Spring structure, sensitive mechanism and micro-electro-mechanical device

Abstract

The invention relates to the technical field of micro electro mechanical systems, and provides a spring structure, a sensitive mechanism and a micro electro mechanical device, the spring structure comprises a spring unit, the spring unit is sheet-shaped, the surface of the spring unit is provided with a fulcrum, the side surface of the spring unit is provided with at least two strip-shaped holes which are arranged at intervals along a first direction, and a connection point is formed between two adjacent strip-shaped holes. The connecting points and the supporting points are staggered in the first direction, and the first direction is the length direction of the spring unit. The supporting points are designed on the surfaces of the spring units, the long-strip-shaped holes are formed in the side faces of the spring units, the connecting points are formed between every two adjacent long-strip-shaped holes, the parts, provided with the long-strip-shaped holes, of the spring units serve as spring beams, the connecting points and the supporting points are arranged in a staggered mode, and therefore the spring units can generate large displacement response in the sensitive axis direction; through the fulcrum and connection point structure, the spring unit has large rigidity in the non-sensitive axis direction, the displacement response of the spring unit in the non-sensitive axis direction is reduced, and the detection precision is effectively improved.

Description

Technical Field

[0001] The present invention relates to the field of micro-electromechanical technology, and in particular to a spring structure, a sensitive mechanism and a micro-electromechanical device. Background Art

[0002] Micro-ElectroMechanical System (MEMS) is a micro-mechanical electronic system that integrates micro sensors, micro mechanisms, micro actuators, signal processing and control circuits, interfaces, etc. It has been widely used in the fields of automobiles, inertial navigation, personal electronic devices, etc. Such MEMS sensors can sense external physical signals such as acceleration, angular velocity, inclination, etc., and convert these physical signals into electrical signals for output. Currently, there are many ways to implement MEMS sensors, mainly including piezoelectric and capacitive.

[0003] The sensitive mechanism of the capacitive MEMS accelerometer consists of a mass block, a spring structure and a fixed detection plate. When impacted by external acceleration, the mass block connected to the spring structure moves, causing the capacitance to change with the distance between the mass block and the fixed plate, thereby obtaining an electrical signal of the capacitance changing with acceleration.

[0004] However, the above-mentioned spring structures are mostly S-shaped spring structures and return spring structures, which make the mass block prone to displacement in the direction of the non-sensitive axis. The existence of the non-sensitive axis displacement will introduce additional errors, thereby reducing the detection accuracy. Summary of the invention

[0005] The present invention provides a spring structure, a sensitive mechanism and a micro-electromechanical device, which are used to solve the defect in the prior art that a mass block is prone to displacement in a non-sensitive axis direction, thereby reducing detection accuracy.

[0006] The present invention provides a spring structure, comprising: At least one spring unit, the spring unit is sheet-shaped, the surface of the spring unit has a fulcrum, the side of the spring unit is provided with at least two elongated holes arranged at intervals along a first direction, a connection point is formed between two adjacent elongated holes, the connection point and the fulcrum are staggered along the first direction, and the first direction is the length direction of the spring unit.

[0007] According to a spring structure provided by the present invention, the spring unit comprises a first surface and a second surface of the spring unit are both provided with two fulcrums spaced apart along a first direction, and the fulcrum of the first surface corresponds to the fulcrum of the second surface.

[0008] According to a spring structure provided by the present invention, the spring unit includes a plurality of spring units arranged in a stacked manner, and two fulcrums arranged at intervals along the first direction are provided between two adjacent spring units, on the upper surface of the uppermost spring unit, and on the lower surface of the lowermost spring unit.

[0009] According to a spring structure provided by the present invention, two long holes arranged at intervals along a first direction are opened on the side of the spring unit, the connection point is located in the middle of the spring unit along the first direction, and the two fulcrums arranged at intervals along the first direction are symmetrically arranged on both sides of the connection point, and / or,

[0010] The fulcrum is arranged on the same surface of the spring unit corresponding to the middle position of the elongated hole.

