Method for realizing manual batch automatic dispatching based on semiconductor manufacturing execution system
By realizing the automatic dispatch method of manual batches in the semiconductor manufacturing execution system, the problem that the real-time dispatch module cannot handle the manual batch formation is solved, the production efficiency is improved, and the automated preparation and dispatch of batches are ensured.
Patent Information
- Application Number
- CN202411227580.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-03
- Publication Date
- 2024-12-10
AI Technical Summary
In the semiconductor integrated circuit manufacturing workshop, the real-time dispatch module cannot effectively dispatch the batches of manual or prepared batches, resulting in inefficient production efficiency.
By realizing the automatic dispatch method of manual batches in the semiconductor manufacturing execution system, the real-time dispatch module performs port batch loading according to the scheduling rules, finds manual batches, allocates vehicles and generates transfer tasks, and delivers batches to the equipment port. Ensure automated preparation and dispatch of batches.
It realizes automated preparation and dispatch of manual batches, improves production efficiency, and ensures the automated processing of batches and the smooth completion of tasks.
Smart Images
Figure CN119108312A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a method for supporting automatic dispatching of manual batch processing of a semiconductor manufacturing execution system. Background Art
[0002] In semiconductor integrated circuit manufacturing workshops, the real-time dispatching module has no way to dispatch batches in the manual group or batches that have been prepared, resulting in low production efficiency. Summary of the invention
[0003] In order to solve the technical problems existing in the prior art, the present invention provides a method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system.
[0004] To achieve the above object, the technical solution of the present invention is as follows:
[0005] A method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system comprises the following steps:
[0006] Step 1: Create a batch, and the batch is in the classification state;
[0007] Step 2: After the manufacturing execution system receives the dispatch request sent by the equipment automation platform, it changes the port status to ready for dispatch;
[0008] Step 3: The real-time dispatching module executes port batch loading according to the scheduling rules;
[0009] Step 4: Find the manual batches in the batch and check them;
[0010] Step 5, add the manual batch to the manual batch list, and assign port positions of the carriers of the manual batch according to available ports;
[0011] Step 6: Generate a manual batch transfer task according to the manual batch transfer carrier list;
[0012] Step 7: Move the manual batch to the device port.
[0013] As a preferred technical solution, in step one, when creating batches, each batch has the same formula and the same status.
[0014] As a preferred technical solution, step five includes: executing batch loading of available ports; creating real-time scheduling batches with query records; creating real-time scheduling vehicles with query records and associating them with real-time scheduling batches; if the batch has been successfully dispatched but the transportation failed, skipping the batch; determining whether the batch type matches the equipment license type, and if so, adding the batch to the batch list; after all query results are processed, recording the available port ID, filtering the batch list, and proceeding to the next step.
[0015] As a preferred technical solution, the manual batch transfer process includes the following steps: extracting tasks with the same material as the current dispatch port and in a predetermined status from the preparation list; sorting the extracted structure; dispatching vehicles according to available ports; dispatching, and if the dispatch is successful, waiting for the subsequent batch to arrive. If the dispatch fails, check whether there is a prepared batch. If so, directly schedule it. If not, manually assemble the batch and prepare it automatically.
[0016] As a preferred technical solution, the conditions for extracting tasks from the preparation list are: the vehicle is waiting for transportation and is not on the dispatching equipment; the vehicle is not waiting for transportation and the destination can be changed.
[0017] As a preferred technical solution, the inspection items for manual batch dispatch include: port material matching, batch rules, monitoring batch count, number of available carriers, maximum number of carriers, maximum number of pieces in a product batch, minimum number of carriers, minimum number of pieces in a product batch, and locked carriers.
[0018] Compared with the prior art, the present invention has the following beneficial effects:
[0019] The method for realizing automatic dispatching of manual batches based on semiconductor manufacturing execution system of the present invention is that the real-time dispatching module is responsible for grabbing the batches of the manual group and sending instructions to the handling module in the manufacturing execution system, and the handling module is responsible for sending the handling instructions to the material control system, thereby realizing automatic dispatching of manual batches. Specifically, the following functions can be realized:
[0020] (1) When preparing a batch for a manual group, all batches in the manual group are automatically prepared and the task ID is the same;
[0021] (2) automatically forming a manual group after successfully preparing multiple batches that have not been formed into a manual group;
[0022] (3) Manual batches that have been organized into manual groups but not yet prepared will be dispatched. After the dispatch is successful, they will be automatically prepared. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a flow chart of executing port batch loading in the method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system of the present invention;
[0024] Figure 2 It is a flow chart of manual batch scheduling in the method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system of the present invention. DETAILED DESCRIPTION
[0025] The technical solution of the present invention is further described below in conjunction with specific implementation methods:
[0026] A method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system comprises the following steps:
[0027] Step 1: Create a batch, and the batch is in the classification state;
[0028] Step 2: After the manufacturing execution system receives the dispatch request sent by the equipment automation platform, it changes the port status to ready for dispatch;
[0029] Step 3: The real-time dispatching module executes port batch loading according to the scheduling rules;
[0030] Step 4: Find the manual batches in the batch and check them;
[0031] Step 5, add the manual batch to the manual batch list, and assign port positions of the carriers of the manual batch according to available ports;
[0032] Step 6: Generate a manual batch transfer task according to the manual batch transfer carrier list;
[0033] Step 7: Move the manual batch to the device port.
