An optical element loading and unloading device for an ion beam polishing apparatus

Abstract

The application discloses an optical element feeding and discharging device for an ion beam polishing equipment, which comprises a moving platform (1) and a base (2) installed on the moving platform (1), characterized in that the device further comprises a first overturning mechanism (4) comprising a first overturning frame (41) hinged to the base (2) and a first rotating mechanism (42) for driving the first overturning frame (41) to overturn by 90 degrees; a second overturning mechanism (5) comprising a second overturning frame (51) hinged to the first overturning frame (41) and a second rotating mechanism (52) for driving the second overturning frame (51) to overturn by 90 degrees; a locking mechanism (6) for locking and unlocking the first overturning frame (41) and the second overturning frame (51); an element clamp (7) capable of sliding leftward and rightward and installed on the second overturning frame (51); and a translation mechanism (8) for driving the element clamp (7) to translate along the leftward and rightward directions.

Description

Technical Field

[0001] This invention relates to the field of precision optical component processing, specifically to an optical component loading and unloading device for ion beam polishing equipment. Background Technology

[0002] Ion beam polishing is commonly used for the final processing of ultra-precision optical components. Traditional contact polishing methods, due to their inherent contact nature, inevitably suffer from problems such as polishing head wear, edge effects, and subsurface damage, which limit the improvement of processing accuracy. Ion beam polishing uses an ion beam instead of a traditional polishing head, removing surface material from the optical component through the ion sputtering effect between the ion beam and the optical component. This not only avoids the aforementioned problems but also offers high precision and high convergence.

[0003] Ion beam polishing, based on the principle of atomic sputtering, achieves material removal with atomic-level precision and nanometer-level accuracy. It is considered the optical component polishing technology with the highest processing precision and best shaping effect. Optical glass is mostly a hard and brittle material. Flipping ultra-large aperture optical components (meter-scale and above) requires a flipping device, as detailed in Chinese patent application CN202310748104.X, entitled "A Loading and Unloading Device for Ion Beam Polishing Equipment".

[0004] However, the above-mentioned solutions have several drawbacks. First, the flipping device can only achieve a 90° flip of the component, which is only suitable for the vertical flipping and loading of optical components in horizontal ion beam polishing equipment, and not for the horizontal flipping and loading of optical components in vertical ion beam polishing equipment. Second, the optical component flipping device is easily affected by the weight of the component itself during the flipping process. In particular, when the center of gravity of the component passes through the flipping axis, it will cause the flipping device to fall rapidly in the direction of rotation, causing an impact that can easily cause chipping and damage to the component, posing a significant risk. Summary of the Invention

[0005] The first technical problem to be solved by the present invention is to provide an optical component loading and unloading device for ion beam polishing equipment that is applicable to both horizontal and vertical ion beam polishing equipment, in light of the current state of the prior art.

[0006] The second technical problem to be solved by the present invention is to provide an optical element loading and unloading device for an ion beam polishing equipment that can ensure the safety of the optical element during the process of flipping from a horizontal state to a vertical state.

[0007] The technical solution adopted by the present invention to solve the first technical problem mentioned above is: an optical element loading and unloading device for an ion beam polishing equipment, comprising a moving platform and a base mounted on the moving platform, characterized in that: it further comprises...

[0008] The first flipping mechanism includes a first flipping frame hinged to the base and whose rotation axis extends in the left-right direction, and a first rotation mechanism for driving the first flipping frame to flip 90° relative to the base.

[0009] The second flipping mechanism includes a second flipping frame hinged to the first flipping frame and whose rotation axis extends in the left-right direction, and a second rotation mechanism for driving the second flipping frame to flip 90° relative to the first flipping frame.

[0010] A locking mechanism is provided for locking and unlocking the first and second flip frames.

[0011] Component clamps for holding optical components are slidably mounted on the second flip frame; and

[0012] A translation mechanism is used to drive the component clamp to translate relative to the second flipping frame in the left-right direction.

[0013] With the first and second flip frames unlocked from each other, the component clamp can be rotated 90° clockwise from its initial position to the first flip position under the drive of the second rotating mechanism.

[0014] With the first and second flip frames locked together, the component clamp can be rotated 90° clockwise from the first flip position to the second flip position under the drive of the first rotating mechanism.