[0011] According to a spring structure provided by the present invention, the elongated hole is located in the middle of the spring unit in the height direction, and the height of the elongated hole is 1 / 4 to 2 / 3 of the height of the spring unit.

[0012] According to a spring structure provided by the present invention, the height of the fulcrum is equal to the height of the elongated hole.

[0013] According to a spring structure provided by the present invention, the plurality of spring units are an integrally formed part.

[0014] The present invention further provides a sensitive mechanism, comprising a mass block and any one of the spring structures described above, wherein the spring unit is connected to the mass block via the fulcrum.

[0015] According to a sensitive mechanism provided by the present invention, the spring structure includes two spring structures, and the length directions of the two spring structures have a preset angle.

[0016] The present invention further provides a micro-electromechanical device, comprising any one of the spring structures described above, or comprising any one of the sensitive mechanisms described above.

[0017] The spring structure, sensitive mechanism and micro-electromechanical device provided by the present invention are characterized in that a fulcrum is designed on the surface of the spring unit, a long hole is opened on the side of the spring unit, a connection point is formed between two adjacent long holes, the part of the spring unit with the long hole is used as a spring beam, and the connection point and the fulcrum are arranged in a staggered manner, so that the spring unit can produce a larger displacement response in the direction of the sensitive axis; and the fulcrum and the connection point structure make the spring unit have a larger stiffness in the direction of the non-sensitive axis, reduce the displacement response of the spring unit along the direction of the non-sensitive axis, effectively reduce the cross-axis sensitivity, and thus improve the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is one of the structural schematic diagrams of a spring structure provided by the present invention.

[0020] Figure 2 This is the second structural schematic diagram of a spring structure provided by the present invention.

[0021] Figure 3 yes Figure 2 Schematic diagram of the local enlarged structure at point A in the middle.

[0022] Figure 4 This is one of the structural schematic diagrams of another spring structure provided by the present invention.

[0023] Figure 5 This is the second structural schematic diagram of another spring structure provided by the present invention.

[0024] Figure 6 yes Figure 4 Schematic diagram of the local enlarged structure at point B in the middle.

[0025] Figure 7 yes Figure 5 Schematic diagram of the partial enlarged structure at point C in the middle.

[0026] Figure 8 It is a structural schematic diagram of the sensitive mechanism provided by the present invention.

[0027] Reference numerals: 100, spring unit; 110, fulcrum; 120, long hole; 130, connection point; 101, a first spring unit; 102, a second spring unit; 103, a third spring unit; 200, anchor point; 300. Mass block. DETAILED DESCRIPTION

[0028] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0029] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0030] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0031] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0033] Combine the following Figure 1-Figure 8 A spring structure according to an embodiment of the present invention is described.

[0034] The embodiment of the first aspect of the present invention provides a spring structure, such as Figures 1 to 5 , Figure 8 As shown, the spring structure includes at least one spring unit 100, the surface of the spring unit 100 has a fulcrum 110, the side of the spring unit 100 is provided with at least two elongated holes 120 arranged at intervals along a first direction, a connection point 130 is formed between two adjacent elongated holes 120, and the connection point 130 and the fulcrum 110 are staggered along the first direction, and the first direction is the length direction of the spring unit 100.

[0035] It should be noted that the spring structure is used in the accelerometer. In the actual use of the accelerometer, the acceleration may come from all directions. When the mass block connected to the spring structure is subjected to acceleration in other directions, it will produce displacement in the direction of the insensitive axis. This insensitive axis displacement will affect the detection accuracy. This phenomenon is called inter-axis crosstalk. The size of the insensitive axis displacement is represented by the cross-axis sensitivity. This inter-axis crosstalk is not expected, so the spring structure is required to achieve a smaller cross-axis sensitivity.

