Adsorption mechanism, optical detection equipment and display panel production equipment

Abstract

The invention provides an adsorption mechanism, optical detection equipment and display panel production equipment. The adsorption mechanism comprises a base station, an adsorption part and a conductive assembly, an accommodating channel is formed in the base table; the adsorption piece is installed on the first surface of the base table, the adsorption piece comprises an adsorption body and a first conductive part capable of extending into the containing channel, and the adsorption body is used for generating an adsorption effect on a product to be adsorbed; and one end of the conductive assembly is arranged in the accommodating channel and is connected with the first conductive part of the adsorption piece, and the other end of the conductive assembly extends out of the accommodating channel and is grounded. Therefore, the adsorption part is grounded through the conductive assembly, and the problem that the grounding resistance of the adsorption part is difficult to reach the electrostatic discharge detection standard can be solved.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of display panel production, and in particular to an adsorption mechanism, an optical detection device, and a display panel production device. Background Art

[0002] In the production process of precision devices, such as display panels, adsorption mechanisms are often used as handling tools or fixing tools, and optical inspection equipment is also used. The optical equipment includes an adapted adsorption mechanism, a camera, a first light source, and a second light source. The display panel to be inspected can be fixed by adsorption by the adsorption mechanism. The adsorption mechanism generally includes a transparent platform and a vacuum suction cup arranged on the transparent platform. The first light source and the second light source are respectively located on the upper and lower sides of the transparent platform and simultaneously fill light toward the platform. The camera is located above the platform and is used to photograph the product adsorbed by the vacuum suction cup. Whether the product is qualified can be determined by analyzing the photos taken by the camera.

[0003] Among them, the static electricity generated on the vacuum suction cup can easily damage precision devices such as display panels, so the surface resistance and ground resistance of the vacuum suction cup must meet the ESD (Electro Static Discharge) detection standard.

[0004] Transparent platforms are generally made of plastic polymer materials with poor electrical conductivity. For example, a transparent platform made of plexiglass (Acrylic) can meet the optical transmittance requirements, but plexiglass has poor electrical conductivity. After the suction cup is installed on the transparent plexiglass platform, there will be a problem of unqualified grounding resistance, which is prone to static electricity damage to the product. Summary of the invention

[0005] In order to solve the above problems, the embodiments of the present application provide an adsorption mechanism, an optical detection device and a display panel production device to at least partially solve the above problems.

[0006] In the first aspect, the present application provides an adsorption mechanism, comprising a base, an adsorption piece and a conductive component; a receiving channel is arranged inside the base; the adsorption piece is installed on the first surface of the base, the adsorption piece comprises an adsorption body and a first conductive part which can extend into the receiving channel, and the adsorption body is used to produce an adsorption effect on the product to be adsorbed; one end of the conductive component is arranged in the receiving channel and connected to the first conductive part of the adsorption piece, and the other end of the conductive component extends out of the receiving channel and is grounded.

[0007] Optionally, the conductive component includes a metal coil spring, and the metal coil spring is located in the accommodating channel. Preferably, the outer diameter of the metal coil spring is the same as the inner diameter of the accommodating channel.

[0008] Optionally, the conductive component further includes a connector and a metal lead, wherein the connector is connected to the base and closes one end of the accommodating channel; the connector includes a second conductive portion, one side of the second conductive portion is connected to the metal coil spring, and the other side is connected to the metal lead, and the metal coil spring and the metal lead are conductively connected via the connector.

[0009] Optionally, one end of the accommodating channel is closed and the other end is open, one end of the metal coil spring abuts against the closed end of the accommodating channel, and the other end abuts against the connecting piece, and the metal coil spring is in a compressed state.

[0010] Optionally, the axial direction of the accommodating channel is parallel to the first surface of the base.

[0011] Optionally, the first conductive part has an external thread, and the first conductive part passes through the adsorption body and is threadedly connected to the base.

[0012] Optionally, the base further includes a vacuum channel, the accommodating channel and the vacuum channel are cross-distributed on the base, and the accommodating channel and the vacuum channel are connected, the adsorbent includes an air hole, and the air hole is connected to the vacuum channel to achieve vacuum adsorption. Preferably, the axial direction of the vacuum channel is parallel to the first surface of the base.

