Optical parameter measuring device, system and method

Abstract

The invention discloses an optical parameter measuring device, system and method, and relates to the technical field of optical measurement. The optical parameter measuring device is applied to optical parameter measurement of the eccentricity measuring device. The eccentricity measuring device comprises a detection assembly and a focusing assembly. The optical parameter measuring device comprises a light source assembly and a target, the light emitting side face of the light source assembly faces the target focusing objective lens, and the light source assembly is used for outputting detection light; the surface of the target is perpendicular to the optical axis of the detection assembly, and the target is provided with a plurality of marks and is located on an emergent light path of the detection light, so that the plurality of marks are imaged on an image surface of the detection assembly. Through the optical parameter measuring device, the amplification factor parameter of the eccentricity measuring device in the current state can be directly detected.

Description

Technical Field

[0001] The present application relates to the field of optical measurement, and in particular to an optical parameter measurement device, system and method. Background Art

[0002] At present, the optical eccentricity of the lens is an important basis for judging the quality of the optical lens assembly, and the optical eccentricity of the lens is mainly measured by an eccentricity measuring device.

[0003] The eccentricity measuring device usually includes a detection component and a focusing component. The magnification of the eccentricity measuring device is of great significance for achieving high-precision reflective eccentricity measurement. In the related art, the magnification is often measured by measuring the focal length of the detection component and each focusing lens separately, and the magnification of the eccentricity measuring device is calculated according to their focal length ratio. However, this method is affected by the accuracy of focal length measurement, and is prone to measurement errors. Moreover, the measurement errors of the detection component and the focusing lens are easily accumulated. Summary of the invention

[0004] The main purpose of the present application is to provide an optical parameter measurement device, system and method, which can directly detect the magnification parameter of the eccentricity measurement device in the current state.

[0005] To achieve the above-mentioned purpose, in a first aspect, the present application proposes an optical parameter measuring device, which is applied to the optical parameter measurement of an eccentricity measuring device, wherein the eccentricity measuring device comprises a detection component and a focusing component, wherein the detection component is used to output a measuring light and obtain detection information according to a received light beam, and the focusing component comprises at least one focusing objective lens, wherein a target focusing objective lens is located on an outgoing optical path of the measuring light, wherein the target focusing objective lens is one of the focusing objective lenses; the optical parameter measuring device comprises: A light source assembly, the light emitting side of the light source assembly faces the target focusing objective lens, and the light source assembly is used to output detection light; A target, the surface of which is perpendicular to the optical axis of the detection component, has a plurality of marks, and is located on the outgoing optical path of the detection light so that the plurality of marks are imaged on the image plane of the detection component.

[0006] In one embodiment, the optical parameter measuring device further comprises: A processing component is used to obtain target detection information of the detection component at the optimal imaging position, obtain the image mark distance according to the target detection information, and obtain the magnification parameter of the eccentricity measurement device in the current state according to the image mark distance and the reference distance, wherein, when the detection component is located at the optimal imaging position, the mark forms the clearest image on the image plane of the detection component, the reference distance is the center distance between two target marks, and the image mark distance is the center distance between the target mark images corresponding to the two target marks.

[0007] In one embodiment, the focusing component includes multiple focusing objective lenses; the processing component is also used to obtain a first optimal imaging position corresponding to a first target focusing objective lens, and a second optimal imaging position corresponding to a second target focusing objective lens, and determine the back focus relative position parameters of the first target focusing objective lens and the second target focusing objective lens according to the first optimal imaging position and the second optimal imaging position.

[0008] In one embodiment, the eccentricity measuring device further comprises a moving stand, and the moving stand is used to drive the detection component to move; The processing component is electrically connected to the motion platform, and the processing component is also used to control the motion platform to drive the detection component to move, and obtain the coordinate information of the detection component.

[0009] In one embodiment, the focusing assembly further comprises an objective lens converter, the objective lens converter is provided with a light through hole, and the light through hole and each of the focusing objective lenses are respectively arranged at different positions of the objective lens converter; The processing component is electrically connected to the objective lens converter, and the processing component is also used to control the objective lens converter to switch the structure located on the emission light path of the measurement light.

[0010] In one embodiment, each of the marks is a pattern mark of the same shape, wherein the shape of the mark includes at least a cross shape and a double cross shape.

[0011] In one embodiment, the light source assembly includes a display screen, and the target is located between the light emitting side of the display screen and the focusing assembly.

[0012] In a second aspect, the present application further provides an optical parameter measurement system, comprising the optical parameter measurement device and the eccentricity measurement device as described in the first aspect.

[0013] In a third aspect, the present application further provides an optical parameter measurement method, which is applied to the optical parameter measurement system as described in the second aspect; the optical parameter measurement method comprises: Acquiring target detection information of the detection component at an optimal imaging position, wherein when the detection component is located at the optimal imaging position, the mark forms the clearest image on the image plane of the detection component; Acquire an image marker distance according to the target detection information, wherein the image marker distance is a center distance between two target marker images; The magnification parameter of the eccentricity measuring device in the current state is obtained according to the image mark distance and the reference distance, wherein the reference distance is the center distance between the target marks corresponding to the two target mark images.

