A carrier assembly for chemical mechanical polishing

Abstract

The application provides a bearing assembly for chemical mechanical polishing, comprising a damping module, a driving module and a bearing head; wherein the damping module comprises a spindle with a cavity inside and a first damping unit in the cavity, the first damping unit comprises a core and a plurality of damping blocks arranged on the outer wall of the core, the damping blocks extrude the inner wall of the cavity to absorb the transverse vibration of the spindle. The core is placed in the spindle, which enhances the damping and anti-vibration effect, in addition, the plurality of damping blocks arranged on the outer wall of the core can absorb the transverse excitation generated from the polishing head grinding, the compression resistance of the damping blocks is fully utilized, the original shearing and tensile working state is changed to a compression working state, the transverse damping capacity is increased, and the reset and limiting effects are also exerted.

Description

[0001] This application is a divisional application of the invention patent application filed on December 28, 2022, with application number 2022116948579. Technical Field

[0002] This invention belongs to the field of wafer manufacturing technology, and more specifically, relates to a support component for chemical mechanical polishing. Background Technology

[0003] The integrated circuit industry is the core of the information technology industry, playing a crucial role in promoting the digital and intelligent transformation and upgrading of the manufacturing industry. Chips are the carriers of integrated circuits, and chip manufacturing involves processes such as chip design, wafer fabrication, wafer processing, electrical measurement, dicing, packaging, and testing. Chemical mechanical polishing (CMP) is a wafer fabrication process.

[0004] Chemical mechanical polishing (CMP) is an ultra-precision surface finishing technique that achieves global planarization. In CMP, the wafer is typically held in place by the bottom surface of a support head, with the side of the wafer containing the deposited layer pressed against the upper surface of a polishing pad. The support head, driven by a drive assembly, rotates in the same direction as the polishing pad, applying a downward load to the wafer. Simultaneously, polishing fluid is supplied to the upper surface of the polishing pad and distributed between the wafer and the pad, allowing the wafer to undergo chemical and mechanical polishing through a combination of chemical and mechanical processes.

[0005] Vibration occurs during the polishing process of CMP, especially in some high-pressure polishing processes, where the vibration may be aggravated. When the rotation speed of the polishing head or polishing disc is changed, or the polishing pressure is further increased, the vibration may also cause the frame to vibrate, which may directly affect the wafer polishing effect. Summary of the Invention

[0006] This invention aims to at least partially address one of the technical problems in the related art. To this end, this invention proposes a support component for chemical mechanical polishing.

[0007] An embodiment of the present invention provides a support component for chemical mechanical polishing, comprising:

[0008] Vibration damping module, drive module, and load-bearing head;

[0009] The vibration damping module includes a main shaft with an internal cavity and a first vibration damping unit located within the cavity. The first vibration damping unit includes a core and a plurality of damping blocks disposed on the outer wall of the core. The damping blocks press against the inner wall of the cavity to absorb the lateral vibration of the main shaft.

[0010] In some embodiments, the drive module includes a drive unit and a bracket located on top of the drive unit. The bracket is a rigid frame structure used to fix the vibration damping module inside the drive unit.

[0011] In some embodiments, the chemical mechanical polishing apparatus further includes a rotary joint that interfaces with the vibration damping module to transmit the driving force required for the rotation of the bearing head.

[0012] In some embodiments, multiple gas channels are formed axially within the spindle. These gas channels are either zigzag or curved to avoid the spindle region where the first damping unit is located.

[0013] In some embodiments, the gas channel includes a first vertical air passage, a transverse air passage, and a second vertical air passage that pass through in sequence; wherein, the transverse air passage is formed by radially perforating the outer wall of the main shaft, and a sealing element is provided at the opening of the transverse air passage on the outer wall of the main shaft.

[0014] In some embodiments, limiting portions are formed at both ends of the spindle, and an elastic element is sleeved on the outer periphery of the limiting portion. The elastic element abuts against the top or bottom surface of the cavity to absorb the longitudinal vibration of the spindle.

[0015] A damping ring is also disposed between the limiting part and the elastic element, and the outer wall of the damping ring abuts against the inner wall of the cavity.

