Anti-seismic device

Abstract

An anti-seismic device capable of widely optimizing the damping force exerted by a damper and reducing the response acceleration generated by an anti-seismic object as much as possible with respect to various magnitudes of vibrations from a huge earthquake to a small and medium-sized earthquake, the anti-seismic device being provided with: a fixed part (2); a movable part (3) on which an anti-seismic object is placed and which is disposed on the fixed part; a support guide mechanism (4) that allows the movement of the movable part in the horizontal direction with respect to the fixed part, and includes a rail member and a moving block that reciprocates along the rail member; a damper unit (5) that applies a reaction force to the movement of the movable part with respect to the fixed part; and an elastic restoring member (6) for restoring the movable part to an initial position on the fixed part, the damper unit (5) being configured from a first damper (50) disposed on the fixed part, and a second damper (51) having a damping force and a maximum movable amount set smaller than the first damper, the damping force and the maximum movable amount being smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force and the maximum movable amount set smaller than the damping force. The second damper (51) is disposed between the first damper and the movable part, and connects the first damper and the movable part.

Description

Technical Field

[0001] The present invention relates to an earthquake-resistant device which can effectively function from micro-vibration to large earthquake. Background Art

[0002] As a device for protecting precision equipment and buildings from earthquake vibrations, there is a known earthquake-resistant device. The earthquake-resistant device generally comprises: a fixed part, which is installed on the ground, foundation, etc.; a movable part, which is provided for the earthquake-resistant object such as precision equipment and buildings; and an isolator and a damper, which are installed between the fixed part and the movable part.

[0003] When the vibration energy is transmitted from the fixed part to the movable part, the movable part can be separated from the fixed part and vibrate freely, so that the vibration of the movable part is prolonged and the response acceleration of the earthquake-resistant object is reduced. In addition, the damper absorbs the vibration energy transmitted to the movable part, so that the vibration of the movable part prolonged by the isolator converges earlier.

[0004] In such an earthquake-resistant device, when the damping force of the damper is increased in response to the earthquake vibration of a large earthquake such as an earthquake with a magnitude of more than 5, the resistance applied by the damper to the free vibration of the movable part is also increased. Therefore, for example, for micro-vibrations accompanying small and medium-sized earthquakes, the isolator cannot fully function and cannot reduce the response acceleration of the earthquake-resistant object to the vibration. On the other hand, if the damping force of the damper is set in response to micro-vibrations, the displacement of the movable part becomes too large for larger earthquake vibrations. In addition to the concern about the interference between the movable part and the surrounding structures, it also becomes difficult to converge the vibration of the movable part in advance.

[0005] As a device for coping with such a problem, a seismic device based on an elastic sliding support is disclosed in Patent Document 1. The elastic sliding support is a combination of an elastic support based on a laminated rubber and a sliding support, and is configured so that when a small vibration is applied to the movable part due to a small or medium-scale earthquake, the lateral shaking is released by the deformation of the laminated rubber. In addition, when a large vibration exceeding a predetermined deformation amount of the laminated rubber is applied to the movable part due to a large earthquake, a sliding member integrally provided with the laminated rubber slides on a fixed part to cope with a vibration of a magnitude that is difficult for the laminated rubber to cope with.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 2009-281559 Summary of the invention

[0009] Problems to be solved by the invention

[0010] For example, in the field of precision processing such as semiconductor manufacturing, it is necessary to sufficiently reduce the response acceleration of the earthquake-resistant objects not only for the larger movable vibrations associated with major earthquakes, but also for the micro-vibrations associated with small and medium-sized earthquakes, so as to prevent adverse effects on product processing.

[0011] However, the elastic support and the sliding support used in the anti-seismic device are mechanisms that have both the functions of the isolator and the damper, and it is difficult to fully exert the function as the isolator while limiting the function as the damper.

