specific technical features, technical solutions, or beneficial effects of a particular embodiment. In other embodiments, additional technical features and beneficial effects may be identified in specific embodiments that do not embody all embodiments. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A schematic diagram of a polishing slurry supply device for an optical component provided in Embodiment 1 of this application;

[0033] Figure 2 This is a schematic diagram of the stirring assembly of a polishing slurry supply device for an optical component provided in Embodiment 1 of this application;

[0034] Figure 3 This is a schematic flowchart of a polishing method for an optical component provided in Embodiment 2 of this application.

[0035] The text labels in the image represent:

[0036] 1. Drive motor; 2. Liquid storage tank; 3. Flow valve; 4. Flow meter; 5. Pulse controller; 6. Universal water pipe; 7. Stirring rod. Detailed Implementation

[0037] To enable those skilled in the art to better understand the technical solutions of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The descriptions in this section are merely illustrative and explanatory, and should not be construed as limiting the scope of protection of this application. Specifically, the described embodiments are only some embodiments of this application, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort should fall within the scope of protection of this invention.

[0038] It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0039] Example 1

[0040] As mentioned in the background section, in view of the problems in the prior art, this embodiment provides a polishing slurry supply device for optical components, comprising:

[0041] Storage tank 2 is used to hold polishing liquid; the bottom of storage tank 2 is connected to a universal water pipe 6.

[0042] A stirring assembly is provided on the storage tank 2 and has a stirring end. The stirring end is made of soft material and is located inside the storage tank 2. It is used to stir the polishing liquid contained in the storage tank 2.

[0043] A flow control component is installed on the universal water pipe 6 to control the flow rate of polishing liquid discharged from the storage tank 2 through the universal water pipe 6.

[0044] The pulse controller 5 is mounted on the universal water pipe 6 and is located on the side of the flow control component near the free end of the universal water pipe 6. It is used to control the frequency at which the polishing liquid in the storage tank 2 is discharged through the universal water pipe 6.

[0045] like Figure 1 As shown, the storage tank 2 is a cylindrical tank with a drain port at the bottom. The drain port is connected to a universal water pipe 6, which is a flexible plastic hose that can be bent at will. In this embodiment, the stirring end of the stirring assembly is made of polytetrafluoroethylene, which is flexible. At the same time, the stirring end needs to be blunted at the sharp angle during processing. The flow control assembly is located on the universal water pipe 6 near the drain port and can control the flow rate of the polishing liquid. The pulse controller 5 can be a spray pulse controller from the prior art, and the frequency of polishing liquid spraying can be set by adjusting the pulse interval.

[0046] In use, add polishing liquid to the storage tank 2, start the stirring component to stir the polishing liquid, set the pulse interval of the pulse controller 5, turn on the flow control component and adjust the flow rate of the polishing liquid, align the outlet of the universal water pipe 6 with the optical part to be polished, and then turn on the pulse controller 5 to add the polishing liquid to the polishing surface of the optical part according to the set flow rate and spray frequency.

[0047] By setting up a flow control component and a pulse controller 5, the frequency and amount of polishing slurry added during the polishing process of optical components can be effectively controlled. At the same time, the stirring end of the stirring component is made of soft material, which can not only prevent the abrasive particles from agglomerating or settling during the stirring of the polishing slurry, but also avoid damaging the sharpness of the abrasive particles during stirring. By controlling the frequency and amount of polishing slurry added and maintaining the sharpness of the abrasive particles in the polishing slurry, it is possible to effectively avoid the formation of pits or fine scratches on the surface of optical components during the polishing process, so that the polished optical components have good surface quality.

[0048] In a preferred embodiment, the flow control component includes a flow valve 3 and a flow meter 4, which are sequentially arranged on the universal water pipe 6 along the direction of polishing liquid discharge.

[0049] like Figure 1 As shown, the flow valve 3 adopts the flow control valve in the prior art, which can control the flow rate of polishing liquid in the universal water pipe 6. The flow meter 4 is located downstream of the flow valve 3 and can measure the current flow rate of the polishing liquid. The flow valve 3 is adjusted according to the measurement result of the flow meter 4 so that the polishing liquid is discharged from the outlet of the universal water pipe 6 at the set flow rate.

[0050] In a preferred embodiment, the stirring assembly includes a drive motor 1, which is located at the top of the storage tank 2. Its drive shaft extends vertically into the storage tank 2 and is connected to a stirring rod 7, which is the stirring end.