[0014] In one embodiment, the focusing assembly includes a plurality of focusing objective lenses; and the optical parameter measurement method further includes: Acquire a first optimal imaging position corresponding to the first target focusing lens, and a second optimal imaging position corresponding to the second target focusing lens; The back focus relative position parameters of the first target focusing lens and the second target focusing lens are determined according to the first optimal imaging position and the second optimal imaging position.

[0015] The optical parameter measuring device and the optical parameter measuring system are applied to the optical parameter measurement of the eccentricity measuring device. The eccentricity measuring device includes a detection component and a focusing component. The optical parameter measuring device includes: a light source component and a target. The light emitting side of the light source component faces the target focusing objective lens. The target is located on the emission light path of the detection light. The surface of the target is perpendicular to the optical axis of the detection component. The detection light is output by the light source component to illuminate the target. Since the target has multiple marks, the light beam emitted from the target area can be imaged on the image plane of the detection component through the focusing component. Since the distance between the marker images will be magnified by the same multiple when the marker image is magnified by a certain multiple relative to the original marker, multiple target markers can be selected. After obtaining the target detection information of the detection component at the optimal imaging position, the center distance between the two selected target markers is used as the reference distance, and the center distance between the target imaging markers corresponding to the two target markers is used as the image marker distance. The magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state is obtained according to the ratio of the image marker distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component and each focusing objective lens separately and then calculating the focal length ratio to obtain the result.

[0016] The above-mentioned optical parameter measurement method can obtain the image mark distance based on the target detection information by obtaining the target detection information of the detection component at the optimal imaging position. Since the center distance between two selected target marks is the reference distance, and the center distance between two corresponding target imaging marks is the image mark distance, the magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state can be obtained according to the ratio of the image mark distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component and each focusing objective lens separately and then calculating the focal length ratio to obtain the result. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 This is a schematic diagram of the measurement process of an optical parameter measurement device in one embodiment of the present application; Figure 2 A schematic diagram of target calibration of an optical parameter measurement device in one embodiment of the present application; Figure 3 This is a schematic diagram of the measurement process of an optical parameter measurement device in another embodiment of the present application; Figure 4 This is a schematic diagram of target calibration of an optical parameter measurement device in another embodiment of the present application; Figure 5 This is one of the structural schematic diagram examples of the target in one embodiment of the present application; Figure 6 This is the second example of the structural schematic diagram of the target in one embodiment of the present application; Figure 7 This is the third example of the structural schematic diagram of the target in one embodiment of the present application; Figure 8 This is one of the imaging schematic diagram examples of the image plane of the detection component in one embodiment of the present application; Fig. 9 This is a second example of an imaging schematic diagram of the image plane of the detection component in one embodiment of the present application; Fig.10 This is a schematic diagram of the connection structure between the light source assembly and the target in one embodiment of the present application; Fig.11This is a schematic diagram of the process of an optical parameter measurement method in one embodiment of the present application; Fig.12 Schematic diagram of the internal structure of a computer device in one embodiment of the present application.

[0020] Description of Figure Numbers: 11-detection component, 12-focusing component, 121-focusing objective lens, 122-objective lens switcher, 123-light hole, 13-motion stand, 21-light source component, 211-display screen, 212-display bracket, 213-adjustment table, 22-target, 221-marker, 23-processing component.

[0021] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0024] In the case of using “including”, “having”, and “comprising” described herein, another component may be added unless a clear limiting term such as “only”, “consisting of”, etc. is used. Unless mentioned otherwise, a term in the singular form may include a plural form and should not be understood as being one in number.

[0025] It should be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the present application.

[0026] It should also be understood that when interpreting an element, even if not explicitly described, the element is interpreted as including a range of error, which should be within the acceptable deviation range of the specific value determined by those skilled in the art. For example, "approximately", "approximately" or "substantially" can mean within one or more standard deviations, which are not limited here.

[0027] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the elements in the drawings are drawn only as examples and not necessarily according to the true scale.

[0028] At present, the optical eccentricity of the lens is an important basis for judging the quality of the optical lens assembly, and the optical eccentricity of the lens is mainly measured by an eccentricity measuring device.

[0029] The eccentricity measuring device usually includes a detection component (such as an autocollimator) and a focusing component. The magnification of the eccentricity measuring device is of great significance for achieving high-precision reflective eccentricity measurement. In the related art, the magnification is often measured by measuring the focal length of the detection component and each focusing lens separately, and the magnification of the eccentricity measuring device is calculated according to their focal length ratio. However, this method is affected by the accuracy of focal length measurement, and is prone to measurement errors. Moreover, the measurement errors of the detection component and the focusing lens are easily accumulated.