[0016] In some embodiments, the vibration damping module further includes a second vibration damping unit located at the top of the spindle, and the vibration damping module is fixedly connected to the bracket via the second vibration damping unit.

[0017] In some embodiments, the second vibration damping unit includes a vibration damping sleeve and a vibration damping rib. The vibration damping sleeve is arranged around the outer periphery of the main shaft, and a bearing seat is arranged circumferentially inside the vibration damping sleeve. One end of the vibration damping rib is connected to the outer wall of the vibration damping sleeve, and the other end is connected to the bracket to suspend the main shaft in the drive module.

[0018] In some embodiments, the second damping unit further includes a plurality of damping blocks disposed around the periphery of the bearing housing, the damping blocks being in close contact with the inner wall of the damping sleeve and the outer ring of the bearing housing, and absorbing the lateral vibration of the spindle by compression.

[0019] In some embodiments, the outer wall of the damping sleeve is provided with a plurality of adjusting members for adjusting the preload between the damping block and the bearing seat.

[0020] Compared with the prior art, the beneficial effects of the present invention include:

[0021] This invention places a core inside the spindle, which enhances vibration damping and resistance, improving the structural stability of the spindle and also increasing its vertical vibration damping effect. Furthermore, multiple damping blocks on the outer wall of the core fix the core within the cavity. Simultaneously, the damping blocks, in close contact with the inner wall of the cavity, absorb the lateral vibrations generated by the polishing head by compressing the inner wall. This fully utilizes the compressive strength of the damping blocks, changing the original shear and tension working state to a compression working state, increasing lateral vibration damping while also providing a repositioning and limiting function. Attached Figure Description

[0022] The advantages of the present invention will become clearer and easier to understand through the following detailed description in conjunction with the accompanying drawings, which are merely illustrative and do not limit the scope of protection of the present invention, wherein:

[0023] Figure 1 This is a schematic diagram of the structure of a carrier component provided in one embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the structure of a vibration reduction module provided in one embodiment of the present invention;

[0025] Figure 3 This is a cross-sectional view of a vibration damping module provided in one embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the structure of the first vibration damping unit provided in one embodiment of the present invention;

[0027] Figure 5 This is a cross-sectional view of a second vibration damping unit provided in one embodiment of the present invention. Detailed Implementation

[0028] The technical solutions of the present invention will be described in detail below with reference to specific embodiments and accompanying drawings. The embodiments described herein are specific implementations of the present invention, used to illustrate the concept of the present invention; these descriptions are explanatory and exemplary, and should not be construed as limiting the implementation methods or the scope of protection of the present invention. In addition to the embodiments described herein, those skilled in the art can employ other obvious technical solutions based on the content disclosed in the claims and specification of this application. These technical solutions include those that make any obvious substitutions and modifications to the embodiments described herein.

[0029] The accompanying drawings in this specification are schematic diagrams to aid in illustrating the concept of the invention, and schematically show the shapes of the various parts and their interrelationships. It should be understood that, in order to clearly demonstrate the structure of the components in the embodiments of the invention, the drawings are not drawn to the same scale, and the same reference numerals are used to indicate the same parts in the drawings. The technical solutions of the invention will be further described below through specific embodiments.

[0030] In this invention, "Chemical Mechanical Polishing (CMP)" is also called "Chemical Mechanical Planarization (CMP)," and the wafer (W) is also called the substrate (Substrate), with the same meaning and actual function.

[0031] Figure 1 The illustrated embodiment provides a support assembly for chemical mechanical polishing, comprising:

[0032] Vibration damping module 100, drive module 200, and bearing head 300;

[0033] The vibration damping module 100 includes a main shaft 130 with an internal cavity and a first vibration damping unit 110 located inside the cavity. The first vibration damping unit 110 includes a core 111 and a plurality of damping blocks 112 disposed on the outer wall of the core 111. The damping blocks 112 compress the inner wall of the cavity to absorb the lateral vibration of the main shaft 130.

