Electropolishing head for electrochemical mechanical planarization equipment, conductive system and assembly method of conductive system

By using sliding contact conductive devices and flexible cables in electrochemical mechanical planarization equipment, the problems of difficulty in installation and strain damage of polishing head conductive cables are solved, and efficient power transmission and simplified installation structure are achieved.

CN119685914AActive Publication Date: 2025-03-25HANGZHOU ZHONGGUI ELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202510187787.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-20
Publication Date
2025-03-25
Estimated Expiration
2045-02-20

AI Technical Summary

Technical Problem

In the existing electrochemical mechanical planarization process, the conductive cables of the polishing head are difficult to install, and long-term bending leads to strain damage, affecting the efficiency of power transmission.

Method used

The sliding contact conductive device is adopted, including a conductive probe, a telescopic member and a housing, and the electrical energy transmission is achieved through the sliding contact between the conductive probe and the housing, and the assembly structure is simplified by using flexible cables and a removable conductive post connection unit.

Benefits of technology

It realizes efficient power transmission in a limited confined space, simplifies the installation structure, improves the installation efficiency and fault tolerance of the electropolished head, and reduces the cost of use and updates.

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Abstract

The invention discloses an electric polishing head for electrochemical mechanical planarization equipment, a conductive system and an assembly method thereof, and the electric polishing head comprises a conductive part which penetrates through a polishing head bearing part and is used for being connected with an external power supply unit; the conductive column is arranged on the polishing head or the polishing head bearing piece in a penetrating mode and at least comprises a shell, a telescopic piece and a conductive probe, the conductive probe and the shell are connected with the telescopic piece so that the conductive probe and the shell can relatively slide in the axial direction, and the outer wall of the conductive probe makes contact with the inner wall of the shell and is conductive; sliding contact type conduction is formed between the conductive probe and the shell; and the conductive column connecting unit is arranged on the polishing head and detachably connected with the conductive column. In a limited closed space, a conductive device in a sliding contact form is adopted, and conductive structures of two adjacent parts are tightly connected, so that electric energy is efficiently transmitted between the adjacent parts.
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