[0015] In order to achieve the driving of the second flip frame to flip without affecting the subsequent flipping of the second flip frame, the optical element held by the component clamp is arranged vertically when the component clamp is in the first flipping position.

[0016] The second rotating mechanism includes:

[0017] A push arm, for supporting the second tilting frame, is hinged to the base; and

[0018] The second driving component is used to drive the push arm to rotate relative to the first tilting frame.

[0019] During the process of the component fixture flipping from the initial position to the first flipping position, the push arm is always supported below the second flipping frame, so that the push arm pushes the second flipping frame to flip synchronously under the drive of the second drive member;

[0020] During the process of the component clamp flipping from the first flipping position to the second flipping position, the push arm releases its support from the second flipping frame.

[0021] To further solve the second technical problem mentioned above, the rear of the base is provided with a hinged frame, the top of the front side frame of the hinged frame has a first flip axis extending in the left and right direction, and the rear side of the upper part of the first flip frame has a first rotating seat extending backward, which is rotatably sleeved on the outer periphery of the first flip axis.

[0022] The front side of the lower part of the first flipping frame has a second flipping shaft extending in the left-right direction, and the rear part of the second flipping frame has a second rotating seat extending upward, which is rotatably sleeved on the outer periphery of the second flipping shaft.

[0023] The front side of the bottom of the hinge frame has a pin extending in the left-right direction, and the rear end of the push arm has a third rotating seat extending upward, which is rotatably fitted around the outer periphery of the pin.

[0024] During the process of the component fixture flipping from the initial position to the first flipping position, the pin is arranged coaxially with the second flipping shaft, and the center of gravity of the second flipping frame and the component fixture is always located in front of the second flipping shaft.

[0025] In order to limit the two extreme positions during the flipping process of the first flipping frame, the front side and the top side of the hinged frame have a first limiting surface and a second limiting surface, respectively;

[0026] When the component clamp is in the first flip position, the first flip frame stands upright on the front side of the hinge frame and abuts against the first limiting surface;

[0027] With the component clamp in the second flip position, the first flip frame is laid flat on the top side of the hinge frame and abuts against the second limiting surface.

[0028] In order to limit the two extreme positions during the flipping process of the second flipping frame, the front side of the upper part of the first flipping frame has a limiting bracket;

[0029] With the component clamp in its initial position, the second flipping frame is laid flat on the top side of the base;

[0030] When the component clamp is in the first flip position, the second flip frame stands upright in front of the first flip frame and abuts against the limiting bracket.

[0031] In order to lock and unlock the first and second flip frames, the front side of the second flip frame is provided with a first locking piece, which has a first locking hole arranged through in the left and right direction.

[0032] The locking mechanism includes:

[0033] The first mounting base is installed on the front side of the upper part of the first flipping frame and has a first limiting groove into which the first locking piece extends;

[0034] A first locking pin extends in a left-right direction and can slide left and right into and out of the first limiting groove; and

[0035] A first drive component is used to drive the first locking pin to move left and right;

[0036] In the locked state, the first locking piece extends into the first limiting groove, and the first locking pin is inserted into the first locking hole;

[0037] In the unlocked state, the first locking pin disengages from the first locking hole.

[0038] To achieve the translation of the second tilting frame while avoiding interference with subsequent loading of the component fixture, the translation mechanism includes:

[0039] The guide rails are arranged on the second tilting frame in the left-right direction;

[0040] The slide table is mounted on the guide rail and can slide left and right.

[0041] A lead screw extends in the left-right direction and is threaded onto the slide table;

[0042] The third driving component is used to drive the lead screw to rotate about its own axis; and

[0043] A locking assembly is used to lock and unlock the slide and component fixture.

[0044] In order to lock and unlock the slide and component fixture, the component fixture is provided with a second locking piece, which has a second locking hole arranged through in the front-back direction;

[0045] The locking component includes:

[0046] The second mounting base is mounted on the slide and has a second limiting groove into which the second locking piece extends;

[0047] The second locking pin extends in the front-to-back direction and can slide back and forth into and out of the second limiting groove; and

[0048] The second drive component is used to drive the second locking pin to move back and forth.

[0049] In the locked state, the second locking piece extends into the second limiting groove, and the second locking pin is inserted into the second locking hole;

[0050] In the unlocked state, the second locking pin disengages from the second locking hole.

[0051] To enable vertical distance adjustment of the optical elements, a lifting mechanism is also included for driving the base to rise and fall relative to the mobile platform.

