Non-stop automatic spot checking and correcting method and system for AOI (Automatic Optic Inspection) equipment

Abstract

The invention discloses an AOI equipment non-stop automatic spot check correction method and system, and relates to the technical field of production line production optimization, and the method comprises the steps: obtaining a target electronic sample after a set number of silicon-based OLED products are produced based on an equidistant sampling mode, displaying the target electronic sample, obtaining a product display result corresponding to the target electronic sample, and displaying the product display result corresponding to the target electronic sample; detecting the product display result corresponding to the target electronic sample through the AOI equipment to obtain an electronic sample detection parameter corresponding to the target electronic sample; the electronic sample detection parameters comprise the length, the width, the area and the gray scale of the electronic sample; determining the stability of the AOI equipment according to the electronic sample detection parameters corresponding to the target electronic sample and the electronic sample allowable range; and the stability of the AOI equipment is used for judging whether the AOI equipment needs to be adjusted or not. According to the method and the device, automatic point inspection and correction of the AOI equipment without shutdown are realized.

Description

Technical Field

[0001] The present application relates to the technical field of production line optimization, and in particular to a method and system for automatic spot inspection and correction of AOI equipment without stopping. Background Art

[0002] Organic light-emitting diodes (silicon-based OLEDs) have subpixel-level bright spot defects (um level), which require high detection stability of automatic optical inspection machines (AOI). However, during the automatic operation of AOI equipment, factors such as motor jitter may cause the camera to become unstable, affecting the detection results, so it is necessary to regularly inspect the equipment camera system. However, the existing inspection system uses physical inspection, which requires the equipment to be shut down for inspection and correction of each camera, and the shutdown inspection affects the equipment utilization rate and production line production. Therefore, there is an urgent need for an automatic inspection and correction method for AOI equipment without stopping. Summary of the invention

[0003] The purpose of this application is to provide a method and system for automatic spot inspection and correction of AOI equipment without stopping, which can realize automatic spot inspection and correction of AOI equipment without stopping, avoiding affecting the equipment utilization rate and production line production.

[0004] To achieve the above objectives, this application provides the following solutions:

[0005] In a first aspect, the present application provides a method for automatic spot inspection and correction of an AOI device without stopping the machine, comprising:

[0006] In the mass production process of silicon-based OLED products, based on an equidistant sampling method, after each production of a set number of silicon-based OLED products, a target electronic sample is obtained; the target electronic sample is used to characterize the silicon-based OLED products;

[0007] Displaying the target electronic sample to obtain a product display result corresponding to the target electronic sample;

[0008] Detecting the product display result corresponding to the target electronic sample by an AOI device to obtain electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample;

[0009] The stability of the AOI device is determined according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is the set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

[0010] Optionally, determining the stability of the AOI device according to the electronic sample detection parameter corresponding to the target electronic sample and the allowable range of the electronic sample specifically includes:

[0011] When any target detection parameter exceeds a set threshold range corresponding to the target detection parameter in the allowable range of the electronic sample, the stability result of the AOI device is unstable; the target detection parameter is length, width, area or grayscale;

[0012] When the stability result of the AOI device is unstable, the camera of the AOI device is automatically adjusted.

[0013] Optionally, automatically adjusting a camera of the AOI device specifically includes:

[0014] Automatically adjusting the Z axis or camera exposure of the camera of the AOI device;

[0015] Use the adjusted AOI equipment to inspect the target electronic sample and obtain secondary inspection parameters;

[0016] Determine whether the secondary detection parameter is within the allowable range of the electronic sample. If so, end the calibration; if not, return to the step of "automatically adjusting the Z axis of the camera or camera exposure of the AOI device".

[0017] Optionally, before determining the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample, the method for automatic spot inspection and correction of the AOI device without stopping the machine further includes:

[0018] Acquire an initial electronic sample set; the initial electronic sample set includes a plurality of initial electronic samples; the initial electronic samples are used to characterize silicon-based OLED products;

[0019] For each of the initial electronic samples, display the initial electronic sample to obtain a product display result corresponding to the initial electronic sample;

[0020] Detecting the product display result corresponding to the initial electronic sample by an AOI device to obtain an electronic sample detection parameter corresponding to the initial electronic sample;

[0021] The allowable range of the electronic sample is determined according to the electronic sample detection parameters corresponding to all the initial electronic samples.