[0036] The stiffness of the spring structure affects the displacement of the mass block with acceleration. Under the same conditions, a spring structure with greater stiffness produces a smaller displacement, and a structure with less stiffness produces a larger displacement. The displacement response of the mass block under the same acceleration is called displacement sensitivity. If high displacement sensitivity is pursued, it usually means that a spring structure with less stiffness is required, but this will inevitably cause the mass block to produce a larger displacement in the non-sensitive axis direction, thereby reducing the detection accuracy.

[0037] Therefore, in this embodiment, the spring unit 100 is in sheet shape, and the surface of the spring unit 100 is designed with a fulcrum 110; Figures 1 to 3 As shown, when there is only one spring unit 100, fulcrums 110 are provided on both surfaces of the spring unit 100, wherein the fulcrum 110 on one surface is connected to the anchor point 200, and the fulcrum 110 on the other surface is connected to the mass block 300; Figures 4 to 6 As shown, when there are multiple spring units 100, the multiple spring units 100 are stacked and arranged, and fulcrums 110 are set between the spring units 100. The upper surface of the spring unit 100 at the top layer and the lower surface of the spring unit 100 at the bottom layer are both provided with fulcrums 110. The fulcrum 110 on the upper surface of the spring unit 100 at the top layer and the fulcrum 110 on the lower surface of the spring unit 100 at the bottom layer are respectively used to connect with the anchor point 200 and the mass block 300; and at least two elongated holes 120 arranged at intervals along the length direction are opened on the side surface of each spring unit 100, and a connection point 130 is formed between two adjacent elongated holes 120.

[0038] Specifically, the length direction of the spring unit 100 is the non-sensitive axis direction, and the height direction of the spring unit 100 is the sensitive axis direction; in each spring unit 100, the two side parts of the long hole 120 along the height direction serve as a slender spring beam respectively.

[0039] Since the connection point 130 and the fulcrum 110 are arranged in a staggered manner along the first direction, there is a distance between the connection point 130 and the fulcrum 110. This structure determines that the spring unit 100 has a smaller stiffness in the sensitive axis direction, and the mass block 300 can generate a larger displacement response in the sensitive axis direction when subjected to acceleration. At the same time, the structure of the fulcrum 110 and the connection point 130 makes the spring unit 100 have a larger stiffness in the non-sensitive axis direction, and the mass block 300 will not rotate along the fulcrum 110 or cause the spring beam to bend around the connection point 130, so that the mass block 300 will hardly generate displacement in the non-sensitive axis direction when subjected to acceleration, which can effectively reduce the cross-axis sensitivity.

[0040] The spring structure provided by the embodiment of the present invention is designed with a fulcrum 110 on the surface of the spring unit 100, and a long hole 120 is opened on the side of the spring unit 100, and a connection point 130 is formed between two adjacent long holes 120. The part of the spring unit with the long hole 120 is used as a spring beam, and the connection point 130 and the fulcrum 110 are staggered. This allows the spring unit 100 to generate a larger displacement response in the sensitive axis direction; and through the structure of the fulcrum 110 and the connection point 130, the spring unit 100 has a larger stiffness in the non-sensitive axis direction, thereby reducing the displacement response of the spring unit 100 along the non-sensitive axis direction, effectively reducing the cross-axis sensitivity, and thus improving the detection accuracy.

[0041] Specifically, Figure 1 to Figure 3 As shown, in the case of one spring unit 100 , the first surface and the second surface of the spring unit 100 are both provided with two fulcrums 110 spaced apart along the first direction, and the fulcrum 110 of the first surface corresponds to the fulcrum 110 of the second surface.

[0042] It can be understood that the length direction (i.e., the first direction) of the spring unit 100 is the non-sensitive axis direction, the height direction of the spring unit 100 is the sensitive axis direction, two fulcrums 110 are provided on the upper surface of the spring unit 100, and two fulcrums 110 are provided on the lower surface of the spring unit 100, and the positions of the two fulcrums 110 on the upper surface and the two fulcrums 110 on the lower surface correspond one to one along the sensitive axis direction.

