Six-axis linkage motion platform, scanning electron microscope and application thereof

Abstract

The invention provides a six-axis linkage motion platform, and belongs to the technical field of scanning electron microscopes. The X-axis linear motion mechanism comprises an X-axis linear motion structure arranged on a base; the Y-axis linear motion mechanism is arranged on the base and is used for enabling the portal frame to move in the Y direction; the Z-axis linear motion structure is arranged on the portal frame; the R-axis rotating structure is arranged on the X-axis linear motion structure and is used for enabling the sample to rotate by 360 degrees; the T-axis tilting and swinging structure is arranged on the Z-axis linear motion structure and is used for enabling the electron gun assembly to swing; and the A-axis linear motion mechanism is arranged on the T-axis tilting and swinging structure and used for providing linear motion of the electron gun assembly in the A-axis direction. The X-axis, the Y-axis, the Z-axis, the A-axis, the T-axis and the R-axis are arranged, adjustment of movement in six directions can be achieved, slicing treatment is not needed when large-size samples are observed, and precious samples are prevented from being damaged.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning electron microscopes, and in particular to a six-axis linkage motion platform, application of the six-axis linkage motion platform in a scanning electron microscope, and a scanning electron microscope comprising the six-axis linkage motion platform. Background Art

[0002] With the development of science and technology, scanning electron microscopes are increasingly widely used in enterprises, institutions and major scientific research institutions. At present, the size of samples that can be observed by conventional scanning electron microscopes is relatively small, and the requirements for sample size and space are extremely strict. For large-sized samples, they must be sliced, which causes certain damage to precious samples. In addition, the observation angle of conventional scanning electron microscopes is limited, and multi-angle observation cannot be achieved. Summary of the invention

[0003] In view of this, in order to solve the technical problem that when a conventional scanning electron microscope observes large-size samples, it is necessary to perform slicing processing, which causes certain damage to precious samples. In the first aspect, the present invention provides a six-axis linkage motion platform, which has an X-axis, Y-axis, Z-axis, A-axis, T-axis and R-axis, and can realize the adjustment of movement in six directions. When observing large-size samples, there is no need for slicing processing, thereby avoiding damage to precious samples.

[0004] To achieve the above object, the present invention provides the following technical solutions: A six-axis linkage motion platform, comprising: An X-axis linear motion structure is arranged on the base; A Y-axis linear motion mechanism is provided on the base and is used to provide the gantry with motion along the Y direction; A Z-axis linear motion structure is arranged on the gantry; An R-axis rotation structure is disposed on the X-axis linear motion structure and is used to rotate the sample 360°; The T-axis tilting structure is arranged on the Z-axis linear motion structure to provide the electron gun assembly with a swinging motion; The A-axis linear motion mechanism is arranged on the T-axis tilting structure and is used to provide linear motion of the electron gun assembly along the A-axis direction.

[0005] Preferably, it also includes: A sample changing shaft, arranged on the base, for changing samples; The X-axis linear motion structure is arranged on the sample changing axis.

[0006] Preferably, the T-axis tilt structure provides the electron gun assembly with a swing range of -20°-150°.

[0007] Preferably, the electron gun assembly comprises: An electron gun support, connected to the A-axis linear motion mechanism; The electron gun is fixed on the electron gun bracket.

[0008] Preferably, it also includes: The integral maintenance shaft is arranged at the bottom of the base and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

[0009] In a second aspect, the present invention provides a scanning electron microscope, comprising the above-mentioned six-axis linkage motion platform.

[0010] In a third aspect, the present invention provides an application of the above-mentioned six-axis linkage motion platform in a scanning electron microscope.

[0011] Compared with the prior art, the present invention has the following beneficial effects: The six-axis linkage motion platform involved in the present invention has six degrees of freedom, namely, the X-axis, Y-axis, Z-axis, A-axis, T-axis and R-axis, and can realize motion adjustment in six directions. This advanced platform design eliminates the need for cumbersome slicing when observing large-size samples, thereby avoiding potential damage to precious samples. Through this all-round motion adjustment capability, researchers can more flexibly observe and analyze samples in detail, ensuring the integrity of the samples and the accuracy of the research.