[0051] like Figure 2 As shown, the drive motor 1 adopts a stepper motor commonly used in the prior art. The drive motor 1 is located at the top of the liquid storage tank 2, and its drive shaft extends into the liquid storage tank 2 and is connected to the stirring rod 7. The stirring rod 7 is close to the bottom of the liquid storage tank 2 so that it can fully stir the polishing liquid in the liquid storage tank 2.

[0052] Working principle: Add polishing liquid to storage tank 2, start drive motor 1, drive motor 1 to drive stirring rod 7 to rotate to stir polishing liquid, set pulse interval of pulse controller 5, open flow valve 3 and flow meter 4, adjust flow valve 3 by the flow reading displayed by flow meter 4, thereby controlling the flow of polishing liquid in universal water pipe 6, align the outlet of universal water pipe 6 with the optical part to be polished, and then turn on pulse controller 5 to add polishing liquid to the polishing surface of optical part according to the set flow rate and spray frequency.

[0053] Example 2

[0054] like Figure 3 As shown in the figure, this is a schematic flowchart of a polishing method for optical components provided in this embodiment. It employs a polishing slurry supply device for optical components as described in Embodiment 1. The method includes the following steps:

[0055] S1. Attach the polyurethane polishing pad to the polishing disc;

[0056] Select the appropriate polishing pad according to the shape of the optical component. Polyurethane polishing pads have a microporous structure, which can store polishing fluid and make the polishing fluid evenly distributed throughout the processing area during the polishing process, which helps to improve polishing efficiency.

[0057] Furthermore, cerium oxide powder is hot-pressed onto the polyurethane polishing pad. Cerium oxide, as a trace filler, primarily improves polishing efficiency. Cerium oxide-filled polishing pads are suitable for polishing processes requiring high cutting forces to achieve more efficient material removal. In addition, the addition of cerium oxide improves the wear resistance and durability of the polishing pad, thereby extending its service life and providing more stable polishing results. Another function of cerium oxide is to enhance the hydrophilicity of the polishing pad, which helps in the distribution of the polishing slurry, thus improving the uniformity and efficiency of polishing. This property is particularly important for polishing precision optical components, as they require extremely high surface flatness and smoothness.

[0058] S2. Install the polishing disc and optical components onto the polishing equipment;

[0059] A fixture is made according to the shape of the optical component. The fixture is used to fix the optical component and is then mounted onto the polishing equipment along with the polishing disc.

[0060] S3. Perform the first polishing on the optical components until the surface accuracy and dimensions of the polished surface meet the requirements;

[0061] The blank of the optical component is polished for the first time to ensure that the surface accuracy and size of the polished surface meet the initial requirements.

[0062] The first polishing of the optical components includes:

[0063] S31. Set the polishing equipment speed to 60-200 RPM and the pressure to 0.05-0.2 MPa to polish optical parts;

[0064] In this embodiment, the rotation speed of the polishing equipment is specifically set to 100 RPM and the pressure is 0.1 MPa. At the same time, the corresponding parameters are adjusted according to the surface shape error of the optical parts during the polishing process.

[0065] S32. During the polishing process, continuously add alumina polishing liquid between the polyurethane polishing pad and the polishing surface;

[0066] Furthermore, the particle size of the alumina polishing slurry is generally 1.5μm-2.5μm. In this embodiment, an alumina polishing slurry with a particle size of 2.5μm is selected for polishing until the surface accuracy and size of the polished surface meet the initial requirements.

[0067] S4. Remove the optical components from the polishing equipment and clean the polished surface;

[0068] Remove the optical components and clean the polishing solution from their surfaces with deionized water.

[0069] S5. Reinstall the optical components onto the polishing equipment and use the polishing fluid supply device to polish the optical components a second time until the surface quality of the polished surface meets the requirements.

[0070] The optical components are reinstalled onto the flat polishing equipment, and the polishing slurry supply device provided in Example 1 is used to perform secondary polishing on the optical components until the polished surface of the optical components meets the optical index requirements.

[0071] The second polishing of optical components using a polishing slurry supply device includes:

[0072] S51. Pour the diamond micro powder polishing liquid into the storage tank and adjust the outlet of the universal water pipe to face the polishing surface.

[0073] Furthermore, the diamond micron polishing slurry is prepared by mixing at least the following components: deionized water, diamond abrasive grains, oxidant, and dispersant; wherein the particle size of the diamond abrasive grains is 0.25 μm, the oxidant is 8 wt.% hydrogen peroxide, and the dispersant is 0.8 g / L sodium hexametaphosphate. After mixing the above materials with deionized water, the mixture is ultrasonically vibrated for 20 minutes and then loaded into a storage tank.