[0043] like Figures 4 to 6As shown, in the case where there are multiple spring units 100, the multiple spring units 100 are stacked and arranged in the direction of the stacking arrangement of the multiple spring units 100 in the sensitive axis direction, the upper surface of the top spring unit 100 is provided with two fulcrums 110 arranged at intervals along the first direction, the lower surface of the bottom spring unit 100 is provided with two fulcrums 110 arranged at intervals along the first direction, and two fulcrums 110 arranged at intervals along the first direction are provided between each two adjacent spring units 100, and the positions of the fulcrums 110 on the upper surface of the top spring unit 100, the fulcrums 110 between the two adjacent spring units 100, and the fulcrums 110 on the lower surface of the bottom spring unit 100 correspond to each other in the sensitive axis direction. Preferably, the multiple spring units 100 are integrally formed parts.

[0044] For example, the single fulcrum 110 can be a protrusion set on the surface of the spring unit 100, and the protrusion is a strip-shaped protrusion arranged along the width direction of the spring unit 100. Preferably, the length of the protrusion is equal to the width of the spring unit 100, so the protrusion is distributed throughout the spring unit 100 along the width direction of the spring unit 100.

[0045] Furthermore, two elongated holes 120 spaced apart along the first direction are formed on the side of the spring unit 100 , the connection point 130 is located in the middle of the spring unit 100 along the first direction, and the two fulcrums 110 spaced apart along the first direction are symmetrically arranged on both sides of the connection point 130 .

[0046] Optionally, for an accelerometer for detecting Y-axis acceleration, the sensitive axis direction is the Y-axis direction, and the non-sensitive axis direction is the X-axis direction; then in each spring unit 100, the height direction of the spring unit 100 is the sensitive axis direction, that is, the Y-axis direction (that is, the Y direction); the length direction of the spring unit 100 is the non-sensitive axis direction, that is, the X-axis direction (that is, the X direction). It should be noted here that in other embodiments, for an accelerometer for detecting X-axis acceleration, the sensitive axis direction is the X-axis direction, and the non-sensitive axis direction is the Y-axis direction; then in each spring unit 100, the height direction of the spring unit 100 is the sensitive axis direction, that is, the X-axis direction, and the length direction of the spring unit 100 is the non-sensitive axis direction, that is, the Y-axis direction.

[0047] The long side surface of the spring unit 100 is provided with an elongated hole 120 arranged along the X direction, and there are two elongated holes 120 arranged at intervals along the X direction. The two side parts of the elongated hole 120 of the spring unit 100 along the height direction are respectively used as a slender spring beam, so the spring unit 100 has two slender spring beams arranged at intervals along the Y direction, and two elongated holes 120 arranged at intervals along the X direction are formed between the two slender spring beams. The connection point 130 formed between the two elongated holes 120 serves as a connection structure of the two slender spring beams. Preferably, the connection point 130 is located in the middle of the spring unit 100 along the X direction; and the two ends of the spring unit 100 along the X direction also serve as the connection structure of the two slender spring beams, that is, as connection points, that is, the middle and both ends of the spring unit 100 are formed with connection points, so that the spring unit 100 is formed with three connection points for connecting the two slender spring beams.

[0048] It can be understood that the spring beam portion of the spring unit 100 has a long extension along the X dimension, and the three connection points 130 between the two spring beams are respectively located at both ends and the middle position, so that the spring beam and the connection points 130 form two meshes, and the mass block 300 can generate a larger displacement response in the sensitive axis direction when subjected to acceleration; and through the fulcrum 110 located in the middle position of the mesh, the stiffness in the sensitive axis direction (Y axis direction) is further reduced, and the stiffness in the non-sensitive axis direction (X axis direction) is increased, thereby further improving the detection accuracy.