[0013] In a second aspect, the present application provides an optical detection device, comprising a first light source, a second light source, a camera and the above-mentioned adsorption mechanism, wherein the base is made of a transparent material, the base comprises a second surface opposite to the first surface, the first light source and the camera are located on the side where the first surface is located, and the second light source is located on the side where the second surface is located.

[0014] On the third aspect, the present application also provides a display panel production device, characterized in that it includes an optical detection component and the above-mentioned adsorption mechanism, the adsorption mechanism is used to adsorb the display panel, and the optical detection component is used to take a picture of the display panel on the adsorption mechanism to obtain an image and analyze the image.

[0015] Optionally, the optical detection component includes a first light source, a second light source, a camera and an image analyzer, the base is made of transparent material, the base includes a second surface opposite to the first surface, the first light source and the camera are located on the side where the first surface is located, and the second light source is located on the side where the second surface is located; the image analyzer is communicatively connected to the camera to acquire an image.

[0016] Based on the above-mentioned adsorption mechanism provided by the present application, since the conductive component passes through the accommodating channel inside the base, one end is grounded and the other end is not connected to the first conductive part of the adsorption component. In this way, the static electricity generated on the conductive component can be conducted away through the conductive component, thereby facilitating the grounding resistance of the adsorption component to reach the electrostatic discharge detection standard. Then, when the adsorption body adsorbs display panel products, the probability of the static electricity of the adsorption component damaging such products can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following drawings are intended only to illustrate and explain the present application, and do not limit the scope of the present application.

[0018] Figure 1 is a cross-sectional schematic diagram of an adsorption mechanism provided by an exemplary embodiment of the present application;

[0019] Figure 2 is a three-dimensional schematic diagram of an adsorption mechanism provided by an exemplary embodiment of the present application;

[0020] Figure 3 is another cross-sectional schematic diagram of an adsorption mechanism provided by an exemplary embodiment of the present application;

[0021] Figure 4 is another cross-sectional schematic diagram of an adsorption mechanism provided by an exemplary embodiment of the present application;

[0022] Figure 5 It is a schematic diagram of an optical detection device provided by an exemplary embodiment of the present application.

[0023] Description of reference numerals:

[0024] 10-base, 11-accommodating channel, 12-vacuum channel;

[0025] 20-adsorption member, 21-adsorption body, 211-vent hole, 22-first conductive part;

[0026] 30-conductive component, 31-metal spiral spring, 32-metal lead, 33-connector;

[0027] 40 - trachea, 51 - first light source, 52 - second light source, 53 - camera. DETAILED DESCRIPTION

[0028] In order to have a clearer understanding of the technical features, purposes and effects of the embodiments of the present application, the specific implementation methods of the embodiments of the present application are now described with reference to the accompanying drawings.

[0029] In this document, “exemplary” means “serving as an example, instance or illustration”, and any diagram or implementation described in this document as “exemplary” should not be interpreted as a more preferred or more advantageous technical solution.

[0030] In order to simplify the drawings, only the parts related to the present application are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one or more of the parts with the same structure or function are schematically drawn or only one or more of them are marked.

[0031] First, refer to Figures 1 to 3 The present application first provides an adsorption mechanism, including a base 10, an adsorption member 20 and a conductive component 30; a receiving channel 11 is arranged inside the base 10; the adsorption member 20 is installed on the first surface of the base 10, and the adsorption member 20 includes an adsorption body 21 and a first conductive part 22 that can extend into the receiving channel 11; the adsorption body 21 is used to produce an adsorption effect on the product to be adsorbed, one end of the conductive component 30 is arranged in the receiving channel 11 and connected to the first conductive part 22 of the adsorption member 20, and the other end of the conductive component 30 extends out of the receiving channel 11 and is grounded.

[0032] Based on the above technical solution, since the conductive component 30 passes through the accommodating channel 11 inside the base 10, one end is grounded, and the other end is connected to the first conductive non-22 of the adsorption member 20, the static electricity on the adsorption body 21 can be conducted through the conductive component 30, so that the grounding resistance of the adsorption member 20 can reach the ESD (Electro Static Discharge) electrostatic discharge detection standard. Then, when the adsorption body 21 adsorbs display panel products, the probability of the adsorption body 21 damaging such products by static electricity can be reduced. Especially for the adsorption mechanism of the base 10 with poor conductivity, for example, when the base 10 is made of transparent organic glass, it is difficult to conduct the static electricity generated on the conductive component 30 due to the poor conductivity of organic glass. Then, by setting the conductive component 30, this shortcoming of organic glass can be compensated, and the static electricity on the adsorption body 21 can be quickly conducted out by using the conductive component 30.