[0012] Means for solving problems

[0013] The present invention has been completed in view of such problems, and its purpose is to provide a seismic anti-vibration device that can widely optimize the attenuation force exerted by the damper for various sizes of vibrations, from seismic vibrations with larger movable amounts caused by huge earthquakes to micro vibrations caused by small and medium-sized earthquakes, and can reduce the response acceleration generated by the seismic anti-vibration object as much as possible.

[0014] The anti-seismic device of the present invention comprises: a fixed part; a movable part, which is used to carry an anti-seismic object and is arranged on the fixed part; a supporting guide mechanism, which allows the movable part to move in the horizontal direction relative to the fixed part, and includes a track component and a movable block that reciprocates along the track component; a damper unit, which applies a reaction force to the movement of the movable part relative to the fixed part; and an elastic restoring component, which restores the movable part to an initial position on the fixed part, the damper unit is composed of a first damper and a second damper, the first damper is arranged on the fixed part, the attenuation force and the maximum movable amount of the second damper are set to be smaller than those of the first damper, and the second damper is arranged between the first damper and the movable part, and connects the first damper to the movable part.

[0015] Effects of the Invention

[0016] According to the present invention, the attenuation force exerted by the damper can be widely optimized for various vibrations, from large movable seismic vibrations caused by huge earthquakes to micro vibrations caused by small and medium-sized earthquakes, and the response acceleration generated by the earthquake-resistant object can be reduced as much as possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic plan view showing a first embodiment of the earthquake-resistant device to which the present invention is applied.

[0018] Figure 2This is a perspective view showing an example of a linear guide that can be used as a support guide mechanism.

[0019] Figure 3 This is a cross-sectional view showing an example of a viscous damping damper that can be used as the first damper.

[0020] Figure 4 It is a perspective view showing a ball spline device that can be used as a second damper.

[0021] Figure 5 This is a schematic plan view showing a state in which the movable portion of the anti-vibration device shown in the embodiment starts to move in the X+ direction.

[0022] Figure 6 This is a schematic plan view showing a state in which the movable portion of the anti-seismic device shown in the embodiment has moved in the X+ direction to the maximum movable range of the second damper.

[0023] Figure 7 The movable part is shown from Figure 6 The state shown is a schematic plan view of a state in which the state is further moved in the X+ direction.

[0024] Figure 8 The movable part is shown from Figure 7 The state shown is a schematic top view of the state where movement in the X-direction has begun.

[0025] Fig. 9 The movable part is shown from Figure 7 The state shown is a schematic plan view of a state in which the state is further moved in the X-direction.

[0026] Fig.10 It is a perspective view showing a second embodiment of the earthquake-resistant device to which the present invention is applied.

[0027] Fig.11 This is a perspective view showing a state where a movable portion and one second damper are removed from the anti-seismic device of the second embodiment. DETAILED DESCRIPTION

[0028] Hereinafter, the anti-seismic device of the present invention will be described in detail with reference to the accompanying drawings.

[0029] Figure 1 1 is a schematic top view showing a first embodiment of an earthquake-resistant device 1 to which the present invention is applied. The earthquake-resistant device 1 of the first embodiment comprises: a fixed portion 2, which is installed on the ground, a foundation, etc.; a movable portion 3, which is provided for an earthquake-resistant object such as a precision device or a building; a support guide mechanism 4 as an isolator, which guides the movable portion 3 to move relative to the fixed portion 2 in a horizontal direction ( Figure 1a damper unit 5 which applies a reaction force to the movement of the movable portion 3 in the X direction; and an elastic restoring member 6 which restores the movable portion 3 to its initial position on the fixed portion 2.

[0030] For example, if the earthquake-resistant object is a precision device, a work of art, etc., the fixing part 2 is a fixed workbench set on the ground of a building or a cargo box. If the earthquake-resistant object is a building, the fixing part 2 is a building base set relative to the foundation.