[0049] Furthermore, a fulcrum 110 is provided on the same surface of the spring unit 100 corresponding to the middle position of the elongated hole 120, and the fulcrum 110 is located in the upper middle part or the lower middle part of the elongated hole 120, so that the connection point 130 and the fulcrum 110 have a maximum distance, thereby further reducing the stiffness in the sensitive axis direction and increasing the stiffness in the non-sensitive axis direction.

[0050] In one embodiment of the invention, Figure 5 to Figure 7 As shown, the elongated hole 120 is located in the middle of the spring unit 100 in the height direction, and the height H2 of the elongated hole 120 is 1 / 4 to 2 / 3 of the height H3 of the spring unit 100 .

[0051] Optionally, the height H2 of the long hole 120 is equal to the height H1 of the fulcrum 110. It should be noted here that the height direction is the sensitive axis direction.

[0052] For example, the height of the elongated hole 120 is 1 / 3 of the height of the spring unit 100, and the elongated hole 120 is located in the middle of the height direction of the spring unit 100. Then, the height of the elongated hole 120, the remaining spring unit part on the upper side of the elongated hole 120 (i.e., the spring beam on the upper side), and the remaining spring unit part on the lower side of the elongated hole 120 (i.e., the spring beam on the lower side) are equal, and are also equal to the height of the elongated hole 120.

[0053] In a specific embodiment of the invention, for an accelerometer for detecting Y-axis acceleration, the sensitive axis direction is the Y-axis direction, and the non-sensitive axis direction is the X-axis direction; the spring units 100 are arranged in a horizontal direction, and in each spring unit 100, the height direction of the spring unit 100 is the sensitive axis direction, that is, the Y-axis direction; the length direction of the spring unit 100 is the non-sensitive axis direction, that is, the X-axis direction.

[0054] The spring structure includes three spring units 100 stacked along the Y direction, and two elongated holes 120 arranged at intervals along the X direction are opened on the side of each spring unit 100. The two side parts of the elongated hole 120 of each spring unit 100 along the height direction serve as a slender spring beam respectively, so each spring unit 100 has two slender spring beams arranged at intervals along the Y direction (each spring beam has a longer extension along the X direction), and two elongated holes 120 arranged at intervals along the X direction are formed between the two slender spring beams. The connection point 130 formed between the two elongated holes 120 serves as a connection structure of the two slender spring beams. Preferably, the connection point 130 is located in the middle of the spring unit 100 along the X direction, and the two ends of the spring unit 100 along the X direction also serve as the connection points 130, that is, the middle and two ends of each spring unit 100 are formed with connection points connecting the two slender spring beams.

[0055] The three spring units 100 are respectively denoted as a first spring unit 101, a second spring unit 102 and a third spring unit 103; two fulcrums 110 are arranged on the upper surface of the first spring unit 101, and the two fulcrums 110 are symmetrically arranged on both sides of a connection point 130 in the middle of the spring unit 100 along the X direction, and the two fulcrums 110 on the upper surface of the first spring unit 101 are used to connect the anchor point 200; the first spring unit 101 and the second spring unit 102 are connected by two fulcrums 110, and the two fulcrums 110 are symmetrically arranged on the connection point 130 in the middle of the spring unit 100 along the X direction. 0; the second spring unit 102 and the third spring unit 103 are connected by two fulcrums 110, and the two fulcrums 110 are symmetrically arranged on both sides of the middle connection point 130 of the spring unit 100 along the X direction; the lower surface of the third spring unit 103 is provided with two fulcrums 110, and the two fulcrums 110 are symmetrically arranged on both sides of the middle connection point 130 of the spring unit 100 along the X direction, and the fulcrums 110 on the lower surface of the third spring unit 103 are used to connect the mass block 300, and the mass block 300 is recorded as the Y mass block, so that the three spring units 100 form a similar mesh structure.

[0056] Specifically, the length of the spring unit 100 along the X direction is 500~1200um, optionally, the length of the spring unit 100 along the X direction is 800~1000um; the fulcrum 110 is a bump, the height of the bump is 1~10 um, optionally, the height of the bump is 3~7um, and the length of the bump is equal to the width of the spring unit 100; the height of the long hole 120 is 3~7um.