[0033] Second, reference Figure 5 The present application also provides an optical detection device, including a first light source 51, a second light source 52, a camera 53 and the above-mentioned adsorption mechanism, the base 10 is made of a transparent material, the base 10 includes a second surface opposite to the first surface, the first light source 51 and the camera 53 are located on the side where the first surface is located, and the second light source 52 is located on the side where the second surface is located.

[0034] Through this technical solution, in the production process of display panel products, the optical inspection equipment can be used to assist the production process and to detect the production quality of the product in a timely manner. For example, the adsorption mechanism can adsorb the display panel, and the first light source 51 and the second light source 52 can simultaneously fill in the light for the base 10, so that the camera 53 can clearly shoot the display panel in production. It is known that the display panel includes a plurality of functional layers superimposed on each other. In the production process, a mask plate is also needed to obtain certain functional layers, and the relative position between the functional layers and the placement of the mask plate are directly related to the production quality of the display panel. Therefore, the photos taken by the camera 55 can be used to assist in locating the relative position between the functional layers and the position of the mask plate, as well as to determine whether the relative position between the functional layers is correct after a production process is completed; if the relative position or the placement of the mask plate is determined to be incorrect after analyzing the photos, it can be corrected in time or it can be determined that the current production quality of the display panel is unqualified. A conductive component 30 is arranged in the accommodating channel 11 of the transparent base 10. The conductive component 30 has little effect on the light transmittance of the base 10, which can ensure the photographing effect of the camera 53. At the same time, it can quickly guide away the static electricity on the adsorption body 21 to prevent the static electricity on the adsorption body 21 from damaging the display panel.

[0035] Among them, reference Figure 1 and Figure 4 The conductive component 30 includes a metal coil spring 31, and the metal coil spring 31 is located in the accommodating channel 11. In this way, the metal coil spring 31 can not only realize the conductive function, but also when the base 10 is made of transparent material, the coil spring has good light transmittance, so the light transmittance of the base 10 is less affected.

[0036] The outer diameter of the metal coil spring 31 can be the same as the inner diameter of the accommodating channel 11. In this way, the metal coil spring 31 can be prevented from shaking freely in the accommodating channel 11, thereby ensuring that the metal coil spring 31 is reliably in contact or connected with the first conductive portion 22 of the adsorption member 20.

[0037] In one possible embodiment, reference Figures 1 to 3, the conductive component 30 also includes a connector 33 and a metal lead 32. The connector 33 is connected to the base 10 and closes one end of the accommodating channel 11; the connector 33 includes a second conductive part, one side of the second conductive part is connected to the metal coil spring 31, and the other side is connected to the metal lead 32. The metal coil spring 31 and the metal lead 32 are conductively connected through the connector 33. Through this technical solution, the metal coil spring 31 can be enclosed in the accommodating channel 11 so that the metal coil spring 31 and the first conductive part 22 of the adsorbent 20 can be reliably conductively contacted; and the accommodating channel 11 can be closed to prevent contaminants from entering the accommodating channel 11 and affecting the light transmittance of the base 10. To ensure the sealing of the accommodating channel 11, even if the adsorbent 20 is a vacuum adsorption product, it will not be adversely affected.

[0038] In addition, the connecting member 33 itself can be a metal member, so that the inner side of the connecting member 33 can be conductively connected to the metal coil spring 31 , and the outer side of the connecting member 33 can be conductively connected to the metal lead 32 .

[0039] In one example, reference Figure 1 , one end of the accommodating channel 11 is closed and the other end is open; one end of the metal coil spring 31 abuts against the closed end of the accommodating channel 11, and the other end abuts against the connecting piece 33, and the metal coil spring 31 is in a compressed state. In this way, the metal coil spring 31 can be stably placed in the accommodating channel 11 and reliably conductively contact with the first conductive part 22 of the adsorption member 20 and the connecting piece 33.