[0034] In this embodiment, a core 111 is placed inside the spindle 130. The outer diameter of the core 111 is smaller than the diameter of the cavity of the spindle 130, forming an annular gap between the internal cavity of the spindle 130 and the core 111. The core 111 enhances the vibration damping and anti-vibration effect, improves the structural stability of the spindle 130, and also improves the vibration damping effect of the spindle 130 in the vertical direction. In addition, multiple damping blocks 112 provided on the outer wall of the core 111 can fix the core 111 in the cavity. At the same time, the damping blocks 112 are in close contact with the inner wall of the cavity. By compressing the inner wall of the cavity, they can absorb the lateral excitation generated by the polishing head grinding. By making full use of the compressive strength of the damping blocks 112, the original working state under shear and tension is changed to a working state under compression. This increases the lateral vibration damping capacity and also plays a role in resetting and limiting.

[0035] The structural design of the first vibration damping unit 110 adopts a two-degree-of-freedom multi-dimensional dynamic vibration damping model. Under the condition that the total mass of the vibration damping module 100 remains unchanged, its maximum response peak value is smaller than that of the maximum response amplitude of the system equipped with a conventional dynamic vibration damper, and its amplitude-frequency response characteristics are more stable. This greatly improves the polishing quality of the wafer W, and also prevents other components from loosening or even failing due to the vibration of the bearing head 300, eliminates harmful vibrations, and improves the operating quality of the machine tool.

[0036] Figure 3 In the embodiment shown, the bottom of the cavity of the main spindle 130 is an open structure. The first damping unit 110 is inserted into the cavity from the bottom of the main spindle 130. An end cap 133 is provided at the bottom opening of the cavity. The end cap 133 seals the bottom opening of the cavity, so that the cavity is sealed. The end cap 133 and the main spindle 130 can be fixed by a detachable connection method such as threads or snaps, so as to achieve free disassembly and assembly, thereby reducing the maintenance cost and replacement cost of the core 111.

[0037] Figure 3 In the embodiment shown, the first damping unit 110 is located in the lower half of the spindle 130, closer to the vibration source bearing head 300, which can better exert the damping and vibration reduction effect of the core 111.

[0038] Specifically, Figure 4 In the embodiment shown, a total of 6 damping blocks 112 are provided on the outer periphery of the core 111. Three of the damping blocks 112 are of the same type and are located on the outer walls at both ends of the core 111. The three damping blocks 112 at one end of the core 111 are located on the same circumference and are arranged at equal intervals.

[0039] Of course, this is understandable. Figure 4 The number and position of the damping blocks 112 shown are only for illustrative description of the technical solution. Those skilled in the art need to make adaptive adjustments to the number and position of the damping blocks 112 according to the actual vibration reduction requirements and usage scenarios. The new vibration reduction structure 124 obtained after the adjustment also falls within the protection scope and disclosure scope of this invention.

[0040] It should be noted that this embodiment does not impose specific requirements or limitations on the material and shape of the core 111. Preferably, the core 111 can be made of a high-density alloy, allowing it to have a high weight within a limited space, thereby improving the static rigidity of the spindle 130. The core 111 can be a columnar structure of equal diameter or unequal diameter. When using a unequal diameter core 111, the diameter is larger and the mass is higher in the region closer to the lower part of the spindle 130. During chemical mechanical polishing, the vibration amplitude of the spindle 130 is greater closer to the bearing head 300, requiring a larger core 111 for dynamic vibration damping. By changing the diameter of different positions of the core 111, and thus changing the weight at different positions, differentiated vibration damping can be achieved at different positions of the spindle 130. When the length of the spindle 130 increases, the length of the core 111 can also be extended to achieve a better vibration damping effect.

[0041] It is understood that the above description of the material and shape of the core 111 is not intended to further limit the technical solution of this embodiment. Improvements made in the art on the material and shape of the core 111 based on this description also fall within the protection and disclosure scope of this invention.

[0042] Figure 1 In the embodiment shown, the drive module 200 includes a drive unit 220 and a bracket 210 located on top of the drive unit 220. The bracket 210 is a rigid frame structure used to fix the vibration damping module 100 inside the drive unit 220.

[0043] Figure 1 In the embodiment shown, the chemical mechanical polishing apparatus further includes a rotary joint 400, which is connected to the vibration damping module 100 to transmit the driving force required for the rotation of the bearing head 300.

[0044] Figure 3 In the embodiment shown, multiple gas channels 131 are formed along the axial direction inside the spindle 130. The gas channels 131 are in the shape of a broken line or a curve to avoid the area of ​​the spindle 130 where the first damping unit 110 is located.