[0052] In order to drive the base to rise and fall smoothly relative to the mobile platform, a first slide rail extending in the front-to-back direction is installed on the mobile platform, and a second slide rail extending in the front-to-back direction is installed on the base.

[0053] The lifting mechanism includes:

[0054] A first scissor arm and a second scissor arm are arranged in an X-shape, hinged at the intersection. The first ends of the first and second scissor arms are respectively hinged to the moving platform and the base, and the second ends of the first and second scissor arms are respectively rotatably mounted within the second and first slide rails; and

[0055] The first driving component is used to drive the first scissor arm and the second scissor arm to rotate relative to each other.

[0056] Compared with the prior art, the advantages of the present invention are as follows:

[0057] (1) The second flipping device can realize the 90° flipping of the optical element from the horizontal direction to the vertical direction, which is suitable for the vertical flipping loading and unloading of optical elements in horizontal ion beam polishing equipment.

[0058] The combination of the second and first flipping devices can achieve a 180° horizontal flipping of optical elements, which is suitable for the horizontal flipping loading and unloading of optical elements in vertical ion beam polishing equipment.

[0059] (2) During the flipping process of the second flipping device, the center of gravity of the second flipping frame and the component clamp is always located in front of the second flipping axis. In this way, the second driving component is always in a unidirectional pressure state, which avoids the impact movement caused by the center of gravity of the entire flipping component crossing the second flipping axis during the flipping process, and ensures the safety of the optical component during the flipping process. Attached Figure Description

[0060] Figure 1 This is a three-dimensional structural diagram of an embodiment of the optical component loading and unloading device for an ion beam polishing equipment of the present invention, with the component clamp in the initial position.

[0061] Figure 2 for Figure 1 A three-dimensional structural diagram of the component fixture during the process of flipping from the initial position to the first flipping position;

[0062] Figure 3 for Figure 2 A three-dimensional structural diagram of the component fixture after it has been flipped to the first flipping position;

[0063] Figure 4 for Figure 3 A three-dimensional structural diagram of the first locking plate and the locking mechanism;

[0064] Figure 5 for Figure 4 A longitudinal sectional view;

[0065] Figure 6 for Figure 3 A schematic diagram of the three-dimensional structure from another direction;

[0066] Figure 7 for Figure 3 A three-dimensional structural diagram of the push arm after it has been reset;

[0067] Figure 8 for Figure 7 A three-dimensional structural diagram of the component fixture after it has been flipped to the second flipping position;

[0068] Figure 9 for Figure 8 A three-dimensional structural diagram of the component fixture moving to the right from the second flipping frame;

[0069] Figure 10 for Figure 9 A three-dimensional structural diagram of the second flipping frame, component fixture, and translation mechanism;

[0070] Figure 11 for Figure 10 A three-dimensional structural diagram of the second locking piece and the locking assembly;

[0071] Figure 12 for Figure 11 A cross-sectional view. Detailed Implementation

[0072] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0073] The specification and claims of this invention use terms indicating direction, such as "front," "rear," "upper," "lower," "left," "right," "side," "top," and "bottom," to describe various exemplary structural parts and elements of the invention. However, these terms are used herein merely for ease of explanation and are determined based on the exemplary orientations shown in the accompanying drawings. Since the embodiments disclosed in this invention can be arranged in different orientations, these terms indicating direction are for illustrative purposes only and should not be considered as limitations. For example, "upper" and "lower" are not necessarily limited to directions opposite to or consistent with the direction of gravity.

[0074] like Figures 1 to 12 The image shows a preferred embodiment of the optical component loading and unloading device for an ion beam polishing equipment according to the present invention. The optical component loading and unloading device includes a moving platform 1, a base 2, a lifting mechanism 3, a first flipping mechanism 4, a second flipping mechanism 5, a locking mechanism 6, a component clamp 7, and a translation mechanism 8.

[0075] Among them, universal wheels 11 are installed at the four corners of the bottom of the mobile platform 1; four first slide rails 12 are installed on the top side of the rear of the mobile platform 1, which are arranged side by side in the left and right direction, and each first slide rail 12 extends in the front and back direction.