[0030] In order to solve the above problems, the inventors further developed the technical solutions of the embodiments of the present application. Specifically, an optical parameter measuring device provided in the embodiments of the present application is applied to the optical parameter measurement of an eccentricity measuring device. The eccentricity measuring device includes a detection component and a focusing component. The detection component is used to output the measurement light and obtain the detection information according to the received light beam. The focusing component includes at least one focusing objective lens, and the target focusing objective lens is located on the outgoing light path of the measurement light, wherein the target focusing objective lens is one of the focusing objective lenses. The optical parameter measuring device includes: a light source component, a target and a processing component. The light emitting side of the light source component faces the target focusing objective lens, and the light source component is used to output the detection light. The surface of the target is perpendicular to the optical axis of the detection component, the target has a plurality of marks, and is located on the outgoing light path of the detection light so that the plurality of marks are imaged on the image plane of the detection component.

[0031] The optical parameter measuring device is applied to the optical parameter measurement of the eccentricity measuring device. The eccentricity measuring device includes a detection component and a focusing component. The optical parameter measuring device includes: a light source component and a target. The light emitting side of the light source component faces the target focusing objective lens. The target is located on the emission light path of the detection light. The surface of the target is perpendicular to the optical axis of the detection component. The detection light is output by the light source component to illuminate the target. Since the target has multiple marks, the light beam emitted from the target area can be imaged on the image plane of the detection component through the focusing component. Since the distance between the marker images will be magnified by the same multiple when the marker image is magnified by a certain multiple relative to the original marker, multiple target markers can be selected. After obtaining the target detection information of the detection component at the optimal imaging position, the center distance between the two selected target markers is used as the reference distance, and the center distance between the two corresponding target imaging markers is used as the image marker distance. The magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state is obtained according to the ratio of the image marker distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component and each focusing objective lens separately and then calculating the focal length ratio to obtain the result.

[0032] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be described clearly and completely below in conjunction with the drawings in the embodiments of this application. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0033] Figure 1 Schematic diagram of the measurement process of an optical parameter measurement device in one embodiment of the present application. Figure 1 As shown, the present application provides an optical parameter measuring device, which is applied to the optical parameter measurement of an eccentricity measuring device. The eccentricity measuring device includes a detection component 11 and a focusing component 12. The detection component 11 is used to output measurement light and obtain detection information based on the received light beam. The focusing component 12 includes at least one focusing objective lens 121, and the target focusing objective lens 121 is located on the exit light path of the measurement light. It should be noted that during the eccentricity measurement process, the measurement light output by the detection component 11 will be converged and transmitted to the sample to be measured through the target focusing lens. The detection component 11 will receive the light reflected back from the sample area to be measured, and obtain the detection information of the sample to be measured based on the reflected light. In application, the eccentricity measuring device may also include a carrier component, which is used to carry the sample to be measured.

[0034] like Figure 1 As shown, in this embodiment, the optical parameter measuring device includes: a light source component 21, a target 22 and a processing component 23.

[0035] The light emitting side of the light source assembly 21 faces the target focusing objective lens 121, and the light source assembly 21 is used to output the detection light. The surface of the target 22 is perpendicular to the optical axis of the detection assembly 11. The target 22 has a plurality of marks 221 and is located on the emission light path of the detection light so that the plurality of marks 221 are imaged on the image plane of the detection assembly 11. It should be noted that in order to detect the marking information on the imaging surface of the detection assembly 11, the marking area can be light-transmitting, and the non-marking area of ​​the target 22 is not light-transmitting. It is also possible that the area of ​​the target 22 other than the mark 221 is light-transmitting, and the marking area is not light-transmitting. The following is an explanation taking the scheme of light-transmitting in the marking area as an example.

[0036] Figure 2 FIG. 2 is a schematic diagram of adjusting the target 22 of the optical parameter measurement device in one embodiment of the present application. Figure 1 and Figure 2 As shown, the focusing assembly 12 may include an objective lens switcher 122, and a light hole 123 may be provided on the objective lens switcher 122. Each focusing objective lens 121 is also disposed on the objective lens switcher 122, and the structure located on the outgoing optical path of the measuring light is controlled by adjusting the objective lens switcher 122. The surface of the target 22 can be made perpendicular to the optical axis of the detection assembly 11 by the following steps: adjust the objective lens switcher 122 to control the light hole 123 to be located on the outgoing optical path of the measuring light, and control the light source assembly 21 to be in a closed state; adjust the position of the target 22 until the angle reading measured by the detection assembly 11 is zero or the mark image of the target 22 is located at the center of the image plane. It should be noted that in order to clearly explain this solution, Figure 1 and Figure 2 The following is a specific structural example of an eccentricity measuring device. Figure 1 and Figure 2 The detection component 11, the focusing component 12, the light source component 21 and the target 22 are only an example structure of the present application. The detection component 11, the focusing component 12, the light source component 21 and the target 22 can also be other structures. Figure 1 and Figure 2 The structural examples do not constitute a limitation on the structures of the detection component 11, the focusing component 12, the light source component 21 and the target 22.