[0031] In addition, for example, if the earthquake-resistant object is a precision device, a work of art, etc., the movable part 3 is a movable workbench supported on the fixed workbench via the supporting and guiding mechanism. If the earthquake-resistant object is a building, the movable part 3 is a sturdy movable frame supported on the base of the building via the supporting and guiding mechanism.

[0032] As the support guide mechanism 4, for example, Figure 2 The linear guide 40 shown in FIG. 4 is composed of a track member 41 and a moving block 42. The track member 41 is laid on the fixed part 2 along the X direction and has a rolling surface 41a of balls and rollers formed along the length direction. The moving block 42 has a rolling element row that circulates infinitely inside and can freely reciprocate along the track member 41. The movable part 3 is fixed to the moving block 42. If the moving block 42 reciprocates along the track member 41, the movable part 3 also moves on the fixed part 2 along the X direction together with the moving block 42.

[0033] It should be noted that the supporting and guiding mechanism 4 is not limited to any other mechanism as long as it can ensure the free linear reciprocating motion of the movable part 3 relative to the fixed part 2. Figure 2 The linear guide 40 is shown.

[0034] On the other hand, the damper unit 5 is composed of a combination of a first damper 50 and a second damper 51. The first damper 50 is arranged corresponding to the movable range of the movable part 3 on the fixed part 2, that is, the range of motion of the movable part based on the support guide mechanism, to cope with earthquake vibrations such as large earthquakes with large amplitude and large vibration energy. On the other hand, the second damper 51 is arranged between the first damper 50 and the movable part 3, connecting the first damper 50 and the movable part 3, to cope with small and medium earthquakes with small amplitude and small vibration energy, traffic vibrations, wind swaying of buildings and other micro vibrations.

[0035] As the first damper 50, for example, Figure 3The viscous damper 70 shown in FIG. The viscous damper 70 includes: a screw shaft 71, which is arranged on the fixing portion so that the axial direction is consistent with the X direction and has a spiral thread groove formed on the outer peripheral surface; a damper body 72, which is formed into a cylindrical shape for the screw shaft 71 to pass through and reciprocates along the screw shaft 71; a rotor 73, which is rotatably held inside the damper body 72; and a nut member 74, which is screwed to the screw shaft 71 via a plurality of balls rolling on the thread groove of the screw shaft 71 and is fixed to the axial end of the rotor 73. In addition, a viscous fluid is filled between the inner peripheral surface of the damper body 72 and the outer peripheral surface of the rotor 73.

[0036] The screw shaft 71 and the nut member 74 constitute a so-called ball screw device, and when the damper body 72 moves in the axial direction of the screw shaft 71 on the fixed portion 2, the nut member 74 rotates around the screw shaft 71, and the rotation is transmitted to the rotor 73. That is, when the damper body 72 performs linear reciprocating motion along the screw shaft 71, the rotor performs rotational reciprocating motion inside the damper body, and a shear resistance corresponding to the rotation speed of the rotor acts on the rotor from the viscous fluid.

[0037] The shear resistance of the viscous fluid on the rotor 73 becomes a reaction force to the rotational reciprocating motion of the rotor 73, and is converted by the ball screw device to become a reaction force to the linear reciprocating motion of the damper body 72 in the X direction. Thus, the energy that moves the damper body 72 in the X direction can be attenuated.

[0038] It should be noted that Figure 3 The viscous damping damper shown is merely an example of a damper that can be used as the first damper 50 and is not limited thereto. That is, various types of dampers can be selected as the first damper 50 according to the required movable range and the magnitude of the damping force.

[0039] On the other hand, the second damper 51 is composed of a guide shaft 81 and a sliding member 82 . The guide shaft 81 is arranged with the axial direction aligned with the X direction relative to the movable part 3 . The sliding member 82 is combined with the damper body 72 of the first damper 50 and moves along the guide shaft 81 .