[0076] The base 2 is located above the mobile platform 1. Specifically, four second slide rails 21 are installed on the bottom rear side of the base 2, arranged side by side in the left-right direction and corresponding one-to-one with the first slide rail 12. Each second slide rail 21 extends in the front-back direction. A hinge frame 22 is provided on the top rear side of the base 2. The top of the front side frame of the hinge frame 22 has a first flip axis 221 extending in the left-right direction. The front and top sides of the hinge frame 22 have a first limiting surface 222 and a second limiting surface 223, respectively. A pin 224 extending in the left-right direction is provided on the front side of the bottom of the hinge frame 22.

[0077] There are two sets of lifting mechanisms 3, which are arranged at intervals in the left-right direction between the mobile platform 1 and the base 2. In this embodiment, each lifting mechanism 3 includes a first scissor arm 31, a second scissor arm 32, and a first drive member 33.

[0078] Specifically, there are two first scissor arms 31 and two second scissor arms 32, which correspond to the first slide rail 1. The two second scissor arms 32 are connected by a connecting rod extending in the left and right direction. The first scissor arms 31 and the corresponding second scissor arms 32 are arranged in an X-shape and are hinged at the intersection. The front ends of each first scissor arm 31 and each second scissor arm 32 are respectively hinged to the top side of the front of the moving platform 1 and the bottom side of the front of the base 2. The rear ends of each first scissor arm 31 and each second scissor arm 32 can be rotatably installed in the second slide rail 21 and the first slide rail 12.

[0079] The first driving component 33 is an electric push rod. The bottom end of the electric push rod is rotatably connected to the top side of the front of the moving platform 1, and the top end of the electric push rod is rotatably connected to the connecting rod between the two second scissor arms 32. It is used to drive the first scissor arm 31 and the second scissor arm 32 to rotate relative to each other, thereby driving the base 2 to rise and fall relative to the moving platform 1.

[0080] The aforementioned lifting mechanism 3 can be applied to ion beam polishing equipment with different component clamping heights, while ensuring that the entire base 2 remains on the same horizontal plane during the lifting process.

[0081] The first flipping mechanism 4 includes a first flipping frame 41 hinged to the base 2 and a first rotating mechanism 42 for driving the first flipping frame 41 to flip 90° relative to the base 2.

[0082] Specifically, the rear side of the upper part of the first flipping frame 41 has a rearwardly extending first rotating seat 411, which is rotatably sleeved on the outer periphery of the first flipping shaft 221; the front side of the lower part of the first flipping frame 41 has a second flipping shaft 412 extending in the left-right direction; and the front side of the upper part of the first flipping frame 41 has a limiting bracket 413.

[0083] The first rotating mechanism 42 is an electric push rod. The bottom end of the electric push rod is rotatably connected to the top side of the rear of the base 2, and the top end of the electric push rod is rotatably connected to the rear side of the middle of the first flipping frame 41, which is used to drive the bottom end of the first flipping frame 41 to flip up and down around the first flipping shaft 221.

[0084] The second flipping mechanism 5 includes a second flipping frame 51 hinged to the first flipping frame 41 and a second rotating mechanism 52 for driving the second flipping frame 51 to flip 90° relative to the first flipping frame 41.

[0085] Specifically, the rear of the second tilting frame 51 has an upwardly extending second rotating seat 511, which is rotatably fitted around the outer periphery of the second tilting shaft 412; the front side of the second tilting frame 51 is provided with a first locking piece 512, which has a first locking hole 5121 arranged through in the left and right direction; the front and rear sides of the second tilting frame 51 are provided with first guide bars 513 extending in the left and right direction, and the inner side of the first guide bars 513 is rotatably connected to a plurality of rollers 5131 arranged at intervals in the left and right direction;

[0086] The second rotating mechanism 52 includes a push arm 521 and a second driving member 522. The push arm 521 is located below the second tilting frame 51 and is used to support the second tilting frame 51. The rear end of the push arm 521 has an upwardly extending third rotating seat 5211, which is rotatably sleeved on the outer periphery of the pin 224. The second driving member 522 is an electric push rod. The bottom end of the electric push rod is rotatably connected to the bottom side of the front part of the base 2, and the top end of the electric push rod passes through the base 2 and is rotatably connected to the front end of the push arm 521. It is used to drive the push arm 521 to tilt up and down around the pin 224, thereby pushing the front end of the second tilting frame 51 to tilt up and down around the second tilting shaft 412.