[0057] For example, a simulation experiment is conducted on the spring structure of this embodiment, specifically including: applying 1g acceleration in the sensitive axis direction (Y direction) and the non-sensitive axis direction (X direction), calculating the sensitive displacement response of the Y mass block in these two directions, and the sensitive displacement response results are shown in Table 1 below.

[0058] Table 1

[0059] Among them, the sensitive displacement response represents the displacement in the sensitive axis direction, and the insensitive displacement response represents the displacement in the insensitive axis direction. The cross-axis sensitivity is obtained by dividing the displacement in the insensitive axis direction by the displacement in the sensitive axis direction. It can be seen from Table 1 that the spring structure of this embodiment can achieve a smaller cross-axis sensitivity, thereby improving the detection accuracy.

[0060] It should be noted that the number and structural dimensions of the spring units 100 can be adjusted according to the device size and the size of the mass block 300 to change the stiffness of the spring structure in the sensitive axis direction to achieve the purpose of adapting the displacement sensitivity.

[0061] The embodiment of the second aspect of the present invention provides a sensitive mechanism, such as Figure 8 As shown, the sensitive mechanism includes a mass block 300 and a spring structure provided by any of the above embodiments, and the spring unit 100 is connected to the mass block 300 via a fulcrum 110 .

[0062] It can be understood that the spring structure not only plays the role of connecting the MEMS device as a whole with the mass block 300, but also can limit the movement of the mass block 300 along the direction of the non-sensitive axis, thereby detecting the acceleration signal of the specific sensitive axis. The displacement of the mass block 300 caused by the acceleration is determined by the spring structure.

[0063] Specifically, when there is only one spring unit 100 , fulcrums 110 are provided on both surfaces of the spring unit 100 , wherein the fulcrum 110 on one surface is connected to the anchor point 200 , and the fulcrum 110 on the other surface is connected to the mass block 300 .

[0064] like Figure 4 and Figure 8As shown, when there are multiple spring units 100, the multiple spring units 100 are stacked and arranged, and fulcrums 110 are set between the spring units 100. The upper surface of the spring unit 100 at the top layer and the lower surface of the spring unit 100 at the bottom layer are both provided with fulcrums 110. The fulcrums 110 on the upper surface of the spring unit 100 at the top layer and the fulcrums 110 on the lower surface of the spring unit 100 at the bottom layer are respectively used to connect with the anchor point 200 and the mass block 300.

[0065] It should be noted that in the prior art, the spring structure is mostly an S-shaped spring structure or a return spring structure. Usually, a single fulcrum is used to connect the mass block, and the long side of the spring structure is only connected to the next-level spring structure at one end. This spring structure will cause the mass block to move in the non-sensitive axis direction around the fulcrum or around the connection point of the long side of the spring structure, thereby increasing the cross-axis sensitivity. However, two fulcrums 110 are arranged on one side of the spring unit 100 of the present invention, and at least two long strip holes 120 arranged at intervals along the length direction are opened on the side of each spring unit 100, and a connection point 130 is formed between two adjacent long strip holes 120. Since the connection point 130 and the fulcrum 110 are staggered along the first direction, there is a distance between the connection point 130 and the fulcrum 110. This structure determines that the spring unit 100 has a smaller stiffness in the sensitive axis direction, and the mass block 300 can produce a larger displacement response in the sensitive axis direction when subjected to acceleration. At the same time, the structure of the fulcrum 110 and the connection point 130 makes the spring unit 100 have greater rigidity in the non-sensitive axis direction, and the mass block 300 will not rotate along the fulcrum 110 or cause the spring beam to bend around the connection point 130, so that the mass block 300 hardly produces displacement when subjected to acceleration in the non-sensitive axis direction, which can effectively reduce the cross-axis sensitivity.