[0045] The main components of the chemical mechanical polishing (CMP) apparatus used in embodiments of the present invention further include: a support head 300 for holding and rotating the wafer W, a polishing disc covered with a polishing pad 500, a dresser for dressing the polishing pad 500, and a liquid supply unit for providing polishing slurry. During the complete CMP process, the support head 300 presses the wafer W onto the polishing pad 500 covering the surface of the polishing disc. The support head 300 rotates and reciprocates radially along the polishing disc, gradually removing surface imperfections from the wafer W in contact with the polishing pad 500. Simultaneously, the polishing disc rotates, and the liquid supply unit sprays polishing slurry onto the surface of the polishing pad 500. Under the chemical action of the polishing slurry, the relative movement between the support head 300 and the polishing disc causes the wafer W to rub against the polishing pad 500 for polishing. During polishing, the dresser is used to dress and activate the surface morphology of the polishing pad 500. The dressing tool can remove impurity particles remaining on the surface of the polishing pad 500, such as abrasive particles in the polishing fluid and waste material falling off the surface of the wafer W. It can also smooth out the surface deformation of the polishing pad 500 caused by abrasion.

[0046] The bearing head 300 includes, but is not limited to, a base, an elastic membrane, and a retaining ring. Both the elastic membrane and the retaining ring are fixed to the lower surface of the base. The annular retaining ring is located on the outer periphery of the elastic membrane and surrounds it. The elastic membrane is used to adsorb the wafer W and apply downward pressure to it, while the retaining ring is used to hold the wafer W below the elastic membrane to prevent it from slipping out. The bearing head 300 has multiple chambers, which are connected to the gas channel 131 within the spindle 130. This allows for independent ventilation or extraction into each chamber via the gas channel 131 to adjust the polishing pressure applied by the bearing head 300 to the wafer W.

[0047] Figure 3 In the embodiment shown, the gas channel 131 includes a first vertical air channel, a horizontal air channel and a second vertical air channel that pass through in sequence; wherein, the horizontal air channel is formed by radially perforating the outer wall of the main shaft 130, and a sealing element is provided at the opening of the horizontal air channel on the outer wall of the main shaft.

[0048] In this embodiment, due to the presence of the first damping unit 110 within the spindle 130, the gas channel 131 within the spindle 130 cannot be perpendicularly connected along the axial direction of the spindle 130. Therefore, the gas channel 131 needs to be rerouted to bypass the first damping unit 110. Figure 3As shown, the gas channel 131 inside the spindle 130 is zigzag-shaped. After a transverse bend above the cavity of the spindle 130 to bypass the first damping unit 110, it is then vertically drilled to penetrate the spindle 130. During the machining process, a first vertical air channel is formed by drilling vertically downward from the top of the spindle 130; then a transverse air channel is formed by drilling transversely along the radial direction of the side wall of the spindle 130, and the end of the transverse air channel is connected to the end of the first vertical air channel, thus sealing the opening of the side wall of the spindle 130; finally, a second vertical air channel is formed by drilling vertically upward from the bottom of the spindle 130, and the end of the second vertical air channel is connected to the end of the transverse air channel, ultimately forming a gas channel 131 in which the first vertical air channel, the transverse air channel, and the second vertical air channel are connected in sequence.

[0049] It should be noted that a sealing element is provided at the opening of the transverse air passage on the outer wall of the main shaft 130. On the one hand, it is used to block the opening of the transverse air passage on the side wall of the main shaft to prevent air leakage, so that the gas flows unidirectionally through the first vertical air passage, the transverse air passage and the second vertical air passage. On the other hand, the sealing element can adjust the air pressure in the gas passage 131, thereby changing the frequency of the gas excitation source, increasing the difference between the frequency of the gas excitation source and the natural frequency of the gas passage 131, and preventing the gas-solid-acoustic coupling phenomenon when the gas flows through the gas passage 131, which would cause the main shaft to resonate.

[0050] Figure 3 In the embodiment shown, limiting portions 115 are formed at both ends of the spindle 130. An elastic element 114 is sleeved on the outer periphery of the limiting portion 115. The elastic element 114 abuts against the top or bottom surface of the cavity to absorb the longitudinal vibration of the spindle 130.