[0012] The six-axis linkage motion platform involved in the present invention is applied to a scanning electron microscope to realize a multi-angle observation function. The platform can accurately adjust the position and posture of the sample through a precise six-axis control mechanism, thereby realizing all-round, multi-angle and detailed observation during the observation process of the scanning electron microscope. In addition, the platform also has excellent stability and reliability, and can maintain stable performance output in long-term, high-intensity observation tasks. In the field of scanning electron microscopy, the application of the six-axis linkage motion platform not only greatly broadens the observation range and improves the observation quality, but also provides scientific researchers with a more convenient and efficient means of observation, which is of great significance to promoting the development of related scientific research fields.

[0013] The six-axis linkage motion platform provided by the present invention can accommodate large-sized samples and realize non-destructive observation of large-sized samples without blind spots. It breaks the conventional design of the electron gun of the scanning electron microscope, in which both the electron gun and the sample can be moved, and the freedom of movement is higher, and the angle and range of the sample observation are larger. It can also be used in different usage scenarios, such as atmospheric environment.

[0014] The observation angle range is wider and the electron gun has a higher degree of freedom.

[0015] There are fewer restrictions on sample size and weight.

[0016] Due to the mobility of the electron gun, the observation of the sample is no longer limited to the traditional fixed electron gun position, thus achieving flexible observation of different parts of the sample.

[0017] The innovative design of the present invention significantly reduces the restrictions on sample size and weight, allowing larger and heavier samples to be observed non-destructively under a scanning electron microscope.

[0018] The high-precision control of the six-axis linkage motion platform ensures the stability and positioning accuracy of the sample during observation, which is crucial for obtaining high-quality images. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of different postures of the present invention; Figure 3 is a side view of the present invention; Figure 4 A top view of the present invention; In the figure, 1. gantry; 2. T-axis tilting structure; 3. electron gun bracket; 4. electron gun; 5. Y-axis linear motion mechanism; 6. overall maintenance axis; 7. base; 8. sample changing axis; 9. X-axis linear motion structure; 10. R-axis rotation structure; 11. Z-axis linear motion structure; 12. A-axis linear motion mechanism. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making creative work are within the scope of protection of the present invention.

[0021] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", "top / bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "mounted / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] like Figure 1-4 As shown, the present invention provides a six-axis linkage motion platform, comprising: An X-axis linear motion structure 9 is disposed on the base 7; A Y-axis linear motion mechanism 5 is provided on the base 7 and is used to provide the gantry 1 with movement along the Y direction; A Z-axis linear motion structure 11 is disposed on the gantry 1; The R-axis rotating structure 10 is disposed on the X-axis linear motion structure 9 and is used to rotate the sample 360°; The T-axis tilting structure 2 is arranged on the Z-axis linear motion structure 11, and is used to provide the electron gun assembly with a swing; The A-axis linear motion mechanism 12 is disposed on the T-axis tilting structure 2 and is used to provide linear motion of the electron gun assembly along the A-axis direction.

[0024] The above-mentioned six-axis linkage motion platform provided by the present invention, wherein the X-axis linear motion structure 9 and the R-axis rotation structure 10 control the movement of the sample stage, the Y-axis linear motion mechanism 5, the T-axis tilting structure 2, the A-axis linear motion mechanism 12, and the Z-axis linear motion structure 11 control the movement of the electron gun 4, and through the multi-axis motion control board, the six-axis linkage control is realized to realize multi-angle non-destructive detection of samples.

[0025] Among them, the X-axis linear motion structure 9, the Y-axis linear motion mechanism 5 and the Z-axis linear motion structure 11 can select a linear sliding mechanism of a slider and a slide rail, or other conventional linear motion structures in the field, such as a conventional lead screw, linear motor, linear module, crank slider, electric push rod, electric cylinder, gear rack, etc. The specific structure is the existing technology and can be selected according to actual needs, which will not be repeated here.

[0026] The R-axis rotating structure 10 refers to a mechanism or component that performs rotational motion around a rotation axis. The R-axis can represent any axis around which it rotates. For example, in robotics, the R-axis can be a rotary joint of a robot arm, which enables the robot to perform rotational motion in a horizontal plane. This rotating structure is widely used in various mechanical systems and automation equipment to achieve specific motion functions. In the present invention, the R-axis rotating structure refers to rotation around the axis of the R-axis rotating structure.

