Capacitive pressure sensor

By designing a baffle member with an opposing face and surrounding the face in a capacitive pressure sensor, ensuring that gas flows from the end of the gas inlet side to the diaphragm side, the problem of accumulation of gas components and/or gas component decompositions at the diaphragm is solved, and better pressure measurement responsiveness and stacking effect are achieved.

CN119688149APending Publication Date: 2025-03-25HORIBA STEC CO LTD
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Patent Information

Application Number
CN202411303993.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2024-07-04
Filing Date
2024-09-19
Publication Date
2025-03-25

AI Technical Summary

Technical Problem

In the semiconductor manufacturing process of existing capacitive pressure sensors, gas components and/or substances decomposed by gas components are accumulated at the diaphragm, affecting the sensor output.

Method used

A capacitive pressure sensor is designed, which includes a housing and a baffle component. The casing surrounds the diaphragm and forms a measuring chamber, and the baffle member is arranged in the measuring chamber, having an opposing face and a surrounding face, and a flow section around the face to ensure that gas flows from the end of the gas inlet side to the diaphragm side.

Benefits of technology

With this design, the introduced gas path can be fully secured, the accumulation of the diaphragm can be reduced, the baffle structure can be simplified, the possibility of deterioration of responsiveness can be reduced, and the accumulation effect can be improved.

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Abstract

Provided is a capacitive pressure sensor in which the configuration of a baffle plate is simplified and accumulation on a diaphragm is prevented, the capacitive pressure sensor being provided with: a housing (7) which surrounds a pressure receiving surface (2a) of a diaphragm (2) and forms a measurement chamber (S), and in which a gas introduction port (7a) for introducing gas into the measurement chamber (S) is formed; and a baffle member (8) provided in the measurement chamber (S), the baffle member (8) having: a facing surface section (81) facing the gas introduction port (7a); and a surrounding surface section (82) that is provided closer to the gas introduction port (7a) than the facing surface section (81) and surrounds the periphery of the gas introduction port (7a), the surrounding surface section (82) having a flow-through section (83) that causes the gas introduced from the gas introduction port (7a) to flow from the end on the gas introduction port side to the diaphragm (2) side.
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