[0087] The locking mechanism 6 is used to lock and unlock the first flip frame 41 and the second flip frame 51, and includes a first mounting base 61, a first locking pin 62 and a first drive assembly 63.

[0088] Specifically, the first mounting base 61 is mounted on the front side of the upper part of the first flipping frame 41, and the front side of the first mounting base 61 has a first limiting groove 611 into which the first locking piece 512 extends;

[0089] The first locking pin 62 extends in the left and right direction and can slide in and out of the first limiting groove 611 in the left and right directions;

[0090] The first drive assembly 63 is an electric cylinder, whose power output end is connected to the first locking pin 62 to drive the first locking pin 62 to move left and right.

[0091] In the locked state, the first locking piece 512 extends into the first limiting groove 611, and the first locking pin 62 is inserted into the first locking hole 5121.

[0092] In the unlocked state, the first locking pin 62 disengages from the first locking hole 5121.

[0093] The component clamp 7 is used to clamp optical components. Specifically, the component clamp 7 has second guide bars 71 extending in the left-right direction on both the front and rear sides and corresponding to the first guide bars 513. Each second guide bar 71 is located inside the corresponding first guide bar 513 and makes frictional contact with the corresponding roller 5131, thereby enabling the component clamp 7 to slide left and right on the second flip frame 51. In addition, the edge of the left end of the first guide bar 513 is bent inward to form a limiting piece 5132 for limiting the second guide bar 71, thereby preventing the component clamp 7 from moving to the left from the second flip frame 51. The left side of the component clamp 7 is provided with a second locking piece 72, which has a second locking hole 721 arranged through in the front-back direction.

[0094] Driven by the first flipping mechanism 4 and the second flipping mechanism 5, the aforementioned component clamp 7 has an initial position, a first flipping position, and a second flipping position:

[0095] With the first flipping frame 41 and the second flipping frame 51 unlocked from each other, the component clamp 7 can rotate 90° clockwise from the initial position to the first flipping position under the drive of the second rotating mechanism 52. During this process, the push arm 521 is always supported below the second flipping frame 51 so that the push arm 521 pushes the second flipping frame 51 to rotate synchronously under the drive of the second drive member 522. At the same time, the pin 224 is coaxially arranged with the second flipping shaft 412, and the center of gravity of the second flipping frame 51 and the component clamp 7 is always located in front of the second flipping shaft 412.

[0096] With the first flipping frame 41 and the second flipping frame 51 locked together, the component clamp 7 can rotate 90° clockwise from the first flipping position to the second flipping position under the drive of the first rotating mechanism 42. During this process, the push arm 521 releases its support to the second flipping frame 51, thereby making way for the second flipping frame 51.

[0097] With component fixture 7 in its initial position, such as Figure 1 As shown, the first flipping frame 41 stands upright on the front side of the hinged frame 22 and abuts against the first limiting surface 222, the second flipping frame 51 is laid flat on the top side of the base 2, and the optical element held by the optical fixture 7 is arranged horizontally with the surface to be processed facing upward.

[0098] With the component fixture 7 in the first flip position, as follows: Figure 3 and Figure 6 As shown, the first flipping frame 41 stands upright on the front side of the hinged frame 22 and abuts against the first limiting surface 222. The second flipping frame 51 stands upright on the front side of the first flipping frame 41 and abuts against the limiting bracket 413. The optical element held by the optical fixture 7 is arranged vertically with the surface to be processed facing backward.

[0099] With component fixture 7 in the second flip position, as follows: Figure 8 As shown, the first flipping frame 41 is laid flat on the top side of the hinged frame 22 and abuts against the second limiting surface 223. The second flipping frame 51 is laid flat on the top side of the first flipping frame 41 and abuts against the limiting bracket 413. The optical element held by the optical fixture 7 is arranged horizontally with the surface to be processed facing down.

[0100] The translation mechanism 8 includes a guide rail 81, a slide table 82, a lead screw 83, a third drive component 84, and a locking assembly 85.

[0101] Specifically, the guide rail 81 is arranged on the top side of the second tilting frame 51 in the left-right direction;

[0102] The slide table 82 is mounted on the guide rail 81 and can slide left and right.

[0103] The lead screw 83 extends in the left-right direction and both ends are rotatably connected to the second tilting frame 51. The lead screw 83 is threadedly connected to the slide table 82.