[0022] Optionally, obtaining a target electronic sample specifically includes:

[0023] Through Python, the target electronic sample is determined based on the set area and set grayscale.

[0024] Optionally, the AOI equipment non-stop automatic spot inspection and correction method further includes:

[0025] When the stability result of the AOI equipment is unstable, an alarm is issued.

[0026] Optionally, displaying the target electronic sample specifically includes: displaying the target electronic sample through a PG display.

[0027] In a second aspect, the present application provides an automatic spot inspection and correction system for AOI equipment without stopping, comprising:

[0028] The target electronic sample acquisition module is used to: in the mass production process of silicon-based OLED products, based on the equidistant sampling method, acquire the target electronic sample after each production of a set number of silicon-based OLED products; the target electronic sample is used to characterize the silicon-based OLED products;

[0029] A product display module is used to: display the target electronic sample to obtain a product display result corresponding to the target electronic sample;

[0030] A detection module is used to detect the product display result corresponding to the target electronic sample through an AOI device to obtain electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample;

[0031] The stability judgment module is used to determine the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is the set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

[0032] According to the specific embodiments provided in this application, this application discloses the following technical effects:

[0033] The present application provides a method and system for automatic spot inspection and correction of AOI equipment without stopping. Based on the equidistant sampling method, after each production of a set number of silicon-based OLED products, a target electronic sample is obtained, the target electronic sample is displayed, and the product display result corresponding to the target electronic sample is obtained. The product display result corresponding to the target electronic sample is detected by the AOI device to obtain the electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample; the stability of the AOI equipment is determined according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the stability of the AOI equipment is used to determine whether the AOI equipment needs to be adjusted. By using standard electronic samples for AOI detection, camera adjustment can be achieved without manual intervention, thereby realizing the automatic compensation function of the camera. By using electronic sample spot inspection, the time for personnel to select samples and the time for equipment to be put into use for verification films are avoided. The present application ensures that the AOI equipment completes automatic spot inspection without stopping, saving manpower and material resources, and solves the problem that the existing AOI equipment correction method needs to be stopped, which affects equipment production. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0035] Figure 1 A flowchart of a method for automatic spot inspection and correction of an AOI device without stopping the machine provided in one embodiment of the present application;

[0036] Figure 2 A schematic diagram of the principle of an existing AOI inspection method provided in an embodiment of the present application;

[0037] Figure 3 A schematic diagram of the output principle of the existing AOI inspection benchmark provided in one embodiment of the present application;

[0038] Figure 4 A schematic diagram of the AOI non-stop inspection principle provided by an embodiment of the present application;

[0039] Figure 5 A schematic diagram of the electronic sample display principle provided in one embodiment of the present application;

[0040] Figure 6 A schematic diagram illustrating the advantages of the AOI non-stop inspection method provided by an embodiment of the present application compared with the existing AOI inspection method;

[0041] Figure 7A schematic diagram of AOI automatic spot inspection and correction provided by an embodiment of the present application;

[0042] Figure 8 A schematic diagram of the functional modules of a non-stop automatic spot inspection and correction system for AOI equipment provided in one embodiment of the present application. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0044] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0045] In an exemplary embodiment, Figure 1 As shown, a method for automatic spot inspection and correction of AOI equipment without stopping is provided, including the following steps 101 to 104. Among them:

[0046] Step 101: During the mass production of silicon-based OLED products, based on an equidistant sampling method, after each production of a set number of silicon-based OLED products, a target electronic sample is obtained; the target electronic sample is used to characterize the silicon-based OLED products.

[0047] Step 102: Display the target electronic sample to obtain a product display result corresponding to the target electronic sample.