[0037] It can be understood that, since the surface of the target 22 is located in the outgoing optical path of the detection light, the detection light will be emitted into the detection component 11 through the mark 221 of the target 22 and the target focusing lens, and imaged on the image plane of the detection component 11 to form a mark image. Since the distance between the mark images will be magnified by a certain multiple relative to the original mark 221, multiple target marks 221 can be selected, and after obtaining the target detection information of the detection component 11 at the best imaging position, the center distance between the two selected target marks 221 is used as the reference distance, and the center distance between the target imaging marks corresponding to the two target marks 221 is used as the image mark distance. The image mark distance is obtained according to the target detection information, and the magnification parameter of the corresponding field of view of the eccentricity measurement device in the current state is obtained according to the ratio of the image mark distance to the reference distance.

[0038] The above optical parameter measuring device and optical parameter measuring system are applied to the optical parameter measurement of the eccentricity measuring device. The eccentricity measuring device includes a detection component 11 and a focusing component 12. The optical parameter measuring device includes: a light source component 21 and a target 22. The light emitting side of the light source component 21 faces the target focusing objective lens 121. The target 22 is located on the emission light path of the detection light. The surface of the target 22 is perpendicular to the optical axis of the detection component 11. The detection light is output by the light source component 21 to illuminate the target 22. Since the target 22 has a plurality of marks 221, the light beam emitted from the target 22 area can be imaged on the image plane of the detection component 11 through the focusing component. Since the distance between the mark images will be magnified by the same multiple when the mark image is magnified by a certain multiple relative to the original mark 221, multiple target marks 221 can be selected. After obtaining the target detection information of the detection component 11 at the optimal imaging position, the center distance between the two selected target marks 221 is used as the reference distance, and the center distance between the target imaging marks corresponding to the two target marks is used as the image mark distance. The magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state is obtained according to the ratio of the image mark distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component 11 and each focusing objective lens 121 separately and then calculating the focal length ratio to obtain the result.

[0039] Figure 3 This is a schematic diagram of the measurement process of an optical parameter measurement device in another embodiment of the present application. Figure 3As shown, the optical parameter measuring device further includes: a processing component 23. The processing component 23 is used to obtain target detection information of the detection component 11 at the best imaging position, obtain the image mark distance according to the target detection information, and obtain the magnification parameter of the eccentricity measurement device in the current state according to the image mark distance and the reference distance, wherein, when the detection component 11 is located at the best imaging position, the mark 221 forms the clearest image on the image plane of the detection component 11, the reference distance is the center distance between the two target marks 221, and the image mark distance is the center distance between the target mark images corresponding to the two target marks 221.

[0040] It can be understood that the target mark 221 is a pre-selected mark 221, then the reference distance is known, and the processing component 23 can obtain the reference distance. When the detection component 11 is in the best imaging position, the detection component 11 will receive the detection light of the mark 221 and the target focusing lens through the target 22, and the image plane of the detection component 11 will become a clear magnified image of the mark 221. The mark image will be magnified by a certain multiple relative to the original mark 221, and the distance between the two target mark images will also be magnified by the same multiple. Based on this, the target detection information includes the mark imaging information, and the image mark distance, that is, the center distance between the two target mark images, can be obtained according to the target detection information. The ratio of the image mark distance to the reference distance is the magnification parameter of the corresponding field of view. By selecting multiple marks 221 of the target field of view of the eccentric measurement device as the target mark 221, the magnification parameter of the target field of view can be calibrated. Therefore, by selecting a suitable target mark 221, the magnification parameter of each field of view of the eccentric measurement device can be determined. When the mark 221 of the target 22 covers multiple fields of view, the magnification calibration of multiple fields of view can be achieved in one measurement by selecting appropriate marks 221, which is conducive to calibrating the eccentricity measurement device according to the measurement results of the magnification parameters, or correcting the eccentricity measurement results.

[0041] Figure 4 FIG. 2 is a schematic diagram of adjusting the target 22 of the optical parameter measurement device in another embodiment of the present application. It should be noted that, in one example, the posture adjustment process of the target 22 can also be as follows: Figure 4 As shown, the processing component 23 may also be electrically connected to a structure for adjusting the position and posture of the target 22 , so as to control the position and posture adjustment of the target 22 through the processing component 23 .

[0042] In this embodiment, after the processing component 23 obtains the target detection information of the detection component 11 at the optimal imaging position, the image mark distance can be obtained according to the target detection information. Since the center distance between the two selected target marks 221 is the reference distance, and the center distance between the two corresponding target imaging marks 221 is the image mark distance, the magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state can be obtained according to the ratio of the image mark distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component 11 and each focusing objective lens 121 separately and then calculating the focal length ratio to obtain the result.

[0043] In one embodiment, if Figure 3 As shown, the focusing component 12 includes multiple focusing lenses 121; the processing component 23 is also used to obtain a first optimal imaging position corresponding to the first target focusing lens 121, and a second optimal imaging position corresponding to the second target focusing lens 121, and determine the back focus relative position parameters of the first target focusing lens 121 and the second target focusing lens 121 according to the first optimal imaging position and the second optimal imaging position.