[0066] It should be noted that the spring structure used in MEMS devices can also isolate the influence of the substrate on sensitive mechanisms and play a role in stress isolation.

[0067] It should be noted that, in the sensitive mechanism provided by the present invention, since it has the spring structure as described above, it also has the various advantages as described above.

[0068] Furthermore, the sensitive mechanism includes two spring structures, and the two spring structures are arranged in different directions. The length directions of the two spring structures have a preset angle, and a dual-axis accelerometer is formed by two spring structures arranged in different directions.

[0069] For example, the sensitive mechanism includes two spring structures, wherein the sensitive axis direction of one spring structure is the Y axis direction, and the sensitive axis direction of the other spring structure is the X axis direction, then one of the spring structures is arranged along the X direction, and the other spring structure is arranged along the Y direction, then the two spring structures are arranged perpendicularly to introduce the nested structure of the mass block 300, and the mass block 300 and the spring structure moving in the two sensitive directions of X and Y respectively form an in-plane dual-axis accelerometer. For example, the Y axis direction and the X axis direction are the vertical direction and the horizontal direction respectively, then one of the spring structures is arranged along the horizontal direction, and the other spring structure is arranged along the vertical direction.

[0070] An embodiment of the third aspect of the present invention provides a micro-electromechanical device, which may include the spring structure provided by any of the above embodiments, and may also include the sensitive mechanism provided by any of the above embodiments.

[0071] It should be noted that the micro-electromechanical device provided by the present invention also has the various advantages as described above because it has the spring structure as described above or the sensitive mechanism as described above.

[0072] Specifically, the spring structure or sensitive mechanism provided in this embodiment is particularly suitable for a capacitive accelerometer with low cross-axis sensitivity.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A spring structure, characterized in that: include: At least one spring unit, the spring unit is sheet-shaped, the surface of the spring unit has a fulcrum, the side of the spring unit is provided with at least two elongated holes arranged at intervals along a first direction, a connection point is formed between two adjacent elongated holes, the connection point and the fulcrum are staggered along the first direction, and the first direction is the length direction of the spring unit.

2. The spring structure according to claim 1, characterized in that: The spring unit comprises one, and the first surface and the second surface of the spring unit are both provided with two fulcrums arranged at intervals along the first direction, and the fulcrum of the first surface corresponds to the fulcrum of the second surface.

3. The spring structure according to claim 1, characterized in that: The spring units include a plurality of spring units arranged in a stacked manner, and two supporting points spaced apart along the first direction are provided between two adjacent spring units, on the upper surface of the uppermost spring unit, and on the lower surface of the lowermost spring unit.

4. The spring structure according to claim 2 or 3, characterized in that: The side of the spring unit is provided with two long holes spaced apart along a first direction, the connection point is located in the middle of the spring unit along the first direction, the two fulcrums spaced apart along the first direction are symmetrically arranged on both sides of the connection point, and / or, The fulcrum is arranged on the same surface of the spring unit corresponding to the middle position of the elongated hole.

5. The spring structure according to claim 4, characterized in that: The elongated hole is located in the middle of the spring unit in the height direction, and the height of the elongated hole is 1 / 4 to 2 / 3 of the height of the spring unit.

6. The spring structure according to claim 4, characterized in that: The height of the fulcrum is equal to the height of the elongated hole.

7. The spring structure according to claim 3, characterized in that: The plurality of spring units are an integrally formed part.

8. A sensitive mechanism, characterized in that: It comprises a mass block and the spring structure according to any one of claims 1 to 7, wherein the spring unit is connected to the mass block via the fulcrum.

9. The sensitive mechanism according to claim 8, characterized in that: The spring structures include two spring structures, and the length directions of the two spring structures have a preset angle.

10. A micro-electromechanical device, characterized in that: It comprises the spring structure as claimed in any one of claims 1 to 7, or comprises the sensitive mechanism as claimed in claim 8 or 9.

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