[0027] The T-axis tilting structure 2 refers to a mechanical structure that can realize tilting motion along the T-axis direction. This structure is usually used in application scenarios where it is necessary to adjust or control the tilt of an object in a vertical plane, such as machine tools, robots, aerospace and other fields. The T-axis tilting structure is mainly composed of a support seat, a driving component and a transmission device. The T-axis tilting structure in the present invention is preferably driven by a motor, and a worm gear transmission device is used to rotate it along the T-axis direction. A specific rotation angle range is set by a control system, and finally the tilting motion required by the user is formed.

[0028] The A-axis linear motion mechanism 12 is a mechanical mechanism capable of realizing linear motion along the A-axis direction. This mechanism is widely used in various mechanical equipment, robot systems, CNC machine tools and other applications to realize specific motion functions. In the present invention, a conventional A-axis linear motion mechanism can be selected, and those skilled in the art can select it according to actual needs.

[0029] The present invention also includes: A sample changing shaft 8, disposed on the base 7, for changing samples; The X-axis linear motion structure 9 is disposed on the sample changing axis 8 .

[0030] The replacement of samples and the maintenance of the electron gun 4 were considered at the beginning of the design. Since large-sized samples are heavy, in order to prevent people from entering the vacuum chamber and causing damage to the equipment and personal safety, a sample changing shaft 8 is designed. The sample changing shaft 8 is located below the R-axis rotating structure 10. When the sample needs to be replaced, it is only necessary to manually push and pull the sample changing shaft 8 to pull the R-axis rotating structure 10 out of the vacuum chamber as a whole. After replacing the sample, the manual push-pull shaft is reset to complete the sample replacement action.

[0031] In the present invention, the T-axis tilt structure 2 provides the electron gun assembly with a swing range of -20° to 150°.

[0032] In the present invention, the electron gun assembly comprises: An electron gun support 3, which is connected to the A-axis linear motion mechanism 12; The electron gun 4 is fixed on the electron gun support 3 .

[0033] The present invention also includes: The integral maintenance shaft 6 is arranged at the bottom of the base 7 and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

[0034] Due to the movement of the electron gun 4, the maintenance of the electron gun 4 is also considered. In order to facilitate the maintenance of the electron gun 4, an integral maintenance shaft 6 is designed. When the electron gun 4 needs to be maintained, it is only necessary to pull the integral maintenance shaft out of the vacuum chamber. At this time, half of the vacuum six-axis linkage motion platform is pulled out of the vacuum chamber, and the Y-axis linear motion structure 5 is moved to the outer limit position, and the electron gun 4 can be maintained. Considering the heavy weight of the vacuum axis linkage motion platform, a support frame can be configured on the outer side of the vacuum chamber.

[0035] In a second aspect, the present invention provides a scanning electron microscope, comprising the above-mentioned six-axis linkage motion platform.

[0036] In a third aspect, the present invention provides an application of the above-mentioned six-axis linkage motion platform in a scanning electron microscope.

[0037] The above are only preferred specific implementations of the present invention; however, the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and improved concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A six-axis linkage motion platform, characterized in that: include: The X-axis linear motion structure is arranged on the base; A Y-axis linear motion mechanism is provided on the base and is used to provide the gantry with motion along the Y direction; A Z-axis linear motion structure is arranged on the gantry; An R-axis rotation structure is disposed on the X-axis linear motion structure and is used to rotate the sample 360°; The T-axis tilting structure is arranged on the Z-axis linear motion structure to provide the electron gun assembly with a swinging motion; The A-axis linear motion mechanism is arranged on the T-axis tilting structure and is used to provide linear motion of the electron gun assembly along the A-axis direction.

2. The six-axis linkage motion platform according to claim 1, characterized in that: Also includes: A sample changing shaft, arranged on the base, for changing samples; The X-axis linear motion structure is arranged on the sample changing axis.

3. The six-axis linkage motion platform according to claim 1, characterized in that: The T-axis tilt structure allows the electron gun assembly to swing within a range of -20° to 150°.

4. The six-axis linkage motion platform according to claim 1, characterized in that: The electron gun assembly comprises: An electron gun support, connected to the A-axis linear motion mechanism; The electron gun is fixed on the electron gun bracket.

5. A six-axis linkage motion platform according to any one of claims 1-4, characterized in that: Also includes: The integral maintenance shaft is arranged at the bottom of the base and is used to move the six-axis linkage motion platform as a whole out of the vacuum chamber.

6. A scanning electron microscope, characterized in that A six-axis linkage motion platform comprising any one of claims 1-5.

7. Application of a six-axis linkage motion platform according to any one of claims 1 to 5 in a scanning electron microscope.

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