[0044] In application, during the eccentricity measurement process, since the positions of the sphere centers of various surfaces of the sample to be measured are different, it may be necessary to switch different focusing lenses 121 for measurement. At this time, the relative distances of the back focal points of different focusing lenses 121, that is, the relative position parameters of the back focal points, need to be given to quickly find the best focusing position.

[0045] It can be understood that the first optimal imaging position corresponding to the first target focusing lens 121 can be considered as the back focus position corresponding to the first focusing lens 121, and the second optimal imaging position corresponding to the second target focusing lens 121 can be considered as the back focus position corresponding to the second focusing lens 121. Then, the processing component 23 obtains the position information of the first optimal imaging position and the second optimal imaging position, and based on the position information of the two, the relative distance between the first optimal imaging position and the second optimal imaging position, that is, the back focus relative position parameter, can be obtained. After obtaining the back focus relative position parameter, the second optimal imaging position can be quickly determined based on the first optimal imaging position and the back focus relative position parameter, and the first optimal imaging position can also be quickly determined based on the second optimal imaging position and the back focus relative position parameter. Then, in actual measurement, after switching the working focusing lens 121, the back focus relative position parameters of the previous working focusing lens 121 and the current working focusing lens 121 can be used for adjustment, so as to quickly find the best focusing position after switching the focusing lens 121.

[0046] In one embodiment, if Figure 3 As shown, the eccentricity measuring device further includes a moving stand 13 , and the moving stand 13 is used to drive the detection component 11 to move.

[0047] It should be noted that the focusing assembly 12 needs to move synchronously with the detection assembly 11 so that the distance between the image plane of the detection assembly 11 and the focus of the measurement light remains unchanged. In one example, the focusing assembly 12 can be installed on the detection assembly 11 so that the focusing assembly 12 and the detection assembly 11 can move synchronously in the vertical direction. In another example, the focusing assembly 12 can be installed on the motion stage 13, and the motion stage 13 drives the focusing assembly 12 and the detection assembly 11 to move synchronously.

[0048] The processing component 23 is electrically connected to the motion platform 13 . The processing component 23 is also used to control the motion platform 13 to drive the detection component 11 to move, and obtain the coordinate information of the detection component 11 .

[0049] It can be understood that the processing component 23 can control the motion stage 13 to drive the detection component 11 to move in the vertical direction, adjust the distance between the detection component 11 and the target 22, until a clear image is formed on the image plane of the detection component 11, and then fine-tune the detection component 11 to be located at the optimal imaging position, so that the subsequent magnification parameter measurement can be performed to obtain the magnification parameter of the eccentricity measurement device in the current state. In addition, by recording the coordinate information of the detection component 11, the optimal imaging position corresponding to the current working focusing lens 121 can be recorded, and the back focus relative position parameters of each focusing lens 121 can be determined based on the optimal imaging position of each focusing lens 121. After switching the working focusing lens 121, the processing component 23 can control the motion stage 13 with the back focus relative position parameters of the previous working focusing lens 121 and the current working focusing lens 121, adjust the position of the detection component 11, and make the detection component 11 quickly reach the optimal imaging position corresponding to the current working focusing lens 121, so as to quickly find the optimal focusing position.

[0050] In one embodiment, if Figure 3 As shown, the focusing assembly 12 includes an objective lens converter and at least one focusing objective lens 121. The objective lens converter is provided with a light through hole 123. The light through hole 123 and each focusing objective lens 121 are respectively arranged at different positions of the objective lens converter.

[0051] The light holes 123 and the focusing lenses 121 may be arranged in a predetermined manner, such as a linear arrangement.

[0052] It can be understood that by adjusting the position of the objective lens converter relative to the detection component 11, the position of each focusing objective lens 121 relative to the detection component 11 can be adjusted. Therefore, the structure located on the emission light path of the measurement light can be switched by driving the objective lens converter to move relative to the detection component 11. In application, the objective lens converter can include a driving mechanism to drive the objective lens converter to move. In one example, the driving mechanism can include a motor to drive the objective lens converter to move.

[0053] The processing component 23 is electrically connected to the objective lens converter, and the processing component 23 is also used to control the objective lens converter to switch the structure located on the emission light path of the measuring light.

[0054] It can be understood that, referring to the step of adjusting the surface of the target 22 to be perpendicular to the optical axis of the detection component 11 in the above-mentioned embodiment, in order to adjust the surface of the target 22 to be perpendicular to the optical axis of the detection component 11, it is necessary to control the light hole 123 to be located in the outgoing optical path of the measuring light, and therefore, it is necessary to set an objective lens converter, and switch the structure located in the outgoing optical path of the measuring light through the objective lens converter. In this embodiment, by electrically connecting the processing component 23 to the objective lens converter, the processing component 23 can control the objective lens converter to switch the structure located in the outgoing optical path of the measuring light, so that the processing component 23 controls the objective lens converter to switch, which is conducive to the automatic measurement of optical parameters.