[0074] S52. Open the flow valve and pulse controller and set the single pulse dosage to 2-5ml and the pulse frequency to 10-20 times / minute.

[0075] In this embodiment, the dosage per pulse is set to 2 ml, and the pulse frequency is 20 pulses / minute.

[0076] S53. Set the polishing equipment speed to 60-200PM and the pressure to 0.05-0.2MPa to polish optical parts.

[0077] Similar to the first polishing, the polishing equipment was set to a rotation speed of 100 RPM and a pressure of 0.1 MPa for a second polishing of the optical components until the polished surface met the optical performance requirements.

[0078] S6. Remove the optical component from the polishing equipment, clean and wipe the polished surface to obtain the polished optical component;

[0079] Remove the optical components, clean them with deionized water, and wipe the polished surface of the optical components with cotton wool soaked in anhydrous ethanol to finally obtain the polished optical components.

[0080] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the methods and core ideas of this application. The above descriptions are only preferred embodiments of this application. It should be noted that due to the limitations of written expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of this invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of this application.

Claims

1. A polishing slurry supply device for optical components, characterized in that, include: A liquid storage tank (2) is used to hold polishing liquid; a universal water pipe (6) is connected to the bottom of the liquid storage tank (2). A stirring assembly is provided on the storage tank (2) and has a stirring end. The stirring end is made of soft material and is located inside the storage tank (2) for stirring the polishing liquid contained in the storage tank (2). A flow control component is provided on the universal water pipe (6) and is used to control the flow rate of polishing liquid discharged from the storage tank (2) through the universal water pipe (6); A pulse controller (5) is installed on the universal water pipe (6) and located on the side of the flow control component near the free end of the universal water pipe (6). The pulse controller (5) is used to control the frequency of the polishing liquid in the storage tank (2) being discharged through the universal water pipe (6). The flow control component includes a flow valve (3) and a flow meter (4). The flow valve (3) and the flow meter (4) are sequentially installed on the universal water pipe (6) along the direction of the polishing liquid discharge.

2. The polishing slurry supply device for optical components according to claim 1, characterized in that, The stirring assembly includes a drive motor (1), which is located at the top of the liquid storage tank (2). Its drive shaft extends vertically into the liquid storage tank (2) and is connected to a stirring rod (7). The stirring rod (7) is the stirring end.

3. A polishing method for optical components, employing a polishing slurry supply device for optical components as described in any one of claims 1-2, characterized in that, include: Install the polishing disc and optical components onto the polishing equipment; The optical components are polished for the first time until the surface accuracy and dimensions of the polished surface meet the requirements; The optical component is removed from the polishing equipment and the polished surface is cleaned. The optical component is reinstalled onto the polishing equipment, and the optical component is polished a second time using the polishing fluid supply device until the surface quality of the polished surface meets the requirements. The optical component is removed from the polishing equipment, and the polished surface is cleaned and wiped to obtain the polished optical component.

4. The polishing method for an optical component according to claim 3, characterized in that, The second polishing of the optical component using the polishing fluid supply device includes: The diamond micron polishing slurry is loaded into the storage tank, and the outlet of the universal water pipe is adjusted to face the polishing surface. Open the flow valve and the pulse controller and set the single pulse dosage to 2-5 ml and the pulse frequency to 10-20 times / minute; The polishing equipment is set to a rotation speed of 60-200 RPM and a pressure of 0.05-0.2 MPa to polish the optical components.

5. The polishing method for an optical component according to claim 4, characterized in that, The diamond micron polishing slurry is obtained by mixing at least the following components: deionized water, diamond abrasive particles, oxidant, and dispersant.

6. The polishing method for an optical component according to claim 3, characterized in that, Before mounting the polishing disc and optical components onto the polishing equipment, the following is also included: Attach the polyurethane polishing pad to the polishing disc.

7. The polishing method for an optical component according to claim 6, characterized in that, Cerium oxide powder is hot-pressed onto the polyurethane polishing pad.

8. The polishing method for an optical component according to claim 6, characterized in that, The first polishing of the optical component includes: The polishing equipment is set to a rotation speed of 60-200 RPM and a pressure of 0.05-0.2 MPa to polish the optical components. During the polishing process, aluminum oxide polishing liquid is continuously added between the polyurethane polishing pad and the polishing surface.

9. A polishing method for an optical component according to claim 8, characterized in that, The alumina polishing slurry has a particle size of 1.5μm-2.5μm.

Images