Drift tube electrode arrangement with dc optics

By setting up a DC electrode assembly in the drift tube of the high-energy beamline ion implanter, combining the role of RF voltage and DC voltage, the problems of increasing length and limited transport capacity of traditional devices are solved, and a more compact high-energy ion implanter design is achieved.

CN119654969APending Publication Date: 2025-03-18APPLIED MATERIALS INC
0 Cites 0 Cited by

Patent Information

Application Number
CN202380058986.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-09-21
Filing Date
2023-09-20
Publication Date
2025-03-18

AI Technical Summary

Technical Problem

When accelerating the ion beam, traditional high-energy beam line ion implanters need to add an external quadrupole structure to achieve focus, resulting in increased device length and limited transport capacity.

Method used

Using a design that combines the drift tube assembly and the resonance coil, the focus and manipulation of the ion beam is achieved by setting the DC electrode assembly in the drift tube, and the RF voltage and DC voltage work together.

Benefits of technology

Focusing and guidance of the ion beam can be achieved without the need for an external quadrupole structure, reducing device length and improving compactness and transport capability.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

An apparatus may include a drift tube assembly having a plurality of drift tubes to conduct an ion beam along a beam propagation direction. The plurality of drift tubes may define a multiple gap configuration corresponding to the plurality of acceleration gaps, wherein at least one energized drift tube of the drift tube assembly is coupled to receive an RF voltage signal. The apparatus may also include a DC electrode assembly including conductor wires disposed within a resonance coil coupled to receive a DC voltage signal into the at least one energized drift tube. The DC electrode assembly may also include a DC electrode arrangement connected to the conductor line and disposed within the at least one energized drift tube.
Need to check novelty before this filing date? Find Prior Art