[0055] Figure 5 This is one of the structural schematic diagram examples of the target 22 in one embodiment of the present application; Figure 6 This is a second example of a schematic structural diagram of the target 22 in one embodiment of the present application; Figure 7 This is a third example of a schematic diagram of the structure of the target 22 in one embodiment of the present application. In one embodiment, Figures 5 to 7 As shown, each mark 221 is a pattern mark 221 of the same shape, wherein the shape of the mark 221 at least includes a cross shape and a double cross shape.

[0056] For example, the target 22 may be Figure 5 As shown, the mark 221 is in the shape of a cross. As another example, the target 22 can be as follows Figure 6 and Figure 7 As shown, the mark 221 is in the shape of a double cross. It should be noted that the upper surface of the target 22 has good reflective ability so as to reflect the measuring light, thereby realizing the adjustment process of the target 22 posture so that the surface of the target 22 is perpendicular to the optical axis of the detection component 11. It should also be noted that the spacing of the double crosses can be arbitrary, mainly depending on the field of view range of the eccentricity measurement device and the field of view requirements of the test. When it is required to perform detailed magnification parameter measurements on multiple fields of view, the following method can be used: Figure 7The target 22 of the intermediate image can calibrate the magnification of different viewing angles in eight directions at the same time, thereby facilitating the fine calibration of multiple viewing angles. Figure 8 This is one of the imaging schematic diagram examples of the image plane of the detection component 11 in one embodiment of the present application; Fig. 9 This is the second example of the imaging schematic diagram of the image plane of the detection component 11 in one embodiment of the present application. Figure 8 and Fig. 9 are imaging diagrams using different focusing lenses 121, such as Figure 8 and Fig. 9 As shown, depending on the focusing objective lens 121, different numbers of double crosses appear in its field of view.

[0057] It can be understood that if each mark 221 is a pattern mark 221 of the same shape, it is relatively easy to form each mark 221 on the target 22, and it is also convenient to determine the center point of each mark 221, and then it is convenient to obtain the center distance between two target marks 221, that is, to obtain the reference distance and the image mark distance, which is conducive to the measurement of the magnification parameter.

[0058] In one embodiment, if Figure 1 and Fig.10 As shown, the light source assembly 21 includes a display screen 211 , and the target 22 is located between the light emitting side of the display screen 211 and the focusing assembly 12 .

[0059] Among them, the display screen 211 is mainly used for backlighting the target 22, so there is no specific requirement for the type of the display screen 211, but in order to achieve better lighting effects, the display screen 211 needs to have good lighting uniformity, and its size needs to be larger than the size of the target 22 used.

[0060] It can be understood that there are many types of display screens 211. It is easy to find a display screen 211 of suitable size and larger than the target 22 based on the needs, and a more precise light output adjustment can be achieved. Therefore, the display screen 211 is easy to obtain as a light output structure and has high maneuverability, which is conducive to selecting appropriate detection light according to needs, thereby facilitating the optical parameter measurement of the eccentricity measurement device.

[0061] In one example, if Fig.10 As shown, the light source assembly 21 may further include a display bracket 212. The display bracket 212 is used to fix the display screen 211 and may be designed according to the actual shape of the display screen 211.

[0062] In one embodiment, if Fig.10 As shown, the optical parameter measuring device further includes an adjustment platform 213 , and the adjustment platform 213 is used to adjust the position and posture of the target 22 .

[0063] The surface of the target 22 needs to be perpendicular to the optical axis of the detection component 11, so the position of the target 22 needs to be adjusted to adjust the surface of the target 22 to be perpendicular to the optical axis of the detection component 11. In this embodiment, the optical parameter measurement device further includes an adjustment table 213, and the target 22 is adjusted by the adjustment table 213 so that the surface of the target 22 is adjusted to be perpendicular to the optical axis of the detection component 11.

[0064] In one example, if Fig.10 As shown, the target 22, the light source assembly 21 and the adjustment stage 213 can be stacked in sequence.

[0065] In application, when the eccentricity measuring device includes a loading assembly, and the loading assembly has a posture adjustment function, the adjustment platform 213 is no longer needed, and the light source assembly 21 and the target 22 can be directly placed on the loading assembly in sequence.

[0066] In one embodiment, Figure 1 As shown, the present application also provides an optical parameter measurement system, including the optical parameter measurement device and the eccentricity measurement device as described in any of the above embodiments.

[0067] The advantages of the optical parameter measurement system of this embodiment over the prior art are the same as the advantages of the above-mentioned optical parameter measurement device over the prior art, which will not be repeated here.

[0068] Fig.11 Schematic diagram of the process of an optical parameter measurement method in an embodiment of the present application. In one embodiment, the present application also provides an optical parameter measurement method, which is applied to the above optical parameter measurement system. Fig.11 As shown, the optical parameter measurement method includes the following steps S1101 to S1103.

