Capacitance film vacuum gauge adjusting and measuring device
By designing a capacitor thin film vacuum gauge regulating device with a split structure of the main vacuum chamber and multiple testing chambers, the problems of low efficiency and high cost in the prior art are solved, and batch automatic adjustment and testing of the vacuum gauge is realized, which improves the adjustment and measurement efficiency and saves costs.
CN119688159AActive Publication Date: 2025-03-25LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Patent Information
- Application Number
- CN202411641067.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-18
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2044-11-18
AI Technical Summary
Technical Problem
The existing capacitor film vacuum gauge metering device is inefficient and cannot achieve batch debugging, resulting in wasted time, manpower and material resources, and high costs.
Method used
A capacitor thin film vacuum meter tuning device with a split structure including a main vacuum chamber and multiple testing chambers is designed. Automatic testing is realized through a data acquisition system, and dozens of vacuum gauges can be connected to debug at the same time.
Benefits of technology
It improves the efficiency of vacuum gauge adjustment and testing, saves manpower and material costs, and realizes batch automatic adjustment and testing of capacitor thin film vacuum gauge.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention discloses a capacitor film vacuum gauge adjusting and measuring device, which can complete batch debugging work before packaging of a vacuum gauge, and is high in debugging efficiency and controllable in cost. In the device, a main vacuum chamber air exhaust assembly is connected with a main vacuum chamber through a first air exhaust connecting pipeline and used for maintaining the pressure of the main vacuum chamber in a background state; the test chamber air exhaust assembly is connected with each test chamber through a second air exhaust connecting pipeline and is used for maintaining the pressure of the test chambers in a background state; the gas distribution assembly is connected with each test chamber through a gas supply pipeline and is used for supplying gas to the test chambers; the test chambers are divided into different groups according to the measuring range of the tested vacuum gauge and are connected with the pressure sensors with the corresponding measuring ranges; each test chamber is provided with more than one vacuum gauge connecting end; the reference cavity of each tested vacuum gauge is connected with a corrugated pipe through a first connecting piece, and the corrugated pipes corresponding to all the tested vacuum gauges are connected into the main vacuum chamber; and the measuring cavity of the tested vacuum gauge is connected with the testing chamber with the corresponding measuring range through a second connecting piece.
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