[0040] In one example, an internal thread is provided on the hole wall of the accommodating channel 11, and the connecting member 33 has an external thread to be threadedly connected with the accommodating channel 11. In this way, it is not only convenient to connect, but also easy to close the accommodating channel 11. Of course, a sealing member can also be provided between the accommodating channel 11 and the connecting member 33 to achieve a vacuum sealing effect of the accommodating channel 11.

[0041] In a possible embodiment, the axial direction of the accommodating channel 11 may be parallel to the first surface of the base 10. The base 10 may include a first surface and a second surface opposite to each other, and a side surface located between the first surface and the second surface, and the opening of the accommodating channel 11 may be located on the side surface, so that the connecting member 33 is connected to the side surface of the base 10.

[0042] In one possible embodiment, reference Figure 1 and Figure 4 The first conductive part 22 has an external thread, and the first conductive part 22 passes through the adsorption body 21 and is threadedly connected to the base 10. For example, the first conductive part 22 can be a screw or a bolt. After the first conductive part 22 extends into the accommodating channel 11, it can abut against the metal coil spring 31.

[0043] In one possible embodiment, reference Figure 3 , the base 10 also includes a vacuum channel 12, the accommodating channel 11 and the vacuum channel 12 are cross-distributed on the base 10, and the accommodating channel 11 and the vacuum channel 12 are connected, and the adsorption body 21 includes a vent 211, and the vent 211 is connected to the vacuum channel 12 to achieve vacuum adsorption. Based on this technical solution, the accommodating channel 11 can be closed by a connector 33, which can be used to enclose the metal coil spring 31 in the accommodating channel 11, and can also ensure the air tightness of the accommodating channel 11, which is conducive to the vacuum adsorption of the adsorption body 21. Among them, the adsorption body 21 can be a vacuum suction cup. In addition, for the base 10 with only the vacuum channel 12 in the prior art, the grounding resistance of the adsorption component 20 can be made to meet the requirements by modifying the base 10, adding the accommodating channel 11 and the metal coil spring 31, thereby reducing the modification cost.

[0044] For further reference, Figure 2 and Figure 3 The adsorption mechanism may further include an air pump and an air pipe 40. The air pump is connected to the vacuum channel 12 through the air pipe 40. The air pump can be used to make the vacuum channel 12 and the air holes of the vacuum suction cup reach or approach a vacuum state, so that the vacuum suction cup can adsorb the product.

[0045] The axial direction of the vacuum channel 12 may be parallel to the first surface of the base 10, so as to fully utilize the space of the base 10 in the extending direction of the first surface and reduce the thickness of the base 10 between the first surface and the second surface.

[0046] In one example, the axial direction of the vacuum channel 12 may be perpendicular to the axial direction of the accommodation channel 11 .

[0047] In actual production, a plurality of adsorbents 20 may be provided on a base 10 to facilitate stable and reliable adsorption of the display panel. Taking the adsorption body 21 as a vacuum suction cup as an example, a plurality of parallel and spaced vacuum channels 12 may be provided inside the base 10, one end of each vacuum channel 12 is open and the other end is closed, the opening of the vacuum channel 12 is sealed and connected to the air pipe 40, and a plurality of mounting holes are provided on the first surface of the base 10, the mounting holes are located on the vacuum channel 12 and are connected to the vacuum channel, and a adsorbent 20 is installed in each mounting hole. In this way, the air pump can achieve gas communication with each adsorbent 20 through the vacuum channel 12.

[0048] Accordingly, a plurality of accommodating channels 11 may be provided inside the base 10, and the plurality of accommodating channels 11 are parallel and spaced apart, and the extension direction of the accommodating channels 11 may be perpendicular to the extension direction of the vacuum channel 12, and the extension directions of both are parallel to the first surface. By making the accommodating channels 11 and the vacuum channel 12 cross-connected at the mounting hole, the accommodating channels 11, the vacuum channel 12 and the vent holes 211 on the adsorption body 21 can be interconnected.

[0049] Furthermore, the mounting holes of the plurality of vacuum channels 12 can be aligned in the extending direction of the receiving channel 11. Then, one receiving channel 11 can be cross-connected with each vacuum channel 12, and the cross-connected position is exactly the position of the mounting hole. For details, please refer to Figure 1 and Figure 3 Hint.