[0069] S1101: Obtain target detection information of the detection component at the optimal imaging position, wherein when the detection component is located at the optimal imaging position, the mark on the image plane of the detection component forms the clearest image.

[0070] S1102: Obtain an image-marker distance according to target detection information, wherein the image-marker distance is a center distance between two target marker images.

[0071] S1103: Obtain the magnification parameter of the eccentricity measurement device in the current state according to the image mark distance and the reference distance, wherein the reference distance is the center distance between the target marks corresponding to the two target mark images.

[0072] The above-mentioned optical parameter measurement method can obtain the image mark distance based on the target detection information by obtaining the target detection information of the detection component at the optimal imaging position. Since the center distance between two selected target marks is the reference distance, and the center distance between two corresponding target imaging marks is the image mark distance, the magnification parameter of the corresponding field of view of the eccentricity measuring device in the current state can be obtained according to the ratio of the image mark distance to the reference distance, thereby directly detecting the magnification parameter of the eccentricity measuring device in the current state, avoiding the problem of measurement error accumulation caused by measuring the detection component and each focusing objective lens separately and then calculating the focal length ratio to obtain the result.

[0073] In one embodiment, the focusing assembly includes a plurality of focusing objective lenses. The optical parameter measurement method further includes: Acquire a first optimal imaging position corresponding to the first target focusing lens, and a second optimal imaging position corresponding to the second target focusing lens; The back focus relative position parameters of the first target focusing lens and the second target focusing lens are determined according to the first optimal imaging position and the second optimal imaging position.

[0074] In one embodiment, the eccentricity measuring device further comprises a moving stand. The optical parameter measuring method further comprises the steps of controlling the moving stand to drive the detection component to move, and obtaining coordinate information of the detection component.

[0075] In one embodiment, the focusing assembly further comprises an objective lens switcher. The optical parameter measurement method further comprises the step of controlling the objective lens switcher to switch a structure located on an outgoing optical path of the measurement light.

[0076] In one embodiment, the present application also provides a computer device, comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the optical parameter measurement method in the above-mentioned embodiment.

[0077] Reference below Fig.12 , which shows a schematic diagram of the structure of a computer device suitable for implementing the embodiments of the present application. The computer device in the embodiments of the present application may include but is not limited to mobile terminals such as mobile phones, laptop computers, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), vehicle-mounted terminals (such as vehicle-mounted navigation terminals), etc., and fixed terminals such as digital TVs, desktop computers, etc. Fig.12 The computer device shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0078] like Fig.12 As shown, the computer device may include a processing device 1001 (such as a central processing unit, a graphics processor, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM: Read Only Memory) 1002 or a program loaded from a storage device 1003 to a random access memory (RAM: Random Access Memory) 1004. In RAM1004, various programs and data required for the operation of the computer device are also stored. The processing device 1001, ROM1002 and RAM1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Generally, the following systems can be connected to the I / O interface 1006: an input device 1007 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 1008 including, for example, a liquid crystal display (LCD: Liquid Crystal Display), a speaker, a vibrator, etc.; a storage device 1003 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 1009. The communication device 1009 can allow the computer device to communicate with other devices wirelessly or by wire to exchange data. Although the figure shows a computer device with various systems, it should be understood that it is not required to implement or have all the systems shown. More or fewer systems can be implemented or have alternatively.

[0079] In particular, according to the embodiments disclosed in the present application, the process described above with reference to the flowchart can be implemented as a computer software program. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication device, or installed from a storage device 1003, or installed from a ROM 1002. When the computer program is executed by the processing device 1001, the above-mentioned functions defined in the method of the embodiment disclosed in the present application are executed.

[0080] The computer device provided by the present application can directly measure the optical parameters of the eccentricity measuring device by using the optical parameter measuring method in the above embodiment. Compared with the prior art, the beneficial effects of the computer device provided by the present application are the same as the beneficial effects of the optical parameter measuring method provided by the above embodiment, and other technical features in the computer device are the same as the features disclosed in the method of the previous embodiment, which will not be described in detail here.

[0081] It should be understood that the various parts disclosed in this application can be implemented by hardware, software, firmware or a combination thereof. In the description of the above embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0082] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0083] The present application provides a computer-readable storage medium having computer-readable program instructions (ie, computer programs) stored thereon, and the computer-readable program instructions are used to execute the optical parameter measurement method in the above-mentioned embodiment.

[0084] The computer-readable storage medium provided in the present application may be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, systems or devices, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM: Random Access Memory), a read-only memory (ROM: Read Only Memory), an erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, system or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency: Radio Frequency), etc., or any suitable combination of the above.

[0085] The computer-readable storage medium may be included in the computer device; or may exist independently without being installed in the computer device.

[0086] The computer-readable storage medium carries one or more programs. When the one or more programs are executed by a computer device, the computer device implements the steps of the optical parameter measurement method in any of the above embodiments.