[0104] The third driving component 84 is a motor, whose power output end is connected to the left end of the lead screw 83 to drive the lead screw 83 to rotate around its own axis.

[0105] The locking assembly 85 is used to lock and unlock the slide table 82 and the component fixture 7, and includes a second mounting base 851, a second locking pin 852 and a second drive assembly 853;

[0106] Specifically, the second mounting base 851 is mounted on the top side of the slide table 82, and the right side of the second mounting base 851 has a second limiting groove 8511 into which the second locking piece 72 extends;

[0107] The second locking pin 852 extends in the front-back direction and can slide in and out of the second limiting groove 8511.

[0108] The second drive assembly 853 is a cylinder, and its power output end is connected to the second locking pin 852 to drive the second locking pin 852 to move back and forth. In this embodiment, the piston rod of the cylinder and the second locking pin 852 are an integral part.

[0109] In the locked state, the second locking piece 72 extends into the second limiting groove 8511, and the second locking pin 852 is inserted into the second locking hole 721. At this time, the third driving member 84 is activated, which drives the lead screw 83 to rotate, and the slide table 82 slides in the left and right direction, thereby driving the component clamp 7 to move relative to the second flipping frame 51 in the left and right direction.

[0110] In the unlocked state, the second locking pin 852 disengages from the second locking hole 721.

[0111] The working principle of this embodiment is as follows:

[0112] (1) Feeding process:

[0113] ① Positioning and component clamping: The moving platform 1 changes its direction of movement via the casters 11, moving the entire optical component loading and unloading device to the component loading and unloading position of the ion beam polishing equipment, and completing the optical component clamping. At this time, the component clamp 7 is in the initial position, such as... Figure 1 As shown, the first flipping frame 41 stands upright on the front side of the hinged frame 22 and abuts against the first limiting surface 222, the second flipping frame 51 is laid flat on the top side of the base 2, and the optical element held by the optical fixture 7 is arranged horizontally with the surface to be processed facing upward.

[0114] ② The second tilting frame tilts: The second driving member 522 drives the push arm 521 to tilt upwards around the pin 224, thereby pushing the front end of the second tilting frame 51 to tilt upwards around the second tilting shaft 412 (e.g.) Figure 2 As shown), during this process, the component clamp 7 and the second flipping frame 51 flip upward synchronously in a clockwise direction. At the same time, the pin 224 and the second flipping shaft 412 are arranged coaxially, and the center of gravity of the second flipping frame 51 and the component clamp 7 is always located in front of the second flipping shaft 412. In this way, the second driving member 522 is always in a unidirectional pressure state, which avoids the impact movement caused by the center of gravity of the entire flipping component crossing the second flipping shaft 412 during the flipping process, and ensures the safety of the optical component during the flipping process.

[0115] ③ Second tilting frame in position and locked: After the second tilting frame 51 contacts the limit bracket 413, the second drive component 522 stops moving. At this time, the component clamp 7 is in the first tilting position, such as... Figure 3 and Figure 6 As shown, the first flipping frame 41 stands upright on the front side of the hinged frame 22 and abuts against the first limiting surface 222. The second flipping frame 51 stands upright on the front side of the first flipping frame 41 and abuts against the limiting bracket 413. The optical element held by the optical fixture 7 is arranged vertically with the surface to be processed facing backward. The first locking piece 512 extends into the first limiting groove 611. Then, the first driving assembly 63 drives the first locking pin 62 to be inserted into the first locking hole 5121 to complete the position locking of the second flipping frame 51.

[0116] ④ Push arm retraction: such as Figure 7 As shown, the second driving member 522 drives the driving push arm 521 to flip downwards and reset around the pin 224, so as to avoid the push arm 521 interfering with the subsequent flipping of the second flipping frame 51;

[0117] ⑤ First flip frame flips: The first rotating mechanism 42 drives the bottom end of the first flip frame 41 to flip upward around the first flip axis 221, thereby driving the second flip frame 51 and the component clamp 7 to flip upward synchronously until the first flip frame 41 contacts the second limiting surface 223, at which point the first rotating mechanism 42 stops and locks. At this time, the component clamp 7 is in the second flip position, such as... Figure 8 As shown, the first flipping frame 41 is laid flat on the top side of the hinge frame 22 and abuts against the second limiting surface 223. The second flipping frame 51 is laid flat on the top side of the first flipping frame 41 and abuts against the limiting bracket 413. The optical element held by the optical fixture 7 is arranged horizontally with the surface to be processed facing down.