[0040] In the first embodiment, as the second damper, Figure 4The ball spline device 80 shown in the figure. The rolling groove 81a of the rolling body is provided along the axial direction on the outer peripheral surface of the guide shaft 81, and the sliding member 82 is assembled to the guide shaft 81 via an infinitely cyclic rolling element row. As the rolling body rolls on the rolling groove 81a of the guide shaft 81, the sliding member 82 can reciprocate along the guide shaft 81 with extremely small movement resistance. On the other hand, by arbitrarily adjusting the magnitude of the preload applied to the rolling body sandwiched between the guide shaft 81 and the sliding member 82, the movement resistance of the sliding member 82 relative to the guide shaft 81 can be arbitrarily increased or decreased. In this sense, the ball spline device 80 functions as a damper with extremely small damping force.

[0041] It should be noted that Figure 4 The ball spline shown is merely an example of a device that can be used as the second damper 51 and is not limited thereto. Various types of dampers can be selected according to the movable range required for the second damper 51 and the magnitude of the required damping force.

[0042] Both ends of the guide shaft 81 are fixed to the movable part 3 via a pair of supporting members, and the sliding member 82 coupled to the first damper 50 can move along the guide shaft 81 only between the pair of supporting members. In this way, the damper unit 5 has a structure in which the first damper 50 is connected to the movable part 3 via the second damper 51. In other words, the first damper 50 and the second damper 51 are arranged in series between the fixed part 2 and the movable part 3. Moreover, the damping force exerted by the second damper 51, that is, the magnitude of the reaction force applied to the linear reciprocating motion of the movable part 3, is set to be smaller than the damping force exerted by the first damper 50.

[0043] In addition, the first damper 50 is configured to exert a damping force in substantially the entire range of movement of the movable portion 3, but the second damper 51 is configured to exert a damping force only in a range narrower than that of the first damper 50. That is, the maximum movable amount of the second damper 51 is set smaller than the maximum movable amount of the first damper 50.

[0044] Therefore, when the movable part 3 moves in the X direction, in the damper unit 5 , the second damper 51 operates earlier than the first damper 50 , and when the movement amount of the movable part 3 exceeds the movable range of the second damper 51 , the first damper 50 operates.

[0045] The elastic restoring member 6 includes: a first restoring member 61, which is provided between the damper body 72 of the first damper 50 and the fixed part 2; and a second restoring member 62, which is provided between the movable part 3 and the fixed part 2. The first restoring member 61 plays a role in returning the first damper 50 to an initial position before the operation after the vibration transmitted to the movable part 3 converges. In addition, the second restoring member 62 plays a role in returning the movable part 3 to an initial position before the operation after the vibration transmitted to the movable part 3 converges.

[0046] The anti-seismic device 1 of the first embodiment configured as described above operates as follows.

[0047] For example, when a vibration is applied to the fixed part 2 due to an earthquake, the movable part 3 is separated from the fixed part 2 by the action of the support guide mechanism 4, and a relative linear reciprocating motion in the X direction is generated between the fixed part 2 and the movable part 3. Figure 5 As shown, first, when the movable part 3 starts to move in the X+ direction relative to the fixed part 2, only the second damper 51 having a smaller damping force than the first damper 50 operates, and the first damper 50 does not operate. That is, in the first damper 50, the damper body 72 does not move relative to the screw shaft 71, and in the second damper 51, the sliding member 82 moves relative to the guide shaft 81.

[0048] Therefore, if the amplitude of the vibration generated in the movable part 3 falls within the movable range of the second damper 51, in the anti-seismic device 1, the first damper 50 is not activated but only the second damper 51 is activated, and the second damper 51 absorbs the vibration energy transmitted from the fixed part 2 to the movable part 3, thereby converging the vibration of the movable part 3 in advance.