[0087] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0088] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0089] The modules involved in the embodiments described in this application may be implemented by software or hardware, wherein the name of the module does not constitute a limitation on the unit itself in some cases.

[0090] The readable storage medium provided in the present application is a computer-readable storage medium, which stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned optical parameter measurement method, and can realize automatic calculation of the final parameters related to the sample to be measured. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in the present application are the same as the beneficial effects of the optical parameter measurement method provided in the above-mentioned embodiment, and will not be described in detail here.

[0091] The present application also provides a computer program product, including a computer program, which implements the steps of the optical parameter measurement method as described above when executed by a processor.

[0092] The computer program product provided in this application can realize the automatic calculation of the final parameters related to the sample to be tested. Compared with the prior art, the beneficial effects of the computer program product provided in this application are the same as the beneficial effects of the optical parameter measurement method provided in the above embodiment, which will not be repeated here.

[0093] The above descriptions are only some embodiments of the present application, and are not intended to limit the patent scope of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the technical concept of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. An optical parameter measuring device, characterized in that: The invention is applied to the optical parameter measurement of an eccentricity measuring device, wherein the eccentricity measuring device comprises a detection component and a focusing component, wherein the detection component is used to output a measuring light and obtain detection information according to a received light beam, wherein the focusing component comprises at least one focusing objective lens, and a target focusing objective lens is located on an outgoing optical path of the measuring light, wherein the target focusing objective lens is one of the focusing objective lenses; the optical parameter measuring device comprises: A light source assembly, the light emitting side of the light source assembly faces the target focusing objective lens, and the light source assembly is used to output detection light; A target, the surface of which is perpendicular to the optical axis of the detection component, has a plurality of marks, and is located on the outgoing optical path of the detection light so that the plurality of marks are imaged on the image plane of the detection component.

2. The optical parameter measuring device according to claim 1, characterized in that: The optical parameter measuring device also includes: A processing component is used to obtain target detection information of the detection component at the optimal imaging position, obtain the image mark distance according to the target detection information, and obtain the magnification parameter of the eccentricity measurement device in the current state according to the image mark distance and the reference distance, wherein, when the detection component is located at the optimal imaging position, the mark forms the clearest image on the image plane of the detection component, the reference distance is the center distance between two target marks, and the image mark distance is the center distance between the target mark images corresponding to the two target marks.

3. The optical parameter measuring device according to claim 2, characterized in that: The focusing component includes multiple focusing objective lenses; the processing component is also used to obtain a first optimal imaging position corresponding to a first target focusing objective lens, and a second optimal imaging position corresponding to a second target focusing objective lens, and determine the back focus relative position parameters of the first target focusing objective lens and the second target focusing objective lens according to the first optimal imaging position and the second optimal imaging position.

4. The optical parameter measuring device according to claim 2, characterized in that: The eccentricity measuring device further comprises a moving stand, and the moving stand is used to drive the detection component to move; The processing component is electrically connected to the motion platform, and the processing component is also used to control the motion platform to drive the detection component to move, and obtain the coordinate information of the detection component.

5. The optical parameter measuring device according to claim 2, characterized in that: The focusing assembly further comprises an objective lens switcher, the objective lens switcher is provided with a light-through hole, the light-through hole and each of the focusing objective lenses are respectively arranged at different positions of the objective lens switcher; The processing component is electrically connected to the objective lens switcher, and the processing component is also used to control the objective lens switcher to switch the structure located on the outgoing light path of the measuring light.

6. The optical parameter measuring device according to claim 1, characterized in that: Each of the marks is a pattern mark of the same shape, wherein the shape of the mark at least includes a cross shape and a double cross shape.

7. The optical parameter measuring device according to any one of claims 1 to 6, characterized in that: The light source assembly includes a display screen, and the target is located between the light emitting side of the display screen and the focusing assembly.

8. An optical parameter measurement system, characterized in that: The optical parameter measuring device and the eccentricity measuring device are included as described in any one of claims 1 to 7.

9. An optical parameter measurement method, characterized in that: Applicable to the optical parameter measurement system as claimed in claim 8; the optical parameter measurement method comprises: Acquiring target detection information of the detection component at an optimal imaging position, wherein when the detection component is located at the optimal imaging position, the mark forms the clearest image on the image plane of the detection component; Acquire an image marker distance according to the target detection information, wherein the image marker distance is a center distance between two target marker images; The magnification parameter of the eccentricity measuring device in the current state is obtained according to the image mark distance and the reference distance, wherein the reference distance is the center distance between the target marks corresponding to the two target mark images.

10. The optical parameter measurement method according to claim 9, characterized in that: The focusing assembly includes a plurality of focusing objective lenses; The optical parameter measurement method further comprises: Acquire a first optimal imaging position corresponding to the first target focusing lens, and a second optimal imaging position corresponding to the second target focusing lens; The back focus relative position parameters of the first target focusing lens and the second target focusing lens are determined according to the first optimal imaging position and the second optimal imaging position.

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