[0118] ⑥ Workpiece transfer process: The first driving component 33 drives the first scissor arm 31 and the second scissor arm 32 to rotate relative to each other, thereby driving the base 2 to rise and fall relative to the moving platform 1 to adjust the vertical distance; then the third driving component 84 drives the lead screw 83 to rotate, and the slide table 82 slides along the left and right directions, thereby driving the component fixture 7 to move to the right relative to the second flipping frame 51 (e.g. Figure 9 (As shown), until the component fixture 7 enters the processing station of the ion beam polishing equipment; finally, the second drive assembly 853 drives the second locking pin 852 to disengage from the second locking hole 721 to complete the unlocking of the component fixture 7, thus completing the loading of the optical component;

[0119] In the entire loading process described above, the second rotating mechanism 52 first pushes the second flipping frame 51 to complete the flipping of the optical element from the horizontal direction to the vertical direction, and then the first rotating mechanism 42 pushes the first flipping frame 41 to complete the flipping of the optical element from the vertical direction to the horizontal direction, realizing a 180° flipping of the optical element. This is suitable for horizontal flipping loading and unloading of optical elements in vertical ion beam polishing equipment. Of course, it is also possible to complete the flipping of the optical element from the horizontal direction to the vertical direction by only using the second rotating mechanism 52 to push the second flipping frame 51, which is suitable for vertical flipping loading and unloading of optical elements in horizontal ion beam polishing equipment.

[0120] (2) The unloading process is the opposite of the loading process.

Claims

1. An optical element loading and unloading device for an ion beam polishing equipment, comprising a moving platform (1) and a base (2) mounted on the moving platform (1), characterized in that: It also includes The first flipping mechanism (4) includes a first flipping frame (41) hinged to the base (2) and whose rotation axis extends in the left and right direction, and a first rotating mechanism (42) for driving the first flipping frame (41) to flip 90° relative to the base (2); The second flipping mechanism (5) includes a second flipping frame (51) hinged to the first flipping frame (41) and whose rotation axis extends in the left and right direction, and a second rotating mechanism (52) for driving the second flipping frame (51) to flip 90° relative to the first flipping frame (41); A locking mechanism (6) is used to lock and unlock the first flip frame (41) and the second flip frame (51); The component clamp (7) is used to hold optical components and can be slidably mounted on the second flip frame (51). as well as Translation mechanism (8) is used to drive the component clamp (7) to translate in the left and right direction relative to the second flipping frame (51); When the first flipping frame (41) and the second flipping frame (51) are unlocked from each other, the component clamp (7) can be driven by the second rotating mechanism (52) to rotate 90° clockwise from the initial position to the first flipping position along with the second flipping frame (51). With the first flipping frame (41) and the second flipping frame (51) locked together, the component clamp (7) can rotate 90° clockwise from the first flipping position to the second flipping position under the drive of the first rotating mechanism (42).

2. The optical component loading and unloading device according to claim 1, characterized in that: When the component clamp (7) is in the first flip position, the optical component held by the component clamp (7) is arranged vertically; The second rotating mechanism (52) includes: A push arm (521) for supporting the second tilting frame (51) is hinged to the base (2); as well as The second drive member (522) is used to drive the push arm (521) to rotate relative to the first tilting frame (41); During the process of the component clamp (7) flipping from the initial position to the first flipping position, the push arm (521) is always supported below the second flipping frame (51) so that the push arm (521) pushes the second flipping frame (51) to flip synchronously under the drive of the second drive member (522); During the process of the component clamp (7) flipping from the first flipping position to the second flipping position, the push arm (521) releases its support on the second flipping frame (51).

3. The optical component loading and unloading device according to claim 2, characterized in that: The base (2) is provided with a hinge frame (22) at the rear. The top of the front side frame of the hinge frame (22) has a first flip shaft (221) extending in the left and right direction. The rear side of the upper part of the first flip frame (41) has a first rotating seat (411) extending backward. The first rotating seat (411) is rotatably sleeved on the outer periphery of the first flip shaft (221). The front side of the lower part of the first flipping frame (41) has a second flipping shaft (412) extending in the left-right direction, and the rear part of the second flipping frame (51) has a second rotating seat (511) extending upward, which is rotatably sleeved on the outer periphery of the second flipping shaft (412). The hinge frame (22) has a pin (224) extending in the left-right direction on the front side of its bottom, and the push arm (521) has a third rotating seat (5211) extending upward at its rear end. The third rotating seat (5211) is rotatably fitted around the outer periphery of the pin (224). During the process of the component fixture (7) flipping from the initial position to the first flipping position, the pin (224) is coaxially arranged with the second flipping shaft (412), and the center of gravity of the second flipping frame (51) and the component fixture (7) is always located in front of the second flipping shaft (412).