[0049] In addition, since the damping force of the second damper 51 is set smaller than that of the first damper 50, even for small and medium earthquakes, wind swaying of buildings, traffic vibrations and other micro-vibrations, the support guide mechanism 4 as an isolator can be fully operated to separate the vibrations of the movable part 3 from the fixed part 2. Therefore, the earthquake-resistant device 1 can fully reduce the response acceleration generated by the earthquake-resistant object mounted on the movable part 3 even for micro-vibrations, and is effective for vibration countermeasures of precision processing equipment such as semiconductor manufacturing equipment.

[0050] On the other hand, when the movable part 3 moves in the X+ direction due to the vibration generated in the movable part 3 exceeding the movable range of the second damper 51, as shown in FIG. Figure 6As shown in FIG. 1 , the sliding member 82 of the second damper 51 abuts against the support member supporting the guide shaft 81, so if the movable part 3 moves further in the X+ direction, the first damper 50 starts to operate from this point. Figure 7 As shown, the damper body 72 of the first damper 50 combined with the sliding member 82 of the second damper 51 moves relative to the screw shaft 71, and the first damper 50 absorbs the vibration energy transmitted from the fixed part 2 to the movable part 3, so that the vibration of the movable part 3 converges.

[0051] Then, when the moving direction of the movable part is reversed from the X+ direction to the X- direction, as shown in FIG. Figure 8 As shown, with respect to the movement of the movable part in the X-direction, only the second damper 51 having a damping force smaller than that of the first damper 50 operates. At this time, the first damper 50 does not operate, and the damper body 72 of the first damper 50 stops at the position on the screw shaft 71 when the moving direction of the movable part 3 is reversed.

[0052] Furthermore, when the movable part 3 further moves in the X-direction and the sliding member 82 of the second damper 51 abuts against the supporting member supporting the guide shaft 81, the first damper 50 starts to operate from this point. Fig. 9 As shown, when the sliding member of the second damper 51 is in contact with the supporting member of the guide shaft, the damper body 72 of the first damper 50 moves in the X-direction relative to the screw shaft 71, and the first damper 50 absorbs the vibration energy transmitted from the fixed part 2 to the movable part 3, thereby converging the vibration of the movable part 3.

[0053] Thus, in the earthquake-resistant device 1 of the first embodiment, when, for example, a seismic vibration with a large movable amount acts on the fixed part 2 due to a large earthquake, and the movable part 3 moves relative to the fixed part 2 beyond the movable range of the second damper 51, the first damper that exerts a larger damping force than the second damper 51 operates. Thus, even when huge vibration energy of a large earthquake is transmitted to the movable part, in addition to being able to suppress the maximum displacement of the movable part by the large damping force exerted by the first damper, the vibration of the movable part 3 can be converged in advance.

[0054] Next, a second embodiment of the earthquake-resistant device to which the present invention is applied will be described.

[0055] Fig.10 The second embodiment of the earthquake-proof device is shown. In the earthquake-proof device 1A of the second embodiment, the movable part 3 is supported on the support fixed part 2 by the support guide mechanism 4 in the same manner as in the first embodiment, and the movable part 3 can move freely along the X direction on the fixed part 2. As the support guide mechanism 4 of the second embodiment, Figure 2 The linear guide 40 shown in FIG. Fig.10 In the example shown, a rail member 41 is laid on the fixed portion 2 along the X direction, and a moving block 42 that slides on the rail guide 41 is fixed to the movable portion.

[0056] A damper unit 5 is provided between the fixed portion 2 and the movable portion 3. The damper unit 5 is composed of a combination of a first damper 50 and a pair of second dampers 51. The first damper 50 is provided corresponding to the movable range of the movable portion 3 on the fixed portion 2, that is, the motion range of the movable portion based on the support guide mechanism 4, and on the other hand, the second damper 51 is provided between the first damper 50 and the movable portion 3 to connect the first damper 50 and the movable portion 3.