[0048] Step 103: Detect the product display result corresponding to the target electronic sample through the AOI device to obtain the electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample.

[0049] Step 104: Determine the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is a set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

[0050] By implementing the above steps 101 to 104, the camera can be adjusted without manual intervention by using standard electronic samples for AOI inspection, thereby realizing the automatic compensation function of the camera. By using electronic sample spot inspection, the time for personnel to select samples and the time for equipment to use the verification piece are avoided. This application ensures that the AOI equipment completes automatic spot inspection without stopping, saving manpower and material resources, and solves the problem that the existing AOI equipment calibration method requires shutdown, which affects equipment production.

[0051] The existing AOI inspection method principle and benchmark output principle are as follows Figure 2 and Figure 3 The principle of the automatic spot inspection and correction method for AOI equipment without stopping the machine provided by this application is as follows Figure 4-7 As shown: a. Standard film preparation: prepare good and bad electronic samples respectively. For example, if the specification of good products is 20*20um, make 20*20um OK limit samples and 21*21um NG limit samples respectively to ensure that the corresponding limit samples output corresponding results. The OK limit samples represent good products, and the NG limit samples represent bad electronic samples; b. Data quantification: quantify the values ​​of good and bad electronic samples, and output the parameter ranges of four dimensions of length, width, area, brightness, and grayscale. If the range is exceeded, the device will alarm (Alarm) to notify the user to confirm whether to perform camera compensation; c. Data comparison: During mass production, the electronic sample detection parameters of the electronic samples are confirmed by equidistant sampling (such as testing the electronic samples once every 1,000 pieces), and the differences between the detected parameters (four dimensions of length, width, area, brightness, and contrast) and the allowable range of the electronic samples are compared; d. Data compensation: When it is confirmed that the mass production status has deviated from the standard range, it is automatically compensated to the standard value.

[0052] In another exemplary embodiment of the present application, the AOI equipment non-stop automatic spot inspection and correction method further includes the following steps 301 to 304:

[0053] Step 301: Acquire an initial electronic sample set; the initial electronic sample set includes a number of initial electronic samples; the initial electronic samples are used to characterize silicon-based OLED products;

[0054] Step 302: for each of the initial electronic samples, display the initial electronic sample to obtain a product display result corresponding to the initial electronic sample;

[0055] Step 303: Detecting the product display result corresponding to the initial electronic sample through the AOI device to obtain the electronic sample detection parameters corresponding to the initial electronic sample;

[0056] Step 304: Determine the allowable range of the electronic sample according to the electronic sample detection parameters corresponding to all the initial electronic samples.

[0057] Specifically, a. make an initial electronic sample 1, the area of ​​the initial electronic sample is 4 pixels (length 2*width 2), and the grayscale is 30 gray levels; b. the corresponding electronic sample is displayed in the PG display, and the standard value of the electronic sample parameters is confirmed by the AOI equipment, for example: length 2.0, width 2.0, area 4.0, grayscale 30 gray levels; c. select 100 pieces of different products, and perform step b on them to obtain the allowable range of the electronic sample, for example, the set threshold ranges corresponding to the target detection parameters are: length 2.0±0.2, width 2.0±0.2, area 4.0±0.4, grayscale 30±3 gray levels.

[0058] In another exemplary embodiment of the present application, the electronic sample values ​​are confirmed by equidistant sampling during mass production, and the set number can be 1000, that is, in step 101, the electronic sample can be tested once every 1000 pieces.

[0059] In step 101, a target electronic sample is obtained, which specifically includes: determining the target electronic sample based on a set area and a set grayscale through Python.

[0060] Step 102 specifically includes: displaying the target electronic sample through a PG display to obtain a product display result corresponding to the target electronic sample.

[0061] The equipment normally produces every 1,000 pieces without stopping. The target electronic sample is automatically displayed through the PG display, and the target electronic sample result is automatically tested through the AOI equipment to obtain the electronic sample detection parameters of the target electronic sample. For example, the electronic sample detection parameters of the target electronic sample can be: length 2.4, width 2.4, area 5.76, grayscale 35 grayscales.