[0051] In this embodiment, elastic elements 114 are provided at both ends of the core 111 along the vibration reduction direction, which can effectively improve the lateral vibration isolation effect. The elastic elements 114 can be columnar springs or rubber pads. The elastic elements 114 are sleeved on the outer periphery of the limiting part 115. By providing the elastic elements 114, the stiffness of the core 111 in the vertical direction can be increased. At the same time, by replacing the elastic elements 114 with different elastic moduli, the stiffness of the entire first vibration reduction unit 110 can be adjusted in the vertical direction, thereby effectively avoiding the resonance phenomenon between the main shaft 130 and the first vibration reduction unit 110.

[0052] Figure 3 In the embodiment shown, a damping ring 113 is also disposed between the limiting part 115 and the elastic member 114, and the outer wall of the damping ring 113 abuts against the inner wall of the cavity.

[0053] In this embodiment, limiting portions 115 are respectively provided at both ends of the core 111, and the limiting portions 115 are formed by extending axially from both end faces of the core 111. The diameter of the limiting portion 115 is smaller than the diameter of the core 111, so that an annular stepped surface is formed between the limiting portion 115 and the core 111. The elastic members 114 at both ends of the core 111 are sleeved on the outer periphery of the limiting portion 115, and the elastic members 114 axially restrict and axially damp the core 111. The damping ring 113 is sleeved between the elastic member 114 and the annular stepped surface. The end face of the elastic member 114 abuts against the top or bottom surface of the cavity of the main shaft 130, and the outer peripheral surface of the damping ring 113 abuts against the inner wall surface of the cavity. The core 111, damping block 112, damping ring 113 and elastic element 114 constitute a vibration reduction model with a two-degree-of-freedom vibration reduction effect. While making full use of the vibration reduction performance of damping block 112, damping ring 113 and elastic element 114, it also extends the service life of the polishing equipment.

[0054] Figure 2 In the embodiment shown, the vibration damping module 100 further includes a second vibration damping unit 120 located at the top of the spindle 130, and the vibration damping module 100 is fixedly connected to the bracket 210 via the second vibration damping unit 120.

[0055] Figure 5 In the embodiment shown, the second vibration damping unit 120 includes a vibration damping sleeve 121 and a vibration damping rib 122. The vibration damping sleeve 121 is arranged around the outer periphery of the main shaft 130. A bearing seat 125 is arranged circumferentially inside the vibration damping sleeve 121. One end of the vibration damping rib 122 is connected to the outer wall of the vibration damping sleeve 121, and the other end is connected to the bracket 210 to suspend the main shaft 130 in the drive module 200.

[0056] Figure 2 In the embodiment shown, the second vibration damping unit 120 includes a plate-shaped vibration damping rib 122 symmetrically arranged on the outer periphery of the vibration damping sleeve 121. It is butterfly-shaped and has an inner short arc edge and an outer long arc edge. The inner short arc edge of the vibration damping rib 122 is detachably fixed to the outer periphery of the vibration damping sleeve 121, and the outer long arc edge of the vibration damping rib 122 is detachably fixed to the bracket 210 by a plurality of fixing bolts.

[0057] Preferably, the inner short arc edge of the damping rib 122 is fixedly connected to the damping sleeve 121 via the damping structure 124. Further, the damping structure 124 may optionally include a damping body and a disc spring. The damping rib 122, disc spring, damping body, and damping sleeve 121 are detachably fixedly connected by connecting screws. The connecting screws pass through the damping sleeve 121, damping body, damping rib 122, and disc spring sequentially from bottom to top before being locked in place. The disc spring ensures a large elastic force within a small space, allowing vibrations reaching the top of the spindle 130 to be first transmitted to the damping structure 124. The vibration energy is partially absorbed and weakened by the damping structure 124 before being transmitted to the damping rib 122, where the vibration energy is further absorbed and weakened.

[0058] The vibration damping rib 122 provided in this embodiment has functions including, but not limited to, reducing the vertical vibration of the vibration damping module 100. It should be noted that this embodiment does not impose specific requirements or limitations on the material and shape of the vibration damping rib 122. Preferably, the material of the vibration damping rib 122 can be spring steel. Its structure is a plate-like structure with perforations, and the perforations can improve its overall elastic modulus. Further, the perforations on the vibration damping rib 122 can include through slots formed thereon; specifically, the through slots can optionally be arc-shaped.