[0050] On the third aspect, with respect to the field of display panel production, the present application may also provide a display panel production device, including an optical detection component and the above-mentioned adsorption mechanism, the adsorption mechanism being used to adsorb the display panel, the optical detection component being used to photograph the display panel on the adsorption mechanism to obtain an image, and analyze the image.

[0051] Specifically, the optical detection component includes a first light source, a second light source, a camera and an image analyzer. The base 10 is made of a transparent material. The base 10 includes a second surface opposite to the first surface. The first light source 51 and the camera 53 are located on the side where the first surface is located, and the second light source 52 is located on the side where the second surface is located. The image analyzer is connected to the camera 53 in communication to obtain an image. In this way, after each process is completed, the display panel can be photographed by the camera 53, and then the image analyzer obtains the image taken by the camera 53 and analyzes the image, so as to determine whether the production quality of the process is qualified.

[0052] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present application. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0053] It should be understood that although the specific embodiments of the present application are described in detail in conjunction with the accompanying drawings, it should not be understood as limiting the scope of protection of the present application. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still fall within the scope of protection of the present application. Although this specification is described according to various embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An adsorption mechanism, characterized in that: include: A base, wherein a receiving channel is provided inside the base; An adsorbent, the adsorbent is mounted on the first surface of the base, the adsorbent comprises an adsorbent body and a first conductive portion capable of extending into the accommodating channel, the adsorbent body is used to produce an adsorbing effect on the product to be adsorbed; A conductive component, one end of which is disposed in the accommodating channel and connected to the first conductive portion of the adsorbent, and the other end of which extends out of the accommodating channel and is grounded.

2. The adsorption mechanism according to claim 1, characterized in that: The conductive component includes a metal coil spring, and the metal coil spring is located in the accommodating channel; Preferably, the outer diameter of the metal coil spring is the same as the inner diameter of the accommodating channel.

3. The adsorption mechanism according to claim 2, characterized in that: The conductive component also includes a connector and a metal lead, wherein the connector is connected to the base and closes one end of the accommodating channel; the connector includes a second conductive portion, one side of the second conductive portion is connected to the metal coil spring, and the other side is connected to the metal lead, and the metal coil spring and the metal lead are conductively connected via the connector.

4. The adsorption mechanism according to claim 3, characterized in that: One end of the accommodating channel is closed, and the other end is open; one end of the metal coil spring abuts against the closed end of the accommodating channel, and the other end abuts against the connecting piece, and the metal coil spring is in a compressed state.

5. The adsorption mechanism according to claim 1, characterized in that: The axial direction of the accommodating channel is parallel to the first surface of the base.

6. The adsorption mechanism according to claim 1, characterized in that: The first conductive part has an external thread, and the first conductive part passes through the adsorption body and is threadedly connected to the base.

7. The adsorption mechanism according to any one of claims 1 to 6, characterized in that: The base also includes a vacuum channel, the accommodating channel and the vacuum channel are cross-distributed on the base, and the accommodating channel and the vacuum channel are communicated, and the adsorption body includes a vent hole, and the vent hole is communicated with the vacuum channel to achieve vacuum adsorption; Preferably, the axial direction of the vacuum channel is parallel to the first surface of the base.

8. An optical detection device, characterized in that: It includes a first light source, a second light source, a camera and the adsorption mechanism described in any one of claims 1 to 7, the base is made of a transparent material, the base includes a second surface opposite to the first surface, the first light source and the camera are located on the side where the first surface is located, and the second light source is located on the side where the second surface is located.

9. A display panel production device, characterized in that: It comprises an optical detection component and the adsorption mechanism described in any one of claims 1 to 7, wherein the adsorption mechanism is used to adsorb a display panel, and the optical detection component is used to take a picture of the display panel on the adsorption mechanism to obtain an image and analyze the image.

10. The display panel production equipment according to claim 9, characterized in that: The optical detection component includes a first light source, a second light source, a camera and an image analyzer. The base is made of a transparent material and includes a second surface opposite to the first surface. The first light source and the camera are located on the side where the first surface is located, and the second light source is located on the side where the second surface is located. The image analyzer is communicatively connected to the camera to acquire an image.

Images