Cleaning method for focusing ring accessory

Through the ultrasonic cleaning of kerosene and soaking of mixed acid solution, the problem of poor cleaning effect of focus ring accessories is solved, and the efficient removal of oil and dirt and oxide layers is achieved, which meets the cleanliness requirements of the coating process and improves the maintenance and use efficiency of accessories.

CN119634339APending Publication Date: 2025-03-18KONFOONG MATERIALS INTERNATIONAL CO LTD
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Patent Information

Application Number
CN202510030005.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-08
Publication Date
2025-03-18

AI Technical Summary

Technical Problem

It is difficult to effectively clean the focus ring accessories in the sputtering coating process, especially the accumulation of thread structures and oxides, which affects the coating effect and the maintenance efficiency of accessories.

Method used

Ultrasonic cleaning of kerosene is used to remove surface oil adhesions, then soak with mixed acid solution for deoxidation of the inner layer, and finally ensure that the surface of the accessories is completely cleaned by deacidification, dehydration and drying.

Benefits of technology

It realizes efficient cleaning of focus ring accessories, removes oil stains and oxide layers, meets the high-cleanness requirements of the sputtering coating process, reduces accessories losses, and improves coating effect and accessories maintenance efficiency.

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Abstract

The invention provides a cleaning method for a focusing ring accessory. The cleaning method comprises the steps that the focusing ring accessory is provided; kerosene is used for conducting ultrasonic treatment on the focusing ring accessory, then kerosene removal treatment is conducted, and the first cleaning process is completed; after the first cleaning process is finished, a mixed acid solution is used for soaking the focusing ring accessory, mixed acid comprises nitric acid and hydrofluoric acid, and a second cleaning process is finished; and after the second cleaning process is finished, the focusing ring accessory is sequentially subjected to deacidification, dehydration and drying, and cleaning is completed. According to the cleaning method, oil stains and oxide layers on the surface of the focusing ring can be effectively removed, no corrosion effect is generated on accessories, the accessory cleaning efficiency is improved, and the influence on the sputtering process is avoided.
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