[0059] It is understood that the above description of the material and shape of the vibration damping rib 122 is not intended to further limit the technical solution of this embodiment. Improvements made in the art on the material and shape of the vibration damping rib 122 based on this description also fall within the protection scope and disclosure scope of this invention.

[0060] Figure 5 In the embodiment shown, the second damping unit 120 further includes a plurality of damping blocks 123 disposed around the bearing housing 125. The damping blocks 123 are in close contact with the inner wall of the damping sleeve 121 and the outer ring of the bearing housing 125, and absorb the lateral vibration of the spindle 130 by compression.

[0061] In this embodiment, the damping sleeve 121 has multiple fixing grooves for fixing the damping block 123. The top of the damping sleeve 121 is covered with a retaining ring, and there is a gap between the top of the damping block 123 and the retaining ring. When the main shaft 130 is vibrated and the bearing seat 125 wobbles, the bearing seat 125 can freely squeeze the damping block 123, converting the vibration energy into frictional damping inside the damping block 123 for consumption.

[0062] like Figure 2As shown, a sleeve 132 is fitted around the outer periphery of the spindle 130 to support the bearing housing 125 located above it. A locking element is provided on the bearing housing 125 to lock the relative movement of the inner ring of the bearing housing 125 and the sleeve 132, ensuring synchronous rotation between them. During chemical mechanical polishing, the inner ring of the bearing housing 125, the sleeve 132, and the spindle 130 are fixed, while the outer ring of the bearing housing 125 is fixed to the damping sleeve 121. Relative rotation between the spindle 130 and the damping sleeve 121 is achieved through the balls within the bearing housing 125. The rotary joint 400 transmits rotational driving force via the damping module 100 to rotate the bearing head 300. At this time, the inner ring of the bearing housing 125, the sleeve 132, and the spindle 130 rotate synchronously, while the outer ring of the bearing housing 125, the damping sleeve 121, and several damping blocks 123 located inside the damping sleeve 121 remain stationary.

[0063] In the second vibration damping unit 120, multiple damping blocks 123 surrounding the outer periphery of the main shaft 130 absorb vibrations in different directions within the horizontal plane. When lateral vibration is transmitted, the damping blocks 123 around the bearing housing 125 deform to varying degrees. Since there are lateral vibrations in different directions within the same horizontal plane, the torque generated by the vibration energy in different directions on the damping blocks 123 is also different. Therefore, the deformation of different damping blocks 123 is also different, thereby better absorbing lateral vibrations in different directions within the horizontal plane and reducing the lateral vibration of the main shaft 130.

[0064] In some embodiments, the outer wall of the damping sleeve 121 is provided with a plurality of adjusting members for adjusting the preload between the damping block 123 and the bearing seat 125.

[0065] Figure 2 In the embodiment shown, the adjusting member is mainly used to adjust the preload between the damping block 123 and the bearing seat 125 to change its rigidity, thereby tuning the damping effect.

[0066] It should be noted that this embodiment does not impose specific requirements or limitations on the structure of the adjusting component. Optionally, the adjusting component includes a bolt with a threaded sleeve fitted on the stud bolt, forming a threaded engagement with the stud. A lock nut is also fitted on the stud, and the rotation of the threaded sleeve is restricted by tightening the lock nut. After the bolt passes through the outer wall of the damping sleeve 121, it abuts against the damping block 123. By tightening the threaded sleeve, the amount of bolt protrusion inside the damping sleeve 121 can be adjusted, thereby adjusting the preload between the damping block 123 and the bearing seat 125.

[0067] It is understood that the above description of the structure of the adjusting member is not intended to further limit the technical solution of this embodiment, and any improvements made to the structure of the adjusting member based on this description also fall within the protection and disclosure scope of this invention.