[0062] In another exemplary embodiment of the present application, the above step 104 can be replaced by the following steps 401 to 402:

[0063] Step 401: When any target detection parameter exceeds a set threshold range corresponding to the target detection parameter in the allowable range of the electronic sample, the stability result of the AOI device is unstable; the target detection parameter is length, width, area or grayscale;

[0064] Step 402: When the stability result of the AOI device is unstable, the camera of the AOI device is automatically adjusted. When the stability result of the AOI device is unstable, an alarm may be issued to confirm whether to perform camera compensation.

[0065] In step 402, the camera of the AOI device is automatically adjusted, which specifically includes the following steps 501 to 503:

[0066] Step 501: Automatically adjust the Z axis or camera exposure of the camera of the AOI device;

[0067] Step 502: Use the adjusted AOI equipment to inspect the target electronic sample to obtain secondary inspection parameters;

[0068] Step 503: determine whether the secondary detection parameter is within the allowable range of the electronic sample, if so, end the calibration; if not, return to the step of "automatically adjusting the Z axis of the camera or camera exposure of the AOI device".

[0069] The equipment stability result is confirmed, for example: length 2.4>2.0±0.2, width 2.4>2.0±0.2, area 5.76>2.0±0.2, grayscale 35>30±3 grayscale, then the stability result of the AOI equipment is unstable, and the AOI equipment camera needs to be automatically adjusted, the camera Z axis or the camera exposure needs to be adjusted, and the target electronic sample needs to be tested again, for example: length 2.0, width 2.0, area 4.0, grayscale 30 grayscale, at this time, the electronic sample test result after the equipment is automatically calibrated is OK, OK means that the stability result of the AOI equipment is stable, and the silicon-based OLED product production equipment is in normal production. During the AOI equipment inspection process, the equipment does not need to find physical samples, saving labor costs; there is no need to stop the machine during the automatic calibration process, saving equipment time.

[0070] The present application also provides an application scenario, which applies the above-mentioned non-stop automatic inspection and correction method of the AOI equipment. Specifically: the non-stop automatic inspection and correction method of the AOI equipment provided in this embodiment can be applied in the silicon-based OLED product production scenario. The silicon-based OLED product production scenario includes an electronic sample production link and an AOI equipment non-stop automatic inspection and correction link; the target electronic sample enters the AOI equipment non-stop automatic inspection and correction link from the electronic sample production link to obtain the corresponding AOI equipment stability result. The non-stop automatic inspection and correction method of the AOI equipment provided in this embodiment belongs to the non-stop automatic inspection and correction link of the AOI equipment. Specifically, in the process of automatic inspection and correction link of the AOI equipment for the target electronic sample without stopping, based on the equidistant sampling method, after each production of a set number of silicon-based OLED products, the target electronic sample can be obtained, the target electronic sample can be displayed, and the product display result corresponding to the target electronic sample can be obtained. The product display result corresponding to the target electronic sample can be detected by the AOI equipment to obtain the electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample; the stability of the AOI equipment is determined according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample, and whether the AOI equipment needs to be adjusted is determined according to the stability of the AOI equipment.

[0071] Based on the same inventive concept, the embodiment of the present application also provides an AOI equipment non-stop automatic spot inspection and correction system for implementing the above-mentioned AOI equipment non-stop automatic spot inspection and correction method. The implementation scheme for solving the problem provided by the system is similar to the implementation scheme recorded in the above-mentioned method, so the specific limitations in one or more AOI equipment non-stop automatic spot inspection and correction system embodiments provided below can refer to the limitations of the AOI equipment non-stop automatic spot inspection and correction method above, and will not be repeated here.