[0057] Fig.11 1 is a perspective view showing a state in which one of the movable part 3 and the second damper 51 is removed to expose the first damper 50. The first damper 50 includes: a rack 52 fixed to the fixed part 2 along the X direction; a pinion 53 meshing with the rack 52 to rotate; and a rotation damper 54, which is given rotation by the pinion 53 and fixed to the second damper 51. The rack 52 is laid on the fixed part 2 corresponding to the range of motion of the moving block 42 of the support guide mechanism 4. A viscous fluid is sealed in the rotation damper 54, and when a rotation motion is input from the pinion 53, a damping force is applied to the rotation motion.

[0058] On the other hand, Fig.11 As shown in FIG. 1 , the second damper includes a sliding member 55 fixed to the movable part 3, a guide shaft 56 to which the sliding member 55 is assembled via a plurality of rolling elements and arranged along the X direction, an intermediate plate 57 on which the guide shaft 56 is laid, and a pair of locking members 58 provided on the intermediate plate 57 corresponding to both ends in the length direction of the guide shaft 56. The intermediate plate 57 is suspended from the movable part 3 via the sliding member 55 and the guide shaft 56, and can move relative to the movable part 3 in the X direction by the guide shaft 56 moving relative to the sliding member 55 in the X direction. However, since the guide shaft 56 is set shorter than the length of the track rail 41 of the support guide mechanism 4, the moving range of the movable part 3 relative to the intermediate plate 57 is set shorter than the moving range of the movable part 3 relative to the fixed part 2.

[0059] The combination of the sliding member 55 and the guide shaft 56 is the same as the ball spline device in the first embodiment, and functions as a damper with extremely small damping force. That is, by arbitrarily adjusting the magnitude of the preload applied to the rolling element sandwiched between the sliding member 55 and the guide shaft 56, the movement resistance of the sliding member 55 relative to the guide shaft 56 can be arbitrarily increased or decreased.

[0060] The rotation damper 54 is fixed to the back side of the intermediate plate 57, that is, the surface opposite to the surface on which the guide shaft 56 is laid. Therefore, when the intermediate plate 57 moves relative to the fixed portion 2, the pinion 53 meshing with the rack 52 rotates, and the rotation damper 54 exerts a damping force, which acts on the movement of the intermediate plate 57 in the X direction.

[0061] In addition, although Fig.10 and Fig.11 Although not shown in the figure, an elastic restoring member such as a coil spring is provided between the movable part 3 and the fixed part 2, and a force is applied in a direction to return the movable part 3 vibrating in the X direction on the fixed part 2 to the center position of the amplitude of the vibration. In addition, a similar elastic restoring member is also provided between the fixed part 2 and the intermediate plate 57, and a force is applied in a direction to return the intermediate plate 57 to the initial position on the fixed part.

[0062] Then, the anti-seismic device of the second embodiment configured as above operates as follows.

[0063] For example, when a vibration acts on the fixed part 2 due to an earthquake, the movable part 3 supported by the support guide mechanism 4 as an isolator moves in the X direction relative to the fixed part 2, and reciprocates on the fixed part 2. If the amplitude of the reciprocating motion of the movable part 3 at this time is within the movable range of the second damper 51, that is, the moving range of the sliding member 55 relative to the guide shaft 56, only the weak damping force of the second damper 51 acts on the movable part 3. At this time, the intermediate plate 57 is in a state of being substantially stationary on the fixed part 2.

[0064] Thus, similarly to the first embodiment described above, the second damper 51 absorbs the vibration energy transmitted from the fixed part 2 to the movable part 3 in response to micro-vibrations such as small and medium earthquakes, swaying of buildings in the wind, and traffic vibrations, so that the vibration of the movable part 3 converges in advance. In addition, since the damping force of the second damper 51 is smaller than that of the first damper 50, the support guide mechanism 4 as an isolator can be fully operated, and the response acceleration generated by the earthquake-resistant object mounted on the movable part 3 can be fully reduced.