4. The optical component loading and unloading device according to claim 3, characterized in that: The hinged frame (22) has a first limiting surface (222) and a second limiting surface (223) on its front and top sides, respectively; When the component clamp (7) is in the first flip position, the first flip frame (41) stands upright on the front side of the hinge frame (22) and abuts against the first limiting surface (222); When the component clamp (7) is in the second flip position, the first flip frame (41) is laid flat on the top side of the hinge frame (22) and abuts against the second limiting surface (223).

5. The optical component loading and unloading device according to claim 3, characterized in that: The front side of the upper part of the first flipping frame (41) has a limiting bracket (413); With the component clamp (7) in its initial position, the second flipping frame (51) is laid flat on the top side of the base (2); When the component clamp (7) is in the first flip position, the second flip frame (51) stands upright in front of the first flip frame (41) and abuts against the limiting bracket (413).

6. The optical component loading and unloading device according to claim 3, characterized in that: The front side of the second flip frame (51) is provided with a first locking piece (512), which has a first locking hole (5121) arranged through in the left and right direction; The locking mechanism (6) includes: The first mounting base (61) is mounted on the front side of the upper part of the first flipping frame (41) and has a first limiting groove (611) into which the first locking piece (512) extends; The first locking pin (62) extends in the left-right direction and can slide in and out of the first limiting groove (611) in the left-right direction; and The first drive assembly (63) is used to drive the first locking pin (62) to move left and right; In the locked state, the first locking piece (512) extends into the first limiting groove (611), and the first locking pin (62) is inserted into the first locking hole (5121). In the unlocked state, the first locking pin (62) disengages from the first locking hole (5121).

7. The optical component loading and unloading device according to claim 1, characterized in that: The translation mechanism (8) includes: The guide rail (81) is arranged on the second flipping frame (51) in the left-right direction; The slide (82) is mounted on the guide rail (81) in a way that allows it to slide left and right. A lead screw (83) extends in the left-right direction and is threadedly connected to the slide (82); The third driving member (84) is used to drive the lead screw (83) to rotate around its own axis; as well as A locking assembly (85) is used to lock and unlock the slide (82) and the component fixture (7).

8. The optical component loading and unloading device according to claim 7, characterized in that: The component fixture (7) is provided with a second locking piece (72), which has a second locking hole (721) arranged through in the front-back direction; The locking assembly (85) includes: The second mounting base (851) is mounted on the slide (82) and has a second limiting groove (8511) into which the second locking piece (72) extends; The second locking pin (852) extends in the front-rear direction and can slide in and out of the second limiting groove (8511); and The second drive assembly (853) is used to drive the second locking pin (852) to move back and forth; In the locked state, the second locking piece (72) extends into the second limiting groove (8511), and the second locking pin (852) is inserted into the second locking hole (721); In the unlocked state, the second locking pin (852) disengages from the second locking hole (721).

9. The optical element loading and unloading device according to any one of claims 1 to 8, characterized in that: It also includes a lifting mechanism (3) for driving the base (2) to rise and fall relative to the mobile platform (1).

10. The optical component loading and unloading device according to claim 9, characterized in that: The mobile platform (1) is equipped with a first slide rail (12) extending in the front-back direction, and the base (2) is equipped with a second slide rail (21) extending in the front-back direction. The lifting mechanism (3) includes: The first scissor arm (31) and the second scissor arm (32) are arranged in an X-shape and are hinged at the intersection. The first ends of the first scissor arm (31) and the second scissor arm (32) are respectively hinged to the moving platform (1) and the base (2). The second ends of the first scissor arm (31) and the second scissor arm (32) are respectively rotatably mounted in the second slide rail (21) and the first slide rail (12). as well as The first driving member (33) is used to drive the first scissor arm (31) and the second scissor arm (32) to rotate relative to each other.

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