[0072] In an exemplary embodiment, Figure 8 As shown, a non-stop automatic inspection and correction system for AOI equipment is provided, including:

[0073] The target electronic sample acquisition module T1 is used to: in the mass production process of silicon-based OLED products, based on the equidistant sampling method, obtain the target electronic sample after each production of a set number of silicon-based OLED products; the target electronic sample is used to characterize the silicon-based OLED products;

[0074] The product display module T2 is used to: display the target electronic sample and obtain the product display result corresponding to the target electronic sample;

[0075] The detection module T3 is used to detect the product display result corresponding to the target electronic sample through the AOI device to obtain the electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample;

[0076] The stability judgment module T4 is used to determine the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is the set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

[0077] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0078] This article uses specific examples to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and core ideas of this application. At the same time, for those skilled in the art, according to the ideas of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A method for automatic spot inspection and correction of AOI equipment without stopping, characterized in that: The AOI equipment non-stop automatic spot inspection and correction method comprises: In the mass production process of silicon-based OLED products, based on an equidistant sampling method, after each production of a set number of silicon-based OLED products, a target electronic sample is obtained; the target electronic sample is used to characterize the silicon-based OLED products; Displaying the target electronic sample to obtain a product display result corresponding to the target electronic sample; Detect the product display result corresponding to the target electronic sample by using an AOI device to obtain electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample; The stability of the AOI device is determined according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is the set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

2. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 1 is characterized in that: Determining the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample specifically includes: When any target detection parameter exceeds a set threshold range corresponding to the target detection parameter in the allowable range of the electronic sample, the stability result of the AOI device is unstable; the target detection parameter is length, width, area or grayscale; When the stability result of the AOI device is unstable, the camera of the AOI device is automatically adjusted.

3. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 2 is characterized in that: Automatically adjusting the camera of the AOI device includes: Automatically adjusting the Z axis or camera exposure of the camera of the AOI device; Use the adjusted AOI equipment to inspect the target electronic sample and obtain secondary inspection parameters; Determine whether the secondary detection parameter is within the allowable range of the electronic sample. If so, end the calibration; if not, return to the step of "automatically adjusting the Z axis of the camera or the camera exposure of the AOI device".

4. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 1, characterized in that: Before determining the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample, the non-stop automatic spot inspection and correction method of the AOI device further includes: Acquire an initial electronic sample set; the initial electronic sample set includes a plurality of initial electronic samples; the initial electronic samples are used to characterize silicon-based OLED products; For each of the initial electronic samples, display the initial electronic sample to obtain a product display result corresponding to the initial electronic sample; Detecting the product display result corresponding to the initial electronic sample by an AOI device to obtain an electronic sample detection parameter corresponding to the initial electronic sample; The allowable range of the electronic sample is determined according to the electronic sample detection parameters corresponding to all the initial electronic samples.

5. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 1, characterized in that: Obtain target electronic samples, including: Through Python, the target electronic sample is determined based on the set area and set grayscale.

6. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 2, characterized in that: The AOI equipment non-stop automatic spot inspection and correction method also includes: When the stability result of the AOI equipment is unstable, an alarm is issued.

7. The method for automatic spot inspection and correction of AOI equipment without stopping according to claim 1, characterized in that: Displaying the target electronic sample specifically includes: The target electronic sample is displayed through the PG display.

8. An automatic spot inspection and correction system for AOI equipment without stopping, characterized in that: The AOI equipment non-stop automatic inspection and correction system includes: The target electronic sample acquisition module is used to: in the mass production process of silicon-based OLED products, based on the equidistant sampling method, acquire the target electronic sample after each production of a set number of silicon-based OLED products; the target electronic sample is used to characterize the silicon-based OLED products; A product display module is used to: display the target electronic sample to obtain a product display result corresponding to the target electronic sample; A detection module is used to detect the product display result corresponding to the target electronic sample through an AOI device to obtain electronic sample detection parameters corresponding to the target electronic sample; the electronic sample detection parameters include the length, width, area and grayscale of the electronic sample; The stability judgment module is used to determine the stability of the AOI device according to the electronic sample detection parameters corresponding to the target electronic sample and the allowable range of the electronic sample; the allowable range of the electronic sample is the set threshold range of the electronic sample detection parameters; the stability of the AOI device is used to determine whether the AOI device needs to be adjusted.

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