[0065] On the other hand, when the amplitude of the reciprocating motion of the movable part 3 exceeds the movable range of the second damper 51, the movable part 3 abuts against the locking member 58 provided on the intermediate plate 57, and the intermediate plate is dragged by the movable part 3 and moves in the X direction on the fixed part 2 together with the movable part 3.

[0066] Thus, in the first damper 50, the rotation damper 54 moves in the X direction relative to the fixed part 2, so the pinion meshing with the rack rotates, and the damping force of the rotation damper 54 acts on the movement of the intermediate plate 57 in the X direction. In addition, the intermediate plate 57 is dragged by the movable part 3 and moves in the X direction, so the damping force exerted by the rotation damper 54 acts on the movement of the movable part 3 in the X direction.

[0067] In this way, Fig.10 In the earthquake-resistant device 1A of the second embodiment shown, when a seismic vibration with a large amplitude acts on the fixed part 2 due to a large earthquake, for example, and the movable part 3 moves relative to the fixed part 2 beyond the movable range of the second damper 51, the first damper 50 that exerts a damping force greater than that of the second damper 51 is actuated. In addition to being able to use the larger damping force exerted by the first damper 50 to suppress the maximum displacement of the movable part, the vibration of the movable part 3 can also be converged in advance.

[0068] As described above, according to the first and second embodiments of the earthquake-resistant device, by connecting two types of dampers with different attenuation forces and maximum movable ranges in series between the fixed part 2 and the movable part 3, it is possible to fully reduce the response acceleration generated by the earthquake-resistant object carried on the movable part for micro-vibrations caused by small and medium earthquakes, swaying of buildings in the wind, traffic vibrations, etc. In addition, it is also effective for vibrations with larger movable amounts and larger energies accompanying major earthquakes. It is possible to widely optimize the attenuation force exerted by the damper for various vibrations and to reduce the response acceleration generated by the earthquake-resistant object as much as possible.

[0069] Furthermore, by setting the damping force exerted by the second damper 51 to an arbitrary magnitude, the anti-seismic device can be optimized for various uses.

[0070] It should be noted that, in the illustrated embodiment of the present invention, the case where the movable part vibrates only in the X direction is cited as an example for explanation, but by stacking a seismic device for vibrating the movable part in the X direction and a seismic device for vibrating in the Y direction orthogonal to the X direction, it is also possible to obtain a seismic device that operates in a horizontal two-dimensional plane.

Claims

1. A seismic device, characterized in that: The anti-seismic device comprises: A fixing portion (2); A movable part (3) for carrying an earthquake-resistant object and arranged on the fixed part (2); A support guide mechanism (4) which allows the movable part (3) to move in a horizontal direction relative to the fixed part (2), and comprises a track component and a moving block which reciprocates along the track component; a damper unit (5) which applies a reaction force to the movement of the movable part (3) relative to the fixed part (2); and an elastic restoring member (6) for returning the movable portion (3) to an initial position on the fixed portion (2), The damper unit (5) is composed of a first damper (50) and a second damper (51). The first damper (50) is arranged on the fixing portion (2), The damping force and maximum movable amount of the second damper (51) are set smaller than those of the first damper (50), and the second damper (51) is arranged between the first damper (50) and the movable part (3) to connect the first damper (50) and the movable part (3).

2. The anti-seismic device according to claim 1, characterized in that: The first damper operates only in a state where the movement amount of the movable portion exceeds the maximum movable amount of the second damper.

3. The anti-seismic device according to claim 1, characterized in that: The second damper (50) includes: a guide shaft, which is arranged in parallel with the rail member of the support guide mechanism (4); and a sliding member, which moves along the guide shaft.

4. The anti-seismic device according to claim 3, characterized in that: When the movable portion (3) moves beyond the movable range of the sliding member relative to the guide shaft of the second damper (51), the first damper (50) is actuated.

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