[0034] User operation scenario:
[0035] Manual Batch means manual batch grouping; Manual Prepare Batch means manual batch preparation; DispatchManual Batch means manual batch scheduling.
[0036]
[0037] like Figure 1 As shown, when performing port batch loading, query all batches that can be dispatched to the port according to the port, create a real-time dispatch batch according to the query record; create a real-time dispatch carrier according to the query record and associate it with the real-time dispatch batch; if the batch has been dispatched successfully but the transportation fails, skip the batch; determine whether the batch type matches the equipment license type, if it matches, add the batch to the batch list; after all query results are processed, record the available port ID, filter the batch list, and enter the next step. Available Port Lot Loader is available port batch loading, Rtd is the real-time dispatch module, Carrier is the carrier, and Lot-List is the batch list.
[0038] like Figure 2As shown, in the process of manual batch automatic dispatching, manual batch scheduling includes the following steps: extracting tasks with the same material as the current dispatch port and in the scheduled status from the preparation list; sorting the extracted structure; dispatching vehicles according to available ports; dispatching, and if the dispatch is successful, wait for the subsequent batch to arrive. If the dispatch fails, check whether there is a prepared batch. If so, dispatch it directly. If not, manually assemble the batch and prepare it automatically.
[0039] The conditions for extracting tasks from the preparation list are: the vehicle is waiting for transportation and is not on the dispatching equipment; the vehicle is not waiting for transportation and the destination can be changed.
[0040] The following table shows the inspection items for manual batch dispatch:
[0041]
[0042]
[0043]
[0044] This embodiment is only a further explanation of the invention rather than a limitation of the invention. After reading this specification, those skilled in the art may make non-creative modifications to this embodiment as needed. However, as long as they are within the scope of the claims of the invention, they are protected by the patent law.
Claims
1. A method for realizing automatic dispatching of manual batches based on a semiconductor manufacturing execution system, characterized in that: The following steps are involved: Step 1: Create a batch, and the batch is in the classification state; Step 2: After the manufacturing execution system receives the dispatch request sent by the equipment automation platform, it changes the port status to ready for dispatch; Step 3: The real-time dispatching module executes port batch loading according to the scheduling rules; Step 4: Find the manual batches in the batch and check them; Step 5, add the manual batch to the manual batch list, and assign port positions of the carriers of the manual batch according to available ports; Step 6: Generate a manual batch transfer task according to the manual batch transfer carrier list; Step 7: Move the manual batch to the device port.
2. The method for supporting automatic dispatching of manual batch processing in a semiconductor manufacturing execution system according to claim 1, characterized in that: In step 1, when creating batches, each batch has the same formula and the same status.
3. The method for supporting automatic dispatching of manual batch processing in a semiconductor manufacturing execution system according to claim 1, characterized in that: The step five includes: executing batch loading of available ports; creating a real-time scheduling batch based on query records; creating a real-time scheduling vehicle based on query records and associating it with the real-time scheduling batch; skipping the batch if the batch has been dispatched successfully but the transportation fails; determining whether the batch type matches the equipment license type, and if so, adding the batch to the batch list; after all query results are processed, recording the available port ID, filtering the batch list, and proceeding to the next step.
4. The method for supporting automatic dispatching of manual batch processing in a semiconductor manufacturing execution system according to claim 1, characterized in that: The manual batch transfer process includes the following steps: extracting tasks with the same material as the current dispatch port and in the scheduled status from the preparation list; sorting the extracted structure; dispatching vehicles according to available ports; dispatching, and if the dispatch is successful, wait for the subsequent batch to arrive. If the dispatch fails, check whether there is a prepared batch. If so, directly schedule it. If not, manually form a batch and prepare it automatically.
5. The method for supporting automatic dispatching of manual batch processing in a semiconductor manufacturing execution system according to claim 4, characterized in that: The conditions for extracting tasks from the preparation list are: the vehicle is waiting for transportation and is not on the dispatching equipment; the vehicle is not waiting for transportation and the destination can be changed.
6. The method for supporting automatic dispatching of manual batch processing in a semiconductor manufacturing execution system according to claim 1, characterized in that: The inspection items for manual batch dispatch include: port material matching, batch rules, monitoring batch count, number of available carriers, maximum number of carriers, maximum number of pieces in a product batch, minimum number of carriers, minimum number of pieces in a product batch, and locked carriers.