[0068] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A support component for chemical mechanical polishing, characterized in that, The system includes a vibration damping module, a drive module, and a bearing head. The vibration damping module includes a main shaft with an internal cavity and a first vibration damping unit located within the cavity. The first vibration damping unit includes a core and multiple damping blocks disposed on the outer wall of the core. The damping blocks compress the inner wall of the cavity to absorb the lateral vibration of the main shaft. The drive module includes a drive unit and a bracket located on top of the drive unit. The bracket is a rigid frame structure used to fix the vibration damping module within the drive unit. The vibration damping module also includes a second vibration damping unit located on top of the main shaft. The vibration damping module is fixedly connected to the bracket via the second vibration damping unit. The core is characterized by having a unequal diameter columnar structure with varying cross-sectional dimensions along the axial direction. The core diameter gradually increases from the end furthest from the bearing head to the end closest to the bearing head, such that the mass per unit length of the core near the bearing head is greater than the mass per unit length of the core furthest from the bearing head, thereby providing differentiated vibration damping for vibrations at different axial positions.

2. The load-bearing component according to claim 1, characterized in that, The core is made of a high-density alloy material.

3. The load-bearing component according to claim 1, characterized in that, The number of damping blocks is six. Three damping blocks are grouped together and located on the outer walls of both ends of the core. The three damping blocks located at the same end are located on the same circumference and are arranged at equal intervals.

4. The load-bearing component according to claim 1, characterized in that, Limiting portions are formed at both ends of the main shaft. An elastic element is sleeved on the outer periphery of the limiting portion. The elastic element abuts against the top or bottom surface of the cavity to absorb the longitudinal vibration of the main shaft. A damping ring is also disposed between the limiting portion and the elastic element. The outer wall of the damping ring abuts against the inner wall of the cavity.

5. The load-bearing component according to claim 4, characterized in that, The core, damping block, damping ring, and elastic element together constitute a vibration reduction model with a two-degree-of-freedom vibration reduction effect, which makes its maximum response peak smaller than that of a conventional dynamic vibration damper system when the total mass of the vibration reduction module remains unchanged, and its amplitude-frequency response characteristics are more stable.

6. The load-bearing component according to claim 1, characterized in that, The second vibration damping unit includes a damping sleeve and a damping rib. The damping sleeve is arranged around the outer periphery of the main shaft and has a bearing seat arranged circumferentially inside it. One end of the damping rib is connected to the outer wall of the damping sleeve, and the other end is connected to the bracket to suspend the main shaft in the drive module. The second vibration damping unit also includes a plurality of damping blocks arranged around the bearing seat. The damping blocks are in close contact with the inner wall of the damping sleeve and the outer ring of the bearing seat. They absorb the lateral vibration of the main shaft by compression. A gap is left between the top of the damping block and the retaining ring covering the top of the damping sleeve to convert the vibration energy into frictional damping inside the damping block for consumption.

7. The load-bearing component according to claim 6, characterized in that, The vibration damping rib is a plate-shaped structure. Its inner edge, which is connected to the vibration damping sleeve, is arc-shaped, and its outer edge, which is connected to the bracket, is arc-shaped. The vibration damping rib has multiple hollowed-out parts to improve its elastic modulus. The inner edge of the damping rib is connected to the outer wall of the damping sleeve through a damping structure, which includes a damping body and a disc spring.

8. The load-bearing component according to claim 6, characterized in that, The outer wall of the damping sleeve is provided with multiple adjusting components for adjusting the preload between the damping block and the bearing seat; the adjusting components include a bolt, a threaded sleeve fitted on the bolt, and a locking nut, and the amount of the bolt protruding inside the damping sleeve can be adjusted by turning the threaded sleeve.

9. The load-bearing component according to claim 1, characterized in that, Multiple gas channels are formed axially within the main shaft. These gas channels are either zigzag or curved to avoid the main shaft area where the first damping unit is located. Each gas channel includes a first vertical air passage, a transverse air passage, and a second vertical air passage that pass through it sequentially. The transverse air passage is formed by radially perforating the outer wall of the main shaft. A sealing element is provided at the opening of the transverse air passage on the outer wall of the main shaft. The sealing element is used to seal the opening and adjust the gas pressure within the gas passage to change the frequency of the gas excitation source.

10. The load-bearing component according to claim 1, characterized in that, The load-bearing assembly also includes a rotary joint that interfaces with the vibration damping module to transmit the driving force required for the rotation of the load-bearing head.

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